CN116752099A - NiTiAl-X multi-element alloy coating and preparation method and application thereof - Google Patents
NiTiAl-X multi-element alloy coating and preparation method and application thereof Download PDFInfo
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- 229910052758 niobium Inorganic materials 0.000 claims abstract description 9
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 8
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- 238000002844 melting Methods 0.000 claims abstract description 6
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- 238000012360 testing method Methods 0.000 claims description 32
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
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- 239000010936 titanium Substances 0.000 description 95
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- 239000002244 precipitate Substances 0.000 description 6
- 239000010963 304 stainless steel Substances 0.000 description 5
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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Abstract
本申请涉及金属涂层技术领域,具体涉及一种NiTiAl‑X多元合金涂层及其制备方法和应用。该涂层由NiTiAl‑X四元合金材料制成,其中,X选自过渡族金属Nb、Mo、Cu或V中的一种,涂层材料中Ni、Ti、Al、X的原子比为:45~50:45~50:0.5~4:0.5~4。该涂层的制备方法包括先采用真空电弧熔炼技术制备NiTiAl‑X多元合金铸锭,再基于合金靶材采用磁控溅射方法在基体上形成NiTiAl‑X多元合金涂层。本申请所制备的NiTiAl‑X多元合金涂层兼具高耐空蚀性和耐冲蚀性,具有优异的抗空蚀和抗冲蚀性能,可以应用于海洋、船舶、运输、核电等领域,有效提高高压管道、螺旋桨、水轮机等过流部件的使用寿命。
This application relates to the technical field of metal coatings, specifically to a NiTiAl-X multi-component alloy coating and its preparation method and application. The coating is made of NiTiAl‑X quaternary alloy material, where X is selected from one of the transition metals Nb, Mo, Cu or V. The atomic ratio of Ni, Ti, Al and X in the coating material is: 45~50:45~50:0.5~4:0.5~4. The preparation method of the coating includes first using vacuum arc melting technology to prepare NiTiAl-X multi-component alloy ingots, and then using magnetron sputtering to form a NiTiAl-X multi-component alloy coating on the substrate based on the alloy target. The NiTiAl-X multi-element alloy coating prepared by this application has both high cavitation corrosion resistance and erosion resistance, and has excellent cavitation corrosion resistance and erosion resistance. It can be used in marine, shipbuilding, transportation, nuclear power and other fields, and is effective Improve the service life of high-pressure pipelines, propellers, turbines and other flow-passing components.
Description
技术领域Technical field
本申请涉及金属涂层技术领域,特别是涉及一种NiTiAl-X多元合金涂层及其制备方法和应用。The present application relates to the technical field of metal coatings, and in particular to a NiTiAl-X multi-component alloy coating and its preparation method and application.
背景技术Background technique
海洋船舶的螺旋桨、水轮机的转轮叶片、导向叶片、顶环和底环衬套等过流部件,在含沙水流中运行时,由于空蚀和沙浆冲蚀以及二者的联合作用,会产生严重的损坏。因此,采用合适的表面工程技术强化过流部件的抗空蚀和抗冲蚀性能,是提高过流部件使用寿命的关键。When the propellers of ocean ships, runner blades, guide blades, top rings and bottom ring bushings of water turbines and other flow-passing components run in sand-containing water flows, they will produce corrosion due to cavitation erosion, slurry erosion and the combined effect of the two. Severe damage. Therefore, using appropriate surface engineering technology to enhance the cavitation and erosion resistance of flow-passing components is the key to improving the service life of flow-passing components.
空蚀又称为汽蚀,其原理为液体流动时,当局部区域的压力在温度基本保持不变的条件下突然下降形成气泡,气泡由低压区进入高压区时突然溃灭,气泡溃灭后产生的高速射流不断冲击材料表面,从而使得过流部件材料损坏甚至表面被侵蚀。泥沙的冲蚀作用属于水流动力学磨粒磨损。含沙水流会对高速运转的水轮机产生巨大冲击力,水中的固体颗粒会冲撞和切割流道,导致过流部件表面发生磨损。Cavitation erosion is also called cavitation erosion. Its principle is that when liquid flows, when the pressure in a local area suddenly drops while the temperature remains basically unchanged, bubbles are formed. The bubbles suddenly collapse when they enter the high-pressure area from the low-pressure area. After the bubbles collapse, The generated high-speed jet continuously impacts the material surface, causing material damage to the flow-passing components and even surface erosion. The erosion effect of sediment belongs to hydrodynamic abrasive wear. The sandy water flow will have a huge impact on the high-speed running turbine, and the solid particles in the water will collide with and cut the flow channel, causing wear on the surface of the flow-passing parts.
目前,国内外常采用在水轮机等过流部件上制备涂层的方法来提高其抗空蚀和抗冲蚀性能。按材质区分,常用的涂层有金属涂层和非金属涂层。环氧树脂、聚氨酯等非金属涂层虽然成本较低、工艺简单,但是存在与基体结合强度低以及在强空化区长期的脉动负压下容易剥落等问题。金属涂层主要采用热喷涂工艺、堆焊和激光熔覆技术:热喷涂金属陶瓷涂层与基体及陶瓷粉末颗粒之间主要依靠机械结合,组织中存在孔隙,因此结合强度不高;堆焊工艺存在焊层厚度不均匀,熔合区变脆,容易产生裂纹等问题,并且加工余量大,对基材的可焊接性能要求高;激光熔覆涂层结合强度高,组织均匀,抗磨蚀性能优异,但是仍存在熔覆过程中易出现裂纹的问题。At present, the method of preparing coatings on flow-passing components such as hydraulic turbines is often used at home and abroad to improve their anti-cavitation and anti-erosion properties. According to materials, commonly used coatings include metallic coatings and non-metallic coatings. Although non-metallic coatings such as epoxy resin and polyurethane have lower costs and simple processes, they have problems such as low bonding strength with the substrate and easy peeling under long-term pulsating negative pressure in strong cavitation zones. The metal coating mainly uses thermal spraying process, surfacing and laser cladding technology: The thermal spraying cermet coating mainly relies on mechanical bonding with the matrix and ceramic powder particles. There are pores in the structure, so the bonding strength is not high; the cladding process There are problems such as uneven thickness of the weld layer, brittleness of the fusion zone, and prone to cracks. The processing allowance is large and the weldability requirements of the base material are high. The laser cladding coating has high bonding strength, uniform structure, and excellent abrasion resistance. , but there is still the problem of cracks easily occurring during the cladding process.
金属涂层中,NiTi合金具有良好的超弹性与形状记忆效应,可以吸收空化气泡溃灭时产生的巨大能量,具有优异的抗空蚀性能。但NiTi合金硬度较低,导致其抗磨损性能较差。因此,可采用合金元素来强化NiTi基体相,制备出同时具有抗空蚀和抗磨损性能的复合涂层材料。Among metal coatings, NiTi alloy has good superelasticity and shape memory effects, can absorb the huge energy generated when cavitation bubbles collapse, and has excellent cavitation corrosion resistance. However, NiTi alloy has low hardness, resulting in poor wear resistance. Therefore, alloying elements can be used to strengthen the NiTi matrix phase to prepare a composite coating material with both cavitation resistance and wear resistance.
