CN116754067A - Detection device with delay correction and application method thereof - Google Patents

Detection device with delay correction and application method thereof Download PDF

Info

Publication number
CN116754067A
CN116754067A CN202310669833.6A CN202310669833A CN116754067A CN 116754067 A CN116754067 A CN 116754067A CN 202310669833 A CN202310669833 A CN 202310669833A CN 116754067 A CN116754067 A CN 116754067A
Authority
CN
China
Prior art keywords
delay
module
resistor
operational amplifier
delay correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310669833.6A
Other languages
Chinese (zh)
Inventor
王颖颖
何朝雄
朱绍冲
梁韬
高晓文
陈杏藩
胡慧珠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Lab
Original Assignee
Zhejiang Lab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Lab filed Critical Zhejiang Lab
Priority to CN202310669833.6A priority Critical patent/CN116754067A/en
Publication of CN116754067A publication Critical patent/CN116754067A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/444—Compensating; Calibrating, e.g. dark current, temperature drift, noise reduction or baseline correction; Adjusting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/4446—Type of detector
    • G01J2001/446—Photodiode

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Amplifiers (AREA)

Abstract

The application relates to the field of photoelectric detection, in particular to a detection device with delay correction and an application method thereof, wherein the device comprises a four-quadrant photodiode and is used for converting laser into four paths of photoelectric current signals; the input end of the four-way transimpedance amplifying module is connected with the output end of the four-quadrant photodiode and is used for converting a photocurrent signal into a first voltage signal and outputting the first voltage signal, wherein the output ends of the two-way transimpedance amplifying module are respectively connected with the input end of the delay correcting module, and the output ends of the other two-way transimpedance amplifying module are respectively connected with the input end of the addition and subtraction signal conditioning module; the output end of the delay correction module is connected with the input end of the addition and subtraction signal conditioning module and is used for correcting the delay of the first voltage signal to a set value to obtain a second voltage signal; and the addition and subtraction signal conditioning module is used for outputting a displacement signal. The application utilizes the delay correction module to correct the delay of photocurrent among four quadrants, thereby improving the consistency of four quadrant response and the common mode rejection ratio of the detection device.

