CN116715148B - Automatic centering device of vertical cryopump - Google Patents
Automatic centering device of vertical cryopump Download PDFInfo
- Publication number
- CN116715148B CN116715148B CN202310956166.XA CN202310956166A CN116715148B CN 116715148 B CN116715148 B CN 116715148B CN 202310956166 A CN202310956166 A CN 202310956166A CN 116715148 B CN116715148 B CN 116715148B
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- guide hose
- collar
- box
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- 238000005192 partition Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 230000000903 blocking effect Effects 0.000 claims description 5
- 210000003437 trachea Anatomy 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 230000007246 mechanism Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C5/00—Base supporting structures with legs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention relates to the technical field of low-temperature pump hoisting, and discloses an automatic centering device of a vertical low-temperature pump. According to the invention, the limit guide hose is matched with the adapter and the like, so that the limit guide hose can be pulled open, the limit guide hose is used for guiding, then the low-temperature pump is downwards lowered through the crane, the low-temperature pump can directly fall on a required position when the low-temperature pump moves downwards, the position of the low-temperature pump is not required to be regulated, and the low-temperature pump is convenient to install when the low-temperature pump is connected and fixed.
Description
Technical Field
The invention relates to the technical field of low-temperature pump hoisting, in particular to an automatic centering device of a vertical low-temperature pump.
Background
The cryopump is a vacuum pump that condenses a gas by using a low-temperature surface, also called a condensing pump. The cryopump can obtain clean vacuum with the maximum pumping rate and the lowest limiting pressure, and is widely applied to research and production of semiconductors and integrated circuits, molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like; for larger cryopumps, the lower part of the cryopump is provided with a through hole, and when the cryopump is installed, the cryopump is laborious to move, so a lifting appliance is generally used, the cryopump is moved to the upper part of the mounting seat, the through hole at the bottom of the cryopump is aligned with the threaded hole on the mounting seat, and then the cryopump is put down, so that the cryopump falls on the mounting seat, and the cryopump can be fixed by using bolts to pass through the through hole.
In the movable gantry crane disclosed in patent document with the authorized bulletin number of CN210133821U, the movable gantry crane comprises a crane frame, a cantilever beam arranged at the upper end of the crane frame, a crane body slidingly connected along the length direction of the cantilever beam, and a crane arranged at the lower end of the crane body, wherein the crane body comprises a frame, rollers, a manual locking mechanism arranged on the frame and used for locking the cantilever beam, a crane chain, and a folding roller mechanism arranged at the bottom of the crane frame, and four corners of the crane frame can be supported on the ground after the folding roller mechanism is folded. The device needs to lift the cryopump when installing the cryopump, but when the cryopump is lifted by the lifting appliance, the cryopump easily shakes, and then when the cryopump is placed on the mounting seat, the cryopump easily shakes to cause offset in the process of aligning the through hole at the bottom of the cryopump with the threaded hole on the mounting seat, so that the cryopump needs to be lifted again, and the through hole and the threaded hole are aligned again, which is very troublesome.
Therefore, we propose an automatic centering device for a vertical cryopump to solve the above problems.
Disclosure of Invention
The invention aims to solve the technical problems in the background technology, and provides an automatic centering device of a vertical cryopump.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the utility model provides a vertical cryopump automatic centering device, includes gallows and hangs the loop wheel machine that has the cryopump, the lateral wall fixedly connected with box of gallows, and the inner wall rotation of box is connected with the commentaries on classics pipe, the outer wall winding of commentaries on classics pipe has spacing guide hose, and the one end and the commentaries on classics pipe fixed connection of spacing guide hose, the one end of spacing guide hose runs through the box and extends to the box outside, the one end fixedly connected with adapter that is located the outside of box of spacing guide hose, and the one end fixedly connected with threaded rod of adapter;
the adapter comprises a connecting sleeve and a connecting shaft, wherein the connecting sleeve is fixedly connected with a limiting guide hose, the connecting shaft is fixedly connected with a threaded rod, and the connecting sleeve is rotationally connected with the connecting shaft.