发明内容Contents of the invention
相关研究表明,添加合金元素的NiTi涂层处于马氏体状态时,其综合耐蚀性能更优。在NiTi合金中加入Al,NiTiAl合金在保留形状记忆效应的同时,还具有较高的屈服强度和一定的弹性。这是由于加入Al元素后,NiTi合金的马氏体相变温度点大幅下降,少量Al的加入可以使其在室温下就处于马氏体状态。空蚀过程中,气泡溃灭产生的局部压力可达1.2GPa,如此高的压力可诱发NiTi相中马氏体孪晶形成,从而吸收能量,降低对合金表面的损伤。NiTiAl合金在压缩下可以承受高达1.7GPa的循环应力,表现出超过5%的可恢复弹性应变。因此,NiTiAl合金同时兼具抗空蚀和抗磨损性能,在耐空蚀、冲蚀领域体现出一定的应用潜力。然而,由于NiTi系列合金价格昂贵,冷加工性能差,NiTiAl合金存在晶界析出相与元素偏聚等问题,目前在螺旋桨及水轮机过流部件表面抗空蚀和抗冲蚀磨损方面尚无应用。采用涂层材料可一定程度上缓解块体材料价格昂贵、加工困难等问题,并且通过加入合金元素,还可进一步调控涂层材料的整体性能,一定程度上减少材料中存在的偏析、夹杂等问题。Relevant studies have shown that when the NiTi coating with added alloying elements is in the martensitic state, its overall corrosion resistance is better. Adding Al to NiTi alloy, NiTiAl alloy retains the shape memory effect while also having high yield strength and certain elasticity. This is because after adding Al element, the martensitic transformation temperature point of NiTi alloy drops significantly. The addition of a small amount of Al can make it in the martensite state at room temperature. During the cavitation corrosion process, the local pressure generated by bubble collapse can reach 1.2GPa. Such a high pressure can induce the formation of martensite twins in the NiTi phase, thereby absorbing energy and reducing damage to the alloy surface. NiTiAl alloy can withstand cyclic stress up to 1.7GPa under compression and exhibits a recoverable elastic strain of more than 5%. Therefore, NiTiAl alloy has both cavitation corrosion resistance and wear resistance properties, and shows certain application potential in the fields of cavitation corrosion resistance and erosion resistance. However, due to the expensive price of NiTi series alloys and poor cold working properties, NiTiAl alloys have problems such as grain boundary precipitation phases and element segregation. Currently, they have no application in resisting cavitation corrosion and erosion wear on the surfaces of propellers and turbine flow-passing parts. The use of coating materials can alleviate the problems of expensive bulk materials and difficult processing to a certain extent. By adding alloy elements, the overall performance of the coating materials can be further controlled, and problems such as segregation and inclusions in the materials can be reduced to a certain extent. .
有鉴于此,本申请的第一个目的是提供一种兼具抗空蚀和抗冲蚀性能的NiTiAl-X多元合金涂层,该涂层具有优异的抗空蚀和抗冲蚀性能,可以应用于海洋、船舶、运输、核电等领域,有效提高高压管道、螺旋桨及水轮机等过流部件的使用寿命。In view of this, the first purpose of this application is to provide a NiTiAl-X multi-component alloy coating with both cavitation and erosion resistance. This coating has excellent cavitation and erosion resistance and can It is used in marine, shipbuilding, transportation, nuclear power and other fields to effectively improve the service life of high-pressure pipelines, propellers, turbines and other flow-passing components.
本申请的第二个目的是在上述涂层的基础上进行涂层制备工艺的优化设计,提供一种制备上述NiTiAl-X多元合金涂层的方法。The second purpose of this application is to optimize the coating preparation process based on the above-mentioned coating and provide a method for preparing the above-mentioned NiTiAl-X multi-component alloy coating.
为实现上述目的,本申请采用以下技术方案:In order to achieve the above purpose, this application adopts the following technical solutions:
第一方面,本申请提供一种NiTiAl-X多元合金涂层,对相关技术中的NiTi合金耐空蚀涂层作出改进,通过添加0.5~4at.%的Al元素,起到固溶强化的作用,增强了涂层的耐磨性与屈服强度。进一步的,在NiTiAl合金的基础上通过添加过渡元素Nb、Mo、Cu或V来调控材料的微观组织,从而改善NiTiAl合金涂层的晶界析出相导致的涂层疲劳损伤,同时提高了涂层与基体的粘结力,从而进一步提升合金的耐空蚀、冲蚀性能。In the first aspect, this application provides a NiTiAl-X multi-component alloy coating, which improves the NiTi alloy cavitation corrosion resistance coating in related technologies. By adding 0.5 to 4at.% Al element, it plays the role of solid solution strengthening. Enhanced the wear resistance and yield strength of the coating. Furthermore, on the basis of NiTiAl alloy, the microstructure of the material is controlled by adding transition elements Nb, Mo, Cu or V, thereby improving the fatigue damage of the coating caused by the grain boundary precipitation phase of the NiTiAl alloy coating, and at the same time improving the coating's The bonding force with the matrix further improves the cavitation corrosion and erosion resistance of the alloy.
具体的,所述NiTiAl-X多元合金涂层由NiTiAl-X四元合金材料制成,其中,X选自过渡族金属Nb、Mo、Cu或V中的一种,所述涂层中Ni、Ti、Al、X的原子比为:45~50:45~50:0.5~4:0.5~4。Specifically, the NiTiAl-X multi-component alloy coating is made of NiTiAl-X quaternary alloy material, where X is selected from one of the transition metals Nb, Mo, Cu or V, and Ni, The atomic ratio of Ti, Al, and X is: 45~50:45~50:0.5~4:0.5~4.
优选的,当X元素选用Nb时,Ni:Ti:Al:Nb=47.5~50:45~47.5:1~3:2~4;当X元素选用Mo时,Ni:Ti:Al:Mo=45~47:47~50:4:1~4;当X元素选用Cu时,Ni:Ti:Al:Cu=45~50:45~50:1~2:3~4;当X元素选用V时,Ni:Ti:Al:V=47.5~49.5:47.5~48.5:0.5~2.5:0.5~2.5。Preferably, when Nb is selected as the X element, Ni:Ti:Al:Nb=47.5~50:45~47.5:1~3:2~4; when Mo is selected as the ~47:47~50:4:1~4; when Cu is selected as the X element, Ni:Ti:Al:Cu=45~50:45~50:1~2:3~4; when V is selected as the X element , Ni:Ti:Al:V=47.5~49.5:47.5~48.5:0.5~2.5:0.5~2.5.
第二方面,本申请提供一种上述第一方面的NiTiAl-X多元合金涂层的制备方法,首先通过合金熔炼技术制备得到NiTiAl-X多元合金的铸锭,从铸锭切割获得靶材,再通过磁控溅射技术将靶材沉积在基体材料表面获得NiTiAl-X多元合金涂层。In a second aspect, this application provides a method for preparing the NiTiAl-X multi-component alloy coating of the first aspect. First, an ingot of the NiTiAl-X multi-component alloy is prepared through alloy smelting technology, and a target material is obtained by cutting from the ingot. The NiTiAl-X multi-component alloy coating is obtained by depositing the target material on the surface of the base material through magnetron sputtering technology.
具体的,该制备方法包括以下步骤:Specifically, the preparation method includes the following steps:
(1)NiTiAl-X多元合金铸锭的制备:(1) Preparation of NiTiAl-X multicomponent alloy ingots:
采用纯度大于99wt.%的Ti源、Ni源、Al源以及纯X源制备原子比为Ni:Ti:Al:X= 45~50:45~50:0.5~4: 0.5~4的NiTiAl-X多元合金铸锭;采用上述高纯度Ti、Ni、Al、X源的原因在于降低合金中杂质对涂层耐空蚀、耐冲蚀性能的影响,提升所溅射涂层的致密度。Use Ti source, Ni source, Al source and pure X source with a purity greater than 99wt.% to prepare NiTiAl-X with an atomic ratio of Ni:Ti:Al:X= 45~50:45~50:0.5~4:0.5~4 Multi-component alloy ingots; the reason for using the above-mentioned high-purity Ti, Ni, Al, and
(2)磁控溅射靶材的制备:(2) Preparation of magnetron sputtering target:
以步骤(1)获得的NiTiAl-X多元合金铸锭为原材料,切割加工得到NiTiAl-X合金靶材;优选的,可以采用电火花线切割加工从NiTiAl-X多元合金铸锭上切割获得上述NiTiAl-X合金靶材,采用电火花线切割加工的原因在于,加工后靶材的刀口非常小,大大提高了材料利用率,降低了材料成本。The NiTiAl-X multi-component alloy ingot obtained in step (1) is used as the raw material, and the NiTiAl-X alloy target is obtained by cutting and processing; preferably, the above-mentioned NiTiAl can be obtained by cutting from the NiTiAl-X multi-component alloy ingot using wire electric discharge cutting. -X alloy target material is processed by wire EDM because the cutting edge of the target material after processing is very small, which greatly improves the material utilization rate and reduces the material cost.
