CN116721953A - Intelligent storing, taking and transporting system and method - Google Patents

Intelligent storing, taking and transporting system and method Download PDF

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Publication number
CN116721953A
CN116721953A CN202310611089.4A CN202310611089A CN116721953A CN 116721953 A CN116721953 A CN 116721953A CN 202310611089 A CN202310611089 A CN 202310611089A CN 116721953 A CN116721953 A CN 116721953A
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CN
China
Prior art keywords
material box
station
intelligent
control center
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310611089.4A
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Chinese (zh)
Inventor
蔡建兵
刘新奎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huatian Technology Nanjing Co Ltd
Original Assignee
Huatian Technology Nanjing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huatian Technology Nanjing Co Ltd filed Critical Huatian Technology Nanjing Co Ltd
Priority to CN202310611089.4A priority Critical patent/CN116721953A/en
Publication of CN116721953A publication Critical patent/CN116721953A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Abstract

The system is used for transporting semiconductor products from a pressure welding station to a plastic packaging station, and comprises a control center, a handheld controller, an intelligent access station, a plasma cleaning station and a processing work order database for storing processing work order information; the intelligent access and transportation system is applicable to the storage and transportation of chips between the end of a pressure welding process and a plastic packaging process in the chip packaging process. Under the control coordination of the control center, different devices and different subsystems are mutually matched, so that the automatic storage and transportation of chips are realized, the labor force of personnel is effectively reduced, the devices replace the personnel, the abnormal problem caused by misoperation of the personnel is avoided, and the chip processing efficiency is improved.

Description

Intelligent storing, taking and transporting system and method
Technical Field
The invention relates to the technical field of intelligent automatic transmission, in particular to an intelligent storing, taking and transporting system and method.
Background
In the packaging industry, a product transmission mode from the end of a pressure welding process to the beginning of a plastic packaging process is mainly used for manual transmission of production personnel, the labor force of the personnel is large, and the production and processing efficiency of chips is limited.
In addition, due to manual transmission by personnel, products are likely to fall, collide, scratch, stain, dismatch in real objects and the like in the transmission process due to misoperation, so that the problems of product qualification rate reduction and abnormal transmission of products are caused.
Disclosure of Invention
The embodiment of the invention provides an intelligent access and transportation system and method, which are used for solving the problem of abnormal product transmission in the prior art.
The embodiment of the invention provides an intelligent access and transportation system which is characterized in that the system is used for transporting semiconductor products from a pressure welding station to a plastic packaging station, and comprises a control center, a handheld controller, an intelligent access station, a plasma cleaning station and a processing work order database for storing processing work order information;
the control center controls the action sequence of the intelligent access station and the intelligent transport vehicle according to the flow information and is used for coordinating the operation of the whole access and transport system;
the handheld controller is used for scanning the number information on the first material box and sending the number information to the control center; chips qualified in quality detection through a pressure welding station are stored in the first material box;
the control center is used for sending a first transportation instruction to the pressure welding intelligent transportation vehicle after receiving the serial number information of the first material box sent by the handheld controller;
the pressure welding intelligent transport vehicle is used for transporting the first material box from the pressure welding station to an intelligent access station;
the control center is used for sending first material box in-place information to a central console of the intelligent access station after receiving the information that the first material box sent by the pressure welding intelligent transport vehicle reaches the intelligent access station;
the center console is used for matching first storage information for the first material box and storing the first material box into a storage position corresponding to the first storage position information of the intelligent access station;
the control center is used for storing the number of the first material box into a processing work order database;
the control center is used for reading the target number of the current material box to be processed from the processing work station database, and the material box to be processed is the first material box;
the control center is used for sending a material calling instruction comprising the target number to the center console so that the center console can take out the first material box according to first storage information corresponding to the target number;
the control center is used for sending a first transportation instruction to a first plastic package intelligent transportation vehicle so that the first plastic package intelligent transportation vehicle can transport the first material box to a plasma cleaning station;
and the control center is used for sending a second transportation instruction to the second plastic package intelligent transportation vehicle after receiving the cleaning completion information of the plasma cleaning station, so that the second plastic package intelligent transportation vehicle transports the first material box storing the cleaned chips to the plastic package station.
Optionally, the press welding station further comprises a first docking station;
the first connection platform is used for placing a first material box provided with a chip which is inspected at the pressure welding station;
a transmission rail is arranged on the first connection table, and a connection baffle plate with the first material box is placed on the transmission rail;
the transmission rail can drive the connection baffle plate to slide, so that the connection baffle plate moves to the discharging table of the pressure welding intelligent transport vehicle.
Optionally, the first docking station further comprises clamping cylinders arranged at two sides of the transmission rail, and the clamping cylinders are used for clamping the docking baffle plates;
the connecting partition board is provided with at least one locating pin, and the locating pin is used for locating the first material box and preventing the first material box from shaking in the transportation process.
