CN116676560A - Lanthanum dysprosium zirconium cerium thermal barrier coating material and preparation method thereof - Google Patents
Lanthanum dysprosium zirconium cerium thermal barrier coating material and preparation method thereof Download PDFInfo
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- 239000012720 thermal barrier coating Substances 0.000 title claims abstract description 69
- -1 Lanthanum dysprosium zirconium cerium Chemical compound 0.000 title claims abstract description 42
- 239000000463 material Substances 0.000 title claims abstract description 30
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000002184 metal Substances 0.000 claims abstract description 26
- 238000005328 electron beam physical vapour deposition Methods 0.000 claims abstract description 14
- 238000007747 plating Methods 0.000 claims abstract description 14
- 238000001704 evaporation Methods 0.000 claims abstract description 11
- 238000010894 electron beam technology Methods 0.000 claims abstract description 10
- 230000008020 evaporation Effects 0.000 claims abstract description 7
- 238000005516 engineering process Methods 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 claims description 26
- 239000013077 target material Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 12
- 238000010532 solid phase synthesis reaction Methods 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 7
- 229910021193 La 2 O 3 Inorganic materials 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000000498 ball milling Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 230000002194 synthesizing effect Effects 0.000 claims description 5
- 238000011068 loading method Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002344 surface layer Substances 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 abstract description 19
- 238000000576 coating method Methods 0.000 abstract description 19
- 239000013078 crystal Substances 0.000 abstract description 4
- 238000005137 deposition process Methods 0.000 abstract description 3
- 239000011159 matrix material Substances 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 239000012071 phase Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000009991 scouring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910000601 superalloy Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
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Abstract
The invention relates to the technical field of thermal barrier coatings of aeroengines, in particular to a lanthanum dysprosium zirconium cerium thermal barrier coating material and a preparation method thereof, wherein the molecular formula of the thermal barrier coating is (La) 1‑x Dy x ) 2 (Zr 1‑y Ce y ) 2 O 7 Wherein x=0.1 to 0.3 and y=0.1 to 0.5; the electron beam current intensity 2 in the deposition process.0-2.2A; the temperature of the sample is 1000-1050 ℃; the evaporation time is 50-80min; and controlling the evaporation time, and finally obtaining the lanthanum dysprosium zirconium cerium thermal barrier coating on the rotating sample. The thermal barrier coating material has a thermal expansion coefficient which is close to that of YSZ, has lower thermal conductivity, and simultaneously, the lanthanum dysprosium zirconium cerium thermal barrier coating prepared by utilizing an electron beam physical vapor deposition technology can have a unique columnar crystal structure; simultaneously, a vacuum arc plating device prepares NiCrAlHfTa as a metal bottom layer of the thermal barrier coating, so that the overall matching property of the coating material is improved; the invention can reduce the heat conductivity of the coating, improve the service temperature of the coating, and solve the problems of insufficient service life and low thermal expansion coefficient of the coating.
Description
Technical Field
The invention belongs to the technical field of thermal barrier coatings of aeroengines, and relates to a lanthanum dysprosium zirconium cerium thermal barrier coating material and a preparation method thereof.
Background
At present, with the continuous improvement of the thrust and the working efficiency of a gas turbine, the gas inlet temperature is also higher and higher, and the working temperature of nickel-based superalloy used by turbine blades and other hot end components is gradually approaching the use temperature limit. The thermal barrier coating (Thermal Barrier Coatings, TBCs) is a surface protection technology for compounding a ceramic material with a metal matrix in a coating mode by utilizing the high temperature resistance, scouring resistance, corrosion resistance and low thermal conductivity of the ceramic material, so as to improve the working temperature of the metal component, enhance the high temperature resistance of the hot end component, prolong the service life of the hot end component and improve the working efficiency of an engine.
