CN116679362A - Phase compensation large-field angle superlens and design method thereof - Google Patents
Phase compensation large-field angle superlens and design method thereof Download PDFInfo
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- CN116679362A CN116679362A CN202310470229.0A CN202310470229A CN116679362A CN 116679362 A CN116679362 A CN 116679362A CN 202310470229 A CN202310470229 A CN 202310470229A CN 116679362 A CN116679362 A CN 116679362A
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- 238000000034 method Methods 0.000 title claims abstract description 8
- 238000003384 imaging method Methods 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 10
- 238000002834 transmittance Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 239000002086 nanomaterial Substances 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 4
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 4
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 4
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 4
- 230000033228 biological regulation Effects 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 claims description 2
- 229910002601 GaN Inorganic materials 0.000 claims description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000005083 Zinc sulfide Substances 0.000 claims description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims description 2
- 229910001632 barium fluoride Inorganic materials 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 239000004408 titanium dioxide Substances 0.000 claims description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000005315 distribution function Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000002061 nanopillar Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
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- Optics & Photonics (AREA)
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Abstract
The invention belongs to the technical field of optics, in particular to a phase compensation large-field-angle superlens and a design method thereof, which are suitable for a focal plane array imaging system. The invention provides a specific large-angle conical light field in a super-lens needle focusing plane array imaging system, which adopts a phase compensation design principle, and compensates the phase of an incident conical light field by introducing a concave super-lens phase, so that the incident light field is equivalent to parallel light incidence, and then the light field is focused in a focal plane array photosensitive pixel through an equivalent convex super-lens; therefore, the problem of small incident light collection angle of the micro lens is solved, the detection efficiency of the focal plane array imaging system is improved, and an effective solution is provided for the difficult problem of the field angle faced by the existing micro lens array.
Description
Technical Field
The invention belongs to the technical field of optics, in particular to a phase compensation large-field-angle superlens and a design method thereof, which are suitable for a focal plane array imaging system.
Background
The infrared focal plane array detector has the advantages of high resolution, strong electromagnetic interference resistance and all-weather operation, and can be applied to remote sensing and remote measuring, automatic driving, virtual reality and other scenes. As focal plane arrays are developed toward high efficiency, high integration, high speed, intelligence, miniaturization, etc., the photosensitive pixel area of the focal plane arrays is becoming smaller. In order to ensure the collection efficiency of the focal plane array on the incident light, a micro lens array needs to be integrated on the focal plane array, so that the incident light can be effectively focused in the photosensitive pixel area. However, the conventional microlens array mainly uses a refractive semicircular lens, and has a problem of small collection angle for incident light. When the angle of incident light is larger, the focal point of the micro lens deviates from the photosensitive pixel area, and the detection efficiency of the focal plane array is severely limited.
In recent years, with development of the super-surface technology, the super-lens has higher design freedom, can be designed into the super-lens with large field angle and high focusing efficiency according to specific incident light fields, and has the characteristics of small size and easy integration; superlenses based on two-dimensional sub-wavelength structures have been widely studied, such as broadband achromatic superlenses, large field angle superlenses, and the like. The existing large-field angle superlens adopts a diaphragm to limit the angle area of incident light, but the utilization rate of the incident light is still low, the focusing efficiency and resolution are not high, and the detection efficiency is low.
Disclosure of Invention
Aiming at the problems or the defects, the invention provides a large-field-angle superlens and a design method thereof, which are applicable to a focal plane array imaging system, in order to solve the problem that the focal plane array detection efficiency is low due to the small incident light collection angle of the traditional microlens array.
The technical scheme adopted for solving the technical problems is as follows:
a phase compensating superlens with large field angle is composed of transparent substrate and sub-wavelength micro-nano structure.
The transparent substrate is used for transmitting incident light and supporting the sub-wavelength micro-nano structure arranged on one side of the transparent substrate.
The sub-wavelength micro-nano structure is an M multiplied by M square matrix formed by n nano medium columns, and n is 2, 4, 8 or 16; for an m×m square matrix of nanomedia posts, the side length of the matrix is D, and the side length of each matrix element (square base of nanomedia posts) is P, p×m=d.
