CN116753862A - Measurement system and differential scheduling detection method - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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Abstract
The invention relates to the technical field of digital measurement, in particular to a measurement system and a differential scheduling detection method; under the condition of not increasing the complexity of the structured light illumination measurement system, the improvement of the positioning precision and the measurement precision is realized. The method first captures an imaged picture of the projected fringes using a color CCD. And then, processing the color image sequence through a modulation demodulation algorithm to obtain modulation information in multiple channels, further constructing a differential modulation curve, and performing zero point positioning by utilizing a linear region with the maximum gradient of the differential modulation curve to replace peak value positioning in the traditional structured light illumination measurement method, so that high-precision extraction of a target position can be realized, and the measurement precision of the three-dimensional morphology is improved. The method has the advantages of simple measurement system, low measurement cost and capability of improving measurement accuracy without increasing system complexity.
Description
Technical Field
The invention relates to the technical field of digital measurement, in particular to a measurement system and a differential scheduling detection method.
Background
The structural light illumination measurement method is widely applied in various fields such as aerospace, advanced manufacturing, material science and the like by the characteristics of non-contact, high precision and high efficiency, and the current structural light illumination three-dimensional detection method mainly obtains the accurate focusing position of a pixel point through peak fitting and peak positioning, so that high mapping is realized. However, the longitudinal modulation degree response curve of the pixel point is most gentle at the peak position, the slope of the curve is lowest, and the modulation degree value is extremely insensitive to the change of the surface height of the object near the peak position of the curve. Therefore, the conventional peak positioning method is one of the key problems that the structured light illumination measurement method is limited to be applied to the field of higher-precision detection, the increasing measurement precision requirement cannot be met by continuously using the conventional peak positioning method, and the modulation degree curve peak value is greatly interfered by factors such as a measurement environment and the like. One of the methods for solving the problem is to build a double CCD detection system, obtain two modulation degree curves with a certain difference, further build a differential modulation degree curve, and utilize a linear region with the maximum gradient of the differential modulation degree curve to perform zero point positioning instead of the traditional peak positioning method, so as to realize the improvement of positioning precision and measuring precision. However, the double CCD detection system has the problems of signal matching, image matching, difficult control of differential quantity and the like, and the complexity and the measurement cost of the measurement system are increased.
Disclosure of Invention
Aiming at the problems that signal matching, image matching and differential quantity are difficult to control in the double CCD detection system, the invention provides a measurement system and a differential scheduling detection method, wherein a black-and-white CCD in a traditional structured light illumination measurement system is replaced by a color CCD, a differential modulation degree curve is constructed by extracting multi-channel modulation degree information, and further, the target position is extracted by utilizing zero point positioning, so that the measurement precision is improved under the condition of not increasing the complexity of the system, the limitation of low peak positioning sensitivity on the precision of the structured light measurement method is broken, and the measurement precision can be effectively improved.
The invention has the following specific implementation contents:
a measuring system comprises a white light source, a digital micromirror array (DMD), a first Tube lens, a color CCD camera, a second Tube lens, a spectroscope, a microscope objective, a high-precision displacement table and an object to be measured;
the color CCD camera is arranged at the focal plane position of the second Tube lens, and the digital micromirror array (DMD) is arranged at the focal plane position of the first Tube lens;
the white light source is arranged on one side of the DMD array, where the first Tube lens is arranged;
the focusing direction of the first Tube lens is perpendicular to the focusing direction of the second Tube lens, and the spectroscope is arranged at a position of a perpendicular point between the focusing direction of the first Tube lens and the focusing direction of the second Tube lens;
the microscope objective, the high-precision displacement table and the object to be measured are arranged at one end far away from the focal plane position and coaxial with the spectroscope.
The differential scheduling detection method is realized based on the measurement system; firstly sequentially projecting a plurality of sine grating fringe patterns with certain phase difference onto the surface of an object to be measured, acquiring imaging pictures recorded in real time from a color CCD camera, secondly processing color image sequences of the imaging pictures according to a modulation demodulation algorithm to obtain modulation information in multiple channels, constructing a differential modulation curve, then calculating a linear region with the maximum gradient of the differential modulation curve, obtaining a target position according to zero positioning, and finally carrying out height mapping by combining scanning step deltaz to obtain the relative height information of pixel points to recover the three-dimensional morphology of the object to be measured.