Currently, the widely used YSZ (6-8 wt.% Y) 2 O 3 Partially stabilized ZrO 2 ) The long-term maximum service temperature of the thermal barrier coating material cannot exceed 1200 ℃, and volume expansion occurs due to monoclinic phase generation caused by phase change during cooling, thereby leading to coating failure. The metal bonding layer is one of key components in the thermal barrier coating system, can relieve the mismatch of the thermal expansion coefficients of the ceramic coating and the matrix alloy, is used as an intermediate layer of the ceramic surface layer and the matrix alloy, and can improve the thermophysical compatibility of the coating and the matrix alloy. The alloy element component of the metal bonding layer has decisive effect on the growth rate, the component, the integrity and the bonding force with the matrix and the failure behavior of the thermal oxide of the metal bonding layer in the service process. The prepared metal is bondedThe layer should not form brittle phases and should form good interfacial diffusion resistance with the metal matrix to reduce degradation of the oxidation resistance of the matrix alloy and metal bond layer during service. Wherein, the MCrAIY metal bonding layer has excellent oxidation resistance, corrosion resistance and mechanical properties. The most important of the coated MCrAlY coating is alloy element control. The main principle of the component selection of the MCrAIY coating is to see whether a layer of continuous and compact protective film with low growth rate, good adhesion can be formed in the high-temperature service process. Thereby further improving the binding force of the metal binding layer and the matrix alloy and the service life of the thermal barrier coating under the thermal cycle condition. However, the long-term service temperature of the thermal barrier coating materials of the next generation of high performance aeroengines must exceed 1200 ℃. Therefore, research on novel thermal barrier coating materials and metal bonding layer materials and preparation technology thereof further improves service temperature, oxidation resistance and bonding strength of the thermal barrier coating, and becomes a key subject for developing next-generation high-performance aeroengines.
Disclosure of Invention
The purpose of the invention is that: the lanthanum dysprosium zirconium cerium thermal barrier coating material and the preparation method thereof are designed and provided aiming at the defects of the prior art, and the problems that the service life of a single lanthanum zirconate thermal barrier coating is insufficient and the service temperature of YSZ is not higher than 1200 ℃ are solved by doping and modifying rare earth at A site and B site, the thermal conductivity of the material is reduced, and the thermal expansion coefficient of the material is improved. Meanwhile, the NiCrAlHfTa is prepared by the vacuum arc plating equipment and used as a metal bottom layer of the thermal barrier coating, so that the overall matching property and the service life of the coating system are further improved.
In order to solve the technical problem, the technical scheme of the invention is as follows:
in one aspect, a lanthanum dysprosium zirconium cerium thermal barrier coating material is provided, wherein the lanthanum dysprosium zirconium cerium thermal barrier coating material has a chemical formula (La) 1-x Dy x ) 2 (Zr 1-y Ce y ) 2 O 7 Wherein x=0.1 to 0.3 and y=0.1 to 0.5;
the molecular formula of the metal bottom layer of the thermal barrier coating is NiCrAlHfTa; the thickness of the thermal barrier coating: 150-250 micrometers, metal underlayer thickness: 40-80 microns; the thermal barrier coating metal bottom layer is prepared by adopting a vacuum arc plating technology; the thermal barrier coating ceramic surface layer is prepared by evaporating a lanthanum dysprosium zirconium cerium thermal barrier target material through electron beam physical vapor deposition.
In another aspect, a method for preparing the lanthanum dysprosium zirconium cerium thermal barrier coating is provided, the method comprising the steps of:
step one, raw material La 2 O 3 、Dy 2 O 3 、ZrO 2 、CeO 2 Mixing according to the molecular formula ratio of the materials, and synthesizing lanthanum dysprosium zirconium cerium target material by a high-temperature solid phase method at 1800-2000 ℃;
preparing a metal bottom layer of the NiCrAlHfTa serving as a thermal barrier coating by adopting vacuum arc plating equipment, wherein the voltage is 600-650V, and the current is 15-20A;
and thirdly, loading the lanthanum dysprosium zirconium cerium target material into electron beam physical vapor deposition equipment, evaporating the lanthanum dysprosium zirconium cerium target material through an electron beam, preparing a lanthanum dysprosium zirconium cerium thermal barrier coating on a NiCrAlHfTa bottom layer, wherein the beam intensity of the electron beam is 2.0-2.2A, and the temperature of a sample is 1000-1050 ℃.
The most critical process parameters of the electron beam physical vapor deposition in the technical scheme of the invention are as follows: the parameters of the scheme can be adopted to achieve the aim of improving the bonding strength of the coating.
