CN116852091A - Centering device and method - Google Patents

Abstract

The application belongs to the technical field of coaxial adjusting equipment, and particularly relates to a centering device and a centering method. The centering device is used for adjusting coaxiality between the second centering piece and the first centering piece and comprises a first detection module, an adjusting module and a second detection module; the second centering piece is pre-fixed on the first centering piece to form a pre-connection workpiece group, and the pre-connection workpiece group can be placed on the adjusting module; the first detection module is used for detecting first coaxiality between the first centering piece and the adjusting module, and the second detection module is used for detecting second coaxiality between the second centering piece and the adjusting module; the adjusting module is arranged for adjusting the position of the pre-connected workpiece group according to the first coaxiality and for adjusting the position of the second centering piece according to the second coaxiality. The centering device can acquire a specific value of coaxiality through detecting and adjusting the position of the centering piece through matching of multiple modules, and the accuracy is higher.

Description

Centering device and method

Technical Field

The application belongs to the technical field of coaxial adjusting equipment, and particularly relates to a centering device and a centering method.

Background

In the field of scanning electron microscopy, the concentricity of assembly is required to be very high, usually several micrometers to tens of micrometers, when main parts inside the electron microscope are assembled.

As shown in fig. 1, in the prior art, only the first centering member A1 and the second centering member A2 are strung up from top to bottom by using the centering rod B, and then the fixing screw 201 is locked, thereby completing centering assembly of 2 workpieces. However, such centering does not allow to obtain a specific value of precision after centering;

in addition, the machining precision of the centering rod B is difficult to ensure, and the micropore diameter in the second centering member A2 is too small, and accordingly, the centering rod B has a smaller diameter and lower structural strength, and abrasion deformation may occur during frequent use, resulting in lower centering precision.

Disclosure of Invention

The application provides a centering device and a centering method, which are used for solving the technical problem that centering accuracy is low due to the adoption of a centering rod in the prior art.

According to one aspect of the present application, there is provided a centering device for adjusting coaxiality between a second centering member and a first centering member, the centering device including a first detection module, an adjustment module, and a second detection module; the second centering piece is pre-fixed on the first centering piece to form a pre-connection workpiece group, and the pre-connection workpiece group can be placed on the adjusting module; the first detection module is used for detecting first coaxiality between the first centering piece and the adjusting module, and the second detection module is used for detecting second coaxiality between the second centering piece and the adjusting module; the adjusting module is arranged for adjusting the position of the pre-connected workpiece group according to the first coaxiality and for adjusting the position of the second centering piece according to the second coaxiality.

In an alternative scheme of the application, the adjusting module comprises a rotating mechanism, a first adjusting mechanism and a second adjusting mechanism which are sequentially connected from bottom to top along the Z axis; the second adjusting mechanism is used for being connected with the pre-connected workpiece group, and the rotating mechanism can drive the first adjusting mechanism, the second adjusting mechanism and the pre-connected workpiece group to rotate around the Z axis; the first adjusting mechanism is used for driving the second adjusting mechanism to move so as to adjust the position of the pre-connected workpiece group according to the first coaxiality; the second adjusting mechanism is used for adjusting the position of the second centering piece according to the second coaxiality.

In an alternative scheme of the application, the second adjusting mechanism comprises a centering disc and a plurality of propping pieces, the first centering piece is connected to the centering disc, and the plurality of propping pieces are arranged at intervals along the circumference of the centering disc and are movably connected to the centering disc so as to clamp the second centering piece.

In an alternative aspect of the application, the first centering member is provided with a reference hole; the first detection module comprises a first supporting arm and a measuring tool, and the measuring tool is arranged on the first supporting arm; the measuring tool is arranged to detect a first degree of parallelism between the first centering member and the rotating mechanism by contacting an inner wall of the reference hole, and is further arranged to detect a degree of parallelism of the first centering member with respect to a horizontal plane by contacting a surface of the first centering member in the Z-axis.

In an alternative scheme of the application, the first centering piece is provided with a reference hole, and the second centering piece is provided with a centering hole; the second detection module comprises an image acquisition device and a focusing mechanism, the image acquisition device is used for acquiring the position of the centering hole so as to detect second coaxiality between the second centering piece and the adjusting module, and the focusing mechanism is used for adjusting the position of the image acquisition device on the Z axis so as to focus.

In an alternative aspect of the application, the centering device further comprises a third adjustment mechanism and a second support arm; the second supporting arm is connected with the third adjusting mechanism, and the second detection module is connected with the second supporting arm; the third adjusting mechanism is arranged to drive the second supporting arm to move so as to adjust the relative position of the second detecting module and the second centering piece.

According to another aspect of the present application, there is provided a centering method applied to the above centering device, the method comprising:

placing the pre-connected workpiece group on an adjusting module;

based on the first coaxiality detected by the first detection module, adjusting the position of the pre-connected workpiece group through a first adjusting mechanism until the first coaxiality is smaller than or equal to a first threshold;

and adjusting the position of the second centering piece through a second adjusting mechanism based on the second coaxiality detected by the second detecting module until the second coaxiality is smaller than or equal to a second threshold.

