CN116837335A - Water return device and magnetron sputtering equipment - Google Patents

Water return device and magnetron sputtering equipment Download PDF

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Publication number
CN116837335A
CN116837335A CN202310741065.0A CN202310741065A CN116837335A CN 116837335 A CN116837335 A CN 116837335A CN 202310741065 A CN202310741065 A CN 202310741065A CN 116837335 A CN116837335 A CN 116837335A
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CN
China
Prior art keywords
water return
water
pipe
hole
outer plate
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310741065.0A
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Chinese (zh)
Inventor
李细柳
朱正尧
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Shenzhen Keheshengye Technology Co ltd
Dongguan Kesheng Electromechanical Equipment Co ltd
Original Assignee
Shenzhen Keheshengye Technology Co ltd
Dongguan Kesheng Electromechanical Equipment Co ltd
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Application filed by Shenzhen Keheshengye Technology Co ltd, Dongguan Kesheng Electromechanical Equipment Co ltd filed Critical Shenzhen Keheshengye Technology Co ltd
Priority to CN202310741065.0A priority Critical patent/CN116837335A/en
Publication of CN116837335A publication Critical patent/CN116837335A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a water return device and magnetron sputtering equipment; the water return device comprises a water return pipe, and a first connecting end and a second connecting end which are positioned at two ends of the water return pipe; the water return pipe comprises a water inlet hole and a water pipe water return hole, and the water inlet hole penetrates through the water return pipe, the first connecting end and the second connecting end; the first connecting end comprises a first outer plate and a first inner plate, a first water return cavity is formed between the first outer plate and the first inner plate, and a plurality of first water return holes are formed in the edge of the first outer plate; the second connecting end comprises a second outer plate and a second inner plate, a second water return cavity is arranged between the second outer plate and the second inner plate, and a second water return hole is formed in the second outer plate; and when water flows back, the water flows out through the first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole in sequence. The height of water in the sealed shell is improved, so that the whole sealed shell can be fully filled with water, air is prevented from remaining in the sealed shell, and the cooling effect on the sputtering cathode is improved.

