CN108369113A - position detecting device - Google Patents
position detecting device Download PDFInfo
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- CN108369113A CN108369113A CN201680070417.2A CN201680070417A CN108369113A CN 108369113 A CN108369113 A CN 108369113A CN 201680070417 A CN201680070417 A CN 201680070417A CN 108369113 A CN108369113 A CN 108369113A
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- magnetoresistive element
- magnetic
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- absolute
- track
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
Abstract
The present invention provides a kind of position detecting device, the influence of the signal exported from magnetoresistive element when can reduce temperature to reading magnetic scale.Specifically, magnetic encoder apparatus (1) (position detecting device) has magnetic scale (2) and detects the magnet sensor arrangement (3) of the position of magnetic scale (2).Magnet sensor arrangement (3) has sensor base plate (12), sense magnetic direction is set to read magnetic scale (2) and magnetic field detection the first magnetoresistive element (45) and the second magnetoresistive element of magnetic field detection (46) of output signal towards relative movement direction (Z) on sensor base plate (12), make sense magnetic direction towards temperature adjustmemt the first magnetoresistive element (51) and the second magnetoresistive element of temperature adjustmemt (52) of the orthogonal direction (Y) orthogonal with relative movement direction (Z) on sensor base plate (12).Magnet sensor arrangement (3) corrects the differential wave D from magnetic field detection magnetoresistive element (45,46) by coming from the differential wave (temperature adjustmemt mid-point voltage T) of temperature adjustmemt magnetoresistive element (51,52).
Description
Technical field
The present invention relates to read the position of the magnetic track on magnetic scale by having the magnet sensor arrangement of magnetoresistive element
Detection device.
Background technology
Existing position detecting device has been recorded in patent document 1.Magnetic scale has forms increment pattern with regulation pitch
Increment magnetic track and the absolute track that absolute pattern is formed with pitch corresponding with increment pattern.Magnet sensor arrangement has reading and increases
It measures the increment signal output section of magnetic track and output increment signal and reads absolute track and export the absolute value output section of absolute value.
Absolute pattern is pattern made of the non-repeating pattern arrangement of magnetized area and unmagnetized region with a constant pitch.Absolutely
Have the multiple magnetoresistive elements for making sense magnetic direction towards relative movement direction to value output section.Multiple magnetoresistive elements with it is non-duplicate
The identical pitch of pattern detects the magnetic of multiple regions when magnetic scale and Magnetic Sensor relatively move along the arrangement of relative movement direction
.The output of absolute value output section will be set as 1 from the signal that each magnetoresistive element export for the logical value in region more than defined threshold,
Logical value no more than the region of defined threshold value is set as to the random cycle random number code of the M series of 0 multiple bits.
Phase and absolute value of the position detecting device based on increment signal obtain the absolute position of magnetic scale or magnet sensor arrangement.
Existing technical literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2007-33245 bulletins
Invention content
The technical problems to be solved by the invention
The resistance value of magnetoresistive element itself can be fluctuated due to temperature change, so the signal exported from magnetoresistive element can be because
Temperature change and upper and lower displacement.Therefore, in the letter that will be exported from magnetoresistive element based on scheduled threshold value to obtain absolute value
When number being encoded (code), the coding can not be correctly carried out because of temperature change sometimes.
In view of the above several points, problem of the present invention is that, it provides when one kind can reduce temperature to reading magnetic scale from magnetic resistance
The position detecting device of the influence of the signal of element output.
Technical scheme applied to solve the technical problem
In order to solve the above problems, the present invention provides a kind of position detecting device, which is characterized in that has：Magnetic scale；Magnetic passes
Sensor arrangement, detects the position of the magnetic scale of relative movement, and the magnet sensor arrangement has：Sensor base plate；Magnetic field
Detection magnetoresistive element makes sense magnetic direction read the magnetic scale simultaneously towards relative movement direction on the sensor base plate
Output signal；Temperature adjustmemt magnetoresistive element makes sense magnetic direction direction and the relative movement on the sensor base plate
The orthogonal orthogonal direction in direction.
In addition, in the present invention, the magnet sensor arrangement can be according to the letter from the temperature adjustmemt magnetoresistive element
Number, correct the signal from the magnetic field detection magnetoresistive element.
In the present invention, magnet sensor arrangement has magnetic field detection magnetoresistive element and temperature on same sensor base plate
Amendment magnetoresistive element.Here, magnetic field detection magnetoresistive element makes sense magnetic direction towards relative movement direction.Therefore, magnetic is come from
The signal of field detecting magnetoresistive element is the changes of magnetic field of the magnetic track by detecting relative movement to reflect self-resistance value
Variation.On the other hand, temperature adjustmemt magnetoresistive element makes sense magnetic direction towards orthogonal direction.Therefore, temperature adjustmemt magnetic resistance member
Part does not detect the changes of magnetic field of the magnetic scale of relative movement, and the signal from temperature adjustmemt magnetoresistive element reflects since temperature becomes
The variation of the self-resistance value of change and fluctuation.Therefore, by using the signal correction from temperature adjustmemt magnetoresistive element from magnetic
The signal that field detecting is exported with magnetoresistive element can inhibit temperature change for the signal from magnetic field detection magnetoresistive element
The displacement of caused signal.
In the present invention, it is generally desirable to, the magnetic field detection magnetoresistive element and the temperature adjustmemt magnetoresistive element by
Identical material is constituted.Accordingly, the variation of the resistance value of magnetic field detection magnetoresistive element caused by temperature change and due to
The resistance variations of temperature adjustmemt magnetoresistive element caused by temperature change are corresponding.Therefore, if used using from temperature adjustmemt
Signal of the signal correction of magnetoresistive element from magnetic field detection magnetoresistive element, for the letter from magnetic field detection magnetoresistive element
Number, so that it may to inhibit the displacement of the signal caused by temperature change.
In the present invention, the resistance value of temperature adjustmemt magnetoresistive element can be than the magnetic field detection magnetoresistive element
Resistance value it is big.Hereby it is possible to inhibit temperature adjustmemt with the temperature of magnetoresistive element itself because being applied with magnetoresistive element to temperature adjustmemt
Making alive and increase.