In an alternative aspect of the present application, before adjusting, by the first adjustment mechanism, the position of the pre-joined workpiece group based on the first concentricity detected by the first detection module until the first concentricity is less than or equal to the first threshold, the method further includes:

detecting the parallelism of the first centering piece relative to the horizontal plane through a first detection module;

and adjusting the position of the pre-connected workpiece group through a first adjusting mechanism based on the parallelism detected by the first detecting module until the parallelism is smaller than or equal to a third threshold value.

In an alternative scheme of the present application, the second centering piece is provided with a centering hole, and based on the second coaxiality detected by the second detection module, the position of the second centering piece is adjusted by the second adjustment mechanism until the second coaxiality is less than or equal to a second threshold value, including:

the position of the second centering piece is adjusted through the rotating mechanism, and the target position of the center of the centering hole is determined based on the position of the centering hole detected by the second detecting module;

determining second coaxiality according to the target position and the center position of the centering hole;

based on the target position and the second coaxiality, the position of the second centering piece is adjusted through the second adjusting mechanism, so that the center of the centering hole is close to the target position.

In an alternative scheme of the application, the position of the second centering piece is adjusted through the rotating mechanism, and the target position of the center of the centering hole is determined based on the position of the centering hole detected by the second detection module, and the method comprises the following steps:

the pre-connection workpiece group is driven to rotate to a first position through the rotating mechanism, and a first circle center position of the centering hole is detected through the second detection module;

the pre-connected workpiece group is driven to rotate to a second position through the rotating mechanism, and a second center position of the centering hole is detected through the second detection module;

the pre-connected workpiece group is driven to rotate to a third position through the rotating mechanism, and a third circle center position of the centering hole is detected through the second detection module;

and determining a fitting circle according to the first circle center position, the second circle center position and the third circle center position, wherein the circle center position of the fitting circle is the target position of the circle center of the centering hole.

In summary, the centering device and the centering method provided by the application have at least the following beneficial effects:

in the scheme provided by the application, the first centering piece and the second centering piece are subjected to coaxiality adjustment based on the adjusting module, and the first detecting module and the second detecting module are respectively matched with the adjusting module to obtain corresponding coaxiality data, and act on the pre-connected workpiece group through the adjusting module according to the coaxiality data to change positions, so that the first centering piece and the second centering piece are centered. The centering device can acquire a specific value of coaxiality through detecting and adjusting the position of the centering piece through matching of multiple modules, and the accuracy is higher.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It will be apparent to those skilled in the art that the drawings in the following description are of some embodiments of the application, and that other drawings may be obtained from these drawings without inventive effort.

FIG. 1 shows a schematic diagram of a prior art centering rod;

FIG. 2 is a schematic illustration of a centering device provided in accordance with one embodiment of the present application;

FIG. 3a is a schematic cross-sectional view of a pre-joined workpiece set provided in accordance with one embodiment of the application;

FIG. 3b is a cross-sectional view taken at C-C in FIG. 3 a;

FIG. 3c is a cross-sectional view taken at D-D in FIG. 3 a;

FIG. 4a is an assembled top view of a pre-connection work piece set and a second adjustment mechanism provided in accordance with one embodiment of the present application;

FIG. 4b is a cross-sectional view taken at E-E of FIG. 4 a;

FIG. 5 is a schematic diagram showing a portion of a centering device for parallelism detection according to an embodiment of the present application;

FIG. 6 is a schematic diagram illustrating a portion of a centering device for performing a first concentricity detection according to an embodiment of the present application;

FIG. 7 is a block diagram of steps of a centering method provided according to one embodiment of the present application;

fig. 8 shows an enlarged schematic view of the centering hole at different rotation angles.

The reference numerals are as follows: .

100. A centering device;

10. a first platform;

20. a first detection module; 21. a first support arm; 22. a measuring tool;

30. an adjustment module; 31. a rotation mechanism; 32. a first adjustment mechanism; 33. a second adjustment mechanism; 331. centering disc; 332. a pressing piece;

40. a second detection module; 41. an image acquisition device; 42. a focusing mechanism; 43. a display;

50. a second platform;

60. a third adjustment mechanism; 70. a second support arm;

201. a screw; 202. a pre-tightening spring;

a0, pre-connecting the workpiece groups; a1, a first centering piece; a2, a second centering piece; B. a centering rod; h1, reference holes; h2, mesopores.

Detailed Description

In the description of the present application, it should be understood that, if there are descriptions of terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating orientation or positional relationship, it should be understood that the orientation or positional relationship shown based on the drawings is merely for convenience of description and simplification of the description, and does not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the application.

Furthermore, the presence of features defining "first" and "second" for descriptive purposes only, should not be interpreted as indicating or implying a relative importance or implicitly indicating the number of features indicated. Features defining "first", "second" may include at least one such defined feature, either explicitly or implicitly. If a description of "a plurality" is present, the generic meaning includes at least two, e.g., two, three, etc., unless specifically defined otherwise.

