CN116698958A - Gas purity detection device - Google Patents

Gas purity detection device Download PDF

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Publication number
CN116698958A
CN116698958A CN202310614983.7A CN202310614983A CN116698958A CN 116698958 A CN116698958 A CN 116698958A CN 202310614983 A CN202310614983 A CN 202310614983A CN 116698958 A CN116698958 A CN 116698958A
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CN
China
Prior art keywords
quartz
gas
quartz tube
transmission channel
gas purity
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Pending
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CN202310614983.7A
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Chinese (zh)
Inventor
王斌
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Chengdu Kaishengjie Technology Co ltd
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Chengdu Kaishengjie Technology Co ltd
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Application filed by Chengdu Kaishengjie Technology Co ltd filed Critical Chengdu Kaishengjie Technology Co ltd
Priority to CN202310614983.7A priority Critical patent/CN116698958A/en
Publication of CN116698958A publication Critical patent/CN116698958A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The utility model relates to the technical field of gas detection, in particular to a gas purity detection device which comprises a sealed shell, a quartz tube, a pressurizing electrode, a transmission plate, a light collector and a power supply, wherein the quartz tube is arranged on the sealed shell; a separation plate for dividing the sealed shell into a first sealed cavity and a second sealed cavity is arranged in the sealed shell, and a transmission channel is arranged on the separation plate; the quartz tube is positioned in the first closed cavity, and the contour shadow of the quartz tube is overlapped with the contour shadow of the transmission channel in the view angle of the extension direction of the transmission channel, so that the quartz tube is used for accommodating the gas to be detected; the two pressurizing electrodes are respectively connected with the quartz tube and are arranged at intervals, and a power supply connecting wire of the pressurizing electrodes passes through the isolation plate and is positioned in the second closed cavity; the transmission plate is positioned in the second closed cavity and covers the transmission channel; the light collector is arranged in the second closed cavity and is opposite to the transmission channel; the power supply is connected with a power supply connecting wire of the pressurizing electrode in the second closed cavity. The utility model has high safety and can be suitable for detecting the purity of the high-purity combustible gas.