Step one raw material La 2 O 3 、Dy 2 O 3 、ZrO 2 、CeO 2 The purity of the product is more than or equal to 98 percent.
The step one of raw material mixing is mechanical ball milling, and the time is more than or equal to 24 hours; the high-temperature solid phase method synthesis time is more than or equal to 24 hours.
Vacuum degree of the vacuum arc plating equipment in the second step<1×10 -2 Pa; the deposition time is more than or equal to 100min.
Vacuum degree of electron beam physical vapor deposition equipment in the third step<5×10 -2 Pa; the evaporation time of the thermal barrier coating is 50-80min; and cooling the electron beam physical vapor deposited thermal barrier coating to below 150 ℃ along with the furnace, wherein the cooling is natural cooling.
The beneficial effects of the invention are as follows: the lanthanum dysprosium zirconium cerium thermal barrier coating material disclosed by the invention is used as a novel thermal barrier coating material, has no phase change after high-temperature long-term heat treatment, and has very high phase stability. Their thermal expansion coefficients are relatively close to YSZ, and have lower thermal conductivity and better fracture toughness. Meanwhile, the lanthanum dysprosium zirconium cerium thermal barrier coating is prepared by utilizing an electron beam physical vapor deposition technology, the lanthanum dysprosium zirconium cerium thermal barrier coating has a unique columnar crystal structure through electron beam control, and simultaneously NiCrAlHfTa is prepared by vacuum arc plating equipment to serve as a metal bottom layer of the thermal barrier coating, and the coating has good thermal cycle performance through current and voltage control.
Drawings
FIG. 1 is a schematic view of the thermal conductivity of example 2;
FIG. 2 is a schematic diagram of the thermal expansion coefficient of example 2;
FIG. 3 is a schematic diagram of thermal life of example 2;
FIG. 4 is a schematic diagram of the columnar crystal structure according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without making any inventive effort are intended to fall within the scope of the present invention.
Features of various aspects of embodiments of the invention are described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without these specific details. The following description of the embodiments is merely for a better understanding of the invention by showing examples of the invention. The present invention is not limited to any particular arrangement and method provided below, but covers any modifications, substitutions, etc. of all product constructions, methods, and the like covered without departing from the spirit of the invention.
Well-known structures and techniques have not been shown in detail in the various drawings and the following description in order not to unnecessarily obscure the present invention.
Lanthanum dysprosium zirconium cerium thermal barrier coating material, wherein the chemical molecular formula of the lanthanum dysprosium zirconium cerium thermal barrier coating material is (La 1- x Dy x ) 2 (Zr 1-y Ce y ) 2 O 7 Wherein x=0.1 to 0.3 and y=0.1 to 0.5.
The preparation method of the lanthanum dysprosium zirconium cerium thermal barrier coating material coating comprises the following steps:
by mixing La as raw material 2 O 3 、Dy 2 O 3 、ZrO 2 、CeO 2 Mixing according to the molecular formula ratio of the materials, wherein the purity of the raw materials is more than or equal to 98%, and the mixing mode is mechanical ball milling for more than or equal to 24 hours; synthesizing lanthanum dysprosium zirconium cerium target material by a high-temperature solid phase method, wherein the synthesis temperature is 1800-2000 ℃ and the synthesis time is more than or equal to 24 hours; vacuum arc plating equipment is adopted to prepare NiCrAlHfTa as a metal bottom layer of the thermal barrier coating, and the vacuum degree is high<1×10 -2 Pa, the voltage is 600-650V, the current is 15-20A, and the deposition time is more than or equal to 100min; filling the prepared target material into electron beam physical vapor deposition equipment, and vacuum degree<5×10 -2 P, the beam intensity of the electron beam is 2.0-2.2A, the evaporation time is 50-80min, the thermal barrier coating is prepared, and the thermal barrier coating is naturally cooled to below 150 ℃ along with a furnace.
To illustrate (La 1-x Dy x ) 2 (Zr 1-y Ce y ) 2 O 7 The effect of Dy and Ce content in the material on thermal life several material synthesis examples were made, the Dy and Ce content of which are shown in table 1. It can be seen that the rare earth modified coating system has better thermal life.
