CN116705618B - Post-etching roughening process for lead frame - Google Patents

Post-etching roughening process for lead frame Download PDF

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Publication number
CN116705618B
CN116705618B CN202310476228.7A CN202310476228A CN116705618B CN 116705618 B CN116705618 B CN 116705618B CN 202310476228 A CN202310476228 A CN 202310476228A CN 116705618 B CN116705618 B CN 116705618B
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China
Prior art keywords
fixed
lead frame
sliding
sleeve
seat
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CN202310476228.7A
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Chinese (zh)
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CN116705618A (en
Inventor
康小明
胡晓涛
李小虎
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Tianshui Huayang Electronic Technology Co ltd
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Tianshui Huayang Electronic Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4821Flat leads, e.g. lead frames with or without insulating supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4821Flat leads, e.g. lead frames with or without insulating supports
    • H01L21/4835Cleaning, e.g. removing of solder
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67023Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention relates to the technical field of semiconductor devices, in particular to a post-etching roughening process for lead frames, which comprises a main body box, wherein fixed seats are symmetrically fixed on side walls of two sides of the inside of the main body box, retraction grooves are respectively formed on opposite sides of the two fixed seats, and a placement frame for placing the lead frames is fixed between the two fixed seats; the water is sprayed onto the lead frame through the water delivery mechanism, the time that the chemical solution remains on the lead frame is reduced through flushing the lead frame, and therefore the situation that the roughening is too deep due to too long residence time of the chemical solution is avoided, in the process of flushing the lead frame, an operator starts the cleaning mechanism, copper etched out from the lead frame is cooled, and pentahydrate copper sulfate crystals are produced, so that the cleaning mechanism firstly cleans the residual chemical solvent on the surface of the lead frame in the moving process.

Description

Post-etching roughening process for lead frame
Technical Field
The invention relates to the field of semiconductor devices, in particular to a roughening process after etching a lead frame.
Background
The lead frame is used as a chip carrier of an integrated circuit, and is a key structural member for realizing the electric connection between the lead-out end of the internal circuit of the chip and the outer lead by means of bonding materials (gold wires, aluminum wires and copper wires) to form an electric loop, and the lead frame plays a role of a bridge connected with an external lead.
The prior art discloses an invention patent for coarsening a lead frame, and Chinese patent with application number of 202211491670.9 discloses selective coarsening equipment and coarsening method for the semiconductor lead frame, which are applied to the technical field of semiconductor manufacturing. The coarsening equipment comprises a spraying device, an upper template and a lower template, wherein the upper template and the lower template are used for clamping the lead frame, the lower template is provided with hollowed-out holes for exposing a to-be-coarsened area of the lead frame, and the spraying device is used for spraying coarsening liquid medicine on the to-be-coarsened area of the lead frame.
In daily use, generally adopt the mode of spraying to coarsen lead frame, and spray set sprays solution to lead frame's upside back and can produce and pile up, thereby can weaken the going on of etching reaction, so need go on with higher speed microetching through constantly spraying solution, again because lead frame edge is faster than the central part etching rate, if not in time will remain the chemical solution on the lead frame after the coarsening is accomplished and handle cleanly, lead frame edge can coarsen excessively, and coarsening excessive can not only lead to copper and the waste of liquid medicine, and coarsening is too dark can expose the glass base member, consequently can produce the coarsening inhomogeneous.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides a post-etching roughening process for a lead frame.
In order to achieve the above purpose, the invention adopts the following technical scheme: a post-etch roughening process for a leadframe, the roughening process comprising the steps of:
step one: firstly, placing the prepared chemical solution into lead frame roughening equipment by an operator, then placing the lead frame to be roughened at a preset position, and spraying the prepared chemical solution onto the upper side of the lead frame to be roughened by the lead frame roughening equipment;
step two: after coarsening, the lead frame coarsening equipment firstly washes the lead frame, and the roughened part of the lead frame is synchronously cleaned by matching with ultrasonic waves in the washing process;
step three: after the cleaning is finished, the flushing device is closed, residual water on the lead frame is adsorbed through the lead frame roughening equipment, and the roughened surface of the lead frame is kept clean;
step four: the operator closes the lead frame roughening equipment, and takes out the roughened lead frame and the collected waste liquid for the next treatment;
the lead frame coarsening equipment comprises a main body box, fixing seats are symmetrically fixed on side walls of two sides of the interior of the main body box, folding and unfolding grooves are formed in opposite sides of the two fixing seats, a placing frame for placing a lead frame is fixed between the two fixing seats, a fixing plate is fixed on the top of the main body box, a spraying mechanism is arranged on the side wall of the fixing plate and is located right above the placing frame, and the spraying mechanism is used for spraying chemical solution to the lead frame;
the two fixing seats are fixedly connected with connecting plates at one sides of the two fixing seats, which are close to the fixing plates, a sliding frame is jointly fixed at one side of the two connecting plates, which is close to the fixing plates, a water delivery mechanism is arranged at one side of the sliding frame, which is close to the fixing plates, the water delivery mechanism is used for flushing the roughened lead frame, and a cleaning mechanism is arranged between the sliding frame and the two fixing seats and is used for cleaning and adsorbing chemical solution remained on the outer surface of the roughened lead frame;
the inside bottom surface of main part case is provided with collection mechanism, collection mechanism is used for collecting the waste liquid.