In order to better realize the invention, the differential dispatch detection method specifically comprises the following steps:
step 1: illuminating a white light source to a digital micro-mirror array DMD, and projecting sinusoidal grating stripes generated by the digital micro-mirror array DMD to the surface of an object to be detected;
step 2: controlling a high-precision scanning table to longitudinally move towards an object to be detected at a micro-step distance, sequentially projecting four sinusoidal grating stripes with pi/2 phase difference at each longitudinal position, and triggering a color CCD camera to acquire and store four imaging pictures in real time while switching the stripes;
step 3: processing a color image sequence of the imaging picture according to a multi-step phase shift algorithm, extracting modulation degree curves of an R channel and a B channel, and differentially processing the modulation degree curves to obtain differential modulation degree curves;
step 4: calculating the slope of the differential modulation degree curve, and linearly fitting and zero-positioning the linear region with the maximum slope to obtain a target position z zero ；
Step 5: according to the target position z zero And carrying out height mapping processing by combining the longitudinal scanning step delta z to obtain relative height information of pixel points, and reconstructing the three-dimensional morphology of the object to be detected.
In order to better implement the present invention, further, after the sinusoidal grating fringes generated by the DMD of the digital micromirror array are projected onto the surface of the object to be measured in the step 1, the light intensity distribution detected by the R channel and the B channel in the color CCD camera is:
wherein I is R (x, y; z) represents the R channel probe intensity, I B (x, y; z) represents the B channel detection light intensity, I 0 (x, y; z) represents the background light intensity, M R (x, y; z) represents R channel stripe modulation degree information, M B (x, y; z) represents R channel stripe modulation degree information, f 0 Representing the normalized spatial frequency of the projected fringes,representing the initial phase of the projected fringes, d representing the amount of difference, the magnitude of which is primarily dependent on the white light source bandwidth, and z representing the longitudinal scan distance.
In order to better implement the present invention, further, the extracting the modulation degree curve in the R channel, the modulation degree curve in the B channel, and the differential modulation degree function in the step 3 is:
wherein M is R () Represents the modulation curve in the R channel, M B () Represents the modulation curve in the B channel, M D () The differential modulation degree function is represented by i, i is represented by a fringe pattern number, i is not less than 1 and not more than L, z is represented by a longitudinal scanning distance, k is a constant related to an optical system parameter, FWHM is represented by a modulation degree curve half width, and f is a focal length of an imaging lens.
In order to better implement the present invention, further, the target position z in step 4 zero The method comprises the following steps:
wherein Z is peak The peak position of the modulation curve is d, and the difference is d.
In order to better realize the invention, further, the method in step 5 is based on the target position z zero The specific operation of the height mapping process in combination with the longitudinal scan step Δz is as follows:
wherein Δz represents a preset scanning step distance, Z peak Z is the peak position of the modulation curve zero The target position, d, is the difference.
The invention has the following beneficial effects:
(1) Compared with an optical coherence measuring method, the invention adopts a non-interference measuring method, has no problems of phase ambiguity and the like, and realizes the detection of the surface with large roughness.
(2) Compared with a confocal scanning microscope, the invention adopts a surface measurement mode, has higher efficiency and simpler system structure.
(3) Compared with the traditional structured light illumination measurement method, the invention uses the color CCD to replace the traditional black-and-white CCD, breaks the limitation of low peak positioning sensitivity on the precision of the structured light measurement method under the condition of not increasing the complexity of the system, and realizes higher-precision detection.
(4) The invention has the characteristics of no damage, high precision, high efficiency and high adaptability.
Drawings
Fig. 1 is a schematic diagram of a measurement system.
FIG. 2 is a graph showing a monotonic system curve and a slope distribution thereof.
FIG. 3 is a graph showing a differential modulation curve and a slope distribution thereof.
Fig. 4 is a schematic diagram of the measurement result of the differential modulation degree.
Fig. 5 is a schematic diagram of the differential modulation error distribution.
Fig. 6 is a schematic diagram of a monotonic degree measurement result.
Fig. 7 is a schematic diagram of a monotonic systematic error distribution.
Fig. 8 is a schematic flow chart of a differential modulation degree detection method provided by the invention.
The device comprises a white light source 1, a digital micromirror array DMD2, a first Tube lens 3, a color CCD camera 4, a second Tube lens 5, a spectroscope 6, a spectroscope 7, a microscope objective 8, a high-precision displacement table 9 and an object to be measured.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it should be understood that the described embodiments are only some embodiments of the present invention, but not all embodiments, and therefore should not be considered as limiting the scope of protection. All other embodiments, which are obtained by a worker of ordinary skill in the art without creative efforts, are within the protection scope of the present invention based on the embodiments of the present invention.
