CN116657121A

CN116657121A - Calibration method and calibration device for pressure control equipment of process chamber and semiconductor process equipment

Info

Publication number: CN116657121A
Application number: CN202310644216.0A
Authority: CN
Inventors: 杜传正; 郑文宁; 邹义涛
Original assignee: Beijing Sevenstar Flow Co Ltd
Current assignee: Beijing Sevenstar Flow Co Ltd
Priority date: 2023-06-01
Filing date: 2023-06-01
Publication date: 2023-08-29

Abstract

The invention provides a calibration method and a calibration device of process chamber pressure control equipment and semiconductor process equipment, which are used for calibrating a reference position, wherein the calibration method comprises the following steps: when the voltage control equipment is powered on again after power off, acquiring shutdown opening data of the valve before power on; determining the current opening of the valve according to the shutdown opening data; calculating a target adjustment value of the operation parameter of the driving motor corresponding to the current opening reaching a preset opening from the opening of the valve; and controlling the operation parameters of the driving motor to reach the target adjustment values, so that the valve plate moves to a reference position corresponding to the preset opening. When the calibration method is used for calibrating the reference position, a photoelectric switch is not required to be arranged, so that the problem that calibration cannot be performed due to damage of the photoelectric switch is fundamentally solved, and the reliability of the calibration method is high.

Description

Calibration method and calibration device for pressure control equipment of process chamber and semiconductor process equipment

Technical Field

The invention relates to the field of semiconductor manufacturing, in particular to a calibration method and device of pressure control equipment of a process chamber and semiconductor process equipment, which are used for calibrating a reference position.

Background

The process of preparing a semiconductor is generally completed in a process chamber having an inlet and an outlet, and a gas source is in communication with the inlet to introduce a process gas for a reaction and an inert gas for assisting the reaction into the process chamber, and exhaust gas and the inert gas generated by the reaction are exhausted from the outlet.

The semiconductor processing apparatus further includes a pressure control apparatus for maintaining a constant gas pressure within the process chamber. Specifically, the pressure control device comprises a valve, a controller, a pressure detector and a driving motor, wherein the pressure detector is connected with the controller, the pressure detector is used for detecting the air pressure value in the process chamber, and the controller sends a signal to the driving motor according to the air pressure value detected by the pressure detector so that the driving motor drives a valve plate of the valve to move to adjust the opening of the valve, thereby realizing the regulation and control of the air pressure in the process chamber. Because the valve plate may be located at any position when the pressure control device is powered off, that is, the valve opening is any value, in order to realize accurate adjustment of the valve opening, it is crucial that the valve plate finds a reference position when the pressure control device is powered on again after power off, and the valve opening corresponding to the valve plate at the reference position is a known value.

Currently, the reference position is usually a zero position (i.e. a position when the valve opening is 0%), the zero position is calibrated by adopting a photoelectric switch, specifically, the photoelectric switch is used as a reference point, when the valve plate is located at the installation position of the photoelectric switch, the corresponding valve opening is known, and then the distance from the installation position of the photoelectric switch to the zero position of the valve plate is a known distance. When the pressure control equipment of the process chamber is powered off and then is powered on again, the controller firstly controls the driving motor to drive the valve plate to move, when the photoelectric switch is triggered, a signal is generated and sent to the controller, the controller controls the driving motor to drive the valve plate to move reversely for a known distance, the valve plate reaches a zero position, and then the zero position is used as a reference position to adjust the opening of the valve.

However, the photoelectric switch is easily damaged by the strict process environment of the process chamber, so that the reliability of calibrating the reference position of the pressure control device by adopting the above manner is low.

Disclosure of Invention

The invention aims at solving at least one of the technical problems in the prior art, and provides a calibration method and device for pressure control equipment of a process chamber and semiconductor process equipment.

In order to achieve the object of the present invention, there is provided a calibration method of a pressure control apparatus for a process chamber, for calibrating a reference position, the pressure control apparatus including a driving motor and a valve for adjusting the air pressure of the process chamber, the calibration method comprising:

When the voltage control equipment is powered on again after power off, acquiring shutdown opening data of the valve before power on;

determining the current opening of the valve according to the shutdown opening data;

calculating a target adjustment value of the operation parameter of the driving motor corresponding to the current opening reaching a preset opening from the opening of the valve;

and controlling the operation parameters of the driving motor to reach the target regulating values, so that the valve plate of the valve moves to the reference position corresponding to the preset opening.

The calibration method as described above, wherein when the voltage control device is powered up again after power-off, the acquiring the shutdown opening data of the valve before power-up includes:

judging whether shutdown opening data of the valve before power-on is stored or not when the power-on is restarted after the power-off of the pressure control equipment;

and if the shutdown opening data are stored, acquiring the shutdown opening data of the valve before power-on.

The calibration method as described above, wherein the determining whether the shutdown opening data of the valve before power-up is stored includes:

judging whether historical opening data of the valve in a historical period are stored or not; wherein the history period includes a power-off time;

If the historical opening degree data of the valve is stored, judging whether the shutdown opening degree data can be determined according to the historical opening degree data.

The calibration method as described above, wherein when the voltage control device is powered up again after power-off, determining whether the shutdown opening data of the valve before power-up is stored or not further includes:

if the shutdown opening data is not stored, controlling the valve plate to move along a first direction at a first speed;

judging whether the valve plate reaches mechanical limit;

when the valve plate reaches the mechanical limit, controlling the valve plate to move from the mechanical limit to the reference position along a second direction at a second speed; wherein the first direction is opposite to the second direction.

The calibration method as described above, wherein the determining whether the valve plate reaches the mechanical limit includes:

detecting the actual running quantity and the control request running quantity of the driving motor in real time;

judging whether the difference value between the actual operation quantity and the control request operation quantity is larger than a preset threshold value or not;

and when the difference value is larger than a preset threshold value, judging that the valve plate reaches mechanical limit.

The calibration method as described above, wherein when the difference is greater than a preset threshold, determining that the valve plate reaches a mechanical limit includes:

And when a plurality of difference values in the preset time period are larger than the preset threshold value, judging that the valve plate reaches the mechanical limit.

The calibration method as described above, wherein the first speed is less than the second speed.

if the shutdown opening data is not stored, controlling a timer to start timing;

when the timing duration reaches the set period, the valve plate does not move to the mechanical limit, and alarm information is sent out, wherein the alarm information is used for prompting calibration failure.

The calibration method is characterized in that the set time period is the product of the standard time length and the gain coefficient;

the standard time length is the time length required by the valve plate to move from the full-closed position to the full-open position at a first speed, and the gain coefficient is greater than or equal to 1.

when the voltage control equipment is powered up again after power failure, judging whether the voltage control equipment is powered up again for the first time after power failure;

If the voltage control equipment is powered on again for the first time after power failure, controlling the voltage control equipment to enter a reference position calibration mode;

and when the pressure control equipment enters the reference position calibration mode, acquiring shutdown opening data of the valve before power-on.

According to the calibration method, if the voltage control device is powered up again for the first time after power failure, the voltage control device is controlled to enter a reference position calibration mode, and then the calibration method further comprises the following steps:

in response to receiving the mode selection signal, determining that the reference position calibration mode is any one of a valve opening calibration mode and a valve closing calibration mode;

when the reference position calibration mode is a valve opening calibration mode, controlling the valve plate to increase in the process of moving to the reference position corresponding to the preset opening;

when the reference position calibration mode is a valve closing calibration mode, controlling the valve plate to move to the preset opening corresponding to the reference position, wherein the opening of the valve is reduced.