The nanometer medium columns are cylinders with the height H and the radius R, n nanometer medium columns are obtained by changing the radius R of the nanometer medium columns, the regulation and control of transmission phases are realized, the transmission phases of the n nanometer medium columns are enabled to cover 0-2 pi after the M multiplied by M square matrix arrangement, the insensitivity to the size response of an incident angle and the insensitivity to the polarization response of incident light are simultaneously met, the method is used for carrying out phase regulation and control on incident large-angle conical light beams, the phase compensation superlens phase distribution is met, and focus offset-free focusing is realized.
According to the generalized Snell's lawWherein the angle of refraction theta r With incident angle theta i Can be by->After determining and substituting into a solution differential equation, the phase compensation superlens phase distribution formula of each nano medium column can be obtained:
the super lens surface is taken as an xOy plane, the central point of the super lens surface is taken as the origin of coordinates, x and y are taken as the coordinate positions,for the transmission phase to be satisfied by the nano-column at different positions, lambda is the wavelength of incident light, the first term of the formula is the phase distribution of the equivalent convex superlens, f is the focal length of the equivalent convex superlens, the second term of the formula is the phase distribution of the equivalent concave superlens, f 1 Is the negative focal length of the equivalent concave superlens, and r is the distance from the center of the nano medium column to the origin of coordinates +.>
When the angle of incidence light cone is theta and the side length of single super lens is D, the focal length f of equivalent concave super lens 1 Has the following componentsThe incident light cone angle theta is calculated from the clear aperture and focal length of the imaging lens. The equivalent concave superlens can compensate the extra phase change brought by the incident light field, thereby obtaining equivalent parallel light incidence. The focal length of the equivalent convex superlens is equal to the distance (actual working distance) from the superlens to the photosensitive element, so as to focus equivalent parallel light onto the photosensitive element area.
Further, the material of the nano dielectric column is silicon nitride, titanium dioxide, amorphous silicon, silicon or gallium nitride.
Further, the transparent substrate is a visible light, near infrared or middle-far infrared transparent substrate, and the transmittance in the infrared band is more than 95% of a material, such as silicon dioxide, aluminum oxide, magnesium fluoride, barium fluoride, calcium fluoride, zinc sulfide or zinc selenide.
Furthermore, an antireflection film is arranged on one side of the transparent substrate without the micro-nano structure so as to reduce reflection, and the coating material is magnesium fluoride or calcium fluoride material.
Furthermore, the phase-compensated superlens with a large field angle is arranged into an array, and is used as a superlens array of a focal plane array imaging system, so that incident light is better focused in a photosensitive pixel area, and the detection efficiency of the focal plane array is improved.
The design method of the phase compensation large-field angle superlens comprises the following steps:
and step 1, calculating to obtain the angle theta of the incident light according to the clear aperture and the focal length of the imaging lens in the focal plane array imaging system.
Step 2: and (2) according to the incident light cone angle theta calculated in the step (1), combining the single super lens side length D to be designed, and according to the formula:and calculating to obtain the negative focal length of the required equivalent concave superlens.
And 3, determining the focal length of the required equivalent convex type superlens according to the distance between the superlens and the photosensitive pixels in the focal plane array imaging system.
And 4, calculating the transmittance and the transmission phase of the nano-medium columns with different sizes by using electromagnetic simulation software, wherein the transmittance is more than 90% when the size of the nano-medium column is selected, and the transmission phase of the nano-medium columns with different sizes covers 0-2 pi.
And step 5, obtaining the phase distribution of the target superlens and the nano medium column arrangement by a phase compensation superlens phase distribution formula according to the focal length determined in the steps 2 and 3.
In summary, the specific large-angle conical light field in the super-lens needle focusing planar array imaging system provided by the invention adopts the phase compensation design principle, and the phase of the incident conical light field is compensated by introducing a concave super-lens phase, so that the incident light field is equivalent to parallel light incidence, and then the light field is focused in the photosensitive pixels of the focal plane array through the equivalent convex super-lens; therefore, the problem of small incident light collection angle of the micro lens is solved, the detection efficiency of the focal plane array imaging system is improved, and an effective solution is provided for the difficult problem of the field angle faced by the existing micro lens array.
Drawings
FIG. 1 is a schematic diagram of a focal plane array imaging system.