Optionally, the intelligent access station further comprises a second docking station and a first manipulator located above the second docking station;
the second docking station is used for placing a first material box transported from the pressure welding station to the intelligent access station; the first manipulator is used for transmitting the number information corresponding to the first material box to the center console and grabbing the first material box;
the first manipulator is provided with a first light source and a first camera, and the first camera is used for identifying the number information before the first manipulator grabs the first material box positioned on the second connection table; the first light source is used for providing auxiliary light when the first camera recognizes the number information.
Optionally, the intelligent access station further comprises a storage cabinet for storing the first material box and a stacker for accessing the first material box;
the stacker is provided with a stacker clamping jaw which is used for placing the first material box into the storage cabinet or taking the first material box out of the storage cabinet;
the stacker jaw is also used for transmitting the number information of the first magazine taken out of the storage cabinet to the center console.
Optionally, a second light source and a second camera are arranged on the stacker jaw;
the second camera is used for identifying the first material box when the stacker clamping jaw clamps the first material box from the storage cabinet; the second light source is used for providing auxiliary light when the second camera recognizes the number information.
Optionally, the intelligent access station is further provided with an abnormal temporary storage table for placing a damaged material box of the shell.
The embodiment of the invention also provides an intelligent access and transportation method, which comprises the following steps:
after receiving the serial number information of the first material box sent by the handheld controller, the control center sends a first transportation instruction to the pressure welding intelligent transportation vehicle so that the pressure welding intelligent transportation vehicle transports the first material box from the pressure welding station to an intelligent access station; the first material box stores chips which pass the quality detection of the pressure welding station, and the serial number information is acquired by the handheld controller;
after receiving the information that the first material box sent by the pressure welding intelligent transport vehicle reaches the intelligent access station, the control center sends first material box in-place information to a central console of the intelligent access station;
the center console matches first storage information for the first material box and stores the first material box into a storage position corresponding to the first storage information of the intelligent access station;
the control center stores the number of the first material box into a processing work order database;
the control center reads the target number of a current material box to be processed from the processing work order database, wherein the material box to be processed is the first material box;
the control center sends a material calling instruction comprising the target number to the center console so that the center console can take out the first material box according to first storage information corresponding to the target number;
the control center sends a first transportation instruction to a first plastic package intelligent transportation vehicle so that the first plastic package intelligent transportation vehicle transports the first material box to a plasma cleaning station;
after receiving the cleaning completion information of the plasma cleaning station, the control center sends a second transportation instruction to a second plastic package intelligent transportation vehicle, so that the second plastic package intelligent transportation vehicle transports the first material box storing the cleaned chips to the plastic package station.
Optionally, before the center console matches the first storage location information for the first magazine, the method further includes:
the center console controls the first manipulator to move towards the second connection platform;
the center console recognizes the serial number information of the first material box placed on the second connection platform through a camera arranged on the first manipulator, and simultaneously, a first light source is started to provide auxiliary light for the recognition process.
Optionally, before the plasma cleaning station cleans the chips in the first cartridge, the plasma cleaning station includes:
the plasma cleaning station control console controls a manipulator to clamp the first material box positioned on the third connection table and place the first material box on a transmission belt; one end of the transmission belt is flush with an inner cavity inlet of the plasma cleaning machine;
and after the driving belt drives the first material box to move to the inner cavity, the plasma cleaning station control console starts a cleaning program.
The embodiment of the invention has at least the following beneficial effects:
the system is used for transporting semiconductor products from a pressure welding station to a plastic packaging station, and comprises a control center, a handheld controller, an intelligent access station, a plasma cleaning station and a processing work order database for storing processing work order information; the intelligent access and transportation system is applicable to the storage and transportation of chips between the end of a pressure welding process and a plastic packaging process in the chip packaging process. Under the control coordination of the control center, different devices and different subsystems are matched with each other, automatic storage and transportation of chips are realized, personnel labor force is effectively reduced, the devices replace personnel, abnormal problems caused by misoperation of the personnel are avoided, and the chip processing efficiency is improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a layout of an intelligent access and transportation system according to an embodiment of the present invention;
fig. 2 is a schematic view of a docking station according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of a smart access station layout;
FIG. 4 is a flow chart of an intelligent access and transportation method according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a plasma cleaning station according to an embodiment of the present invention.
Reference numerals:
1-a pressure welding station; 2-an intelligent access station; 3-a plasma cleaning station; 4-plastic packaging station; 5-a first docking station; 6-a first cartridge; 7-a transmission rail; 8-connecting a baffle plate; 9-clamping a cylinder; 10-positioning pins; 11-a second docking station; 12-a first manipulator; 13-a stacker; 14-stacker jaws; 15-a storage cabinet; 16-an exception temporary storage table; 17-a pressure welding intelligent transport vehicle; 18-indexing; 19-ground rails; 20-an intelligent access station blanking connection table; 21-a second manipulator; 22-a third docking station; 23-a plasma cleaning station manipulator; 24-a blanking connection table of a plasma cleaning station; 25-lumen; 26-a plasma cleaning station belt 26.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Fig. 1 is a schematic layout diagram of an intelligent access and transportation system according to an embodiment of the present invention.