Description

Water return device and magnetron sputtering equipment
Technical Field
The invention relates to the technical field of magnetron sputtering, in particular to a water return device and magnetron sputtering equipment.
Background
The magnetron sputtering is superior to other film deposition technologies, because the magnetron sputtering can prepare a large amount of films at extremely low cost, is very suitable for high-melting-point materials which cannot be evaporated, and is a technology capable of forming a very compact film with good adhesion, and the working principle of the magnetron sputtering is that electrons collide with argon atoms in the process of flying to a substrate under the action of an electric field E, so that Ar positive ions and new electrons are generated by ionization of the electrons; the new electrons fly to the substrate, ar positive ions fly to the cathode target in an accelerating way under the action of an electric field, and bombard the surface of the target with high energy, so that the target material is sputtered. The electrons fly to the substrate to cause the temperature of the substrate to rise, and the quality of a coating film can be influenced, so that a water return device is usually arranged in the magnetron sputtering equipment to cool the sputtering cathode, the sputtering cathode comprises a sealed shell connected with the water return device, the water return holes of the existing water return device are usually distributed in the middle of a water return pipe, a larger space is reserved between the uppermost water return hole and the sealed shell, and when the uppermost water return hole is covered by water, more air exists in the space between the uppermost water return hole and the sealed shell and cannot be discharged. So that the water can not be fully distributed in the whole sealed shell, and the cooling effect on the sputtering cathode is poor.
Disclosure of Invention
The invention mainly solves the technical problem of providing a water return device, and solves the problem that water cannot be distributed in the whole sealed shell and the cooling effect on a sputtering cathode is poor.
In order to solve the technical problems, the invention adopts a technical scheme that the water return device comprises a water return pipe, and a first connecting end and a second connecting end which are positioned at two ends of the water return pipe; the water return pipe comprises a water inlet hole and a water pipe water return hole, and the water inlet hole penetrates through the water return pipe, the first connecting end and the second connecting end; the water inlet hole is used for connecting with a water inlet pipe; the first connecting end comprises a first outer plate and a first inner plate, a first water return cavity is formed between the first outer plate and the first inner plate, and a plurality of first water return holes are formed in the edge of the first outer plate; the second connecting end comprises a second outer plate and a second inner plate, a second water return cavity is arranged between the second outer plate and the second inner plate, and a second water return hole is formed in the second outer plate; the second water return hole is used for connecting a drain pipe; the first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole are communicated; the water flow sequentially passes through the second connecting end, the water return pipe and the first connecting end from the water inlet hole, and flows out sequentially through the first water return hole, the first water return cavity, the water return hole of the water pipe, the second water return cavity and the second water return hole when the water flow returns.
Preferably, the first outer plate and the first inner plate are both independent structures, the first inner plate comprises an inner plate part and an extension part, the extension part is positioned at the outer edge of the inner plate part and extends towards the direction of the first outer plate, and a first water return cavity is formed by enclosing between the first outer plate and the first inner plate.
Preferably, the first outer plate is matched with a sealing shell connected with the first outer plate, the first outer plate is clamped in the end part of the sealing shell, and the first outer plate is connected with the sealing shell in a sealing way; the first water return hole is adjacent to the top of the inner wall of the sealed housing.
Preferably, the middle part of the first inner plate is provided with a first middle hole which is correspondingly communicated with the water inlet hole, a plurality of petal-shaped bulges are arranged on the periphery of the first middle hole in a surrounding manner, the petal-shaped bulges are used for connecting the first outer plate, a first side hole is arranged between the adjacent petal-shaped bulges, and the first side hole is correspondingly communicated with the water return hole of the water pipe.
Preferably, the water return pipe is of an integrated structure, one water inlet hole is formed, and the water inlet hole is transversely formed in the middle of the water return pipe; the water pipe backwater holes are arranged in a plurality of water pipe backwater holes and are transversely arranged in the pipe wall of the backwater pipe; the water return holes of the water pipes are uniformly distributed at the outer edge of the pipe wall of the water return pipe.
Preferably, the second outer plate and the second inner plate are of an integral structure; the second inner plate is connected with the water return pipe, and the second outer plate comprises an outer plate part and an inner extension part, and the inner extension part is arranged at the edge of the outer plate part and extends towards the direction of the second inner plate; the second outer plate and the second inner plate are enclosed to form a second water return cavity.
Preferably, the first water return holes are arranged in a plurality of ways and uniformly distributed on the edge of the first outer plate.
Preferably, the cross-sectional shape of the first connecting end and the second connecting end is larger than the cross-sectional shape of the return pipe.
Preferably, the water return pipe is of a double-layer structure and comprises a water return inner pipe and a water return outer pipe, the water inlet is arranged on the water return inner pipe, a gap is arranged between the water return inner pipe and the water return outer pipe, and the gap is a water return hole of the water pipe.
The invention also provides magnetron sputtering equipment which comprises the water return device.