Fig. 2 (a) is a unit cell structure diagram of an embodiment design, and (b) is a schematic diagram of the overall structure of the superlens.
FIG. 3 is a graph showing the transmittance and transmittance phase change with the radius of the nano-pillar at 1064nm wavelength for the nano-dielectric pillar according to the embodiment.
FIG. 4 is a fitted plot of radial phase distribution function of an example superlens at a wavelength of 1064 nm.
Fig. 5 is a block diagram and a focusing diagram of an embodiment superlens.
Fig. 6 is a graph of theoretical focusing performance analysis for an implementation of a superlens array.
Detailed Description
The invention will now be described in further detail with reference to the drawings and to specific examples.
The embodiment provides a phase-compensated large field angle superlens array applied to a focal plane array imaging system.
As shown in fig. 1, in the focal plane array imaging system, parallel incident light is formed into a cone beam when entering the surface of the superlens array through the imaging lens, and each cone beam needs to be effectively focused in the photosensitive pixels of the focal plane array by the superlens array.
FIG. 2 (a) is a block diagram of a unit cell of the present embodiment, (b) is a schematic diagram of the overall structure of a single superlens; in the figure, H is the height of the nano medium columns, R is the radius of the nano medium columns, and P is the structural period, namely, each nano medium column corresponds to the side length of a square structural period base on the transparent substrate.
The size of the single large-field superlens in this embodiment is: d=100 μm, h=800 nm, p=500 nm, radius R between 80nm and 146nm, and transmittance phases of different radius size nanopillars are shown in fig. 3.
In this embodiment, 8 basic units are selected to satisfy 0-2pi phase change, and the transmittance is greater than 92%. According to the convex superlens focal length f=100 μm, the concave superlens focal length f 1 Target superlens phase distribution is obtained = 208.26 μm. According to the target phase distribution, selecting the size of the nano-column corresponding to the phase distribution for arrangement, and obtaining the final large-field-angle superlens.
Fig. 4 is a fitted plot of the radial phase distribution function of the superlens at a wavelength of 1064nm, it being seen that 8 structural units meet the desired phase distribution without selecting 16 different structural units. Fig. 5 (a) shows a structure diagram of the large angle of view superlens array under a microscope according to the present embodiment, (b) shows a structure diagram of a single superlens under a microscope, (c) shows a focusing condition of the superlens array under a 1064nm wavelength parallel light incidence, and (d) shows a focusing condition of the superlens array under a 1064nm wavelength large angle light incidence, and a high focusing capability can be maintained under a large angle light.
As shown in fig. 6, for the theoretical focusing performance analysis of the present embodiment of the superlens array, the surface of the superlens is taken as the xOy plane, the center of the superlens is taken as the origin of coordinates, and the normal direction of the superlens is taken as the z direction, wherein the angle of the incident light cone is ±20°, (a), (b), and (c) are the x-y plane focusing light intensity distribution, the x-z plane focusing light intensity distribution, and the one-dimensional point spread function in the x-axis direction of the device at the wavelength of 1064nm, respectively, and (d) is the one-dimensional distribution profile of the light intensity at the dashed line of the graph (b), the calculation results can be seen: the focusing efficiency of the device can reach 84.54%, the focal spot diameter is 8 μm, and the focal length is 100 μm.
According to the embodiment, the specific large-angle conical light field in the super-lens needle focusing plane array imaging system provided by the invention adopts a phase compensation design principle, and the phase of an incident conical light field is compensated by introducing a concave super-lens phase, so that the incident light field is equivalent to parallel light incidence, and then the light field is focused in a focal plane array photosensitive pixel through an equivalent convex super-lens; therefore, the problem of small incident light collection angle of the micro lens is solved, the detection efficiency of the focal plane array imaging system is improved, and an effective solution is provided for the difficult problem of the field angle faced by the existing micro lens array.
Claims (9)
1. A phase-compensated large field angle superlens, characterized by: consists of a transparent substrate and a sub-wavelength micro-nano structure;
the transparent substrate is used for transmitting incident light and supporting the sub-wavelength micro-nano structure arranged on one side of the transparent substrate;
the sub-wavelength micro-nano structure is an M multiplied by M square matrix formed by n nano medium columns, and n is 2, 4, 8 or 16; for an m×m square matrix formed by nano-media pillars, the side length of the matrix is D, and the side length of each matrix unit is P, p×m=d;
the nanometer medium columns are cylinders with the height H and the radius R, n nanometer medium columns are obtained by changing the radius R of the nanometer medium columns, and the transmission phases of the n nanometer medium columns are covered by 0-2 pi after M multiplied by M square matrix arrangement, so that the sensitivity to the magnitude response of an incident angle and the polarization response of incident light are simultaneously satisfied, the nanometer medium columns are insensitive to the polarization response of the incident light, are used for carrying out phase regulation and control on the incident large-angle conical light beam, satisfy phase compensation superlens phase distribution, and realize focus non-offset focusing;
phase compensation superlens phase distribution formula of each nano medium column:
the super lens surface is taken as an xOy plane, the central point of the super lens surface is taken as the origin of coordinates, x and y are taken as the coordinate positions,for the transmission phase to be satisfied by the nano-column at different positions, lambda is the wavelength of incident light, the first term of the formula is the phase distribution of the equivalent convex superlens, f is the focal length of the equivalent convex superlens, the second term of the formula is the phase distribution of the equivalent concave superlens, f 1 Is the negative focal length of the equivalent concave superlens;
focal length f of equivalent concave superlens 1 Has the following componentsCalculating to obtain an incident light cone angle theta according to the clear aperture and focal length of the imaging lens, and calculating to obtain the angle theta by combining the side length D of a single super lens to be designed so as to compensate the phase of an incident light field and obtain equivalent parallel light incidence; the focal length of the equivalent convex superlens is equal to the distance from the superlens to the photosensitive pixel.
2. The phase-compensated large field angle superlens of claim 1, wherein: the material of the nano medium column is silicon nitride, titanium dioxide, amorphous silicon, silicon or gallium nitride.
3. The phase-compensated large field angle superlens of claim 1, wherein: the transparent substrate is a visible light, near infrared and middle-far infrared transparent substrate, and the transmittance in an infrared band is more than 95%.
4. The phase-compensated large field angle superlens of claim 3, wherein: the transparent substrate is made of silicon dioxide, aluminum oxide, magnesium fluoride, barium fluoride, calcium fluoride, zinc sulfide or zinc selenide.
5. The phase-compensated large field angle superlens of claim 1, wherein: and an antireflection film is arranged on one side of the transparent substrate without the microstructure.
6. The phase-compensated large field angle superlens of claim 5, and wherein: the material of the anti-reflection film is magnesium fluoride or calcium fluoride material.
7. The phase-compensated large field angle superlens of claim 1, wherein: the phase-compensated large-field angle superlenses are arranged in a display mode to serve as a superlens array of the focal plane array imaging system, and incident light is focused in a photosensitive pixel area.
8. The phase-compensated large field angle superlens of claim 1, wherein: the superlens size is D=20-1 mm, M=8-512, P=300-5 μm, H=500-1.5 μm, R=50-5 μm, and lambda=500-14 μm.
9. The method for designing a phase-compensated large field angle superlens according to claim 1, comprising the steps of:
step 1, calculating to obtain the angle theta of an incident light cone according to the clear aperture and focal length of an imaging lens in a focal plane array imaging system;
step 2, combining the required angle of incidence angle theta calculated in the step 1The designed single superlens side length D is according to the formulaCalculating to obtain the negative focal length of the required equivalent concave superlens;
and 3, determining the focal length of the required equivalent convex type superlens according to the distance between the superlens and the photosensitive pixels in the focal plane array imaging system.
Step 4, calculating the transmittance and the transmission phase of the nano-medium columns with different sizes by using electromagnetic simulation software, wherein the transmittance is more than 90% when the size of the nano-medium column is selected, and the transmission phase of the nano-medium columns with different sizes covers 0-2 pi;
step 5, obtaining the phase distribution of the target superlens and the nano medium column arrangement according to the focal length determined in the steps 2 and 3 by a phase compensation superlens phase distribution formula;
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| CN118099243A (en) * | 2024-04-25 | 2024-05-28 | 南京大学 | Packaging structure for deep ultraviolet wide-angle detection |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN118099243A (en) * | 2024-04-25 | 2024-05-28 | 南京大学 | Packaging structure for deep ultraviolet wide-angle detection |
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