In the description of the present invention, it should be noted that, unless explicitly stated and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; or may be directly connected, or may be indirectly connected through an intermediate medium, or may be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Example 1:
the embodiment proposes a measurement system, as shown in fig. 1, comprising a white light source 1, a digital micromirror array DMD2, a first Tube lens 3, a color CCD camera 4, a second Tube lens 5, a spectroscope 6, a microscope objective 7, a high-precision displacement table 8, and an object 9 to be measured;
the color CCD camera 4 is arranged at the focal plane position of the second Tube lens 5, and the digital micromirror array DMD2 is arranged at the focal plane position of the first Tube lens 3;
the white light source 1 is arranged on one side of the digital micromirror array DMD2, on which the first Tube lens 3 is arranged;
the focusing direction of the first Tube lens 3 is perpendicular to the focusing direction of the second Tube lens 5, and the spectroscope 6 is arranged at a position of a perpendicular point between the focusing direction of the first Tube lens 3 and the focusing direction of the second Tube lens 5;
the microscope objective 7, the high-precision displacement table 8 and the object 9 to be measured are arranged at one end far away from the focal plane position and coaxial with the spectroscope 6.
Working principle: the white light source 1 is used for illuminating a measuring system, the digital micromirror array DMD2 is used for generating sine grating fringes required for measurement, the color CCD camera 4 is used for recording imaging in real time, and the micro objective lens 7 is used for imaging an object to be measured. The color CCD camera 4 is located at the focal plane position of the second Tube lens 5, and the digital micromirror array DMD2 is located at the focal plane position of the first Tube lens 3.
Example 2:
based on the above embodiment 1, the present embodiment proposes a differential scheduling detection method, which specifically includes the following steps:
step 1: illuminating a white light source 1 to a digital micro-mirror array DMD2, and projecting sinusoidal grating fringes generated by the digital micro-mirror array DMD2 to the surface of an object 9 to be measured;
step 2: controlling a high-precision scanning table to longitudinally move towards an object 9 to be detected at a micro-step distance, sequentially projecting four sinusoidal grating stripes with pi/2 phase difference at each longitudinal position, and triggering a color CCD camera 4 to acquire and store four imaging pictures in real time while switching the stripes;
step 3: processing a color image sequence of the imaging picture according to a multi-step phase shift algorithm, extracting modulation degree curves of an R channel and a B channel, and differentially processing the modulation degree curves to obtain differential modulation degree curves;
step 4: calculating the slope of the differential modulation degree curve, and linearly fitting and zero-positioning the linear region with the maximum slope to obtain a target position z zero ；
Step 5: according to the target position z zero And carrying out height mapping processing by combining the longitudinal scanning step delta z to obtain relative height information of pixel points, and reconstructing the three-dimensional morphology of the object 9 to be detected.
Working principle: in the embodiment, a black-and-white CCD camera in a traditional structured light illumination measurement system is replaced by a color CCD camera 4, a differential modulation degree curve is constructed by extracting multi-channel modulation degree information, and further, the zero point positioning is utilized to extract the target position, so that the measurement precision is improved under the condition of not increasing the complexity of the system, the limitation of low peak positioning sensitivity on the precision of a structured light measurement method is broken, and the measurement precision can be effectively improved.
Other portions of this embodiment are the same as those of embodiment 1 described above, and thus will not be described again.
Example 3:
this embodiment is described in terms of one specific embodiment based on any one of embodiments 1 to 2 described above, as shown in fig. 2, 3, 4, 5, 6, 7, and 8.
Step 1: structured light illumination. Illuminating the digital micro-mirror array DMD2 by using a white light source 1, projecting sinusoidal grating stripes generated by the digital micro-mirror array DMD2 to the surface of an object 9 to be detected through an optical system, and imaging the surface textures and the grating stripes of the object 9 to be detected in a color CCD camera 4 in real time;
step 2: scanning and drawing. The upper computer program is used for controlling a high-precision scanning table, an object 9 to be detected is longitudinally moved at a micro-step distance, four sinusoidal grating stripes with pi/2 phase difference are sequentially projected at each longitudinal position, and the color CCD camera 4 is triggered to acquire four imaging pictures in real time and store data while the stripes are switched;
after the sinusoidal fringe structured light field is projected onto the surface of the object 9 to be measured, the light intensity distribution detected by the R channel and the B channel in the color CCD camera 4 at a certain longitudinal scanning distance z can be expressed as follows:
wherein I is R (x, y; z) represents the R channel probe intensity, I B (x, y; z) represents the B channel detection intensity, I 0 (x, y; z) represents the background light intensity, M R (x, y; z) represents R channel stripe modulation degree information, M B (x, y; z) represents R channel stripe modulation degree information, f 0 Representing the normalized spatial frequency of the projected fringes,representing the initial phase of the projected fringes, d represents the amount of difference, the magnitude of which is primarily dependent on the white light source bandwidth.
