CN116625990A - Bubble-resistant high-stability refractometer - Google Patents

Bubble-resistant high-stability refractometer Download PDF

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Publication number
CN116625990A
CN116625990A CN202310660273.8A CN202310660273A CN116625990A CN 116625990 A CN116625990 A CN 116625990A CN 202310660273 A CN202310660273 A CN 202310660273A CN 116625990 A CN116625990 A CN 116625990A
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bubble
liquid medicine
temperature
module
control module
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CN116625990B (en
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张仕成
赵龙山
燕永
李芳�
赵晗
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Winmax Control Technology Shanghai Co ltd
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Winmax Control Technology Shanghai Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D19/00Degasification of liquids
    • B01D19/0021Degasification of liquids by bringing the liquid in a thin layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D19/00Degasification of liquids
    • B01D19/02Foam dispersion or prevention
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The application relates to an anti-bubble high-stability refractometer, which controls the temperature of liquid medicine and eliminates bubbles of the measured liquid medicine through matching of a refractive index measuring module, a temperature control module and a bubble discharging module, when the liquid medicine passes through a film-shaped channel formed between a hydrophobic unit and a hydrophilic unit, the liquid medicine sinks and gathers on the surface of the hydrophilic unit under the action of the hydrophilic unit under the film-shaped channel, and the bubbles are pushed by the liquid medicine to move upwards and gather on the surface of the hydrophobic unit until moving to the outlet end of the film-shaped channel, because the pipe diameter of a measuring micro-channel is smaller than the pipe diameter of a bubble discharging channel, a large amount of liquid medicine with bubbles flows out from the bubble discharging channel, and a small amount of liquid medicine enters the temperature control module from the measuring micro-channel to be measured after the temperature of the liquid medicine is controlled at a set value through the temperature control module, the bubbles in the detected liquid medicine are effectively reduced, and the temperature of the detected liquid medicine is kept at the set value, so that the accuracy of the measured result of the concentration of the liquid medicine is improved.

Description

Bubble-resistant high-stability refractometer
Technical Field
The application relates to an anti-bubble high-stability refractometer, belonging to the field of measurement and photoelectric instruments.
Background
In semiconductor manufacturing processes, a wide variety of chemicals are used in large quantities, with many chemicals requiring dilution from high to low concentrations, such as hydrofluoric acid, TMAH, hydrogen peroxide, and the like. Some of these chemicals are not conductive or have poor conductivity, and their diluted concentrations cannot be measured electrochemically, for example, hydrogen peroxide, ammonia, isopropanol, etc., and the concentrations of these chemicals are measured optically. The refractometer obtains the concentration of the liquid by measuring the critical angle of the refractive index of the liquid to the light of different concentrations. The refractometer does not need an infrared or ultraviolet light source, has simple structure and relatively low price, is not affected by electromagnetic interference and has small influence in complex electromagnetic environment, so the refractometer is widely used as an online concentration meter in dilution equipment.
However, in the actual use process, environmental factors of the equipment, especially temperature and the influence of micro bubbles generated in the equipment pipeline on refractive index are very large, and the temperature change and the bubbles can cause inaccurate concentration detection results of the liquid medicine. Therefore, a common refractometer needs to use a temperature compensation mode to eliminate the influence of temperature, but the temperature compensation needs to acquire data by performing experiments on liquid medicine sampling, and the required period is long and the site correspondence is slow. Second, temperature compensation has a range limit and concentration measurement errors increase when a change in season or other extreme causes the temperature to go out of range. In addition, conventional refractometers rely on the device end to eliminate air bubbles, which cannot be effectively separated from the micro-bubbles in the fluid to eliminate the air bubbles in the fluid for refractive index measurement.
Therefore, there is a need for a refractometer that monitors the temperature of the liquid medicine and eliminates air bubbles to solve the above-mentioned problems, so as to improve the accuracy of the detection result of the concentration of the liquid medicine.
Disclosure of Invention
The application aims to provide an anti-bubble high-stability refractometer which can separate liquid and bubbles of liquid medicine for refractive index measurement, and can monitor and control temperature at the same time so as to improve the accuracy of detection results of liquid medicine concentration
In order to achieve the above purpose, the present application provides the following technical solutions: a bubble resistant high stability refractometer, said refractometer comprising:
the refractive index measuring module is used for detecting the concentration of the liquid medicine;
the temperature control module is used for monitoring the temperature of the liquid medicine entering the refractive index measurement module and controlling the temperature of the liquid medicine to be at a set value; and
The bubble discharge module comprises a hydrophobic unit, a hydrophilic unit arranged below the hydrophobic unit and a film-shaped channel formed between the hydrophobic unit and the hydrophilic unit, wherein the outlet end of the film-shaped channel is respectively communicated with an upward extending bubble discharge channel and a downward extending measurement micro-channel, the pipe diameter of the measurement micro-channel is smaller than that of the bubble discharge channel, and the measurement micro-channel is connected to the bubble detection module.
Further, in the height direction, the bubble discharge channel and the measurement microchannel axis are collinear.
Further, the hydrophobic unit is polytetrafluoroethylene material, and the hydrophilic unit is quartz glass.
Further, the refractometer also comprises a control module for storing and processing the measurement data of the refractive index measurement module, the control module is in signal connection with the refractive index measurement module and the temperature control module, and the control module acquires the detection signal of the temperature control module and controls the temperature of the liquid medicine to be in a set value.
Further, the temperature control module is arranged between the bubble discharge module and the bubble detection module, the temperature control module comprises a temperature detection unit and a temperature control unit, and the control module controls the temperature control unit to heat or cool the liquid medicine according to a detection signal of the temperature detection unit so that the temperature of the liquid medicine is in a set value.
Further, the temperature detection unit is a temperature sensor arranged on the measurement micro-channel along the height direction, and the temperature control unit is a semiconductor refrigerating sheet arranged along the extending direction of the measurement micro-channel.
Further, a mounting hole is vertically arranged in the height direction and communicated with the upper part of the measurement micro-channel, and the temperature sensor is inserted into the mounting hole.
Further, an installation space is formed at the joint of the installation hole and the measurement micro-channel, the installation space is far larger than the measurement micro-channel, and the installation space is used for carrying out secondary collection on residual bubbles in the liquid medicine.
Further, the refractometer further comprises a bubble detection module arranged on the measurement micro-channel, wherein the temperature control module is connected to the refractive index measurement module, and the bubble detection module comprises a light inlet part and a detection part of optical fiber sensors of the sensors which are oppositely arranged on two sides of the measurement micro-channel.
Further, the bubble detection module is in signal connection with the control module, and the control module determines the position of the bubble according to the detection signal of the bubble detection module and the set flow velocity of the liquid medicine so as to exclude the detection data of the position corresponding to the refractive index measurement module.
The application has the beneficial effects that: according to the application, the temperature of the liquid medicine is controlled and the bubbles of the measured liquid medicine are eliminated through the matching of the refractive index measuring module, the temperature control module and the bubble discharging module, when the liquid medicine passes through the film-shaped channel formed between the hydrophobic unit and the hydrophilic unit, the liquid medicine sinks and gathers on the surface of the hydrophilic unit under the action of the hydrophilic unit below the film-shaped channel, the bubbles are pushed to move upwards and gather on the surface of the hydrophobic unit by the liquid medicine until moving to the outlet end of the film-shaped channel, as the pipe diameter of the measuring micro-channel is smaller than that of the bubble discharging channel, a large amount of liquid medicine with the bubbles flows out from the bubble discharging channel, and a small amount of liquid medicine enters the temperature control module from the measuring micro-channel, after the temperature of the liquid medicine is controlled to be at a set value through the temperature control module, the liquid medicine enters the refractive index measuring module for measurement, so that the bubbles in the liquid medicine to be detected are effectively reduced, and the temperature of the liquid medicine to be kept at the set value, and the accuracy of the liquid medicine concentration measuring result is improved.
The foregoing description is only an overview of the present application, and is intended to provide a better understanding of the present application, as it is embodied in the following description, with reference to the preferred embodiments of the present application and the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of an anti-bubble high stability refractometer according to a preferred embodiment of the present application.
Fig. 2 is a first internal structure diagram of the bubble discharge module of fig. 1.
Fig. 3 is a second internal structure diagram of the bubble discharge module of fig. 1.
Fig. 4 is an internal structural diagram of the temperature control module of fig. 1.
Detailed Description
The following describes in further detail the embodiments of the present application with reference to the drawings and examples. The following examples are illustrative of the application and are not intended to limit the scope of the application.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present application described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1 to 4, an anti-bubble high stability refractometer (hereinafter referred to as refractometer) according to a preferred embodiment of the present application includes a refractive index measuring module 4, a temperature control module 2 and a bubble discharging module 1.
The refractive index measuring module 4 is used for detecting the concentration of the liquid medicine. The refractive index measuring module 4 may measure the concentration of the liquid medicine by using a conventional refractometer or an online refractometer 41, which is a prior art and will not be described herein.
The temperature control module 2 is used for monitoring the temperature of the liquid medicine entering the refractive index measurement module 4 and controlling the temperature of the liquid medicine to be at a set value. In this embodiment, the temperature set value is 20 ℃, the temperature control target is within 20±0.05 ℃ and the measurement requirement of the refractive index measurement module 4 is satisfied.
The bubble discharge module 1 includes a hydrophobic unit 11, a hydrophilic unit 12 disposed below the hydrophobic unit 11, and a thin film-like passage 13 formed between the hydrophobic unit 11 and the hydrophilic unit 12, the outlet ends of the thin film-like passage 13 are respectively communicated with an upwardly extending bubble discharge passage 14 and a downwardly extending measurement microchannel 6, and the tube diameter of the measurement microchannel 6 is smaller than that of the bubble discharge passage 14, and the measurement microchannel 6 is connected to the bubble detection module 3. One end of the film-shaped channel 13 is an inlet end 15, which is used as an inlet for the detected liquid medicine to enter the film-shaped channel 13, and the other end is an outlet end, which is respectively communicated with the bubble discharge channel 14 and the measuring micro-channel 6.
Specifically, since the hydrophilicity and hydrophobicity of different substances are different, bubbles are easily pushed away at the hydrophilic surface, and thus aggregate to the hydrophobic surface. Therefore, when the liquid medicine passes through the film-like channel 13 formed between the water-repellent unit 11 and the hydrophilic unit 12, the liquid medicine sinks and gathers on the surface of the hydrophilic unit 12 under the action of the hydrophilic unit 12 under the film-like channel 13, and the air bubbles are pushed up by the liquid medicine to gather on the surface of the water-repellent unit 11 until moving to the outlet end of the film-like channel 13, since the pipe diameter of the measurement micro-channel 6 is smaller than the pipe diameter of the air bubble discharge channel 14, a large amount of liquid medicine with air bubbles flows out from the air bubble discharge channel 14, and a small amount of liquid medicine enters the temperature control module 2 from the measurement micro-channel 6.
In order for the air bubbles to flow out of the air bubble discharge channel 14 with the liquid medicine, the air bubble discharge channel 14 and the measurement micro-channel 6 are axially collinear at Gao Dufang. When the liquid medicine flows to the outlet end of the film-shaped channel 13, at the same time, the liquid medicine has the two directions of flow of the bubble discharge channel 14 and the measuring micro-channel 6, and the liquid medicine is either upwards moved to be discharged from the bubble discharge channel 14 or enters the next stage to be detected from the measuring micro-channel 6 under the action of pressure. Since the diameter of the measuring micro-channel 6 is smaller than that of the bubble discharge channel 14 and the liquid medicine gathered by the hydrophilic unit 12 is close to the side of the liquid medicine gathered by the hydrophilic unit 12, the measuring micro-channel 6 is preferably filled with the liquid medicine gathered by the hydrophilic unit 12, and the bubbles in the liquid medicine gathered by the side of the hydrophobic unit 11 are only discharged from the bubble discharge channel 14 along with the upward movement of the liquid medicine, and do not move downward into the measuring micro-channel 6 against the gravity direction.
In order to gather bubbles in the liquid medicine at one side of the hydrophobic unit 11, the hydrophobic unit 11 is made of polytetrafluoroethylene material, and the hydrophilic unit 12 is made of quartz glass. Specifically, the upper body of the film-shaped channel 13 is made of hydrophobic polytetrafluoroethylene, the lower body of the film-shaped channel 13 is made of hydrophilic quartz glass, namely, the upper surface of the film-shaped channel 13 is a hydrophobic surface, the lower surface of the film-shaped channel 13 is a hydrophilic surface, and the difference of hydrophilicity and hydrophobicity of materials is utilized to cause upward pulling force on micro bubbles in the exhaust micro channel, so that the bubbles are gathered on one side close to the upper surface of the film-shaped channel 13. Of course, the hydrophobic unit 11 may be made of other hydrophobic materials, and the hydrophilic unit 12 may be made of other hydrophilic materials, so long as the effects are achieved without reacting with the chemical solution, and the present application is not limited thereto.
In order to store and process the measured data of the refractive index measuring module 4, the refractometer further comprises a control module for storing and processing the measured data of the refractive index measuring module 4, the control module is in signal connection with the refractive index measuring module 4 and the temperature control module 2, and the control module obtains the detection signal of the temperature control module 2 and controls the detection signal to enable the temperature of the liquid medicine to be in a set value. The control module is an existing controller, which is in the prior art, and is not described herein, however, the control module may not be used, and the temperature control module 2 and the refractive index measurement module 4 are connected with the PLC of the experimental device, so that a special program is written on the PLC of the experimental device, and the functions identical to those of the control module are realized.
For the temperature of convenient monitoring liquid medicine and to controlling the temperature to the liquid medicine, temperature control module 2 sets up between bubble discharge module 1 and bubble detection module 3, and temperature control module 2 includes temperature detection unit and temperature control unit, and control module is according to temperature detection unit's detected signal control temperature control unit to the liquid medicine intensifies or falls to make the temperature of liquid medicine be in the setting value.
Specifically, the temperature detection unit is a temperature sensor 21 disposed on the measurement microchannel 6 in the height direction, and the temperature control unit is a semiconductor refrigeration sheet 22 disposed along the extending direction of the measurement microchannel 6. Specifically, the temperature sensor 21 is disposed at a side close to the refractive index measuring module 4, and the semiconductor refrigerating sheet 22 is disposed at a side close to the bubble discharging module 1, that is, the temperature sensor 21 monitors the liquid medicine after temperature control, so as to ensure that the temperature of the liquid medicine flowing out from the temperature control module 2 is at a set temperature value. The temperature sensor 21 adopts a high-precision PT100 element, and can accurately measure the temperature to be within 0.02 ℃, so that the temperature is controlled to be 20+/-0.05 ℃ and kept consistent with a laboratory. The two semiconductor refrigerating sheets 22 are arranged and distributed on two sides of the measuring micro-channel 6, wherein the semiconductor refrigerating sheets 22 can heat or refrigerate to heat or cool the liquid medicine, which is the prior art and will not be described herein.
In order to facilitate replacement and maintenance of the temperature sensor 21, a mounting hole is vertically arranged in the height direction and communicated above the measurement micro-channel 6, and the temperature sensor 21 is inserted into the mounting hole. Specifically, the temperature sensor 21 is installed in the installation hole in a plugging manner, and the detection end is plugged in the measurement micro-channel 6, so that the disassembly and the replacement are convenient.
In order to further separate bubbles possibly existing in the liquid medicine, an installation space 23 is formed at the joint of the installation hole and the measurement micro-channel 6, the installation space 23 is far larger than the measurement micro-channel 6, and the installation space 23 is used for carrying out secondary collection on residual bubbles in the liquid medicine. Since the temperature sensor 21 is inserted into the measuring microchannel 6, a part of the space of the measuring microchannel 6 is occupied, when the liquid medicine flows through the detection end of the temperature sensor 21, since the space of the measuring microchannel 6 is small, the liquid medicine flows through both sides of the temperature sensor 21, meanwhile, since the installation space 23 exists above, the liquid medicine slightly moves upwards in the installation space 23, the air bubbles are relatively light and move upwards in the extrusion process of the liquid medicine, so that the air bubbles are positioned in the installation space 23, and when the liquid medicine flows out of the installation space 23, the air bubbles stay in the installation space 23 under the blocking of the inner wall of the air bubble transfer space, so that the secondary collection of residual air bubbles in the liquid medicine is realized.
In order to further screen out air bubbles possibly existing in the detected liquid medicine, the refractometer further comprises an air bubble detection module 3 arranged on a measurement micro-channel 6 of the temperature control module 2 connected to the refractive index measurement module 4, and the air bubble detection module 3 comprises an incident light part 31 and a detection part 32 of optical fiber sensors of sensors oppositely arranged on two sides of the measurement micro-channel 6. The temperature of the liquid medicine passing through the temperature control module 2 is kept constant, no bubbles basically exist, the external interference is avoided, but individual bubbles can occasionally flow in, therefore, a bubble detection module 3 is arranged between the temperature control module 2 and the refractive index measurement module 4, the bubble detection module 3 is an optical fiber sensor, the light inlet part 31 and the detection part 32 of the optical fiber sensor are oppositely arranged at two sides of the measurement micro-channel 6, light is emitted from the light inlet part 31 of the optical fiber sensor, penetrates the liquid medicine to enter the detection part 32 of the optical fiber sensor, and whether bubbles exist in the liquid medicine is determined by the intensity change of the intensity change.
In order to screen out the measurement data containing bubbles, which is measured by the refractive index measurement module 4, the bubble detection module 3 is in signal connection with the control module, and the control module determines the position of the bubbles according to the detection signal of the bubble detection module 3 and the set flow velocity of the liquid medicine so as to exclude the detection data of the corresponding position of the refractive index measurement module 4. Specifically, when there is bubble in the liquid medicine, the intensity of light changes, and the optical fiber sensor sends detection signal to control module, and control module calculates the time after about several seconds according to the settlement velocity of detection signal and liquid medicine velocity of flow, and data may be unreal, and control module can discard this part of data through data processing's mode to keep data stable.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (10)

1. A bubble-resistant high stability refractometer, said refractometer comprising:
the refractive index measuring module is used for detecting the concentration of the liquid medicine;
the temperature control module is used for monitoring the temperature of the liquid medicine entering the refractive index measurement module and controlling the temperature of the liquid medicine to be at a set value; and
The bubble discharge module comprises a hydrophobic unit, a hydrophilic unit arranged below the hydrophobic unit and a film-shaped channel formed between the hydrophobic unit and the hydrophilic unit, wherein the outlet end of the film-shaped channel is respectively communicated with an upward extending bubble discharge channel and a downward extending measurement micro-channel, the pipe diameter of the measurement micro-channel is smaller than that of the bubble discharge channel, and the measurement micro-channel is connected to the bubble detection module.
2. The bubble-resistant high stability refractometer of claim 1, wherein the bubble evacuation channel and the measurement microchannel axis are collinear at Gao Dufang.
3. The bubble-resistant high stability refractometer of claim 2, wherein the hydrophobic unit is polytetrafluoroethylene material and the hydrophilic unit is quartz glass.
4. The bubble-resistant high-stability refractometer according to claim 1, further comprising a control module for storing and processing measurement data of the refractive index measurement module, wherein the control module is in signal connection with the refractive index measurement module and the temperature control module, and the control module obtains detection signals of the temperature control module and controls the detection signals to enable the temperature of the liquid medicine to be in a set value.
5. The anti-bubble high-stability refractometer according to claim 2, wherein the temperature control module is arranged between the bubble discharge module and the bubble detection module, the temperature control module comprises a temperature detection unit and a temperature control unit, and the control module controls the temperature control unit to raise or lower the temperature of the liquid medicine according to the detection signal of the temperature detection unit so that the temperature of the liquid medicine is at a set value.
6. The bubble-resistant high-stability refractometer according to claim 5, wherein the temperature detecting unit is a temperature sensor disposed on the measuring microchannel in a height direction, and the temperature controlling unit is a semiconductor refrigerating sheet disposed in an extending direction of the measuring microchannel.
7. The bubble-resistant high-stability refractometer according to claim 6, wherein a mounting hole is vertically arranged in the height direction and communicated with the upper part of the measuring microchannel, and the temperature sensor is inserted into the mounting hole.
8. The bubble-resistant high-stability refractometer of claim 7, wherein a mounting space is formed at the junction of the mounting hole and the measuring microchannel, the mounting space being substantially larger than the measuring microchannel, the mounting space being for secondary collection of residual bubbles in the liquid medicine.
9. The bubble resistant high stability refractometer of claim 5, further comprising a bubble detection module disposed on the measurement microchannel where the temperature control module is connected to the refractive index measurement module, the bubble detection module comprising an entry portion and a detection portion of fiber optic sensors of sensors disposed opposite sides of the measurement microchannel.
10. The anti-bubble high-stability refractometer according to claim 9, wherein the bubble detection module is in signal connection with the control module, and the control module determines the position of the bubble according to the detection signal of the bubble detection module and the set flow rate of the liquid medicine so as to exclude the detection data of the corresponding position of the refractive index measurement module.
CN202310660273.8A 2023-06-05 2023-06-05 Bubble-resistant high-stability refractometer Active CN116625990B (en)

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