(3)NiTiAl-X多元合金涂层的制备:(3) Preparation of NiTiAl-X multi-component alloy coating:
使用步骤(2)所得的NiTiAl-X合金靶材,用磁控溅射设备在基体上沉积得到NiTiAl-X多元合金涂层。Using the NiTiAl-X alloy target obtained in step (2), use magnetron sputtering equipment to deposit a NiTiAl-X multi-component alloy coating on the substrate.
优选的,所述步骤(1)中,NiTiAl-X多元合金铸锭通过真空电弧熔炼技术制备,每个合金铸锭需翻转并熔化至少四次,以获得成分和微观结构均匀的合金铸锭。采用真空电弧熔炼技术制备合金铸锭的原因在于,所制备的合金铸锭成分均匀,不会发生氧化,污染物少,制备时间短。Preferably, in step (1), the NiTiAl-X multicomponent alloy ingot is prepared by vacuum arc melting technology, and each alloy ingot needs to be turned over and melted at least four times to obtain an alloy ingot with uniform composition and microstructure. The reason why vacuum arc melting technology is used to prepare alloy ingots is that the prepared alloy ingots have uniform composition, no oxidation, few pollutants, and short preparation time.
优选地,制备涂层前,对步骤(3)中所采用的基体表面进行清洗和喷砂,以增强涂层与基体间的结合力。Preferably, before preparing the coating, the surface of the substrate used in step (3) is cleaned and sandblasted to enhance the bonding force between the coating and the substrate.
优选的,所述步骤(3)中,磁控溅射过程中基底压力为5×10-6 Pa,通过控制沉积室内的氩气流量,使沉积压力固定为5.0×10-1 Pa;所述NiTiAl-X多元合金涂层的沉积功率为1000 W,溅射时间为5~6小时;溅射过程中衬底温度保持在600℃,溅射完成后随炉冷却至150℃。设置上述磁控溅射参数的原因在于该参数所制备的涂层组织成分均匀致密,结合性较好,不易开裂。涂层厚度适中,避免了厚度不足导致的耐空蚀、冲蚀性能下降。Preferably, in step (3), the substrate pressure during the magnetron sputtering process is 5×10 -6 Pa, and the deposition pressure is fixed at 5.0×10 -1 Pa by controlling the argon flow rate in the deposition chamber; The deposition power of the NiTiAl-X multi-element alloy coating is 1000 W, and the sputtering time is 5 to 6 hours; the substrate temperature is maintained at 600°C during the sputtering process, and the furnace is cooled to 150°C after the sputtering is completed. The reason for setting the above magnetron sputtering parameters is that the coating prepared by these parameters has a uniform and dense structure, good bonding, and is not easy to crack. The coating thickness is moderate, which avoids the decrease in cavitation corrosion resistance and erosion performance caused by insufficient thickness.
第三方面,本申请提供一种上述第一方面的NiTiAl-X多元合金涂层在过流部件中的应用。In a third aspect, the present application provides an application of the NiTiAl-X multi-component alloy coating of the first aspect in current-passing components.
本申请的有益效果是:The beneficial effects of this application are:
(1)和现有技术相比,本发明的NiTiAl-X多元合金涂层兼顾了良好的抗空蚀和抗冲蚀性能,在标准空蚀、冲蚀测试条件下,其空蚀平均侵蚀速度可低至0.2MDE/μm,冲蚀平均侵蚀速度可低至1.3MDE/μm;同时,本发明的NiTiAl-X涂层还具有更高的耐磨性、高的压缩强度以及高耐腐蚀性,特别适用于过流部件;(1) Compared with the existing technology, the NiTiAl-X multi-component alloy coating of the present invention has both good anti-cavitation and anti-erosion properties. Under standard cavitation and erosion test conditions, its average cavitation erosion rate is It can be as low as 0.2MDE/μm, and the average erosion rate can be as low as 1.3MDE/μm; at the same time, the NiTiAl-X coating of the present invention also has higher wear resistance, high compressive strength and high corrosion resistance. Especially suitable for parts with current flow;
(2)本发明采用的磁控溅射技术所制备的NiTiAl-X涂层与基体材料结合强度高,不易与基体分离,涂层厚度均匀,无孔隙,无裂纹;(2) The NiTiAl-X coating prepared by the magnetron sputtering technology used in the present invention has high bonding strength with the base material, is not easily separated from the base material, has uniform coating thickness, no pores, and no cracks;
(3)另外,本申请的NiTiAl-X涂层相较于高硬度陶瓷相颗粒强化NiTi基体相复合涂层,工艺更加简单,成分更加稳定。(3) In addition, compared with the high-hardness ceramic phase particle-reinforced NiTi matrix phase composite coating, the NiTiAl-X coating of this application has a simpler process and a more stable composition.
附图说明Description of the drawings
图1根据本申请的实施例,示出了ASTM G32-10标准空蚀实验装置的结构示意图;Figure 1 shows a schematic structural diagram of the ASTM G32-10 standard cavitation erosion experimental device according to an embodiment of the present application;
图2根据本申请的实施例1,示出了Ni50Ti45Al2Cu3涂层的SEM显微组织照片;Figure 2 shows an SEM microstructure photograph of the Ni 50 Ti 45 Al 2 Cu 3 coating according to Example 1 of the present application;
图3根据本申请的实施例2,示出了Ni48.5Ti48.5Al2.5V0.5涂层的SEM显微组织照片;Figure 3 shows an SEM microstructure photograph of the Ni 48.5 Ti 48.5 Al 2.5 V 0.5 coating according to Example 2 of the present application;
图4根据本申请的实施例3,示出了Ni50Ti45Al3Nb2涂层的SEM显微形貌图;Figure 4 shows the SEM micromorphology of the Ni 50 Ti 45 Al 3 Nb 2 coating according to Example 3 of the present application;
图5根据本申请的实施例4,示出了Ni45Ti48Al4Mo3涂层的截面SEM显微形貌图;Figure 5 shows a cross-sectional SEM micromorphology image of the Ni 45 Ti 48 Al 4 Mo 3 coating according to Example 4 of the present application;
附图标记:Reference signs:
1、电源;2、恒温装置;3、超声波发生器;4、测试样品;5、测试液体;6、支撑装置。1. Power supply; 2. Constant temperature device; 3. Ultrasonic generator; 4. Test sample; 5. Test liquid; 6. Support device.
具体实施方式Detailed ways
为了使本发明的目的、技术方案和优点更加清楚,下面对本发明作进一步地详细描述。所用试剂或仪器未注明生产厂商者,均为可以通过市购获得的常规产品。In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail below. If the manufacturer of the reagents or instruments used is not indicated, they are all conventional products that can be purchased commercially.
在工业生产中,过渡族金属常被用于合金化元素以改善原有金属的物理化学性能。在空蚀、冲蚀领域,已存在相关研究证明NiTi合金加入合金元素后相应耐空蚀、冲蚀性能变得更优。本发明在NiTi合金的基础上,通过加入适量的Al,来提高材料的耐磨性,进一步通过加入过渡元素Nb、Mo、Cu或V来调控材料的微观组织与涂层结合强度,并且在此基础上进行涂层制备工艺的优化设计,从而制得耐空蚀、冲蚀性能良好的NiTiAl-X合金涂层。In industrial production, transition metals are often used as alloying elements to improve the physical and chemical properties of the original metals. In the field of cavitation corrosion and erosion, there have been relevant studies proving that NiTi alloys have better cavitation corrosion and erosion resistance after adding alloying elements. On the basis of NiTi alloy, the present invention improves the wear resistance of the material by adding an appropriate amount of Al, and further controls the microstructure of the material and the bonding strength of the coating by adding transition elements Nb, Mo, Cu or V, and here Based on this, the coating preparation process is optimized and designed to obtain a NiTiAl-X alloy coating with good cavitation corrosion resistance and erosion performance.