In the present invention, it can be the magnetic scale has the first magnetic track and configured side by side with first magnetic track the second magnetic
Road has the magnetic field detection use for reading first magnetic track and exporting the first signal as the magnetic field detection magnetoresistive element
First magnetoresistive element and reading second magnetic track and the second magnetoresistive element of magnetic field detection for exporting second signal, as described
Temperature adjustmemt magnetoresistive element has and is configured on the sensor base plate than the magnetic field detection with the second magnetoresistive element more
Close to the first magnetoresistive element of temperature adjustmemt of the magnetic field detection position of the first magnetoresistive element and in the sensor base
The position with the first magnetoresistive element closer to the magnetic field detection with the second magnetoresistive element than the magnetic field detection is configured on plate
The second magnetoresistive element of temperature adjustmemt.It accordingly, can be by from being configured at close to the first magnetoresistive element of magnetic field detection
The signal correction of the first magnetoresistive element of the temperature adjustmemt of position, and can be with from the magnetic field detection signal of the first magnetoresistive element
By from the signal for being configured at the second magnetoresistive element of temperature adjustmemt close to the magnetic field detection position of the second magnetoresistive element
It corrects from the magnetic field detection signal of the second magnetoresistive element.Therefore, for coming from magnetic field detection the first magnetoresistive element and magnetic
The signal of the second magnetoresistive element of field detecting, can inhibit the displacement of the signal caused by temperature change.
In this case, it is desirable that there is the magnetic scale absolute track, the absolute track to have magnetized area and non-magnetic
Change region with the absolute pattern of certain joint slope, the magnet sensor arrangement has the magnetic scale for reading relative movement
The absolute track and the absolute signal output section for exporting absolute signal, the absolute track have first magnetic track and described
Second magnetic track, first magnetic track have the absolute pattern, second magnetic track have magnetized area and unmagnetized region with
The magnetizing pattern that the pitch arranges on the contrary with the absolute pattern, the absolute signal output section has：First electric bridge electricity
Road is connected in series with magnetic field detection first magnetoresistive element and the magnetic between voltage input-terminal and ground terminal
The second magnetoresistive element of field detecting；Second bridge circuit is connected between the voltage input-terminal and the ground terminal
It is connected with the second magnetoresistive element of the first magnetoresistive element of the temperature adjustmemt and the temperature adjustmemt, is based on examining from the magnetic field
Survey the first magnetoresistive element and the magnetic field detection the first mid-point voltage exported between the second magnetoresistive element and from the temperature
Degree corrects the first magnetoresistive element and the temperature adjustmemt difference of the second mid-point voltage exported between the second magnetoresistive element, defeated
Go out the absolute signal.
Accordingly, the first magnetic of magnetic field detection can be come from by the signal correction from the first magnetoresistive element of temperature adjustmemt
The signal of resistance element, and magnetic field detection can be come from by the signal correction from the second magnetoresistive element of temperature adjustmemt with second
The signal of magnetoresistive element.
Here, by magnetized area and unmagnetized region in the absolute pattern of certain joint slope, in magnetized area
Nearby there is part existing for unmagnetized region, generation is crossed from magnetized area is flushed to the magnetic that unmagnetized region domain side returns again to magnetized area
.Therefore, there is part existing for unmagnetized region near magnetized area on absolute track, in unmagnetized region close to magnetization
The position in region, magnetic field detection will detect magnetic field with the first magnetoresistive element.Therefore, if do not suitably set for obtaining absolutely
To the threshold value of value, the case where signal is more than threshold value is will produce even if unmagnetized region, logic cannot correctly be obtained by existing
The problem of value.
For this problem, in the present invention, as absolute track, have：First magnetic track, has absolute pattern；
Second magnetic track has the logical value magnetizing pattern opposite with absolute pattern.Accordingly, it is had read by the first signal output section
When the first magnetic track, magnetic field is detected in the part close to magnetized area in unmagnetized region, exports and believes from the first signal output section
Number, but when the first signal output section has read the unmagnetized region of the first magnetic track, second signal test section reads the second magnetic track
Magnetized area, so exporting the second signal bigger than the first signal from second signal output section.Therefore, defeated from the first signal
Go out portion output the first signal and from the differential wave for the second signal that second signal output section exports, the shape in absolute pattern
At the part in unmagnetized region, the influence in the magnetic field generated in the part close to magnetized area in unmagnetized region can be eliminated.
It is used as differential wave as a result, the waveform nonreversible in the boundary part waveform in magnetized area and unmagnetized region can be obtained.Institute
Threshold value can be utilized correctly to obtain logical value.
In the present invention, can be that the magnetic scale has in order to obtain the absolute position of magnetic scale or magnet sensor arrangement
There is with first segment the first increment magnetic track of the first increment pattern away from formation and with the second section than the first segment distance
Second increment magnetic track of the second increment pattern away from formation, the magnet sensor arrangement have：First increment signal output section,
It reads the first increment magnetic track of the magnetic scale of relative movement and exports and first of the first segment away from corresponding length
First increment signal of wavelength；Second increment of the magnetic scale of relative movement is read in second increment signal output section
Second increment signal of the second wave length of magnetic track and output length corresponding with second pitch；Arithmetic processing section is based on
First increment signal and second increment signal, obtain the integral multiple for the first wave length and the second wave length
The third increment signal of third wavelength, the absolute pattern of the absolute track is with the third pitch longer than second pitch
It is formed, the absolute signal output section exports the absolute signal of the third wavelength corresponding with the third pitch.
Invention effect
The signal exported from the magnetic field detection in the magnetic field of detection magnetic scale with magnetoresistive element can be pressed down according to the present invention
Make the displacement of the signal caused by temperature change.
Description of the drawings
Fig. 1 is the definition graph for applying the magnetic encoder apparatus of the present invention；
Fig. 2 is the definition graph of magnetic track and magnetoresistive element；
Fig. 3 is the block diagram of the control system of magnetic encoder apparatus；
Fig. 4 is the definition graph of each signal of magnet sensor arrangement output；
Fig. 5 be the first signal exported from the first signal output section, the second signal exported from second signal output section and
The definition graph of the differential wave of the first signal and the second signal；
Fig. 6 is the explanation in the magnetic field and its detection signal of magnetized area and the boundary part in unmagnetized region；
Fig. 7 is the definition graph in temperature adjustmemt portion.