The calibration method as described above, wherein the preset opening degree is 0%,

after the valve plate moves to the reference position corresponding to the preset opening, the method further comprises the following steps:

And controlling the valve plate to move from the reference position to a specific position corresponding to a specific opening, wherein the specific opening is preset to be more than 0%.

As another technical scheme, the present invention also provides a calibration device for a pressure control apparatus of a process chamber, where the pressure control apparatus includes a driving motor and a valve for adjusting the air pressure of the process chamber, and the calibration device includes: a memory and at least one controller;

the memory is used for storing program instructions;

the controller is used for realizing the calibration method of the pressure control equipment of the process chamber provided by any one of the embodiments of the invention when the program instructions are executed.

As still another technical scheme, the invention also provides a semiconductor process device, which comprises a process chamber, a pressure control device and the calibration device of the pressure control device of the process chamber, wherein the pressure control device of the process chamber comprises a driving motor and a valve for adjusting the air pressure of the process chamber, the driving motor is used for driving a valve plate of the valve to move, and the calibration device calibrates the reference position of the valve plate of the valve.

The invention has the following beneficial effects:

according to the calibration method, the calibration device and the semiconductor process equipment of the process chamber pressure control equipment, the reference position is calibrated by utilizing the storage function and relying on the stored shutdown opening data, and a photoelectric switch is not needed, so that on one hand, the photoelectric switch is omitted, the structure of the process chamber is facilitated to be simplified, on the other hand, the problem that the calibration cannot be performed due to the fact that the photoelectric switch is damaged is fundamentally solved, and the reliability of the calibration method is high.

Drawings

Fig. 1 is a schematic view of a calibration method of a pressure control device of a process chamber according to an embodiment of the present application;

FIG. 2 is a schematic view of a calibration method according to another embodiment of the present application;

FIG. 3 is a schematic flow chart of a calibration method of a pressure control device for a process chamber according to an embodiment of the present application;

FIG. 4 is a schematic flow chart of another calibration method of a pressure control device for a process chamber according to an embodiment of the present application;

FIG. 5 is a schematic diagram of a calibration method shown in FIG. 4;

FIG. 6 is a schematic diagram of another principle of the calibration method shown in FIG. 4;

FIG. 7 is a schematic flow chart of a calibration method of a pressure control device for a process chamber according to an embodiment of the present application;

fig. 8 is a schematic structural diagram of a calibration device for a pressure control apparatus of a process chamber according to an embodiment of the present application.

Detailed Description

In order to enable those skilled in the art to better understand the technical scheme of the application, the method and the device for calibrating the pressure control equipment of the process chamber provided by the application are described in detail below with reference to the accompanying drawings.

At present, when the photoelectric switch is adopted to find the zero position of the valve plate, the photoelectric switch is easy to damage and lose efficacy, so that the zero position of the valve plate cannot be found, and therefore, in the subsequent process, the opening of the valve cannot be accurately regulated, and the pressure of the process chamber cannot be accurately regulated.

In view of this, the inventors contemplate setting other reference positions, the distance between which and the zero position is known, controlling the movement of the valve plate when the photoelectric switch is damaged, until it is detected that the valve plate moves to the reference position, and then controlling the valve plate to move from the reference position to the zero position, so as to achieve the return-to-zero of the valve plate. In particular, the reference position can be designed as an extreme position of the valve plate. The inventor of the application finds that when the valve plate moves to the limit position, if the driving motor still works, at the moment, the valve plate does not move any more, and the driving motor is blocked to cause current increase. Based on this finding, the inventors have conceived to devise a way of detecting the movement of the valve plate to the limit position by monitoring the current value of the drive motor and determining that the valve plate moves to the limit position when the current value of the drive motor increases to a preset threshold value.

Further, the inventors have found that in this way, the problem of failure of the return to zero of the valve plate due to damage to the photoelectric switch is not essentially solved. In order to detect whether the valve plate moves to the limit position, an additional detection circuit is required to monitor the current, which results in complicated equipment circuit.

Therefore, the inventor finally thinks that the historical opening data stored before the power failure of the pressure control equipment is utilized to determine the opening of the valve when the valve is stopped, and then the opening of the valve is controlled to be adjusted to the preset opening from the opening when the valve is stopped, so that the valve plate of the valve moves to the reference position corresponding to the preset opening, and therefore, a photoelectric switch is not required to be arranged, and the problem of zero return failure caused by the damage of the photoelectric switch is solved. Based on the technical conception, the embodiment of the application provides a calibration method and device for pressure control equipment of a process chamber and semiconductor process equipment. Here, the type of reaction of the semiconductor process that the process chamber may perform is not limited to atomic layer deposition, but may be Chemical Vapor Deposition (CVD).

Fig. 1 is a schematic view of a process chamber pressure control device calibration method according to an embodiment of the present application. Referring to fig. 1, the process chamber 100 includes a cavity 110, a gas source 130, a gas inlet channel 140, a gas outlet channel 150, a vacuum pump 160 and a pressure control device 120, wherein an inflow port of the gas inlet channel 140 is communicated with the gas source 130 disposed outside the cavity 110, an outflow port 112 of the gas inlet channel 140 is communicated with the interior of the cavity 110, and the gas source 130 is used for introducing process gas and inert gas into the interior of the cavity 110 through the gas inlet channel 140. The inflow port 111 of the exhaust flow channel 150 is communicated with the interior of the cavity 110, the outflow port of the exhaust flow channel 150 is connected with a vacuum pump 160 arranged outside the cavity 110, and the vacuum pump 160 is used for driving the gas in the interior of the cavity 110 to be discharged outside the cavity 110 along the exhaust flow channel 150.

The pressure control device 120 is used to maintain the gas pressure in the process chamber 100 constant. Specifically, the pressure control device 120 includes a valve, a controller 121, and a pressure detector 122 and a driving motor 123 connected to the controller 121, where the valve includes a valve plate 124, the valve plate 124 is movable relative to the cavity 110, the pressure detector 122 is used to detect a pressure value in the process chamber 100, the controller 121 is used to control the driving motor 123 according to the pressure value detected by the pressure detector 122, and the driving motor 123 is used to drive the valve plate 124 to reciprocate relative to the cavity 110 to adjust the opening degree, so as to regulate the pressure in the process chamber 100.

In some embodiments, the drive motor 123 may be used to provide linear power. Alternatively, in other possible embodiments, the driving motor 123 may be used to provide rotational power, where the pressure control apparatus 120 further includes a transmission 125, and the transmission 125 is configured to transmit the rotational power of the driving motor 123 to the valve plate 124, so that the valve plate 124 moves. The following description will be given by taking the driving motor 123 as an example for providing rotational power, and a calibration method when the driving motor 123 provides linear power will be obvious to those skilled in the art after reading the following technical solutions.

In one particular example, as shown in FIG. 1, a valve may be used to regulate the flow of the exhaust runner 150. Specifically, the valve plate 124 may be disposed at the inflow port 111 of the exhaust flow channel 150, and the valve plate 124 may be linearly movable with respect to the cavity 110 to open and close the inflow port 111 of the exhaust flow channel 150. The valve is not limited to adjusting the flow rate of the exhaust runner 150, and in the example shown in fig. 2, the valve may also be used to adjust the flow rate of the intake runner 140. Specifically, the valve plate 124 may be disposed at the outflow port 112 of the intake runner 140, and the valve plate 124 may be linearly movable with respect to the cavity 110 to open and close the outflow port 112 of the intake runner 140. Fig. 2 is a schematic view of a scenario of another calibration method according to an embodiment of the present application.