下面将结合实施例对本发明的方案进行解释。本领域技术人员将会理解,下面的实施例仅用于说明本发明,而不应视为限定本发明的范围。其中未注明具体技术或条件的,按照本领域通用条件或者技术进行。The solutions of the present invention will be explained below with reference to examples. Those skilled in the art will understand that the following examples are only used to illustrate the present invention and should not be regarded as limiting the scope of the present invention. If no specific technology or conditions are specified, the general conditions or technologies in this field will be followed.
实施例1Example 1
实施例1拟制备六种不同原子比的NiTiAl-Cu涂层,六种不同成分涂层的原子比分别为:Ni45Ti50Al1Cu4,Ni47.5Ti47.5Al1Cu4,Ni50Ti45Al1Cu4,Ni45Ti50Al2Cu3,Ni47.5Ti47.5Al2Cu3,Ni50Ti45Al2Cu3。此外,还制备了成分为Ni50Ti45Al0.5Cu4.5与Ni50Ti45Al3Cu2的涂层作为对比例1。Example 1 intends to prepare six NiTiAl-Cu coatings with different atomic ratios. The atomic ratios of the six different composition coatings are: Ni 45 Ti 50 Al 1 Cu 4 , Ni 47.5 Ti 47.5 Al 1 Cu 4 , Ni 50 Ti 45 Al 1 Cu 4 , Ni 45 Ti 50 Al 2 Cu 3 , Ni 47.5 Ti 47.5 Al 2 Cu 3 , Ni 50 Ti 45 Al 2 Cu 3 . In addition, a coating with the composition of Ni 50 Ti 45 Al 0.5 Cu 4.5 and Ni 50 Ti 45 Al 3 Cu 2 was also prepared as Comparative Example 1.
下面以Ni50Ti45Al2Cu3成分为例,简述NiTiAl-Cu合金涂层的制备方法。其中未作特殊说明的步骤均适用于本实施例/对比例中的其他成分。具体方法如下:The following takes the composition of Ni 50 Ti 45 Al 2 Cu 3 as an example to briefly describe the preparation method of NiTiAl-Cu alloy coating. The steps not specifically stated are applicable to other components in this example/comparative example. The specific method is as follows:
(1)前期准备:切割30×30×6的304不锈钢作为基体,对基体表面进行清洁和喷砂以便于后续的涂层结合。(1) Preliminary preparation: Cut 30×30×6 304 stainless steel as the base body, clean and sandblast the surface of the base body to facilitate subsequent coating combination.
(2)合金铸锭制备:采用高纯海绵钛 (纯度99.76 wt.%)、高纯镍块(纯度99.95wt.%)、高纯铝(纯度99.99 wt.%)以及纯度99.9wt.%以上的Cu制备原子比为50:45:2:3的NiTiAl-Cu合金铸锭。合金铸锭通过在Ar气氛中在水冷铜坩埚上采用电弧熔炼技术制备,炉腔抽真空至3×10-3 Pa,然后用高纯度Ar气 (99.99 wt.%)回填至0.05 MPa的压力。将每个合金铸锭翻转并熔化四次,获得成分和微观结构的均匀的NiTiAl-Cu合金铸锭。(2) Preparation of alloy ingots: high-purity titanium sponge (purity 99.76 wt.%), high-purity nickel block (purity 99.95wt.%), high-purity aluminum (purity 99.99 wt.%) and Cu with a purity of 99.9wt.% or above A NiTiAl-Cu alloy ingot with an atomic ratio of 50:45:2:3 was prepared. The alloy ingot was prepared by arc melting technology on a water-cooled copper crucible in an Ar atmosphere. The furnace cavity was evacuated to 3×10 -3 Pa and then backfilled with high-purity Ar gas (99.99 wt.%) to a pressure of 0.05 MPa. Each alloy ingot was turned over and melted four times to obtain a NiTiAl-Cu alloy ingot with uniform composition and microstructure.
(3) 靶材制备:以NiTiAl-Cu合金铸锭为原材料,采用电火花线切割加工从合金铸锭上切割尺寸为101.6 (直径)×5 mm (厚度)的靶材。(3) Target material preparation: NiTiAl-Cu alloy ingot is used as raw material, and a target material with a size of 101.6 (diameter) × 5 mm (thickness) is cut from the alloy ingot using wire EDM.
(4)涂层制备:将切割好的NiTiAl-Cu合金铸锭作为靶材,用M600磁控溅射设备在基体上沉积获得NiTiAl-Cu薄膜。基底压力为5×10-6 Pa,通过控制沉积室内的氩气流量,将沉积过程的压力固定为5.0×10-1 Pa。磁控溅射沉过程中,NiTiAl-Cu薄膜的沉积功率为1000 W,溅射时间为5.5小时。溅射过程中衬底温度保持600℃,溅射完成后随炉冷却至150℃取出样品。所获得的涂层目标厚度为15μm(4) Coating preparation: Use the cut NiTiAl-Cu alloy ingot as the target material, and use M600 magnetron sputtering equipment to deposit a NiTiAl-Cu film on the substrate. The substrate pressure is 5×10 -6 Pa, and the pressure of the deposition process is fixed at 5.0×10 -1 Pa by controlling the argon flow rate in the deposition chamber. During the magnetron sputtering deposition process, the deposition power of the NiTiAl-Cu film was 1000 W, and the sputtering time was 5.5 hours. During the sputtering process, the substrate temperature was maintained at 600°C. After sputtering was completed, the furnace was cooled to 150°C and the sample was taken out. The obtained coating target thickness is 15μm
(5)性能测试:采用SEM显微镜测量涂层与基体的结合质量。采用标准空蚀试验机, 对所制备的样品进行2h空蚀实验后,测量样品的空蚀累计质量损失。请参阅图1,为ASTM G32-10标准空蚀实验装置的结构示意图,其包括1、电源;2、恒温装置;3、超声波发生器;4、 测试样品;5、测试液体;6、支撑装置。测试原理为:超声波发生器3的声能会转换成机械振动 波,在固液接触面处液体高速振动,导致某一瞬间固液接触面处静水压力降低,液体以微射 流的方式快速冲击试样表面,从而引发试样表面受到可控的空蚀损伤。平均侵蚀速率MDR定 义为空蚀累计质量损失除以空蚀面积与材料密度之积,即。以空蚀发生装置探 头为中心,取半径为8mm的圆形区域作为式中的空蚀面积。液体/固体冲蚀试验按照 ASTM G73-10标准试验方法进行。液固冲蚀试验中,从直径为 4mm 的喷嘴中射出速度为 100m/s 的高速水射流,垂直撞击距喷嘴15mm 的试样,试样的撞击面积约为25mm²。将测试结果列于 表1。 (5) Performance test: Use SEM microscope to measure the bonding quality of coating and substrate. A standard cavitation corrosion testing machine was used to conduct a 2-h cavitation corrosion test on the prepared sample, and the cumulative mass loss of cavitation corrosion of the sample was measured. Please refer to Figure 1, which is a schematic structural diagram of the ASTM G32-10 standard cavitation corrosion test device, which includes 1. Power supply; 2. Constant temperature device; 3. Ultrasonic generator; 4. Test sample; 5. Test liquid; 6. Support device . The test principle is: the sound energy of the ultrasonic generator 3 will be converted into mechanical vibration waves, and the liquid at the solid-liquid contact surface will vibrate at high speed, causing the hydrostatic pressure at the solid-liquid contact surface to decrease at a certain moment, and the liquid will rapidly impact the test in the form of a micro-jet. The surface of the sample will be exposed to controlled cavitation erosion damage. The average erosion rate MDR is defined as the cumulative mass loss of cavitation divided by the product of cavitation area and material density, that is . Taking the cavitation erosion generating device probe as the center, take a circular area with a radius of 8 mm as the cavitation erosion area in the formula. The liquid/solid erosion test is conducted in accordance with the ASTM G73-10 standard test method. In the liquid-solid erosion test, a high-speed water jet with a speed of 100m/s is ejected from a nozzle with a diameter of 4mm, and vertically impacts the sample 15mm away from the nozzle. The impact area of the sample is approximately 25mm². The test results are listed in Table 1.
