CN116678301A - Single-field scanning device for magnetic grid displacement sensor - Google Patents
Single-field scanning device for magnetic grid displacement sensor Download PDFInfo
- Publication number
- CN116678301A CN116678301A CN202310615409.3A CN202310615409A CN116678301A CN 116678301 A CN116678301 A CN 116678301A CN 202310615409 A CN202310615409 A CN 202310615409A CN 116678301 A CN116678301 A CN 116678301A
- Authority
- CN
- China
- Prior art keywords
- displacement sensor
- hall
- microscale
- signal
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 80
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 238000002493 microarray Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 238000012795 verification Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 7
- 239000004576 sand Substances 0.000 description 7
- 230000006698 induction Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/30—Assessment of water resources
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A single-field scanning device for a magnetic grating displacement sensor consists of M groups of scanning detection units, wherein each group of scanning detection units consists of N microscale Hall elements. N microscale Hall elements (number A 1 ，A 2 ，...，A N ) The micro-scale Hall element signal lines with the same numbers are connected together and distributed in the grid distance lambda of one magnetic grid displacement sensor at equal intervals. When scanning, the Hall elements for sensing the magnetic field change of the magnetic grating displacement sensor are mixed in space, and finally the output sensing signals are jointly generated by a plurality of microscale Hall elements with different spatial positions and same phase relation.
Description
Technical Field
The invention relates to the technical field of precise displacement measurement, in particular to a single-field scanning Hall sensing microarray for a magnetic grid displacement sensor.
Background
A wide-range precision grating sensor typified by a grating scale, a magnetic grating displacement sensor, and the like is one of key sensor components for determining the accuracy of manufacturing equipment. The measuring accuracy of the grating ruler can reach submicron level, and the grating ruler is widely applied to the fields of numerical control machine tools, electronic manufacturing equipment, semiconductor equipment and the like. But the grating ruler is based on the photoelectric scanning principle to measure and is sensitive to local pollution, dust, vibration and the like of the grating ruler, so that the grating ruler is not suitable for severe working conditions.
A magnetic grating ruler, also called a magnetic grating displacement sensor; the magnetic grating displacement sensor is based on the magneto-electric scanning principle, senses magnetic field change through a magnetic induction coil measuring head or a Hall element to measure displacement, has the characteristics of relatively better shock resistance, corrosion resistance, pollution resistance and the like compared with a grating ruler, and is widely applied to occasions with low precision requirements and severe service environments, such as industries of metallurgy, machinery, petrochemical industry and the like.
The quality of sensing signals of the magnetic grid displacement sensor is one of key problems for restricting the improvement of the precision of the magnetic grid displacement sensor. The conventional magnetic grating displacement sensor adopts a reading mode of conventional four-field scanning, as shown in fig. 1, senses magnetic field change through four induction elements (magnetic induction coil measuring heads or Hall elements) which are independent in space, and outputs four paths of sine and cosine sensing signals S 1 ～S 4 . With the sensing element 1 as a reference, the sensing elementThe spacing between the elements 2, 3, 4 and the sensing element 1 is (L+1/4) Λ, (L+2/4) Λ, (L+3/4) Λ, respectively, wherein L is an integer and L is equal to or greater than 1. The traditional four-field scanning mode has the following technical defects: 1) Although the contamination resistance of the magnetic grating displacement sensor is superior to that of the grating ruler, when the grating ruler is locally contaminated, the quality of sensing signals, particularly the consistency of four paths of signals, can be seriously affected, and the service precision of the magnetic grating displacement sensor is reduced. 2) When a fault occurs to a measuring head of an individual magnetic induction coil or a Hall element, a sensing signal can have a large error or even be lost, so that a sensing system of the magnetic grid displacement sensor is invalid.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a single-field scanning device and a scanning method for a magnetic grid displacement sensor, which are compared with the traditional four-field scanning magnetic field detection mode (namely, the magnetic field change is sensed through four independent magnetic induction coil measuring heads or Hall elements), when the magnetic grid displacement sensor is polluted locally or an individual sensing element fails, the magnetic grid displacement sensor still can output a high-quality and high-reliability sensing signal, so that the service precision and reliability of the magnetic grid displacement sensor can be obviously improved.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the single-field scanning device for the magnetic grid displacement sensor comprises a reading unit and a digital display device, wherein the reading unit and the digital display device are connected through a data line; the reading unit and the magnetic grid displacement sensor are parallel along the X direction, are aligned along the Y direction center and have a clearance of 0.3-2 mm along the Z direction. The reading unit is internally provided with a single-field scanning Hall microarray, the single-field scanning Hall microarray is composed of M groups of scanning detection units, each group of scanning detection units is composed of N microscale Hall elements, the N microscale Hall elements are distributed in a grid distance lambda of a magnetic grid displacement sensor at equal intervals, and the N microscale Hall elements of each group of scanning detection units are numbered A 1 ，A 2 ，...，A N The microscale Hall elements with the same numbers are connected together through a signal wire.