Description

Detection device with delay correction and application method thereof
Technical Field
The application relates to the field of photoelectric detection, in particular to a detection device with delay correction and an application method thereof.
Background
The suspension optical power system avoids loss and noise caused by mechanical support, has ultrahigh detection sensitivity, obtains a plurality of technical breakthroughs in the precision measurement fields of extremely weak force measurement, acceleration measurement and the like, and becomes a research hotspot of physics. The suspension power system acquires stress information of particles by detecting relative position changes of captured particles, wherein position detection errors caused by light relative intensity noise are important factors directly influencing the detection sensitivity of the system. The suspension power system generally adopts differential detection, and the light relative intensity noise is common mode noise, so that the common mode rejection ratio of the detection device is improved, the light relative intensity noise can be better suppressed, and the detection sensitivity of the suspension power system is improved.
In a suspension power system, differential signals are delayed due to the fact that the capacitance of a photodiode junction is different, the parameters of an electrical device are different, the path of a differential detection light path is different, the sound wave transit time of an acousto-optic modulator is different, and the common mode suppression effect is affected. The difference in optical path length can deteriorate the common mode noise rejection effect of the detection system, especially at higher frequencies, any path length difference will introduce a delay between the two signals, e.g. a path difference of 1m in air will introduce a delay of about 3.3 ns. In addition, the suspending light system commonly uses an acousto-optic modulator to modulate the light source, is cheaper than an electro-optic modulator, and has higher extinction ratio. The acousto-optic modulator is realized based on an acousto-optic effect, namely, the refractive index of an acousto-optic medium is changed through the mechanical oscillation pressure of sound waves, so that the optical modulation is realized. The common acousto-optic medium of the acousto-optic modulator is antimony oxide, the typical value of sound velocity is 4.2 mm/mu s, the diameter of an incident beam in the acousto-optic medium is generally 1-2mm, and the passing of the sound wave through the beam can cause time delay of hundred ns magnitude, and the time delay can seriously affect the common mode rejection effect.
The four-quadrant detection device is arranged by four photodiodes with consistent parameters according to rectangular coordinates, and the displacement detection principle is as follows: if the light beam center deviates from the center of the four-quadrant photodiode, the received light energy also changes due to different light spot areas on the four quadrants, and the displacement change of the light spot center relative to the center of the detector can be calculated from the change of the photocurrent. The single four-quadrant detection device can detect displacement information in three movement directions simultaneously, and a detection system built by the four-quadrant detection device is simple in light path and low in cost, and is one of main detection schemes of a suspension power system.
The existing four-quadrant detection device only corrects junction capacitance differences or hardware response differences of the four-quadrant photodiodes, and does not correct photocurrent signal delay introduced by other factors (such as optical paths, optical devices and the like) except the detection device in the system, so that high common mode rejection ratio is difficult to realize in all displacement detection directions, and detection sensitivity of a suspension optical power system is limited.
Disclosure of Invention
In view of the foregoing, it is desirable to provide a detecting device with delay correction and an application method thereof.
In a first aspect, an embodiment of the present application provides a detection device with delay correction, where the device includes a four-quadrant photodiode, a four-way transimpedance amplification module, a two-way delay correction module, and an addition and subtraction signal conditioning module; wherein,,
the four-quadrant photodiode is used for converting laser into four paths of photocurrent signals;
the input end of the four-way transimpedance amplifying module is connected with the output end of the four-quadrant photodiode and is used for converting the photocurrent signal into a first voltage signal and outputting the first voltage signal, wherein the output ends of the two-way transimpedance amplifying module are respectively connected with the input end of the delay correcting module, and the output ends of the other two-way transimpedance amplifying module are respectively connected with the input end of the addition and subtraction signal conditioning module;
the output end of the delay correction module is connected with the input end of the addition and subtraction signal conditioning module and is used for correcting the delay of the first voltage signal to a set value to obtain a second voltage signal;
the addition and subtraction signal conditioning module is used for outputting a displacement signal according to the first voltage signal and the second voltage signal.
In an embodiment, the delay correction module includes a positive delay mode and a negative delay mode, and is configured to correct the positive delay of the first voltage signal to a set value to obtain a second voltage signal when the delay correction module is in the positive delay mode, and is configured to correct the negative delay of the first voltage signal to the set value to obtain the second voltage signal when the delay correction module is in the negative delay mode.