Step 3: processing the color image sequence by using a multi-step phase shift algorithm, respectively extracting modulation degree curves in an R channel and a B channel, and further performing differential processing on the two curves to obtain differential modulation degree curves;
according to the principle of resolving modulation degrees by a multi-step phase shift technique, in the case of projecting L fringe patterns at each scanning position, modulation degree information can be expressed as:
where i represents the fringe pattern number, 1.ltoreq.i.ltoreq.L, z represents the longitudinal scanning position, ii (x, y, z) represents the x-y plane light intensity distribution of the ith fringe pattern at z. Substituting the formula (1) into the formula (2), the R-channel modulation function, the B-channel modulation function, and the differential modulation function can be expressed as:
where k is a constant and is related to the optical system parameters only, FWHM is the modulation curve half-width, and f is the imaging lens focal length.
Step 4: linear fitting and zero point positioning are carried out on the linear region with the maximum gradient of the differential modulation curve to obtain a target position z zero ；
According to equation (3), the differential modulation degree curve zero point position can be expressed as:
wherein Z is peak The peak position of the modulation curve.
Step 5: and further combining the longitudinal scanning step delta z to perform height mapping processing to obtain the relative height information of the pixel points so as to realize the three-dimensional shape reconstruction of the object.
The height mapping formula is:
where Δz represents a preset scan stride, which is a known value for the system.
FIG. 2 is a graph showing the slope distribution of a monotonic curve, wherein the slope of the monotonic curve has a minimum value at the peak position, and the modulation degree is extremely insensitive to the change of the height of an object; FIG. 3 shows a schematic diagram of a differential modulation curve and its slope distribution, wherein the slope of the differential modulation curve shown in FIG. 3 has a maximum value at the zero position, and the modulation is extremely sensitive to the change of the height of an object;
as shown in fig. 4 and fig. 5, the recovery result and the error distribution diagram of the method are shown, and the measurement error magnitude is negligible compared with the object height. In contrast, fig. 6 and 7 show the recovery result and the error distribution diagram of the conventional monotonic system measurement method, and the measurement error is significantly greater than that of the method. In summary, the measurement results show that the differential modulation degree detection method based on the color CCD camera 4 disclosed in the present embodiment can effectively improve the measurement accuracy. As shown in the figure, the differential modulation degree measurement error is of the order of 10 -4 The magnitude of the monotone system measurement error is 100, and the measurement accuracy of the embodiment is obviously improved;
working principle: the embodiment can realize the improvement of the positioning precision and the measuring precision under the condition of not increasing the complexity of the structural light illumination measuring system. The method uses a color CCD camera 4 to replace a black-and-white CCD camera in a traditional structured light illumination measurement system, and captures an imaging picture of projection stripes by using the color CCD camera 4. And then, processing the color image sequence through a modulation demodulation algorithm to obtain modulation information in multiple channels, further constructing a differential modulation curve, and performing zero point positioning by utilizing a linear region with the maximum gradient of the differential modulation curve to replace peak value positioning in the traditional structured light illumination measurement method, so that high-precision extraction of a target position can be realized, and the measurement precision of the three-dimensional morphology is improved. The method has the advantages of simple measurement system, low measurement cost and capability of improving measurement accuracy without increasing system complexity.
Other portions of this embodiment are the same as any of embodiments 1 to 2, and thus will not be described again.
The foregoing description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modification, equivalent variation, etc. of the above embodiment according to the technical matter of the present invention fall within the scope of the present invention.