As shown in fig. 1, the system is used for transporting semiconductor products from a bonding station 1 to a plastic packaging station 4, and comprises a control center, a handheld controller, an intelligent access station 2, a plasma cleaning station 3 and a processing work order database for storing processing work order information;
the control center controls the action sequence of the intelligent access station 2 and the intelligent transport vehicle according to the flow information, and is used for coordinating the operation of the whole access and transport system;
the handheld controller is used for scanning the number information on the first material box and sending the number information to the control center; and chips which pass the quality detection of the pressure welding station 1 are stored in the first material box.
Specifically, the chip packaging process can be roughly divided into 8 main steps of back thinning, wafer cutting, wafer mounting, pressure welding, plastic packaging, laser printing, rib cutting forming, finished product testing and the like. The embodiment of the invention is mainly used for transporting the chip which is subjected to pressure welding and is inspected to the process between plastic packaging processes. The chips after inspection are loaded into the material boxes, a plurality of chips are loaded in each material box, and each material box is provided with a number, and the chips are accessed and transported mainly through the material boxes.
The whole access transportation flow is set in the control center in advance, and the control center coordinates the mutual coordination among different systems and devices according to different flows so as to finish the transportation of chips.
The hand-held controller is a small palm computer which can communicate with the control center and is provided with a scanning probe. The chips that have been inspected in the bonding process, i.e., the qualified chips, are loaded into the magazine as the first magazine 6. The production personnel uses the scanning probe on the handheld controller to scan the serial numbers on the first material boxes 6, the serial numbers of the first material boxes 6 obtained through scanning are transmitted to the control center through the handheld controller, the control center generates processing sequence information according to the serial numbers of the material boxes and stores the processing sequence information into a processing work order database, and then the production personnel places the scanned first material boxes 6 on a connection table of the pressure welding station 1 and waits for the pressure welding intelligent transport vehicle 17 to receive the first material boxes 6. The processing work order database, namely the work order posting system, not only contains the processing work order information, but also binds the material boxes with the numbers in the work orders, and processes the corresponding material boxes according to the processing sequence in the work orders.
The control center is used for sending a first transportation instruction to the pressure welding intelligent transportation vehicle after receiving the serial number information of the first material box sent by the handheld controller;
the pressure welding intelligent transport vehicle is used for transporting the first material box from the pressure welding station to an intelligent access station;
the control center is used for sending first material box in-place information to a central console of the intelligent access station after receiving the information that the first material box 6 sent by the pressure welding intelligent transport vehicle reaches the intelligent access station;
the center console is used for matching first storage information for the first material box and storing the first material box into a storage position corresponding to the first storage position information of the intelligent access station.
Specifically, the handheld controller scans the serial number of the first magazine 6, and uploads the serial number to the control center, and after receiving the serial number information, the control center determines that the first magazine 6 has been placed on the pressure welding docking station, and sends a receiving instruction to the pressure welding intelligent transport vehicle 17.
The intelligent access station 2 is mainly used for temporarily storing the first material box 6, so as to prevent the chips which are not molded from being oxidized too long in waiting time. Since the chips after the press-welding inspection are generally not directly transported to the plastic packaging station 4, they are temporarily stored in the intelligent access station 2, and are taken out from the intelligent access station 2 after waiting for being sequentially arranged to the first material box 6 according to the processing work order. The central console of the intelligent access station 2 mainly controls the operation of the whole intelligent access station 2.
The intelligent transport vehicle comprises a line identification function, a point location identification function, a carrier identification function and a collision sensing function. The intelligent transportation vehicle 17 for pressure welding refers to an intelligent transportation vehicle for transporting the first material box 6 of the pressure welding station 1 to the intelligent access station 2, and the point location identification specifically includes a point location of the first connection platform 5 capable of identifying the pressure welding station 1 and a receiving point location for transporting to the intelligent access station 2. When the first connecting table 5 connects the first material box 6, the pressure welding intelligent transport vehicle 17 firstly identifies the carrier on which the first material box 6 is placed, and then connects the carrier, namely the first material box 6, namely the connecting partition plate 8. The intelligent transportation vehicle 17 for pressure welding can prevent collision with other equipment by the collision sensing function contained in the process of taking and transporting the first material box 6.
The control center is used for storing the number of the first material box into a processing work order database;
the control center is used for reading the target number of the current material box to be processed from the processing work station database, and the material box to be processed is the first material box;
the control center is used for sending a material calling instruction comprising the target number to the center console so that the center console can take out the first material box according to first storage information corresponding to the target number;
the control center is used for sending a first transportation instruction to a first plastic package intelligent transportation vehicle so that the first plastic package intelligent transportation vehicle can transport the first material box to a plasma cleaning station;
and the control center is used for sending a second transportation instruction to the second plastic package intelligent transportation vehicle after receiving the cleaning completion information of the plasma cleaning station, so that the second plastic package intelligent transportation vehicle transports the first material box storing the cleaned chips to the plastic package station.