In an embodiment, the delay correction module includes resistors R1, R6, adjustable resistors R2, R3, R4, R5, capacitors C1, C2, analog switches S1, S2, and an operational amplifier U1, where one end of the resistor R1 is connected to the output end of the transimpedance amplification module, and the other end is connected to the inverting input end of the operational amplifier U1; one end of the resistor R6 is connected with the inverting input end of the operational amplifier U1, and the other end of the resistor R is connected with the output end of the operational amplifier U1; the input end of the analog switch S1 is connected with the output end of the transimpedance amplification module, two output ends of the analog switch S1 are respectively connected with the adjustable resistor R2 and one end of the capacitor C1, the other end of the adjustable resistor R2 is connected with the adjustable resistor R3 in series and then is connected with the normal phase input end of the operational amplifier U1, and the other end of the capacitor C1 is connected with the normal phase input end of the operational amplifier U1; the input end of the analog switch S2 is connected with the non-inverting input end of the operational amplifier U1, two output ends of the analog switch S2 are respectively connected with the adjustable resistor R4 and one end of the capacitor C2, the other end of the adjustable resistor R4 is connected with the adjustable resistor R5 in series and then grounded, and the other end of the capacitor C2 is grounded.
In one embodiment, the gain of the delay correction module is 1.
In an embodiment, the addition and subtraction signal conditioning module includes resistors R11, R12 and an operational amplifier U2, where one end of the resistor R11 is connected to an inverting input end of the operational amplifier U2, and the other end is connected to an output end of the operational amplifier U2; one end of the resistor R12 is connected with the non-inverting input end of the operational amplifier U2, the other end of the resistor R is grounded, and the output end of the operational amplifier U2 outputs the displacement signal.
In an embodiment, the addition and subtraction signal conditioning module further includes resistors R7, R8, R9, and R10, where one end of the resistor R7 is connected to the output end of the delay correction module, and the other end is connected to the inverting input end of the operational amplifier U2; one end of the resistor R8 is connected with the output end of the delay correction module, and the other end of the resistor R8 is connected with the inverting input end of the operational amplifier U2; one end of the resistor R9 is connected with the output end of the transimpedance amplification module, and the other end of the resistor R9 is connected with the non-inverting input end of the operational amplifier U2; one end of the resistor R10 is connected with the output end of the transimpedance amplification module, and the other end of the resistor R is connected with the non-inverting input end of the operational amplifier U2.
In an embodiment, the transimpedance amplifying module includes a resistor R13, a capacitor C3 and an operational amplifier U3, one end of the resistor R13 is connected to an inverting input end of the operational amplifier U3, the other end of the resistor R13 is connected to an output end of the operational amplifier U3, the capacitor C3 is connected in parallel with the resistor R13, a non-inverting input end of the operational amplifier U3 is connected to a common ground, and an inverting input end of the operational amplifier U3 inputs the photocurrent signal.
In an embodiment, the device further comprises:
the oscilloscope is connected with the output end of the addition and subtraction signal conditioning module and is used for displaying the displacement signal; the amplitude of the displacement signal is used for an indication of delay correction of the first voltage signal.
In a second aspect, an embodiment of the present application proposes an application method of a detection device with delay correction, applied to the detection device with delay correction according to the first aspect, where the method includes:
incidence of a laser beam with modulation to a central location of a photosensitive surface of the four-quadrant photodiode;
correcting the delay of the first voltage signal according to a set value;
connecting the displacement signal output by the addition and subtraction signal conditioning module to an oscilloscope, and displaying the amplitude of the displacement signal;
and adjusting the delay correction module until the amplitude of the displacement signal output by the addition and subtraction signal conditioning module meets the condition.
In one embodiment, the correcting the delay of the first voltage signal according to the set value includes:
and selecting a delay mode of the delay correction module according to a set value, and carrying out delay correction on the first voltage signal based on the selected delay mode, wherein the delay mode comprises a positive delay mode and a negative delay mode.
Compared with the prior art, the application has the following effects: on the premise of not influencing the signal amplitude and frequency, the delay correction module is used for correcting the delay of the photocurrent between the four quadrants, so that the consistency of the four quadrants is improved. After delay correction, the common mode rejection ratio of the detection device is improved, the rejection effect on common mode noise (such as light relative intensity noise) is greatly improved, and the detection sensitivity of the system can be effectively improved.
Drawings
FIG. 1 is a schematic diagram of a detecting device with delay correction according to an embodiment of the present application;
FIG. 2 is a circuit diagram of a detecting device with delay correction according to an embodiment of the present application;
FIG. 3 is a graph showing the variation of the delay time with R2+R3 resistance according to an embodiment of the present application;
FIG. 4 is a schematic diagram of a detecting device with delay correction according to another embodiment of the present application;
FIG. 5 is a flow chart of an application method of a detecting device with delay correction according to an embodiment of the application;
fig. 6 is a schematic diagram of simulation results of the displacement signal output by the addition and subtraction signal conditioning module according to an embodiment of the present application.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are used in the description of the embodiments will be briefly described below. It is apparent that the drawings in the following description are only some examples or embodiments of the present application, and it is apparent to those of ordinary skill in the art that the present application may be applied to other similar situations according to the drawings without inventive effort. Unless otherwise apparent from the context of the language or otherwise specified, like reference numerals in the figures refer to like structures or operations.
