CN116698841A - 外观检查装置以及外观检查方法 - Google Patents

外观检查装置以及外观检查方法 Download PDF

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Publication number
CN116698841A
CN116698841A CN202310228447.3A CN202310228447A CN116698841A CN 116698841 A CN116698841 A CN 116698841A CN 202310228447 A CN202310228447 A CN 202310228447A CN 116698841 A CN116698841 A CN 116698841A
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CN
China
Prior art keywords
camera
workpiece
axis
inspection
turntable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310228447.3A
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English (en)
Chinese (zh)
Inventor
福泽英浩
加藤正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Juki Corp
Original Assignee
Juki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juki Corp filed Critical Juki Corp
Publication of CN116698841A publication Critical patent/CN116698841A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

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  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN202310228447.3A 2022-03-04 2023-03-03 外观检查装置以及外观检查方法 Pending CN116698841A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022033808A JP2023129047A (ja) 2022-03-04 2022-03-04 外観検査装置及び外観検査方法
JP2022-033808 2022-03-04

Publications (1)

Publication Number Publication Date
CN116698841A true CN116698841A (zh) 2023-09-05

Family

ID=87826512

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310228447.3A Pending CN116698841A (zh) 2022-03-04 2023-03-03 外观检查装置以及外观检查方法

Country Status (2)

Country Link
JP (1) JP2023129047A (ja)
CN (1) CN116698841A (ja)

Also Published As

Publication number Publication date
JP2023129047A (ja) 2023-09-14

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