Specific implementation mode
Hereinafter, with reference to attached drawing, the magnetic encoder apparatus of the embodiment of the position detecting device to applying the present invention
It illustrates.
Fig. 1 is the definition graph for applying the magnetic encoder apparatus of the present invention.As shown in Figure 1, the magnetic encoder of this example
Device (position detecting device) 1 has magnetic scale 2 and reads the magnet sensor arrangement 3 of magnetic scale 2.Magnetic scale 2 has along magnetic scale 2 and magnetic biography
The magnetic track 4 that the relative movement direction X of sensor arrangement 3 extends.When magnetic scale 2 relatively moves, detection is formed in magnet sensor arrangement 3
The variation in the magnetic field on the surface of magnetic scale 2, and export the absolute shift position of magnetic scale 2 or magnet sensor arrangement 3.In the following description
In, using the direction orthogonal with relative movement direction X as orthogonal direction Y.
Magnet sensor arrangement 3 has the retainer 6 being made of non-magnetic material, the cover 7 being made of non-magnetic material, from guarantor
Hold the cable 8 of the extension of frame 6.Retainer 6 has the opposed faces 9 opposed with magnetic scale 2.Opening portion 9a is equipped in opposed faces 9.Opening
Magnetic Sensor 11 is configured in portion 9a.Magnetic Sensor 11 has the sensor base plates such as silicon substrate or ceramic glaze substrate 12, is formed in
(increment signal detects the first magnetoresistive element 37 to multiple magnetoresistive elements on the surface of sensor base plate 12, increment signal detection is used
Second magnetoresistive element 38, absolute value detect the first magnetoresistive element 45, absolute value detects the second magnetoresistive element 46) (with reference to figure
2).Magnetoresistive element 37,38,45,46 has permalloy film as sense magnetic film.Magnetoresistive element 37,38,45,46 and magnetic scale 2 across
Defined gap is opposed.
In magnetic encoder apparatus 1, a side of magnetic scale 2 and magnet sensor arrangement 3 is configured at fixed side, another party's configuration
In mobile side.In this example, magnetic scale 2 is configured at mobile side, and magnet sensor arrangement 3 is configured at fixed side.
(magnetic scale)
Fig. 2 is provided at the definition graph of magnetic track 4 and magnetoresistive element 37,38,45,46 on magnetic scale 2.As shown in Fig. 2, magnetic track 4
The first increment magnetic track 21, the second increment magnetic track 22 extended with the relative movement direction X along magnetic scale 2 and magnet sensor arrangement 3
And absolute track 23.First increment magnetic track 21, the second increment magnetic track 22 and absolute track 23 are parallel.Absolute track 23 has
The first magnetic track 24 and the second magnetic track 25 extended along relative movement direction X.First magnetic track 24 and the second magnetic track 25 are in orthogonal direction Y
On be seamlessly arranged.First magnetic track 24 is parallel with the second magnetic track 25.
First increment magnetic track 21 has the first increment pattern 21a formed away from P1 with first segment.First increment pattern 21a is
With first segment replaces the magnetized poles N and the poles S away from P1 and is formed on relative movement direction X.
Second increment magnetic track 22 has the second increment than second pitch P2 formation of the first segment away from P1 long with pitch length
Pattern 22a.Second increment pattern 22a be on relative movement direction X with the second pitch P2 replaces the magnetized poles N and the poles S and shape
At.First increment magnetic track 21 is on orthogonal direction Y between absolute track 23 and the second increment magnetic track 22.First increment graph
Case 21a and the second increment pattern 22a form the strong and weak magnetic field for vertically showing magnetic field power with the surface of magnetic scale 2.
First magnetic track 24 of absolute track 23 has with pitch length than third of the first segment away from P1 and the second pitch P2 long
The absolute pattern 24a that pitch P3 is formed.Absolute pattern 24a be magnetized area after magnetizing and unmagnetized unmagnetized region with
Pattern made of non-repeating pattern (doubtful random pattern) arrangement of third pitch P3.Each magnetized area is in relative movement direction X
On have the poles N and the poles S.In addition, in the first magnetic track 24, adjacent magnetized area makes mutually the same on relative movement direction X
It is extremely opposed.Absolute pattern 24a forms the strong and weak magnetic field for vertically showing magnetic field power with the surface of magnetic scale 2.
In the region (continuous six regions) that the absolute pattern 24a of this example passes through continuous 6 pitches magnetized area and
Unmagnetized region arranges to show the absolute position on magnetic scale 2.More specifically, magnetized area is being set as logical value 1, it will
When unmagnetized region is set as logical value 0, by continuous six regions 1 and 0 arrangement, indicated on magnetic scale 2 with the value of 6 bits
Absolute position.
Second magnetic track 25 of absolute track 23 has magnetized area and unmagnetized region schemes with third pitch P3 and with absolute
The magnetizing pattern 25a that case 24a is arranged on the contrary.Therefore, in absolute track 23, on orthogonal direction Y, the second magnetic track 25 is not
Magnetized area is located at the side of the magnetized area of the first magnetic track 24.In addition, on orthogonal direction Y, the magnetized area of the second magnetic track 25
Domain is located at the side in the unmagnetized region of the first magnetic track 24.Magnetizing pattern 25a is formed vertically shows magnetic field with the surface of magnetic scale 2
Strong and weak strong and weak magnetic field.In the second magnetic track 25, each magnetized area has the poles N and the poles S on relative movement direction X.In addition,
In second magnetic track 25, adjacent magnetized area makes mutually the same extremely opposed on relative movement direction X.
Here, the third pitch P3 of formation pitch as absolute pattern 24a and magnetizing pattern 25a be first segment away from P1 and
The integral multiple of second pitch P2.In this example, first segment is 80 μm away from P1, and the second pitch P2 is 100 μm, and third pitch P3 is
400μm.Therefore, third pitch P3 is 5 times of first segment away from P1, is 4 times of the second pitch P2.