TABLE 1
| Sequence number | Chemical formula | Thermal life (h) |
| 1 | (La 0.9 Dy 0.1 ) 2 (Zr 0.7 Ce 0.3 ) 2 O 7 | 750 |
| 2 | (La 0.8 Dy 0.2 ) 2 (Zr 0.5 Ce 0.5 ) 2 O 7 | 980 |
| 3 | (La 0.7 Dy 0.3 ) 2 (Zr 0.9 Ce 0.1 ) 2 O 7 | 650 |
| 4 | (La 0.8 Dy 0.2 ) 2 (Zr 0.3 Ce 0.7 ) 2 O 7 | 700 |
| 5 | (La 0.9 Dy 0.1 ) 2 (Zr 0.1 Ce 0.9 ) 2 O 7 | 600 |
Example 1:
the preparation method comprises the following steps: the chemical molecular formula of the lanthanum dysprosium zirconium cerium thermal barrier coating material is (La) 0.9 Dy 0.1 ) 2 (Zr 0.7 Ce 0.3 ) 2 O 7 Weighing raw material La 2 O 3 、Dy 2 O 3 、ZrO 2 、CeO 2 。
And (3) carrying out high-temperature solid phase synthesis: mechanically ball-milling the raw materials for 30 hours, and synthesizing lanthanum-dysprosium-zirconium-cerium targets by a 1900 ℃ high-temperature solid phase method for 30 hours;
(3) Preparing a bottom layer: vacuum arc plating equipment is adopted to prepare NiCrAlHfTa as a metal bottom layer of the thermal barrier coating, and the vacuum degree is high<1×10 -2 Pa, the voltage is 625V, the current is 18A, and the deposition time is 150min;
(4) Preparing a thermal barrier coating: and loading the lanthanum dysprosium zirconium cerium target material into electron beam physical vapor deposition equipment. Deposition process parameters: vacuum degree<5×10 -2 Pa, the electron beam intensity is 2.1A, the evaporation time is 70min, and after cooling to below 100 ℃, the deposition equipment is opened to obtain the lanthanum dysprosium zirconium cerium thermal barrier coating.
The thermal conductivity of the prepared lanthanum dysprosium zirconium cerium thermal barrier coating is 1.12W/(mK) at the temperature of 1000 ℃; the thermal expansion coefficient is 10.56 multiplied by 10 -6 K -1 The method comprises the steps of carrying out a first treatment on the surface of the The bonding strength is 50MPa; the thermal life was 750 hours.
Example 2:
the preparation method comprises the following steps: the chemical molecular formula of the lanthanum dysprosium zirconium cerium thermal barrier coating material is (La) 0.8 Dy 0.2 ) 2 (Zr 0.5 Ce 0.5 ) 2 O 7 Weighing raw material La 2 O 3 、Dy 2 O 3 、ZrO 2 、CeO 2 。
And (3) carrying out high-temperature solid phase synthesis: mechanically ball-milling raw materials for 36h, and synthesizing lanthanum dysprosium zirconium cerium target materials by a high-temperature solid phase method at 2000 ℃ for 36h;
(3) Preparing a bottom layer: vacuum arc plating equipment is adopted to prepare NiCrAlHfTa as a metal bottom layer of the thermal barrier coating, and the vacuum degree is high<1×10 -2 Pa, the voltage is 650V, the current is 20A, and the deposition time is 125min;
(4) Preparing a thermal barrier coating: and loading the lanthanum dysprosium zirconium cerium target material into electron beam physical vapor deposition equipment. Deposition process parameters: vacuum degree<5×10 -2 Pa, electron beam intensity 2.0A, evaporation time 60min, cooling to below 100deg.CAnd then, opening the deposition equipment to obtain the lanthanum dysprosium zirconium cerium thermal barrier coating.
The thermal conductivity of the prepared lanthanum dysprosium zirconium cerium thermal barrier coating is 1.02W/(mK) at the temperature of 1000 ℃; coefficient of thermal expansion of 10.68X10 -6 K -1 The method comprises the steps of carrying out a first treatment on the surface of the The bonding strength is 55MPa; the thermal life was 980 hours.