Description

Gas purity detection device
Technical Field
The utility model relates to the technical field of gas detection, in particular to a gas purity detection device.
Background
A gas sensor is a transducer that converts a certain gas volume fraction into a corresponding electrical signal. The device mainly comprises a semiconductor gas sensor, a solid electrolyte gas sensor, a contact combustion type gas sensor, an electrochemical gas sensor and an optical gas sensor.
The photoionization detector is a testing instrument which adopts ultraviolet light to ionize gas molecules and then detects the change of the gas concentration through weak current of a detection stroke. The method is characterized in that the gas to be detected is sucked into an ionization chamber and ionized by an ultraviolet lamp to form ions, the ions directionally move to form weak current under the action of the voltage of a polar plate, and the current and the concentration of the gas are in a linear relation under the condition that the external condition (the structure of the ionization chamber and the intensity of the ultraviolet lamp) is fixed.
For example, in chinese patent publication No. CN214408791U, a photoionization sensor for detecting a gas concentration is disclosed by providing a gas circulation area and an information processing area on a sensor main body; at least two ultraviolet light windows are arranged on the ultraviolet lamp module, the ultraviolet lamp module is arranged in the gas circulation area, and the ultraviolet light windows are used for emitting ultraviolet light after the ultraviolet lamp module generates an ultraviolet light source; installing at least two ion current receiving electrode pairs in the gas circulation area; at least two amplifying circuits are arranged in the information processing area, the resistance in each amplifying circuit is different, and the ion current receiving electrode pair is connected with the amplifying circuit; the output module is arranged in the information processing area and is connected with the amplifying circuit. The total reliable detection range of the photoelectric ionization sensor can be increased, and meanwhile, the detection accuracy can be ensured on the basis of the expansion range of the photoelectric ionization sensor.
However, the gas to be detected in such a detector needs to be in direct contact with the ion current receiving electrode, and in some detection environments of high-purity combustible gas, such a detection mode is not reliable and safety is not high enough.
Disclosure of Invention
The utility model provides a gas purity detection device, which isolates a gas to be detected from an electrode by quartz, and simultaneously forms static electrodes at two ends of the gas to be detected by utilizing the fire resistance and the conductivity characteristics of the quartz under a high electric field so as to ionize the gas to be detected, and detects the purity of the gas to be detected by utilizing the characteristic of light stripe information generated when the gas to be detected is ionized, thereby realizing the complete isolation of an electric detection part and the gas to be detected and ensuring higher safety.
The utility model is realized by the following technical scheme:
a gas purity detection device comprising:
the sealed shell is internally provided with a separation plate for dividing the sealed shell into a first sealed cavity and a second sealed cavity, and the separation plate is provided with a transmission channel for communicating the first sealed cavity with the second sealed cavity;
the quartz tube is positioned in the first closed cavity, and the contour shadow of the quartz tube is overlapped with the contour shadow of the transmission channel in the view angle of the extension direction of the transmission channel, and is used for accommodating gas to be detected;
the two pressurizing electrodes are respectively connected with the quartz tube and are arranged at intervals, and a power supply connecting wire of the pressurizing electrodes penetrates through the isolation plate and is positioned in the second closed cavity;
a transmissive plate within the second enclosed cavity, the transmissive plate covering the transmissive channel;
the light collector is positioned in the second closed cavity and is opposite to the transmission channel;
and the power supply is positioned in the second closed cavity and is connected with the power supply connecting wire of the pressurizing electrode to supply power.
In some embodiments, a focusing device arranged opposite to the transmission channel is arranged in the first closed cavity.
In some embodiments, the length of the reflecting surface of the focusing device is equal to or greater than the distance between the two pressurizing electrodes.
In some embodiments, the length of the reflecting surface of the focussing means is equal to the spacing between the two pressing electrodes.
In some embodiments, the pressurizing electrode is formed by coating a conductive layer on the outside of the quartz tube and sintering a quartz protective layer.
In some embodiments, the power connection wire is connected with the conductive layer and sleeved with a quartz protection tube, wherein the quartz protection tube is sintered with the quartz protection layer.
In some embodiments, a fastening bag formed by sintering is arranged between the transmission plate and the isolation plate, wherein the quartz protection tube and the isolation plate are sintered, and the power supply connecting wire passes through the fastening bag.
In some embodiments, the conductive layer is a metal powder layer or a metal paste.