Further, the microscale Hall element is a linear Hall element, and the scale is 0.1-0.5 mm.
Further, M is an integer and has a value of 3, 4, 5 or 6.
Further, N is an integer and takes on a value of 3 or 4.
A scanning method of a single-field scanning device based on a magnetic grating displacement sensor, the scanning method comprising the steps of:
s1: placing a reading unit and a magnetic grid displacement sensor in parallel, then scanning the magnetic grid displacement sensor along the X direction by the reading unit, and sensing periodic magnetic field change by a single-field scanning Hall sensing microarray, wherein the number is A i The microscale hall element of (a), the expression of this signal is:
in the formula (1), epsilon is the signal amplitude, lambda is the grid distance of a magnetic grid displacement sensor, N is the number of microscale Hall elements contained in each group of scanning detection units, and x is the displacement to be detected.
S2: the single-field scanning Hall sensing microarray finally outputs N paths of sine waveform electric signals, and the ith path of electric signals S i All numbers A i Is a microscale Hall element output signal I i And (2) sum:
in formula (2), i=1, 2,..n. The phase change 2 pi x/Λ caused by the displacement x is reflected as a single-field scanning Hall sensing microarray output signal S i Is a change in intensity.
S3: verification signal S i Is characterized by comprising the following components in parts by mass:
when signal S i In the presence of non-ideal features, displacement measurement errors may be introduced. Signal S i Is represented by a plum-sand pattern, the ideal plum-sand pattern is a circle with its center at the origin, i.e. a plum-sand circle, when there is a non-ideal beliefWhen the signature is, the plum sand culture pattern deviates from a nominal plum sand culture circle, and if the plum sand culture pattern does not deviate from the nominal plum sand culture circle, the non-ideal signature is proved to be absent.
S4: by outputting a signal S i And performing demodulation algorithm processing such as arctangent subdivision and linearization subdivision to obtain a measured displacement value x.
Compared with the prior art, the invention has the beneficial effects that:
1) The single-field scanning Hall sensing microarray provided by the invention is characterized in that Hall elements for sensing magnetic field changes are mixed with each other in space, and finally output sensing signals are jointly generated by a plurality of microscale Hall elements with different spatial positions and same phase relation, and compared with the prior art (namely, mutually independent separated sensing elements are adopted for detecting magnetic field changes), the single-field scanning Hall sensing microarray has an error homogenization effect.
2) In the existing detection mode of the separation sensing element, when the magnetic grid displacement sensor has local pollution, the quality of output signals, particularly the consistency of multiple paths of signals, can be seriously affected. According to the single-field scanning Hall sensing microarray, the influence of local pollution of the magnetic grid displacement sensor on the quality of output signals and the consistency of multiple paths of signals is extremely limited through the average effect of the output signals of the multiple microscale Hall elements, so that the service precision is ensured.
3) In the existing detection mode of the separation sensing element, when a fault occurs to a measuring head of an individual magnetic induction coil or a Hall element, the sensing system of the magnetic grid displacement sensor is invalid. According to the single-field scanning Hall sensing microarray, when a fault occurs in an individual microscale Hall element, sensing signals can still be accurately output by other microscale Hall elements, and service reliability of the magnetic grid displacement sensor under severe working conditions is improved.