As used in the specification and in the claims, the terms "a," "an," "the," and/or "the" are not specific to a singular, but may include a plurality, unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" merely indicate that the steps and elements are explicitly identified, and they do not constitute an exclusive list, as other steps or elements may be included in a method or apparatus.
While the present application makes various references to certain modules in a system according to embodiments of the present application, any number of different modules may be used and run on a computing device and/or processor. The modules are merely illustrative and different aspects of the systems and methods may use different modules.
It will be understood that when an element or module is referred to as being "connected," "coupled" to another element, module, or block, it can be directly connected or coupled or in communication with the other element, module, or block, or intervening elements, modules, or blocks may be present unless the context clearly dictates otherwise. The term "and/or" as used herein may include any and all combinations of one or more of the associated listed items.
As shown in fig. 1, the embodiment of the application provides a detection device with delay correction, which comprises a four-quadrant photodiode 1, a four-way transimpedance amplification module 2, a two-way delay correction module 3 and an addition and subtraction signal conditioning module 4; the four-quadrant photodiode 1 is used for converting laser into four paths of photocurrent signals; the input end of the four-way transimpedance amplifying module 2 is connected with the output end of the four-quadrant photodiode 1 and is used for converting the photocurrent signal into a first voltage signal and outputting the first voltage signal, wherein the output ends of two-way transimpedance amplifying modules 2 are respectively connected with the input end of the delay correcting module 3, and the output ends of the other two-way transimpedance amplifying modules 2 are respectively connected with the input end of the addition and subtraction signal conditioning module 4; the output end of the delay correction module 3 is connected with the input end of the addition and subtraction signal conditioning module 4, and is used for correcting the delay of the first voltage signal to a set value to obtain a second voltage signal; the addition and subtraction signal conditioning module 4 is configured to output a displacement signal according to the first voltage signal and the second voltage signal.
In the embodiment, on the premise of not influencing the signal amplitude and frequency, the delay correction module 3 is used for correcting the delay of the photocurrent between four quadrants, so that the consistency of the four quadrants is improved. After delay correction, the common mode rejection ratio of the detection device is improved, the rejection effect on common mode noise (such as light relative intensity noise) is greatly improved, and the detection sensitivity of the system can be effectively improved.
In this embodiment, the four-quadrant photodiode may be a G6849 type of the binon photon, and those skilled in the art may select other types of four-quadrant photodiodes according to actual needs. The four-way transimpedance amplification module 2 connected with the four-quadrant photodiodes has the same circuit structure and device type selection, so that the same hardware response coefficient is ensured when the photocurrents of the four quadrants are converted into voltage signals. In the present embodiment, the gain of the transimpedance amplification module 2 is designed to be 10 5 The A/V bandwidth is designed to be 1MHz, and other response coefficients can be selected by those skilled in the art according to actual requirements.
The delay correction module 3 is connected behind the transimpedance amplification module 2, so that signal delay in the X-axis displacement direction is corrected, and a person skilled in the art can choose to correct signal delay in the Y-axis or Z-axis displacement direction according to actual requirements. The delay correction module 3 has the same circuit configuration and device type selection.
The delay correction module comprises a positive delay mode and a negative delay mode, and is used for correcting the positive delay of the first voltage signal to a set value to obtain a second voltage signal when the delay correction module is in the positive delay mode, and is used for correcting the negative delay of the first voltage signal to the set value to obtain the second voltage signal when the delay correction module is in the negative delay mode.
In one embodiment, the gain of the delay correction module is 1.
As shown in fig. 2, in an embodiment, the delay correction module 3 includes resistors R1, R6, adjustable resistors R2, R3, R4, R5, capacitors C1, C2, analog switches S1, S2, and an operational amplifier U1, wherein one end of the resistor R1 is connected to the output end of the transimpedance amplification module, and the other end is connected to the inverting input end of the operational amplifier U1; one end of the resistor R6 is connected with the inverting input end of the operational amplifier U1, and the other end of the resistor R is connected with the output end of the operational amplifier U1; the input end of the analog switch S1 is connected with the output end of the transimpedance amplification module, two output ends of the analog switch S1 are respectively connected with the adjustable resistor R2 and one end of the capacitor C1, the other end of the adjustable resistor R2 is connected with the adjustable resistor R3 in series and then is connected with the normal phase input end of the operational amplifier U1, and the other end of the capacitor C1 is connected with the normal phase input end of the operational amplifier U1; the input end of the analog switch S2 is connected with the non-inverting input end of the operational amplifier U1, two output ends of the analog switch S2 are respectively connected with the adjustable resistor R4 and one end of the capacitor C2, the other end of the adjustable resistor R4 is connected with the adjustable resistor R5 in series and then grounded, and the other end of the capacitor C2 is grounded.