Specifically, the central console of the intelligent access station 2 takes out the corresponding cartridge according to the received cartridge number information. After receiving the information of the taking-out of the material box, the control center sends an instruction to the first plastic package transport vehicle to transport the taken-out first material box 6. The first plastic package intelligent transport vehicle has a transport route from the intelligent access station 2 to the plasma cleaning station 3.
The plasma cleaning station 3 mainly cleans the chips in the first material box 6 before plastic packaging, and removes the pollutants such as particle pollutants, oxides, epoxy resin and the like attached on the surfaces of the chips so as to improve the welding quality and the bonding strength between the chips and the plastic packaging material.
The transport route of the second intelligent transport vehicle is from the plasma cleaning station 3 to the plastic packaging station 4, and the control center sends a transport instruction to the second intelligent transport vehicle to transport the cleaned first material box 6 to the plastic packaging station 4.
In summary, the embodiment of the invention provides an intelligent access and transportation system, which is used for transporting semiconductor products from a pressure welding station to a plastic packaging station, and comprises a control center, a handheld controller, an intelligent access station, a plasma cleaning station and a processing work order database for storing processing work order information; the intelligent access and transportation system is applicable to the storage and transportation of chips between the end of a pressure welding process and a plastic packaging process in the chip packaging process. Under the control coordination of the control center, different devices and different subsystems are mutually matched, automatic storage and transportation of chips are realized, personnel labor force is effectively reduced, equipment replaces personnel, abnormal problems caused by misoperation of the personnel are avoided, and chip processing efficiency and qualification rate are improved.
In one possible embodiment, the bonding station further comprises a first docking station;
the first connection platform is used for placing a first material box provided with a chip which is inspected at the pressure welding station;
a transmission rail is arranged on the first connection table, and a connection baffle plate with the first material box is placed on the transmission rail;
the transmission rail can drive the connection baffle plate to slide, so that the connection baffle plate moves to the discharging table of the pressure welding intelligent transport vehicle.
Specifically, fig. 2 is a schematic structural diagram of a docking station according to an embodiment of the present invention.
As shown in fig. 2, the chips, which have been subjected to quality inspection at the bonding station 1, are loaded into a magazine, i.e., a first magazine 6, which contains chips. The first magazine 6 is placed on the docking baffle 8, and the docking baffle 8 is placed on the transmission rail 7 of the first docking station 5, waiting for the pressure welding intelligent transport vehicle 17 to access the first magazine 6.
The transmission rail 7 is provided with balls, and the pressure welding intelligent transport vehicle 17 firstly moves to the position right below the connection baffle 8 positioned on the transmission rail 7 in the first connection platform 5 when the first connection platform 5 is connected with the material taking box, and at the moment, the top of the pressure welding intelligent transport, namely the discharging platform, is contacted with the bottom of the connection baffle 8. The pressure welding intelligent transport vehicle 17 slowly moves out of the first connection table 5 and drives the connection partition plate 8 to move, and moves out of the first connection table 5 along the transmission rail 7 under the action of the balls. Until the intelligent transportation vehicle is completely moved to the top discharging table of the intelligent transportation vehicle 17, and the intelligent transportation vehicle 17 is connected with the first material box 6. In the embodiment of the invention, the docking station structures of all stations are the same.
In one possible embodiment, the first docking station further comprises clamping cylinders arranged at two sides of the transmission rail, wherein the clamping cylinders are used for clamping the docking baffle;
the connecting partition board is provided with at least one locating pin, and the locating pin is used for locating the first material box and preventing the first material box from shaking in the transportation process.
Specifically, as shown in fig. 2, clamping cylinders 9 are further disposed on two sides of the transmission rail 7 of the first connection platform 5, when the pressure welding intelligent transport vehicle 17 does not access the first material box 6 yet, the connection partition plate 8 is clamped, when a plurality of material boxes are prevented from being placed, the connection partition plate 8 slides along the transmission rail 7 through balls, and the connection partition plate 8 is limited left and right.
The baffle 8 of plugging into still is provided with a plurality of locating pins 10, and every locating pin 10 is used for fixing a position the magazine, prevents that first magazine 6 from rocking in the transportation, probably causes a plurality of magazines confusion on the baffle 8 of plugging into. In the embodiment of the invention, the number of the cartridges which can be placed on the partition plate is eight, and in other embodiments, the number of cartridges can be set to be other.
In addition, the connection baffle plates 8 are further provided with inductors for sensing the placement quantity of the material boxes, and corresponding numbers are printed on each connection baffle plate 8, so that the intelligent transport vehicle can be identified conveniently. Baffle height reasonable setting of baffle 8 both sides of plugging into prevents that follow-up from inserting when getting the material box from plugging into baffle 8, receives the baffle influence.