Drawings
FIG. 1 is a block diagram of a conventional four-field scanning sensing element for a magnetic grid displacement sensor;
FIG. 2 is a mounting positional relationship of a magnetic grating displacement sensor and a reading unit;
FIG. 3 is a block diagram of a single field scanning Hall microarray for a magnetic grid displacement sensor of the present invention;
fig. 4 is a block diagram of a single field scanning hall microarray, wherein: Λ=2mm, m=4, n=4;
FIG. 5 is a waveform of an output signal of a single-field scanning Hall microarray and a Lissajous plot thereof;
FIG. 6 is a waveform diagram of the output signal of the conventional four-field scanning mode when the magnetic grid displacement sensor is locally polluted;
FIG. 7 is a waveform diagram of a single-field scanning output signal when a magnetic grating displacement sensor is locally contaminated.
Reference numerals in the drawings: a magnetic grid displacement sensor-1; a reading unit-2; a digital display unit-3; an inductive element-4; single field scanning hall microarray-5; micro-scale hall element-6.
Detailed Description
The following describes in detail an embodiment example of the present invention, which is implemented on the premise of the technical solution of the present invention, and provides a detailed implementation manner and a specific operation procedure, but the protection scope of the present invention is not limited to the following examples.
A single-field scanning device for a magnetic grid displacement sensor is shown in fig. 2-3, wherein the scanning device comprises a reading unit 2 and a digital display device 3, and the reading unit 2 and the digital display device 3 are connected through a data line; the reading unit 2 and the magnetic grid displacement sensor 1 are parallel along the X direction, are aligned along the Y direction center and have a clearance of 0.3-2 mm along the Z direction. The reading unit 2 is internally provided with a single-field scanning Hall microarray 5, the single-field scanning Hall microarray 5 consists of M groups of scanning detection units, each group of scanning detection units consists of N microscale Hall elements 6, the N microscale Hall elements 6 are distributed in a grid distance lambda of a magnetic grid displacement sensor at equal intervals, and the N microscale Hall elements of each group of scanning detection units are numbered A 1 ，A 2 ，...，A N The microscale hall elements 6 with the same number are connected together through one signal wire. When the magnetic grating displacement sensor 1 and the reading unit 2 move relatively along the X direction, the reading unit 2 outputs sine and cosine electric signals corresponding to the measured displacement, and the measured displacement is obtained by demodulating the sine and cosine electric signals.
Preferably, the micro-scale Hall element 6 is a linear Hall element, and the scale is 0.1-0.5 mm.
Preferably, M is an integer, and is 3, 4, 5, or 6.
Preferably, N is an integer, and is 3 or 4.
As shown in fig. 4-7, a scanning method of a single-field scanning device based on a magnetic grid displacement sensor, the scanning method comprising the steps of:
s1: the reading unit 2 and the magnetic grid displacement sensor 1 are placed in parallel, then the reading unit 2 scans the magnetic grid displacement sensor 1 along the X direction, the single-field scanning Hall sensing microarray 5 senses the periodic magnetic field change, and the number is A i The microscale hall element of (a), the expression of this signal is:
in the formula (1), epsilon is the signal amplitude, lambda is the grid distance of a magnetic grid displacement sensor, N is the number of microscale Hall elements contained in each group of scanning detection units, and x is the displacement to be detected.
S2: the single-field scanning Hall sensing microarray 5 finally outputs N paths of sine waveform electric signals, and the ith path of electric signals S i All numbers A i Is a microscale Hall element output signal I i And (2) sum:
in formula (2), i=1, 2,..n. As can be seen from the formula (2), the phase change 2 pi x/Λ caused by the displacement x is reflected as a single-field scanning Hall sensing microarray output signal S i Is a change in intensity.