Preferably, the outer wall of changeing the pipe rotates the cover and is equipped with the division board, and the outer wall and the box fixed connection of division board, and the division board is located the both sides of spacing guide hose, and the outer wall cover of changeing the pipe is equipped with the clockwork spring, and the one end and the changeing the pipe fixed connection of clockwork spring, the other end and the box fixed connection of clockwork spring, the inner wall rotation of box is connected with accomodates and blocks the subassembly.
Preferably, the storage blocking assembly comprises a rotating shaft rotationally connected with the inner wall of the box body, a gear is arranged on the outer wall of the rotating shaft in a fixed sleeve mode, a rotating ring is arranged on the outer wall of the rotating pipe in a fixed sleeve mode, a tooth block is fixedly connected with the outer wall of the rotating ring and meshed with the gear, a first stop block is fixedly connected with the inner wall of the box body, a first shaft collar is sleeved on the outer wall of the rotating shaft, and a second stop block is fixedly connected with one side wall of the first shaft collar.
Preferably, the upper surface fixedly connected with air pump of gallows, and the output fixedly connected with trachea of air pump, the outer wall of changeing the pipe rotates the cover and is equipped with the connecting cover, and connecting cover and changeing the pipe intercommunication, tracheal one end runs through the box and communicates with the connecting cover, spacing guide hose and changeing the pipe intercommunication, and the aperture has been seted up to the outer wall of spacing guide hose.
Preferably, the outer wall cover of pivot is equipped with the second collar, and the outer wall fixedly connected with third dog of second collar, the lateral wall fixedly connected with touch switch of division board, and touch switch and air pump electric connection.
Preferably, the side walls of the first collar and the second collar are both in threaded connection with bolts.
Preferably, the lower surface of the box body is provided with a yielding groove, and a sealing cover is arranged in the yielding groove.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, through the matched use of the structures such as the limit guide hose and the adapter, the limit guide hose can be pulled open, the limit guide hose is used for guiding, then the low-temperature pump is downwards lowered through the crane, when the low-temperature pump moves downwards, the low-temperature pump can directly fall on a required position, the position of the low-temperature pump does not need to be regulated, and the low-temperature pump is convenient to install when the low-temperature pump is connected and fixed.
2. According to the invention, by arranging the spring, after the limit guide hose is used, the threaded rod is turned off, and then the pulled limit guide hose is loosened, so that the spring can rotate with the rotating pipe, and the rotating pipe can automatically store the limit guide hose.
3. The invention can automatically block the rotation of the rotary pipe after loosening the limit guide hose and rotating the rotary pipe for a certain number of turns through the cooperation of the structures such as the rotary shaft, the gear and the tooth block, so as to prevent the limit guide hose and the adapter from being completely received in the box body, thereby being convenient for pulling when the device is used next time.
4. According to the invention, through the cooperation of the structures such as the air pump, the air pipe and the connecting cover, the air in the limit guide hose can be ventilated, the air in the limit hose is discharged through the small holes, and then the discharged air can form an air layer between the limit guide hose and the inner wall of the through hole on the cryogenic pump, so that when the cryogenic pump moves, the friction between the limit guide hose and the cryogenic pump is reduced, and the movement of the cryogenic pump is facilitated.
5. According to the invention, through the cooperation of the structures such as the second collar, the third stop block and the touch switch, when the limit guide hose is pulled, and the pulled limit guide hose drives the rotary pipe and the rotary shaft to rotate, the rotary shaft can drive the second collar and the third stop block to rotate, and when the third stop block rotates for a certain number of turns, one side wall of the third stop block is abutted against the touch switch, so that the air pump is started through the touch switch, and after a long limit guide hose is pulled out, the air pump is automatically started, thereby facilitating the operation of the device.
Drawings
FIG. 1 is a schematic three-dimensional structure of an automatic centering device for a vertical cryopump;
FIG. 2 is a schematic side view of an automatic centering device for a vertical cryopump according to the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 1 at A;
FIG. 4 is a schematic diagram of a box according to the present invention;
FIG. 5 is a schematic cross-sectional view of a case according to the present invention;
FIG. 6 is a partial enlarged view at B in FIG. 5;
fig. 7 is a schematic cross-sectional view of an adapter according to the present invention.
