CN116709038A - Imaging system - Google Patents
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- 230000001360 synchronised effect Effects 0.000 claims abstract description 15
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- 238000012634 optical imaging Methods 0.000 description 6
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- 238000004519 manufacturing process Methods 0.000 description 4
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Abstract
The invention discloses an imaging system. The imaging system includes: imaging equipment, an upper computer and external equipment; the imaging device comprises a camera, an image acquisition card and a battery, wherein the camera is connected with the image acquisition card, and the battery is respectively connected with the camera and the image acquisition card; the image acquisition card comprises an image processing unit, a wireless communication unit and a synchronization unit, wherein the wireless communication unit is respectively connected with the image processing unit and the synchronization unit and is used for receiving and outputting a synchronization instruction issued by the upper computer; the image processing unit is used for sending the synchronous instruction to the camera; the synchronization unit is used for triggering the external equipment according to the synchronization instruction so as to enable the external equipment and the camera to synchronously operate. In the invention, the cable in the imaging equipment is not deformed during movement, so that the condition that the deformation disturbance of the cable interferes with imaging components such as a camera is avoided; the upper computer transmits a synchronous instruction through the wireless communication unit, so that the external equipment and the camera synchronously run, and the focus tracking speed and precision can be improved. Thereby improving imaging accuracy.
Description
Technical Field
The invention relates to the technical field of optical imaging, in particular to an imaging system.
Background
In advanced integrated circuit chip manufacturing processes, the optical alignment of critical layers directly affects the performance, yield and reliability of the device, so Overlay (OL) is one of the most important indicators in the manufacturing process.
Image-based overlay measurement (Image based Overlay, IBO) devices are currently the most commonly used overlay measurement system. IBO devices typically include optical imaging systems, precision motion stages, material transport systems, etc., where there are many cables on the optical imaging system. The cable can produce the bending in the in-service use, and its bending can lead to the cable disturbance to transmit to imaging module, brings the interference to imaging module, influences imaging accuracy.
Disclosure of Invention
The invention provides an imaging system for improving imaging accuracy.
The present invention provides an imaging system comprising: imaging equipment, an upper computer and external equipment;
the imaging device comprises a camera, an image acquisition card and a battery, wherein the camera is connected with the image acquisition card, and the battery is respectively connected with the camera and the image acquisition card;
the image acquisition card comprises an image processing unit, a wireless communication unit and a synchronization unit, wherein the wireless communication unit is respectively connected with the image processing unit and the synchronization unit and is used for receiving and outputting a synchronization instruction issued by the upper computer;
the image processing unit is used for sending the synchronous instruction to the camera;
the synchronization unit is used for triggering the external equipment according to the synchronization instruction so as to enable the external equipment and the camera to synchronously operate.
According to the invention, the imaging device comprises the battery, the camera and the image acquisition card, and the battery, the camera and the image acquisition card move as a whole structure, so that the cable in the imaging device cannot deform in the moving process, namely, the condition that the cable is bent and then returns to the original state is avoided, the end part of the cable cannot interact with the connecting part, and the condition that the cable deformation disturbance interferes with the imaging parts such as the camera is avoided; the image acquisition card of the imaging device comprises a wireless communication unit and a synchronization unit, and the wireless communication unit transmits a synchronization instruction to the image processing unit and the synchronization unit so as to enable the external device and the camera to synchronously operate, thereby improving the focus tracking speed and precision. Thereby improving imaging accuracy.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an imaging system provided in an embodiment of the present invention;
FIG. 2 is a schematic diagram of another imaging system provided by an embodiment of the present invention;
fig. 3 is a schematic diagram of yet another imaging system provided by an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a schematic diagram of an imaging system according to an embodiment of the present invention. As shown in fig. 1, the imaging system includes: an imaging device 10, an upper computer 11, and an external device 12; the imaging device 10 comprises a battery 13, a camera 14 and an image acquisition card 15, wherein the camera 14 is connected with the image acquisition card 15, and the battery 13 is respectively connected with the camera 14 and the image acquisition card 15; the image acquisition card 15 comprises an image processing unit 16, a wireless communication unit 17 and a synchronization unit 18, wherein the wireless communication unit 17 is respectively connected with the image processing unit 16 and the synchronization unit 18, and the wireless communication unit 17 is used for receiving and outputting a synchronization instruction issued by the upper computer 11; the image processing unit 16 is used for sending a synchronization instruction to the camera 14; the synchronization unit 18 is configured to trigger the external device 12 according to the synchronization instruction, so that the external device 12 and the camera 14 operate synchronously.
In this embodiment, the imaging system includes an imaging device 10, and the imaging device 10 can acquire images and generate corresponding image signals. The imaging system includes a host computer 11, and the host computer 11 may be a computer, an industrial personal computer, or the like capable of performing image data processing. The imaging system includes an external device 12, which external device 12 may be a motion stage on which a sample to be measured is carried, and imaging device 10 captures an image of the sample to be measured on the motion stage. Based on this, in the imaging system, the imaging device 10 is located above the external device 12, and the host computer 11 communicates with the imaging device 10.
The imaging device 10 is a whole structure wrapped by a shell, the imaging device 10 at least comprises a battery 13, a camera 14 and an image acquisition card 15, the battery 13, the camera 14 and the image acquisition card 15 are accommodated in an inner cavity formed by the shell, at least one cable is also accommodated in the inner cavity of the shell of the imaging device 10, and the cable is used for connecting at least two components in the imaging device 10. The imaging device 10 is of an integral structure, so that when the imaging device 10 moves, the cable in the inner cavity of the imaging device cannot deform, and the condition that the cable is bent and then returns to the original state is avoided, the end part of the cable cannot interact with the connecting component, and the condition that the deformation of the cable disturbs the connecting component cannot occur. In this embodiment, the imaging apparatus 10 has integration and intelligence, and is simple in structure and easy to implement. In the optional imaging device 10, the camera 14 and the image pickup card 15 are fixed on the same base plate; in other embodiments, the camera and the image capture card are optionally both secured to the housing inner wall of the imaging device.
The camera 14 is connected to an image acquisition card 15. The optional camera 14 is connected to the image pickup card 15 through a specific camera line camera link cable. Specifically, the Camera 14 and the image acquisition card 15 are both provided with a Camera link interface, the Camera link interface of the Camera 14 is connected with the Camera link interface of the image acquisition card 15 through a cable, and the cable is a specific Camera cable which is a Camera link cable following a Camera link protocol. But not limited to this, in other embodiments, the optional camera is connected with the image acquisition card through an Ethernet cable, ethernet interfaces are respectively arranged on the corresponding camera and the image acquisition card, and the Ethernet interfaces of the camera are connected with the Ethernet interfaces of the image acquisition card through the cable. The present embodiment is described taking the connection of the camera 14 with the image acquisition card 15 through the camera link cable as an example; those skilled in the art will appreciate that the connection cable between the camera and the image capture card may be replaced with other types in other embodiments.
The Camera 14 captures an image of the sample to be measured with the aid of the light source, converts the light signal into an electric signal, converts the electric signal into an image signal, and transmits the image signal to the image acquisition card 15 through the Camera link cable, and the image acquisition card 15 stores the image signal and transmits the image signal to the upper computer 11. In other embodiments, the image acquisition card may also be selected to convert the electrical signal provided by the Camera into an image signal, specifically, the Camera converts the optical signal into an electrical signal and then transmits the electrical signal to the image acquisition card through the Camera link cable, and the image acquisition card converts the electrical signal into an image signal for storage and transmission to the upper computer. The image acquisition card 15 also receives a control signal or instruction of the upper computer 11, and transmits the control signal or instruction to the Camera 14 through the Camera link cable. When the imaging device 10 moves, the deformation condition of the Camera link cable connecting the Camera 14 and the image acquisition card 15 does not occur, so that the Camera link cable does not interfere with the Camera 14 and the image acquisition card 15, and the imaging precision is improved. The camera 14 may be an industrial camera, but is not limited to this type. The image acquisition card 15 comprises an FPGA chip, the image acquisition card 15 and the Camera 14 are integrated together, so that the compatibility of the FPGA in the image acquisition card 15 can be greatly improved, and further the industrial Camera with various current protocols can be handled, and the Camera link protocol is not limited.
The battery 13 is connected to the camera 14 and the image pickup card 15, respectively. The battery 13 serves as a power supply for supplying power to the camera 14 and the image pickup card 15, respectively, so that the imaging apparatus 10 operates normally. A power supply line is connected between the optional battery 13 and the camera 14, and the battery 13 provides corresponding electric signals for the camera 14 through the power supply line; another power supply line is connected between the battery 13 and the image acquisition card 15, through which the battery 13 supplies a corresponding electrical signal to the image acquisition card 15. In other embodiments, the battery can also supply power to the Camera and the image acquisition card respectively through a connection cable between the Camera and the image acquisition card, the battery is connected with the Camera link cable, the battery provides corresponding electric signals for the Camera through the Camera link cable, and meanwhile, the battery also provides corresponding electric signals for the image acquisition card through the Camera link cable. The battery 13 may be a lithium battery, but is not limited to this type; the battery 13 may also include other functions and components, such as low voltage monitoring, periodic charge maintenance, etc. In this embodiment, the battery 13 may be fixed to the camera 14.
The image acquisition card 15 includes an image processing unit 16, a wireless communication unit 17, and a synchronization unit 18, and the wireless communication unit 17 is connected to the image processing unit 16 and the synchronization unit 18, respectively. The image processing unit 16 includes an FPGA chip. The optional wireless communication unit 17 includes a 5G communication chip; the corresponding upper computer 11 comprises a matched 5G communication chip, the upper computer 11 and the image acquisition card 15 communicate through the two 5G communication chips, the communication bandwidth of the 5G communication chip is 10Gbps,Camera link Base bandwidth 2Gbps, and the bandwidth can be obviously improved. In other embodiments, the optional wireless communication unit and the upper computer respectively include other types of wireless communication units, such as a ZigBee communication unit, but are not limited thereto. As shown in fig. 1, the dashed line representation between the imaging device 10 and the host computer 11 is both in wireless communication, and the dashed line representation between the optional imaging device 10 and the external device 12 may be both in wireless transmission.
The optional image processing unit 16 is connected to the camera 14, and is configured to send an image signal acquired by the camera 14 to the upper computer 11 through the wireless communication unit 17. The optional image processing unit 16 is connected to the camera 14 through a specific camera line camera link, and the image processing unit 16 is configured to send a synchronization instruction to the camera 14 through the specific camera line camera link. Specifically, the image processing unit 16 in the image acquisition card 15 is connected to the camera 14 through a camera link cable, the wireless communication unit 17 performs wireless communication with the upper computer 11, the synchronization unit 18 performs wireless communication with the external device 12, and the wireless communication unit 17 is connected to the image processing unit 16 and the synchronization unit 18, respectively. The image processing unit 16 acquires an image signal of the camera 14 through a camera link cable, and transmits the image signal to the upper computer 11 through the wireless communication unit 17, and the upper computer 11 analyzes and processes the image signal of the camera 14. The control signal of the upper computer 11 is transmitted to the image processing unit 16 through the wireless communication unit 17, and the image processing unit 16 transmits the control signal to the camera 14 through the camera link cable to drive the camera 14 to work. If the synchronization control is needed, the synchronization instruction of the upper computer 11 is transmitted to the wireless communication unit 17; sequentially, after the wireless communication unit 17 analyzes the synchronization instruction, the analyzed synchronization instruction is transmitted to the image processing unit 16 and the synchronization unit 18, respectively; sequentially, the image processing unit 16 sends a synchronization instruction to the camera 14 through the camera link cable, and the synchronization unit 18 triggers the external device 12 according to the synchronization instruction, so that the external device 12 and the camera 14 can operate synchronously under the control of the synchronization instruction, and the operation of the camera 14 and the external device 12 can be synchronized.
If the signals between the upper computer and the camera are transmitted wirelessly, the signals between the upper computer and the external device are transmitted in a wired manner, so that the signals between the upper computer and the external device are delayed relative to the signals between the upper computer and the camera, and the operation of the camera and the external device cannot be synchronized, which results in imaging failure of the imaging device. In the embodiment, the signals between the upper computer 11 and the camera 14 are wirelessly transmitted, and the signals between the upper computer 11 and the external device 12 are wirelessly transmitted, so that the signals between the upper computer 11 and the external device 12 are not delayed relative to the signals between the upper computer 11 and the camera 14, and the operations of the camera 14 and the external device 12 can be synchronized, thereby improving the imaging efficiency and the accuracy of the imaging device.
As described above, the imaging system has an imaging function, and the imaging device 10 and the host computer 11 transmit the image signal and the control signal through the wireless communication unit 17, so as to satisfy the current optical imaging application scenario. In addition, the external device 12 may be a motion platform, so that the imaging system has a focus tracking function, and the upper computer 11 transmits a synchronization instruction to the synchronization unit 18 and the image processing unit 16 through the wireless communication unit 17, so that the external device 12 and the camera 14 are driven to run synchronously, and the current focus tracking application scene can be satisfied. The wireless communication unit 17 analyzes the synchronization instruction, and then transmits the analyzed synchronization instruction to the synchronization unit 18 and the image processing unit 16, so that the external device 12 and the camera 14 have no delay.
The optional imaging system comprises a synchronous triggering mode and an image transmission mode; in the synchronous triggering mode, the upper computer 11 and the wireless communication unit 17 perform unidirectional transmission; in the image transmission mode, the host computer 11 and the wireless communication unit 17 perform bidirectional transmission. Specifically, when the upper computer 11 issues a synchronization instruction, the imaging system is switched to a synchronization triggering mode, at this time, the wireless communication unit 17 can only receive the synchronization instruction from the upper computer 11 and send the synchronization instruction to the image processing unit 16 and the synchronization unit 18 in a unidirectional manner, the wireless communication unit 17 does not report a signal to the upper computer 11, unidirectional communication of the upper computer 11 to the wireless communication unit 17 is realized, and the synchronization hard triggering can ensure that the reliability of triggering the synchronization instruction is not interfered by other signals, and the focus tracking speed and precision are ensured. When the imaging system is switched to the image transmission mode, the wireless communication unit 17 can receive the control signal from the upper computer 11 and send the control signal to the image processing unit 16, and can also receive the image signal from the image processing unit 16 and send the image signal to the upper computer 11, so that bidirectional communication between the upper computer 11 and the wireless communication unit 17 is realized.
According to the invention, the imaging device comprises the battery, the camera and the image acquisition card, and the battery, the camera and the image acquisition card move as a whole structure, so that the cable in the imaging device cannot deform in the moving process, namely, the condition that the cable is bent and then returns to the original state is avoided, the end part of the cable cannot interact with the connecting part, and the condition that the cable deformation disturbance interferes with the imaging parts such as the camera is avoided; the image acquisition card of the imaging device comprises a wireless communication unit and a synchronization unit, and the wireless communication unit transmits a synchronization instruction to the image processing unit and the synchronization unit so as to enable the external device and the camera to synchronously operate, thereby improving the focus tracking speed and precision. Thereby improving the imaging accuracy of the imaging system.
The optional synchronization unit comprises a transmitting part, and the external equipment comprises a receiving part; the transmitting part is used for transmitting the first signal under the triggering of the synchronous command, and the receiving part is used for receiving the first signal.
Fig. 2 is a schematic diagram of another imaging system provided in an embodiment of the present invention. As shown in fig. 2, the synchronizing unit 18 in the image forming apparatus 10 includes a transmitting portion 19, the external apparatus 12 includes a receiving portion 20, and one synchronizing unit 18 is provided corresponding to one external apparatus 12.
After the wireless communication unit 17 receives the synchronization instruction issued by the upper computer 11, the wireless communication unit 17 analyzes the synchronization instruction, and then the analyzed synchronization instruction is respectively sent to the image processing unit 16 and the synchronization unit 18, wherein the wireless communication unit 17 can only receive the synchronization instruction from the upper computer 11 in the period, so that the synchronization instruction is not interfered by other signals in the transmission process, and the synchronization precision control is improved. It should be noted that, the wireless communication unit 17 may send the synchronization instruction to the image processing unit 16 and the synchronization unit 18 at the same time, so as to ensure synchronous operation of the camera 14 and the external device 12; alternatively, the synchronization instruction carries clock information, and the wireless communication unit 17 may send the synchronization instruction to the image processing unit 16 and the synchronization unit 18, respectively, and the camera 14 and the external device 12 implement synchronous operation according to the clock information.
The image processing unit 16 transmits the received synchronization instruction to the camera 14, and drives the camera 14 to operate.
The synchronization unit 18, upon receiving the synchronization instruction, triggers the transmitting section 19 to transmit the first signal. It will be appreciated that if the synchronization unit 18 does not receive a synchronization instruction, the signal transmitted by the transmitting portion 19 is different from the first signal, or the transmitting portion 19 does not transmit any signal. The first signal may be a specific parameter signal, such as a specific waveform, a specific light, a specific frequency, a specific voltage, or a specific current.
The receiving unit 20 of the external device 12 can trigger the external device 12 to operate after receiving the first signal, where the first signal is a trigger control signal of the external device 12. It will be appreciated that if the signal received by the receiving portion 20 is different from the first signal, or if no signal is received by the receiving portion 20, the external device 12 is not triggered to operate.
The optional emitting section 19 includes a light emitting device that emits a first optical signal under the triggering of a synchronization instruction; the receiving part 20 includes a photosensor for detecting whether there is an optical signal and converting the received first optical signal into an electrical signal. The optional light emitting device is a light emitting diode; the photosensitive device is a photosensor.
In this embodiment, the emitting portion 19 includes a light emitting device, and the light signal emitted by the light emitting device is a first light signal, and the first light signal is the first signal. If the light emitting device is a light emitting diode, the synchronization unit 18 receives the synchronization command, and the synchronization command can control the light emitting diode to be turned on, and the turned-on light emitting diode emits light, and the light signal is the first light signal.
The receiving portion 20 includes a photosensor, and the photosensor may receive the optical signal, and if the photosensor detects that the received optical signal is the first optical signal, the photosensor may convert the received first optical signal into an electrical signal, and the electrical signal may trigger the external device 12 to operate as a trigger control signal. An alternative photosensitive device is a photosensitive sensor. The transmitting unit 19 transmits the first optical signal, and the receiving unit 20 receives the first optical signal, so that wireless transmission between the synchronization unit 18 and the external device 12 can be realized.
The optional imaging system includes n external devices, n being greater than 1; the image acquisition card in the imaging device comprises n synchronization units, one synchronization unit is correspondingly arranged with one external device, and the synchronization unit is used for triggering the corresponding external device to operate according to the synchronization instruction so as to enable at least one external device and the camera to operate synchronously. The optional n external devices include at least a shutter and a motion stage.
Fig. 3 is a schematic diagram of yet another imaging system provided by an embodiment of the present invention. As shown in fig. 3, the imaging system includes n external devices, respectively labeled as external device B1, external devices B2, …, external device Bn. Correspondingly, the image capturing card in the imaging apparatus 10 includes n synchronization units, which are respectively labeled as a synchronization unit A1, synchronization units A2, …, and synchronization unit An. One synchronization unit is provided corresponding to one external device, and then synchronization unit A1 corresponds to external device B1, synchronization unit A2 corresponds to external device B2, …, and synchronization unit An corresponds to external device Bn. It will be understood that the first signal sent by the synchronization unit A1 can only be used to trigger the operation of the external device B1, the first signal sent by the synchronization unit A2 can only be used to trigger the operation of the external device B2, and so on, the first signal sent by the synchronization unit An can only be used to trigger the operation of the external device Bn. The upper computer 11 may control the camera 14 to operate in synchronization with at least one external device according to the scene need. The optional external device B1 is a motion stage, the external device B2 is a shutter, but not limited thereto, and the imaging system may further include other external devices, so that those skilled in the art may reasonably design the synchronization unit and the external devices according to the needs of the product, and are not particularly limited. Thereby achieving synchronization of the camera, motion stage, and possibly extended shutter, etc.
Specifically, the upper computer 11 performs wireless communication with a wireless communication unit 17 in the imaging apparatus 10, the wireless communication unit 17 is connected to the camera 14 through the image processing unit 16, and the wireless communication unit 17 is also connected to n synchronization units, respectively. It should be noted that, the wireless communication unit 17 may include at least one synchronization interface, and the wireless communication unit 17 may output synchronization instructions to the image processing unit 16 and the plurality of synchronization units simultaneously through one synchronization interface, or the wireless communication unit 17 may output synchronization instructions to one component through one synchronization interface. Without particular limitation, one skilled in the art may reasonably design the number and connection manner of the synchronization interfaces of the wireless communication unit according to the needs of the product.
The imaging system provided by the embodiment of the invention can be applied to various optical imaging scenes, and is particularly suitable for an image-based overlay measurement (Image based Overlay, IBO) scene. In advanced integrated circuit chip manufacturing processes, the optical alignment of critical layers directly affects the performance, yield and reliability of the device, so Overlay (OL) is one of the most important indicators in the manufacturing process. The imaging system can be used as an IBO device and applied to an overlay measurement process. Imaging devices in an imaging system are mostly optical imaging devices, and external devices are precision motion tables or material conveying systems and the like. The imaging system also comprises a light source and illumination module and a focus tracking module (piezoelectric, objective lens and the like), wherein the light source and the illumination module provide light required for overlay error detection, and the focus tracking module mainly comprises piezoelectric ceramics PZT (Piezoelectric Transducer) for driving an objective lens component to move to search an optimal focal plane. The light source and the illumination module are fixed on the base, the tracking Jiao Mokuai and the imaging device are hung on a Z axis of movement, and the Z axis carries the part of the component to move up and down so as to adjust the focal length with external equipment.
In this embodiment, the imaging device moves as a whole on the Z axis, where the cable does not deform, so that the cable inside the imaging device does not interfere with the Camera, especially, the influence of the Camera link cable between the Camera and the image acquisition card on imaging is avoided, the imaging effect is improved, and thus, the overlay measurement accuracy can be improved. The imaging device is as a whole, has a simple structure, does not need camera wiring, and can reduce or eliminate interference of internal cable disturbance on imaging.
The imaging system provided by the invention can be used for overlay measurement, and the process is as follows:
1) In a focal plane calibration scene, in order to calibrate the focal plane, coarse scanning of a Coarse Z axis is controlled, a shutter is closed, a CMOS camera is used for shooting pictures, and an industrial personal computer analyzes the image definition to obtain a better focal plane; then controlling PZT-Z to carry out fine scanning, triggering a camera to shoot pictures synchronously, transmitting the pictures to an industrial personal computer 5G module through a 5G antenna by an image acquisition card, analyzing the image definition by a CPU transmitted by a PCIE bus to obtain an optimal focal plane, and calibrating the position as the optimal focal plane position of the batch of silicon chips; then, a shutter is opened, PZT-Z is controlled to precisely scan near a scanning focal plane and synchronously acquire PD signals, and the optimal position of an interference signal is analyzed to obtain the deviation between the position and the optimal focal plane as the system focal plane deviation (System Focus Offset, SFO);
2) The preparation stage, the silicon chip is positioned at a calibrated focal plane position, the light intensity setting is completed, coarse focusing is carried out at the moment, a measuring plane in a scene is positioned in a coarse focusing range, a shutter is opened, PZT-Z coarse scanning is carried out, PD signals are synchronously acquired, the measuring plane position is fed back by analyzing interference signals, SFO compensation is carried out to obtain the focal plane position, and PZT-Z is controlled to move to the analyzed focal plane position to realize coarse focusing;
3) In a mark acquisition scene, a shutter is required to be closed, a silicon wafer bearing table is controlled to scan in the XY direction, a CMOS camera is triggered synchronously to shoot images, a detection mark is moved to a set position of the center of a field of view, and then the bearing table Rz is controlled to rotate to turn the mark right, so that mark acquisition is realized;
4) In the fine focusing scene, a mark is positioned in the center of a view field, a shutter is opened, PZT-Z performs fine scanning according to a coarse focusing result, PD signals are synchronously collected, the position of a measuring surface is fed back through analysis of interference signals, SFO compensation is performed to obtain a focal surface position, and PZT-Z is controlled to move to the analyzed optimal focal surface position to realize fine focusing;
5) In a detection photographing scene, a shutter is closed, after a measurement surface is subjected to fine focusing, an imaging system can realize 100 times of microimaging of an overlay image, and an image with high image quality and high signal to noise ratio is provided for overlay error analysis, wherein an illumination wave band is adjustable, brightness is adjustable, and NA is adjustable.
In the imaging process provided by the embodiment of the invention, the camera is not disturbed by a circuit, and the camera and the moving table and the like can synchronously move, so that the detection precision can be improved.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present invention may be performed in parallel, sequentially, or in a different order, so long as the desired results of the technical solution of the present invention are achieved, and the present invention is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (10)
1. An imaging system, comprising: imaging equipment, an upper computer and external equipment;
the imaging device comprises a camera, an image acquisition card and a battery, wherein the camera is connected with the image acquisition card, and the battery is respectively connected with the camera and the image acquisition card;
the image acquisition card comprises an image processing unit, a wireless communication unit and a synchronization unit, wherein the wireless communication unit is respectively connected with the image processing unit and the synchronization unit and is used for receiving and outputting a synchronization instruction issued by the upper computer;
the image processing unit is used for sending the synchronous instruction to the camera;
the synchronization unit is used for triggering the external equipment according to the synchronization instruction so as to enable the external equipment and the camera to synchronously operate.
2. The imaging system of claim 1, wherein the image processing unit is connected to the camera for transmitting image signals acquired by the camera to the host computer via the wireless communication unit.
3. The imaging system according to claim 1, wherein the image processing unit is connected to the camera through a specific camera line camera link, the image processing unit being configured to send the synchronization instruction to the camera through the specific camera line.
4. The imaging system of claim 1, wherein the synchronization unit comprises a transmitting portion and the external device comprises a receiving portion;
the transmitting part is used for transmitting a first signal under the triggering of the synchronous command, and the receiving part is used for receiving the first signal.
5. The imaging system of claim 4, wherein the transmitting section includes a light emitting device that transmits a first optical signal under the triggering of the synchronization instruction;
the receiving part comprises a photosensitive device for detecting whether an optical signal exists or not and converting the received first optical signal into an electrical signal.
6. The imaging system of claim 5, wherein the light emitting device is a light emitting diode;
the photosensitive device is a photoelectric sensor.
7. The imaging system of claim 1, wherein the wireless communication unit comprises a 5G communication chip.
8. The imaging system of claim 1, wherein the imaging system comprises n external devices, n being greater than 1;
the image acquisition card in the imaging device comprises n synchronization units, one synchronization unit is correspondingly arranged with one external device, and the synchronization unit is used for triggering the corresponding external device to operate according to the synchronization instruction so as to enable at least one external device and the camera to operate synchronously.
9. The imaging system of claim 8, wherein the n external devices include at least a shutter and a motion stage.
10. The imaging system of claim 1, wherein the imaging system comprises a synchronous trigger mode and an image transfer mode;
in the synchronous triggering mode, the upper computer and the wireless communication unit perform unidirectional transmission;
and in the image transmission mode, the upper computer and the wireless communication unit perform bidirectional transmission.
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