In this embodiment, the analog switches S1 and S2 are selected from single-pole double-throw analog switches, and in this embodiment, the analog switches S1 and S2 are selected from ADG1219 model of ADI company, so that negative delay and positive delay can be realized by switching the analog switches. The analog switch S1 is controlled by a gating signal to be connected with the adjustable resistor R2, and the analog switch S2 is connected with the capacitor C2 to realize positive delay (hysteresis); the analog switch S1 is controlled to be connected with the capacitor C1 through the gating signal, the analog switch S2 is connected with the adjustable resistor R4, negative delay (advance) is achieved, and the basic principle and the application method of the positive delay mode and the negative delay mode are the same. In this embodiment, a positive delay mode is selected, and r1=r6=1kΩ, and as known from the circuit principle, the output response of the delay correction module 3 is:
wherein U is A1 The voltage signal output by the transimpedance amplification module 2 is represented, and UA represents the voltage signal output by the delay correction module 3.
As can be seen from the formula (1), the gain of the delay correction module 3 is 1, that is, the amplitude of the signal is not changed by the delay correction module 3, only the delay is changed, and the introduced delay is:
as can be seen from the formula (2), the adjustment of the delay time can be realized by adjusting the resistance values of the adjustable resistors R2 and R3. FIG. 3 shows the delay time t delay Along with the resistance change curve of the adjustable resistor R2+R3, T is a signal period, the maximum adjustable delay time is 0.5 signal period along with the increase of the resistance of the adjustable resistor R2+R3, the delay time change slope is steep at a low resistance and gentle at a high resistance, so that the resistance change step length cannot be too large at a low resistance, otherwise, the delay time adjustment precision is affected, and the maximum delay time can be reached only when the resistance of the adjustable resistor R2+R3 is high.
In this embodiment, c2=10nf, the maximum resistance of the adjustable resistor R2 is 100deg.m, the maximum resistance of the adjustable resistor R3 is 5kΩ, and the maximum resistance of the adjustable resistor R3 is more than one order of magnitude higher than the maximum resistance of the adjustable resistor R2. The design aims to realize more accurate delay time adjustment and larger range of delay time adjustment by connecting the low-resistance adjustable resistor R2 and the high-resistance adjustable resistor R3 in series. In this embodiment, the adjustable resistor R2 and the adjustable resistor R3 are provided with scale knobs, so that the resistance can be adjusted more accurately, and experimental operation is facilitated. The resistance value of the adjustable resistor R2 is adjusted to realize the accurate adjustment of the small-range delay time, and the adjustable resistor R3 is adjusted to realize the maximum-range delay time adjustment.
In an embodiment, the addition and subtraction signal conditioning module 4 includes resistors R11, R12 and an operational amplifier U2, where one end of the resistor R11 is connected to an inverting input end of the operational amplifier U2, and the other end is connected to an output end of the operational amplifier U2; one end of the resistor R12 is connected with the non-inverting input end of the operational amplifier U2, the other end of the resistor R is grounded, and the output end of the operational amplifier U2 outputs the displacement signal.
In an embodiment, the addition and subtraction signal conditioning module 4 further includes resistors R7, R8, R9, R10, where one end of the resistor R7 is connected to the output end of the delay correction module 3, and the other end is connected to the inverting input end of the operational amplifier U2; one end of the resistor R8 is connected with the output end of the delay correction module 3, and the other end of the resistor R8 is connected with the inverting input end of the operational amplifier U2; one end of the resistor R9 is connected with the output end of the transimpedance amplification module 2, and the other end of the resistor R9 is connected with the non-inverting input end of the operational amplifier U2; one end of the resistor R10 is connected with the output end of the transimpedance amplification module 2, and the other end of the resistor R is connected with the non-inverting input end of the operational amplifier U2.
The addition and subtraction signal conditioning module 4 is used for calculating the displacement change of the light spot center relative to the detector center according to the change of the four-quadrant photocurrent.
In one embodiment, the transimpedance amplifier module 2 has the same circuit structure and device type selection. The transimpedance amplification module 2 comprises a resistor R13, a capacitor C3 and an operational amplifier U3, one end of the resistor R13 is connected with an inverting input end of the operational amplifier U3, the other end of the resistor R13 is connected with an output end of the operational amplifier U3, the capacitor C3 is connected with the resistor R13 in parallel, a non-inverting input end of the operational amplifier U3 is connected with a common ground, and an inverting input end of the operational amplifier U3 inputs the photocurrent signal.
In one embodiment, as shown in fig. 4, the apparatus further comprises: the oscilloscope 5 is connected with the output end of the addition and subtraction signal conditioning module 4 and is used for displaying the displacement signal; the amplitude of the displacement signal is used for an indication of delay correction of the first voltage signal.
The common mode rejection effect is monitored in real time according to the amplitude of the displacement signal, namely, the smaller the amplitude of the displacement signal is, the better the common mode rejection effect is. And repeatedly adjusting the resistance value of the adjustable resistor of the delay correction module 3 until the amplitude of the displacement signal output by the addition and subtraction signal conditioning module 4 meets the condition or is minimized.
The embodiment of the application provides an application method of a detection device with delay correction, which is applied to the detection device with delay correction, as shown in fig. 5, and the method comprises the following steps:
s502: incidence of a laser beam with modulation to a central location of a photosensitive surface of the four-quadrant photodiode;
s504: correcting the delay of the first voltage signal according to a set value;
s506: connecting the displacement signal output by the addition and subtraction signal conditioning module to an oscilloscope, and displaying the amplitude of the displacement signal;
s508: and adjusting the delay correction module until the amplitude of the displacement signal output by the addition and subtraction signal conditioning module meets the condition.
In one embodiment, the correcting the delay of the first voltage signal according to the set value includes:
and selecting a delay mode of the delay correction module according to a set value, and carrying out delay correction on the first voltage signal based on the selected delay mode, wherein the delay mode comprises a positive delay mode and a negative delay mode.
The specific limitation of the application method of the detection device with delay correction can be seen from the limitation of the detection device, which has the same technical effect and is not described herein.
Example embodiment 1:
the present exemplary embodiment corrects the signal delay introduced by the acousto-optic modulator in the X-axis displacement direction using a detection device with delay correction according to the present application. The typical value of sound velocity of the acousto-optic medium antimony oxide commonly used for an acousto-optic modulator is 4.2 mm/mu s, the diameter of an incident beam in the acousto-optic medium is 2mm, and the maximum delay of the penetration of the sound wave through the beam is as follows:
if the propagation direction of the acoustic wave in the actual system is the same as the X-axis in fig. 1, the photocurrent signal in quadrant A, B is delayed by 476ns compared with the photocurrent signal in quadrant C, D of the four-quadrant photodiode, and a positive delay is introduced to the photocurrent signal in quadrant A, B. As can be obtained from the formula (2), when the signal frequency is 100kHz, the resistance value of the adjustable resistor R2 is adjusted to 24 Ω, and the resistance value of the adjustable resistor R3 is adjusted to 0 Ω, at this time, a positive delay of 476ns can be obtained.
If the propagation direction of the acoustic wave in the actual system is opposite to the X-axis in fig. 1 in the actual system, the photo current signal in quadrant C, D of the four-quadrant photodiode (1) is advanced 476ns at maximum compared with the photo current signal in quadrant A, B, and negative delay is required to be introduced to the photo current signal in quadrant A, B. The output end of the switching analog switch S1 is connected to the capacitor C1, and the output end of the analog switch S2 is connected to the adjustable resistor R4. According to the circuit principle, when the signal frequency is 100kHz, the resistance value of the adjustable resistor R4 is regulated to be 0 omega, the resistance value of the adjustable resistor R5 is regulated to be 1.1k omega, and then 476ns negative delay can be obtained.
Fig. 6 shows simulation results of the output signals of the addition and subtraction signal conditioning module before and after delay correction of the four-quadrant detecting device. The output signal amplitude of the transimpedance amplifying module is 100mV, the quadrant-to-quadrant time delay is 476ns, the signal output amplitude of the addition and subtraction signal conditioning module before correction is 58mV, and the common mode rejection ratio is 10.7dB; the signal output amplitude of the addition and subtraction signal conditioning module after correction is 1.08mV, the common mode rejection ratio is 45.4dB, and the common mode rejection ratio is improved by 34.7dB compared with that before correction. Simulation results show that the detection device provided by the application can effectively correct signal delay introduced by an acousto-optic modulator in an optical path system and improve the common mode rejection effect.
Example embodiment 2:
the signal delay introduced by the junction capacitance and the hardware response difference of the four-quadrant photodiode is corrected by the detection device with delay correction. The maximum difference of junction capacitances among the four quadrants of the 10 four-quadrant photodiodes G6849 can reach 10%, the typical value of the junction capacitance of the G6849 is 100pF, the design value of the feedback resistor is 100kΩ, the resistance precision can reach 5%, the design value of the feedback capacitor is 2.2pF, and the capacitance precision can reach 10%. The junction capacitance difference, the feedback resistance, and the feedback capacitance difference introduce a delay of about 33ns at maximum when the signal frequency is 100 kHz. The formula (2) can be used for adjusting the resistance value of the adjustable resistor R2 to be 1.7Ω, and adjusting the resistance value of the adjustable resistor R3 to be 0Ω, and the delay correction module can introduce a delay of 33 ns. In this embodiment, the adjustable resistor used has a scale knob, the maximum resistance value of the adjustable resistor R2 is 100 Ω, the total mechanical travel is 10 circles, and 50 scales of each circle, that is, the minimum adjustment step size is 0.2 Ω, and the delay adjustment step size of 10ns magnitude can be supported.
The detection device with delay correction and the application method thereof provided by the application not only can correct delay (such as junction capacitance difference) introduced by the detection device, but also can correct photocurrent signal delay introduced by other factors (such as optical paths, optical devices and the like) except the detection device in a system. The negative delay and the positive delay can be realized through the switching of the analog switch, and the delay correction range is wide and can reach-0.5T to 0.5T; the low resistance and the high resistance adjustable resistor with the scale knob are connected in series, so that accurate time delay regulation and control are realized. The application can realize high common mode rejection ratio in all displacement detection directions, can better reject common mode noise, is suitable for a suspension power system, and improves the detection sensitivity of the system.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (10)