In one possible embodiment, the intelligent access station further comprises a second docking station and a first robot located above the second docking station;
the second docking station is used for placing a first material box transported from the pressure welding station to the intelligent access station; the first manipulator is used for transmitting the number information corresponding to the first material box to the center console and grabbing the first material box;
the first manipulator is provided with a first light source and a first camera, and the first camera is used for identifying the number information when the first manipulator grabs the first material box positioned on the second connection table; the first light source is used for providing auxiliary light when the first camera recognizes the number information.
Specifically, fig. 3 is a schematic diagram of a smart access station layout.
As shown in fig. 3, the intelligent access station 2 includes an intelligent access station 2 feeding end and an intelligent access station 2 discharging end, and the press welding intelligent transport vehicle 17 transports the first material box 6 received from the press welding station 1 to the intelligent access station 2 feeding end and places the first material box on the second connection platform 11 located at the intelligent access station 2 feeding end, where the second connection platform 11 is also called an intelligent access station feeding connection platform. The intelligent access station 2 material loading end still includes first manipulator 12, and first manipulator 12 sets up in the top of second connection platform 11 to first manipulator 12 is multiaxis manipulator, and its accessible scope is big. The first manipulator 12 is provided with a first camera and a first light source, the first camera is used for scanning the number of the first material box 6 on the second connection table 11, and in order to avoid the error of the number of the first material box 6 identified by the first camera when the light is insufficient, the first light source is arranged for supplementing light to the first camera identification process. The first manipulator 12 is configured to grasp the identified cartridge after transmitting the scanned cartridge number of the first cartridge 6 to the central console of the intelligent access station 2. The first camera is an industrial CCD camera, is an image sensor used for machine vision, integrates photoelectric conversion, charge storage, charge transfer and signal reading, and is a typical solid imaging device. CCD is a short for charge-coupled device (Charge Coupled Device)
In one possible embodiment, the intelligent access station further comprises a storage cabinet for storing the first magazine and a stacker for accessing the first magazine;
the stacker is provided with a stacker clamping jaw which is used for placing the first material box into the storage cabinet or taking the first material box out of the storage cabinet;
the stacker jaw is also used for transmitting the number information of the first magazine taken out of the storage cabinet to the center console.
Specifically, as shown in fig. 3, the intelligent access station 2 stores the material box, specifically, the material box is stored in the storage cabinet 15, the storage cabinet 15 is a nitrogen cabinet, and the proper temperature and humidity are set to protect the chips in the material box. The storage cabinet 15 also has a plurality of storage bits, each storage bit is provided with a material box, and each storage bit has certain storage bit information in the central console of the intelligent access station 2.
The stacker 13 can store the first magazine 6 located at the loading end in the storage position or take out the first magazine 6 located in the storage position Zhu Gong from the storage position to transport to the unloading end. Before the stacker 13 takes out the first magazine 6 from the storage position via the stacker jaw 14, the magazine number information corresponding to the first magazine 6 taken out is transmitted to the center console.
In one possible embodiment, a second light source and a second camera are provided on the stacker jaw;
the second camera is used for identifying the first material box when the stacker clamping jaw clamps the first material box from the storage cabinet; the second light source is used for providing auxiliary light when the second camera recognizes the number information.
Specifically, the stacker jaw 14 is also provided with a second light source and a second camera, which function identically to the first robot 12. The second camera is used for identifying the serial number information of the material box, and the second light source is used for providing auxiliary light rays when the camera is used for identifying, so that the defect of insufficient light rays, failure in identification or error in identification is prevented. In a possible implementation manner, the intelligent access station is further provided with an anomaly temporary storage table for placing a cartridge with damaged shell.
Specifically, as shown in fig. 3, during transportation, the material box may be damaged, so the loading end and the unloading end of the intelligent access station 2 are both provided with an abnormal temporary storage table 16 for temporarily storing abnormal material boxes, so that the damaged material boxes can be timely controlled to circulate during processing.
In order to more clearly describe the intelligent access and transportation system provided by the embodiment of the invention, the intelligent access and transportation method of the system is described in detail below with reference to fig. 4.
As shown in fig. 4, the intelligent access and transportation method comprises the following steps:
step 101, after receiving the serial number information of a first material box sent by a handheld controller, the control center sends a first transportation instruction to a pressure welding intelligent transportation vehicle so that the pressure welding intelligent transportation vehicle transports the first material box from a pressure welding station to an intelligent access station; and chips qualified in quality detection of the pressure welding station are stored in the first material box, and the serial number information is acquired by the handheld controller.
Specifically, after the chip with the quality inspection completed in the press welding station 1 is loaded into the first magazine 6, the serial number information of the magazine is scanned manually by using the handheld controller, and the first magazine 6 is placed on the first docking station 5 of the press welding station 1 after the scanning.
The control center receives the serial number information of the material boxes transmitted by the handheld controller, which means that the first material box 6 is already placed on the first connection platform 5 at this time, and sends a first instruction to the pressure welding intelligent transport vehicle 17 at this time. The first instruction contains content that means that the first magazine 6 located on the first docking station 5 is transported to the receiving site of the intelligent access station 2.