(Magnetic Sensor)
Fig. 3 is the schematic block diagram for the control system for indicating magnetic encoder apparatus 1.Fig. 4 is that magnet sensor arrangement 3 passes through reading
Take magnetic scale 2 and the definition graph of each signal of acquirement.Matching for absolute value detection magnetoresistive element 45,46 is schematically recorded in Fig. 4
It sets.Fig. 5 is the first signal exported from the first signal output section, the second signal exported from second signal output section and the first letter
Number and second signal differential wave definition graph.Fig. 5 (a) be schematically show absolute track 23 and the first signal output section and
The definition graph of second signal output section.Fig. 5 (b) is the curve graph of the first signal exported from the first signal output section, Fig. 5 (c)
It is the curve graph of the second signal exported from second signal output section, Fig. 5 (d) is the curve graph of differential wave, and Fig. 5 (e) is exhausted
To value.In addition, in Fig. 5 (a), in order to illustrate the magnetic field of magnetized area, it is arranged between the first magnetic track 24 and the second magnetic track 25
Gap is indicated.Fig. 6 (a) is the definition graph in the magnetic field of magnetized area and the boundary part in unmagnetized region in absolute pattern,
Fig. 6 (b) is the curve graph of the first signal of magnetized area and the boundary part in unmagnetized region.
As shown in figure 3, magnet sensor arrangement 3 have the first increment signal output section 31, the second increment signal output section 32,
Increment signal calculating part 33, absolute value output section 34 and absolute position acquisition unit 35.
As shown in Figure 2 and Figure 3, the first increment signal output section 31 has the increment arranged opposite with the first increment magnetic track 21
The first magnetoresistive element 37 of signal detection.Increment signal the first magnetoresistive element 37 of detection makes sense magnetic direction towards relative movement side
To X.As shown in figure 4, with the movement of magnetic scale 2, the first increment signal output section 31 output and the first of the first increment pattern 21a
The first increment signal θ A of the first wave length λ 1 of the corresponding length of pitch P1.In this example, first segment is 80 μm away from P1, therefore,
First wave length λ 1 is 80 μm.First increment signal θ A are that magnetic scale 2 often moves first segment away from P1 (80 μm), and phase just changes to 2 from 0
The periodic signal of π.
As shown in Figure 2 and Figure 3, the second increment signal output section 32 has the increment arranged opposite with the second increment magnetic track 22
The second magnetoresistive element 38 of signal detection.Increment signal the second magnetoresistive element 38 of detection makes sense magnetic direction towards relative movement side
To X.As shown in figure 4, with the movement of magnetic scale 2, the second increment signal output section 32 output and the second of the second increment pattern 22a
The second increment signal θ B of the second wave length λ 2 of the corresponding length of pitch P2.In this example, the second pitch P2 is 100 μm, therefore,
Second wave length λ 2 is 100 μm.Second increment signal θ B are that magnetic scale 2 often moves the second pitch P2 (100 μm), and phase is just from 0 variation
To the periodic signal of 2 π.
Increment signal calculating part 33 is based on the first increment signal θ A and the second increment signal θ B, calculates the of third wavelength X 3
Three increment signal θ C.Third increment signal θ C are the phase institutes that the second increment signal θ B are subtracted from the phase of the first increment signal θ A
The vernier signal obtained.
In this example, third wavelength X 3 is 400 μm.Third wavelength X 3 (400 μm) is the first wave of the first increment signal θ A
The integral multiple of long λ 1 (80 μm) is the integral multiple of the second wave length λ 2 (100 μm) of the second increment signal θ B.In addition, third wavelength X
3 (400 μm) are length corresponding with the pitch of absolute pattern 24a length i.e. third pitch P3 (400 μm).Third increment signal θ C are
Magnetic scale 2 is every third pitch P3 (400 μm), the periodic signal that phase just changes to 2 π from 0.
Then, absolute value output section 34, which has, reads the first magnetic track 24 (absolute pattern 24a) and exports the first signal E1's
First signal output section 41 and the second magnetic track 25 (magnetizing pattern 25a) of reading and the second signal output section for exporting second signal E2
42.Differential wave (first mid-point voltage) D output of the absolute value output section 34 based on the first signal E1 and second signal E2 is absolute
Value ABS.
As shown in Fig. 2~Fig. 5, the first signal output section 41 has with multiple opposed with the first magnetic track 24 of third pitch P3
Absolute value detects the first magnetoresistive element (the first magnetoresistive element of magnetic field detection) 45.Multiple absolute value detection the first magnetic resistance members
Part 45 respectively makes sense magnetic direction towards relative movement direction X.It is used by these multiple absolute value detections the first signal output section 41
First magnetoresistive element 45 detects the respective magnetic field of multiple regions of the continuous absolute pattern 24a on relative movement direction X simultaneously
Export the first signal E1.As shown in figure 4, in this example, in order to obtain the absolute value ABS of 6 bits, the first signal output section 41 tool
Standby 6 absolute values detect the first magnetoresistive element 45.Fig. 5 (b) is 6 pitches for detecting absolute track 23 shown in Fig. 5 (a)
Region magnetic field when the first signal E1 curve graph.
Second signal output section 42 has with multiple absolute values detection opposed with the second magnetic track 25 third pitch P3 with the
Two magnetoresistive elements (the second magnetoresistive element of magnetic field detection) 46.Multiple absolute value detections respectively make sense magnetic with the second magnetoresistive element 46
Direction direction relative movement direction X.The second magnetoresistive element 46 is detected by these multiple absolute values in second signal output section 42
To detect the respective magnetic field of multiple regions of continuous magnetizing pattern 25a on relative movement direction X and export second signal E2.
In this example, in order to obtain the absolute value ABS of 6 bits, second signal output section 42 has 6 absolute values and detects the first magnetic resistance
Element 45.Second signal when Fig. 5 (c) is the magnetic field in the region for 6 pitches for detecting absolute track 23 shown in Fig. 5 (a)
The curve graph of E2.
Here, as shown in Fig. 2, Fig. 4 and Fig. 5,6 absolute values detect the first magnetoresistive element 45 and 6 absolute value detections
With in the second magnetoresistive element 46, the same position (position being overlapped when from orthogonal direction Y is configured on relative movement direction X
Set) absolute value detect the first magnetoresistive element 45 and absolute value and detect and be configured to one group (a pair) with the second magnetoresistive element 46.