1. The detection device with the delay correction is characterized by comprising a four-quadrant photodiode, a four-way transimpedance amplification module, a two-way delay correction module and an addition and subtraction signal conditioning module; wherein,,
the four-quadrant photodiode is used for converting laser into four paths of photocurrent signals;
the input end of the four-way transimpedance amplifying module is connected with the output end of the four-quadrant photodiode and is used for converting the photocurrent signal into a first voltage signal and outputting the first voltage signal, wherein the output ends of the two-way transimpedance amplifying module are respectively connected with the input end of the delay correcting module, and the output ends of the other two-way transimpedance amplifying module are respectively connected with the input end of the addition and subtraction signal conditioning module;
the output end of the delay correction module is connected with the input end of the addition and subtraction signal conditioning module and is used for correcting the delay of the first voltage signal to a set value to obtain a second voltage signal;
the addition and subtraction signal conditioning module is used for outputting a displacement signal according to the first voltage signal and the second voltage signal.
2. The apparatus of claim 1, wherein the delay correction module comprises a positive delay mode and a negative delay mode, the delay correction module being configured to correct a positive delay of the first voltage signal to a set value to obtain a second voltage signal when the delay correction module is in the positive delay mode, and the delay correction module being configured to correct a negative delay of the first voltage signal to the set value to obtain the second voltage signal when the delay correction module is in the negative delay mode.
3. The device according to claim 1, wherein the delay correction module comprises resistors R1, R6, adjustable resistors R2, R3, R4, R5, capacitors C1, C2, analog switches S1, S2 and an operational amplifier U1, one end of the resistor R1 is connected to the output end of the transimpedance amplification module, and the other end is connected to the inverting input end of the operational amplifier U1; one end of the resistor R6 is connected with the inverting input end of the operational amplifier U1, and the other end of the resistor R is connected with the output end of the operational amplifier U1; the input end of the analog switch S1 is connected with the output end of the transimpedance amplification module, two output ends of the analog switch S1 are respectively connected with the adjustable resistor R2 and one end of the capacitor C1, the other end of the adjustable resistor R2 is connected with the adjustable resistor R3 in series and then is connected with the normal phase input end of the operational amplifier U1, and the other end of the capacitor C1 is connected with the normal phase input end of the operational amplifier U1; the input end of the analog switch S2 is connected with the non-inverting input end of the operational amplifier U1, two output ends of the analog switch S2 are respectively connected with the adjustable resistor R4 and one end of the capacitor C2, the other end of the adjustable resistor R4 is connected with the adjustable resistor R5 in series and then grounded, and the other end of the capacitor C2 is grounded.
4. The apparatus of claim 1, wherein the delay correction module has a gain of 1.
5. The device according to claim 1, wherein the addition and subtraction signal conditioning module comprises resistors R11, R12 and an operational amplifier U2, one end of the resistor R11 is connected to an inverting input terminal of the operational amplifier U2, and the other end is connected to an output terminal of the operational amplifier U2; one end of the resistor R12 is connected with the non-inverting input end of the operational amplifier U2, the other end of the resistor R is grounded, and the output end of the operational amplifier U2 outputs the displacement signal.
6. The device according to claim 5, wherein the addition and subtraction signal conditioning module further comprises resistors R7, R8, R9, R10, one end of the resistor R7 is connected to the output end of the delay correction module, and the other end is connected to the inverting input end of the operational amplifier U2; one end of the resistor R8 is connected with the output end of the delay correction module, and the other end of the resistor R8 is connected with the inverting input end of the operational amplifier U2; one end of the resistor R9 is connected with the output end of the transimpedance amplification module, and the other end of the resistor R9 is connected with the non-inverting input end of the operational amplifier U2; one end of the resistor R10 is connected with the output end of the transimpedance amplification module, and the other end of the resistor R is connected with the non-inverting input end of the operational amplifier U2.
7. The device according to claim 1, wherein the transimpedance amplification module comprises a resistor R13, a capacitor C3 and an operational amplifier U3, one end of the resistor R13 is connected to an inverting input terminal of the operational amplifier U3, the other end of the resistor R13 is connected to an output terminal of the operational amplifier U3, the capacitor C3 is connected in parallel with the resistor R13, a non-inverting input terminal of the operational amplifier U3 is connected to a common ground, and an inverting input terminal of the operational amplifier U3 inputs the photocurrent signal.
8. The apparatus of claim 1, wherein the apparatus further comprises:
the oscilloscope is connected with the output end of the addition and subtraction signal conditioning module and is used for displaying the displacement signal; the amplitude of the displacement signal is used for an indication of delay correction of the first voltage signal.
9. A method of using a detection apparatus with delay correction as claimed in any one of claims 1 to 8, the method comprising:
incidence of a laser beam with modulation to a central location of a photosensitive surface of the four-quadrant photodiode;
correcting the delay of the first voltage signal according to a set value;
connecting the displacement signal output by the addition and subtraction signal conditioning module to an oscilloscope, and displaying the amplitude of the displacement signal;
and adjusting the delay correction module until the amplitude of the displacement signal output by the addition and subtraction signal conditioning module meets the condition.
10. The method of claim 9, wherein the delay correcting the first voltage signal according to the set point comprises:
and selecting a delay mode of the delay correction module according to a set value, and carrying out delay correction on the first voltage signal based on the selected delay mode, wherein the delay mode comprises a positive delay mode and a negative delay mode.
CN202310669833.6A 2023-06-07 2023-06-07 Detection device with delay correction and application method thereof Pending CN116754067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310669833.6A CN116754067A (en) 2023-06-07 2023-06-07 Detection device with delay correction and application method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310669833.6A CN116754067A (en) 2023-06-07 2023-06-07 Detection device with delay correction and application method thereof