The beneficial effects of the invention are as follows: according to the invention, the first water return hole is arranged at the edge of the first outer plate, so that the distance between the first water return hole and the sealing shell can be reduced, the height of water in the sealing shell is increased, and the water enters the sealing shell from the water inlet hole. After cooling the target material and the like in the sealed shell, water flows out from the first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole.
Drawings
FIG. 1 is a schematic diagram of a structure according to an embodiment of the invention;
FIG. 2 is a schematic diagram of a structure at a second connection end according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a front view of a first connection end according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a front view of a second connection end according to an embodiment of the present invention;
FIG. 5 is a schematic view showing the structure of a first inner panel according to an embodiment of the present invention;
FIG. 6 is a schematic view showing the structure of the return pipe and the second connection end according to an embodiment of the present invention;
FIG. 7 is a schematic view of the cross-sectional structure in the direction A-A of FIG. 1;
FIG. 8 is a schematic cross-sectional view of the structure in the direction B-B in FIG. 1;
FIG. 9 is a schematic view of the water flow direction according to an embodiment of the present invention;
fig. 10 is a schematic cross-sectional view of a return pipe according to another embodiment of the present invention.
Detailed Description
In order that the invention may be readily understood, a more particular description thereof will be rendered by reference to specific embodiments that are illustrated in the appended drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used in this specification includes any and all combinations of one or more of the associated listed items.
Fig. 1 to 9 show an embodiment of a water return device according to the present invention, which comprises a water return pipe 3, and a first connection end 1 and a second connection end 2 positioned at two ends of the water return pipe 3; the water return pipe 3 comprises a water inlet hole 31 and a water pipe water return hole 32, and the water inlet hole 31 penetrates through the water return pipe 3, the first connecting end 1 and the second connecting end 2; the water inlet hole 31 is used for connecting a water inlet pipe (not shown in the figure); the first connecting end 1 comprises a first outer plate 11 and a first inner plate 12, a first water return cavity 13 is formed between the first outer plate 11 and the first inner plate 12, and a plurality of first water return holes 111 are formed in the edge of the first outer plate 11; the second connecting end 2 comprises a second outer plate 21 and a second inner plate 22, a second water return cavity 23 is arranged between the second outer plate 21 and the second inner plate 22, and a second water return hole 211 is arranged on the second outer plate 21; the second water return hole 211 is used for connecting a water discharge pipe (not shown in the figure); the first water return hole 111, the first water return cavity 13, the water pipe water return hole 32, the second water return cavity 23 and the second water return hole 211 are communicated; the water flow enters from the water inlet hole 31 through the second connecting end 2, the water return pipe 3 and the first connecting end 1 in sequence, and flows out from the water return hole 111, the first water return cavity 13, the water return pipe water return hole 32, the second water return cavity 23 and the second water return hole 211 in sequence during water flow back.
In the invention, the first water return hole 111 is arranged at the edge of the first outer plate 11, so that the distance between the first water return hole 111 and the sealed shell 10 can be reduced, the height of water in the sealed shell 10 is increased, and the water enters the sealed shell 10 from the water inlet hole 31. After cooling the target material and the like in the seal housing 10, water flows out from the first water return hole 111, the first water return chamber 13, the water pipe water return hole 32, the second water return chamber 23, and the second water return hole 211.
The water return pipe 3, the first connecting end 1 and the second connecting end 2 can be of an integral structure or of independent structures. Preferably, as shown in fig. 6, the water return pipe 3 and the second connection end 2 are integrally constructed, thereby facilitating the connection and installation of the water return device and the seal housing 10. It is also convenient to replace the different first connection terminals 1 as needed to accommodate different seal housings 10.
Preferably, as shown in fig. 1 to 4, the return pipe 3, the first connection end 1 and the second connection end 2 are all cylindrical in shape. The diameter of the return pipe 3 may be the same as or different from the diameter of the first connection end 1 and/or the second connection end 2. Preferably, the cross-sectional shape of the first connection end 1 and the second connection end 2 is larger than the cross-sectional shape of the return pipe 3. I.e. the diameter of the return pipe 3 is smaller than the diameters of the first connection end 1 and the second connection end 2. Therefore, the occupied space of the water return pipe 3 can be reduced, materials are saved, and the weight of the water return device is reduced.
The first outer plate 11 and the first inner plate 12 in the first connecting end 1 may be in an integral structure or an independent structure, preferably, as shown in fig. 1 and 5, the first outer plate 11 and the first inner plate 12 are in independent structures, the first inner plate 12 includes an inner plate portion 124 and an extension portion 125, the inner plate portion 124 is plate-shaped, the extension portion 125 is located at an outer edge of the inner plate portion 124 and extends toward the first outer plate 11, and a first water return cavity 13 is formed by enclosing between the first outer plate 11 and the first inner plate 12.
Preferably, as shown in fig. 1 and 9, the first outer plate 11 is adapted to the seal housing 10, the first outer plate 11 is clamped in the end part of the seal housing 10, and the first outer plate 11 is in sealing connection with the seal housing 10; the first water return hole 111 is adjacent to the top of the inner wall of the seal housing 10. The shape of the first outer plate 11 is circular, the edge of the first outer plate 11 is abutted against the inner wall of the sealing shell 10, and the joint can be sealed by sealant or sealing strips so as to avoid water leakage.