When the magnetic grid displacement sensor has local pollution, the influence on the signal quality output by the single-field scanning Hall sensing microarray, particularly the consistency of multiple paths of signals, is extremely limited, so that the service precision of the magnetic grid displacement sensor is ensured; when the individual microscale Hall elements of the single-field scanning Hall sensing microarray fail, other groups of microscale Hall elements can still accurately output sensing signals, and the reliability of the magnetic grid displacement sensor under severe service conditions is improved.
S3: verification signal S i Is characterized by comprising the following components in parts by mass:
when signal S i In the presence of non-ideal features, displacement measurement errors may be introduced. Signal S i As shown in fig. 5, the ideal plum-sand-culture pattern is a circle with its center at the origin, i.e., a plum-sand-culture circle, and when there is a non-ideal signal characteristic, the plum-sand-culture pattern deviates from the nominal plum-sand-culture circle, and if the plum-sand-culture pattern does not deviate from the nominal plum-sand-culture circle, it is confirmed that there is no non-ideal signal characteristic.
S4: by outputting a signal S i And performing demodulation algorithm processing such as arctangent subdivision and linearization subdivision to obtain a measured displacement value x.
Example 1
Referring to fig. 4: grid distance Λ=2mm of the magnetic grid displacement sensor; the single-field scanning Hall sensing microarray consists of M=4 groups of scanning detection units, wherein each group of scanning detection units consists of N=4 microscale Hall elements. When the reading unit scans the magnetic grid displacement sensor along the X direction, the single-field scanning Hall sensing microarray outputs 4 paths of sine and cosine electric signals S i (x) The phase difference between adjacent signals is pi/2, namely:
in equations (3) - (6), ε is the magnitude of the output signal of a single microscale Hall element. Differential operation is carried out on the 4 paths of sine and cosine electric signals, as shown in fig. 4, and finally two paths of orthogonal signals S are obtained a (x) And S is b (x)：
As can be seen from equations (7) and (8), signal S a (x) And S is b (x) The intensity of (2) is sine-cosine variable along with the measured displacement x; and the signal S for each shift of the detected displacement x by one pitch lambda a (x) And S is b (x) Varying by a sine and cosine period. Most commonly by applying to the signal S a (x) And S is b (x) Performing arctangent operation to obtain a measured displacement value x:
the precondition for high-precision demodulation of the measured displacement value x in the formula (9) is that: signal S a (x) And S is b (x) Is two ideal sine and cosine signals with phase quadrature (phase difference pi/2). Thus, when signal S a (x) And S is b (x) In the presence of non-ideal features, displacement measurement errors may be introduced. Signal S a (x) And S is b (x) Can be represented by a Lissajous figure, which is a circle centered at the origin (nominal Lissajous circle) as shown in FIG. 5. When non-ideal signal characteristics are present, the plum blossom pattern deviates from the nominal plum blossom circle.
Fig. 6 is a waveform and a lissajous diagram of an output signal of a traditional four-field scanning mode when a magnetic grid displacement sensor has local pollution. The quality of the sensing signal, in particular the four-way signal consistency, is severely affected, so that the Lissajous figure deviates significantly from the nominal Lissajous circle. In addition, for the traditional four-field scanning mode, when an individual sensing element fails, a large error or even a loss occurs in a corresponding sensing signal, so that a sensing system of the magnetic grid displacement sensor fails.
Fig. 7 is a waveform and a lissajous diagram of the output signal of the single-field scanning mode of example 1 when the magnetic grid displacement sensor has local pollution. Because of the error homogenization effect of the single-field scanning Hall microarray, the four-way signal waveform and the consistency thereof are basically unchanged, so that the Lissajous figure is consistent with the nominal Lissajous circle. In addition, aiming at the single-field scanning mode in the embodiment 1, when the individual sensing element fails, sensing signals can still be accurately output by other groups of microscale Hall elements, so that the service reliability of the magnetic grid displacement sensor under the severe working condition is improved.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (2)
1. The single-field scanning device for the magnetic grid displacement sensor is characterized by comprising a reading unit (2) and a digital display device (3), wherein the reading unit (2) and the digital display device (3) are connected through a data line; the reading unit (2) and the magnetic grid displacement sensor (1) are parallel along the X direction, are aligned along the Y direction center and have a clearance of 0.3-2 mm along the Z direction; the reading unit (2) is internally provided with a single-field scanning Hall sensing microarray (5), the single-field scanning Hall sensing microarray (5) is composed of M groups of scanning detection units, each group of scanning detection units is composed of N microscale Hall elements (6), the N microscale Hall elements (6) are distributed in a grid distance lambda of a magnetic grid displacement sensor at equal intervals, and the number A of the N microscale Hall elements of each group of scanning detection units 1 ，A 2 ，...，A N Microscale Hall elements (6) with the same number are connected together through a signal wire;
the micro-scale Hall element (6) is a linear Hall element, and the scale is 0.1-0.5 mm;
m is an integer, and the value is 3, 4, 5 or 6;
n is an integer and takes the value of 3 or 4.