In some embodiments, a light-conducting channel is disposed between the light collector and the transmissive plate, wherein a black coating is disposed on an inner wall of the light-conducting channel.
In some embodiments, two ends of the quartz tube are respectively provided with a quartz sealing clamping seat, and the quartz sealing clamping seats are used for connecting an air inlet tube or an air outlet tube.
Compared with the prior art, the utility model has the following advantages and beneficial effects:
according to the gas purity detection device provided by the utility model, after the pressurizing electrodes are loaded with high-voltage high-frequency current, a high-intensity electric field can be formed between the two pressurizing electrodes, at the moment, the resistivity of the quartz tube is reduced, the conductivity of the quartz tube is increased, namely, two electrostatic electrodes can be formed on the part of the quartz tube corresponding to the pressurizing electrodes, at the moment, the gas to be detected in the quartz tube between the two electrostatic electrodes can be ionized to generate light stripe information, the light stripe is carried by the transmission plate after passing through the transmission channel, then the light stripe is collected through the light collector, the light intensity information of the light stripe can be obtained at the same time, and the purity corresponding to the gas to be detected can be judged according to the light intensity; in the detection process, the pressurizing electrode is not in direct contact with the gas to be detected, the pressurizing electrode is completely isolated from the gas to be detected through the quartz tube, the quartz tube has the characteristics of good fire resistance and high temperature resistance, the detection safety environment is better, meanwhile, the weak current generated by the gas to be detected is not detected through the purity detection of the gas to be detected, the light stripe information generated by the gas to be detected is detected, the gas to be detected is not in contact with an external element in the whole detection process, the safety is greatly improved, and the gas to be detected is applicable to the high-purity flammable gas detection environment.
Drawings
In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present utility model, the drawings that are needed in the examples will be briefly described below, it being understood that the following drawings only illustrate some examples of the present utility model and therefore should not be considered as limiting the scope, and that other related drawings may be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a gas purity detecting apparatus according to an embodiment of the present utility model;
fig. 2 is a schematic diagram of a structure of a pressurizing electrode according to an embodiment of the utility model.
In the drawings, the reference numerals and corresponding part names:
the device comprises a first airtight cavity, a second airtight cavity, a 3-isolation plate, a 4-quartz tube, a 5-pressurizing electrode, a 51-quartz protective layer, a 52-conducting layer, a 53-quartz protective tube, a 54-power supply connecting wire, a 6-transmission plate, a 7-light collector, an 8-power supply, a 9-focusing device, a 10-fastening bag, an 11-light transmission channel, a 12-quartz sealing clamping seat and a 13-transmission channel.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present utility model, the present utility model will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present utility model and the descriptions thereof are for illustrating the present utility model only and are not to be construed as limiting the present utility model.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. However, it will be apparent to one of ordinary skill in the art that: no such specific details are necessary to practice the utility model. In other instances, well-known structures, circuits, materials, or methods have not been described in detail in order not to obscure the utility model.
Throughout the specification, references to "one embodiment," "an embodiment," "one example," or "an example" mean: a particular feature, structure, or characteristic described in connection with the embodiment or example is included within at least one embodiment of the utility model. Thus, the appearances of the phrases "in one embodiment," "in an example," or "in an example" in various places throughout this specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, or characteristics may be combined in any suitable combination and/or sub-combination in one or more embodiments or examples. Moreover, those of ordinary skill in the art will appreciate that the illustrations provided herein are for illustrative purposes and that the illustrations are not necessarily drawn to scale. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
In the description of the present utility model, the terms "front", "rear", "left", "right", "upper", "lower", "vertical", "horizontal", "high", "low", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of the present utility model.
As shown in fig. 1 to 2, an embodiment of the present utility model provides a gas purity detecting apparatus including a sealed housing, a quartz tube 4, a pressurizing electrode 5, a transmissive plate 6, a light collector 7, and a power supply 8; a separation plate 3 dividing the sealed shell into a first sealed cavity 1 and a second sealed cavity 2 is arranged in the sealed shell, and a transmission channel 13 is arranged on the separation plate 3 to communicate the first sealed cavity 1 with the second sealed cavity 2; the quartz tube 4 is positioned in the first closed cavity 1, and the contour shadow of the quartz tube 4 is overlapped with the contour shadow of the transmission channel 13 in the view angle of the extension direction of the transmission channel 13, and the quartz tube 4 is used for containing the gas to be measured; the two pressurizing electrodes 5 are respectively connected with the quartz tube 4 and are arranged at intervals, and a power supply connecting wire 54 of the pressurizing electrode 5 passes through the isolation plate 3 and is positioned in the second closed cavity 2; the transmission plate 6 is positioned in the second closed cavity 2, and the transmission channel 13 is covered by the transmission plate 6; the light collector 7 is positioned in the second closed cavity 2, and the light collector 7 is arranged opposite to the transmission channel 13; the power supply 8 is located in the second closed cavity 2, and the power supply 8 is connected with a power supply connecting wire 54 of the pressurizing electrode 5 to supply power.
When the quartz tube is in operation, the two pressurizing electrodes 5 can form an electric field with larger intensity under the supply of high frequency and high voltage, at the moment, the resistivity of the quartz tube 4 is reduced, electric conduction is formed between the pressurizing electrodes 5 and the quartz tube 4, the two pressurizing electrodes 5 can form breakdown voltage under the high frequency and high voltage conditions so that gas in the quartz tube 4 is ionized, the gas releases energy in the ionized state to form light fringes, the light fringes penetrate the quartz tube 4 and reach the transmission plate 6 after passing through the transmission channel 13, and the light fringe information on the transmission plate 6 is collected by the light collector 7 for subsequent processing.
In one possible implementation, the light collector 7 may be configured as a photosensor to detect the light intensity information of the light fringes, the greater the light intensity of the light fringes formed by ionization when the purity of the gas is higher, the smaller the light intensity of the light fringes when the impurities in the gas are excessive, so that the purity of the gas can be characterized by detecting the light intensity of the light fringes. Specifically, the test can be performed on the gas with various purities in advance, the light stripe intensity generated by the gas with various purities is recorded, then the corresponding relation between the light stripe intensity and the gas purity is found, and finally the gas purity can be obtained by directly detecting the light intensity of the on-site light stripe. Optionally, a display screen may be configured for the photosensor to display and record the light intensity data and the converted purity data for visual observation by a worker.
According to the gas purity detection device provided by the embodiment of the utility model, when the gas is ionized, the electric detection part is not in direct contact with the gas, but the electric part and the gas part to be detected are completely isolated by detecting the light fringes generated by the electric detection part, so that the safety coefficient is high, and the device is suitable for an environment of field detection.
In the embodiment of the utility model, the quartz tube 4 is used as a container for the gas to be measured, which has high transparency, and the resistivity of the quartz tube 4 can be changed by controlling the electric field under the condition of constant temperature. For example, when a high-intensity electric field is generated between the two pressurizing electrodes, the resistivity of the quartz tube 4 becomes small, and at this time, a high-frequency electric field can be formed in the quartz tube 4, and the gas can be ionized; when a low-intensity electric field or no electric field is generated between the two pressurizing electrodes, the resistivity of the quartz tube 4 becomes large, and at this time, a low-frequency electric field or even no electric field may be formed in the quartz tube 4, so that the gas is not affected. Therefore, when detection is required, the gas can be stopped, i.e., the gas stays in the quartz tube 4; when the detection is not needed, the quartz tube 4 can be used as a gas transmission channel, at the moment, even though the phenomenon of electric leakage/free charge possibly exists on the voltage-adding electrode, the gas inside the quartz tube 4 is not affected due to the high resistivity of the quartz tube 4, namely, the quartz tube 4 adopted by the embodiment of the utility model can not only play a role in the test process, but also can be used as a transmission channel when the test is not needed and an electric detection part is not needed to be removed, and the practicability and the convenience are high. Of course, the gas ionized in the quartz tube 4 can be separated through a subsequent flow dividing channel, that is, the ionized gas is separated from the gas which is normally transmitted, which can be realized through a common flow dividing valve, and the details are not repeated here.
In the embodiment of the utility model, the pressurizing electrode is connected with the power supply 8 by adopting the power supply connecting wire 54, the control precision of the voltage and the frequency of the pressurizing electrode is higher, the formed electric field is more stable, and the finally obtained purity measuring result is more accurate.
In particular, the sealing case may be an explosion-proof case, such as an alloy steel case, a stainless steel case, a cast aluminum alloy case, or the like, and in this embodiment may be preferably a stainless steel case to reduce the influence of rust on structural strength/explosion-proof effect, and of course, the partition plate 3 in the sealing case may be a stainless steel plate; the isolation plate 3 can divide the sealed shell into a second sealed cavity 2 with larger volume and a first sealed cavity 1 with smaller volume, wherein the first sealed cavity 1 can be used for setting an object to be tested, and the second sealed cavity 2 can be used for setting a detection element/detection component; the transmission channel 13 on the partition plate 3 may be provided in a circular shape. The two ends of the quartz tube 4 can be connected out of the first closed cavity 1 through the air tube, the air tube and the sealing shell are subjected to sealing treatment, and the axis of the quartz tube 4 can vertically intersect with the axis of the transmission channel 13 in the view angle of the length direction of the transmission channel 13.
In some embodiments, a focusing device 9 may be disposed in the first closed cavity 1 to focus the light fringes generated by the ionization of the gas so as to make the light fringe information on the transmission plate 6 more clear. In particular, the focussing means 9 may be fixedly mounted on the hermetic shell with the centre of the reflecting surface of the focussing means 9 being located on the axis of the transmission channel 13, i.e. the reflecting surface of the focussing means 9 is arranged facing the transmission channel 13.
In order to be able to sufficiently focus the light fringes produced by ionization of the gas between the pressure electrodes, in some embodiments the length of the reflecting surface of the focussing means 9 is equal to or greater than the distance between the two pressure electrodes 5. Specifically, the reflecting surface of the focusing device 9 is generally configured as an ellipse, and the length of the reflecting surface of the focusing device 9 is the length of the long axis of the reflecting surface, that is, the long axis of the reflecting surface of the focusing device 9 is arranged in parallel with the axis of the quartz tube 4; the distance between the two pressurizing electrodes 5 is the distance between two electrical connection points formed by the pressurizing electrodes 5 and the quartz tube 4. Of course, if the emitting surface of the focusing device 9 is too long, some unnecessary light may be focused to affect the measurement result, so the preferable arrangement is that the length of the reflecting surface of the focusing device 9 is equal to the distance between the two pressurizing electrodes 5.
In some embodiments, the pressurizing electrode 5 may include a conductive layer 52 and a quartz protective layer 51, wherein the conductive layer 52 may be provided as metal powder or metal slurry, the conductive layer 52 may be coated around the quartz tube 4, and then a layer of quartz is sintered outside the conductive layer 52 to form the quartz protective layer 51, so that the conductive layer 52 may be ensured to be in a sealed environment, and the conductive layer 52 is prevented from contacting with an external space. Of course, between the sintered quartz protective layers 51, the power supply connection lines 54 of the pressurizing electrode 5 may be led out from the conductive layer 52. A layer of quartz protection tube 53 can be sleeved outside the power supply connecting wire 54 of the pressurizing electrode 5, one end of the quartz protection tube 53 and the quartz protection layer 51 are connected in a sintering way, and the other end of the quartz protection tube 53 penetrates through the isolation plate 3 and is positioned in the second closed cavity 2 to be connected with the power supply 8 in the second closed cavity 2.
In some embodiments, the transmission plate 6 may be configured as a quartz plate, which has high transparency and is fire-resistant and high-temperature-resistant, and can ensure good safety on the premise of providing good transmission effect. Specifically, welding can be adopted between the quartz plate and the isolation plate 3, and a fastening bag 10 can be further connected between the side wall of the quartz plate and the isolation plate 3, wherein the fastening bag 10 is sintered with the quartz plate and the isolation plate 3 respectively, so that good tightness between the quartz plate and the isolation plate 3 can be ensured, the fireproof and explosion-proof effects are realized, and the use safety is ensured.
In some embodiments, a light conducting channel 11 may be provided between the light collector 7 and the transmissive plate 6. The light conduction channel 11 can be set to the fire prevention body, can set up black coating on the inner wall of light conduction channel 11 in order to avoid it to reflect to the light to make the light stripe information that light collector 7 received more accurate, thereby guarantee measuring result's accuracy.
In some embodiments, two ends of the quartz tube 4 may also be respectively provided with a quartz sealing clamping seat 12, and a connecting portion for connecting an air inlet pipe and an air outlet pipe is arranged on the quartz sealing clamping seat 12. Through the arrangement of the quartz sealing clamping seat 12, the connecting part of the air inlet pipe or the air outlet pipe and the quartz tube 4 has better sealing performance, fire resistance and high temperature resistance, thereby improving the use safety.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the utility model, and is not meant to limit the scope of the utility model, but to limit the utility model to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the utility model are intended to be included within the scope of the utility model.

Claims (10)

1. A gas purity detection apparatus, comprising:
the sealed shell is internally provided with a separation plate (3) for dividing the sealed shell into a first sealed cavity (1) and a second sealed cavity (2), and the separation plate (3) is provided with a transmission channel (13) for communicating the first sealed cavity (1) with the second sealed cavity (2);
the quartz tube (4) is positioned in the first closed cavity (1), the contour shade of the quartz tube (4) is overlapped with the contour shade of the transmission channel (13) in the view angle of the extension direction of the transmission channel (13), and the quartz tube (4) is used for containing gas to be detected;
the two pressurizing electrodes (5) are respectively connected with the quartz tube (4) and are arranged at intervals, and a power supply connecting wire (54) of the pressurizing electrodes (5) penetrates through the isolation plate (3) and is positioned in the second closed cavity (2);
a transmissive plate (6) located within the second closed chamber (2), the transmissive plate (6) covering the transmissive channel (13);
the light collector (7) is positioned in the second closed cavity (2), and the light collector (7) is arranged opposite to the transmission channel (13);
and a power supply (8) positioned in the second closed cavity (2), wherein the power supply (8) is connected with a power supply connecting wire (54) of the pressurizing electrode (5) to supply power.
2. A gas purity detection apparatus according to claim 1, wherein a focussing means (9) is provided in the first closed chamber (1) arranged directly opposite the transmission channel (13).
3. The gas purity detection apparatus according to claim 2, wherein a reflection surface length of the focussing means (9) is equal to or longer than a distance between the two pressurizing electrodes (5).
4. A gas purity detection apparatus according to claim 3, characterized in that the reflecting surface length of the focussing means (9) is equal to the spacing of the two pressure electrodes (5).
5. The gas purity detection device according to claim 1, wherein the pressurizing electrode (5) is formed by coating a conductive layer (52) on the outside of the quartz tube (4) and sintering a quartz protective layer (51).
6. The gas purity detection device according to claim 5, characterized in that the power connection line (54) is connected to the conductive layer (52) and is sleeved with a quartz protection tube (53), wherein the quartz protection tube (53) is sintered with the quartz protection layer (51).
7. The gas purity detection device according to claim 6, characterized in that a fastening pack (10) formed by sintering is provided between the transmission plate (6) and the separation plate (3), wherein the quartz protection tube (53) is sintered with the separation plate (3), and the power supply connection wire (54) passes through the fastening pack (10).
8. The gas purity detection apparatus according to claim 5, wherein the conductive layer (52) is a metal powder layer or a metal slurry.
9. The gas purity detection device according to claim 1, characterized in that a light conducting channel (11) is arranged between the light collector (7) and the transmissive plate (6), wherein a black coating is provided on the inner wall of the light conducting channel (11).
10. The gas purity detection device according to claim 1, wherein both ends of the quartz tube (4) are respectively provided with a quartz sealing clamping seat (12), and the quartz sealing clamping seat (12) is used for connecting an air inlet tube or an air outlet tube.
CN202310614983.7A 2023-05-29 2023-05-29 Gas purity detection device Pending CN116698958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310614983.7A CN116698958A (en) 2023-05-29 2023-05-29 Gas purity detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310614983.7A CN116698958A (en) 2023-05-29 2023-05-29 Gas purity detection device

Publications (1)

Publication Number Publication Date
CN116698958A true CN116698958A (en) 2023-09-05

Family

ID=87844386

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310614983.7A Pending CN116698958A (en) 2023-05-29 2023-05-29 Gas purity detection device

Country Status (1)

Country Link
CN (1) CN116698958A (en)

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