Claims (7)
1. The measuring system is characterized by comprising a white light source (1), a digital micromirror array (DMD) (2), a first Tube lens (3), a color CCD (charge coupled device) camera (4), a second Tube lens (5), a spectroscope (6), a microscope objective (7), a high-precision displacement table (8) and an object (9) to be measured;
the color CCD camera (4) is arranged at the focal plane position of the second Tube lens (5), and the digital micromirror array (DMD) 2 is arranged at the focal plane position of the first Tube lens (3);
the white light source (1) is arranged on one side of the digital micro mirror array DMD (2) where the first Tube lens (3) is arranged; the focusing direction of the first Tube lens (3) is perpendicular to the focusing direction of the second Tube lens (5), and the spectroscope (6) is arranged at a position of a perpendicular point between the focusing direction of the first Tube lens (3) and the focusing direction of the second Tube lens (5);
the microscope objective (7), the high-precision displacement table (8) and the object to be measured (9) are arranged at one end far away from the focal plane position and coaxial with the spectroscope (6).
2. A differential schedule detection method implemented based on the measurement system of claim 1; the method is characterized in that a plurality of sinusoidal grating fringe patterns with phase differences are projected to the surface of an object (9) to be detected in sequence, imaging pictures recorded in real time are obtained from a color CCD camera (4), color image sequences of the imaging pictures are processed according to a modulation demodulation algorithm to obtain modulation information in multiple channels, a differential modulation curve is constructed, a linear region with the largest gradient of the differential modulation curve is calculated, a target position is obtained according to zero point positioning, and finally, height mapping is carried out by combining scanning step distance deltaz to obtain relative height information of pixel points, and the three-dimensional morphology of the object (9) to be detected is recovered.
3. The differential schedule detection method according to claim 1, characterized in that the differential schedule detection method specifically comprises the steps of:
step 1: illuminating a white light source (1) to a digital micro mirror array (DMD) (2), and projecting sinusoidal grating stripes generated by the digital micro mirror array (DMD) (2) to the surface of an object (9) to be detected;
step 2: controlling a high-precision scanning table to longitudinally move towards an object (9) to be detected at a micro-step distance, sequentially projecting four sinusoidal grating stripes with pi/2 phase difference at each longitudinal position, and triggering a color CCD camera (4) to acquire and store four imaging pictures in real time while switching the stripes;
step 3: processing a color image sequence of the imaging picture according to a multi-step phase shift algorithm, extracting modulation degree curves of an R channel and a B channel, and differentially processing the modulation degree curves to obtain differential modulation degree curves;
step 4: calculating the slope of the differential modulation degree curve, and linearly fitting and zero-positioning the linear region with the maximum slope to obtain a target position z zero ；
Step 5: according to the target position z zero And carrying out height mapping processing by combining the longitudinal scanning step delta z to obtain relative height information of pixel points, and reconstructing the three-dimensional morphology of the object (9) to be detected.
4. The differential dispatch detection method of claim 3, wherein after the sinusoidal grating fringes generated by the DMD (2) of the digital micromirror array are projected onto the surface of the object to be detected in step 1, the light intensity distribution detected by the R channel and the B channel in the color CCD camera (4) is:
wherein I is R (x, y; z) represents the R channel probe intensity, I B (x, y; z) represents the B channel detection light intensity, I 0 (x, y; z) represents the background light intensity, M R (x, y; z) represents R channel stripe modulation degree information, M B (x, y; z) represents R channel stripe modulation degree information, f 0 Representing the normalized spatial frequency of the projected fringes,representing the initial phase of the projected fringes, d representing the amount of difference, the magnitude of which is primarily dependent on the white light source bandwidth, and z representing the longitudinal scan distance.
5. The method of claim 4, wherein the extracting the modulation curve in the R channel, the modulation curve in the B channel, and the differential modulation function in the step 3 is:
wherein M is R () Represents the modulation curve in the R channel, M B () Represents the modulation curve in the B channel, M D () The differential modulation degree function is represented by i, i is represented by a fringe pattern number, i is not less than 1 and not more than L, z is represented by a longitudinal scanning distance, k is a constant related to an optical system parameter, FWHM is represented by a modulation degree curve half width, and f is a focal length of an imaging lens.
6. A differential schedule detecting method according to claim 3, wherein said target position Z in step 4 zero The method comprises the following steps:
wherein Z is peak The peak position of the modulation curve is d, and the difference is d.
7. The method according to claim 6, wherein in step 5, the target position Z is determined by zero The specific operation of the height mapping process in combination with the longitudinal scan step Δz is as follows:
wherein Δz is a preset scanning step distance, Z peak Z is the peak position of the modulation curve zero The target position, d, is the difference.
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