2. A scanning method based on the single-field scanning device of claim 1, characterized in that the scanning method comprises the steps of:
s1: the reading unit (2) is placed in parallel with the magnetic grid displacement sensor (1), then the reading unit (2) scans the magnetic grid displacement sensor (1) along the X direction, and the single-field scanning Hall sensing microarray (5) senses the periodic magnetic field change, and the number is A i The microscale hall element of (a), the expression of this signal is:
in the formula (1), epsilon is the signal amplitude, lambda is the grid distance of a magnetic grid displacement sensor, N is the number of microscale Hall elements contained in each group of scanning detection units, and x is the displacement to be detected;
s2: the single-field scanning Hall sensing microarray (5) finally outputs N paths of sine waveform electric signals, and the ith path of electric signals S i All numbers A i Is a microscale Hall element output signal I i And (2) sum:
in formula (2), i=1, 2,..n; the phase change 2 pi x/Λ caused by the displacement x is reflected as a single-field scanning Hall sensing microarray output signal S i Intensity variation of (c);
s3: verification signal S i Is characterized by comprising the following components in parts by mass:
when signal S i When non-ideal characteristics exist, displacement measurement errors are introduced; signal S i Is of the quality of (1)The amount is represented by a plum-sand-cultivation graph, the ideal plum-sand-cultivation graph is a circle with the center at the origin, namely, the plum-sand-cultivation circle, when non-ideal signal characteristics exist, the plum-sand-cultivation graph deviates from the nominal plum-sand-cultivation circle, and if the plum-sand-cultivation graph does not deviate from the nominal plum-sand-cultivation circle, the non-ideal signal characteristics are proved to exist;
s4: by outputting a signal S i And performing arctangent subdivision and linearization subdivision demodulation algorithm processing to obtain a measured displacement value x.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310615409.3A CN116678301A (en) | 2022-10-17 | 2022-10-17 | Single-field scanning device for magnetic grid displacement sensor |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211266383.8A CN115597477B (en) | 2022-10-17 | 2022-10-17 | Single-field scanning device and scanning method for magnetic grating ruler |
| CN202310615409.3A CN116678301A (en) | 2022-10-17 | 2022-10-17 | Single-field scanning device for magnetic grid displacement sensor |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211266383.8A Division CN115597477B (en) | 2022-10-17 | 2022-10-17 | Single-field scanning device and scanning method for magnetic grating ruler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116678301A true CN116678301A (en) | 2023-09-01 |
Family
ID=84845984
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310615409.3A Pending CN116678301A (en) | 2022-10-17 | 2022-10-17 | Single-field scanning device for magnetic grid displacement sensor |
| CN202211266383.8A Active CN115597477B (en) | 2022-10-17 | 2022-10-17 | Single-field scanning device and scanning method for magnetic grating ruler |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211266383.8A Active CN115597477B (en) | 2022-10-17 | 2022-10-17 | Single-field scanning device and scanning method for magnetic grating ruler |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN116678301A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117433400A (en) * | 2023-12-08 | 2024-01-23 | 上海奕瑞光电子科技股份有限公司 | Offset measurement method and device for mobile DR, electronic product and medium |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10050392A1 (en) * | 2000-10-12 | 2002-04-18 | Heidenhain Gmbh Dr Johannes | Position measurement device converts mutually phase shifted analog sensing signals from scale sensing elements into multi-position amplitude-proportional code word applied to output unit |