表1 实施例1/对比例1中各涂层的性能测试结果Table 1 Performance test results of each coating in Example 1/Comparative Example 1
实施例1/对比例1采用磁控溅射沉积技术制备的NiTiAl-Cu合金涂层,NiTiAl-Cu涂层的平均厚度为 14.7μm。图2为本实施例中Ni50Ti45Al2Cu3涂层的显微组织照片。涂层基体组织为固溶了Al的NiTi相和少量的Ti2Ni相。除此之外,还观察到析出了白色的块状和短杆状的Ni3Ti相,以及灰色的块状的富铜Ti(Ni,Cu)2 相。在铜含量较低时,Cu元素倾向于在析出相中析出。在NiTi合金中,Cu能够改善涂层的塑性,降低晶格界面间的摩擦,还能降低NiTi合金相变温度随NiTi原子比变化的敏感性。此外,Cu元素的添加降低了Al元素在晶界处偏聚的倾向。Cu元素还可以降低Fe元素的扩散率,从而降低304不锈钢中Fe元素对NiTi涂层的影响。Example 1/Comparative Example 1 uses a NiTiAl-Cu alloy coating prepared by magnetron sputtering deposition technology. The average thickness of the NiTiAl-Cu coating is 14.7 μm. Figure 2 is a microstructure photo of the Ni 50 Ti 45 Al 2 Cu 3 coating in this example. The coating matrix structure is a NiTi phase with solid solution of Al and a small amount of Ti 2 Ni phase. In addition, white massive and short rod-shaped Ni 3 Ti phases and gray massive copper-rich Ti (Ni, Cu) 2 phases were also observed to precipitate. When the copper content is low, Cu element tends to precipitate in the precipitation phase. In NiTi alloys, Cu can improve the plasticity of the coating, reduce the friction between the lattice interfaces, and also reduce the sensitivity of the NiTi alloy phase transformation temperature to changes in the NiTi atomic ratio. In addition, the addition of Cu element reduces the tendency of Al element to segregate at grain boundaries. Cu element can also reduce the diffusivity of Fe element, thereby reducing the impact of Fe element in 304 stainless steel on NiTi coating.
对于NiTiAl-Cu涂层而言,相较于304不锈钢基体,所有样品涂层的耐空蚀、耐冲蚀性能均有一定提高,其中以Ni50Ti45Al2Cu3成分的合金涂层最优。For NiTiAl-Cu coatings, compared with the 304 stainless steel substrate, the cavitation corrosion resistance and erosion resistance of all sample coatings are improved to a certain extent, among which the alloy coating with Ni 50 Ti 45 Al 2 Cu 3 composition is the best. .
根据申请人的测试结果,当材料中Al元素的含量≤2at.%且Cu的含量在3~4.5at.%时,NiTiAl-Cu涂层的耐空蚀、耐冲蚀性能较好,这是由于少量的Cu元素能够改善涂层的塑性,降低Al元素在晶界处偏聚的倾向并协调空蚀冲击下涂层表面的晶粒变形。当材料中Cu的含量大于4.5at.%时,涂层的耐空蚀、耐冲蚀性能出现劣化,这是由于过量Cu元素与Al元素相互作用,会导致析出相体积的增大,大的析出相会造成局部应力集中,从而降低NiTiAl合金的力学性能。对比实施例1及对比例1的测试结果,本申请将NiTiAl-Cu涂层材料中Al的含量控制在1-2at.%之间、Cu的含量控制在3-4at.%之间。According to the test results of the applicant, when the Al element content in the material is ≤2at.% and the Cu content is between 3 and 4.5at.%, the NiTiAl-Cu coating has better cavitation and erosion resistance. This is because A small amount of Cu element can improve the plasticity of the coating, reduce the tendency of Al element to segregate at the grain boundaries, and coordinate the grain deformation of the coating surface under cavitation erosion impact. When the Cu content in the material is greater than 4.5 at.%, the cavitation corrosion resistance and erosion resistance of the coating deteriorate. This is due to the interaction between excess Cu element and Al element, which will lead to an increase in the volume of the precipitated phase and large precipitation The phase will cause local stress concentration, thereby reducing the mechanical properties of NiTiAl alloy. Comparing the test results of Example 1 and Comparative Example 1, this application controls the Al content in the NiTiAl-Cu coating material between 1-2at.% and the Cu content between 3-4at.%.
实施例2Example 2
实施例2拟制备六种不同原子比的NiTiAl-V涂层,六种不同成分涂层的原子比分别为: Ni47.5Ti47.5Al2.5V2.5,Ni48.5Ti48.5Al1.5V1.5,Ni48.5Ti48.5Al2.5V0.5 ,Ni48.5Ti48.5Al0.5V2.5,Ni48.5Ti47.5Al2.5V1.5,Ni49.5Ti47.5Al2.5V0.5。此外,还制备了成分为Ni46.5Ti47.5Al2.5V3.5,Ni46.5Ti48.5Al1.5V3.5,Ni46.5Ti49.5Al0.5V3.5的涂层作为对比例2。Example 2 intends to prepare six NiTiAl-V coatings with different atomic ratios. The atomic ratios of the six different composition coatings are: Ni 47.5 Ti 47.5 Al 2.5 V 2.5 , Ni 48.5 Ti 48.5 Al 1.5 V 1.5 , Ni 48.5 Ti 48.5 Al 2.5 V 0.5 , Ni 48.5 Ti 48.5 Al 0.5 V 2.5 , Ni 48.5 Ti 47.5 Al 2.5 V 1.5 , Ni 49.5 Ti 47.5 Al 2.5 V 0.5 . In addition, a coating with the composition of Ni 46.5 Ti 47.5 Al 2.5 V 3.5 , Ni 46.5 Ti 48.5 Al 1.5 V 3.5 , and Ni 46.5 Ti 49.5 Al 0.5 V 3.5 was also prepared as Comparative Example 2.
具体制备方法与性能测试方法同实施例1一致,九种涂层的性能测试结果列于表2。The specific preparation method and performance testing method are consistent with Example 1. The performance test results of the nine coatings are listed in Table 2.