Step 102, after receiving the information that the first material box sent by the pressure welding intelligent transport vehicle has arrived at the intelligent access station, the control center sends first material box in-place information to a central console of the intelligent access station.
Specifically, the press-welding intelligent transport vehicle 17 transmits information that the first magazine 6 has been sent to the intelligent access station 2 to the control center after transporting the first magazine 6 located on the first docking station 5 to the second docking station 11 of the intelligent access station 2 according to the first instruction content. The control center sends the information that the first material box 6 has arrived to the central console of the intelligent access station 2 according to the set access transportation flow, and the central console starts to perform subsequent storage actions on the first material box 6.
Step 103, the central console matches the first storage location information for the first material box, and stores the first material box into a storage location corresponding to the first storage location information of the intelligent access station.
Specifically, as shown in fig. 3, after the central console of the intelligent access station 2 collects the number information of the first magazine 6, among the plurality of empty storage location information of the storage cabinets 15 pre-stored in the central console, a first storage location information is matched for the first magazine 6, and the first storage location information corresponds to a specific storage location in the storage cabinets 15. After the first storage position information is matched with the first material box 6, the first manipulator 12 clamps the first material box 6 positioned on the first connection platform 5 and is placed in the turnover position 18 of the feeding end, then the stacker 13 is controlled to clamp the first material box 6 in the turnover position 18 through the stacker clamping jaw 14, after clamping, the stacker 13 moves along the ground rail 19 to the position of the actual storage position corresponding to the first storage position information matched with the central control platform, and the first material box 6 is placed in the actual storage position. The ground rail 19 serves to restrict the moving path of the stacker 13, preventing the stacker 13 from touching the storage tank 15 at the body.
And 104, the control center stores the number of the first material box into a processing work order database.
Specifically, after receiving the number corresponding to the first magazine 6 sent from the handheld controller, the control center adds the number to the machining tool list database. The processing flow is carried out according to the serial numbers of the material boxes stored in the processing work order database.
And 105, the control center reads the target number of the current to-be-processed material box from the processing work order database, wherein the to-be-processed material box is the first material box.
Specifically, the control center reads the material box number in the processing work order database and determines the material box number corresponding to the material box to be processed currently.
And 106, the control center sends a material calling instruction comprising the target number to the center console so that the center console can take out the first material box according to the first storage information corresponding to the target number.
Specifically, after determining the serial number of the material box to be processed, the control center simultaneously sends a material calling instruction to the central console, wherein the material calling instruction comprises the material box serial number information corresponding to the material box to be processed. The central console receives the material box number information, and searches the storage information corresponding to the material box number information in the storage information of the matched material box number information stored in the central console. The storage information is determined to be the first storage information, and the stacker 13 is controlled to move to the storage corresponding to the first storage information in which the first magazine 6 is stored. The second camera and the second light source on the stacker jaw 14 are controlled to recognize the number information of the material box stored in the storage position, and after the first material box 6 is determined to be found, the first material box 6 is clamped and moved to the blanking end, namely the second end, of the intelligent access station 2.
As shown in fig. 3, the second end of the intelligent access station 2 has the same equipment type as the first end, and also comprises an intelligent access station blanking docking station 20, a turnover position 18, a second manipulator 21, and a light source and a camera which function in the same manner as the first light source and the first camera are still arranged on the second manipulator 21.
After the stacker 13 has gripped the first magazine 6 and moved to the second end, the first magazine is placed in the turn-around position 18 of the blanking end. The central console controls the second manipulator 21, clamps the first material box 6 from the blanking end turnover position 18 and places the first material box in the intelligent access station blanking connection table 20, and sends information that the material box to be processed is taken out to the control center.
Step 107, the control center sends a first transportation instruction to a first plastic package intelligent transportation vehicle, so that the first plastic package intelligent transportation vehicle transports the first material box to a plasma cleaning station.
Specifically, fig. 5 is a schematic structural diagram of a plasma cleaning station 3 according to an embodiment of the present invention.
As shown in fig. 5, after receiving the information that the to-be-processed material box has been taken out, the control center sends a first transport instruction for transporting the to-be-processed material box to the plasma cleaning station 3 to the first plastic package intelligent transport vehicle, and after receiving the first instruction, the first transport vehicle transports the to-be-processed first material box 6 to the loading end docking station of the plasma cleaning station 3, meanwhile, the control center communicates with the control console of the plasma cleaning station 3, and cleaning parameters required for cleaning chips in the first material box are downloaded in advance through an automatic calling system integrated in the control center.
And step 108, after receiving the cleaning completion information of the plasma cleaning station, the control center sends a second transportation instruction to a second plastic package intelligent transportation vehicle so that the second plastic package intelligent transportation vehicle transports the first material box with the cleaned chips to the plastic package station.
Specifically, as shown in fig. 5, after the first magazine 6 is transported to the loading end of the plasma cleaning station 3, the plasma cleaning station 3 cleans the chips in the first magazine 6 using cleaning parameters downloaded in advance. After the cleaning is finished, the control platform of the plasma cleaning station 3 controls the cleaned first material box 6 to be placed on the blanking connection platform 24 of the plasma cleaning station 3, and sends the cleaning finishing information to the control center. After receiving the information, the control center sends a second transportation instruction for transporting the first material box 6 which is cleaned in the plasma cleaning station 3 to the plastic packaging station 4 to the second plastic packaging intelligent transportation vehicle, and meanwhile, the control center communicates with the plastic packaging station 4 to download specific parameters of the first material box 6 in advance. After receiving the second instruction, the second plastic package intelligent transportation vehicle transports the cleaned first material box 6 to the connection platform of the plastic package station 4.
In one possible implementation, before the center console matches the first storage location information for the first magazine, the method further includes:
the center console controls the first manipulator to move towards the second connection platform;
the center console recognizes the serial number information of the first material box placed on the second connection platform through a camera arranged on the first manipulator, and simultaneously, a first light source is started to provide auxiliary light for the recognition process.
Specifically, as shown in fig. 3, after the first magazine 6 is transported to the second docking station 11 located at the loading end of the intelligent access station 2, the center console controls the first manipulator 12 to move to the first docking station 5, scans the number of the first magazine 6 on the first docking station 5 by the first camera mounted on the first manipulator 12, and starts the first light source during scanning.
In one possible embodiment, before the plasma cleaning station cleans the chips in the first cartridge, the plasma cleaning station includes:
the plasma cleaning station control console controls a plasma cleaning station manipulator to clamp the first material box positioned on the third connection table and place the first material box on the transmission belt; one end of the transmission belt is flush with an inner cavity inlet of the plasma cleaning machine;
and after the driving belt drives the first material box to move to the inner cavity, the plasma cleaning station control console starts a cleaning program.
Specifically, as shown in fig. 5, the third docking station 22 is a docking station at the feeding end of the plasma cleaning station 3, and after the second plastic package carrier is connected to the first material box 6 to be processed from the intelligent access station 2, the first material box 6 is placed on the third docking station 22 of the plasma cleaning station 3. The control console of the plasma cleaning station 3 controls the manipulator 23 of the plasma cleaning station to clamp the first material box 6 on the third connection table 22 and place the first material box on the driving belt 26 of the plasma cleaning station. The plasma cleaning station driving belt 26 drives the first material box 6 to move towards the inner cavity of the plasma cleaning machine, after the first material box 6 enters the inner cavity, the plasma cleaning station control console starts a cleaning program, and chips in the first material box 6 are cleaned by adopting cleaning parameters downloaded in advance.
In summary, the embodiments of the present invention provide an intelligent access and transportation system and method, where the system is used for transporting semiconductor products from a bonding station to a plastic packaging station, and the system includes a control center, a handheld controller, an intelligent access station, a plasma cleaning station, and a processing work order database for storing processing work order information; the intelligent access and transportation system is applicable to the storage and transportation of chips between the end of a pressure welding process and a plastic packaging process in the chip packaging process. Under the control coordination of the control center, different devices and different subsystems are mutually matched, so that the automatic storage and transportation of chips are realized, the labor force of personnel is effectively reduced, the equipment replaces personnel, the abnormal problem caused by misoperation of personnel is avoided, the chip processing efficiency is improved, and the processing cost is reduced.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims (10)

1. An intelligent access and transportation system is characterized in that the system is used for transporting semiconductor products from a pressure welding station to a plastic packaging station, and comprises a control center, a handheld controller, an intelligent access station, a plasma cleaning station and a processing work order database for storing processing work order information;
the control center controls the action sequence of the intelligent access station and the intelligent transport vehicle according to the flow information and is used for coordinating the operation of the whole access and transport system;
the handheld controller is used for scanning the number information on the first material box and sending the number information to the control center; chips qualified in quality detection through a pressure welding station are stored in the first material box;
the control center is used for sending a first transportation instruction to the pressure welding intelligent transportation vehicle after receiving the serial number information of the first material box sent by the handheld controller;
the pressure welding intelligent transport vehicle is used for transporting the first material box from the pressure welding station to an intelligent access station;
the control center is used for sending first material box in-place information to a central console of the intelligent access station after receiving the information that the first material box sent by the pressure welding intelligent transport vehicle reaches the intelligent access station;
the center console is used for matching first storage information for the first material box and storing the first material box into a storage position corresponding to the first storage position information of the intelligent access station;
the control center is used for storing the number of the first material box into a processing work order database;
the control center is used for reading the target number of the current material box to be processed from the processing work station database, and the material box to be processed is the first material box;
the control center is used for sending a material calling instruction comprising the target number to the center console so that the center console can take out the first material box according to first storage information corresponding to the target number;
the control center is used for sending a first transportation instruction to a first plastic package intelligent transportation vehicle so that the first plastic package intelligent transportation vehicle can transport the first material box to a plasma cleaning station;
and the control center is used for sending a second transportation instruction to the second plastic package intelligent transportation vehicle after receiving the cleaning completion information of the plasma cleaning station, so that the second plastic package intelligent transportation vehicle transports the first material box storing the cleaned chips to the plastic package station.