In the figure: 1. a hanging bracket; 2. a cryogenic pump; 3. a crane; 4. a case; 5. a rotary pipe; 6. a limit guide hose; 7. an adapter; 8. a threaded rod; 9. a partition plate; 10. a spring; 11. a rotating shaft; 12. a gear; 13. a swivel; 14. tooth blocks; 15. a first stopper; 16. a first collar; 17. a second stopper; 18. an air pump; 19. an air pipe; 20. a connection cover; 21. a small hole; 22. a second collar; 23. a third stopper; 24. a touch switch; 25. a bolt; 26. sealing cover; 27. a through hole; 28. a mounting base; 29. a threaded hole; 701. connecting sleeves; 702. and a connecting shaft.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples: referring to fig. 1 to 7, an automatic centering device for a vertical cryopump includes a hanger 1 and a crane 3 with the cryopump 2 suspended therein, wherein a box 4 is fixedly connected to a side wall of the hanger 1, a rotary pipe 5 is rotatably connected to an inner wall of the box 4, a limit guide hose 6 is wound on an outer wall of the rotary pipe 5, one end of the limit guide hose 6 is fixedly connected to the rotary pipe 5, one end of the limit guide hose 6 penetrates through the box 4 and extends to the outside of the box 4, an adapter 7 is fixedly connected to one end of the limit guide hose 6 located at the outside of the box 4, and a threaded rod 8 is fixedly connected to one end of the adapter 7; the adapter 7 comprises a connecting sleeve 701 and a connecting shaft 702, the connecting sleeve 701 is fixedly connected with the limit guide hose 6, the connecting shaft 702 is fixedly connected with a threaded rod 8, and the connecting sleeve 701 is rotatably connected with the connecting shaft 702.
The structure can be seen from the above: through setting up spacing guide hose 6 and cooperation such as adapter 7 and using, can pull open spacing guide hose 6, use spacing guide hose 6 to guide, then through loop wheel machine 3 downwardly let down cryopump 2, when cryopump 2 moves down for cryopump 2 can directly fall on the position of needs, need not to readjust cryopump 2's position, and then when connecting fixed cryopump 2, the installation of cryopump 2 of being convenient for.
Further, a division plate 9 is sleeved on the outer wall of the rotary pipe 5 in a rotating way, the outer wall of the division plate 9 is fixedly connected with the box body 4, the division plate 9 is positioned at two sides of the limit guide hose 6, a spring 10 is sleeved on the outer wall of the rotary pipe 5, one end of the spring 10 is fixedly connected with the rotary pipe 5, the other end of the spring 10 is fixedly connected with the box body 4, and a storage blocking component is rotatably connected with the inner wall of the box body 4; through setting up clockwork spring 10, can be after using spacing guide hose 6, turn out threaded rod 8, after loosening spacing guide hose 6 of pulling out, clockwork spring 10 can take the commentaries on classics pipe 5 rotation, and spacing guide hose 6 can be accomodate automatically to pivoted commentaries on classics pipe 5.
Further, the storage blocking assembly comprises a rotating shaft 11 rotationally connected with the inner wall of the box body 4, a gear 12 is fixedly sleeved on the outer wall of the rotating shaft 11, a rotating ring 13 is fixedly sleeved on the outer wall of the rotating pipe 5, a tooth block 14 is fixedly connected with the outer wall of the rotating ring 13, the tooth block 14 is meshed with the gear 12, a first stop block 15 is fixedly connected with the inner wall of the box body 4, a first shaft collar 16 is sleeved on the outer wall of the rotating shaft 11, and a second stop block 17 is fixedly connected with one side wall of the first shaft collar 16; through the cooperation of the structures such as the rotating shaft 11, the gear 12 and the tooth block 14, the rotation of the rotating pipe 5 can be automatically blocked after the rotating pipe 5 rotates for a certain number of turns after the limiting guide hose 6 is loosened, so that the limiting guide hose 6 and the adapter 7 are prevented from being completely received into the box body 4, and the device is convenient to pull when being used next time; when the rotary tube 5 rotates, the rotary tube 5 rotates to drive the rotary ring 13 and the tooth block 14 to rotate, the tooth block 14 can drive the gear 12 and the rotary shaft 11 to rotate for a distance every time the tooth block 14 rotates, when the rotary shaft 11 rotates, the rotary shaft 11 drives the first shaft collar 16 and the second stop block 17 to rotate, after the rotary second stop block 17 rotates to a certain position, the second stop block 17 abuts against the first stop block 15, and then the limit rotary shaft 11 and the rotary tube 5 can not rotate continuously, so that the spring 10 can not drive the rotary tube 5 to store the limit guide hose 6 continuously, the limit guide hose 6 and the adapter 7 are prevented from being completely received in the box 4, and the limit guide hose 6 is convenient to pull when the device is used next time.
Further, the upper surface of the hanging bracket 1 is fixedly connected with an air pump 18, the output end of the air pump 18 is fixedly connected with an air pipe 19, the outer wall of the rotary pipe 5 is rotatably sleeved with a connecting cover 20, the connecting cover 20 is communicated with the rotary pipe 5, one end of the air pipe 19 penetrates through the box body 4 and is communicated with the connecting cover 20, the limit guide hose 6 is communicated with the rotary pipe 5, and the outer wall of the limit guide hose 6 is provided with a small hole 21; through the cooperation of structures such as air pump 18, trachea 19 and coupling cover 20, can be to spacing guide hose 6 internal ventilation, the air in the spacing guide hose 6 is got rid of through aperture 21, and the air of getting rid of can form the air layer between spacing guide hose 6 and the through-hole 27 inner wall on the cryopump 2 to when cryopump 2 removes, reduce the friction between spacing guide hose 6 and the cryopump 2, and then be convenient for the removal of cryopump 2.
Further, a second collar 22 is sleeved on the outer wall of the rotating shaft 11, a third stop block 23 is fixedly connected to the outer wall of the second collar 22, a touch switch 24 is fixedly connected to the side wall of the partition plate 9, and the touch switch 24 is electrically connected with the air pump 18; through setting up collar 22, third dog 23 and touch switch 24 etc. cooperation use, can be when pulling spacing guide hose 6, when the spacing guide hose 6 drive commentaries on classics pipe 5 of pulling rotates with pivot 11, pivoted pivot 11 can drive collar 22 and third dog 23 rotation, when the certain round of third dog 23 rotation, one side lateral wall of third dog 23 offsets with touch switch 24 to start air pump 18 through touch switch 24, pull out the spacing guide hose 6 of a section length like this after, air pump 18 automatic start, and then make things convenient for the operation of the device.
Further, the side walls of the first collar 16 and the second collar 22 are both in threaded connection with bolts 25; by arranging the bolts 25, the first collar 16 and the second collar 22 can be fixed, the bolts 25 are rotated, the rotating shaft 11 at one end of the bolts 25 is abutted tightly, the first collar 16 and the second collar 22 can be fixed, after the bolts 25 are loosened, the first collar 16 or the second collar 22 can be rotated, and the positions of the second stop block 17 and the third stop block 23 can be adjusted.
Further, a yielding groove is formed in the lower surface of the box body 4, and a sealing cover 26 is arranged in the yielding groove; by providing the sealing cover 26, the sealing cover 26 can be opened, and the rotating bolt 25 can be inserted into the box body 4 through the yielding groove.
According to the invention, after the low-temperature pump 2 is lifted by the crane 3, the crane 1 is pushed, so that the crane 3 and the crane 1 carry the low-temperature pump 2 to the upper part of the mounting seat 28, then the limit guide hose 6 is pulled open, the limit guide hose 6 and the threaded rod 8 penetrate through the through hole 27, the threaded rod 8 is used for being connected with the threaded hole 29 on the mounting seat 28 in a threaded manner, then the low-temperature pump 2 can be downwards placed by the crane 3, when the low-temperature pump 2 moves downwards, the limit guide hose 6 can guide the low-temperature pump 2, so that after the low-temperature pump 2 falls on the mounting seat 28, the through hole 27 under the low-temperature pump 2 can be automatically aligned with the threaded hole 29 on the mounting seat 28, and further when the low-temperature pump 2 is connected and fixed, a screw rod can be directly used for screwing in the threaded hole 29 through the through hole 27, so that the low-temperature pump 2 can be conveniently installed.
And when the limit guide hose 6 is pulled, the pulled limit guide hose 6 can drive the rotary pipe 5 to rotate, the rotary pipe 5 rotates to drive the rotary ring 13 and the tooth block 14 to rotate, the tooth block 14 is convenient to drive the gear 12 to rotate for a distance with the rotary shaft 11 when the rotary shaft 11 rotates, the rotary shaft 11 can drive the second collar 22 to rotate with the third stop block 23, when the third stop block 23 rotates for a certain number of turns, one side wall of the third stop block 23 is propped against the touch switch 24, and then the air pump 18 is started through the touch switch 24, so that after a section of long limit guide hose 6 is pulled out, the air pump 18 is started automatically, and the operation of the device is further facilitated.
When the air pump 18 is started, the air pump 18 can ventilate the limit guide hose 6, air in the limit guide hose 6 is discharged through the small holes 21, and the discharged air can form an air layer between the limit guide hose 6 and the inner wall of the through hole 27 on the cryopump 2, so that when the cryopump 2 moves, friction between the limit guide hose 6 and the cryopump 2 is reduced, and further the movement of the cryopump 2 is facilitated.
After the through hole 27 under the cryopump 2 is automatically aligned with the threaded hole 29 on the mounting seat 28, the threaded rod 8 can be rotated to loosen the limit guide hose 6, after the limit guide hose 6 is loosened, the spring 10 can rotate with the rotary tube 5, and the rotary tube 5 can automatically store the limit guide hose 6.
After the rotating tube 5 rotates for a certain number of turns, the rotating tube 5 drives the rotating ring 13 and the tooth block 14 to rotate, each time the tooth block 14 rotates for one turn, the tooth block 14 is convenient for driving the gear 12 to rotate for a certain distance with the rotating shaft 11, when the rotating shaft 11 rotates, the rotating shaft 11 drives the first shaft collar 16 and the second stop block 17 to rotate, after the rotating second stop block 17 rotates to a certain position, the second stop block 17 abuts against the first stop block 15, and then the limiting rotating shaft 11 and the rotating tube 5 are in contact, so that the rotating tube 5 cannot continue to rotate, and the spring 10 cannot continue to drive the rotating tube 5 to store the limiting guide hose 6, so that the limiting guide hose 6 and the adapter 7 are prevented from being completely received in the box 4.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a vertical cryopump automatic centering device, includes gallows (1) and hangs loop wheel machine (3) that have cryopump (2), its characterized in that, the lateral wall fixedly connected with box (4) of gallows (1), and the inner wall rotation of box (4) is connected with changeing pipe (5), the outer wall winding of changeing pipe (5) has spacing guide hose (6), and the one end and the changeing pipe (5) fixed connection of spacing guide hose (6), the one end of spacing guide hose (6) runs through box (4) and extends to box (4) outside, the one end fixedly connected with adapter (7) of spacing guide hose (6) that is located box (4) outside, and the one end fixedly connected with threaded rod (8) of adapter (7);
the adapter (7) comprises a connecting sleeve (701) and a connecting shaft (702), the connecting sleeve (701) is fixedly connected with the limit guide hose (6), the connecting shaft (702) is fixedly connected with the threaded rod (8), and the connecting sleeve (701) is rotationally connected with the connecting shaft (702);
the utility model discloses a hanger, including gallows (1), including hanging bracket (1), connecting cover (20), spacing guide hose (6) and change tub (5) intercommunication, and aperture (21) have been seted up to the outer wall of spacing guide hose (6) to the upper surface fixedly connected with air pump (18), and the output fixedly connected with trachea (19) of air pump (18), the outer wall of changeing tub (5) rotates the cover and is equipped with connecting cover (20), and connecting cover (20) and changeing tub (5) intercommunication, the one end of trachea (19) run through box (4) and with connecting cover (20) intercommunication.
2. The automatic centering device of the vertical cryopump according to claim 1, wherein a partition plate (9) is sleeved on the outer wall of the rotary tube (5) in a rotating mode, the outer wall of the partition plate (9) is fixedly connected with the box body (4), the partition plate (9) is located on two sides of a limiting guide hose (6), a spring (10) is sleeved on the outer wall of the rotary tube (5), one end of the spring (10) is fixedly connected with the rotary tube (5), the other end of the spring (10) is fixedly connected with the box body (4), and a storage blocking assembly is rotatably connected to the inner wall of the box body (4).
3. The automatic centering device of a vertical cryopump according to claim 2, wherein the receiving and blocking assembly comprises a rotating shaft (11) rotationally connected with the inner wall of the case body (4), a gear (12) is fixedly sleeved on the outer wall of the rotating shaft (11), a rotating ring (13) is fixedly sleeved on the outer wall of the rotating tube (5), a tooth block (14) is fixedly connected with the outer wall of the rotating ring (13), the tooth block (14) is meshed with the gear (12), a first stop block (15) is fixedly connected with the inner wall of the case body (4), a first collar (16) is sleeved on the outer wall of the rotating shaft (11), and a second stop block (17) is fixedly connected with one side wall of the first collar (16).
4. The automatic centering device for the vertical cryopump of claim 3, wherein a second collar (22) is sleeved on the outer wall of the rotating shaft (11), a third stop block (23) is fixedly connected to the outer wall of the second collar (22), a touch switch (24) is fixedly connected to the side wall of the partition plate (9), and the touch switch (24) is electrically connected with the air pump (18).
5. The automatic centering device of a vertical cryopump according to claim 4, wherein the first collar (16) and the second collar (22) are each screwed with a bolt (25) on their side walls.
6. The automatic centering device of the vertical cryopump of claim 5, wherein a relief groove is formed in the lower surface of the tank body (4), and a sealing cover (26) is arranged in the relief groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310956166.XA CN116715148B (en) | 2023-08-01 | 2023-08-01 | Automatic centering device of vertical cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310956166.XA CN116715148B (en) | 2023-08-01 | 2023-08-01 | Automatic centering device of vertical cryopump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116715148A CN116715148A (en) | 2023-09-08 |
| CN116715148B true CN116715148B (en) | 2023-10-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310956166.XA Active CN116715148B (en) | 2023-08-01 | 2023-08-01 | Automatic centering device of vertical cryopump |
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| Country | Link |
|---|---|
| CN (1) | CN116715148B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017211197A1 (en) * | 2016-06-06 | 2017-12-14 | 桑春龙 | Automatic ink supply apparatus based on soft package ink |
| JP6535909B1 (en) * | 2018-04-27 | 2019-07-03 | 寧波北侖恒建農業科技有限公司 | Spirits fermenter |
| CN210133821U (en) * | 2019-04-10 | 2020-03-10 | 宜昌阿波罗肥业有限公司 | Movable gantry hoisting device |
-
2023
- 2023-08-01 CN CN202310956166.XA patent/CN116715148B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017211197A1 (en) * | 2016-06-06 | 2017-12-14 | 桑春龙 | Automatic ink supply apparatus based on soft package ink |
| JP6535909B1 (en) * | 2018-04-27 | 2019-07-03 | 寧波北侖恒建農業科技有限公司 | Spirits fermenter |
| CN210133821U (en) * | 2019-04-10 | 2020-03-10 | 宜昌阿波罗肥业有限公司 | Movable gantry hoisting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116715148A (en) | 2023-09-08 |
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