表2 实施例2/对比例2中各涂层的性能测试结果Table 2 Performance test results of each coating in Example 2/Comparative Example 2
实施例2和对比例2在惰性气氛下使用磁控溅射技术制备NiTiAl-V合金涂层,NiTiAl-V涂层的平均厚度为 15.2μm。涂层基体组织为NiTi相,随着V元素的增加,涂层晶粒轻微细化,涂层韧性增加。当V含量为0.5at.%时组织形貌如图3所示。涂层出现B19'相和Ti2Ni相,V固溶在B19'相中,置换Ni原子的位置,起到固溶强化的作用。当V含量大于0.5at.%时,涂层为B19'相、Ti2Ni相和在晶界处析出的较软的V9(Ni,Ti)相,并且随着V含量增加,V的富集相越来越多聚集于晶界,从而导致涂层耐磨性下降。晶界处第二相的析出会导致晶界结合力降低,空蚀过程中表面晶粒易被剥离,导致空蚀加剧。结合实施例2和对比例2中涂层的测试结果,本申请将NiTiAl-V涂层材料中V的含量控制在0.5-2.5at.%之间。Example 2 and Comparative Example 2 used magnetron sputtering technology to prepare a NiTiAl-V alloy coating under an inert atmosphere. The average thickness of the NiTiAl-V coating was 15.2 μm. The matrix structure of the coating is NiTi phase. As the V element increases, the coating grains are slightly refined and the coating toughness increases. When the V content is 0.5at.%, the structure morphology is shown in Figure 3. B19' phase and Ti 2 Ni phase appear in the coating, and V is solid dissolved in the B19' phase, replacing the position of Ni atoms and playing the role of solid solution strengthening. When the V content is greater than 0.5at.%, the coating consists of the B19' phase, the Ti 2 Ni phase and the softer V 9 (Ni, Ti) phase precipitated at the grain boundaries. As the V content increases, the richness of V increases. Agglomerates increasingly accumulate at grain boundaries, resulting in a decrease in the wear resistance of the coating. The precipitation of the second phase at the grain boundary will lead to a reduction in the bonding force of the grain boundary, and the surface grains are easily peeled off during the cavitation etching process, resulting in aggravation of cavitation etching. Combining the test results of the coatings in Example 2 and Comparative Example 2, this application controls the V content in the NiTiAl-V coating material to be between 0.5-2.5at.%.
对于NiTiAl-V涂层而言,相较于304不锈钢基体,所有样品涂层的耐空蚀、耐冲蚀性能均有一定提高,其中以Ni48.5Ti48.5Al2.5V0.5最优。For the NiTiAl-V coating, compared with the 304 stainless steel substrate, the cavitation corrosion resistance and erosion resistance of all sample coatings are improved to a certain extent, among which Ni 48.5 Ti 48.5 Al 2.5 V 0.5 is the best.
实施例3Example 3
实施例3拟制备六种不同原子比的NiTiAl-Nb涂层,六种不同成分涂层的原子比分别为:Ni50Ti45Al1Nb4,Ni50Ti45Al2Nb3,Ni50Ti45Al3Nb2, Ni47.5Ti47.5Al2Nb3,Ni47.5Ti47.5Al1Nb4,Ni47.5Ti47.5Al3Nb2。此外,还制备了成分为Ni45Ti50Al2Nb3的涂层作为对比例3。Example 3 intends to prepare six NiTiAl-Nb coatings with different atomic ratios. The atomic ratios of the six different composition coatings are: Ni 50 Ti 45 Al 1 Nb 4 , Ni 50 Ti 45 Al 2 Nb 3 , Ni 50 Ti 45 Al 3 Nb 2 , Ni 47.5 Ti 47.5 Al 2 Nb 3 , Ni 47.5 Ti 47.5 Al 1 Nb 4 , Ni 47.5 Ti 47.5 Al 3 Nb 2 . In addition, a coating with a composition of Ni 45 Ti 50 Al 2 Nb 3 was also prepared as Comparative Example 3.
下面以Ni47.5Ti47.5Al3Nb2成分为例,简述NiTiAl-Nb合金涂层的方法。其中未作特殊说明的步骤均适用于本实施例/对比例中的其他成分。具体方法如下:Taking the composition of Ni 47.5 Ti 47.5 Al 3 Nb 2 as an example, the following is a brief description of the NiTiAl-Nb alloy coating method. The steps not specifically stated are applicable to other components in this example/comparative example. The specific method is as follows:
(1)前期准备:切割30×30×6的304不锈钢作为基体,对基体表面进行清洁和喷砂以便于后续的涂层结合。(1) Preliminary preparation: Cut 30×30×6 304 stainless steel as the base body, clean and sandblast the surface of the base body to facilitate subsequent coating combination.
(2)合金铸锭制备:采用高纯海绵钛 (99.76 wt.%)、高纯镍块(99.95 wt.%)、高纯铝(99.99 wt.%)以及纯度99.9wt.%以上的Nb制备原子比为47.5:47.5:3:2的合金铸锭。合金铸锭通过在Ar气氛中在水冷铜坩埚上采用电弧熔炼技术制备,炉腔抽真空至3×10-3 Pa,然后用高纯度Ar气 (99.99 wt.%)回填至0.05 MPa的压力。将每个合金铸锭翻转并熔化四次,获得成分和微观结构的均匀的合金铸锭。(2) Preparation of alloy ingots: Use high-purity titanium sponge (99.76 wt.%), high-purity nickel block (99.95 wt.%), high-purity aluminum (99.99 wt.%) and Nb with a purity of more than 99.9wt.% to prepare the atomic ratio It is an alloy ingot of 47.5:47.5:3:2. The alloy ingot was prepared by arc melting technology on a water-cooled copper crucible in an Ar atmosphere. The furnace cavity was evacuated to 3×10 -3 Pa and then backfilled with high-purity Ar gas (99.99 wt.%) to a pressure of 0.05 MPa. Each alloy ingot was turned over and melted four times to obtain compositionally and microstructurally homogeneous alloy ingots.
(3)靶材制备:以NiTiAl- Nb合金铸锭为原材料,采用电火花线切割加工从合金铸锭上切割尺寸为101.6 (直径)×5 mm (厚度)的靶材。(3) Target material preparation: NiTiAl-Nb alloy ingot is used as raw material, and a target material with a size of 101.6 (diameter) × 5 mm (thickness) is cut from the alloy ingot using wire EDM.
(4)涂层制备:将切割好的NiTiAl-Nb合金铸锭作为靶材,用M600磁控溅射设备在基体上沉积NiTiAl-Nb薄膜。基底压力为5×10-6 Pa,通过控制沉积室内的氩气流量,将沉积过程的压力固定为5.0×10-1 Pa。磁控溅射沉过程中,NiTiAl-Nb薄膜的沉积功率为1000 W,溅射时间为6小时。溅射过程中衬底温度保持600℃,溅射完成后随炉冷却至150℃取出样品。所获得的涂层目标厚度为17μm。(4) Coating preparation: Use the cut NiTiAl-Nb alloy ingot as the target material, and use M600 magnetron sputtering equipment to deposit a NiTiAl-Nb film on the substrate. The substrate pressure is 5×10 -6 Pa, and the pressure of the deposition process is fixed at 5.0×10 -1 Pa by controlling the argon flow rate in the deposition chamber. During the magnetron sputtering deposition process, the deposition power of the NiTiAl-Nb film was 1000 W, and the sputtering time was 6 hours. During the sputtering process, the substrate temperature was maintained at 600°C. After sputtering was completed, the furnace was cooled to 150°C and the sample was taken out. The target thickness of the coating obtained was 17 μm.
(5)性能测试方法同实施例1一致。将测试结果列于表3。(5) The performance testing method is consistent with Example 1. The test results are listed in Table 3.
表3 实施例3和对比例3中各涂层的性能测试结果Table 3 Performance test results of each coating in Example 3 and Comparative Example 3
上述实施例和对比例采用磁控溅射沉积技术制备的NiTiAl-Nb合金涂层,NiTiAl-Nb涂层的平均厚度为 16.2μm。Nb的加入使得涂层中NiTi(Al,Nb)析出相增多,弥散分布的细小析出相所带来的固溶强化效应可大幅提高涂层的屈服强度。The above embodiments and comparative examples adopt NiTiAl-Nb alloy coatings prepared by magnetron sputtering deposition technology. The average thickness of the NiTiAl-Nb coating is 16.2 μm. The addition of Nb increases the NiTi (Al, Nb) precipitated phase in the coating, and the solid solution strengthening effect brought by the dispersed fine precipitated phases can greatly increase the yield strength of the coating.