2. The system of claim 1, wherein the bonding station further comprises a first docking station;
the first connection platform is used for placing a first material box provided with a chip which is inspected at the pressure welding station;
a transmission rail is arranged on the first connection table, and a connection baffle plate with the first material box is placed on the transmission rail;
the transmission rail can drive the connection baffle plate to slide, so that the connection baffle plate moves to the discharging table of the pressure welding intelligent transport vehicle.
3. The system of claim 2, wherein the first docking station further comprises clamping cylinders disposed on either side of the drive rail, the clamping cylinders for clamping the docking baffle;
the connecting partition board is provided with at least one locating pin, and the locating pin is used for locating the first material box and preventing the first material box from shaking in the transportation process.
4. The system of claim 1, wherein the intelligent access station further comprises a second docking station and a first robot positioned above the second docking station;
the second docking station is used for placing a first material box transported from the pressure welding station to the intelligent access station; the first manipulator is used for transmitting the number information corresponding to the first material box to the center console and grabbing the first material box;
the first manipulator is provided with a first light source and a first camera, and the first camera is used for identifying the number information before the first manipulator grabs the first material box positioned on the second connection table; the first light source is used for providing auxiliary light when the first camera recognizes the number information.
5. The system of claim 1, wherein the intelligent access station further comprises a storage bin for storing the first cartridge and a stacker for accessing the first cartridge;
the stacker is provided with a stacker clamping jaw which is used for placing the first material box into the storage cabinet or taking the first material box out of the storage cabinet;
the stacker jaw is also used for transmitting the number information of the first magazine taken out of the storage cabinet to the center console.
6. The system of claim 5, wherein the stacker jaw has a second light source and a second camera disposed thereon;
the second camera is used for identifying the first material box when the stacker clamping jaw clamps the first material box from the storage cabinet; the second light source is used for providing auxiliary light when the second camera recognizes the number information.
7. The system of claim 1, wherein the intelligent access station is further provided with an anomaly staging station for placing a broken-shell magazine.
8. A smart access, transportation method, applied to the system of any one of the preceding claims 1 to 7, said method comprising:
after receiving the serial number information of the first material box sent by the handheld controller, the control center sends a first transportation instruction to the pressure welding intelligent transportation vehicle so that the pressure welding intelligent transportation vehicle transports the first material box from the pressure welding station to an intelligent access station; the first material box stores chips which pass the quality detection of the pressure welding station, and the serial number information is acquired by the handheld controller;
after receiving the information that the first material box sent by the pressure welding intelligent transport vehicle reaches the intelligent access station, the control center sends first material box in-place information to a central console of the intelligent access station;
the center console matches first storage information for the first material box and stores the first material box into a storage position corresponding to the first storage information of the intelligent access station;
the control center stores the number of the first material box into a processing work order database;
the control center reads the target number of a current material box to be processed from the processing work order database, wherein the material box to be processed is the first material box;
the control center sends a material calling instruction comprising the target number to the center console so that the center console can take out the first material box according to first storage information corresponding to the target number;
the control center sends a first transportation instruction to a first plastic package intelligent transportation vehicle so that the first plastic package intelligent transportation vehicle transports the first material box to a plasma cleaning station;
after receiving the cleaning completion information of the plasma cleaning station, the control center sends a second transportation instruction to a second plastic package intelligent transportation vehicle, so that the second plastic package intelligent transportation vehicle transports the first material box storing the cleaned chips to the plastic package station.
9. The method of claim 8, further comprising, before the center console matches the first bin information for the first cartridge:
the center console controls the first manipulator to move towards the second connection platform;
the center console recognizes the serial number information of the first material box placed on the second connection platform through a camera arranged on the first manipulator, and simultaneously, a first light source is started to provide auxiliary light for the recognition process.
10. The method of claim 8, wherein the plasma cleaning station comprises, prior to cleaning the chips in the first cartridge:
the plasma cleaning station control console controls a manipulator to clamp the first material box positioned on the third connection table and place the first material box on a transmission belt; one end of the transmission belt is flush with an inner cavity inlet of the plasma cleaning machine;
and after the driving belt drives the first material box to move to the inner cavity, the plasma cleaning station control console starts a cleaning program.
CN202310611089.4A 2023-05-25 2023-05-25 Intelligent storing, taking and transporting system and method Pending CN116721953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310611089.4A CN116721953A (en) 2023-05-25 2023-05-25 Intelligent storing, taking and transporting system and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310611089.4A CN116721953A (en) 2023-05-25 2023-05-25 Intelligent storing, taking and transporting system and method

Publications (1)

Publication Number Publication Date
CN116721953A true CN116721953A (en) 2023-09-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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