In addition, as shown in Fig. 2, Fig. 5, the absolute value of each group detects the first magnetoresistive element 45 and absolute value detects the second magnetoresistive element
46 are connected in series between voltage input-terminal Vcc and ground terminal GND, form bridge circuit (the first bridge circuit) 47.
Moreover, absolute value output section 34 is based on from first magnetoresistive element 45 of the absolute value detection in bridge circuit 47 and absolutely
To the differential wave D (mid-point voltage) that value detection is exported with the midpoint 48 between the second magnetoresistive element 46, output absolute value ABS.
When Fig. 5 (d) is the magnetic field for 6 bit regions for detecting absolute track 23 shown in Fig. 5 (a) differential wave D (in
Point voltage) curve graph.As shown in Fig. 5 (d), export the first signal E1's and second signal E2 from the midpoint of bridge circuit 47 48
It is differential to be used as differential wave D (mid-point voltage).Therefore, the magnetic with the first magnetoresistive element 45 detection magnetized area is detected in absolute value
In the case that field, absolute value detection detect the magnetic field in unmagnetized region with the second magnetoresistive element 46, as differential wave D, output
The voltage signal of midpoint potential E0 or more.On the other hand, it is detected in absolute value and detects unmagnetized region with the first magnetoresistive element 45
Magnetic field, absolute value detection with the second magnetoresistive element 46 detection magnetized area magnetic field in the case of, it is defeated as differential wave D
Go out the voltage signal lower than midpoint potential E0.
Therefore, absolute value output section 34 is using midpoint potential E0 as threshold value, by the output of groups of the differential wave D more than threshold value
It is set as 1, the output by differential wave D less than the group of threshold value is set as 0, to the absolute value ABS of 6 bits of output.Absolute value as a result,
ABS becomes to be worth as shown in Fig. 5 (e).In addition, so-called midpoint potential E0, refers to detecting the first magnetoresistive element 45 in absolute value
And absolute value detects the voltage signal exported from midpoint 48 in the state that magnetic field is not detected with 46 both sides of the second magnetoresistive element.
Here, in the case where absolute track 23 only has the first magnetic track 24, as shown in Fig. 5 (b), exported in the first signal
When portion 41 reads the first magnetic track 24, in magnetized area and unmagnetized region adjacent part, that is, unmagnetized region close to magnetization
The part in region exports the first signal E1.That is, as shown in fig. 6, magnetized area R1 and unmagnetized region R0 boundary position R,
Generation crosses from magnetized area R1 and is flushed to the magnetic field F that unmagnetized region domain R0 returns again to magnetized area R1, so absolute value detection is with the
One magnetoresistive element 45 detects magnetic field F and exports the first signal E1.Therefore, it is set if inappropriate for obtaining absolute value
The threshold value of ABS can be more than threshold value there is a situation where output even if unmagnetized region R0, to occur correctly to obtain
The case where absolute value ABS.
In contrast, in this example, as shown in Fig. 5 (b) and Fig. 5 (c), the first magnetic track is read in the first signal output section 41
When 24 unmagnetized region, the magnetized area of the second magnetic track 25 is read in second signal output section 42, so being exported from second signal
Portion 42 exports the signal bigger than the first signal output section 41.In addition, as shown in fig. 6, in magnetized area R1 and unmagnetized region R0
Boundary position R, (magnetic flux of overshoot part is close than the magnetic flux density of the sides unmagnetized region R0 for the magnetic flux density of magnetized area R1
Degree) greatly, therefore, from the first signal E1 that the first signal output section 41 exports, using boundary position R as boundary, magnetized area R1
The tilt angle theta 1 of the signal of side is more than the tilt angle theta 2 for the signal that the sides unmagnetized region R0 are more leaned on than boundary position R.Therefore,
If obtaining the first signal E1's from the first signal output section 41 and second signal E2 from second signal output section 42
It is differential, it will be able to obtain the letter for not having the waveform of inversion section in the boundary position R of magnetized area R1 and unmagnetized region R0
Number.I.e., it is possible to eliminate the influence in the magnetic field generated in the part close to magnetized area R1 of unmagnetized region R0.
In addition, if using midpoint potential E0 as threshold value, and the situation of threshold value or more is set as logical value 1, the feelings smaller than threshold value
Condition is logical value 0, then the absolute value ABS of 6 bits can be correctly obtained with third wavelength X corresponding with third pitch P3 3.
That is, in differential output, with the center (midpoint potential E0) of the amplitude of the signal to float between positive and negative for threshold value, so can
Correctly obtain the logical value of the code length of third wavelength X 3.The code length Yu magnetized area of each logical value and not as a result,
The arrangement pitch of magnetized area is identical, is fixed.Therefore, from absolute value output section 34 export absolute value ABS period and
The period of third increment signal θ C does not have deviation.
As long as in addition, with certain joint slope magnetized area and unmagnetized region in absolute track 23, even if each section
Length away from the magnetized spot on interior relative movement direction X be not it is fixed, also can be with corresponding with third pitch P3
Wavelength lambda 3 correctly obtains the absolute value ABS of 6 bits.Therefore, the magnetization degree of freedom of magnetized area is increased.
Here, magnetoresistive element can generate heat because applying voltage.In addition, magnetoresistive element can change itself because of temperature change
Resistance value.Therefore, increment signal detects the first magnetoresistive element 37 and increment signal detection can be because applying with the second magnetoresistive element 38
Making alive and generate heat.In addition, absolute value detect the first magnetoresistive element 45 and absolute value detection with the second magnetoresistive element 46 understand because
The temperature change on its periphery and change the resistance value of itself.
