CN116818142A - Calibration method for multipoint temperature measurement equipment - Google Patents
Calibration method for multipoint temperature measurement equipment Download PDFInfo
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- CN116818142A CN116818142A CN202310784194.8A CN202310784194A CN116818142A CN 116818142 A CN116818142 A CN 116818142A CN 202310784194 A CN202310784194 A CN 202310784194A CN 116818142 A CN116818142 A CN 116818142A
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Abstract
The invention discloses a calibration method of a multi-point temperature measurement device, which comprises the steps of fixedly arranging all sensor contacts of the multi-point temperature measurement device on a measurement plane in an isothermal block, immersing the isothermal block in a constant temperature tank after sealing, and calibrating the multi-point temperature measurement device by using a calculated value of the temperature of the sensor contacts after steady state of the isothermal block as a standard value; and the temperature estimated value of the sensor contact point position is obtained by adopting an inverse distance weighted interpolation method. The invention not only can definitely and control the uncertainty introduced by the non-uniform temperature field in the isothermal block and effectively improve the calibration measurement precision, but also has simple and easy operation, simple and reliable algorithm and high calibration efficiency.
Description
Technical Field
The invention belongs to the technical field of calibration of temperature sensors, and particularly relates to a calibration method of multipoint temperature measurement equipment.
Background
With the development of society, the requirement for temperature measurement is higher and higher, and in many fields, the accuracy of temperature measurement directly influences the final experimental result and product quality. High accuracy class temperature measurement devices have also been developed, such as devices for calibrating the temperature of a polymerase chain reaction analyzer, with maximum tolerances better than 0.10 ℃. Wafer test trays are widely used in the integrated circuit industry with maximum tolerances better than 0.05 ℃. Therefore, how to trace the magnitude of these devices and ensure the magnitude accuracy is a problem to be solved.
When the temperature sensor is calibrated, the temperature sensor is generally placed in a constant temperature tank, and compared with a standard thermometer, the magnitude is traced. However, a high accuracy multi-point temperature measuring device, such as an enzyme-linked reaction analyzer temperature calibration device, typically has 15 temperature sensors, and a 12 inch wafer test tray can have 64 temperature sensors, which cannot be in direct contact with the medium in the oven. The existing calibration method is that firstly, the temperature measuring equipment is put into an isothermal block, so that the isothermal block can be isolated from an external medium, and meanwhile, the isothermal block can be kept in good contact with the isothermal block, and high-efficiency heat transfer can be carried out; the device under test is then immersed in a thermostatic bath together with an isothermal block, and compared with a standard thermometer. However, the contact state and the heat transfer distance between each position point of the isothermal block and the medium of the constant temperature tank are different, so that the temperature field distribution of each part of the isothermal block after stabilization has certain non-uniformity, and the whole measurement process and the uncertainty of the measurement result are greatly influenced.
In the prior art, a finite element method is commonly used for calculating the temperature field distribution, so as to measure the uncertainty of temperature calibration. The finite element method can divide the temperature field into a plurality of small areas, then calculate each small area to finally obtain the distribution condition of the whole temperature field, and the common finite element method also comprises a finite difference method, a boundary element method and the like. The method is a simulation algorithm, is based on a series of assumption conditions (such as continuity assumption, uniformity assumption and the like), and generally adopts simplified or idealized processing of a calculation model, boundary conditions and the like in order to improve the calculation efficiency; because of isothermal blocks in the actual working state, the external environment, structural or tissue defects, the contact state of the sensor and the like are different from the ideal state; therefore, the finite element method is difficult to achieve ideal accuracy for verification of uncertainty of a temperature field.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a calibration method of a multi-point temperature measuring device, which adopts an inverse distance weighted interpolation method to calculate the temperature value of each position point of a measuring plane in an isothermal block, uses the calculated value to replace the set temperature (constant temperature tank temperature) of the isothermal block as a standard value to be compared with the indication value of each sensor of the detected device, and calibrates the multi-point temperature measuring device; therefore, the uncertainty introduced by the non-uniform temperature field in the isothermal block can be definitely and controlled, the calibration measurement precision is effectively improved, and the method is simple and easy to operate, simple and reliable in algorithm and high in efficiency.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the method comprises the steps of fixedly arranging each sensor contact of the multi-point temperature measuring device on a measuring plane inside an isothermal block, immersing the isothermal block in a constant temperature tank after sealing, and calibrating the multi-point temperature measuring device by using the calculated temperature value of the sensor contact position after the isothermal block is stable as a standard value, and is characterized in that: the sections of the isothermal blocks along the length direction are the same, the measuring plane is perpendicular to the length direction of the isothermal blocks, and the length direction of the isothermal blocks is vertically arranged in the constant temperature tank; the sensor contact position temperature estimated value is obtained by adopting an inverse distance weighted interpolation method, and comprises the following steps: s1: selecting N1 sampling points on the measuring plane, and obtaining and recording the temperature and coordinates of each sampling point; s2: selecting 1 test point on the measuring plane, and respectively obtaining and recording the temperature and the coordinates of the test point; s3: calculating the distance between the sample point and the test point, substituting the distance and the temperature data into an inverse distance weighted interpolation calculation formula, and inversely calculating the power parameter p of the plane temperature field distribution formula measured by the isothermal block; s4: according to the distance d between the contact position of the sensor and each sample point i The power parameter p value and the weight calculation formula to obtain the correspondingWeights w for each sample i The method comprises the steps of carrying out a first treatment on the surface of the S5, using the weight w of each sample point i And carrying out weighted average on the temperature values to obtain a temperature estimation result of the sensor contact position.
Preferably, the weight calculation formula is: w (w) i ＝1/d i ^p。
Preferably, the sample points are uniformly distributed on the edge of the measuring plane.
Preferably, the number of samples N1 is not less than 4.
Preferably, the sample point temperature and the test point temperature are obtained by using a sample point sensor and a test point sensor fixed on the measurement surface, respectively; when the multi-point temperature measuring device is calibrated, the sample point sensor, the test point sensor and the multi-point temperature measuring device are simultaneously placed in the isothermal block.
Further preferably, the sample sensor is a high-precision temperature sensor, and the maximum allowable error is less than + -0.01 ℃.
Further preferably, the test point sensor is a standard platinum resistance thermometer with a maximum allowable error less than the maximum allowable error of the sample point sensor.
Preferably, the test point is not coincident with the sample point and the symmetry center point of any two sample points.
Preferably, the isothermal block is made of copper material.
Preferably, the isothermal block is made of an aluminum material.
Compared with the prior art, the invention has the beneficial effects that:
1. because the isothermal block and the calibrating device are designed according to the planar field theory, the temperature field model is simple, and the temperature field calculation precision is improved.
2. Because the invention adopts inverse distance weighted interpolation to calculate the temperature of each position point on the inner measurement plane of the isothermal block based on the plane temperature field theory, the calculation precision is high, the measurement uncertainty caused by the non-uniform isothermal block temperature field is effectively reduced, and the calibration precision is improved.
Drawings
FIG. 1 is a flowchart of a calibration method of a multi-point temperature measurement device according to an embodiment of the present invention.
Detailed Description
In order that the manner in which the above-recited features, advantages, objects and advantages of the present invention are attained and can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments thereof which are illustrated in the appended drawings.
The basic method is that the multipoint temperature measuring equipment is placed into an isothermal block, a plurality of sensor contacts of the multipoint temperature measuring equipment are fixedly arranged on the same horizontal plane (measuring plane) of the isothermal block, the isothermal block is sealed and then is vertically immersed into a constant temperature tank, and the temperature of the constant temperature tank is regulated according to a measuring rule. As described in the background art, after the isothermal block reaches a steady state in the thermostatic bath, the internal temperature field thereof is not uniform but nonuniform.
In order to clearly and effectively control uncertainty introduced by non-uniform temperature fields in the isothermal block, compensate the calibration value and further improve the calibration measurement accuracy, a temperature field calculation method is designed and adopted to assign values to all position points of a measurement plane in the isothermal block, and the indication error of each sensor of the measured multi-point temperature measurement device is calculated through comparison of the calculation value and the display value of the measured device.
The isothermal blocks are designed to have the same cross section in the length direction, preferably rectangular or cylindrical, are made of metal or alloy materials with high heat conductivity coefficients (such as copper, silver, red copper, aluminum and the like), the measuring plane of the isothermal blocks is perpendicular to the length direction of the isothermal blocks, and the isothermal blocks are vertically arranged in a constant temperature tank; the steady state is reached and then can be regarded as a time-independent constant field, and the temperature fields are distributed almost identically in the horizontal planes perpendicular to the length direction of the isothermal block, but the temperature distribution inside each horizontal plane temperature field is not uniform from outside to inside, so that the temperature field inside the isothermal block in steady state can be regarded as a plane field (for a time-independent constant field, if uniform in a certain direction in space, the field distribution is exactly identical in a plane perpendicular to the direction, such a field is called a plane field).
According to the calibration method of the multipoint temperature measurement equipment, the temperature value of each position point in the isothermal block is calculated by adopting an inverse distance weighted interpolation method. The inverse distance weighted interpolation, IDW (Inverse Distance Weight), which may also be referred to as the inverse distance multiplication method, is a simple and efficient spatial interpolation method that estimates an unknown point by finding a weighted average of a series of known points. The basic idea of the method is that the weight of an unknown point is inversely proportional to the distance between the point and the nearest known point, the idea is consistent with the temperature field characteristics of a plane field, the interpolation effect is good under the condition that the known points are uniformly distributed, the interpolation result is between the maximum value and the minimum value of interpolation data, and the method is suitable for estimating the uniform plane temperature field distribution inside an isothermal block.
The inverse distance weighted interpolation formula is as follows:
z(x,y)＝Σ(z i /d i ^p)/Σ(1/d i p) (equation 1)
Wherein z is i Attribute value d for the i-th known point i For the distance between the i-th known point and the interpolation point, p is the interpolation parameter, and z (x, y) is the attribute value of the interpolation point. The value of p is an adjustable parameter that determines the degree of influence of distance on the weight, and p is a positive real number, called a power parameter. The value of the power parameter p determines the smoothness of the interpolation result. When p is larger, the influence of the distance on the weight is larger, namely the influence of the known point which is closer to the unknown point on the interpolation result is larger; the smaller p is, the greater the effect on the interpolation results from the known points. Typically, p ranges from 1 to 3. The optimal p-value may vary from data set to data set. The method will determine the optimal p-value by comparing the calculated value with the etalon indication value at a certain determined position within the isothermal block. In the application, the results can be adjusted by adjusting the interpolation parameter p, the weighting mode and the like, so that the method has higher flexibility and strong adaptability.
In practical application, the coordinates of the ith sample point are set as (x i ,y i ) The coordinates of the position to be interpolated are (x, y), the Euclidean distance d from the ith sample point to the position to be interpolated i Can be calculated by the following formulaAnd (3) calculating:
d i ＝sqrt((x i -x)^2+(y i y) ≡2) (equation 2)
Then, according to the distance d i Calculating the weight w of the ith sample point i . A common calculation method is to use a power function, namely:
w i ＝1/d i p (formula 3)
A method for estimating the distribution of a uniform planar temperature field in a preferred isothermal block is shown in a flow chart in fig. 1, and comprises the following specific steps:
1. four high-precision temperature sensors (maximum allowable error MPE: + -0.01 ℃) are selected and uniformly and fixedly arranged at the edge positions of an isothermal block measurement plane (cuboid isothermal block is arranged at four vertex positions of a direction measurement plane) as known temperature sampling points, and the measured values z of the four high-precision temperature sensors are recorded 1 、z 2 、z 3 、z 4 And the distance index of the four sensors is recorded in coordinates (x i ,y i ) The formal representation, i.e. denoted (x) 1 ,y 1 )、(x 2 ,y 2 )、(x 3 ,y 3 )、(x 4 ,y 4 )。
2. Selecting a test point in the isothermal block measurement plane, placing a standard platinum resistance temperature Ji Bu at the test point, and recording the indication value z (x 0 ,y 0 ) And a distance index, the distance index being represented by coordinates (x i ,y i ) Formal representation, denoted (x) 0 ,y 0 )。
3. Substituting each coordinate into equation 2 to obtain distance d 11 、d 12 、d 13 、d 14 The test point temperature z (x 0 ,y 0 ) Sample temperature z 1 、z 2 、z 3 、z 4 Distance d 11 、d 12 、d 13 、d 14 Substituting the inverse distance weighted interpolation calculation formula (formula 1) to obtain the power parameter p value of the calculation formula of the temperature field distribution of the measurement plane in the isothermal block; it should be noted that the test point cannot select the sampling point and the symmetrical center point position of any two sampling points to improve the fitting precision of the power parameter p value。
4. Coordinates of the position point to be interpolated (x i ,y i ) Substituting the coordinate values of the known sample points (corresponding to the positions of the contact points of the sensors on the multi-point temperature measuring equipment to be calibrated) into the formulas (2) and (3), and calculating the distance index d of the point of the position to be interpolated 21 、d 22 、d 23 、d 24 And a weight w corresponding to each sample 1 、w 2 、w 3 、w 4 . And carrying out weighted average on the temperature value by using the weight of each sample point to obtain the temperature calculation result of the position point to be interpolated, namely:
z(x i ,y i )＝(z 1 w 1 +z 2 w 2 +z 3 w 3 +z 4 w 4 )/4
in practical application, the number N1 of sampling points (high-precision temperature sensor placement points) can be adjusted according to the precision requirement; because the volume of the general isothermal block is not large, the temperature field non-uniformity on the measurement plane is small, and therefore, 1 test point (a standard platinum resistance thermometer detection point) is selected to fit the calculation formula, and the requirement of calibration accuracy can be met.
When the multi-point temperature measuring equipment is calibrated, after the temperature of the constant temperature tank is regulated to a certain preset temperature, a sample point sensor (a high-precision temperature sensor), a test point sensor (a standard platinum resistance thermometer) and the multi-point temperature measuring equipment are simultaneously placed into an isothermal block, and after the isothermal block reaches a steady state, coordinates and temperature indication values of the sample point, a test point and the sensors of the multi-point temperature measuring equipment are simultaneously obtained; by using the calculation method, the calculation result of the contact point position temperature of each sensor of the multi-point temperature measuring equipment is obtained, and the calculation result is compared with the temperature indication value of each sensor of the multi-point temperature measuring equipment. And adjusting the temperature of the constant temperature tank to obtain a plurality of groups of comparison data, and calibrating the multi-point temperature measuring equipment. During calibration, sensor indication values of the sample point sensor, the test point sensor and the measured multi-point temperature measuring equipment are obtained at the same time, and measurement uncertainty caused by time instability of a temperature field is eliminated.
The above embodiments are preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and various modifications or variations which may be made by those skilled in the art without the inventive effort within the scope of the appended claims remain within the scope of this patent.
Claims (10)
1. The method comprises the steps of fixedly arranging each sensor contact of the multi-point temperature measuring device on a measuring plane inside an isothermal block, immersing the isothermal block in a constant temperature tank after sealing, and calibrating the multi-point temperature measuring device by using the calculated temperature value of the sensor contact position after the isothermal block is stable as a standard value, and is characterized in that:
the sections of the isothermal blocks along the length direction are the same, the measuring plane is perpendicular to the length direction of the isothermal blocks, and the length direction of the isothermal blocks is vertically arranged in the constant temperature tank;
the sensor contact position temperature estimated value is obtained by adopting an inverse distance weighted interpolation method, and comprises the following steps:
s1: selecting N1 sampling points on the measuring plane, and obtaining and recording the temperature and coordinates of each sampling point;
s2: selecting a test point on the measurement plane, and respectively obtaining and recording the temperature and the coordinates of the test point;
s3: calculating the distance between the sample point and the test point, substituting the distance and the temperature data into an inverse distance weighted interpolation calculation formula, and inversely calculating the power parameter p of the plane temperature field distribution formula measured by the isothermal block;
s4: according to the distance d between the contact position of the sensor and each sample point i The power parameter p value and the weight calculation formula to obtain the weight w corresponding to each sample point i ；
S5, using the weight w of each sample point i And carrying out weighted average on the temperature values to obtain a temperature estimation result of the sensor contact position.
2. The method for calibrating a multi-point temperature measurement device according to claim 1, wherein the weight calculation formula is: w (w) i ＝1/d i ^p。
3. The method of calibrating a multi-point temperature measuring device according to claim 1, wherein the sample points are uniformly distributed on the edge of the measuring plane.
4. The method according to claim 1, wherein the number of samples N1 is not less than 4.
5. The method according to claim 1, wherein the sample temperature and the test point temperature are obtained by a sample sensor and a test point sensor fixed on the measurement surface, respectively; when the multi-point temperature measuring device is calibrated, the sample point sensor, the test point sensor and the multi-point temperature measuring device are simultaneously placed in the isothermal block.
6. The method according to claim 5, wherein the sample sensor is a high-precision temperature sensor, and the maximum allowable error is less than + -0.01 ℃.
7. The method of calibrating a multi-point temperature sensing device according to claim 5, wherein the test point sensor is a standard platinum resistance thermometer having a maximum allowable error less than the maximum allowable error of the sample point sensor.
8. The method of claim 1, wherein the test point is not coincident with the center of symmetry of the sample point and any two sample points.
9. The method of calibrating a multi-point temperature measurement device of claim 1, wherein the isothermal block is made of copper material.
10. A method of calibrating a multi-point temperature sensing device according to claim 1, wherein the isothermal block is made of an aluminum material.
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