In the present application, unless explicitly stated and limited otherwise, terms such as "mounted," "connected," "secured," and the like are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; the connection may be mechanical connection, electrical connection, direct connection, indirect connection through an intermediate medium, communication between two elements or interaction relationship between two elements. The specific meaning of the above terms in the present application can be understood by those skilled in the art according to the specific circumstances.

In the description of the present specification, the terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., as used herein, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Fig. 2 is a schematic diagram of a centering device 100 provided in accordance with one embodiment of the present application. Referring to fig. 2, the centering device 100 is used for adjusting the coaxiality between the second centering member A2 and the first centering member A1. The centering device 100 includes a first detection module 20, an adjustment module 30, and a second detection module 40.

The second centering member A2 is pre-fixed to the first centering member A1 forming a pre-joined set of workpieces A0, the pre-joined set of workpieces A0 being able to be placed on the adjustment module 30. Fig. 3a is a schematic cross-sectional view of a pre-joined workpiece set A0 provided in accordance with one embodiment of the present application, fig. 3b is a cross-sectional view at C-C in fig. 3a, and fig. 3C is a cross-sectional view at D-D in fig. 3 a.

Referring to fig. 3a to 3b, the first centering member A1 and the second centering member A2 are both solid of revolution parts, the same ends of the first centering member A1 and the second centering member A2 are both flange structures, the first centering member A1 and the second centering member A2 are spliced along the Z axis and are connected with each other, and are pre-fixed by the screw 201 in cooperation with the pre-tightening spring 202.

In the illustrated embodiment, 4 screws 201 are provided on the inside of the flange structure, wherein the opposing 2 screws 201 are each fitted with a pre-tension spring 202, and the other 2 screws 201 are not fitted with a pre-tension spring 202. In a specific application, 2 screws 201 matched with the pre-tightening spring 202 are locked (without locking), and the other 2 screws 201 are carried, so that the pre-fixing of the first centering piece A1 and the second centering piece A2 is completed.

After the second centering member A2 is pre-fixed to the first centering member A1, the second centering member A2 does not have the Z-axis movable degree of freedom, but has the X-axis and Y-axis movable degrees of freedom. It will be appreciated that the coaxiality adjustment can be performed by adjusting the relative position of the second centering member A2 on the XY axis plane.

Further, the first detecting module 20 is configured to detect a first coaxiality between the first centering member A1 and the adjusting module 30, and the second detecting module 40 is configured to detect a second coaxiality between the second centering member A2 and the adjusting module 30. The adjustment module 30 is arranged for adjusting the position of the pre-joined group of workpieces A0 according to the first coaxiality and for adjusting the position of the second centering member A2 according to the second coaxiality.

In this embodiment, after the second centering member A2 is mounted on the first centering member A1, a pre-connection workpiece set A0 is formed, and the first centering member A1 in the pre-connection workpiece set A0 is mounted on the adjustment module 30, so that the pre-connection workpiece set A0 is disposed on the adjustment module 30.

The adjustment module 30 is capable of providing a plurality of degrees of freedom of movement to adjust the position of the pre-joined workpiece set A0, including a first coaxiality between the first centering member A1 and the adjustment module 30 and a second coaxiality between the second centering member A2 and the adjustment module 30. The first coaxiality is detected by the first detection module 20 and the second coaxiality is detected by the second detection module 40.

In this embodiment, the first centering member A1 and the second centering member A2 perform coaxiality adjustment based on the adjustment module 30, specifically, the first detection module 20 and the second detection module 40 are respectively matched with the adjustment module 30 to obtain corresponding coaxiality data, and act on the pre-connection workpiece set A0 through the adjustment module 30 according to the coaxiality data to change positions, so as to center the first centering member A1 and the second centering member A2. Compared with the technical scheme that the centering rod B is adopted to perform centering in the prior art, the centering device 100 can acquire a specific value of coaxiality through multi-module matching detection and adjustment of the position of the centering piece, and the accuracy is higher.

In some alternative embodiments, adjustment module 30 includes a rotation mechanism 31, a first adjustment mechanism 32, and a second adjustment mechanism 33 that are sequentially connected from bottom to top along the Z-axis. The rotation mechanism 31 can provide a degree of freedom in rotation about the Z axis. The second adjusting mechanism 33 is used for being connected to the pre-connected workpiece set A0, and the rotating mechanism 31 can drive the first adjusting mechanism 32, the second adjusting mechanism 33 and the pre-connected workpiece set A0 to rotate around the Z axis.

In the process of driving the pre-connection workpiece set A0 to rotate around the Z axis by the rotation mechanism 31, the first detection module 20 and the second detection module 40 detect the workpiece, so as to obtain the first coaxiality and the second coaxiality.

The first adjusting mechanism 32 is used for driving the second adjusting mechanism 33 to move so as to adjust the position of the pre-connected workpiece group A0 according to the first coaxiality. Specifically, the rotation mechanism 31 may determine, by the first detection module 20, a deviation between the axis of the first centering piece A1 and the rotation center of the rotation mechanism 31, that is, a first concentricity, during rotation of the pre-connection workpiece group A0. The first adjusting mechanism 32 then adjusts the position of the second adjusting mechanism 33 so as to change the position of the pre-joined work group A0, that is, the position of the first centering member A1, such that the axial center of the first centering member A1 is as close as possible to the rotation center of the rotating mechanism 31.