More specifically, as shown in Fig. 2, in this example, on sensor base plate 12, absolute value detection is first with the first magnetic resistance
Part 45 and absolute value detection (are detected for absolute value with the second magnetic resistance member with the magnetoresistive element in the second magnetoresistive element 46 in this example
Part 46) it is set to and detects the first magnetic closer to increment signal than another magnetoresistive element (absolute value detects the first magnetoresistive element 45)
Resistance element 37 and increment signal detect the position of the second magnetoresistive element 38.To detect the first magnetic resistance close to increment signal
Element 37 and increment signal detect a magnetoresistive element for the second magnetoresistive element 38 (absolute value detects the second magnetoresistive element 46)
Compared with another magnetoresistive element (absolute value detects the first magnetoresistive element 45), temperature rises to obtain higher.In addition, due to the temperature
Variation is increased, the resistance value of a magnetoresistive element (absolute value detects the second magnetoresistive element 46) is (absolutely compared to another magnetoresistive element
To value detect the first magnetoresistive element 45) resistance value increase.As a result, being detected from absolute value defeated with the first magnetoresistive element 45
The differential wave D of the first signal E1 and the second signal E2 exported from absolute value the second magnetoresistive element 46 of detection that go out are upward
Or lower section offset.For example, when absolute value detects the resistance value and absolute value detection the first magnetic resistance member of the second magnetoresistive element 46
When the resistance value of part 45 is compared to increasing, as shown in the dotted line in Fig. 5 (d), differential wave D offsets by offset O upward.
Here, in the case where offset has occurred in differential wave D, logical value is being obtained using midpoint potential E0 as threshold value
When, it will produce the problem of cannot the code length of logical value being correctly set as third wavelength X 3.
For this problem, in this example, as shown in figure 3, absolute value output section 34 has amendment due to temperature change
The temperature adjustmemt portion 50 of the offset of caused differential wave D.
Fig. 7 is the definition graph in temperature adjustmemt portion 50.Temperature adjustmemt portion 50 has sense magnetic direction court on sensor base plate 12
To the second magnetoresistive element 52 of the first magnetoresistive element 51 of temperature adjustmemt and temperature adjustmemt of orthogonal direction Y.In addition, temperature adjustmemt
Portion 50 is also equipped with the use of the temperature adjustmemt with the second magnetoresistive element 52 of the first magnetoresistive element 51 of temperature adjustmemt and temperature adjustmemt
Bridge circuit (the second bridge circuit) 53.
The first magnetoresistive element 51 of temperature adjustmemt and temperature adjustmemt with the second magnetoresistive element 52 by with absolute value detection with the
One magnetoresistive element 45 and absolute value detection are constituted with 46 identical material of the second magnetoresistive element.In this example, these magnetoresistive elements 45,
46,51,52 sense magnetic film is permalloy.Schematically shown in as in Fig. 4, the first magnetoresistive element of temperature adjustmemt
51 are set to that relative movement direction X is upper to be detected with 6 absolute values with the adjacent position of the first magnetoresistive element 45.Temperature adjustmemt is with second
Magnetoresistive element 52 is set to that relative movement direction X is upper to be detected with 6 absolute values with the adjacent position of the second magnetoresistive element 46.Therefore,
The first magnetoresistive element 51 of temperature adjustmemt is in than 6 absolute value detections and is examined closer to 6 absolute values with the second magnetoresistive element 46
Survey the position of the first magnetoresistive element 45.The second magnetoresistive element 52 of temperature adjustmemt is in than 6 absolute values and detects the first magnetic
Resistance element 45 detects the position of the second magnetoresistive element 46 closer to absolute value.
In addition, the resistance value of the first magnetoresistive element 51 of temperature adjustmemt detects the electricity of the first magnetoresistive element 45 than absolute value
Resistance value is big.Equally, the resistance value of the second magnetoresistive element 52 of temperature adjustmemt detects the electricity of the second magnetoresistive element 46 than absolute value
Resistance value is big.As a result, by applying voltage to the first magnetoresistive element 51 of temperature adjustmemt and the second magnetoresistive element 52 of temperature adjustmemt,
Temperature adjustmemt is inhibited to be increased to temperature of the absolute value detection with the first magnetoresistive element 45 or more with the temperature of the first magnetoresistive element 51,
Also, temperature adjustmemt is inhibited to be increased to the temperature that absolute value detects the second magnetoresistive element 46 with the temperature of the second magnetoresistive element 52
More than.
Temperature adjustmemt is connected in series with temperature with bridge circuit 53 between voltage input-terminal Vcc and ground terminal GND
Correct the first magnetoresistive element 51 and the second magnetoresistive element 52 of temperature adjustmemt.From the midpoint 54 of temperature adjustmemt bridge circuit 53
Export the first signal of temperature adjustmemt for being exported from the first magnetoresistive element 51 of temperature adjustmemt and from the second magnetic resistance of temperature adjustmemt
The differential wave for the temperature adjustmemt second signal that element 52 exports, and as temperature adjustmemt with mid-point voltage (in second
Point voltage) T.
Here, temperature adjustmemt makes sense magnetic direction direction with the first magnetoresistive element 51 and temperature adjustmemt with the second magnetoresistive element 52
Orthogonal direction Y.Therefore, temperature adjustmemt can't detect phase with the first magnetoresistive element 51 and temperature adjustmemt with the second magnetoresistive element 52
Variation to the magnetic field of mobile magnetic scale 2.Therefore, the temperature adjustmemt exported from the first magnetoresistive element 51 of temperature adjustmemt is with first
Signal and reflect due to temperature change from the temperature adjustmemt temperature adjustmemt second signal that the second magnetoresistive element 52 exports
The variation of caused resistance value.Then, absolute value output section 34 is exported using from the midpoint 54 of temperature adjustmemt bridge circuit 53
Differential wave (temperature adjustmemt with mid-point voltage T) detect the first magnetoresistive element 45 and absolute value inspection to correct from by absolute value
Survey the differential wave D that the midpoint 48 of each bridge circuit 47 of each group constituted with the second magnetoresistive element 46 exports.More specifically,
Absolute value output section 34 obtains the difference of differential wave D and temperature adjustmemt mid-point voltage T, eliminates in differential wave D due to temperature
Offset caused by degree variation.It, can be by logic as a result, when obtaining logical value from differential wave D as threshold value using midpoint potential E0
The code length of value is correctly set as third wavelength X 3.
Then, phase and first increment signal of the absolute position acquisition unit 35 based on absolute value ABS, third increment signal θ C
The phase of θ A obtains the absolute position of magnetic scale 2.
(absolute position detection action)
When magnetic scale 2 moves, as shown in figure 4, the of the first increment signal output section 31 output first wave length λ 1 (80 μm)
One increment signal θ A, the second increment signal output section 32 export the second increment signal θ B of second wave length λ 2 (100 μm).It is same with this
When, increment signal calculating part 33 is based on the first increment signal θ A and the second increment signal θ 2, obtains third wavelength X 3 (400 μm)
Third increment signal θ C.