As shown in fig. 4, the (La 1-x Dy x ) 2 (Zr 1-y Ce y ) 2 O 7 The thermal barrier coating can have a unique columnar crystal structure, and simultaneously, the NiCrAlHfTa is prepared by adopting a vacuum arc plating method to serve as a metal bottom layer of the thermal barrier coating, so that the overall matching property of a coating material is improved, and the thermal barrier coating has good thermal cycle performance. From fig. 1 and fig. 2, it can be seen that in the design of the coating, the uniform coating structure is obtained by composite doping modification of rare earth elements at the A site and the B site. As can be seen from FIG. 1, the thermal conductivity of the lanthanum dysprosium zirconium cerium coating at 1000 ℃ is 1.02W/(mK), which is reduced by 50% compared with the conventional YSZ. As can be seen from fig. 3, the life of the lanthanum dysprosium zirconium cerium coating is improved by 40% compared with the conventional YSZ.
Claims (10)
1. A lanthanum dysprosium zirconium cerium thermal barrier coating material is characterized in that:
the chemical molecular formula of the lanthanum dysprosium zirconium cerium thermal barrier coating material is (La) 1-x Dy x ) 2 (Zr 1-y Ce y ) 2 O 7 Wherein x=0.1 to 0.3 and y=0.1 to 0.5;
the molecular formula of the metal bottom layer of the thermal barrier coating is NiCrAlHfTa;
the thickness of the thermal barrier coating: 150-250 micrometers, metal underlayer thickness: 40-80 microns;
the thermal barrier coating metal bottom layer is prepared by adopting a vacuum arc plating technology;
the thermal barrier coating ceramic surface layer is prepared by evaporating a lanthanum dysprosium zirconium cerium thermal barrier target material through electron beam physical vapor deposition.
2. The method for preparing the lanthanum dysprosium zirconium cerium thermal barrier coating according to claim 1, which is characterized by comprising the following steps: the preparation method comprises the following steps:
step one, raw material La 2 O 3 、Dy 2 O 3 、ZrO 2 、CeO 2 Mixing according to the molecular formula ratio of the materials, and synthesizing lanthanum dysprosium zirconium cerium target material by a high-temperature solid phase method at 1800-2000 ℃;
preparing a metal bottom layer of the NiCrAlHfTa serving as a thermal barrier coating by adopting vacuum arc plating equipment, wherein the voltage is 600-650V, and the current is 15-20A;
and thirdly, loading the lanthanum dysprosium zirconium cerium target material into electron beam physical vapor deposition equipment, evaporating the lanthanum dysprosium zirconium cerium target material through an electron beam, preparing a lanthanum dysprosium zirconium cerium thermal barrier coating on a NiCrAlHfTa bottom layer, wherein the beam intensity of the electron beam is 2.0-2.2A, and the temperature of a sample is 1000-1050 ℃.
3. The preparation method according to claim 2, characterized in that: the step one is that the raw material La 2 O 3 、Dy 2 O 3 、ZrO 2 、CeO 2 The purity of the product is more than or equal to 98 percent.
4. The preparation method according to claim 2, characterized in that: the step one of raw material mixing is mechanical ball milling, and the time is more than or equal to 24 hours.
5. The preparation method according to claim 2, characterized in that: the synthesis time of the step one high-temperature solid phase method is more than or equal to 24 hours.
6. The preparation method according to claim 2, characterized in that: vacuum degree of the vacuum arc plating equipment in the second step<1×10 -2 Pa。
7. The preparation method according to claim 2, characterized in that: and in the second step, the deposition time of the vacuum arc plating equipment is more than or equal to 100min.
8. According to claimThe preparation method of claim 2, which is characterized in that: vacuum degree of electron beam physical vapor deposition equipment in the third step<5×10 -2 Pa。
9. The preparation method according to claim 2, characterized in that: and in the third step, the evaporation time of the electron beam physical vapor deposition thermal barrier coating is 50-80min.
10. The preparation method according to claim 2, characterized in that: and in the third step, the electron beam physical vapor deposition thermal barrier coating is cooled to be below 150 ℃ along with the furnace, and the cooling is natural cooling.
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