The second adjusting mechanism 33 is used for adjusting the position of the second centering piece A2 according to the second coaxiality. Specifically, the rotation mechanism 31 determines, by the second detection module 40, a deviation between the axis of the second centering piece A2 and the rotation center of the rotation mechanism 31, that is, the second coaxiality, in the process of rotating the pre-joined workpiece group A0.

As is clear from the foregoing, the second centering member A2 in the pre-joined workpiece group A0 has a degree of freedom of movement in the XY axis plane, and the position of the second centering member A2 in the XY axis plane can be adjusted by the second adjusting mechanism 33. In the case of determining the second coaxiality, the position of the second centering member A2 is adjusted by the second adjusting mechanism 33 so that the axial center of the second centering member A2 is as close as possible to the rotation center of the rotating mechanism 31.

It can be seen that in the present embodiment, the centering is performed based on the rotation center of the rotation mechanism 31 in the adjustment module 30 during the centering.

In some alternative embodiments, the rotation mechanism 31 may employ, for example, a turntable, or the like. The first adjustment mechanism 32 may employ a multi-axis slide.

Fig. 4a is an assembled top view of the pre-connection work piece set A0 and the second adjustment mechanism 33 according to one embodiment of the present application, and fig. 4b is a cross-sectional view at E-E in fig. 4 a. Referring to fig. 4a to 4b, in some alternative embodiments, the second adjusting mechanism 33 includes a centering disc 331 and a plurality of pressing members 332, wherein the first centering member A1 is connected to the centering disc 331, and the plurality of pressing members 332 are disposed at intervals along an axial direction of the centering disc 331 and are movably connected to the centering disc 331 so as to clamp the second centering member A2.

Since the second centering member A2 is connected to the first centering member A1, the pre-connection work piece set A0 is fixed to the centering plate 331 immediately after the first centering member A1 is mounted to the centering plate 331. In the present embodiment, the centering disc 331 has a flange structure, and the pressing members 332 are symmetrically disposed about the center of the centering disc 331, so that the direction of the acting force of each pressing member 332 on the second centering member A2 is uniformly distributed to stably clamp the second centering member A2. It will be appreciated that by adjusting the relative positions of each of the pressing members 332 and the centering disc 331, the position of the second centering member A2 can be changed in the XY axis plane to adjust the second coaxiality.

In the embodiment shown in fig. 4, 4 screws 201 are provided on the outer side of the flange structure end in the first centering member A1 to connect with the centering disc 331, and the number of the pressing members 332 is 4 and is arranged symmetrically in the center. In particular applications, the bias 332 may be, for example, a jackscrew, screw, differential head, or the like.

Referring to fig. 2 and 3b, in further alternative embodiments, the first centering member A1 is provided with a reference hole H1, and the first detection module 20 includes a first support arm 21 and a measurement tool 22, and the measurement tool 22 is mounted on the first support arm 21. In some embodiments, the first support arm 21 is formed by sequentially connecting a plurality of arm segments, each arm segment is movably connected, the measuring tool 22 is disposed on the tail arm segment, and the position of the measuring tool 22 can be adjusted by adjusting the posture of each arm segment, so that the measuring tool 22 can be abutted against the first centering member A1.

In a specific application, the first support arm 21 may be a universal arm, and the measuring tool 22 may be a dial gauge, although not limited thereto.

FIG. 5 shows a partial schematic view of the centering device 100 for parallelism detection; fig. 6 shows a partial schematic view of the centering device 100 for a first concentricity detection. Referring to fig. 5 and 6, the measuring tool 22 is configured to detect the first coaxiality between the first centering member A1 and the adjusting module 30 by contacting the inner wall of the reference hole H1, and the measuring tool 22 is further configured to detect the parallelism of the first centering member A1 with respect to the horizontal plane by contacting the surface of the first centering member A1 on the Z axis.

In the present embodiment, the first centering member A1 is provided with a coaxially penetrating reference hole H1, and the rotation mechanism 31 determines the deviation between the axis of the reference hole H1 and the rotation center of the rotation mechanism 31, i.e., the first concentricity, by measuring the fluctuation value obtained by the abutment of the tool 22 against the inner wall of the reference hole H1 during rotation.

Further, the rotation mechanism 31 determines the parallelism of the first centering member A1 with respect to the horizontal plane by measuring the fluctuation value obtained by the surface of the tool 22 abutting against the first centering member A1 in the Z axis during rotation. The horizontal plane in the present application means the XY axis plane.

In the illustrated embodiment, the measuring tool 22 is a dial indicator, and in the process of detecting levelness, the probe of the measuring tool 22 abuts against the upper end surface of the first centering member A1, and the parallelism can be determined by acquiring corresponding fluctuation values through the dial of the measuring tool 22 as the rotating mechanism 31 rotates. In the process of detecting the first concentricity, the probe of the measuring tool 22 is abutted against the inner wall of the reference hole H1, and the first concentricity can be determined by acquiring a corresponding fluctuation value through the dial of the measuring tool 22 as the rotating mechanism 31 rotates.

It should be understood that the first adjusting mechanism 32 may be used to adjust the position of the second adjusting mechanism 33 and drive the pre-connected workpiece set A0, so as to change the position of the first centering member A1, thereby achieving the adjustment of the parallelism and the first concentricity.

It can be appreciated that since the corresponding fluctuation value is obtained through the upper end surface of the first centering member A1 and the inner peripheral wall of the reference hole H1, there is a high requirement on the flatness of the upper end surface of the first centering member A1 and the inner peripheral wall of the reference hole H1 to ensure the accuracy of the obtained corresponding parameter.

Referring to fig. 2, in some alternative embodiments, the first centering member A1 is provided with a reference hole H1 and the second centering member A2 is provided with a centering hole H2. The second detection module 40 includes an image acquisition device 41 and a focusing mechanism 42, the image acquisition device 41 is used for acquiring the position of the centering hole H2 to detect the second coaxiality between the second centering member A2 and the adjustment module 30, and the focusing mechanism 42 is used for adjusting the position of the image acquisition device 41 on the Z axis to focus.

In the present embodiment, the second centering member A2 is provided with the centering hole H2 that is coaxially penetrated, in order to ensure that the image pickup device 41 can acquire the image data of the centering hole H2, the projection of the reference hole H1 in the Z-axis direction covers at least the centering hole H2, that is, the image pickup device 41 can observe the centering hole H2 through the reference hole H1, thereby acquiring the image data of the centering hole H2 to determine the position thereof.

The focusing mechanism 42 is used to change the Z-axis position of the image pickup device 41 to perform focusing so that the image pickup device 41 can pick up clear image data of the center hole H2.

It should be understood that, since the first centering member A1 and the second centering member A2 are spliced in the Z axis, the second centering member A2 also satisfies the parallelism condition under the condition that the parallelism of the first centering member A1 is determined to satisfy the requirement, so that the accuracy of the detected coaxiality data can be ensured.

In some alternative embodiments, the second detection module 40 further includes a display 43 and a processor (not shown) that can acquire the image data of the middle hole H2 acquired by the image acquisition device 41 and transmit the image data to the display 43 for enlarged display on the display 43.

In the present embodiment, the mesopores H2 have a microporous structure, and thus, the image acquisition device 41 can employ a microscope to magnify the mesopores H2.

In some alternative embodiments, centering device 100 also includes a third adjustment mechanism 60 and a second support arm 70. The second support arm 70 is connected to the third adjustment mechanism 60, and the second detection module 40 is connected to the second support arm 70. The third adjusting mechanism 60 is configured to move the second support arm 70 to adjust the position of the second detecting module 40 to facilitate capturing image data.

In this embodiment, the second support arm 70 is formed by sequentially movably connecting a plurality of arm segments, and the second support arm 70 is used for supporting the second detection module 40, and the position of the second detection module 40 can be changed by adjusting the positions of the arm segments, so as to coarsely adjust the position of the second detection module 40.

The second support arm 70 is mounted on the third adjustment mechanism 60, and the position of the second detection module 40 is changed by adjusting the position of the second support arm 70 by the third adjustment mechanism 60, thereby finely adjusting the position of the second detection module 40.

In the illustrated embodiment, the image capture device 41 and the focus mechanism 42 in the second detection module 40 are both disposed on the second support arm 70. For easy understanding of the present solution, the image acquisition device 41 is taken as a microscope, and the focusing mechanism 42 includes a focusing motor for adjusting the position of the microscope on the Z axis, so as to illustrate how to acquire the image of the center hole H2, which is described in detail as follows:

the second support arm 70 may be moved to move the microscope over the pre-attached workgroup A0, then the microscope is set to a low power, and then the focusing motor is controlled to change the position of the microscope on the Z-axis until the centering hole H2 is visible on the display 43. Then, the third adjusting mechanism 60 is adjusted to move the second supporting arm 70 to drive the microscope until the centering hole H2 appears at the center of the display 43, and then the magnification of the microscope is adjusted, and the focusing motor is adjusted to control the position of the microscope on the Z axis until the contour of the centering hole H2 is most clearly shown at the center of the display 43.

In this embodiment, the second support arm 70 may be a universal arm, and the third adjustment mechanism 60 may be a multi-axis sliding table with 6 degrees of freedom, so as to ensure that the image capturing device 41 faces the center hole H2 in the Z-axis direction.

In some alternative embodiments, centering device 100 further comprises a first platform 10, and adjustment module 30, first detection module 20, and third adjustment mechanism 60 are all disposed on first platform 10. It should be noted that, since the second detecting module 40 is connected to the third adjusting mechanism 60 through the second supporting arm 70, each component of the centering device 100 is based on the layout of the first platform 10 to ensure the accuracy of the subsequent detecting parameters.

In some alternative embodiments, the centering device 100 further includes a first platform 10 and a second platform 50, the third adjusting mechanism 60 is disposed on the second platform 50, and the adjusting module 30 and the first detecting module 20 are disposed on the first platform 10. In this way, the image capturing function related components for detecting the second coaxiality in the centering device 100 are integrated on the second platform 50, the related components for detecting the levelness and the first coaxiality in the centering device 100 are integrated on the first platform 10, and the first platform 10 and the second platform 50 are integrated with different functional modules, so that the flexibility is higher.

It should be appreciated that the first platform 10 and the second platform 50 are platforms having a high level of precision, including, for example, an optical platform desktop, a marble platform desktop, and the like.

Fig. 7 is a block diagram illustrating steps of a centering method according to one embodiment of the present application. Referring to fig. 7, the present application further provides a centering method, which is implemented based on the above-mentioned centering device and includes:

in step S10, the pre-connection work piece set A0 is placed on the adjustment module 30.

In an alternative embodiment, the pre-connection work piece set A0 is pre-fixed by the second centering member A2 and the first centering member A1 by means of the screw 201 and the pre-tightening spring 202 (described in detail previously), the adjustment module 30 comprises a rotation mechanism 31, a first adjustment mechanism 32 and a second adjustment mechanism 33, the second adjustment mechanism 33 comprising a centering disc 331 and a plurality of thrusting members 332. The first centering member A1 is fixed to the centering plate 331 so as to mount the pre-joined workpiece group A0 to the second adjusting mechanism 33.

In step S20, based on the first detection module 20 detecting the first concentricity, the first adjustment mechanism 32 adjusts the position of the first centering piece A1 to be pre-connected with the workpiece group A0 until the first concentricity is less than or equal to the first threshold.

In an alternative embodiment, the first detection module 20 comprises a first support arm 21 and a measuring tool 22, the first centering piece A1 being provided with a reference hole H1 coaxially through. The measuring tool 22 is abutted against the inner wall of the reference hole H1, the rotating mechanism 31 is controlled to drive the pre-connection workpiece set A0 to rotate, so as to obtain a fluctuation value of the measuring tool 22, wherein the fluctuation value is the first coaxiality, and under the condition that the fluctuation value is larger than a first threshold value, the first adjusting mechanism 32 is adjusted to change the position of the pre-connection workpiece set A0, so that the fluctuation value is reduced, namely, the axle center of the first centering piece A1 is made to be as close to the rotating center of the rotating mechanism 31 as possible until the fluctuation value is not larger than the first threshold value, namely, the first coaxiality is smaller than or equal to the first threshold value.

In this embodiment, the first threshold is 1 μm, i.e. the first concentricity is less than or equal to 1 μm.

In step S30, the position of the second centering member A2 is adjusted by the second adjusting mechanism 33 based on the second detection module 40 detecting the second coaxiality until the second coaxiality is less than or equal to the second threshold.

In an alternative embodiment, the second detection module 40 includes an image capturing device 41 and a focusing mechanism 42, and the second centering member A2 is provided with a centering hole H2 that is coaxially penetrated, so that the second detection module 40 can acquire image data of the centering hole H2 to determine the position of the centering hole H2, and further determine the deviation between the axis of the centering hole H2 and the rotation center of the rotation mechanism 31, that is, the second coaxiality.

According to the position of the centering hole H2, the position of the second centering member A2 clamped between the plurality of pressing members 332 is changed by adjusting the positions of the plurality of pressing members 332 with respect to the centering plate 331, so that the axis of the centering hole H2 is as close to the rotation center of the rotation mechanism 31 as possible until the second coaxiality is less than or equal to the second threshold.

When the first concentricity is not greater than the first threshold value, the axis of the reference hole H1 may be considered to be concentric with the rotation center of the rotation mechanism 31; when the second coaxiality is not greater than the second threshold value, the center of the center hole H2 and the rotation center of the rotation mechanism 31 can be considered concentric, and thus the center hole H2 and the reference hole H1 are centered.

It should be appreciated that when the first adjustment mechanism 32 changes the position of the pre-joined workpiece set A0, the relative positions of the first centering member A1 and the rotation mechanism 31 may be changed to perform the first concentricity adjustment, however, in this process the second centering member A2 also moves synchronously with the first centering member A1. It can be seen that, in the case that the first coaxiality needs to be adjusted first so that the first coaxiality meets the condition, the position of the second centering member A2 is adjusted to adjust the second coaxiality.

In this embodiment, the second threshold is 10 μm, i.e. the second coaxiality is less than or equal to 10 μm. In order to ensure accuracy of the detected coaxiality data, it is necessary to ensure parallelism between the pre-joined workpiece group A0 and the horizontal plane (XY axis plane). In some alternative embodiments, prior to step S20, further comprising:

in step S11, the parallelism of the first centering member A1 with respect to the horizontal plane is detected by the first detection module 20.

In some alternative embodiments, the centering device 100 includes a first platform 10 on which the first detection module 20 and the adjustment module 30 are mounted. In the rotation process of the rotation mechanism 31, the measuring tool 22 in the first detection module 20 is abutted against the upper end surface of the first centering member A1, and the parallelism between the upper end surface of the first centering member A1 and the tabletop (horizontal plane) of the first platform 10, that is, the parallelism of the first centering member A1 relative to the horizontal plane can be determined by acquiring the fluctuation value of the measuring tool 22.

In step S12, the position of the pre-connected workpiece set A0 is adjusted by the first adjusting mechanism 32 based on the parallelism detected by the first detecting module 20 until the parallelism is equal to or less than the third threshold.

Specifically, in the case where it is determined that the parallelism is greater than the third threshold value, the position of the pre-joined workpiece group A0, that is, the position of the centering piece A1 is continuously adjusted by the first adjusting mechanism 32 until the parallelism is not greater than the third threshold value.

In this embodiment, the third threshold is 1 μm, i.e. the parallelism is less than or equal to 1 μm. That is, the pre-connection work set A0 can be placed horizontally through the steps S11 to S12. In a specific application, the first adjusting mechanism 32 is a 5-degree-of-freedom multi-axis sliding table (the degree of freedom of rotation about the Z axis is provided by the rotating mechanism 31), so that the adjustment of parallelism and coaxiality can be achieved.

In some alternative embodiments, step S30 includes:

in step S31, the position of the second centering member A2 is adjusted by the rotation mechanism 31, and the target position of the center of the centering hole H2 is determined based on the position of the centering hole H2 detected by the second detection module 40.

In the present embodiment, the target position of the center hole H2 is the rotation center position of the rotation mechanism 31. In an alternative embodiment, the second detection module 40 includes an image acquisition device 41, and the contour of the centering hole H2 and the center position of the centering hole H2 can be determined by the image acquisition device 41. Before the second centering member A2 is centered, the centering hole H2 is offset from the rotation mechanism 31, and the rotation mechanism 31 can acquire a plurality of center positions of the centering hole H2 at different rotation angles, so that the target position can be determined by the plurality of center positions.

And S32, determining the second coaxiality according to the target position and the center position of the centering hole H2.

It should be understood that the distance between the center position of the center hole H2 and the target position is the second coaxiality. In a specific application, distances between a plurality of center positions of the centering hole H2 and the target positions are determined respectively and averaged to determine the second coaxiality.

In step S33, the position of the second centering member A2 is adjusted by the second adjusting mechanism 33 based on the target position and the second coaxiality, so that the center of the centering hole H2 is close to the target position.

Specifically, after the target position and the second coaxiality are determined, in the case where the second coaxiality is greater than the second threshold, the position of the second centering member A2 is changed by adjusting the pressing member 332 so that the center of the centering hole H2 is close to the target position.

It should be understood that, repeating the above steps S31 to S33, the adjustment may be performed multiple times so that the second coaxiality is not greater than the second threshold.

In some alternative embodiments, step S31 includes:

step S311, driving the pre-connected workpiece group A0 to rotate to a first position through the rotating mechanism 31, and detecting a first circle center position of the centering hole H2 through the second detection module 40;

step S312, driving the pre-connection workpiece group A0 to rotate to a second position through the rotating mechanism 31, and detecting a second center position of the centering hole H2 through the second detection module 40;

step S313, driving the pre-connection workpiece set A0 to rotate to a third position by the rotation mechanism 31, and detecting a third center position of the center hole H2 by the second detection module 40;

step S314, determining a fitting circle according to the first circle center position, the second circle center position and the third circle center position, wherein the circle center position of the fitting circle is the target position of the center of the centering hole H2.

It should be understood that three points can be fitted to form a circle, and the center position of the fitted circle is the target position. In other words, at least the center position of the center hole H2 at 3 rotation angles needs to be acquired in step S31, so that the fitted circle can be obtained.

In order to facilitate understanding of the present solution, the following description is given with reference to fig. 8. Fig. 8 shows an enlarged schematic diagram of the centering hole H2 at different rotation angles, wherein the circle center O1 corresponds to the circle center of the centering hole H2 at the position 1, the circle center O2 corresponds to the circle center of the centering hole H2 at the position 2, the circle center O3 corresponds to the circle center of the centering hole H3 at the position 3, the circle is fitted through the circle center O1, the circle center O2 and the circle center O3, and the circle center O0 of the fitted circle is determined, and the circle center O0 of the fitted circle is the target position (rotation center position). The distances between the circle center O1, the circle center O2, the circle center O3 and the circle center O0 are the second coaxiality, namely the radius of the fitting circle.

Under the condition that the second coaxiality is smaller than the second threshold, the pressing piece 332 can be locked to fix the second centering piece A2, then 2 screws 201 which are not matched with the pre-tightening spring 202 at the inner side are locked, then the rest 2 screws at the inner side are loosened to take out the pre-tightening spring 202, and then the 2 screws 201 are reloaded and locked, so that the centering assembly of the first centering piece A1 and the second centering piece A2 can be completed.

In summary, by the centering device 100 and applying the centering method, the centering precision of component assembly can be controlled to be 10 micrometers, so that the centering precision of component assembly is greatly improved, particularly, the assembly precision of a scanning electron microscope is improved for the assembly of the scanning electron microscope, and the imaging quality and stability of the scanning electron microscope are ensured.

While embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives, and variations may be made to the above embodiments by those skilled in the art within the scope of the application.

Claims (10)

1. A centering device for adjusting coaxiality between a second centering piece and a first centering piece, which is characterized by comprising a first detection module, an adjusting module and a second detection module;

the second centering piece is pre-fixed on the first centering piece to form a pre-connected workpiece group, and the pre-connected workpiece group can be placed on the adjusting module;

the first detection module is used for detecting first coaxiality between the first centering piece and the adjusting module, and the second detection module is used for detecting second coaxiality between the second centering piece and the adjusting module;

the adjusting module is arranged for adjusting the position of the pre-connected workpiece group according to the first coaxiality and for adjusting the position of the second centering piece according to the second coaxiality.

2. The centering device of claim 1, wherein,

the adjusting module comprises a rotating mechanism, a first adjusting mechanism and a second adjusting mechanism which are sequentially connected from bottom to top along a Z axis;

the second adjusting mechanism is used for being connected with the pre-connected workpiece group, and the rotating mechanism can drive the first adjusting mechanism, the second adjusting mechanism and the pre-connected workpiece group to rotate around the Z axis;

the first adjusting mechanism is used for driving the second adjusting mechanism to move so as to adjust the position of the pre-connected workpiece group according to the first coaxiality;

the second adjusting mechanism is used for adjusting the position of the second centering piece according to the second coaxiality.

3. The centering device of claim 2, wherein the second adjustment mechanism includes a centering disc to which the first centering member is coupled and a plurality of pressing members disposed at intervals along a circumference of the centering disc and movably coupled to the centering disc to clamp the second centering member.

4. The centering device of claim 2, wherein,

the first centering piece is provided with a reference hole;

the first detection module comprises a first supporting arm and a measuring tool, and the measuring tool is mounted on the first supporting arm;

the measuring tool is arranged to detect a first concentricity between the first centering member and the rotation mechanism by contacting an inner wall of the reference hole, and is further arranged to detect parallelism of the first centering member with respect to a horizontal plane by contacting a surface of the first centering member on the Z-axis.

5. The centering device of claim 1, wherein,

the first centering piece is provided with a reference hole, and the second centering piece is provided with a centering hole;

the second detection module comprises an image acquisition device and a focusing mechanism, the image acquisition device is used for acquiring the position of the centering hole to detect second coaxiality between the second centering piece and the adjusting module, and the focusing mechanism is used for adjusting the position of the image acquisition device on the Z axis to focus.

6. The centering device of claim 1, wherein,

the centering device further comprises a third adjusting mechanism and a second supporting arm;

the second supporting arm is connected to the third adjusting mechanism, and the second detection module is connected to the second supporting arm;

the third adjusting mechanism is arranged to drive the second supporting arm to move so as to adjust the relative position of the second detecting module and the second centering piece.

7. A centering method, applied to a centering device according to any one of claims 2 to 4, comprising:

placing the pre-connected workpiece group on the adjusting module;

based on the first coaxiality detected by the first detection module, adjusting the position of the pre-connected workpiece group through the first adjusting mechanism until the first coaxiality is smaller than or equal to a first threshold;

and adjusting the position of the second centering piece through the second adjusting mechanism based on the second coaxiality detected by the second detecting module until the second coaxiality is smaller than or equal to a second threshold.

8. The centering method of claim 7, wherein before adjusting the position of the pre-joined group of workpieces by the first adjustment mechanism based on the first degree of concentricity detected by the first detection module until the first degree of concentricity is less than or equal to a first threshold, the method further comprises:

detecting parallelism of the first centering piece relative to a horizontal plane through the first detection module;

and adjusting the position of the pre-connected workpiece group through the first adjusting mechanism based on the parallelism detected by the first detecting module until the parallelism is smaller than or equal to a third threshold value.

9. The centering method of claim 7, wherein the second centering member is provided with a centering hole, and the adjusting the position of the second centering member by the second adjustment mechanism based on the second coaxiality detected by the second detection module until the second coaxiality is less than or equal to a second threshold value comprises:

the position of the second centering piece is adjusted through the rotating mechanism, and the target position of the center of the centering hole is determined based on the position of the centering hole detected by the second detection module;

determining the second coaxiality according to the target position and the center position of the centering hole;

and adjusting the position of the second centering piece through the second adjusting mechanism based on the target position and the second coaxiality so as to enable the center of the centering hole to be close to the target position.

10. The centering method as claimed in claim 9, wherein the adjusting the position of the second centering member by the rotation mechanism and determining the target position of the center of the centering hole based on the position of the centering hole detected by the second detection module includes:

the pre-connection workpiece group is driven to rotate to a first position through the rotating mechanism, and a first circle center position of the centering hole is detected through the second detection module;

the pre-connected workpiece group is driven to rotate to a second position through the rotating mechanism, and a second circle center position of the centering hole is detected through the second detection module;

the pre-connected workpiece group is driven to rotate to a third position through the rotating mechanism, and a third circle center position of the centering hole is detected through the second detection module;

and determining a fitting circle according to the first circle center position, the second circle center position and the third circle center position, wherein the circle center position of the fitting circle is the target position of the circle center of the centering hole.