图4为Ni50Ti45Al3Nb2磁控溅射薄膜的SEM显微形貌图。在含2at.%Nb的合金中可观察到深灰色TiNi基体和析出的白色TiNi(Al,Nb)相以及黑色Ti2Ni相。随着Nb含量的增加,TiNi(Al,Nb)和富Nb的Ti2Ni相的数量增加,TiNi基体的数量减少。过多的析出对涂层的耐空蚀性能有负面作用,因为大量的第二相会带来应力集中,导致尖端裂纹的产生以及后续涂层组织的剥落。对于富Ni-NiTi合金,Nb起到固溶强化作用,同时促进Ni2TiAl相的弥散析出,提高涂层强度。对于等原子比的NiTi合金,Nb会在合金中偏聚并析出高强富Nb相,涂层强度增加,耐冲蚀性能增加。而对于富Ti-NiTi合金,Nb的加入虽然会一定程度上提高其室温屈服强度,但会降低基体中Ti的溶解度,从而导致粗大的Ti2Ni在晶内析出,使材料耐空蚀性能劣化。结合对比例3中涂层的测试结果,本申请中将NiTiAl-Nb涂层材料中Ni与Ti的含量控制在47.5~50:45~47.5之间,从而确保Ni/Ti比值≥1,将Nb的含量控制在2~4at.%之间。Figure 4 shows the SEM micromorphology of the Ni 50 Ti 45 Al 3 Nb 2 magnetron sputtered film. In the alloy containing 2at.%Nb, dark gray TiNi matrix and precipitated white TiNi (Al, Nb) phase and black Ti 2 Ni phase can be observed. As the Nb content increases, the amounts of TiNi (Al, Nb) and Nb-rich Ti 2 Ni phases increase, and the amount of TiNi matrix decreases. Excessive precipitation has a negative effect on the cavitation corrosion resistance of the coating, because a large amount of second phase will bring stress concentration, leading to the generation of tip cracks and subsequent peeling of the coating structure. For Ni-NiTi-rich alloys, Nb plays a solid solution strengthening role, while promoting the dispersion and precipitation of the Ni 2 TiAl phase to improve the coating strength. For NiTi alloys with equiatomic ratios, Nb will segregate in the alloy and precipitate high-strength Nb-rich phases, increasing the coating strength and erosion resistance. For Ti-NiTi-rich alloys, although the addition of Nb will increase its room temperature yield strength to a certain extent, it will reduce the solubility of Ti in the matrix, causing coarse Ti 2 Ni to precipitate within the crystal and deteriorating the material's cavitation corrosion resistance. Combined with the test results of the coating in Comparative Example 3, in this application, the content of Ni and Ti in the NiTiAl-Nb coating material is controlled between 47.5~50:45~47.5, thereby ensuring that the Ni/Ti ratio is ≥1, and the Nb The content is controlled between 2 and 4at.%.
实施例4Example 4
实施例4拟制备六种不同原子比的NiTiAl-Mo涂层,六种不同成分涂层的原子比分别为: Ni45Ti50Al4Mo1,Ni45Ti49Al4Mo2,Ni45Ti48Al4Mo3,Ni45Ti47Al4Mo4,Ni46Ti48Al4Mo2,Ni47Ti47Al4Mo2。此外,还制备了成分为Ni50Ti45Al4Mo1,Ni49Ti45Al4Mo2,Ni48Ti45Al4Mo3,Ni47Ti45Al4Mo4的涂层作为对比例4。Example 4 intends to prepare six NiTiAl-Mo coatings with different atomic ratios. The atomic ratios of the six different composition coatings are: Ni 45 Ti 50 Al 4 Mo 1 , Ni 45 Ti 49 Al 4 Mo 2 , Ni 45 Ti 48 Al 4 Mo 3 , Ni 45 Ti 47 Al 4 Mo 4 , Ni 46 Ti 48 Al 4 Mo 2 , Ni 47 Ti 47 Al 4 Mo 2 . In addition, a coating with the composition of Ni 50 Ti 45 Al 4 Mo 1 , Ni 49 Ti 45 Al 4 Mo 2 , Ni 48 Ti 45 Al 4 Mo 3 , and Ni 47 Ti 45 Al 4 Mo 4 was also prepared as Comparative Example 4.
具体制备方法与性能测试方法同实施例3一致。测试结果列于表4。The specific preparation method and performance testing method are consistent with Example 3. The test results are listed in Table 4.
表4 实施例4/对比例4中各涂层的性能测试结果Table 4 Performance test results of each coating in Example 4/Comparative Example 4
图5为本实施例中Ni45Ti48Al4Mo3涂层的截面SEM显微形貌图,图中可见涂层与截面结合良好。NiTiAl-Mo涂层的平均厚度为 15.8μm。Mo含量为1at.%时,涂层基体组织为NiTi相,与晶界处少量的Ti2Ni相。随着Mo含量的增加,晶界处析出细小的颗粒状白色相。Mo元素主要固溶于NiTi基体中,当涂层材料中的Ni/Ti比小于1时,由于涂层中的Al原子优先占据Ti位,导致NiTi基体中具有多余的Ti原子,Ti与Mo形成稳定的Ti-Mo键,利于Mo元素的固溶,此时固溶强化作用最佳;当涂层材料中的Ni/Ti比大于1时,Mo元素的固溶强化效果大幅降低,并且当Mo含量大于3at.%时,涂层基体内析出较大尺寸的富Mo相,不利于涂层的耐空蚀性能。因此,结合实施例4和对比例4的测试结果,本申请中,将NiTiAl-Mo涂层中Ni与Ti的含量控制在45~47:47~50之间,从而确保Ni/Ti比值≤1,将Mo的含量控制在1~4at.%之间。Figure 5 is a cross-sectional SEM micromorphology picture of the Ni 45 Ti 48 Al 4 Mo 3 coating in this embodiment. It can be seen from the picture that the coating and the cross section are well combined. The average thickness of the NiTiAl-Mo coating is 15.8 μm. When the Mo content is 1at.%, the coating matrix structure is NiTi phase, with a small amount of Ti 2 Ni phase at the grain boundaries. As the Mo content increases, fine granular white phases precipitate at the grain boundaries. Mo element is mainly solid dissolved in the NiTi matrix. When the Ni/Ti ratio in the coating material is less than 1, the Al atoms in the coating preferentially occupy Ti sites, resulting in excess Ti atoms in the NiTi matrix, and Ti and Mo form The stable Ti-Mo bond is conducive to the solid solution of Mo element, and the solid solution strengthening effect is optimal at this time; when the Ni/Ti ratio in the coating material is greater than 1, the solid solution strengthening effect of Mo element is greatly reduced, and when Mo When the content is greater than 3at.%, a larger-sized Mo-rich phase will precipitate in the coating matrix, which is not conducive to the cavitation corrosion resistance of the coating. Therefore, based on the test results of Example 4 and Comparative Example 4, in this application, the content of Ni and Ti in the NiTiAl-Mo coating is controlled between 45~47:47~50, thereby ensuring that the Ni/Ti ratio is ≤1 , control the Mo content between 1 and 4at.%.
对比例5Comparative example 5
NiTi涂层:参照实施例3的涂层制备方法,制备成分为Ni47Ti53,Ni50Ti50,Ni53Ti47的三种不同成分的NiTi合金涂层,作为本发明所述的NiTiAl-X合金涂层的对比例。磁控溅射6h后,NiTi涂层平均厚度为16.4μm。在标准空蚀、冲蚀测试实验中,Ni53Ti47涂层出现了较为严重的涂层开裂,导致了涂层的大面积剥落。Ni47Ti53与Ni50Ti50涂层存在局部结合不牢固,但在标准空蚀、冲蚀测试实验中涂层并未开裂。Ni47Ti53与Ni50Ti50涂层的标准空蚀、冲蚀测试实验结果列于下表。NiTi coating: Refer to the coating preparation method of Example 3 to prepare NiTi alloy coatings with three different components: Ni 47 Ti 53 , Ni 50 Ti 50 , and Ni 53 Ti 47 , as the NiTiAl- Comparative example of X alloy coating. After 6 hours of magnetron sputtering, the average thickness of the NiTi coating is 16.4 μm. In standard cavitation and erosion test experiments, the Ni 53 Ti 47 coating experienced severe coating cracking, resulting in large-area peeling of the coating. The Ni 47 Ti 53 and Ni 50 Ti 50 coatings have local weak connections, but the coatings did not crack during standard cavitation and erosion test experiments. The standard cavitation and erosion test results of Ni 47 Ti 53 and Ni 50 Ti 50 coatings are listed in the table below.
