CN116639655A - Method for synthesizing electronic grade hydrogen chloride - Google Patents
Method for synthesizing electronic grade hydrogen chloride Download PDFInfo
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- CN116639655A CN116639655A CN202310688013.1A CN202310688013A CN116639655A CN 116639655 A CN116639655 A CN 116639655A CN 202310688013 A CN202310688013 A CN 202310688013A CN 116639655 A CN116639655 A CN 116639655A
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- Prior art keywords
- hydrogen
- hydrogen chloride
- chlorine
- electronic grade
- water
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- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 title claims abstract description 73
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 title claims abstract description 51
- 229910000041 hydrogen chloride Inorganic materials 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000002194 synthesizing effect Effects 0.000 title description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 37
- 239000001257 hydrogen Substances 0.000 claims abstract description 36
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 36
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 25
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 25
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000000460 chlorine Substances 0.000 claims abstract description 23
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 17
- 239000010439 graphite Substances 0.000 claims abstract description 17
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000003054 catalyst Substances 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 150000002431 hydrogen Chemical class 0.000 claims description 8
- 239000002808 molecular sieve Substances 0.000 claims description 7
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 230000018044 dehydration Effects 0.000 claims description 5
- 238000006297 dehydration reaction Methods 0.000 claims description 5
- 229910000510 noble metal Inorganic materials 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 239000003513 alkali Substances 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- ZBZJXHCVGLJWFG-UHFFFAOYSA-N trichloromethyl(.) Chemical compound Cl[C](Cl)Cl ZBZJXHCVGLJWFG-UHFFFAOYSA-N 0.000 claims description 3
- 238000006356 dehydrogenation reaction Methods 0.000 claims description 2
- 238000004064 recycling Methods 0.000 claims description 2
- 239000003921 oil Substances 0.000 description 7
- 208000005156 Dehydration Diseases 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000564 Raney nickel Inorganic materials 0.000 description 1
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000004939 coking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/01—Chlorine; Hydrogen chloride
- C01B7/012—Preparation of hydrogen chloride from the elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Catalysts (AREA)
Abstract
The invention provides a method for preparing electronic grade hydrogen chloride, which comprises the following steps: 1) Pretreating the hydrogen to ensure that the molar fraction of the water content of the hydrogen is lower than 5ppm and the purity of the hydrogen is higher than 99.9995 percent; 2) Pretreating chlorine to make the mole fraction of water content of chlorine be less than 1ppm and make the purity of chlorine be above 99.9999%; 3) Chlorine gas is reacted with hydrogen gas in a jacketed graphite synthesis furnace to form hydrogen chloride, wherein a non-aqueous heat carrier is used to cool the jacketed graphite synthesis furnace. The method has the advantages of low investment, low cost, good stability and high purity of the prepared hydrogen chloride.
Description
Technical Field
The invention relates to the field of electronic special gas materials, in particular to a method for synthesizing electronic grade hydrogen chloride by chlorine and hydrogen.
Background
The chlorine and hydrogen for synthesizing hydrogen chloride by adopting a jacketed graphite synthesis furnace are the traditional process, and a cooler and a hydrochloric acid absorber are arranged behind the traditional process to form two-in-one or three-in-one. The hydrogen chloride prepared by the traditional method contains more water and is commonly used for preparing hydrochloric acid. Because the aqueous hydrogen chloride has strong corrosiveness, the drying and dehydration difficulties are high and the cost is high for preparing the electronic grade hydrogen chloride. The corrosion-resistant hastelloy material is often required, so that the investment is large and the process is complex.
The traditional electronic hydrogen chloride synthesis route generally adopts a hydrochloric acid analysis method or an adsorbent purification method, the hydrochloric acid analysis method needs expensive noble metal materials to overcome the corrosiveness of hydrochloric acid, and the dehydration energy consumption is high. The adsorbent purifying method is to remove impurities in the hydrogen chloride by using an adsorbent, and the adsorbent needs to be periodically operated, has low stability and low efficiency.
The conventional hydrogen chloride synthesis furnace adopts water as a medium for removing reaction heat, and the synthesized hydrogen chloride is absorbed by the water to prepare hydrochloric acid. Because of the inherent structural problems of graphite, it is difficult to ensure that the water in the jacket does not penetrate into the synthesized hydrogen chloride. If the hydrogen chloride synthesized in this way is used for preparing electronic grade hydrogen chloride, the hydrogen chloride containing water can only be absorbed by water to prepare hydrochloric acid because of strong corrosiveness, and then the hydrogen chloride is prepared by hydrochloric acid analysis.
Disclosure of Invention
Aiming at the problems in the prior art, the invention prepares anhydrous hydrogen chloride by carrying out dehydration treatment on less corrosive raw materials and then entering a jacketed graphite synthesis furnace. And through optimizing the heat carrier of the jacket of the graphite synthesis furnace, the reaction heat can be removed in time, the water is prevented from leaking into the synthesis furnace from the graphite wall in the jacket, and the drying of hydrogen chloride is ensured.
The water permeated into the hydrogen chloride and the hydrogen chloride form acid mist, so that the acid mist has strong corrosiveness and brings great corrosion hidden trouble to subsequent treatment equipment. The invention adopts the non-water-based heat carrier, thereby not only meeting the heat removal requirement, but also avoiding the problem of water seepage and providing safety guarantee for subsequent treatment. And based on anhydrous hydrogen chloride, the electronic hydrogen chloride can be prepared through simple treatment. In view of this, the present invention has been proposed.
According to the present invention, there is provided a process for preparing electronic grade hydrogen chloride comprising the steps of:
1) Pretreating the hydrogen to ensure that the molar fraction of the water content of the hydrogen is lower than 5ppm and the purity of the hydrogen is higher than 99.9995 percent;
2) Pretreating chlorine to make the mole fraction of water content of chlorine be less than 1ppm and make the purity of chlorine be above 99.9999%;
3) Chlorine gas is reacted with hydrogen gas in a jacketed graphite synthesis furnace to form hydrogen chloride, wherein a non-aqueous heat carrier is used to cool the jacketed graphite synthesis furnace.
Preferably, the hydrogen is pre-treated by: pressurizing hydrogen, cooling and dehydrating, then deoxidizing and dehydrating, and further dehydrating the deoxidized and dehydrated hydrogen in a variable-temperature dehydrating device.
More preferably, the hydrogen is pre-treated as follows: the hydrogen is pressurized to 4 to 8bar, cooled to below 10 ℃ and dehydrated; deoxidizing dehydrated hydrogen gas by hydrogen oxidation catalyst to reduce oxygen content to 1×10 -6 And then the micro water in the hydrogen is removed by adsorption through a molecular sieve bed layer.
Preferably, the hydrogen oxidation catalyst is a noble metal catalyst or a nickel-based catalyst, for example, the noble metal catalyst is a platinum-based catalyst.
Preferably, the hydrogen is from chloralkali electrolysis of hydrogen.
Preferably, the chlorine is pretreated by: pressurizing liquid chlorine, and then sequentially conveying the liquid chlorine to a light component removal tower and a heavy component removal tower to purify the chlorine; more preferably, the liquid chlorine is pressurized to more than 10bar and is conveyed to a dehydrogenation tower, about 5% of light components are extracted from the tower top, the extracted liquid from the tower bottom of the light component removal tower enters a heavy component removal tower, about 5% of heavy components are extracted from the tower bottom, and the high-purity liquid chlorine is extracted from the tower top, so that the chlorine with the concentration of more than 99.9999% can be obtained.
Preferably, the non-aqueous heat carrier has the following properties: the kinematic viscosity at 20 ℃ is 2.4-4.5 mm 2 The heat conductivity coefficient measured at 20 ℃ is 0.122-0.3W/m.K, the self-ignition point is 210-460 ℃, and the specific heat at 20 ℃ is 1.6-2.5 kJ/kg.K; the water content is less than or equal to 100mg/kg.
More preferably, the non-aqueous heat carrier is selected from one of the group consisting of conduction oil Eurotherm 330, carbon tetrachloride and carbon trichloride.
The inventors found that there is a risk of coking and polymerization when cooling using conventional heat transfer oils of the prior art. In view of the above, the inventors have conducted intensive studies on heat transfer oil and conducted impregnation experiments on graphite blocks, and confirmed that Eurotherm 330, carbon tetrachloride and carbon trichloride do not dissolve the resin in graphite, and that the viscosity, heat capacity and temperature ranges of the materials are matched.
Preferably, the non-water-based heat carrier is pumped into the jacket of the synthesis furnace, the non-water-based heat carrier brings the reaction heat out of the synthesis furnace and uses circulating water for cooling, and the cooled non-water-based heat carrier is recycled.
Preferably, the molecular sieve bed is a 13X molecular sieve bed.
Preferably, the method for preparing electronic grade hydrogen chloride according to the present invention further comprises the steps of: further purifying the synthetic hydrogen chloride obtained in step 3).
Preferably, the purification treatment is rectification of the synthetic hydrogen chloride through a light component removal column and a heavy component removal column.
Preferably, the electronic grade hydrogen chloride prepared according to the method of the invention has a volume purity of 99.999% or more, more preferably 99.9995% or more, and an oxygen+argon content of less than 0.5X10 -6 The nitrogen content is less than 2X 10 -6 The carbon dioxide content is less than 1×10 -6 。
Advantageous effects
1. The invention adopts the specific non-water-based heat carrier to remove the reaction heat, thereby not only avoiding the water seepage problem of the graphite jacket synthesis furnace, but also absorbing and recycling the heat of the synthesis furnace by using the non-water-based heat carrier.
2. The problem of hydrogen chloride water content is solved by dehydration treatment of raw materials, and the anhydrous hydrogen chloride can be prepared into electronic grade hydrogen chloride after simple treatment, so that a novel electronic hydrogen chloride synthesis method is formed.
3. The invention adopts the method of directly synthesizing anhydrous hydrogen chloride after pretreatment of raw materials, and adopts a non-water-based heat carrier to ensure the drying of hydrogen chloride in the synthesis process, and continuous and stable production can be realized by adopting common stainless steel equipment for subsequent equipment. Therefore, the method has low investment, low cost and good stability, and the prepared hydrogen chloride has high purity.
Drawings
FIG. 1 is a schematic flow chart of the process for preparing electronic grade hydrogen chloride of the present invention.
Detailed Description
The present invention will be described in detail with reference to examples. It will be appreciated by those skilled in the art that the following examples are provided for illustration of the present invention and are not intended to limit the scope of the present invention.
Example 1
Chloralkali electrolyzed hydrogen typically contains 2% water. Firstly, the hydrogen is pressurized to 8bar by a hydrogen compressor, the temperature is reduced to 10 ℃, and a large amount of water is condensed from the hydrogen. Then, the hydrogen was passed over a nickel-based catalyst (Raney nickel catalyst of Shandong Jiahong chemical industry) to reduce the oxygen content to 1X 10 -6 Then, the hydrogen gas was again passed through a 13X molecular sieve bed for adsorption (a. Phi. 3.6X16 adsorption column of Jiangsu Mike chemical machinery Co., ltd.) to remove a trace amount of water in the hydrogen gas. The purity of the produced hydrogen is more than 99.9995 percent.
Example 2
The chlorine adopts industrial chlorine in chlor-alkali plants, and needs pump pressurizing liquefaction, and light components and heavy components are respectively removed through two-stage rectification, so that the purity of the chlorine reaches 99.9999%.
First, liquid chlorine from the chlor-alkali plant is pressurized to 10bar by a pump and sent to a light ends column. The light component removing tower has 30 theoretical plates, and adopts structured packing, and the operating pressure is 1.6MPa. About 5% of light components are extracted from the top of the tower, the extracted liquid from the bottom of the light component removing tower enters a heavy component removing tower, the heavy component removing tower is provided with 30 theoretical plates, structured packing and the operating pressure is 1.2MPa. About 5% of heavy components are extracted from the tower bottom, and high-purity liquid chlorine is extracted from the tower top, so that 99.9999% of high-purity chlorine can be obtained.
Example 3
The hydrogen obtained by pretreatment in example 1 and the chlorine obtained by pretreatment in example 2 were each prepared in a ratio of 1.1:1 into a jacketed graphite synthesis furnace for reaction, wherein the synthesis furnace is at normal pressure, and the highest reaction temperature in the center of the synthesis furnace is 2000 ℃.
Wherein, heat conduction oil with the brand of Eurotherm 330 is adopted as a non-water-based heat carrier.
And pumping the heat conducting oil into the jacket of the jacketed graphite synthesis furnace. At the beginning of the reaction, the inlet temperature of the heat conducting oil is 50 ℃, and the outlet temperature is 60 ℃. The heat conducting oil with heat is cooled to 50 ℃ by a heat exchanger and then enters a jacket of the graphite synthesis furnace, and the heat is continuously taken out of the system by the circulation. As shown in fig. 1, hydrogen chloride exits the synthesis furnace, is cooled, and is compressed into a liquid phase. And purifying the liquid-phase hydrogen chloride to obtain the electronic hydrogen chloride. The purification treatment mainly comprises two stages of rectification of the light component removal tower and the heavy component removal tower, and the principle is the same as the above, namely the light component impurities are removed through the light component removal tower, and the heavy component impurities are removed through the refining tower, which is not repeated here. The purity of the obtained hydrogen chloride is 99.9995%, and the content of oxygen and argon is less than 0.5X10 -6 The nitrogen content is less than 2X 10 -6 The carbon dioxide content is less than 1×10 -6 。
The prepared electronic grade hydrogen chloride product meets the requirements of 'electronic industry gas hydrogen chloride' GB/T14602-2014.
Claims (10)
1. A method of preparing electronic grade hydrogen chloride comprising the steps of:
1) Pretreating the hydrogen to ensure that the molar fraction of the water content of the hydrogen is lower than 5ppm and the purity of the hydrogen is higher than 99.9995 percent;
2) Pretreating chlorine to make the mole fraction of water content of chlorine be less than 1ppm and make the purity of chlorine be above 99.9999%;
3) Chlorine gas is reacted with hydrogen gas in a jacketed graphite synthesis furnace to form hydrogen chloride, wherein a non-aqueous heat carrier is used to cool the jacketed graphite synthesis furnace.
2. The process for preparing electronic grade hydrogen chloride according to claim 1, wherein,
the hydrogen is pretreated by the following steps: pressurizing hydrogen, cooling and dehydrating, then deoxidizing and dehydrating, and enabling the deoxidized and dehydrated hydrogen to enter a variable-temperature dehydrating device for further dehydration.
3. The method for producing electronic grade hydrogen chloride according to claim 2, wherein,
the pretreatment process of hydrogen is as follows: the hydrogen is pressurized to 4 to 8bar, cooled to below 10 ℃ and dehydrated; deoxidizing dehydrated hydrogen gas by hydrogen oxidation catalyst to reduce oxygen content to 1×10 -6 And then the micro water in the hydrogen is removed by adsorption through a molecular sieve bed layer.
4. The process for preparing electronic grade hydrogen chloride according to claim 3, wherein,
the hydrogen oxidation catalyst is a noble metal catalyst or a nickel-based catalyst,
preferably, the molecular sieve bed is a 13X molecular sieve bed.
5. The process for preparing electronic grade hydrogen chloride according to any one of claims 1-4, wherein,
the hydrogen is chlor-alkali electrolytic hydrogen.
6. The process for preparing electronic grade hydrogen chloride according to claim 1, wherein,
the chlorine is pretreated by the following steps: after pressurizing the liquid chlorine, the liquid chlorine is sequentially sent to a light component removal tower and a heavy component removal tower to purify the chlorine.
7. The method for producing electronic grade hydrogen chloride according to claim 6, wherein,
the chlorine is pretreated by the following steps: pressurizing liquid chlorine to more than 10bar, conveying the liquid chlorine to a dehydrogenation tower, extracting 5% of light components from the tower top, introducing the extracted liquid from the tower bottom of the light component removal tower into a heavy component removal tower, extracting 5% of heavy components from the tower bottom, and extracting high-purity liquid chlorine from the tower top to obtain chlorine with the concentration of more than 99.9999%.
8. The process for preparing electronic grade hydrogen chloride according to claim 1, wherein,
the non-aqueous heat carrier has the following properties: the kinematic viscosity at 20 ℃ is 2.4-4.5 mm 2 The heat conductivity coefficient measured at 20 ℃ is 0.122-0.3W/m.K, the self-ignition point is 210-460 ℃, and the specific heat at 20 ℃ is 1.6-2.5 kJ/kg.K; the water content is less than or equal to 100mg/kg;
preferably, the non-aqueous heat carrier is selected from one of the group consisting of conduction oil Eurotherm 330, carbon tetrachloride and carbon trichloride.
9. The process for preparing electronic grade hydrogen chloride according to claim 1, wherein,
pressurizing the non-water-based heat carrier into a jacket of the synthesis furnace by using a pump, taking the reaction heat out of the synthesis furnace by using the non-water-based heat carrier, cooling by using circulating water, and recycling the cooled non-water-based heat carrier.
10. The process for preparing electronic grade hydrogen chloride according to any one of claims 1-9, wherein,
the volume purity of the electronic grade hydrogen chloride is more than 99.999 percent, more preferably more than 99.9995 percent, and the content of oxygen and argon is less than 0.5X10 -6 The nitrogen content is less than 2X 10 -6 The carbon dioxide content is less than 1×10 -6 。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310688013.1A CN116639655A (en) | 2023-06-09 | 2023-06-09 | Method for synthesizing electronic grade hydrogen chloride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310688013.1A CN116639655A (en) | 2023-06-09 | 2023-06-09 | Method for synthesizing electronic grade hydrogen chloride |
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| Publication Number | Publication Date |
|---|---|
| CN116639655A true CN116639655A (en) | 2023-08-25 |
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| CN202310688013.1A Pending CN116639655A (en) | 2023-06-09 | 2023-06-09 | Method for synthesizing electronic grade hydrogen chloride |
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| Country | Link |
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| CN (1) | CN116639655A (en) |
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2023
- 2023-06-09 CN CN202310688013.1A patent/CN116639655A/en active Pending
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