At least one first water return hole 111 is provided in the first outer plate 11, and at least one first water return hole 111 is provided at the upper edge of the first outer plate 11 adjacent to the top of the seal housing 10. This enables the height of the water in the seal housing 10 to reach the top of the seal housing 10, and the water to be distributed throughout the seal housing 10. Preferably, a plurality of first water return holes 111 are provided and uniformly distributed on the edge of the first outer plate 11. Therefore, the rapid outflow of water can be facilitated, the high efficiency of water circulation is improved, and the cooling effect on the sputtering cathode is further improved.
Preferably, the middle parts of the first inner plate 12 and the first outer plate 11 are respectively provided with a first middle hole 121 correspondingly communicated with the water inlet hole 31, a plurality of petal-shaped protrusions 123 are arranged on the periphery of the first middle hole 121 in a surrounding mode, the petal-shaped protrusions 123 are used for connecting the first outer plate 11, a first side hole 122 is arranged between every two adjacent petal-shaped protrusions 123, and the first side hole 122 is correspondingly communicated with the water pipe water return hole 32. The connection of the first outer plate 11 and the first inner plate 12 can be facilitated through the petal-shaped protrusions 123, and different first outer plates 11 can be replaced according to requirements, so that requirements of different cooling scenes are met. Water enters the first water return chamber 13 from the first water return hole 111 and enters the water return hole 32 from the first side hole 122.
In an embodiment, the water return pipe 3 is an integral structure, the water return pipe hole 32 and the water inlet hole 31 are transversely penetrating through and arranged in the water return pipe 3, and at least one water return pipe hole 32 and at least one water inlet hole 31 are respectively arranged. This can improve the stability of the structure of the return pipe 3. Preferably, the water inlet hole 31 is provided in one, and is laterally provided in the middle of the water pipe. The water return holes 32 are arranged in a plurality and are transversely arranged in the pipe wall of the water return pipe 3; the water return holes 32 of the water return pipe are uniformly distributed on the outer edge of the pipe wall of the water return pipe 3. I.e. a plurality of water return holes 32 are arranged around the water inlet 31. The water return hole 32 of the water pipe can be set to be as large as required to adjust the flow rate of the water return hole 32 of the water pipe during water return.
In another embodiment, as shown in fig. 10, the water return pipe has a double-layer structure, including a water return inner pipe 310 and a water return outer pipe 320, the water inlet 340 is disposed in the water return inner pipe 310, a gap is formed between the water return inner pipe 310 and the water return outer pipe 320, and the gap is the water return hole 330. The backwater inner pipe 310 and the backwater outer pipe 320 can be connected through the first connecting end and the second connecting end, and the structure can be used for conveniently obtaining materials; the water return inner pipe 310 and the water return outer pipe 320 with different diameters are also convenient to select according to different requirements so as to adjust the size of a gap between the water return inner pipe 310 and the water return outer pipe 320, namely the size of the water pipe water return hole 330, thereby adjusting the flow rate during water return according to the requirements.
The purpose of the flow rate when adjusting the return water is to make water and sputtering cathode have more suitable contact time, if contact for a long time, can not play better cooling effect, if contact for a short time, the water resource is not fully utilized, causes the waste of resource easily. Therefore, when in application, the flow rate during backwater can be adjusted according to the requirement.
The second outer plate 21 and the second inner plate 22 may be integrally formed, or may be independently formed, and it is preferable that the second outer plate 21 and the second inner plate 22 be integrally formed. The second inner plate 22 is connected to the return pipe 3, and the second outer plate 21 includes an outer plate portion 212 and an inner extension portion 213, and the inner extension portion 213 is provided at an edge of the outer plate portion 212 and extends in the direction of the second inner plate 22. The second outer plate 21 and the second inner plate 22 enclose a second water return chamber 23. The second outer plate 21 and the middle part of the second outer plate 21 are respectively provided with a second middle hole 221, the second middle hole 221 is correspondingly communicated with the water inlet hole 31, the middle part of the second inner plate 22 is provided with a second side hole correspondingly communicated with the water pipe water return hole 32, and water flowing back from the water pipe water return hole 32 enters the second water return cavity 23 from the second side hole (not shown in the figure) and flows out from the second water return hole 211.
At the second connection end 2, at least one second water return hole 211 is provided, and preferably, one second water return hole 211 is provided. From this can be convenient for assemble second return water hole 211 department with the water of backward flow, a drain pipe is connected to second return water hole 211, can be convenient discharge water. Avoiding the need to connect a plurality of drain pipes by providing a plurality of second water return holes 211.
Based on the same inventive concept, the invention also provides magnetron sputtering equipment which comprises the water return device.
Therefore, the invention discloses a water return device, when the water return device is applied, water flow is shown in fig. 9, a black dotted line J is a water inlet direction, and a black solid line H is a water return direction in fig. 9. The inlet hole is connected with the water inlet pipe, and the inlet water sequentially passes through the second connecting end, the water return pipe and the first connecting end, enters into the sealed shell, cools down the sputtering cathode, and when water flows back, sequentially enters into the first water return hole, the first water return cavity, the water return pipe water return hole, the second water return cavity and the second water return hole from the sealed shell, and finally flows out of the drain pipe connected by the second water return hole. Therefore, the air in the sealed shell can be completely discharged, and the sputtering cathode is efficiently cooled.
The foregoing is only illustrative of the present invention and is not to be construed as limiting the scope of the invention, and all equivalent structural changes made by the present invention and the accompanying drawings, or direct or indirect application in other related technical fields, are included in the scope of the present invention.

Claims (10)

1. The water return device is characterized by comprising a water return pipe, and a first connecting end and a second connecting end which are positioned at two ends of the water return pipe;
the water return pipe comprises a water inlet hole and a water pipe water return hole, and the water inlet hole penetrates through the water return pipe, the first connecting end and the second connecting end; the water inlet hole is used for connecting with a water inlet pipe;
the first connecting end comprises a first outer plate and a first inner plate, a first water return cavity is formed between the first outer plate and the first inner plate, and a plurality of first water return holes are formed in the edge of the first outer plate;
the second connecting end comprises a second outer plate and a second inner plate, a second water return cavity is arranged between the second outer plate and the second inner plate, and a second water return hole is formed in the second outer plate; the second water return hole is used for connecting a drain pipe;
the first water return hole, the first water return cavity, the water pipe water return hole, the second water return cavity and the second water return hole are communicated; the water flow enters from the water inlet hole sequentially through the second connecting end, the water return pipe and the first connecting end, and flows out from the water inlet hole sequentially through the first water return hole, the first water return cavity, the water return hole of the water pipe, the second water return cavity and the second water return hole during water flow back.
2. The water return device according to claim 1, wherein the first outer plate and the first inner plate are of independent structures, the first inner plate comprises an inner plate portion and an outer extension portion, the outer extension portion is located at an outer edge of the inner plate portion and extends towards the first outer plate, and the first water return cavity is formed by enclosing between the first outer plate and the first inner plate.
3. The water return device according to claim 1, wherein the first outer plate is adapted to a seal housing to which it is connected, the first outer plate being stuck in an end of the seal housing, the first outer plate being in sealing connection with the seal housing; the first water return hole is adjacent to the top of the inner wall of the sealed shell.
4. The water return device according to claim 2, wherein a first middle hole which is correspondingly communicated with the water inlet hole is formed in the middle of the first inner plate, a plurality of petal-shaped protrusions are arranged on the periphery of the first middle hole in a surrounding mode, the petal-shaped protrusions are used for being connected with the first outer plate, a first side hole is formed between every two adjacent petal-shaped protrusions, and the first side hole is correspondingly communicated with the water return hole of the water pipe.
5. The water return device according to claim 1, wherein the water return pipe is of an integral structure, the water inlet hole is provided with one water inlet hole, and the water inlet hole is transversely arranged in the middle of the water return pipe; the water pipe backwater holes are arranged in a plurality of ways, and are transversely arranged in the pipe wall of the backwater pipe; the water return holes of the water pipe are uniformly distributed on the outer edge of the pipe wall of the water return pipe.
6. The water return device of claim 1, wherein the second outer plate and the second inner plate are of unitary construction; the second inner plate is connected with the water return pipe, the second outer plate comprises an outer plate part and an inner extension part, and the inner extension part is arranged at the edge of the outer plate part and extends towards the direction of the second inner plate; the second outer plate and the second inner plate are enclosed to form the second water return cavity.
7. The water return device according to claim 1, wherein a plurality of first water return holes are provided and uniformly distributed on the edge of the first outer plate.
8. The water return device of claim 1, wherein the first and second connection ends each have a cross-sectional shape that is greater than a cross-sectional shape of the water return pipe.
9. The water return device according to claim 1, wherein the water return pipe has a double-layer structure and comprises a water return inner pipe and a water return outer pipe, the water inlet hole is formed in the water return inner pipe, a gap is formed between the water return inner pipe and the water return outer pipe, and the gap is the water return hole of the water pipe.
10. A magnetron sputtering apparatus comprising a water return device according to any one of claims 1 to 9.
CN202310741065.0A 2023-06-20 2023-06-20 Water return device and magnetron sputtering equipment Pending CN116837335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310741065.0A CN116837335A (en) 2023-06-20 2023-06-20 Water return device and magnetron sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310741065.0A CN116837335A (en) 2023-06-20 2023-06-20 Water return device and magnetron sputtering equipment

Publications (1)

Publication Number Publication Date
CN116837335A true CN116837335A (en) 2023-10-03

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ID=88171804

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310741065.0A Pending CN116837335A (en) 2023-06-20 2023-06-20 Water return device and magnetron sputtering equipment

Country Status (1)

Country Link
CN (1) CN116837335A (en)

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