Preferably, the brush cleaning mechanism comprises a motor, the motor is fixed in one of them the outside of connecting plate, the output axle head of motor runs through be fixed with the threaded rod behind the connecting plate, the outer wall threaded connection of threaded rod has the screw thread seat, the screw thread seat is kept away from one side rotation of sliding frame is connected with the bracing piece, the bracing piece is kept away from the one end of sliding frame is fixed with the sleeve, the telescopic outer wall is circumference array and has seted up a plurality of grooves of running through, one of them the inside slip of running through the groove runs through there is the brush, and remaining the inside of running through the groove all slides and runs through there is the adsorption piece, the brush with the adsorption piece with be fixed with a plurality of elastic components respectively between the sleeve, the screw thread seat is kept away from one side of sliding frame is fixed with two gag lever posts, two the gag lever post is kept away from one end of sliding frame is fixed with the fixed cover jointly, the fixed cover is located the telescopic outside, set up the spout on the outer wall of fixed cover, the spout is located place the frame directly over, the screw thread seat is close to one side of sliding frame is provided with the brush cleaning mechanism and is used for the brush cleaning mechanism to carry out with the wire replacement piece when the drive mechanism is kept away from the side of sliding frame, and is used for the brush cleaning mechanism is changed and is contacted with the adsorption piece.
Preferably, the pushing mechanism comprises a communicating cylinder, the communicating cylinder is fixed on one side of the threaded seat away from the sliding frame, a plurality of protruding blocks are fixed on the outer wall of the communicating cylinder in a linear array, and all protruding blocks are located at the bottom end of the communicating cylinder.
Preferably, the arc-shaped groove is formed in one side, close to the supporting rod, of the cleaning piece, the top of the sliding frame is connected with an ultrasonic generator in a sliding mode, the side wall of one side of the ultrasonic generator is fixedly connected with the threaded seat through a connecting frame, and the vibrating head of the ultrasonic generator is located right above the arc-shaped groove.
Preferably, the transposition mechanism comprises a fixed column, a fixed sleeve and a plurality of limit plates distributed in a linear array, one end of the fixed column penetrates through the threaded seat and is fixedly connected with the support rod, a ratchet wheel is fixedly connected to the outer wall of the fixed column, the fixed sleeve is fixed on the side wall of the threaded seat, which is close to the ratchet wheel, the fixed sleeve is sleeved on the outer side of the fixed column, a connecting sleeve is fixed towards one end of the fixed sleeve, which is rotationally connected with the ratchet wheel, a one-way clamping mechanism is arranged between the connecting sleeve and the ratchet wheel and is used for limiting the ratchet wheel after the ratchet wheel rotates for a certain angle, a rotating rod is rotationally connected to one side of the ratchet wheel, which is far away from the threaded seat, and one end of the rotating rod, which is far away from the threaded seat, is fixedly connected with the fixed column, a connecting seat is fixedly connected to the outer wall of the rotating rod, a connecting bracket is arranged between the rotating rod and the fixed sleeve, one side of the connecting bracket is rotationally connected with the rotating rod, the other side of the connecting bracket is fixedly connected with the fixed sleeve, a first torsion spring is fixed between the connecting seat and the connecting bracket, the first torsion spring is sleeved on the outer wall of the rotating rod, a connecting support rod is rotationally connected to one side of the connecting seat, which is close to the threaded seat, a pawl is fixed to the outer wall of the connecting support rod, a second torsion spring is fixed between the connecting seat and the pawl, the second torsion spring is sleeved on the outer wall of the connecting support rod, the pawl is matched with the ratchet wheel, a limiting mechanism for one-way limiting the overturning direction of the pawl is arranged between the pawl and the connecting seat, the plurality of limiting plates are all rotationally connected to the inner top surface of the sliding frame, one-way limiting blocks are arranged on the side surfaces of the limiting plates, and the tops of the one-way limiting blocks are fixedly connected to the inner top surface of the sliding frame.
Preferably, the one-way clamping mechanism comprises an elastic clamping piece and a swivel, the elastic clamping piece is fixed on the outer wall of the connecting sleeve, the swivel is fixed on one side of the ratchet wheel facing the thread seat, a plurality of clamping grooves are formed in the inner wall of the swivel in a circumferential array mode, the elastic clamping piece is matched with the clamping grooves, the elastic clamping piece comprises a connecting sliding seat, a limiting block is inserted into the connecting sliding seat in a sliding mode, an inclined surface is formed in the top of the limiting block, and a supporting spring is fixedly connected between the limiting block and the connecting sliding seat.
Preferably, the limit mechanism comprises a limit sleeve, the limit sleeve is fixed on one side of the connecting seat, which faces the threaded seat, a limit groove is formed in the outer wall of the limit sleeve, and the bottom of the pawl passes through the limit groove and then is located in a tooth gap of the ratchet wheel.
Preferably, the water delivery mechanism comprises two support plates, the top parts of the two support plates are jointly fixed with a water tank, one side of the water tank, which faces towards the ratchet wheel, is fixedly communicated with a plurality of water delivery pipes, and one side, far away from the water tank, of all the water delivery pipes penetrates through the sliding frame and is fixedly communicated with an automatic water spraying head after the sliding frame and the placing frame.
Preferably, the spraying mechanism comprises a liquid storage tank and two struts, the liquid storage tank is fixed on one side wall of the main body tank through a triangular mounting seat, a water pump is fixed at the top of the liquid storage tank, a water inlet of the water pump is fixedly communicated with the liquid storage tank through a water inlet pipe, the struts are fixed on one side, close to the sliding frame, of the fixed plate, a conveying tank is fixedly connected between the struts, a water outlet of the water pump is fixedly communicated with the conveying tank through a water outlet pipe, and a plurality of spraying heads are fixedly communicated at the bottom of the conveying tank in a linear array.
Preferably, the collecting mechanism comprises a sliding rail, the sliding rail is fixed in the main body box, and the top of the sliding rail is connected with a collecting box with an opening at the top in a sliding manner.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, through the arrangement of the cleaning mechanism, water is sprayed onto the lead frame through the water delivery mechanism, and the time for the chemical solution to remain on the lead frame is reduced through flushing the lead frame, so that the situation that roughening is too deep caused by too long residence time of the chemical solution is avoided, in the process of flushing the lead frame, an operator starts the cleaning mechanism, and as copper micro-etched on the lead frame generates a pentahydrate copper sulfate crystal when encountering cooling, the cleaning mechanism firstly cleans the chemical solvent remaining on the surface of the lead frame further in the moving process.
2. According to the invention, through the arrangement of the transposition mechanism, the ratchet wheel is pushed to rotate by a certain angle through the pawl, the ratchet wheel rotates to drive the fixed column to rotate, the fixed column drives the support rod to rotate by a certain angle, the support rod drives the driving sleeve to rotate by a certain angle, and the driving sleeve rotates by a certain angle to replace the next absorption part, so that the switching between the cleaning part and the absorption part is facilitated.
3. According to the invention, through the arrangement of the limiting sleeve, the pawl vibrates under the action of the ratchet teeth in the resetting process, so that the pawl is abdied through the arrangement of the second torsion spring, better resetting of the pawl is facilitated, the movement track of the pawl is limited through the arrangement of the limiting groove, and better limiting of the pawl is facilitated.
Drawings
FIG. 1 is a schematic illustration of a process flow of the present invention;
FIG. 2 is a schematic view of a first overall structure of the present invention;
FIG. 3 is a schematic view of a second overall construction of the present invention;
FIG. 4 is a schematic view of the present invention in cross-section along the main body box;
FIG. 5 is an enlarged view of the structure of FIG. 4A in accordance with the present invention;
FIG. 6 is a schematic view of the connection between the sliding frame and the threaded rod according to the present invention;
FIG. 7 is an enlarged view of the structure of FIG. 6B in accordance with the present invention;
FIG. 8 is a schematic view of the connection between the placement frame and the support plate according to the present invention;
FIG. 9 is a schematic view of the connection between the fixing sleeve and the connection base according to the present invention;
FIG. 10 is a schematic view of the connection between the sleeve and the communication barrel of the present invention;
FIG. 11 is a schematic view of a retaining sleeve according to the present invention;
FIG. 12 is a schematic view of the structure of the joint between the stationary sleeve and the ratchet wheel of the present invention;
FIG. 13 is a schematic view of the joint between the sleeve and the absorbent member of the present invention;
FIG. 14 is a schematic view of the connection between the absorbent member and the communication cartridge of the present invention;
FIG. 15 is a schematic view of a communication barrel according to the present invention;
FIG. 16 is a schematic view of the present invention in cross-section along the connecting carriage;
fig. 17 is a schematic structural view of a joint between a limiting plate and a sliding frame according to the present invention.
In the figure: 1. a main body box; 2. a fixing seat; 3. a winding and unwinding groove; 4. placing a frame; 5. a fixing plate; 6. a connecting plate; 7. a sliding frame; 8. a motor; 9. a threaded rod; 10. a screw seat; 11. a support rod; 12. a sleeve; 13. a through groove; 14. an elastic member; 15. a cleaning member; 16. an absorbing member; 17. a limit rod; 18. a fixed sleeve; 19. a chute; 20. a communicating tube; 21. a bump; 22. an arc-shaped groove; 23. an ultrasonic generator; 24. fixing the column; 25. a fixed sleeve; 26. a limiting plate; 27. a ratchet wheel; 28. connecting sleeves; 29. a rotating rod; 30. a connecting seat; 31. a connecting bracket; 32. a first torsion spring; 33. a connecting strut; 34. a pawl; 35. a second torsion spring; 36. an elastic clamping piece; 37. a swivel; 38. a clamping groove; 39. a limit sleeve; 40. a limit groove; 41. a support plate; 42. a water tank; 43. a water pipe; 44. an automatic sprinkler; 45. a liquid storage tank; 46. a support rod; 47. a water pump; 48. a delivery box; 49. a spray header; 50. a slide rail; 51. a collection box; 52. the connecting slide seat; 53. a support spring; 54. a limiting block; 55. a one-way limiting block.
Detailed Description
The following description is presented to enable one of ordinary skill in the art to make and use the invention. The preferred embodiments in the following description are by way of example only and other obvious variations will occur to those skilled in the art.
A post-etching leadframe roughening process as shown in fig. 2-17, the roughening process comprising the steps of:
step one: firstly, placing the prepared chemical solution into lead frame roughening equipment by an operator, then placing the lead frame to be roughened at a preset position, and spraying the prepared chemical solution onto the upper side of the lead frame to be roughened by the lead frame roughening equipment;
step two: after coarsening, the lead frame coarsening equipment firstly washes the lead frame, and the roughened part of the lead frame is synchronously cleaned by matching with ultrasonic waves in the washing process;
step three: after the cleaning is finished, the flushing device is closed, residual water on the lead frame is adsorbed through the lead frame roughening equipment, and the roughened surface of the lead frame is kept clean;
step four: the operator closes the lead frame roughening equipment, and takes out the roughened lead frame and the collected waste liquid for the next treatment;
the lead frame coarsening equipment in the first to fourth steps comprises a main body box 1, fixed seats 2 are symmetrically fixed on side walls of two sides of the inside of the main body box 1, a collecting and releasing groove 3 is formed on opposite sides of the two fixed seats 2, a placing frame 4 for placing a lead frame is fixed between the two fixed seats 2, a fixing plate 5 is fixed on the top of the main body box 1, a spraying mechanism is arranged on the side wall of the fixing plate 5 and is positioned right above the placing frame 4, and the spraying mechanism is used for spraying chemical solution to the lead frame;
the two fixing bases 2 are fixed with connecting plates 6 on one side close to the fixing plate 5, the sliding frames 7 are jointly fixed on one side of the two connecting plates 6 close to the fixing plate 5, a water delivery mechanism is arranged on one side of the sliding frames 7 close to the fixing plate 5 and used for flushing the roughened lead frames, and a cleaning mechanism is arranged between the sliding frames 7 and the two fixing bases 2 and used for cleaning and adsorbing chemical solution remained on the outer surfaces of the roughened lead frames;
the bottom surface of the inside of the main body box 1 is provided with a collecting mechanism which is used for collecting waste liquid; in the daily use process, the lead frame is coarsened in a spraying mode, and after the solution is sprayed to the upper side of the lead frame by a spraying device, accumulation is generated, so that the etching reaction is weakened, the etching reaction is required to be accelerated by continuously spraying the solution, and because the etching rate of the edge of the lead frame is higher than that of the central part, if the chemical solution remained on the lead frame is not treated cleanly after the coarsening is finished, the edge of the lead frame can be coarsened excessively, the waste of copper and liquid medicine is caused by excessive coarsening, and the glass matrix is exposed due to excessive coarsening, so that the coarsening is uneven. The chemical solution is generally concentrated sulfuric acid and hydrogen peroxide solution, then an operator places the lead frame on the placement frame 4, starts the spraying mechanism, sprays the chemical solution to the upper side of the lead frame through the spraying mechanism to coarsen, after coarsening is finished, closes the spraying mechanism, starts the water delivery mechanism, sprays water to the lead frame through the water delivery mechanism, and is beneficial to reducing the time of the chemical solution remained on the lead frame through flushing the lead frame, thereby being beneficial to avoiding the condition of too deep coarsening caused by too long residence time of the chemical solution, in the flushing process of the lead frame, the operator starts the cleaning mechanism, as copper micro-etched on the lead frame encounters copper sulphate pentahydrate crystals generated by cooling, the cleaning mechanism firstly further cleans the chemical solvent remained on the surface of the lead frame in the moving process, and can clean ponding and other impurity on the lead frame in step at the in-process that removes and promote to collect in the mechanism to be favorable to follow-up to waste liquid handles, after cleaning mechanism removes to the preset position, water delivery mechanism closes, cleaning mechanism begins the return, the state can be switched over at the in-process of return to the mechanism of cleaning, make the mechanism of cleaning begin to adsorb moisture and probably remaining chemical solution to the surface after the coarsening of lead frame at the in-process of return, thereby clear up the lead frame surface of coarsening again, be favorable to keeping the clean and tidy of lead frame surface and be favorable to avoiding the lead frame to be excessively coarsened condition.
As one implementation mode of the invention, the cleaning mechanism comprises a motor 8, the motor 8 is fixed on the outer side of one connecting plate 6, a threaded rod 9 is fixed after the output shaft end of the motor 8 penetrates through the connecting plate 6, the outer wall of the threaded rod 9 is in threaded connection with a threaded seat 10, one side of the threaded seat 10 far away from the sliding frame 7 is in rotary connection with a supporting rod 11, one end of the supporting rod 11 far away from the sliding frame 7 is fixedly provided with a sleeve 12, the outer wall of the sleeve 12 is provided with a plurality of penetrating grooves 13 in a circumferential array, one penetrating groove 13 is internally provided with a cleaning piece 15 in a sliding manner, the inner part of the remaining penetrating groove 13 is provided with an adsorbing piece 16 in a sliding manner, a plurality of elastic pieces 14 are respectively fixed between the cleaning piece 15, the adsorbing piece 16 and the sleeve 12, two limiting rods 17 are fixed on one side of the threaded seat 10 far away from the sliding frame 7, one end of the two limiting rods 17 far away from the sliding frame 7 is jointly fixed with a fixed sleeve 18, the fixed sleeve 18 is positioned on the outer side of the sleeve 12, the outer wall of the fixed sleeve 18 is provided with a sliding groove 19, the sliding groove 19 is positioned right above the placing frame 4, one side of the threaded seat 10 near the sliding frame 7 is provided with a transposition mechanism, when the transposition mechanism 10 slides in the penetrating groove 15, the inside the penetrating groove 15, the other penetrating groove 15 penetrates through the cleaning piece 15, the other penetrating groove 16, the sliding piece 16 is used for pushing the sliding piece 16, the sliding piece is far from the sliding piece 16, and the other side of the sliding piece is in contact with the sliding piece 16, and the other side of the sliding piece is driven piece, and the sliding piece is fixed; when in operation, an operator starts the motor 8, the motor 8 rotates to drive the threaded rod 9 to rotate, the threaded rod 9 rotates to drive the threaded seat 10 to move, the threaded seat 10 moves to drive the supporting rod 11 to move, the supporting rod 11 drives the sleeve 12 to move, the sleeve 12 moves to drive the elastic piece 14 to move, the elastic piece 14 moves to drive the cleaning piece 15 to move with the adsorbing piece 16, the cleaning piece 15 is positioned at the outer side of the sliding groove 19 and contacts with the roughening side of the lead frame in the initial state, so that the cleaning piece 15 can clean the surface of the lead frame in the moving process, thereby being beneficial to avoiding excessive roughening of the lead frame caused by residual chemical solution staying on the surface of the lead frame, pushing the residual chemical solution and water flow synchronously in the cleaning process, thereby being beneficial to pushing the residual chemical solution and water to flow into the collecting mechanism for collection, the water delivery mechanism is favorable for flushing the cleaned lead frame again, the chemical solution remained on the surface of the lead frame is further favorable for flushing, the screw seat 10 moves synchronously to drive the two limit rods 17 to move, the two limit rods 17 move to drive the fixed sleeve 18 to move, the fixed sleeve 18 is in a static state relative to the sleeve 12, the sleeve 12 can be partially shielded by the fixed sleeve 18, the suction parts 16 at the bottom ends of other places can be shielded in the moving process, the water delivery mechanism is favorable for preventing the suction parts 16 from being soaked in the lead frame flushing process, the water delivery mechanism stops working after the cleaning of the cleaning part 15 is completed, the motor 8 starts to drive the threaded rod 9 to rotate reversely, the threaded rod 9 drives the screw seat 10 to return, the threaded seat 10 returns to drive the transposition mechanism to return, the transposition mechanism drives the sleeve 12 to rotate a certain angle through the supporting rod 11 in the return process, the sleeve 12 drives the cleaning piece 15 to rotate a certain angle through the elastic piece 14, and then the elastic piece 14 can drive the cleaning piece 15 to retract after being separated from the pushing mechanism, so that the cleaning piece 15 is beneficial to enter the inside of the sliding groove 19 and rotate along with the sleeve 12, the sleeve 12 rotates a certain angle and then the adsorption piece 16 can rotate to the lower side of the pushing mechanism, so that the adsorption piece 16 is pushed out of the sliding groove 19 and contacts with the coarsening side of the lead frame in cooperation with the pushing mechanism, residual moisture on the coarsening side of the lead frame or residual chemical liquid possibly not washed cleanly can be adsorbed again in the return process of the adsorption piece 16, the lead frame is further prevented from being corroded by residual chemical solution, the coarsening side of the lead frame can be kept clean, further processing is facilitated, the transposition assembly can drive the sleeve 12 to rotate a certain angle to replace the next adsorption piece 16 after a certain distance is moved, the adsorption capacity is beneficial to be kept, the residual chemical solution on the coarsening side of the lead frame is improved, and the excessive adsorption effect of the lead frame is avoided.
As one embodiment of the present invention, the pushing mechanism includes a communicating tube 20, the communicating tube 20 is fixed on one side of the screw base 10 far from the sliding frame 7, a plurality of protruding blocks 21 are fixed on the outer wall of the communicating tube 20 in a linear array, and all protruding blocks 21 are located at the bottom end of the communicating tube 20; when the elastic member 14 rotates to the lower side and contacts with the protruding block 21 outside the communication barrel 20, the elastic member 14 is pushed to move outside the sliding groove 19 under the action of the protruding block 21, and the elastic member 14 drives the adsorbing member 16 or the cleaning member 15 at the corresponding position to extend out of the sliding groove 19 and contact with the lead frame, so that the switching between the adsorbing member 16 and the cleaning member 15 is facilitated.
As one embodiment of the invention, one side of the cleaning piece 15 close to the supporting rod 11 is provided with an arc-shaped groove 22, the top of the sliding frame 7 is connected with an ultrasonic generator 23 in a sliding way, one side wall of the ultrasonic generator 23 is fixedly connected with the thread seat 10 through a connecting frame, and a vibrating head of the ultrasonic generator 23 is positioned right above the arc-shaped groove 22; the cleaning device comprises a cleaning piece 15, a cleaning device and a cleaning device, wherein the cleaning device is used for cleaning the roughened surface of a lead frame through the cleaning piece 15, although some larger and loose impurities can be cleaned, a plurality of impurities can be generated on the lead frame in the roughening process, and are adhered to the lead frame, but the impurities which are adhered to the lead frame can not be cleaned well through the cleaning device 15.
As one implementation mode of the invention, the transposition mechanism comprises a fixed column 24, a fixed sleeve 25 and a plurality of limit plates 26 distributed in a linear array, one end of the fixed column 24 penetrates through a threaded seat 10 and is fixedly connected with a supporting rod 11, the outer wall of the fixed column 24 is fixedly connected with a ratchet 27, the fixed sleeve 25 is fixed on the side wall of the threaded seat 10, which is close to the ratchet 27, the fixed sleeve 25 is sleeved on the outer side of the fixed column 24, one end of the fixed sleeve 25, which faces the ratchet 27, is fixedly provided with a connecting sleeve 28, the connecting sleeve 28 is rotationally connected with the ratchet 27, a one-way clamping mechanism is arranged between the connecting sleeve 28 and the ratchet 27 and is used for limiting the ratchet 27 after the ratchet 27 rotates for a certain angle, one side of the ratchet 27, which is far away from the threaded seat 10, is rotationally connected with a rotating rod 29, one end of the rotating rod 29, which is far away from the threaded seat 10, of the fixed column 24 is fixedly connected with a connecting seat 30, a connecting bracket 31 is arranged between the rotating rod 29 and the fixed sleeve 25, one side of the connecting bracket 31 is rotationally connected with the rotating rod 29, the other side of the connecting bracket 31 is fixedly connected with the fixed sleeve 25, a first torsion spring 32 is fixed between the connecting seat 30 and the connecting bracket 31, the first torsion spring 32 is sleeved on the outer wall of the rotating rod 29, one side of the connecting seat 30, which is close to the threaded seat 10, is rotationally connected with a connecting strut 33, the outer wall of the connecting strut 33 is fixedly provided with a pawl 34, a second torsion spring 35 is fixed between the connecting seat 30 and the pawl 34, the second torsion spring 35 is sleeved on the outer wall of the connecting strut 33, the pawl 34 is matched with the ratchet wheel 27, a limiting mechanism for limiting the overturning direction of the pawl 34 in a one-way is arranged between the pawl 34 and the connecting seat 30, a plurality of limiting plates 26 are rotationally connected on the inner top surface of the sliding frame 7, and the side surfaces of the limiting plates 26 are provided with one-way limiting blocks 55, the top of the one-way limiting block 55 is fixedly connected to the inner top surface of the sliding frame 7; during operation, the screw seat 10 returns to drive the fixed column 24 to return, the fixed column 24 drives the ratchet 27, the fixed column 24, the connecting support 31 and the whole return of the connecting seat 30, one side of the connecting support 31 is fixed with the pin, the pin is located one side of the connecting seat 30 and contacts with the connecting seat 30, the pin is used for limiting the rotation track of the connecting seat 30, in the process of returning the connecting seat 30, the connecting seat 30 contacts with the limiting plate 26, the connecting seat 30 is stressed to rotate along the rotating rod 29, meanwhile, the rotating rod 29 drives the connecting support rod 33 to move, the connecting support rod 33 can drive the pawl 34 to move, the pawl 34 can push the ratchet 27 to rotate by a certain angle, the ratchet 27 rotates to drive the fixed column 24 to rotate, the fixed column 24 drives the supporting rod 11 to rotate by a certain angle, the supporting rod 11 drives the driving sleeve 12 to rotate by a certain angle, the driving sleeve 12 rotates by a certain angle to replace the next absorbing member 16, thereby being favorable for realizing the switching between the cleaning member 15 and the absorbing member 16, the one-way clamping mechanism can automatically limit the ratchet 27 after the ratchet 27 rotates by a certain angle, thereby being favorable for preventing the ratchet 27 from rotating by an external force in the process of returning, and being favorable for maintaining the stable absorbing member 16, and the absorbing member 30 from rotating along the rotating rod 29, and simultaneously, the connecting support 30 is driven by the rotating by a certain angle, and the limiting plate 34, thereby being favorable for realizing the automatic limiting effect after the automatic limiting the rotating plate 30 and the rotating plate 34 after the rotating a certain rotating direction is better by the rotating plate 30 and the rotating along the rotating direction of the rotating plate 30.
As one embodiment of the present invention, the one-way locking mechanism includes an elastic locking member 36 and a swivel 37, the elastic locking member 36 is fixed on the outer wall of the connecting sleeve 28, the swivel 37 is fixed on one side of the ratchet 27 facing the screw seat 10, the inner wall of the swivel 37 is provided with a plurality of locking grooves 38 in a circumferential array, the elastic locking member 36 is matched with the locking grooves 38, the elastic locking member 36 includes a connecting sliding seat 52, a limiting block 54 is slidingly inserted in the connecting sliding seat 52, the top of the limiting block 54 is provided with an inclined plane, and a supporting spring 53 is fixedly connected between the limiting block 54 and the connecting sliding seat 52; during operation, the ratchet 27 rotates to drive the swivel 37 to rotate a certain angle, the swivel 37 rotates to drive the elastic clamping piece 36 to slide out of the clamping groove 38, so that limit on the swivel 37 is relieved, the top of the elastic clamping piece 36 is provided with an inclined surface on one side, the elastic clamping piece 36 can be compressed to retract and abdy under the guidance of the inclined surface in the rotating process of the clamping groove 38, after the swivel 37 rotates a certain angle, the elastic clamping piece 36 can release spring force to enter the next clamping groove 38 for clamping, and further, because the other side of the elastic clamping piece 36 is not provided with the inclined surface, the better limit on the swivel 37 is facilitated, and the elastic clamping piece 36 is stressed to release the clamping in the rotating process of the swivel 37.
As one embodiment of the invention, the limiting mechanism comprises a limiting sleeve 39, the limiting sleeve 39 is fixed on one side of the connecting seat 30 facing the threaded seat 10, a limiting groove 40 is formed in the outer wall of the limiting sleeve 39, and the bottom of the pawl 34 passes through the limiting groove 40 and then is positioned in the tooth gap of the ratchet wheel 27; during operation, the pawl 34 can vibrate under the action of the ratchet teeth in the returning process, so that the second torsion spring 35 is arranged to give way, the pawl 34 can return better, the limiting groove 40 is arranged to limit the moving track of the pawl 34, and the pawl 34 can be limited better.
As one embodiment of the invention, the water delivery mechanism comprises two support plates 41, the top parts of the two support plates 41 are fixedly provided with a water tank 42, one side of the water tank 42 facing the ratchet wheel 27 is fixedly communicated with a plurality of water delivery pipes 43, and one side of all the water delivery pipes 43 far away from the water tank 42 penetrates through the sliding frame 7 and the placing frame 4 and is fixedly communicated with an automatic water spray head 44; in operation, the operator activates the automatic sprinkler head 44, and the water in the water tank 42 is delivered to the automatic sprinkler head 44 through the water delivery pipe 43 by the external water pump 47, and finally the automatic sprinkler head 44 washes the roughened side of the lead frame.
As one embodiment of the invention, the spraying mechanism comprises a liquid storage tank 45 and two support rods 46, wherein the liquid storage tank 45 is fixed on one side wall of the main body tank 1 through a triangular mounting seat, a water pump 47 is fixed at the top of the liquid storage tank 45, a water inlet of the water pump 47 is fixedly communicated with the liquid storage tank 45 through a water inlet pipe, the two support rods 46 are fixed on one side of a fixed plate 5, which is close to a sliding frame 7, a conveying tank 48 is fixedly connected between the two support rods 46, a water outlet of the water pump 47 is fixedly communicated with the conveying tank 48 through a water outlet pipe, and a plurality of spray heads 49 are fixedly communicated at the bottom of the conveying tank 48 in a linear array; in operation, the operator turns on the water pump 47, and the chemical solution in the liquid storage tank 45 is transferred into the transfer tank 48 by the water pump 47, and then sprays the roughened side of the lead frame by the spray header 49.
As one embodiment of the invention, the collecting mechanism comprises a sliding rail 50, the sliding rail 50 is fixed in the main body box 1, and the top of the sliding rail 50 is connected with a collecting box 51 with an opening at the top in a sliding manner; in operation, an operator opens the door and removes the collection box 51 from the slide rail 50, thereby facilitating the operator to dispose of the waste liquid inside the collection box 51.
The working principle of the invention is as follows: the operator places the chemical solution that the allotment was good in spraying mechanism, the chemical solution generally selects concentrated sulfuric acid and hydrogen peroxide solution, then the operator places the lead frame on placing frame 4, start spraying mechanism, spray chemical solution to the upside of lead frame through spraying mechanism and coarsen, after the coarsening is accomplished, close spraying mechanism, start water delivery mechanism, spray water to the lead frame through water delivery mechanism, through the washing to the lead frame, be favorable to reducing the time that chemical solution remains on the lead frame, thereby be favorable to avoiding the too long condition that causes coarsening too dark of chemical solution residence time, in the course of flushing the lead frame, the operator starts the brush mechanism, because the copper that is micro-etched out on the lead frame runs into the cooling and can produce penta-hydrated copper sulfate crystal, so the brush mechanism at first cleans the chemical solvent that remains on the lead frame surface and further brushes in the course of removing, and can clean ponding and other impurity on the lead frame and promote to collect in the collection mechanism in step in the course of removing, thereby be favorable to subsequent to handling waste liquid, after the mechanism removes the preset position, the water delivery mechanism closes, thereby be favorable to avoiding the situation that the lead frame is cleaned to the excessive and the surface is cleaned to the surface of the lead frame and the coarsened state is changed in the course of cleaning and the surface is washed down in turn, the surface of the situation that the lead frame is cleaned and the surface is polluted.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the foregoing embodiments, but rather, the foregoing embodiments and description illustrate the principles of the invention, and that various changes and modifications may be effected therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.

Claims (9)

1. A post-etching roughening process for a leadframe, the roughening process comprising the steps of:
step one: firstly, placing the prepared chemical solution into lead frame roughening equipment by an operator, then placing the lead frame to be roughened at a preset position, and spraying the prepared chemical solution onto the upper side of the lead frame to be roughened by the lead frame roughening equipment;
step two: after coarsening, the lead frame coarsening equipment firstly washes the lead frame, and the roughened part of the lead frame is synchronously cleaned by matching with ultrasonic waves in the washing process;
step three: after the cleaning is finished, the flushing device is closed, residual water on the lead frame is adsorbed through the lead frame roughening equipment, and the roughened surface of the lead frame is kept clean;
step four: the operator closes the lead frame roughening equipment, and takes out the roughened lead frame and the collected waste liquid for the next treatment;
the lead frame coarsening equipment comprises a main body box (1), fixing seats (2) are symmetrically fixed on side walls of two sides of the interior of the main body box (1), collecting and releasing grooves (3) are formed in opposite sides of the two fixing seats (2), a placing frame (4) for placing a lead frame is fixed between the two fixing seats (2), a fixing plate (5) is fixed on the top of the main body box (1), a spraying mechanism is arranged on the side wall of the fixing plate (5), and is located right above the placing frame (4) and used for spraying chemical solutions to the lead frame;
a connecting plate (6) is fixed on one side, close to the fixed plate (5), of each of the two fixed seats (2), a sliding frame (7) is fixed on one side, close to the fixed plate (5), of each of the two connecting plates (6), a water delivery mechanism is arranged on one side, close to the fixed plate (5), of each of the sliding frames (7), the water delivery mechanism is used for flushing the roughened lead frames, and a cleaning mechanism is arranged between each of the sliding frames (7) and the two fixed seats (2) and is used for cleaning and adsorbing chemical solution remained on the outer surfaces of the roughened lead frames;
the bottom surface of the inner part of the main body box (1) is provided with a collecting mechanism which is used for collecting waste liquid;
the cleaning mechanism comprises a motor (8), the motor (8) is fixed on the outer side of one connecting plate (6), a threaded rod (9) is fixed at the output shaft end of the motor (8) after penetrating through the connecting plate (6), a threaded seat (10) is connected with the outer wall of the threaded rod (9) in a threaded manner, one side of the threaded seat (10) away from the sliding frame (7) is rotationally connected with a supporting rod (11), one end of the supporting rod (11) away from the sliding frame (7) is fixed with a sleeve (12), the outer wall of the sleeve (12) is provided with a plurality of penetrating grooves (13) in a circumferential array, one penetrating groove (13) is internally provided with a cleaning piece (15) in a sliding manner, the rest penetrating grooves (13) are internally provided with an absorbing piece (16) in a sliding manner, a plurality of elastic pieces (14) are respectively fixed between the cleaning piece (15) and the absorbing piece (16) and the sleeve (12), one side of the threaded seat (10) away from the sliding frame (7) is fixed with a sleeve (12), two limiting rods (17) are arranged on one side of the sliding frame (7), two limiting rods (17) are arranged on the outer side of the sleeve (18) and are fixed on the outer side of the sleeve (18), the sliding chute (19) is located right above the placing frame (4), one side of the threaded seat (10) close to the sliding frame (7) is provided with a transposition mechanism, when the threaded seat (10) returns, the transposition mechanism is used for driving the cleaning piece (15) to be switched with the adsorption piece (16), one side of the threaded seat (10) away from the sliding frame (7) is provided with a pushing mechanism, after the cleaning piece (15) is switched with the adsorption piece (16), the pushing mechanism is used for pushing the cleaning piece (15) or the adsorption piece (16) to slide out of the sliding chute (19) and contact with the coarsening side of the lead frame.
2. The post-etching roughening process for the lead frame according to claim 1, wherein the pushing mechanism comprises a communicating cylinder (20), the communicating cylinder (20) is fixed on one side of the threaded seat (10) away from the sliding frame (7), a plurality of protruding blocks (21) are fixed on the outer wall of the communicating cylinder (20) in a linear array, and all protruding blocks (21) are located at the bottom end of the communicating cylinder (20).
3. The post-etching coarsening process of the lead frame according to claim 1, wherein an arc-shaped groove (22) is formed in one side, close to the supporting rod (11), of the cleaning piece (15), an ultrasonic generator (23) is connected to the top of the sliding frame (7) in a sliding mode, one side wall of the ultrasonic generator (23) is fixedly connected with the thread seat (10) through a connecting frame, and a vibrating head of the ultrasonic generator (23) is located right above the arc-shaped groove (22).
4. The post-etching and coarsening process for a lead frame according to claim 3, wherein the transposition mechanism comprises a fixed column (24), a fixed sleeve (25) and a plurality of limit plates (26) distributed in a linear array, one end of the fixed column (24) penetrates through the threaded seat (10) and is fixedly connected with the supporting rod (11), a ratchet wheel (27) is fixedly connected with the outer wall of the fixed column (24), the fixed sleeve (25) is fixed on one side wall, close to the ratchet wheel (27), of the threaded seat (10), the fixed sleeve (25) is sleeved on the outer side of the fixed column (24), one end, facing towards the ratchet wheel (27), of the fixed sleeve (25) is fixedly provided with a connecting sleeve (28), the connecting sleeve (28) is rotationally connected with the ratchet wheel (27), a one-way clamping mechanism is arranged between the connecting sleeve (28) and the ratchet wheel (27) and is used for limiting the ratchet wheel (27) after a certain angle is rotated, the ratchet wheel (27) is far away from one side, close to the ratchet wheel (27), far away from the threaded seat (10), and is fixedly connected with one end, far away from the threaded seat (29), of the threaded seat (29), which is fixedly connected with the threaded seat (29), a connecting bracket (31) is arranged between the rotating rod (29) and the fixed sleeve (25), one side of the connecting bracket (31) is rotationally connected with the rotating rod (29), the other side of the connecting bracket (31) is fixedly connected with the fixed sleeve (25), a first torsion spring (32) is fixed between the connecting seat (30) and the connecting bracket (31), the first torsion spring (32) is sleeved on the outer wall of the rotating rod (29), one side of the connecting seat (30) close to the threaded seat (10) is rotationally connected with a connecting strut (33), a pawl (34) is fixed on the outer wall of the connecting strut (33), a second torsion spring (35) is fixed between the connecting seat (30) and the pawl (34), the second torsion spring (35) is sleeved on the outer wall of the connecting strut (34) and is matched with the ratchet wheel (27), a limiting mechanism (26) for limiting the one-way turnover of the pawl (34) is arranged between the connecting seat (30), a limiting block (26) is arranged on the inner side face of the limiting block (55), the top of the one-way limiting block (55) is fixedly connected to the inner top surface of the sliding frame (7).
5. The post-etching coarsening process for the lead frame according to claim 4, wherein the one-way clamping mechanism comprises an elastic clamping piece (36) and a swivel (37), the elastic clamping piece (36) is fixed on the outer wall of the connecting sleeve (28), the swivel (37) is fixed on one side of the ratchet wheel (27) facing the thread seat (10), a plurality of clamping grooves (38) are formed in the inner wall of the swivel (37) in a circumferential array, the elastic clamping piece (36) is matched with the clamping grooves (38), the elastic clamping piece (36) comprises a connecting sliding seat (52), a limiting block (54) is inserted into the connecting sliding seat (52) in a sliding mode, an inclined surface is formed in the top of the limiting block (54), and a supporting spring (53) is fixedly connected between the limiting block (54) and the connecting sliding seat (52).
6. The post-etching roughening process of claim 4, wherein the limiting mechanism comprises a limiting sleeve (39), the limiting sleeve (39) is fixed on one side of the connecting seat (30) facing the threaded seat (10), a limiting groove (40) is formed in the outer wall of the limiting sleeve (39), and the bottom of the pawl (34) passes through the limiting groove (40) and is located in the tooth gap of the ratchet wheel (27).
7. The post-etching and coarsening process for lead frames according to claim 4, wherein the water delivery mechanism comprises two support plates (41), water tanks (42) are jointly fixed at the tops of the two support plates (41), a plurality of water delivery pipes (43) are fixedly communicated with one side of each water tank (42) facing the ratchet wheel (27), and automatic water spray heads (44) are fixedly communicated with one side, far away from each water tank (42), of all the water delivery pipes (43) through the sliding frame (7) and the placing frame (4).
8. The post-etching coarsening process for the lead frame according to claim 7, wherein the spraying mechanism comprises a liquid storage tank (45) and two supporting rods (46), the liquid storage tank (45) is fixed on one side wall of the main body tank (1) through a triangular mounting seat, a water pump (47) is fixed on the top of the liquid storage tank (45), a water inlet of the water pump (47) is fixedly communicated with the liquid storage tank (45) through a water inlet pipe, two supporting rods (46) are fixed on one side, close to the sliding frame (7), of the fixing plate (5), a conveying tank (48) is fixedly connected between the two supporting rods (46), a water outlet of the water pump (47) is fixedly communicated with the conveying tank (48) through a water outlet pipe, and a plurality of spraying heads (49) are fixedly communicated with the bottom of the conveying tank (48) in a linear array.
9. The post-etching roughening process for lead frame according to claim 8, wherein the collecting mechanism comprises a sliding rail (50), the sliding rail (50) is fixed inside the main body box (1), and the top of the sliding rail (50) is slidably connected with a collecting box (51) with an opening at the top.
CN202310476228.7A 2023-04-28 2023-04-28 Post-etching roughening process for lead frame Active CN116705618B (en)

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Application Number Priority Date Filing Date Title
CN202310476228.7A CN116705618B (en) 2023-04-28 2023-04-28 Post-etching roughening process for lead frame

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Application Number Priority Date Filing Date Title
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CN116705618B true CN116705618B (en) 2024-04-05

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017045740A (en) * 2015-08-24 2017-03-02 Shマテリアル株式会社 Manufacturing method of lead frame, and lead frame processing device
CN210497467U (en) * 2019-06-20 2020-05-12 天水迈格智能设备有限公司 Lead frame belt cleaning device
CN114050117A (en) * 2021-11-17 2022-02-15 天水华洋电子科技股份有限公司 Semi-etching equipment for lead frame of integrated circuit
CN115767930A (en) * 2022-12-06 2023-03-07 天水金浪半导体材料有限公司 Circuit board double-sided etching device and etching method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017045740A (en) * 2015-08-24 2017-03-02 Shマテリアル株式会社 Manufacturing method of lead frame, and lead frame processing device
CN210497467U (en) * 2019-06-20 2020-05-12 天水迈格智能设备有限公司 Lead frame belt cleaning device
CN114050117A (en) * 2021-11-17 2022-02-15 天水华洋电子科技股份有限公司 Semi-etching equipment for lead frame of integrated circuit
CN115767930A (en) * 2022-12-06 2023-03-07 天水金浪半导体材料有限公司 Circuit board double-sided etching device and etching method thereof

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