It should be noted that, depending on whether the valve is used to adjust the flow rate of the exhaust flow channel 150 or the flow rate of the intake flow channel 140, the pressure control device 120 controls the valve plate 124 to move to adjust the opening degree of the valve, and the variation of the air pressure in the cavity 110 is different. Specifically, in the example shown in fig. 1, when the valve plate 124 moves to increase the opening degree of the valve, the air pressure in the chamber 110 gradually decreases; conversely, when the valve plate 124 moves to reduce the opening of the valve, the air pressure in the cavity 110 gradually increases. In the example shown in fig. 2, when the valve plate 124 moves to increase the opening degree of the valve, the air pressure in the chamber 110 gradually increases; conversely, when the valve plate 124 moves to reduce the opening of the valve, the air pressure in the chamber 110 gradually decreases.

Based on the application scene architecture, the embodiment of the application provides a calibration method of pressure control equipment of a process chamber, which is used for calibrating the reference position of a valve plate. It should be understood that the calibration method may be performed by a calibration device (hereinafter, simply referred to as a "calibration device") of a process chamber pressure control apparatus, such as a semiconductor process apparatus, or by an electronic device capable of controlling the calibration device, such as a terminal or a server.

Fig. 3 is a schematic flow chart of a calibration method of a pressure control device for a process chamber according to an embodiment of the present application. Referring to fig. 3, the calibration method mainly includes the following steps:

Step S101: and when the voltage control equipment is powered on again after power off, acquiring shutdown opening data of the valve before power on.

Step S102: and determining the current opening of the valve according to the shutdown opening data.

Step S103: and calculating a target regulating value of the operation parameter of the driving motor corresponding to the preset opening degree from the current opening degree of the valve.

Step S104: and controlling the operation parameters of the driving motor to reach target adjustment values, so that the valve plate of the valve moves to a reference position corresponding to the preset opening.

The opening is used for representing the opening proportion of the valve, and the opening of the valve is 0% -100%. The situation that the voltage control device is powered off should be understood in a broad sense, for example, it may be understood that the voltage control device is powered off due to a fault, or that the voltage control device is powered off due to exhaustion of electric quantity or occurrence of abnormality of a power source for supplying power to the voltage control device, or that a maintainer powers off the voltage control device to be able to detach the voltage control device for maintenance. Because the valve plate is located at random when the voltage control equipment is powered off, when the voltage control equipment is powered on again after the power off, the valve opening is not necessarily 0% at the moment even though the valve plate is not moved, and the current opening of the valve is unknown, so that the reference position needs to be calibrated.

The purpose of step S101 is to obtain the shutdown opening data of the valve before the voltage control device is powered off.

It should be understood that when the rotation angle of the motor shaft of the driving motor is a determined value, the displacement amount of the valve plate is determined, the position of the valve plate is also unique, and the opening degree of the valve can be uniquely determined. Therefore, there is a mapping relation between the operation parameter of the driving motor and the displacement amount of the valve plate and the opening degree of the valve, and the operation parameter of the driving motor and the displacement amount of the valve plate can be converted into the opening degree of the valve.

The process chamber is provided with a detection device and a memory, when the pressure control equipment is electrified, the detection device can detect the operation parameters of the driving motor or the displacement of the valve plate, and the operation parameters of the driving motor or the displacement of the valve plate are converted into corresponding opening data and stored in the memory. Step S101 may specifically be to acquire the stop opening degree data from the memory. The memory may be a controller of the voltage control device, and in this case, the shutdown opening data is specifically obtained from the content stored in the controller. The opening data may be stored in a charged erasable programmable read-only memory (E2 PROM) of the controller, or may be stored in a flash memory (flash) of the controller.

When the driving motor is a stepping motor, the operation parameter of the driving motor may be the number of steps of the stepping motor, and correspondingly, the detecting device may be an encoder, and the encoder is used for detecting the number of steps of the stepping motor. When the driving motor is a servo motor, the operation parameter of the driving motor can be the rotation angle of the motor shaft, and correspondingly, the detection device can be an angle sensor. Alternatively, the detection device may be a hall sensor for detecting the displacement of the valve plate.

The meaning of step S102 is that the opening of the valve during the shutdown before power-up can be known according to the shutdown opening data, and the opening of the valve during the shutdown before power-up is the current opening of the valve after power-up, so that the current opening of the valve plate can be known.

The preset opening degree can be set to any value between 0% and 100%, when the valve reaches the preset opening degree, the valve plate is positioned at the reference position, and the valve plate is not contacted with the cavity wall of the cavity when at the reference position. Because the opening of the valve is preset, namely known value, when the valve plate is at the reference position, the valve opening can be accurately regulated by taking the reference position as the starting position in the subsequent process, thereby realizing accurate regulation and control of the pressure of the process chamber. For example, as shown in fig. 1, the preset opening is 0%, and the valve is fully closed, that is, the reference position is zero; as another example, as shown in fig. 2, the preset opening is 100%, and the valve is fully opened, that is, the reference position is the full position.

There is a mapping relationship between the operating parameters of the drive motor and the opening of the valve. In step S103, after determining the current opening of the valve, since the preset opening is a known value, according to the mapping relationship between the operation parameter of the driving motor and the opening of the valve, the target adjustment value corresponding to the operation parameter of the driving motor can be calculated, where the valve opening is adjusted from the current opening to the preset opening.

In step S104, after determining the target adjustment value corresponding to the operation parameter of the driving motor, the operation parameter of the driving motor is controlled to reach the target adjustment value, so that the valve plate can be accurately controlled to move from the position corresponding to the current opening to the reference position corresponding to the preset opening, and the calibration of the reference position is realized.

Taking the driving motor as a stepping motor as an example, the step value (namely a target adjusting value) required by the stepping motor to run when the valve opening is adjusted from the current opening to the preset opening can be calculated, and then the motor shaft of the stepping motor is controlled to rotate until the step value reaches the target adjusting value. Taking the driving motor as a servo motor as an example, the angle (namely a target adjusting value) required to rotate the motor shaft of the servo motor when the valve opening is adjusted from the current opening to the preset opening can be calculated, and then the motor shaft is controlled to rotate until the rotating angle reaches the target adjusting value.

In summary, the calibration method of the embodiment utilizes the memory to have a storage function, and relies on the stored shutdown opening data to calibrate the reference position without adopting a photoelectric switch, so that on one hand, the photoelectric switch is omitted, the structure of the process chamber is facilitated to be simplified, and on the other hand, the problem that the calibration cannot be performed due to the damage of the photoelectric switch is fundamentally solved. The calibration method of the embodiment calibrates the reference position according to the stored shutdown opening data, is not easy to fail due to the process environment in the process chamber, and has high reliability.

In addition, compared with the method adopting the photoelectric switch as the reference point, the calibration method of the embodiment realizes the calibration of the reference position by a mode of combining hardware and software (for example, the software and hardware functions of a controller with a memory), thereby reducing the requirement on the hardware performance.

As an alternative embodiment, step S101 may include:

step S1011: when the voltage control equipment is powered on again after power failure, judging whether the voltage control equipment is powered on again for the first time after power failure.

It will be appreciated that step S1011 includes, but is not limited to, the following possible implementations:

in some possible implementations, when the voltage control device is powered up again after power is off, a power-up identifier is obtained; and judging whether the voltage control equipment is powered off or not according to the power-on identification, and powering on again for the first time. Illustratively, the voltage control apparatus may be provided with a detection circuit for detecting a level state of an enable terminal of the controller, and marking the power-on flag as 1 when detecting that the enable terminal is switched from a low level to a high level for the first time, and otherwise marking the power-on flag as 0. Thus, after the power-on identifier is obtained, if the power-on identifier is 1, the voltage control equipment can be judged to be powered off and then powered on again for the first time.

In other possible implementations, the power-off times and the power-on times are obtained when the voltage control device is powered on again after power-off; and judging whether the voltage control equipment is powered up again for the first time after the power is off or not according to the power-off times and the power-on times. Schematically, the voltage control device may be provided with a first counter and a second counter, where the first counter is used to accumulate the number of times of power failure of the voltage control device, and when the voltage control device is powered off, the count of the first counter is increased by 1; the second counter is used for accumulating the power-on times of the voltage control equipment, and when the voltage control equipment is powered on, the count of the second counter is increased by 1. Therefore, the power-off times and the power-on times are compared, and when the power-off times are equal to the power-on times, the voltage control equipment can be judged to be powered on again for the first time after power-off.

Step S1012: and if the voltage control equipment is powered on again for the first time after the power is off, controlling the voltage control equipment to enter a reference position calibration mode.

Step S1013: and when the pressure control equipment enters a reference position calibration mode, acquiring shutdown opening data of the valve before power-on.

Optionally, step S101 may further include step S1014 after step S1011.

Step S1014: and if the voltage control equipment is powered off and is not powered on again for the first time, prohibiting starting the reference position calibration mode.

It is understood that the reference position can be effectively calibrated according to the calibration method when the voltage control device is powered up again for the first time after power failure. Therefore, the pressure control equipment can adjust the opening of the valve according to the reference position in the follow-up control process. Therefore, when the voltage control equipment is powered off and is not powered on again for the first time, the reference position is known, the valve can be accurately controlled according to the known reference position to adjust the pressure in the cavity, and the reference position does not need to be calibrated repeatedly.

Based on this, the precondition is set for the voltage control device to enter the reference position calibration mode, and the precondition is that the voltage control device is powered on again for the first time after power failure, so when the calibration method is adopted to calibrate the reference position, whether the voltage control device meets the precondition needs to be judged in advance, when the voltage control device is powered off and is not powered on again for the first time, the voltage control device is forbidden to enter the reference position calibration mode, and the reference position does not need to be calibrated repeatedly, so that the voltage control device is ensured to directly carry out opening adjustment on the valve according to the calibrated reference position when the voltage control device is powered on again for the first time after power failure when the voltage control device is not powered on again for the first time, and the working efficiency is improved.

As a further alternative embodiment, step S1012 may be implemented by specifically:

Step S10121: if the voltage control equipment is powered up again for the first time after power failure, judging whether an enabling instruction configured by a user is received.

The enabling instruction is an instruction for indicating the pressure control equipment to enter a reference position calibration mode. The process machine with the process chamber can be provided with an input device, and a user can input an enabling instruction through the input device, so that whether the enabling instruction is received or not can be judged by monitoring the instruction received by the input device. The input device of the present embodiment is not particularly limited, and may be an operation panel or a keyboard, for example.

Step S10122: and controlling the pressure control equipment to enter a reference position calibration mode in response to receiving an enabling instruction configured by a user.

The response to receiving the enabling instruction configured by the user means that the user determines that the voltage control device can enter the reference position calibration mode.

Optionally, after step S10121, step S1012 may further include step S10123.

Step S10123: and if the enabling instruction configured by the user is not received, prohibiting starting the reference position calibration mode.

The design is that on the basis that the pressure control equipment meets the precondition of entering the reference position calibration mode, a user is required to confirm whether the pressure control equipment can enter the reference position calibration mode, and after the user confirms that the pressure control equipment can enter the reference position calibration mode, the pressure control equipment can enter the reference position calibration mode.

In practical working conditions, the process machine is provided with various devices such as a mechanical arm, a transmission chamber, a heat treatment chamber and the like besides the process chamber, and the devices jointly form the whole machine function of the process machine, and the semiconductor devices circulate among the devices, so that the working state of each device can influence the whole machine performance of the process machine. Therefore, in the calibration method of the present embodiment, the step of setting the pressure control device to enter the reference position calibration mode requires confirming that the enabling instruction configured by the user is received, and has the advantages that: when a user finds that the fault equipment exists in the process machine, the pressure control equipment can be forbidden to enter the reference position calibration mode by not configuring an enabling instruction, the process chamber can be temporarily not operated, and the working state of the fault equipment is prevented from seriously affecting the process chamber.

In one example, the above step S101 may be implemented using the following steps.

Step S1015: and when the voltage control equipment is powered on again after power off, judging whether shutdown opening data of the valve before power on are stored.

Step S1016: if the shutdown opening data are stored, acquiring the shutdown opening data of the valve before power-on.

In this embodiment, whether opening data corresponding to valve shutdown when the voltage control device is powered off is effectively stored is determined in advance, and when the shutdown opening data of the valve is determined to be effectively stored, the shutdown opening data of the valve before power-on is acquired. Therefore, the calibration method considers the complex working condition of the voltage control equipment when the power is off, and ensures that the reference position can be calibrated effectively.

Schematically, in the above embodiment, the specific implementation process of "determining whether the shutdown opening data of the valve is stored before power-up" may be:

step 1: judging whether historical opening data of the valve in a historical period are stored or not; wherein the history period includes a power-off time.

Step 2: if the historical opening data of the valve is stored, judging whether the shutdown opening data can be determined according to the historical opening data.

As can be seen from the foregoing description, the opening data of the valve has a mapping relationship with the operation parameter of the driving motor and the displacement of the valve plate. The process chamber is provided with a detection device, when the pressure control equipment is electrified, the detection device can detect the operation parameter of the driving motor or the displacement of the valve plate, the operation parameter of the driving motor or the displacement of the valve plate is converted into corresponding opening data and sent to the memory, and the memory stores the opening data of the valve. It should be understood that the opening of the valve at a certain time is a unique value, and therefore, there is a one-to-one correspondence between the time and the opening data of the valve, and the memory may store the detection time and the opening data of the valve detected at the detection time.

The meaning of the step 1 is to determine whether the historical opening data of the voltage control device before power failure is stored, especially whether the opening data corresponding to the valve at the time of power failure is stored. In step 1, in order to determine whether the historical opening data of the valve in the historical period is stored, the storage content of the memory may be queried, and if the opening data corresponding to the power-off time can be queried, it may be determined that the opening data corresponding to the power-off time is stored.

Since the voltage control apparatus is suddenly powered off due to abnormality or malfunction, at this time, the memory may not store the opening degree data in time. Therefore, in the calibration method of the embodiment, whether the historical opening data is stored is judged in advance so as to acquire the shutdown opening data on the premise of determining that the historical opening data is stored, so that the calibration method can be effectively executed.

As is clear from the foregoing, the memory may store the detected time and the opening data detected at the detected time in association with each other. Because the driving motor is not controlled to run when the voltage control equipment is powered off, when the historical opening data of the valve is stored, the opening data corresponding to the power-off time in the historical opening data can be directly used as the shutdown opening data in the step 2.

In a further alternative embodiment, the specific implementation procedure of the step 2 may include the following substeps:

sub-step 1: and if the historical opening data of the valve is stored, determining opening data corresponding to the power-off time in the historical opening data as theoretical shutdown opening information.

Sub-step 2: and judging whether the position corresponding to the theoretical shutdown opening degree information is an actual shutdown position or not.

Sub-step 3: if yes, judging that the shutdown opening data of the valve before power-on is stored, and determining the theoretical shutdown opening information as the shutdown opening data.

Sub-step 4: if not, judging that the shutdown opening data of the valve before power-on is not stored.

Because the pressure control device is suddenly powered off due to an abnormality or a fault, at this time, even if the controller no longer controls the driving motor to drive the valve plate to move, the valve plate may still move a certain distance due to inertia or other reasons. For example, the transmission device comprises a gear and a rack which are meshed, the driving motor is connected with the gear in a transmission manner, the rack is fixedly connected with the valve plate, and when the pressure control equipment is powered off, if the tooth root of the gear is contacted with the rack, at the moment, even if the driving motor is powered off, the gear still can rotate to the tooth crest to be contacted with the rack under the action of dead weight, so that the rack and the valve plate connected with the rack still move after the pressure control equipment is powered off. In this case, if the current opening is determined by directly using the opening data corresponding to the power-off time as the stop opening data, erroneous judgment of the current opening is caused.

Compared with the method that the current opening of the valve is directly determined according to the opening data (namely, theoretical shutdown opening information) corresponding to the power-off moment, after the historical opening data are stored, the calibration method of the embodiment also verifies the validity of the theoretical shutdown opening information by judging whether the position corresponding to the theoretical shutdown opening information is the actual shutdown position, so that after the position corresponding to the shutdown opening data is ensured to be the actual shutdown position (namely, the position of shutdown before power-on) of the valve plate, the current opening of the valve plate is determined according to the shutdown opening data, namely, the method is beneficial to ensuring that the valve opening corresponding to the actual shutdown position of the valve plate can be used as the current opening of the valve, so that deviation of the calibrated reference position caused by misjudgment of the current opening is avoided, and the valve opening and the cavity air pressure can be accurately regulated.

In general, in the calibration method of the embodiment, when historical opening data is stored and a position corresponding to the opening data at the time of power failure is determined to be an actual stop position of the valve plate, that is, when no abnormality exists in the storage function, accurate calibration of the reference position is realized by controlling the valve plate to move from the actual stop position to the reference position.

If the position corresponding to the theoretical shutdown opening degree information is the actual shutdown position, the valve plate is shut down at the power-off moment. Thus, in sub-step 2, it is possible to determine whether the position corresponding to the theoretical stop opening degree information is the actual stop position by determining whether the valve plate is stopped at the time of power-off. Specifically, the execution of the substep 2 may include: judging whether the valve plate is in a static state at the time of power failure; if the valve plate is in a static state at the power-off moment, judging that the position corresponding to the theoretical shutdown opening degree information is an actual shutdown position; if the valve plate is in a non-stationary state at the power-off time, judging that the position corresponding to the theoretical shutdown opening degree information is not the actual shutdown position.

Wherein, determining whether the valve plate is in a static state at the time of power failure may include, but is not limited to, the following implementation manners:

for example, in some embodiments, the moving speed of the valve plate at the time of power failure is obtained, and whether the valve plate is in a static state at the time of power failure is determined according to whether the moving speed is 0. In this embodiment, the process apparatus may be provided with a speed detector for detecting a moving speed of the valve plate and transmitting the detected moving speed to the memory, and the memory stores the detection time and the moving speed detected at the detection time. Thus, according to the content of the memory, the moving speed of the valve plate at the outage moment can be obtained, when the moving speed of the valve plate at the outage moment is 0, the valve plate is in a static state at the outage moment, and when the moving speed of the valve plate at the outage moment is greater than 0, the valve plate is in a non-static state at the outage moment.

For another example, in some embodiments, the displacement variation of the valve plate from the power-off time to the time to be measured is obtained, and whether the valve plate is in a static state at the power-off time is determined according to whether the displacement variation is 0. Here, the time to be measured is located after the power-off time, and the time period between the time to be measured and the power-off time is a preset detection time period, for example, the detection time period may be 10s. In the embodiment, when the displacement variation is 0, judging that the valve plate does not move in a time period from the power-off time to the time to be measured, namely, that the valve plate is in a static state at the power-off time; when the displacement variation is not 0, the valve plate is judged to move in a time period from the power-off time to the time to be measured, namely, the valve plate is in a non-stationary state at the power-off time.

Fig. 4 is a schematic flow chart of another calibration method of a pressure control device for a process chamber according to an embodiment of the present application. On the basis of the above embodiment, as shown in fig. 4, after step S1015, the calibration method further includes the following steps:

step S1017: and if the shutdown opening data is not stored, controlling the valve plate to move along the first direction at a first speed.

Step S1018: judging whether the valve plate reaches the mechanical limit.

Step S1019: when the valve plate reaches the mechanical limit, the valve plate is controlled to move from the mechanical limit to the reference position along the second direction at a second speed; wherein the first direction is opposite to the second direction.

It can be seen from the foregoing that determining whether the valve has been stored with the shutdown opening data before power-up includes determining whether the valve has been stored with the history opening data in the history period, and determining whether the shutdown opening data can be determined according to the history opening data, and determining that the valve has been stored with the shutdown opening data before power-up only when the determination results of the two steps are yes. From this, it is known that the case where the stop opening degree data is determined not to be stored includes: the historical opening degree data is not stored, or the historical opening degree data is stored, but the position corresponding to the theoretical shutdown opening degree information is not the actual shutdown position of the valve plate.

That is, it can be understood that when the storage function is abnormal, the calibration method according to the embodiment calibrates the reference position through mechanical limitation, specifically, the valve plate can be driven to move to the mechanical limitation, and then the valve plate is controlled to move from the mechanical limitation to the reference position to achieve calibration of the reference position. Therefore, even if the function of storing opening data of the process chamber is abnormal, the calibration method of the embodiment can still effectively calibrate the reference position, and the reliability of calibrating the reference position is further improved.

Fig. 5 is a schematic diagram of one principle of the calibration method shown in fig. 4, and fig. 6 is another principle of the calibration method shown in fig. 4, wherein the structures of the intake runner, the exhaust runner, the air source, the vacuum pump, etc. are omitted in fig. 5 and 6 for clarity of the movement process of the valve plate 124. As can be understood from the description of fig. 5 and fig. 6, the mechanical limit refers to a limit position of movement of the valve plate 124, and if the reference position corresponding to the preset opening degree of the valve plate 124 is known, a target displacement amount of the valve plate 124 corresponding to the reference position moved from the mechanical limit can be calculated, the displacement amount of the valve plate 124 and the operation parameter of the driving motor can be converted with each other, then a target adjustment amount of the operation parameter of the driving motor corresponding to the target displacement amount can be calculated, and then the operation parameter of the driving motor is controlled to reach the target adjustment amount. In this way, the movement of the valve plate 124 from the mechanical limit to the reference position can be accurately controlled.

In the example shown in fig. 5, the mechanical limitation means that the valve plate 124 moves in the first direction (U in fig. 5) to a position contacting the cavity wall of the cavity 110, and the valve plate 124 moves to the mechanical limitation, at which time the opening of the valve is 100%, and cannot move further in the first direction, and then moves to the reference position in the second direction (D in fig. 5). In the example shown in fig. 6, the mechanical limit means that the valve plate 124 moves in the first direction (D in fig. 5) to a position where it contacts the cavity wall of the cavity 110, and the valve plate 124 moves to the mechanical limit, where the opening of the valve is 0%, and cannot move further in the first direction, and then moves to the reference position in the second direction (U in fig. 5).

As can be seen, the mechanical limit refers to a position where the valve plate 124 contacts the cavity wall of the cavity 110, and the valve opening corresponding to the valve plate 124 being located at the mechanical limit may be 0% or 100%.

In a specific example of the present application, step S1018 may be implemented using the following steps.

Step S10181: the actual operation amount of the driving motor and the control request operation amount are detected in real time.

It should be understood that the actual operation amount refers to an actual operation amount of the valve from an opening degree when the valve is stopped before power-up to an operation parameter of the driving motor corresponding to a certain opening degree, and the control request operation amount refers to an operation amount of the valve from an opening degree when the valve is stopped before power-up to a certain opening degree, which can be reached by the operation parameter of the driving motor by a control request sent by the controller.

Taking the example that the driving motor is a servo motor and the operation parameter is the rotation angle of the motor shaft, the actual rotation angle of the motor shaft detected by the angle sensor can be determined as the actual operation amount of the driving motor, and the control rotation angle of the motor shaft of the driving motor by the controller can be determined as the control request operation amount.

Step S10182: and judging whether the difference value between the actual operation quantity and the control request operation quantity is larger than a preset threshold value.

Step S10183: and when the difference value is larger than a preset threshold value, judging that the valve plate reaches the mechanical limit.

Step S10184: and when the difference value is smaller than or equal to a preset threshold value, judging that the valve plate does not reach the mechanical limit.

The principle that whether the valve plate reaches the mechanical limit can be judged by judging whether the difference value between the actual operation quantity and the control request operation quantity is larger than a preset threshold value or not is as follows: under the control request of the controller, the driving motor drives the valve plate to move from a stop position before power-on (namely, the valve plate position corresponding to the opening of the valve when the valve is stopped before power-on), the actual rotation angle of the motor shaft is equal to the control rotation angle of the controller on the motor shaft of the driving motor in the process that the valve plate does not move to the mechanical limit and in the moment that the valve plate moves to the mechanical limit, namely, the actual operation amount is equal to the control request operation amount; after the valve plate reaches the mechanical limit, the controller still controls the driving motor to drive the valve plate to move, and at the moment, the motor shaft of the driving motor does not rotate any more, and the valve plate cannot move, at the moment, the control rotation angle is continuously increased, the actual rotation angle is unchanged, namely, the control request operation amount is larger than the actual operation amount, and the difference between the actual operation amount and the control request operation amount is the control request operation amount minus the actual operation amount, and is larger than 0. Therefore, when the difference is greater than the preset threshold, it may be determined that the valve plate has reached the mechanical limit.

It should be noted that, since the current value increases due to the blocking of the driving motor when the valve plate reaches the mechanical limit, it is generally easy for those skilled in the art to provide a detection circuit to monitor the current value of the driving motor and determine whether the valve plate reaches the mechanical limit according to the current value. In this embodiment, whether the valve plate reaches the mechanical limit is determined by determining the actual running amount of the driving motor and the control request running amount, so that a detection circuit is not required, and the circuit of the device is prevented from being too complex.

In order to improve the accuracy of the judgment and avoid erroneous judgment, in a preferred example, it may be determined multiple times whether the difference between the actual operation amount and the control request operation amount is greater than a preset threshold. Specifically, the step S10183 may further be: and when the difference values in the preset time period are larger than the preset threshold value, judging that the valve plate reaches the mechanical limit. That is, the actual running amount and the control request running amount are continuously and repeatedly judged within the preset duration range, and when the continuous and repeatedly judged results are that the difference value is larger than the preset threshold value, the valve plate can be judged to reach the mechanical limit.

It can be appreciated that the preset duration is not limited in detail in this embodiment, and the preset duration may be designed according to an actual working condition. For example, the preset time period may be 10s, 50s, 1min, or the like. In a specific example, the preset duration may have a smaller value, for example, the preset duration is 100ms, that is, when the determination result that the difference between the actual operation amount and the control request operation amount is greater than the preset threshold is maintained for 100ms, step S1019 may be immediately performed. Therefore, the time length of the valve plate, which is caused by the fact that the controller continuously controls the driving motor to drive the valve plate to stop rotating after the valve plate reaches the mechanical limit, is shortened as much as possible, and mechanical abrasion of the driving motor caused by stop rotating is reduced.

Similarly, the preset threshold may be designed according to experience and actual working conditions, which is not limited in this embodiment. For example, when the driving motor is a stepper motor and the operation parameter is the number of steps of the stepper motor, the preset threshold may be 100 steps.

In some embodiments, a first speed V ₁ Can be at a second speed V ₂ Equal.

In an alternative embodiment, the first speed V ₁ Less than the second speed V ₂ . That is, the control valve plate moves from the pre-power-up rest position to the mechanical limit at a lower speed, and then the control valve plate moves from the mechanical limit to the reference position at a higher speed.

By means of the design, on one hand, the speed of the valve plate moving towards the mechanical limit is low, so that the valve plate is prevented from fiercely striking the cavity wall of the cavity, mechanical damage caused by collision between the valve plate moving to the mechanical limit and the cavity wall of the cavity is reduced as much as possible, and on the other hand, the valve plate can be quickly moved to the reference position by the mechanical limit, so that the efficiency of calibrating the reference position is improved.

Illustratively a first speed V ₁ The range of values of (c) can be designed as: v (V) _max *1％≤V ₁ ≤V _max *30, wherein V _max Is the maximum movable speed of the valve plate. That is, the first speed is 1% or more of the maximum movable speed of the valve plate and 30% or less of the maximum movable speed of the valve plate. In this way, the valve plate can move to the mechanical limit stably at a low speed. It will be appreciated that the drive motor drives the valve plate at the first speed V because the operating parameters of the drive motor, the displacement of the valve plate, and the opening of the valve can be converted ₁ The rotating speed and current of the movement are also used for driving the valve plate by the driving motor to V _max The rotational speed and current of the movement is 1% to 30%.

For example, the driving motor drives the valve plate to V _max The current during the movement is 2A and the rotating speed is 300rpm, the current of the driving motor can be 0.2A and the rotating speed can be 30rpm in the process of driving the valve plate to move to the mechanical limit, so that the valve plate is driven at a first speed V ₁ And (5) moving.

Second speed V ₂ The range of the values is as follows: v (V) ₁ ＜V ₂ ≤V _max . Second speed V ₂ Can be equal to V _max Therefore, the speed of the valve plate moving to the reference position from the mechanical limit is increased as much as possible, and the calibration efficiency is improved.

In some embodiments of the present application, after step S1015, the calibration method further includes the steps of:

step S1020: and if the shutdown opening data is not stored, controlling a timer to start timing. Step S1020 and step S1017 may be performed simultaneously.

Step S1021: when the timing duration reaches the set period, the valve plate does not move to the mechanical limit, and alarm information is sent out, wherein the alarm information is used for prompting calibration failure.

The alarm information may be, for example, sound information, or other information such as text information and pattern information. Depending on the form of the alarm information, the execution subject for issuing the alarm information may also be different. When the alarm information is sound information, the controller can control the buzzer to send out sound for alarm; when the alarm information is text information, the controller can control the display screen to display text for alarm. In particular, the alert information may be pushed to an application associated with the process tool; alternatively, when a plurality of terminal devices (e.g., cell phone, computer, etc.) of the user are associated with the process tool, the alert information may be pushed to an application of at least one of the plurality of terminal devices.

In this way, the function is stored to be abnormal (i.e. the historical opening data is not stored, or the historical opening data is stored, but the position corresponding to the theoretical shutdown opening information is not the actual shutdown position of the valve plate), the calibration method adopts a calibration mode that the valve plate is driven to move to the mechanical limit firstly, and then the mechanical limit moves to the reference position, and when the calibration process is timed and the time length reaches a set period, the alarm is given, so that the user is prompted that the valve plate is in abnormal condition according to the mode that the mechanical limit finds the reference position, and in this way, the user can find and process the fault causing the abnormal condition through inspection.

Therefore, the calibration method of the embodiment sets corresponding remedial measures for calibration failure caused by the occurrence of abnormality when the valve plate finds the reference position according to mechanical limit, so as to avoid the aggravation of the fault of abnormal conditions, and can still continue to calibrate the reference position after the user processes the abnormal conditions by prompting the user.

The set period T can be reasonably designed according to experience and actual working conditions. In a specific example of the present application, the set period T is a product of the standard period T and the gain coefficient G, i.e., t=t×g. Wherein the standard time t is the first speed V of the valve plate ₁ The length of time required to move from the fully-closed position to the fully-open position is equal to or greater than 1. The fully closed position refers to the mechanical limit corresponding to the valve opening of 0%, and the fully open position refers to the mechanical limit corresponding to the valve opening of 100%.

It can be understood that taking the position that the shutdown opening of the valve before power-on is 0% and the valve plate does not contact the cavity wall at this time as an example, the maximum travel of the valve plate from the shutdown position before power-on to the mechanical limit is as follows: the valve plate moves to the mechanical limit corresponding to 100% of the valve opening. Taking the position that the shutdown opening of the valve before power-on is 0% and the valve plate does not contact the cavity wall at the moment as an example, the maximum stroke of the valve plate from the shutdown position before power-on to mechanical limit is as follows: the valve plate moves to the mechanical limit corresponding to the valve opening of 0%.

In this embodiment, by designing t=t×g, the set period T is longer than the time period required for the valve plate to move from the stop position before power-up to the maximum stroke of the mechanical limit on the premise that the moving speed is the same.

The design means that when the displacement of the valve plate reaches or even exceeds the maximum stroke, the valve plate is not moved to the mechanical limit, and the abnormal condition is judged to be present, so that the alarm information is sent.

By setting the gain factor G, when the gain factor G is greater than 1, T > T, the set period is increased in order to avoid occurrence of false alarm. Specifically, the gain factor G may have a value of 1.5.

To further reduce the likelihood of false alarms, an average of the lengths of time required for the valve plate to move from the fully-closed position to the fully-open position multiple times at the first speed may be calculated and assigned as the standard length of time t. That is, according to the valve plate at a first speed V ₁ And the average value of a plurality of groups of data of the time length required by moving from the full-closing position to the full-opening position for a plurality of times is used for determining the standard time length t, so that the influence of data deviation on the standard time length t is reduced, and the accuracy and the reliability of the calibration method are improved.

It is to be understood that after step S1012, the calibration method further includes the following steps.

Step S104: in response to receiving the mode selection signal, the reference position calibration mode is determined to be any one of a valve-open calibration mode and a valve-closed calibration mode.

Step S105: when the reference position calibration mode is a valve opening calibration mode, the opening of the valve is increased in the process of controlling the valve plate to move to the reference position corresponding to the preset opening. It should be understood that when the pressure control device enters the valve opening calibration mode, the preset opening is greater than 0%.

Step S106: when the reference position calibration mode is a valve closing calibration mode, the opening of the valve is reduced in the process of controlling the valve plate to move to the reference position corresponding to the preset opening.

The mode selection signal may be triggered by a user, that is, a mode selection signal configured by the user, or the mode selection signal may be automatically triggered by a program, and a corresponding program code is built in the controller.

In an embodiment in which the mode selection signal is triggered by a user, the user may select the valve-open calibration mode or the valve-closed calibration mode according to an actual operating condition of the process tool. For example, each equipment of the process machine is operated simultaneously, in order to reduce the influence of the closing of the air source on the working states of other equipment of the process machine, the reference position is calibrated when the air source is not closed to inject air into the cavity in the actual working condition, at this time, a user can select a valve opening calibration mode, so that the air pressure in the cavity is continuously increased due to the total closing of the valve in the process of locating the reference position, and further potential safety hazards are avoided.

When the air source is closed and is not ventilated to the cavity body during the calibration of the reference position, a user can select a valve closing calibration mode, and the valve plate can be quickly moved to the reference position from the shutdown position before power-on by adopting the valve closing calibration mode at the moment, so that the calibration efficiency is improved because the opening degree of the valve during the operation is generally within 20 percent and the shutdown opening degree of the valve before power-on is generally within 20 percent.

Specifically, in this embodiment, when the reference position calibration mode is the valve opening calibration mode, step S103 corresponds to that the opening degree of the valve is gradually increased in the process of controlling the valve plate to move from the current position to the reference position corresponding to the preset opening degree, and at this time, the preset opening degree may be 100%. When the reference position calibration mode is the valve closing calibration mode, step S103 corresponds to gradually decreasing the opening of the valve in the process of controlling the valve plate to move from the current position to the reference position corresponding to the preset opening, and at this time, the preset opening may be 0%.

Similarly, in the embodiment, when the reference position is found according to the mechanical limit, if the reference position calibration mode is the valve opening calibration mode, the first direction in step S1017 is the direction in which the valve opening gradually increases, and the valve opening gradually increases during the process that the valve plate moves from the shutdown position before power-up to the mechanical limit along the first direction, and the valve opening corresponding to the valve plate during the mechanical limit is 100%; in addition, the preset opening is also 100%, and at this time, the valve is always kept fully open in the process of moving the valve plate from the mechanical limit to the reference position in step S1019.

If the reference position calibration mode is the valve closing calibration mode, the first direction in step S1017 is the direction in which the valve opening gradually decreases, and the valve opening gradually decreases in the process that the valve plate moves from the shutdown position before power-up to the mechanical limit along the first direction, and the valve opening corresponding to the valve plate during the mechanical limit is 0%; in addition, the preset opening is also 0%, and at this time, the valve is always kept fully closed in the process of moving the valve plate from the mechanical limit to the reference position in step S1019.

In the embodiment that the mode selection signal is automatically triggered by the program, the process chamber can be further provided with a flowmeter, the flowmeter is arranged at the air outlet of the air source to detect the air outlet amount of the air source, and the controller judges whether the air source is closed or not according to the air outlet amount detected by the flowmeter. And if the air source is judged not to be closed, a mode selection signal for determining the reference position calibration mode to be the valve opening calibration mode is sent out. And if the air source is judged to be closed, a mode selection signal for determining the reference position calibration mode to be the valve closing calibration mode is sent out.

Through the arrangement, when the calibration method of the embodiment is used for calibrating the reference position, the gas source is not required to be closed, the calibration of the reference position can be safely realized by selecting the valve-opening calibration mode, and the working states of other equipment of the process machine are not influenced.

On the basis of any of the above embodiments, the preset opening is set to be 0%, the reference position is a zero position, and after the valve plate moves to the reference position corresponding to the preset opening, the calibration method further includes step S107. In other words, after step S103, step S107 may also be performed.

Step S112: the control valve plate moves from a reference position (namely zero position) to a specific position corresponding to a specific opening, and the specific opening is preset to be more than 0%.

The valve plate is moved to a specific position immediately after the valve plate is positioned at the reference position (namely the zero position), so that the valve is opened, and safety accidents caused by the fact that the valve positioned at the zero position is fully closed in the working condition of injecting gas into the cavity are avoided.

Here, the specific opening degree may be designed according to experience and actual conditions, for example, 5%, 10%, or the like. When executing step S112, the adjustment amount of the operation parameter of the driving motor corresponding to the case that the opening of the valve reaches the specific opening from the preset opening may be calculated according to the mapping relationship between the operation parameter of the driving motor and the opening of the valve.

Fig. 7 is a schematic flow chart of a calibration method of a pressure control device for a process chamber according to an embodiment of the present application. Referring to fig. 7, in a specific example, the calibration method includes:

step S201: when the voltage control device is powered up again after power failure, it is determined whether the voltage control device is powered up again for the first time after power failure, if yes, step S202 is executed, and if not, step S203 is executed.

Step S202: and judging whether an enabling instruction configured by a user is received, if yes, executing step S204, and if not, executing step S203.

Step S203: and prohibiting starting the reference position calibration mode.

Step S204: the control pressure device enters the reference position calibration mode and continues to step S205.

Step S205: judging whether historical opening data of the valve in a historical period are stored or not; wherein the history period comprises a power-off time; if yes, go to step S206, if no, go to step S211 or step S212.

Step S206: and determining opening data corresponding to the power-off time in the historical opening data as theoretical shutdown opening information, and continuing to execute step S207.

Step S207: and judging whether the position corresponding to the theoretical stop opening degree information is an actual stop position, if so, executing step S208, and if not, executing step S211 or step S212.

Step S208: and judging that the shutdown opening data is stored, determining theoretical shutdown opening information as the shutdown opening data, determining the current opening of the valve according to the shutdown opening data, and continuing to execute step S209 or step S210.

Step S209: in response to receiving the mode selection signal, determining that the reference position calibration mode is the valve opening calibration mode, controlling the valve plate to move to the reference position corresponding to the preset opening along the direction of gradually increasing the opening of the valve, and turning to step S215.

Step S210: in response to receiving the mode selection signal, determining that the reference position calibration mode is the valve closing calibration mode, controlling the valve plate to move to the reference position corresponding to the preset opening along the direction that the opening of the valve gradually decreases, and turning to step S215.

Step S211: in response to receiving the mode selection signal, determining that the reference position calibration mode is the valve opening calibration mode, controlling the valve plate to move towards the mechanical limit with the opening degree of 100% along the first direction at the first speed, simultaneously controlling the timer to start timing, and turning to the execution step S213.

Step S212: in response to receiving the mode selection signal, determining that the reference position calibration mode is the valve closing calibration mode, controlling the valve plate to move towards the mechanical limit with the opening degree of 0% along the first direction at the first speed, simultaneously controlling the timer to start timing, and turning to the execution step S213.

Step S213: and judging whether the valve plate reaches the mechanical limit when the timing duration reaches the set period, if so, executing the step S214, and if not, executing the step S216.

Step S214: and controlling the valve plate to move from the mechanical limit to the reference position along the second direction at the second speed, wherein the opening of the valve when the valve plate is at the reference position is the same as the opening of the valve when the valve plate is at the mechanical limit, and continuing to execute the step S215.

Step S215: the control valve plate moves from the reference position to a specific position corresponding to a specific opening, and the specific opening is preset to be more than 0%.

Step S216: and sending out alarm information which is used for prompting the calibration failure.

Fig. 8 is a schematic structural diagram of a calibration device for a pressure control apparatus of a process chamber according to an embodiment of the present application. Referring to fig. 8, the embodiment of the application further provides a calibration device of a pressure control device of a process chamber, which is used for calibrating a reference position, and the calibration device comprises: a memory 200 and at least one controller 300.

Memory 200 for storing program instructions. The controller 300 is configured to implement the calibration method of the pressure control device for the process chamber in the embodiment of the present application when the program instruction is executed, and the specific implementation principle can be referred to the above embodiment, which is not described herein again. The calibration device may also include and input/output interface 400. The input/output interface 400 may include a separate output interface and input interface, or may be an integrated interface that integrates input and output. The output interface is used for outputting data, and the input interface is used for acquiring the input data.

The embodiment of the application also provides semiconductor process equipment, which comprises the following steps: the device comprises a process chamber, pressure control equipment and a calibration device of the pressure control equipment of the process chamber, wherein the pressure control equipment comprises a driving motor and a valve for adjusting the air pressure of the process chamber, the driving motor is used for driving a valve plate of the valve to move, and the calibration device of the pressure control equipment of the process chamber is used for calibrating the reference position of the valve plate of the valve.

It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.

Claims

1. A method for calibrating a pressure control device of a process chamber for calibrating a reference position, the pressure control device comprising a drive motor and a valve for regulating the gas pressure of the process chamber, the method comprising:

2. The calibration method according to claim 1, wherein the step of acquiring the shutdown opening data of the valve before power-up when the power-up is resumed after the power-down of the pressure control device includes:

3. The calibration method according to claim 2, wherein the determining whether the shutdown opening data of the valve before power-up is stored includes:

4. The calibration method according to claim 2, wherein when the voltage control apparatus is powered up again after power-off, determining whether the shutdown opening data of the valve before power-up is stored or not further comprises:

judging whether the valve plate reaches mechanical limit;

5. The method of calibrating according to claim 4, wherein said determining whether the valve plate reaches a mechanical limit comprises:

6. The method according to claim 5, wherein when the difference is greater than a preset threshold, determining that the valve plate reaches a mechanical limit comprises:

7. The calibration method of claim 4, wherein the first speed is less than the second speed.

8. The calibration method according to claim 2, wherein when the voltage control apparatus is powered up again after power-off, determining whether the shutdown opening data of the valve before power-up is stored or not further comprises:

9. The calibration method according to claim 8, wherein the set period is a product of a standard duration and a gain factor;

10. The calibration method according to any one of claims 1 to 9, wherein the obtaining the shutdown opening data of the valve before power-up when the power-up is resumed after the power-down of the pressure control device includes:

11. The calibration method according to claim 10, wherein if the voltage control device is powered up again for the first time after power-off, the voltage control device is controlled to enter a reference position calibration mode, further comprising:

12. The calibration method according to any one of claims 1-9, wherein the predetermined opening is 0%,

13. A calibration device of a pressure control device of a process chamber for calibrating a reference position, the pressure control device comprising a drive motor and a valve for adjusting the air pressure of the process chamber, the calibration device comprising: a memory and at least one controller;

the memory is used for storing program instructions;

the controller being adapted to implement the process chamber pressure control device calibration method of any one of claims 1-12 when the program instructions are executed.

14. A semiconductor processing apparatus, comprising:

a process chamber;

the pressure control equipment comprises a driving motor and a valve for adjusting the air pressure of the process chamber, wherein the driving motor is used for driving a valve plate of the valve to move; and

the process chamber pressure control device calibration apparatus of claim 13, for calibrating a reference position of a valve plate of the valve.