In addition, when magnetic scale 2 often moves third pitch P3 (400 μm), absolute value output section 34 just exports absolute value ABS.
That is, absolute value output section 34 all provides absolute value ABS in each period of third increment signal θ C.Therefore, absolute position obtains
The phase for the absolute value ABS, third increment signal θ C that portion 35 can be based on absolute value ABS and the phase of the first increment signal θ A,
Obtain the absolute position of magnetic scale 2.
In this example, based on from the first signal output section 41 the first signal E1 and from second signal output section 42
The differential wave D of second signal E2 obtains absolute value ABS.Differential wave D has the magnetized area and not in absolute pattern 24a
The waveform that the boundary part of magnetized area is inverted without waveform, it is possible to correctly be obtained absolutely based on threshold value (midpoint potential E0)
Value ABS.In addition, in differential wave D, with the center (midpoint potential E0) of the amplitude of the signal to float between positive and negative for threshold
Value, it is possible to correctly obtain the logical value of the code length of third wavelength X 3 as absolute value ABS.
In addition, in this example, utilizing the first magnetoresistive element 51 of temperature adjustmemt come self-induction magnetic direction towards orthogonal direction Y
The first signal of temperature adjustmemt and come self-induction magnetic direction towards the temperature of the second magnetoresistive element 52 of temperature adjustmemt of orthogonal direction Y
The differential wave (temperature adjustmemt mid-point voltage T) of amendment second signal is spent, the from the first signal output section 41 is corrected
The differential wave D of one signal E1 and second signal E2 from second signal output section 42 is eliminated in differential wave D due to temperature
The offset of signal caused by degree variation.Therefore, the logical value of the code length of third wavelength X 3 can correctly be obtained as exhausted
To value ABS.
Here, the first magnetoresistive element 51 of temperature adjustmemt and temperature adjustmemt with the second magnetoresistive element 52 by being detected with absolute value
It is formed with 46 identical material of the second magnetoresistive element with the first magnetoresistive element 45 and absolute value detection.Therefore, because temperature change
Caused absolute value detection is with the variation of the resistance value of magnetoresistive element 45,46 and the temperature adjustmemt magnetic caused by temperature change
The resistance variations of resistance element 51,52 are corresponding.Therefore, as long as being repaiied with the signal of magnetoresistive element 51,52 using from temperature adjustmemt
Just from the absolute value detection signal of magnetoresistive element 45,46, for the letter from absolute value detection with magnetoresistive element 45,46
Number, the displacement of the signal caused by temperature change can be inhibited.
In addition, the first magnetoresistive element 51 of temperature adjustmemt is in the position for detecting the first magnetoresistive element 45 close to absolute value
It sets, the second magnetoresistive element 52 of temperature adjustmemt is in the position that the second magnetoresistive element 46 is detected close to absolute value.Therefore, it is easy
It is corrected with the signal of the first magnetoresistive element 51 since absolute value detects the first magnetoresistive element 45 using from temperature adjustmemt
The variation of first signal E1 caused by temperature change is easy to be repaiied with the signal of the second magnetoresistive element 52 using from temperature adjustmemt
The variation of second signal E2 just caused by the temperature change that absolute value detects the second magnetoresistive element 46.
In turn, in this example, the first magnetoresistive element 51 of temperature adjustmemt and temperature adjustmemt with the second magnetoresistive element 52 by with
Absolute value detects the first magnetoresistive element 45 and absolute value detects 46 identical material (permalloy) structure of the second magnetoresistive element
At.Therefore, permalloy is deposited on sensor base plate to form absolute value detection magnetoresistive element on sensor base plate
45, in 46 process, temperature adjustmemt magnetoresistive element 51,52 can be formed simultaneously.Therefore, it is easy setting temperature adjustmemt portion 50,
It can inhibit the manufacturing cost for temperature adjustmemt portion 50 to be arranged.
Symbol description
1 ... magnetic encoder apparatus (position detecting device), 2 ... magnetic scales, 3 ... magnet sensor arrangements, 12 ... sensor bases
Plate, 21 ... first increment magnetic tracks, the first increments of 21a ... pattern, 22 ... second increment magnetic tracks, the second increments of 22a ... pattern, 23 ...
Absolute track, 24 ... first magnetic tracks, 24a ... absolute patterns, 25 ... second magnetic tracks, 25a ... magnetizing patterns, 31 ... first increments letter
Number output section, 32 ... second increment signal output sections, 33 ... arithmetic processing sections, 34 ... absolute signal output sections, 45 ... absolute values
Detect the first magnetoresistive element (the first magnetoresistive element of magnetic field detection), 46 ... absolute values detect the second magnetoresistive element (magnetic field
Detect the second magnetoresistive element), 47 ... bridge circuits (the first bridge circuit), the first magnetoresistive element of 51 ... temperature adjustmemts,
The second magnetoresistive element of 52 ... temperature adjustmemts, 53 ... temperature adjustmemts bridge circuit (the second bridge circuit), ABS ... absolutely believe
Number, D ... differential waves (the first mid-point voltage), the first signals of E1 ..., E2 ... second signals, GND ... ground terminals, P1 ... first
Pitch, the second pitches of P2 ..., P3 ... thirds pitch, T ... temperature adjustmemts mid-point voltage (the second mid-point voltage), Vcc ... voltages
Input terminal, Y ... orthogonal directions, Z ... relative movements direction, λ 1 ... first wave length, λ 2 ... second wave lengths, λ 3 ... third wavelength.
Claims (7)
1. a kind of position detecting device, which is characterized in that have：
Magnetic scale；And
Magnet sensor arrangement detects the position of the magnetic scale of relative movement,
The magnet sensor arrangement has：Sensor base plate；Magnetic field detection magnetoresistive element makes on the sensor base plate
Sense magnetic direction reads the magnetic scale and output signal towards relative movement direction；And temperature adjustmemt magnetoresistive element,
Make sense magnetic direction towards the orthogonal direction orthogonal with the relative movement direction on the sensor base plate.
