CN116705675A - Automatic transmission system of workshop - Google Patents

Automatic transmission system of workshop Download PDF

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Publication number
CN116705675A
CN116705675A CN202210181891.XA CN202210181891A CN116705675A CN 116705675 A CN116705675 A CN 116705675A CN 202210181891 A CN202210181891 A CN 202210181891A CN 116705675 A CN116705675 A CN 116705675A
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CN
China
Prior art keywords
rail
track
branch
main
running rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210181891.XA
Other languages
Chinese (zh)
Inventor
姚春蕊
周毅仲
孙俊丽
王天昕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
Semiconductor Manufacturing International Beijing Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp, Semiconductor Manufacturing International Beijing Corp filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN202210181891.XA priority Critical patent/CN116705675A/en
Publication of CN116705675A publication Critical patent/CN116705675A/en
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

An automated transmission system for a production plant, the automated transmission system comprising: the track for fixed unsettled conveyor, and make unsettled conveyor transmit along the track, the track includes: the main running rail is positioned at the boundary position of the processing areas and is used for enabling the suspended transmission device to transmit between the processing areas; the first branch rail is positioned in the processing area, two ends of the first branch rail are connected with the main running rail, and the first branch rail is used for enabling the suspended transmission device to transmit between the machine stations in the processing area; the second branch rail is positioned at the position of the storage device, two ends of the second branch rail are connected with the main running rail, and the second branch rail surrounds the storage device; the storage device is provided with a picking and placing port, the picking and placing port faces to the main running track, or the picking and placing port faces to the second branch track. The production and transmission efficiency of the processing area is improved, and meanwhile, the area availability of the processing area is also improved.

Description

Automatic transmission system of workshop
Technical Field
The embodiment of the invention relates to the field of semiconductor manufacturing, in particular to an automatic transmission system of a production workshop.
Background
In semiconductor manufacturing factories, STKs (storage) are mainly used in the past, materials are usually transported to a machine by manpower for production, and the manpower cost is very low in the proportion of manufacturing the whole wafer. However, with the rapid development of semiconductor technology, the size of the wafer is gradually increased, the overall weight of the wafer is also increased from the original wafer, the manual transportation cannot meet the production requirement, and meanwhile, due to the consideration of factors such as personnel safety, product yield, productivity efficiency and the like, higher requirements are put forward on an automation system of a factory, so that an automation transmission system (Automatic Material Handling System, AMHS) is generated for solving the problem of rapid and stable material transfer.
The automatic transmission system of the production shop generally adopts a track to realize the transmission of products, but how to improve the production transmission efficiency of the automatic transmission system of the production shop becomes an important subject.
Disclosure of Invention
The embodiment of the invention solves the problem of providing an automatic transmission system of a production workshop, and improves the production transmission efficiency of the automatic transmission system of the production workshop.
In order to solve the above problems, an embodiment of the present invention provides an automated transmission system for a production plant, including: the production workshop includes a plurality of processing district, the processing district includes a plurality of machines, and is provided with storage device in at least one processing district, automatic transmission system includes: the track for fixed unsettled conveyor, and make unsettled conveyor is followed the track is transmitted, the track includes: the main running rail is positioned at the boundary position of the processing areas and at one side of the warehousing device, which is away from the machine table, and is used for enabling the suspended transmission device to transmit between the processing areas; the first branch rail is positioned in the processing area, two ends of the first branch rail are connected with the main running rail, and the first branch rail is used for enabling the suspended transmission device to transmit between the machine stations in the processing area; the second branch rail is positioned at the position where the storage device is positioned, two ends of the second branch rail are connected with the main running rail, and the second branch rail surrounds the storage device; the storage device is provided with a picking and placing port, the picking and placing port faces the main running track, or the picking and placing port faces the second branch track.
Compared with the prior art, the technical scheme of the embodiment of the invention has the following advantages:
according to the automatic transmission system of the production workshop, the second branch rail is arranged at the position where the storage device is located, two ends of the second branch rail are connected with the main operation rail, the second branch rail surrounds the storage device, the second branch rail can play a role in shunting the transportation and transmission suspended device in the main operation rail through the arrangement of the second branch operation rail surrounding the storage device, accordingly, the transmission time of the transportation and transmission suspended device on the main operation rail is shortened, the production and transmission efficiency of the whole automatic transmission system is improved under the condition that the total production capacity of the production workshop is certain, meanwhile, the distance between the storage device and the main operation rail can be reduced under the condition that the goods taking and placing port of the storage device faces the second branch rail, and the distance between a machine table closest to the storage device and the storage device is reduced due to the fact that the rail is arranged above the machine table, the fact that the distance between the machine table closest to the storage device and the storage device is reduced, the usable area of the processing area is optimized, the usable area of the processing area can be further improved, and the usable area of the automatic transmission system can be improved.
Drawings
Fig. 1 shows a plan view of an automated transport system of a production plant;
FIG. 2 illustrates a top view of an automated transport system for a production plant in accordance with an embodiment of the present invention;
fig. 3 shows a corresponding top view of an automated transport system of a production plant according to another embodiment of the invention.
Detailed Description
At present, the production and transmission efficiency of an automatic transmission system needs to be improved. The reason why the production and transmission efficiency of an automatic transmission system needs to be improved is analyzed by combining the automatic transmission system.
Fig. 1 is a top view of an automated transport system for a production plant.
Referring to fig. 1, an automated transmission system of a production plant, the production plant including a plurality of processing areas 16, the processing areas 16 including a plurality of stations 12, and at least one of the processing areas 16 having a stocker 13 disposed therein, the automated transmission system comprising: the track for fixed unsettled conveyor, and make unsettled conveyor is followed the track is transmitted, the track includes: a main running rail 11 located at the boundary position of the processing areas 16 and located at the side of the warehouse 13 facing away from the machine table 12, wherein the main running rail 11 is used for enabling the suspended conveying device to convey between the processing areas 16; a branch rail 10 located in the processing area 16, wherein two ends of the branch rail 10 are connected with the main running rail 11, and the branch rail 10 is used for enabling the suspended conveying device to convey between the machine stations in the processing area; the warehouse 13 has a pick-and-place port 17, wherein the pick-and-place port 17 is oriented toward the main track 11.
It has been found that, when the multiple machines in the processing area 16 are in a production state, since the two ends of the branch rail 10 are connected with the main operation rail 11, the suspended conveying device running on the branch rail 10 can run onto the main operation rail 11, so that the suspended conveying device can be run onto a target area (for example, a loading and unloading area) through the main operation rail 11, meanwhile, the storage device 13 has a pick-and-place port 17, the pick-and-place port 17 faces the main operation rail 11, and the process products required to be stored into the storage device 13 are also conveyed through the suspended conveying device running on the main operation rail 11, so that when the storage device 13 fails and stops, the whole track in the processing area 16 is easily caused to be stopped, thereby greatly reducing the production conveying efficiency of the automatic conveying system.
In order to solve the technical problem, an embodiment of the present invention provides an automated transmission system, including: an automated transmission system of a production plant, the production plant including a plurality of processing areas, the processing areas including a plurality of stations, and being provided with a stocker in at least one of the processing areas, the automated transmission system comprising: the track for fixed unsettled conveyor, and make unsettled conveyor is followed the track is transmitted, the track includes: the main running rail is positioned at the boundary position of the processing areas and at one side of the warehousing device, which is away from the machine table, and is used for enabling the suspended transmission device to transmit between the processing areas; the first branch rail is positioned in the processing area, two ends of the first branch rail are connected with the main running rail, and the first branch rail is used for enabling the suspended transmission device to transmit between the machine stations in the processing area; the second branch rail is positioned at the position where the storage device is positioned, two ends of the second branch rail are connected with the main running rail, and the second branch rail surrounds the storage device; the storage device is provided with a picking and placing port, the picking and placing port faces the main running track, or the picking and placing port faces the second branch track.
According to the automatic transmission system of the production workshop, the second branch rail is arranged at the position where the storage device is located, two ends of the second branch rail are connected with the main operation rail, the second branch rail surrounds the storage device, the second branch rail can play a role in shunting the transportation and transmission suspended device in the main operation rail through the arrangement of the second branch operation rail surrounding the storage device, accordingly, the transmission time of the transportation and transmission suspended device on the main operation rail is shortened, the production and transmission efficiency of the whole automatic transmission system is improved under the condition that the total production capacity of the production workshop is certain, meanwhile, the distance between the storage device and the main operation rail can be reduced under the condition that the goods taking and placing port of the storage device faces the second branch rail, and the distance between a machine table closest to the storage device and the storage device is reduced due to the fact that the rail is arranged above the machine table, the fact that the distance between the machine table closest to the storage device and the storage device is reduced, the usable area of the processing area is optimized, the usable area of the processing area can be further improved, and the usable area of the automatic transmission system can be improved.
In order that the above objects, features and advantages of embodiments of the invention may be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
Referring to fig. 2, a top view of an automated transport system for a production plant according to an embodiment of the present invention is shown.
In this embodiment, the production plant includes a plurality of processing areas 160 (Bay), the processing areas 160 include a plurality of stations 102, and the stocker 108 is disposed in at least one of the processing areas 160.
The production workshop is used for processing and producing different types of process products. In particular, the processing zone 160 is one of the bay areas of the production plant that is being processed and produced.
The processing area 160 is used for placing a plurality of machines 102, and the plurality of machines 102 may have different function types, or the function types of some of the machines 102 are the same. Wherein the function types include etching, lithography, ion implantation, and the like.
In this embodiment, in the processing area 160, an area between adjacent machine tools 102 is used as the maintenance area 130.
Specifically, during the process of the production state of the multiple machine tools 102 in the processing area 160, in order to facilitate maintenance of the machine tools 102 in the failure state, a partial space area is reserved between adjacent machine tools 102 as the maintenance area 130.
In this embodiment, the stocker 108 is configured to store cassettes for holding a plurality of wafers.
In other embodiments, other materials may be stored within the bin.
With continued reference to fig. 2, the automated transmission system includes: a track (not shown) for securing a suspended conveyor and for causing the suspended conveyor to be transported along the track, the track comprising: a main operation rail 101 located at a boundary position of the processing area 160 and located at a side of the stocker 108 facing away from the machine table 102, wherein the main operation rail 101 is configured to enable the suspended conveying device to convey between the processing areas 160; the first branch rail 100 is located in the processing area 160, two ends of the first branch rail 100 are connected with the main running rail 101, and the first branch rail 100 is used for enabling the suspended conveying device to convey between the machine stations 102 in the processing area 160; a second branch rail 106 located at a position where the stocker 108 is located, two ends of the second branch rail 106 are connected to the main operation rail 101, and the second branch rail 106 surrounds the stocker 108; wherein the stocker 108 has a pick and place port 107, the pick and place port 107 facing the second branch rail 106.
In this embodiment, the automated transmission system includes a track, and a suspended transmission device (e.g., crown block) capable of transmitting along the track, where the suspended transmission device is used to carry a process product for transmission.
Specifically, the suspended conveying device is arranged below the ceiling of the factory workshop and above the machine table 102, so that the conveying and storage of materials can not influence the walking of people on the ground, and the space of the production workshop can be saved.
It should be noted that, in this embodiment, the suspension transmission device is used to clamp a storage device (Foup), and the storage device is used to store the process product (such as a wafer) as an example for explanation, so that the transmission efficiency of the suspension transmission device to the storage device can be improved correspondingly, and further, the efficiency and the productivity of the automatic transmission system are improved.
In this embodiment, the main track 101 is used to enable the overhead conveyor to transport between the processing areas 160.
It should be noted that, the main track 101 spans multiple processing areas 160 in the production plant, the track of the main track 101 needs to be laid out according to the positions of the multiple processing areas 160 in the production plant, the straight distance between adjacent processing areas 160 is the shortest, and in order to improve the production and transmission efficiency of the automated transmission system between adjacent processing areas 160, as an example, the main track 101 located at the boundary position of the processing areas 160 is a straight track.
In this embodiment, the material of the main running rail 101 includes, but is not limited to, aluminum alloy material.
In this embodiment, when the plurality of machines 102 in the processing area 160 are in a production state, the process products produced by the machines 102 are transported by the overhead transport device running on the first branch rail 100.
It should be noted that, since the two ends of the first branch rail 100 are connected to the main running rail 101, the suspended conveying device running on the first branch rail 100 can be transferred to the main running rail 101, so that the suspended conveying device can be moved to a target area (for example, a loading/unloading area) or transferred to the pick-and-place port 107 of the stocker 108 through the main running rail 101.
It should be further noted that, the running track of the first branch rail 100 needs to be laid out according to the positions of the multiple machine stations 102 in the processing area 160, in order to improve the production and transmission efficiency of the automatic transmission system, the pick-and-place ports (not shown) of the machine stations 102 are all located on the same side and face the corresponding first branch rail 100, and the first branch rail 100 is located above the pick-and-place ports.
In this embodiment, the material of the first branch rail 100 includes, but is not limited to, aluminum alloy material.
In this embodiment, a second branch rail 106 is disposed at a position where the storage device 108 is located, two ends of the second branch rail 106 are connected with the main operation rail 101, and the second branch rail 106 surrounds the storage device 108, and by setting a second branch operation rail surrounding the storage device 108, the second branch operation rail can play a role in shunting a suspended transmission device transported in the main operation rail 101, and accordingly, the transmission time of the suspended transmission device on the main operation rail 101 is shortened, so that the production transmission efficiency of an automatic transmission system is improved under the condition that the total production capacity of a production workshop is certain.
In this embodiment, the second branch rail 106 surrounds the storage device 108 on three sides. Specifically, the second branch rail 106 includes: a transverse running rail 103, which is positioned at one side of the warehouse device 108 facing away from the main running rail 101; a longitudinal running rail 105 connecting the lateral running rail 103 and the main running rail 101.
In this embodiment, the lateral running rail 103 is also a straight running rail, and the lateral running rail 103 is parallel to the main running rail 101.
Specifically, since the second branch rail 106 surrounds the warehouse 108, when the longitudinal running rail 105 meets the requirement of the rail layout size and the transverse running rail 103 is parallel to the main running rail 101, the running track of the suspended conveying device running on the second branch running rail is shortest, and accordingly, the production and conveying efficiency of the automatic conveying system is improved.
It should be noted that the vertical distance D2 between the second branch rail 106 and the first branch rail 100 is not too small. If the vertical distance D2 between the second branch rail 106 and the first branch rail 100 is too small, in the case that the size of the processing area 160 satisfies the layout of the production shop, the space area of the longitudinal running rail 105 opposite to the first branch rail 100 is easily too small, and accordingly, the probability of setting the machine table 102 between the longitudinal running rail 105 and the first branch rail 100 is reduced, thereby reducing the area availability of the processing area 160 and affecting the production efficiency of the processing area 160. For this purpose, in the present embodiment, the vertical distance D2 between the second branch rail 106 and the first branch rail 100 is at least greater than 500mm. Specifically, the vertical distance D2 between the second branch rail 106 and the first branch rail 100 is the vertical distance D2 between the longitudinal running rail 105 and the first branch rail 100.
It should be further noted that, along the direction perpendicular to the transmission direction of the main running rail 101 (as shown in the X direction in fig. 2), the distance between the transverse running rail 103 and the main running rail 101 is greater than the distance between the machine table 102 located at the side of the warehouse device 108 and the main running rail 101, which is correspondingly easy to cause the turning radius at the connection end of the first branch rail 100 and the main running rail 101 to meet the size requirement, so that the vibration of the suspended transmission device passing through the connection end is reduced, and the running stability of the suspended transmission device is increased.
In this embodiment, the material of the second branch rail 106 includes, but is not limited to, aluminum alloy material.
In this embodiment, the machine 102 is disposed on a side of the stocker 108 along the conveying direction of the main running rail 101, and the machine on the side of the stocker 108 is closest to the main running rail 101.
It should be noted that, along a direction perpendicular to the conveying direction of the main running rail 101, the distance D1 between the machine 102 located at the side of the stocker 108 and the main running rail 101 should not be too small. If the distance D1 between the machine 102 and the main running rail 101 at the side of the warehouse 108 is too small, it is easy to cause that the process product stored in the suspended transmission device cannot be accurately placed into the pick-and-place port of the machine 102, which increases the risk that the process product falls on the floor of the production workshop, and at the same time, it is easy to cause that the turning radius at the connection end of the first branch rail 100 and the main running rail 101 is too small, which increases the vibration of the suspended transmission device passing through the connection end, and causes the running stability of the suspended transmission device to be reduced. For this reason, in this embodiment, the distance D1 between the machine 102 located at the side of the warehouse 108 and the main running rail 101 is at least greater than 800mm along the direction perpendicular to the conveying direction of the main running rail 101.
In this embodiment, the stocker 108 has a pick-and-place port (port) 107, and the cassettes are stored in the stocker 108 or taken out from the stocker 108 through the pick-and-place port 107.
In this embodiment, the pick-and-place port 107 faces the transverse running rail 103 of the second branch rail 106.
In particular, in the case where the pick-and-place port 107 of the stocker 108 is directed toward the second branch rail 106, the distance between the stocker 108 and the main running rail 101 can be reduced, and since the rail is generally disposed above the machine 102, the distance between the machine 102 closest to the stocker 108 and the stocker 108 is advantageously reduced, and the available area of the processing area 160 is optimized, so that the area availability of the processing area 160 is improved.
It should be noted that, in a direction perpendicular to the conveying direction of the main track 101, the distance D3 between the stocker 108 and the main track 101 should not be too small. If the distance D3 between the stocker 108 and the main track 101 is too small, the probability of collision between the stocker 108 and the suspended conveyor running in the main track 101 is increased, so that the risk of damage to the main track 101 and the suspended conveyor is greatly increased, thereby affecting the production efficiency of the processing area 160. For this purpose, in the present embodiment, the distance D3 between the stocker 108 and the main running rail 101 is greater than 0mm in the direction perpendicular to the conveying direction of the main running rail 101.
In this embodiment, the pick-and-place port 107 faces the second branch rail 106, and the pick-and-place port 107 of the stocker 108 shares space with the closest maintenance area 130.
It should be noted that, the pick-and-place port 107 of the stocker 108 shares a space with the nearest maintenance area 130, so that the operation space of the pick-and-place port 107 coincides with the space of the nearest maintenance area 130, and accordingly, the maintenance area 130 of the machine 102 can be used as the operation area of the pick-and-place port 107 of the stocker 108 under the condition of meeting the maintenance space of the machine 102, so that the distance between the machine 102 closest to the stocker 108 and the stocker 108 is reduced, and the available area of the processing area 160 is optimized, thereby improving the area availability of the processing area 160.
In the case where the machine 102 does not need to be maintained, the maintenance area 130 closest to the pick-and-place port 107 of the stocker 108 may be used for an operation space of the pick-and-place port 107, and accordingly, the pick-and-place port 107 of the stocker 108 and the closest maintenance area 130 may share a space.
It should be further noted that, the pick-and-place port 107 faces the second branch rail 106, and the distance D4 between the pick-and-place port 107 of the stocker 108 and the second branch rail 106 facing the pick-and-place port 107 should not be too large or too small. If the distance D4 between the pick-and-place port 107 of the stocker 108 and the second branch rail 106 facing the pick-and-place port 107 is too large, the process products transported in the suspended transport device running on the second branch rail 106 cannot be accurately placed into the pick-and-place port 107, and accordingly, the risk that the process products fall onto the floor of the production shop is increased, thereby affecting the production and transport efficiency of the processing area 160; if the distance D4 between the pick-and-place port 107 of the stocker 108 and the second branch rail 106 facing the pick-and-place port 107 is too small, the probability of collision between the stocker 108 and the suspended transmission device running on the second branch rail 106 is increased, and meanwhile, the process products stored in the suspended transmission device are easily caused to be unable to be accurately placed into the pick-and-place port 107, so that the risk that the process products fall onto the floor of the production workshop is increased, and the production transmission efficiency of the processing area 160 is affected. For this reason, in this embodiment, the pick-and-place port 107 faces the second branch rail 106, and the distance D4 between the pick-and-place port 107 of the stocker 108 and the second branch rail 106 toward which the pick-and-place port 107 faces is 60mm to 485mm.
In this embodiment, the second branch rail 106 is shown at the position of the stocker 108, two ends of the second branch rail 106 are connected to the main running rail 101, and the second branch rail 106 surrounds the stocker 108, and the stocker 108 has a pick-and-place port 107, where the pick-and-place port 107 faces the second branch rail 106.
Referring to fig. 3, in other embodiments, the second branch rail 206 is located at a position of the stocker 203, two ends of the second branch rail 206 are connected to the main running rail, and the second branch rail 206 surrounds the stocker 203, and the stocker 203 has a pick and place port 207, and the pick and place port 207 faces the main running rail.
Through setting up around the second branch orbit of storage 203, the second branch orbit can play the effect of reposition of redundant personnel to the transportation transmission unsettled device in the main orbit, and correspondingly, the transmission time of transportation transmission unsettled device on the main orbit shortens to under the certain circumstances of total output ability in production shop, make the production transmission efficiency of whole automatic transmission system obtain improving.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention, and the scope of the invention should be assessed accordingly to that of the appended claims.

Claims (10)

1. An automated transmission system for a production plant, the production plant comprising a plurality of processing areas, the processing areas comprising a plurality of stations, and at least one of the processing areas being provided with a warehouse, the automated transmission system comprising:
the track for fixed unsettled conveyor, and make unsettled conveyor is followed the track is transmitted, the track includes:
the main running rail is positioned at the boundary position of the processing areas and at one side of the warehousing device, which is away from the machine table, and is used for enabling the suspended transmission device to transmit between the processing areas;
the first branch rail is positioned in the processing area, two ends of the first branch rail are connected with the main running rail, and the first branch rail is used for enabling the suspended transmission device to transmit between the machine stations in the processing area;
the second branch rail is positioned at the position where the storage device is positioned, two ends of the second branch rail are connected with the main running rail, and the second branch rail surrounds the storage device;
the storage device is provided with a picking and placing port, the picking and placing port faces the main running track, or the picking and placing port faces the second branch track.
2. The automated transport system of claim 1, wherein the second branch track comprises: the transverse running rail is positioned at one side of the storage device, which is away from the main running rail; a longitudinal running rail connecting the transverse running rail and the main running rail;
the pick-and-place port is oriented to the transverse running rail of the second branch rail.
3. The automated transport system of claim 2, wherein the main travel track is a straight travel track and the lateral travel track is parallel to the main travel track.
4. The automated transfer system of claim 2, wherein the side of the stocker is provided with the stations along the main track transfer direction, and the stations of the side of the stocker are closest to the main track;
and the distance between the transverse running rail and the main running rail is larger than the distance between the machine table positioned at the side part of the storage device and the main running rail along the direction perpendicular to the transmission direction of the main running rail.
5. The automated transport system of claim 4, wherein a distance between a machine on a side of the stocker and the main travel rail in a direction perpendicular to the main travel rail transport direction is greater than 800mm.
6. The automated transport system of any of claims 1-5, wherein, in the processing zone, an area between adjacent stations serves as a maintenance zone;
the pick-and-place port faces the second branch track, and the pick-and-place port of the storage device shares space with the nearest maintenance area.
7. The automated transfer system of any of claims 1-5, wherein the pick and place port is oriented toward the second branch rail and a distance between the pick and place port of the bin and the second branch rail toward which the pick and place port is oriented is 60mm to 485mm.
8. The automated transfer system of any of claims 1-5, wherein the stocker is spaced from the main track by a distance greater than 0mm in a direction perpendicular to the main track transfer direction.
9. The automated transfer system of any of claims 1-5, wherein a vertical distance between the second branch rail and the first branch rail is greater than 500mm.
10. The automated transfer system of any of claims 1-5, wherein the stocker is configured to store a cassette configured to hold a plurality of wafers.
CN202210181891.XA 2022-02-25 2022-02-25 Automatic transmission system of workshop Pending CN116705675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210181891.XA CN116705675A (en) 2022-02-25 2022-02-25 Automatic transmission system of workshop

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210181891.XA CN116705675A (en) 2022-02-25 2022-02-25 Automatic transmission system of workshop

Publications (1)

Publication Number Publication Date
CN116705675A true CN116705675A (en) 2023-09-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210181891.XA Pending CN116705675A (en) 2022-02-25 2022-02-25 Automatic transmission system of workshop

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Country Link
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