表5 对比例5中各涂层的性能测试结果Table 5 Performance test results of each coating in Comparative Example 5
对比例6Comparative example 6
NiTiAl涂层(Al在0.5-4at.%之间):参照实施例3的涂层制备方法,制备了成分为Ni49.75Ti49.75Al0.5,Ni49.5Ti49.5Al1,Ni49Ti49Al2,Ni48Ti48Al4的NiTiAl合金涂层,作为本发明所述的NiTiAl-X合金涂层的对比例。磁控溅射6h后,NiTiAl涂层平均厚度为16.1μm。随着Al元素的加入,NiTi合金涂层马氏体孪晶含量增加,涂层的耐磨性增加。当Al含量小于2at.%时,Al元素固溶于NiTi基体内部;Al含量在2~4at.%时,涂层内析出少量弥散分布的Ti2Al强化相。Al元素的加入有效改善了NiTi涂层的耐冲蚀性能。Ni49.75Ti49.75Al0.5,Ni49.5Ti49.5Al1,Ni49Ti49Al2与Ni48Ti48Al4涂层的冲蚀测试实验结果列于下表。NiTiAl coating (Al between 0.5-4at.%): Referring to the coating preparation method in Example 3, the components are Ni 49.75 Ti 49.75 Al 0.5 , Ni 49.5 Ti 49.5 Al 1 , Ni 49 Ti 49 Al 2 , A NiTiAl alloy coating of Ni 48 Ti 48 Al 4 is used as a comparative example of the NiTiAl-X alloy coating according to the present invention. After 6 hours of magnetron sputtering, the average thickness of the NiTiAl coating is 16.1 μm. With the addition of Al element, the martensitic twin content of NiTi alloy coating increases, and the wear resistance of the coating increases. When the Al content is less than 2 at.%, the Al element is solidly dissolved inside the NiTi matrix; when the Al content is between 2 and 4 at.%, a small amount of dispersed Ti 2 Al strengthening phase precipitates in the coating. The addition of Al element effectively improves the erosion resistance of NiTi coating. The experimental results of the erosion test of Ni 49.75 Ti 49.75 Al 0.5 , Ni 49.5 Ti 49.5 Al 1 , Ni 49 Ti 49 Al 2 and Ni 48 Ti 48 Al 4 coatings are listed in the table below.
表6 对比例6中各涂层的性能测试结果Table 6 Performance test results of each coating in Comparative Example 6
对比例7Comparative example 7
NiTiAl涂层(Al<0.5at.%):参照实施例3的涂层制备方法,制备了成分为Ni49.9Ti49.9Al0.2的NiTiAl合金涂层,作为本发明所述的NiTiAl-X合金涂层的对比例。由于Al含量过低,Al元素完全固溶于NiTi涂层基体,其耐空蚀、冲蚀性能与Ni50Ti50合金差别不大。NiTiAl coating (Al<0.5at.%): Referring to the coating preparation method of Example 3, a NiTiAl alloy coating with a composition of Ni 49.9 Ti 49.9 Al 0.2 was prepared as the NiTiAl-X alloy coating of the present invention. comparison ratio. Since the Al content is too low, the Al element is completely dissolved in the NiTi coating matrix, and its cavitation corrosion and erosion resistance are not much different from those of Ni 50 Ti 50 alloy.
对比例8Comparative example 8
NiTiAl涂层(Al>4at.%):参照实施例3的涂层制备方法,制备了成分为Ni47Ti47Al6与Ni46Ti46Al8的NiTiAl合金涂层,作为本发明所述的NiTiAl-X合金涂层的对比例。磁控溅射6h后,NiTiAl涂层平均厚度为16.5μm。随着Al元素的大量加入,NiTiAl涂层的硬度明显升高,但涂层韧性出现下降。此外,在涂层晶界处还观察到了大量的含Al析出相,这些析出相在空蚀过程中会成为空蚀裂纹源,导致涂层晶粒脱落,降低涂层的耐空蚀性能。成分为Ni47Ti47Al6与Ni46Ti46Al8的NiTiAl合金涂层在标准空蚀实验中均出现涂层破损的情况。NiTiAl coating (Al>4at.%): Referring to the coating preparation method of Example 3, a NiTiAl alloy coating composed of Ni 47 Ti 47 Al 6 and Ni 46 Ti 46 Al 8 was prepared as the coating of the present invention. Comparative example of NiTiAl-X alloy coating. After 6 hours of magnetron sputtering, the average thickness of the NiTiAl coating is 16.5 μm. With the addition of a large amount of Al element, the hardness of NiTiAl coating increases significantly, but the toughness of the coating decreases. In addition, a large number of Al-containing precipitates were observed at the grain boundaries of the coating. These precipitates will become the source of cavitation cracks during the cavitation erosion process, causing the coating grains to fall off and reducing the cavitation corrosion resistance of the coating. NiTiAl alloy coatings composed of Ni 47 Ti 47 Al 6 and Ni 46 Ti 46 Al 8 showed coating damage in standard cavitation corrosion experiments.
结合对比例5和对比例6可以看出,通过在NiTi合金中加入Al,可以适当提高涂层硬度与耐磨性;进一步结合对比例6-对比例8,可以得到,当NiTiAl合金中Al的成分<0.5at.%时,Al含量很少且完全固溶于NiTi基体中,NiTiAl涂层性能与NiTi涂层性能差别不大;NiTiAl合金中Al的成分>4at.%时,涂层的硬度明显升高,韧性下降,晶界析出相增加,导致涂层抗空蚀性能劣化。结合上述分析,本申请将涂层材料中的Al含量控制在0.5-4at.%之间。Combining Comparative Examples 5 and 6, it can be seen that by adding Al to NiTi alloy, the hardness and wear resistance of the coating can be appropriately improved; further combining Comparative Examples 6 to 8, it can be obtained that when the Al content in NiTiAl alloy When the composition is <0.5at.%, the Al content is very small and is completely dissolved in the NiTi matrix. The performance of the NiTiAl coating is not much different from that of the NiTi coating. When the composition of Al in the NiTiAl alloy is >4at.%, the hardness of the coating Significantly increased, the toughness decreased, and the grain boundary precipitated phase increased, resulting in the deterioration of the coating's cavitation corrosion resistance. Combined with the above analysis, this application controls the Al content in the coating material between 0.5-4at.%.
另外,本申请实施例采用磁控溅射方法所制备的涂层相较于TIG法而言,具有涂层更加致密,夹杂物与孔洞明显减少,耐空蚀、冲蚀性能更优的特点;相较于真空等离子喷涂+激光重熔处理而言,所制备涂层成本更低,工艺更为简单。本发明所述涂层合金成分同样适用于等离子喷涂方法制备。In addition, compared with the TIG method, the coating prepared by the magnetron sputtering method in the embodiment of the present application has the characteristics of a denser coating, significantly reduced inclusions and holes, and better cavitation corrosion resistance and erosion resistance; compared with Compared with vacuum plasma spraying + laser remelting treatment, the cost of the prepared coating is lower and the process is simpler. The coating alloy composition of the present invention is also suitable for preparation by plasma spraying method.
以上所述仅为本申请的实施例,并非因此限制本申请的专利范围,凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本申请的专利保护范围内。The above are only examples of the present application, and do not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of the present invention, or directly or indirectly applied to other related technologies fields are equally included in the scope of patent protection of this application.
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