Publications (1)

Publication Number Publication Date
CN116754067A true CN116754067A (en) 2023-09-15

Family

ID=87960117

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310669833.6A Pending CN116754067A (en) 2023-06-07 2023-06-07 Detection device with delay correction and application method thereof

Country Status (1)

Country Link
CN (1) CN116754067A (en)

Similar Documents

Publication Publication Date Title
GB2125543A (en) Birefringence type measuring device
EP3477277A2 (en) Apparatus and method for increasing dynamic range of a particle sensor
US8935128B2 (en) Interference-compensated sensor
CN116754067A (en) Detection device with delay correction and application method thereof
CN107332529B (en) Automatic gain control circuit for fully differential trans-impedance amplifier
US8466748B2 (en) Amplifier circuit and method for conditioning an output current signal of a detector element
CN111751845A (en) Laser radar frequency locking device and method for gas detection
CN113422581B (en) Four-quadrant detector signal conditioning circuit for displacement feedback system
CN113852420A (en) Adaptive filtering optical power detection circuit and method
JP2928814B2 (en) measuring device
Lane Control of a MEMS fast steering mirror for laser applications
Heweage et al. Developing laser spot position determination circuit modeling and measurements with a quad detector
Wang et al. Structural Optimization Design of a High-precision Compact Position Sensitive Detector
CN114413769B (en) Four-quadrant detection module and application method thereof
CN103995242B (en) The method of linear frequency modulation measuring magnetostriction constant by using multi-beam laser heterodynes
JPS6227688A (en) Photoelectric switch for setting distance
CN101825476B (en) High-accuracy signal detection amplifying circuit
CN116380727A (en) Detection device and method applied to vacuum optical tweezers
Barrett A new system for optical displacement measurement
CN117665363A (en) Micro-current detection system based on Pian-class logarithmic amplification module
RU2083958C1 (en) Photodetector
CN114646813A (en) Photodiode junction capacitance measuring device and method
SU569872A1 (en) Opticoelectronic sensor
CN116465496A (en) High-precision linear polarization information measuring device
Halverson et al. Signal processing for order 10 pm accuracy displacement metrology in real-world scientific applications

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination