CN116697271A - Control box for conveying silane gas - Google Patents
Control box for conveying silane gas Download PDFInfo
- Publication number
- CN116697271A CN116697271A CN202310698883.7A CN202310698883A CN116697271A CN 116697271 A CN116697271 A CN 116697271A CN 202310698883 A CN202310698883 A CN 202310698883A CN 116697271 A CN116697271 A CN 116697271A
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- control box
- extrusion
- locking
- gas delivery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 23
- 230000007246 mechanism Effects 0.000 claims abstract description 33
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 238000001125 extrusion Methods 0.000 claims description 50
- 230000000903 blocking effect Effects 0.000 claims description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 34
- 230000004888 barrier function Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/005—Protection or supervision of installations of gas pipelines, e.g. alarm
Abstract
The invention relates to the technical field of pneumatic control, in particular to a control box for conveying silane gas, which comprises a gas conveying pipe, wherein the upper end of the gas conveying pipe is fixedly connected with the control box, the middle of the control box is of a hollow structure, the upper end of the control box is provided with a pressure relief tank, two sides of the pressure relief tank are fixedly connected with connecting pipes, two connecting pipes are fixedly connected with the side ends of the control box, the left side of the lower end of the control box is provided with a pressure relief hole, the right side of the lower end of the control box is provided with an exhaust hole, the pressure relief hole and the exhaust hole are respectively communicated with the two connecting pipes, a first sealing rubber head is slidingly connected in the pressure relief hole, the upper end of the first sealing rubber head is fixedly connected with a driving control mechanism, the driving control mechanism consists of a control block, a guide inclined surface, an auxiliary plate and an auxiliary wheel, a second sealing rubber head is arranged in the middle of the exhaust hole, and a mounting cavity is arranged in the middle of the control box.
Description
Technical Field
The invention relates to the technical field of pneumatic control mechanisms, in particular to a control box for conveying silane gas.
Background
Silane can be thermally decomposed or chemically reacted with other gases to produce a series of silicon-containing substances such as single crystal silicon, polycrystalline silicon, silicon oxide, etc. from silane, and thus silane gas is widely used in practical production. Various chemical reactions can be performed using silanes to process into a variety of complex and fine silicon-containing materials.
The silane gas has certain toxicity, when the silane is conveyed in the pipeline, once the pressure in the pipeline is too high for a long time, the pipeline is damaged, and if the pressure is low, the subsequent processing is not facilitated, and the conventional pipeline lacks a necessary pressure regulating device when the silane gas is conveyed.
Disclosure of Invention
The invention aims to provide a control box for conveying silane gas, which solves the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a control box of silane gas delivery, includes the gas delivery pipe, the upper end fixedly connected with control box of gas delivery pipe, the centre of control box is hollow structure, the upper end of control box is equipped with the relief tank, the both sides of relief tank all fixedly connected with connecting pipe, two the connecting pipe all is fixedly connected with the side of control box, the lower extreme left side of control box is equipped with the relief hole, the lower extreme right side of control box case is equipped with the exhaust hole, relief hole and exhaust hole communicate with two connecting pipes respectively, the inside sliding connection in relief hole department has first sealing rubber head, be equipped with reset spring between first sealing rubber head and the relief hole, the upper end fixedly connected with of first sealing rubber head drives control mechanism, drive control mechanism comprises control block, guide slope, accessory plate and auxiliary wheel, the centre of exhaust hole is equipped with the second sealing rubber head, the centre of control box is equipped with the installation chamber, the centre fixedly connected with locking control mechanism, locking control mechanism comprises fixed part, deformation portion, extrusion portion, locking portion, helical gear connection have the fixed axle, the top of the fixed connection is equipped with the fixed axle, the top of helical gear, the fixed connection is equipped with the helical gear, the top of helical gear is connected with the fixed connection, the helical gear has the fixed axle, the top of helical gear is connected with the control rod, the middle of the pressure release tank is provided with a pressure sensor, the lower end of the pressure sensor is fixedly connected with a conducting rod, and the lower end of the conducting rod is positioned in the control box.
Preferably, the gag lever post fixed connection is on the inner wall in installation cavity, actuating post and gag lever post sliding connection, extrusion protruding fixed connection is in the centre of actuating post, the right side of actuating lever is equipped with the screw thread, adjust helical gear and actuating lever threaded connection, extrusion bellied lateral wall is the slope structure, extrusion bellied diameter reduces gradually from left to right.
Preferably, the inside cavity of extrusion arch, the bellied front end of extrusion is equipped with the junction cap, two electrode contacts of bellied side fixedly connected with of extrusion, the front end of drive post is equipped with the regulation post, the side fixedly connected with of regulation post retracts the pole, fixedly connected with first connecting spring between regulation post and the drive post, the both ends of drive post all articulate there is the barrier plate, the barrier plate is U style of calligraphy structure, the side fixedly connected with joint knot of barrier plate, the side fixedly connected with of regulation post two roof, the barrier plate side is the arc structure, the side of barrier plate supports and leans on roof department.
Preferably, the middle of adjusting the post rotates and is connected with the swivel ring, the inside wall fixedly connected with extension board of swivel ring, fixedly connected with second connecting spring between extension board and the adjusting post, the centre of swivel ring is equipped with spacing mouthful, peg graft in the centre of spacing mouthful has the fuse, fixedly connected with two electrode bars on the adjusting post, the both ends and the electrode bar fixed connection of fuse, two electrode bar and two electrode contact electric connection, the side fixedly connected with of swivel ring resets the arch.
Preferably, the fixing portion is fixedly connected to the inner wall of the mounting cavity, the deformation portion is fixedly connected to the upper end of the fixing portion, the locking portion is fixedly connected to the upper end of the deformation portion, the connecting portion is fixedly connected to the lower end of the locking portion, the deformation portion is an elastic iron sheet, the extrusion portion is fixedly connected to the top end of the deformation portion, the left side of the extrusion portion is of a horizontal structure, the right side of the extrusion portion is of a V-shaped structure, and the upper end of the extrusion portion abuts against the extrusion protrusion.
Preferably, the locking groove is located in the middle of the locking part, a locking plate is arranged in the middle of the control box, and the lower end of the locking plate is clamped in the locking groove.
Preferably, the locking plate is of a V-shaped structure, the corner of the locking plate is of an annular structure, a spring shaft is fixedly connected with the middle of the control box, the corner of the locking plate is fixedly connected with the spring shaft, and the upper end of the locking plate is provided with a bearing plate which is aligned with the driving column.
Preferably, the connecting part is of a V-shaped structure, the driving part is positioned in the middle of the connecting part, the driving part and the locking groove are integrally formed by stamping, and the top end of the driving part is fixedly connected with the sliding block.
Preferably, the control block is fixedly connected to the middle of the connecting column, the auxiliary plate is fixedly connected to the side end of the sliding block, and the auxiliary wheel is rotatably connected to the top end of the auxiliary plate.
Preferably, the auxiliary plate is of a V-shaped structure, the left side of the auxiliary plate is inclined, the guide inclined plane is positioned on the lower end face of the control block, and the auxiliary wheel is abutted against the guide inclined plane.
Compared with the prior art, the invention has the beneficial effects that:
1. when the pressure in the gas conveying pipe is too high, the air pressure can jack up the first sealing rubber head, so that the gas enters the pressure relief tank along the pressure relief hole, the pressure in the gas conveying pipe is reduced, the gas conveying pipe is prevented from being damaged in a long-time high-pressure state;
2. when the pressure in the gas conveying pipe is lower, the connecting column moves downwards, so that the sliding block and the second sealing rubber head are driven to move, the exhaust hole is opened, the gas in the pressure release tank is exhausted, the gas conveying pipe is pressurized, the gas can be automatically added into the gas conveying pipe, and the internal pressure balance of the gas conveying pipe is ensured;
3. the locking control mechanism can be controlled by rotating the control bevel gear to control the movement of the second sealing rubber head and forcibly control the opening or closing of the exhaust hole, so that the air pressure in the air conveying pipe is controlled;
4. when the locking control mechanism is locked and fixed, once the pressure inside the pressure relief tank is overlarge, the locking of the locking and fixing mechanism can be automatically released, so that the pressure inside the pressure relief tank is prevented from being overlarge.
Drawings
Fig. 1 is a schematic diagram of a control box connection structure.
Fig. 2 is a schematic diagram of the connection of the lock control mechanism.
Fig. 3 is a schematic view of a connection structure of the driving pressing mechanism.
FIG. 4 is a schematic illustration of the extrusion lobe internal connection.
Fig. 5 is a schematic diagram of a barrier plate connection structure.
Fig. 6 is a schematic diagram of a slider connection structure.
Fig. 7 is a schematic view of a locking plate connection structure.
Fig. 8 is a schematic diagram showing the connection of the lock control mechanism and the driving pressing mechanism.
In the figure: the device comprises a gas conveying pipe 1, a control box 2, a pressure release hole 3, an exhaust hole 4, a pressure release tank 5, a connecting pipe 6, a locking control mechanism 7, a fixing part 71, a deformation part 72, a squeezing part 73, a locking part 74, a locking groove 75, a connecting part 76, a driving part 77, an adjusting bevel gear 8, a control bevel gear 9, a driving squeezing mechanism 10, a driving column 101, a squeezing bulge 102, a limiting rod 103, a connecting column 11, a driving control mechanism 12, a control block 121, a guiding inclined plane 122, a auxiliary plate 123, an auxiliary wheel 124, a sliding block 13, a first sealing rubber head 14, a driving rod 15, a second sealing rubber head 16, a locking plate 17, a spring shaft 18, a regulating column 1011, a retraction rod 1012, a rotating ring 1013, a limiting opening 1014, a 1015 fuse, a blocking plate 1016, a 1017 blocking buckle 1018 blocking joint, a 1019 top plate 10110 resetting bulge, a connecting cover 1021, a 1022 electrode contact, and a 1023 electrode rod.
Detailed Description
In the following, in order to enhance understanding and appreciation of the invention, a technical solution in an embodiment of the invention will be clearly and completely described and introduced with reference to the accompanying drawings in which it is apparent that the described embodiment is only a part of an embodiment of the invention, not all embodiments, and not the embodiment is in any way limiting. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-8, the present invention provides a technical solution: the control box for conveying silane gas comprises a gas conveying pipe 1, wherein the upper end of the gas conveying pipe 1 is fixedly connected with a control box 2, the middle of the control box 2 is of a hollow structure, the upper end of the control box 2 is provided with a pressure relief tank 5, two sides of the pressure relief tank 5 are fixedly connected with connecting pipes 6, two connecting pipes 6 are fixedly connected with the side ends of the control box 2, the left side of the lower end of the control box 2 is provided with a pressure relief hole 3, the right side of the lower end of the control box 2 is provided with an exhaust hole 4, the pressure relief hole 3 and the exhaust hole 4 are respectively communicated with the two connecting pipes 6, the inside of the pressure relief hole 3 is slidingly connected with a first sealing rubber head 14, a reset spring is arranged between the first sealing rubber head 14 and the pressure relief hole 3, the upper end of the first sealing rubber head 14 is fixedly connected with a driving control mechanism 12, the driving control mechanism 12 consists of a control block 121, a guide inclined plane 122, an auxiliary plate 123 and an auxiliary wheel 124, the middle of the exhaust hole 4 is provided with a second sealing rubber head 16, the middle of the control box 2 is provided with an installation cavity, the middle of the control box 2 is fixedly connected with a locking control mechanism 7, the locking control mechanism 7 consists of a fixed part 71, a deformation part 72, an extrusion part 73, a locking part 74, a locking groove 75, a connecting part 76 and a driving part 77, the upper end of the locking control mechanism 7 is provided with a driving extrusion mechanism 10, the driving extrusion mechanism 10 consists of a driving column 101, an extrusion bulge 102 and a limiting rod 103, the middle of the control box 2 is rotationally connected with an adjusting bevel gear 8, the middle of the control box 2 is provided with a control bevel gear 9, the control bevel gear 9 is in meshed connection with the adjusting bevel gear 8, the middle of the control bevel gear 9 is provided with a fixed shaft, the fixed shaft penetrates through the control box 2, the middle of the control box 2 is in sliding connection with a sliding block 13, the top end of the sliding block 13 is fixedly connected with a driving rod 15, the top of actuating lever 15 and second seal rubber head 16 fixed connection, the centre of pressure release jar 5 is equipped with pressure sensor, pressure sensor's lower extreme fixedly connected with conducting rod 51, the lower extreme of conducting rod 51 is located control box 2, when the inside pressure of gas delivery pipe 1 is higher, the atmospheric pressure can jack up first seal rubber head 14, and compress reset spring, inside gas can enter into pressure release jar 5 along relief hole 3, thereby to the inside pressure of reducing gas delivery pipe 1, when gas delivery pipe 1 inside atmospheric pressure is lower, reset spring can promote first seal rubber head 14 and move downwards, drive slider 13 and second seal rubber head 16 through actuating control mechanism 12, thereby open the exhaust hole, the gas in the pressure release jar 5 enters into gas delivery pipe 1, to the pressure of increasing gas delivery pipe 1.
The utility model provides a gag lever post 103 fixed connection is on the inner wall of installation cavity, actuating post 101 and gag lever post 103 sliding connection, extrusion bellied 102 fixed connection is in the centre of actuating post 101, the right side of actuating lever 15 is equipped with the screw thread, adjust helical gear 8 and actuating lever 15 threaded connection, extrusion bellied 102's lateral wall is the slope structure, extrusion bellied 102's diameter reduces gradually from left to right, deformation portion 72 is the elasticity iron sheet, extrusion portion 73 fixed connection is on deformation portion 72's top, extrusion portion 73's left side is the horizontal structure, extrusion portion 73's right side is V style of calligraphy structure, extrusion portion 73 upper end is supported and is leaned on extrusion bellied 102 department, through rotatory control helical gear 9, control helical gear 9 drives through the meshing transmission and adjusts helical gear 8 and rotate, adjust helical gear 8 and drive actuating post 101 and extrusion bellied 102 and remove, when extrusion bellied 102 moves rightwards, control box 2 inside can be adjusted the atmospheric pressure automatically, when extrusion bellied 102 moves leftwards, extrusion bellied 102 can extrude extrusion portion 73, thereby make deformation portion 72 take place deformation, thereby vent 4, the gas discharge to the inside of pressure release jar 5.
The fixed part 71 is fixedly connected to the inner wall of the mounting cavity, the deformation part 72 is fixedly connected to the upper end of the fixed part 71, the locking part 74 is fixedly connected to the upper end of the deformation part 72, the connecting part 76 is fixedly connected to the lower end of the locking part 74, the locking groove 75 is located in the middle of the locking part 74, the locking plate 17 is arranged in the middle of the control box 2, the lower end of the locking plate 17 is clamped in the locking groove 75, the locking plate 17 is of a V-shaped structure, the corner of the locking plate 17 is of an annular structure, the middle of the control box 2 is fixedly connected with the spring shaft 18, the corner of the locking plate 17 is fixedly connected with the spring shaft 18, the upper end of the locking plate 17 is provided with a bearing plate, the bearing plate is right opposite to the driving column 101, after the extruding part 73 passes through the extruding protrusion 102, the driving column 101 extrudes the locking plate 17, the locking plate 17 rotates, the lower end of the locking plate 17 is clamped in the locking groove 75 of the locking part 74, thereby limiting and fixing the locking control mechanism 7, limiting and fixing the second sealing rubber head 16, and the vent 4 are not opened.
The connecting portion 76 is of a V-shaped structure, the driving portion 77 is located in the middle of the connecting portion 76, the driving portion 77 and the locking groove 75 are integrally formed through stamping, the top end of the driving portion 77 is fixedly connected with the sliding block 13, and when the deformation portion 72 deforms, the driving portion 77 can drive the sliding block 13 and the second sealing rubber head 16 to move, so that the exhaust hole 4 is opened.
The inside of the extrusion bulge is hollow, the front end of the extrusion bulge is provided with a connecting cover 1021, the side end of the extrusion bulge is fixedly connected with two electrode contacts 1022, the front end of the driving column is provided with an adjusting column 1011, the side end of the adjusting column 1011 is fixedly connected with a retracting rod 1012, a first connecting spring is fixedly connected between the adjusting column 1011 and the driving column, both ends of the driving column are hinged with a blocking plate 1016, the blocking plate 1016 is of a U-shaped structure, the side end of the blocking plate 1016 is fixedly connected with a clamping buckle 1017, the side end of the adjusting column 1011 is fixedly connected with two top plates 1019, the side end of the blocking plate 1016 is of an arc-shaped structure, the side end of the blocking plate 1016 abuts against the top plates 1019, the middle of the adjusting column 1011 is rotatably connected with a rotating ring 1013, the inner side wall of the rotating ring 1013 is fixedly connected with an extending plate, a second connecting spring is fixedly connected between the extending plate and the adjusting column 1011, the middle of the rotating ring 1013 is provided with a limit opening 1014, the middle of the limit opening 1014 is fixedly connected with a fuse wire, the two electrode rods 1015 are fixedly connected with the electrode rods 1023, both ends of the fuse wire are fixedly connected with the electrode rods 1023, the two electrode rods 1022 are fixedly connected with the two electrode rods 1022, the side ends of the electrode rods 1022 are fixedly connected with the reset electrode contacts 1022, the side contact points 10 are fixedly connected with the rotating ring 10, when the pair of locking fixing mechanisms by the locking plate is locked and fixed, the conductive rod 51 and the electrode contact 1022 are abutted against each other, when the fuse 1015 is energized and the pressure inside the pressure relief tank 5 is too high, the current through the fuse 1015 is high, thereby blowing the fuse 1015, causing the rotating ring 1016 to rotate, removing the catch 1018 from the catch 1017, moving the adjustment post 1011 back, therefore, the adjusting column 1011 is moved away from the locking plate 17, the pressure in the pressure tank 5 can be automatically discharged, and the pressure in the pressure tank 5 is prevented from being too high.
The control block 121 is fixedly connected to the middle of the connecting column 11, the auxiliary plate 123 is fixedly connected to the side end of the sliding block 13, the auxiliary wheel 124 is rotatably connected to the top end of the auxiliary plate 123, the auxiliary plate 123 is of a V-shaped structure, the left side of the auxiliary plate 123 is inclined, the guide inclined plane 122 is positioned on the lower end face of the control block 121, the auxiliary wheel 124 abuts against the guide inclined plane 122, when the internal pressure of the gas conveying pipe is low, under the action of the reset spring, the control block 121 moves downwards, the auxiliary wheel 124 can be extruded through the guide of the guide inclined plane 122, so that the sliding block 13 and the second sealing rubber head 16 are driven to move, the exhaust hole 4 is opened, and the internal pressure of the gas conveying pipe 1 can be automatically regulated.
While embodiments of the invention have been shown and described, it is emphasized that: the above description is merely illustrative of the manner of using embodiments of the invention and is not intended to limit the invention in any way. It will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations may be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides a control box of silane gas delivery, includes gas delivery pipe (1), its characterized in that: the upper end fixedly connected with control box (2) of gas delivery pipe (1), the centre of control box (2) is hollow structure, the upper end of control box (2) is equipped with pressure release jar (5), the both sides of pressure release jar (5) all fixedly connected with connecting pipe (6), two connecting pipe (6) all with the lateral end fixed connection of control box (2), the lower extreme left side of control box (2) is equipped with pressure release hole (3), the lower extreme right side of control box (2) case is equipped with exhaust hole (4), pressure release hole (3) and exhaust hole (4) communicate with two connecting pipe (6) respectively, pressure release hole (3) department inside sliding connection has first sealed rubber head (14), be equipped with reset spring between first sealed rubber head (14) and the pressure release hole (3), the upper end fixedly connected with drive control mechanism (12) of first sealed rubber head (14), drive control mechanism (12) are by control block (121), guide slope (122), accessory wheel (124) and auxiliary wheel (124), intermediate seal (2) of control box (2) are equipped with intermediate seal (16) and are equipped with fixed control chamber (2), the locking control mechanism (7) consists of a fixing part (71), a deformation part (72), an extrusion part (73), a locking part (74), a locking groove (75), a connecting part (76) and a driving part (77), wherein the upper end of the locking control mechanism (7) is provided with a driving extrusion mechanism (10), the driving extrusion mechanism (10) consists of a driving column (101), an extrusion bulge (102) and a limiting rod (103), the middle of the control box (2) is rotationally connected with an adjusting bevel gear (8), the middle of the control box (2) is provided with a control bevel gear (9), control helical gear (9) and regulation helical gear (8) meshing are connected, the centre of control helical gear (9) is equipped with the fixed axle, and the fixed axle runs through control box (2), the centre sliding connection of control box (2) has slider (13), the top fixedly connected with actuating lever (15) of slider (13), the top and the first (16) fixed connection of second sealing rubber of actuating lever (15), the centre of pressure release jar (5) is equipped with pressure sensor, pressure sensor's lower extreme fixedly connected with conducting rod (51), the lower extreme of conducting rod (51) is located control box (2).
2. A silane gas delivery control box as claimed in claim 1, wherein: the utility model discloses a drive post, including installation cavity, extrusion protruding (102), gag lever post (103), actuating lever post (101) and gag lever post (103) sliding connection, extrusion protruding (102) fixed connection is in the centre of actuating lever post (101), the right side of actuating lever (15) is equipped with the screw thread, adjust helical gear (8) and actuating lever (15) threaded connection, the lateral wall of extrusion protruding (102) is the slope structure, the diameter reduces gradually from left to right of extrusion protruding (102).
3. A silane gas delivery control box as claimed in claim 1, wherein: the extrusion device is characterized in that the extrusion protrusion is hollow, a connecting cover (1021) is arranged at the front end of the extrusion protrusion, two electrode contacts (1022) are fixedly connected to the side end of the extrusion protrusion, an adjusting column (1011) is arranged at the front end of the driving column, a retracting rod (1012) is fixedly connected to the side end of the adjusting column (1011), a first connecting spring is fixedly connected between the adjusting column (1011) and the driving column, blocking plates (1016) are hinged to the two ends of the driving column, the blocking plates (1016) are of U-shaped structures, clamping buckles (1017) are fixedly connected to the side ends of the blocking plates (1016), two top plates (1019) are fixedly connected to the side ends of the adjusting column (1011), and the side ends of the blocking plates (1016) are of arc structures and are abutted to the top plates (1019).
4. A silane gas delivery control box according to claim 3, wherein: the middle of adjusting post (1011) rotates and is connected with swivel ring (1013), the inside wall fixedly connected with extension board of swivel ring (1013), fixedly connected with second connecting spring between extension board and the adjusting post (1011), the centre of swivel ring (1013) is equipped with spacing mouth (1014), peg graft in the centre of spacing mouth (1014) has fuse (1015), fixedly connected with two electrode rod (1023) on adjusting post (1011), both ends and electrode rod (1023) fixed connection of fuse (1015), two electrode rod (1023) and two electrode contact (1022) electric connection, the side fixedly connected with protrusion (10110) that resets of swivel ring (1013).
5. A silane gas delivery control box as claimed in claim 1, wherein: the fixing part (71) is fixedly connected to the inner wall of the mounting cavity, the deformation part (72) is fixedly connected to the upper end of the fixing part (71), the locking part (74) is fixedly connected to the upper end of the deformation part (72), the connecting part (76) is fixedly connected to the lower end of the locking part (74), the deformation part (72) is an elastic iron sheet, the extrusion part (73) is fixedly connected to the top end of the deformation part (72), the left side of the extrusion part (73) is of a horizontal structure, the right side of the extrusion part (73) is of a V-shaped structure, and the upper end of the extrusion part (73) abuts against the extrusion protrusion (102).
6. A silane gas delivery control box as claimed in claim 1, wherein: the locking groove (75) is located in the middle of the locking portion (74), a locking plate (17) is arranged in the middle of the control box (2), and the lower end of the locking plate (17) is clamped in the locking groove (75).
7. A silane gas delivery control box as defined in claim 6, wherein: the locking plate (17) is of a V-shaped structure, the corner of the locking plate (17) is of an annular structure, a spring shaft (18) is fixedly connected with the middle of the control box (2), the corner of the locking plate (17) is fixedly connected with the spring shaft (18), and the upper end of the locking plate (17) is provided with a bearing plate which is opposite to the driving column (101).
8. A silane gas delivery control box as claimed in claim 1, wherein: the connecting part (76) is of a V-shaped structure, the driving part (77) is located in the middle of the connecting part (76), the driving part (77) and the locking groove (75) are integrally formed through stamping, and the top end of the driving part (77) is fixedly connected with the sliding block (13).
9. A silane gas delivery control box as claimed in claim 1, wherein: the control block (121) is fixedly connected to the middle of the connecting column (11), the auxiliary plate (123) is fixedly connected to the side end of the sliding block (13), and the auxiliary wheel (124) is rotatably connected to the top end of the auxiliary plate (123).
10. A silane gas delivery control box as claimed in claim 1, wherein: the auxiliary plate (123) is of a V-shaped structure, the left side of the auxiliary plate (123) is inclined, the guide inclined plane (122) is located on the lower end face of the control block (121), and the auxiliary wheel (124) abuts against the guide inclined plane (122).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310698883.7A CN116697271A (en) | 2023-06-13 | 2023-06-13 | Control box for conveying silane gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310698883.7A CN116697271A (en) | 2023-06-13 | 2023-06-13 | Control box for conveying silane gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116697271A true CN116697271A (en) | 2023-09-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310698883.7A Pending CN116697271A (en) | 2023-06-13 | 2023-06-13 | Control box for conveying silane gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116697271A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117225299A (en) * | 2023-11-10 | 2023-12-15 | 江苏博颂能源科技有限公司 | Raw material inlet pipe fitting of propane dehydrogenation device reactor |
Citations (8)
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| CN218064443U (en) * | 2022-10-13 | 2022-12-16 | 唐山市天然气有限公司 | Natural gas relief valve detects open state device |
| CN218095470U (en) * | 2022-06-24 | 2022-12-20 | 真兰管业科技有限公司 | Explosion-proof safety mechanism of gas pipe |
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| CN112185768A (en) * | 2020-10-30 | 2021-01-05 | 郝明旭 | Raw material fusing processing device for fuse processing |
| CN112344219A (en) * | 2020-11-05 | 2021-02-09 | 福建省南安市霞美电子设备厂 | Gas pipeline pressure release alarm device |
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| CN218095470U (en) * | 2022-06-24 | 2022-12-20 | 真兰管业科技有限公司 | Explosion-proof safety mechanism of gas pipe |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117225299A (en) * | 2023-11-10 | 2023-12-15 | 江苏博颂能源科技有限公司 | Raw material inlet pipe fitting of propane dehydrogenation device reactor |
| CN117225299B (en) * | 2023-11-10 | 2024-02-09 | 江苏博颂能源科技有限公司 | Raw material inlet pipe fitting of propane dehydrogenation device reactor |
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