2. position detecting device according to claim 1, which is characterized in that
The magnet sensor arrangement comes from the magnetic field detection using the signal correction from the temperature adjustmemt magnetoresistive element
With the signal of magnetoresistive element.
3. position detecting device according to claim 1 or 2, which is characterized in that
Magnetic field detection magnetoresistive element and the temperature adjustmemt are made of with magnetoresistive element identical material.
4. position detecting device described in any one of claim 1 to 3, which is characterized in that
The resistance value of the temperature adjustmemt magnetoresistive element is bigger than the resistance value of the magnetic field detection magnetoresistive element.
5. position detecting device according to any one of claims 1 to 4, which is characterized in that
The second magnetic track that the magnetic scale has the first magnetic track and configured side by side with first magnetic track,
As the magnetic field detection magnetoresistive element, has the magnetic field detection use for reading first magnetic track and exporting the first signal
First magnetoresistive element and reading second magnetic track and the second magnetoresistive element of magnetic field detection for exporting second signal,
As the temperature adjustmemt magnetoresistive element, has and be configured on the sensor base plate than the magnetic field detection with
Two magnetoresistive elements closer to the magnetic field detection position of the first magnetoresistive element the first magnetoresistive element of temperature adjustmemt and
It is configured on the sensor base plate than the magnetic field detection with the first magnetoresistive element closer to the second magnetic of the magnetic field detection
The second magnetoresistive element of the temperature adjustmemt of the position of resistance element.
6. position detecting device according to claim 5, which is characterized in that
There is the magnetic scale absolute track, the absolute track to have magnetized area and unmagnetized region with certain joint slope
Absolute pattern,
The magnet sensor arrangement has the absolute track for the magnetic scale for reading relative movement and exports absolute signal
Absolute signal output section,
The absolute track has first magnetic track and second magnetic track,
First magnetic track has the absolute pattern,
Second magnetic track has what magnetized area and unmagnetized region were arranged on the contrary with the pitch and the absolute pattern
Magnetizing pattern,
The absolute signal output section has：First bridge circuit, the company of series connection between voltage input-terminal and ground terminal
It is connected to the second magnetoresistive element of the first magnetoresistive element of the magnetic field detection and the magnetic field detection；And second bridge circuit,
It is connected in series between the voltage input-terminal and the ground terminal the first magnetoresistive element of the temperature adjustmemt and
The second magnetoresistive element of the temperature adjustmemt,
Based on from the first magnetoresistive element of the magnetic field detection and the magnetic field detection with exported between the second magnetoresistive element
It one mid-point voltage and is exported between the second magnetoresistive element from the temperature adjustmemt with the first magnetoresistive element and the temperature adjustmemt
The second mid-point voltage difference, export the absolute signal.
7. position detecting device according to claim 6, which is characterized in that
The magnetic scale includes with the first increment magnetic track of first increment pattern of the first segment away from formation and with than described
Second increment magnetic track of the second increment pattern that the second pitch of first segment distance is formed,
The magnet sensor arrangement has：Described the of the magnetic scale of relative movement is read in first increment signal output section
One increment magnetic track simultaneously exports and the first increment signal of first wave length of the first segment away from corresponding length；Second increment signal
Output section reads the second increment magnetic track of the magnetic scale of relative movement and exports length corresponding with second pitch
Second increment signal of the second wave length of degree；And arithmetic processing section, increased based on first increment signal and described second
Signal is measured, the third increment signal of the third wavelength for the integral multiple of the first wave length and the second wave length is obtained,
The absolute pattern of the absolute track is formed with the third pitch longer than second pitch,
The absolute signal output section exports the absolute signal of the third wavelength corresponding with the third pitch.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-238010 | 2015-12-04 | ||
| JP2015238010A JP6634277B2 (en) | 2015-12-04 | 2015-12-04 | Position detection device |
| PCT/JP2016/085699 WO2017094828A1 (en) | 2015-12-04 | 2016-12-01 | Position detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108369113A true CN108369113A (en) | 2018-08-03 |
Family
ID=58797370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680070417.2A Withdrawn CN108369113A (en) | 2015-12-04 | 2016-12-01 | position detecting device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6634277B2 (en) |
| CN (1) | CN108369113A (en) |
| WO (1) | WO2017094828A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110608759A (en) * | 2019-09-04 | 2019-12-24 | 上海潜龙电子科技有限公司 | High-precision absolute position measuring system and method |
| CN112781476A (en) * | 2019-11-08 | 2021-05-11 | Tdk株式会社 | Position detecting device |
| CN114858043A (en) * | 2021-02-03 | 2022-08-05 | 日本电产三协株式会社 | Position detecting device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11294003B2 (en) * | 2016-03-23 | 2022-04-05 | Analog Devices International Unlimited Company | Magnetic field detector |
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- 2016-12-01 CN CN201680070417.2A patent/CN108369113A/en not_active Withdrawn
- 2016-12-01 WO PCT/JP2016/085699 patent/WO2017094828A1/en active Application Filing
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| JPS639818A (en) * | 1986-06-30 | 1988-01-16 | Fanuc Ltd | Semiconductor magnetic sensor |
| JPH01270613A (en) * | 1988-04-22 | 1989-10-27 | Hitachi Ltd | Apparatus for magnetically detecting position or speed |
| JPH0377015A (en) * | 1989-08-21 | 1991-04-02 | Aisan Ind Co Ltd | Rotational angle sensor |
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| JP2009002702A (en) * | 2007-06-19 | 2009-01-08 | Mitsutoyo Corp | Absolute position length measuring type encoder |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110608759A (en) * | 2019-09-04 | 2019-12-24 | 上海潜龙电子科技有限公司 | High-precision absolute position measuring system and method |
| CN112781476A (en) * | 2019-11-08 | 2021-05-11 | Tdk株式会社 | Position detecting device |
| CN112781476B (en) * | 2019-11-08 | 2023-02-24 | Tdk株式会社 | Position detecting device |
| CN114858043A (en) * | 2021-02-03 | 2022-08-05 | 日本电产三协株式会社 | Position detecting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6634277B2 (en) | 2020-01-22 |
| WO2017094828A1 (en) | 2017-06-08 |
| JP2017102090A (en) | 2017-06-08 |
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