| CN101995432A (en) * | 2010-11-04 | 2011-03-30 | 重庆大学 | Hall element differential array based ferromagnetic construction member surface crack detector |
| CN202372135U (en) * | 2011-12-23 | 2012-08-08 | 基康仪器(北京)有限公司 | Magnet displacement sensor |
| CN103884264B (en) * | 2014-03-04 | 2016-08-17 | 张琪奕 | Hall coordinatometer |
| CN104949610B (en) * | 2014-03-24 | 2018-08-24 | 上海微电子装备（集团）股份有限公司 | Magnetic floats cable stage motor magnetic to Barebone and its alignment methods |
| CN103940332B (en) * | 2014-04-30 | 2017-01-18 | 江苏百协精锻机床有限公司 | Magnetic grating displacement transducer based on Hall magnetic sensitive element array |
| CN206185609U (en) * | 2016-09-23 | 2017-05-24 | 珠海市怡信测量科技有限公司 | Magnetic grid chi |
| JP2021510555A (en) * | 2018-03-30 | 2021-04-30 | エシコン エルエルシーＥｔｈｉｃｏｎ ＬＬＣ | Bipolar combination device that automatically adjusts pressure based on energy modality |
| CN108871248B (en) * | 2018-06-20 | 2019-09-20 | 华中科技大学 | A kind of absolute-type position detection device can be applied to super large stroke detection |
-
2022
- 2022-10-17 CN CN202310615409.3A patent/CN116678301A/en active Pending
- 2022-10-17 CN CN202211266383.8A patent/CN115597477B/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117433400A (en) * | 2023-12-08 | 2024-01-23 | 上海奕瑞光电子科技股份有限公司 | Offset measurement method and device for mobile DR, electronic product and medium |
| CN117433400B (en) * | 2023-12-08 | 2024-04-30 | 上海奕瑞光电子科技股份有限公司 | Offset measurement method and device for mobile DR, electronic product and medium |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115597477B (en) | 2023-06-16 |
| CN115597477A (en) | 2023-01-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8415946B2 (en) | Arrangement and method for magnetic determination of a linear length or a rotary angle | |
| US9030194B2 (en) | Position encoder apparatus | |
| US20040129870A1 (en) | Position measuring instrument | |
| CN110133543B (en) | Magnetoresistive sensor system for stray field cancellation using auxiliary sensor signals | |
| CN107036637B (en) | Electronics absolute position encoder | |
| US20080284416A1 (en) | Position detection utilizing a rotary array of magnetic sensors with irregular spacing between sensing elements | |
| US20020077752A1 (en) | Noncontacting position indicating system | |
| CN115597477B (en) | Single-field scanning device and scanning method for magnetic grating ruler | |
| JP4984269B2 (en) | Angle detector with complex self-calibration function | |
| US5619132A (en) | Position measuring device employing primary and auxiliary magnetic fields | |
| CN112504305A (en) | Encoder, motor and method for detecting absolute position of encoder | |
| US5821517A (en) | Magnetic encoder for reading marks on an associated magnetic track | |
| CN108369113A (en) | position detecting device | |
| JP6487246B2 (en) | Electromagnetic induction position detector and position detection method using the same | |
| JP2005500548A (en) | Method and apparatus for optical measurement data detection | |
| JP2007192722A (en) | Position detector | |
| US20210255003A1 (en) | A magnetic encoder | |
| US20210341278A1 (en) | Inductive position measuring device | |
| CN112393679B (en) | Angle measuring device based on eddy current | |
| CN114667438B (en) | Position measuring device | |
| US11940304B2 (en) | Position-measuring device having four scanning units and two measuring graduations | |
| JP4241369B2 (en) | Linear scale | |
| US20030076091A1 (en) | Electromagnetic mark device for a magnetism encorder | |
| KR20210117183A (en) | Integrated magnetometer and method of detecting a magnetic field | |
| CN110118551A (en) | Position detecting device and method for detecting position |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |