CN116625568A - High-range integrated capacitive pressure sensor - Google Patents
High-range integrated capacitive pressure sensor Download PDFInfo
- Publication number
- CN116625568A CN116625568A CN202310921476.8A CN202310921476A CN116625568A CN 116625568 A CN116625568 A CN 116625568A CN 202310921476 A CN202310921476 A CN 202310921476A CN 116625568 A CN116625568 A CN 116625568A
- Authority
- CN
- China
- Prior art keywords
- plate
- insulating plate
- pressure sensor
- cylinder
- capacitive pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 25
- 239000003990 capacitor Substances 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 11
- 238000002955 isolation Methods 0.000 claims abstract description 4
- 239000011521 glass Substances 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 229920006335 epoxy glue Polymers 0.000 claims description 2
- 229910001256 stainless steel alloy Inorganic materials 0.000 claims description 2
- 238000001465 metallisation Methods 0.000 abstract description 3
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000012530 fluid Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000010309 melting process Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/10—Internal combustion engine [ICE] based vehicles
- Y02T10/40—Engine management systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The application discloses a high-range integrated capacitive pressure sensor, which comprises a base, an isolation gap and a cylinder, wherein the lower end plate of the cylinder is airtight, the plate is thicker than the cylinder wall, a pressure guiding port is formed in the lower end face of the base and the lower end face of the wall cylinder, a circular insulating plate and a circular insulating plate are respectively bonded correspondingly through bonding materials, a metal film is plated on the surface of the circular insulating plate to serve as an upper polar plate of a variable capacitor, and a metal film is plated on the surface of the circular insulating plate to serve as a circular gasket. The insulating plate with the metal film on the upper surface is adhered to the annular insulating plate through an adhesive material, and the metal film on the insulating plate consists of two semicircular metal films which are mutually separated, corresponds to the upper polar plate respectively and is used as the lower polar plate of the variable capacitor, and the upper polar plate and the lower polar plate form 2 capacitors which are connected in series and are equivalent to 1 variable capacitor. The two hole metallization leads are correspondingly connected with the two semicircular metal films respectively and serve as outgoing lines of the variable capacitor.
Description
Technical Field
The application relates to the field of pressure sensors, in particular to a high-range integrated capacitive pressure sensor with the pressure of more than 10 MPa.
Background
The pressure sensor applied in the car, the low range (less than 1 MPa) adopts the silicon piezoresistance type pressure sensor mainly made by MEMS technology; the middle measuring range (1-10 MPa) adopts a ceramic capacitor type pressure sensor; the high range (more than 10 MPa) adopts a silicon piezoresistive pressure sensor which is formed by bonding a silicon strain gauge to a stainless steel elastic diaphragm by a glass micro-melting process. The silicon piezoresistive pressure sensor which is formed by bonding a silicon strain gauge to a stainless steel elastic diaphragm by a glass micro-melting process is poor in temperature stability because of large linear expansion coefficient differences of stainless steel, glass and silicon in a material system and large temperature drift of the silicon piezoresistive pressure sensor, which is different from a ceramic capacitance type pressure sensor. Ceramic capacitance is not suitable for high-range pressure sensors because of its principle (the deflection change of the elastic diaphragm is very small in high-range).
Disclosure of Invention
In order to solve the technical problem of poor temperature stability of a high-range (more than 10 MPa) pressure sensor, the application constructs a capacitive pressure sensor suitable for the high range.
In order to achieve the above purpose, the present application provides the following technical solutions:
the application designs a novel high-range integrated capacitive pressure sensor, which comprises a base and an isolation gap, wherein the upper end of the novel high-range integrated capacitive pressure sensor is connected with a cylinder with a base lower end plate which is sealed, the lower end plate is thicker than the wall of the cylinder, a pressure guiding port is formed in the lower end face of the base and the lower end face of the cylinder, a circular insulating plate and a circular insulating plate are respectively and correspondingly bonded through bonding materials, a metal film is plated on the surface of the circular insulating plate to serve as an upper polar plate of a variable capacitor, and a metal film is plated on the surface of the circular insulating plate to serve as a circular gasket. The capacitor is characterized by further comprising an insulating plate with a metal film plated on the upper surface, wherein the insulating plate is adhered to the annular insulating plate through an adhesive material, the metal film on the insulating plate consists of two semicircular metal films which are mutually separated, the two semicircular metal films respectively correspond to the upper polar plate and serve as the lower polar plate of the variable capacitor, and the upper polar plate and the lower polar plate form 2 capacitors which are connected in series and are equivalent to 1 variable capacitor. The two hole metallization leads are correspondingly connected with the two semicircular metal films respectively and serve as outgoing lines of the variable capacitor. Finally, a high-range integrated capacitive pressure sensor is formed.
By adopting the technical scheme, the fluid to be measured enters from the pressure guiding port, the side wall of the cylinder is axially stretched under the action of the fluid pressure, the lower end face of the cylinder is driven to displace downwards at the moment, the upper polar plate serving as the variable capacitor is driven to displace downwards at the moment, the distance between the upper polar plate and the two lower polar plates is changed at the moment, and the capacitance of the variable capacitor formed by the upper polar plate and the two lower polar plates is also changed at the moment. The change of the capacitance value of the variable capacitor formed by the upper polar plate and the two lower polar plates is caused by the pressure of the measured fluid, and the pressure of the measured fluid can be measured by measuring the change of the capacitance value. The application not only has the advantages that the ceramic capacitive pressure sensor has good temperature stability, and the silicon piezoresistive pressure sensor which is bonded to the stainless steel elastic diaphragm by the glass micro-melting process can be used for high-range measurement, but also abandons the defects that the ceramic capacitive pressure sensor can not be used for the high-range pressure sensor and the silicon piezoresistive pressure sensor which is bonded to the stainless steel elastic diaphragm by the glass micro-melting process has poor temperature stability.
In order to better realize the aim of the application, the application also has the following better technical scheme:
in some embodiments, the metallic material may be stainless steel or an aluminum alloy material, as desired for the flow pressure design.
In some embodiments, the bonding material may be a low-CTE epoxy glue or a low-temperature sintered glass, as desired by the design.
In some embodiments, the annular insulating plate and the disc-shaped insulating plate are alumina ceramics according to design requirements.
In some embodiments, the wall thickness of the cylinder is 0.2-0.5 mm and the thickness of the plate at the lower end of the cylinder is 1-3 mm.
In some embodiments, the thickness of the metal film on the surface of the disc-shaped insulating plate is less than 1 micron.
In some embodiments, the surface of the annular insulating plate is plated with a metal film having a thickness of 3 to 10 microns.
In some embodiments, the disc-shaped insulating plate and the annular-shaped insulating plate are in the same plane.
Drawings
Fig. 1 is a schematic cross-sectional structure of an embodiment of the present application.
Detailed Description
The present application will be described in further detail with reference to examples.
Referring to fig. 1; the application discloses a high-range integrated capacitive pressure sensor which is made of stainless steel or aluminum alloy materials and integrally comprises a base 1, an isolation gap 2, a cylinder 3, a pressure guiding port 12, a lower end face 4 of the cylinder 3 and a lower end face 13 of the base 1, wherein the upper end and the base are connected, and the lower end of the cylinder is sealed by a thick plate. The fluid to be measured enters from the pressure guiding port 12, and under the action of the fluid pressure, the side wall of the cylinder 3, the upper end of which is connected with the base and the lower end of which is sealed by the thick plate, is stretched to drive the lower end surface 4 of the cylinder to displace downwards. The lower end face 13 of the base 1 and the lower end face 4 of the cylinder 3 are made of a bonding material 14 of low-linear expansion coefficient epoxy resin glue or low-temperature sintered glass, and are respectively bonded with a circular insulating plate 15 made of alumina ceramic material and a circular insulating plate 5 made of alumina ceramic material. The thickness of the metal thin film provided on the surface of the disc-shaped insulating plate 5 is 0.6 or 0.8 μm and serves as the upper plate 8 of the variable capacitor. The surface of the circular insulating plate (15) is plated with a metal film with the thickness of 3 or 6 or 10 microns and is used as a circular gasket 7. The upper surface of the insulating plate 16 is plated with two semicircular metal films which are 0.6 or 0.8 micrometers thick and separated from each other, the semicircular metal films are respectively used as lower polar plates 9-1 and 9-2 of the variable capacitor, the hole metallization leads 10-1 and 10-2 are respectively connected with the lower polar plates 9-1 and 9-2, and the annular insulating plate 15 and the insulating plate 16 are bonded together through bonding materials 11 of low-linear expansion coefficient epoxy resin glue or low-temperature sintered glass.
Under the action of fluid pressure, the side wall of the cylinder 3, the upper end of which is connected with the base and the lower end of which is sealed by a thick plate, is axially stretched, the lower end face 4 of the cylinder 3 is driven to displace downwards, the upper polar plate 8 serving as a variable capacitor is driven to displace downwards, the distance between the upper polar plate 8 and the lower polar plates 9-1 and 9-2 is changed, and the capacitance value of the capacitor formed by the upper polar plate 8 and the lower polar plates 9-1 and 9-2 is also changed. The change of the capacitance value of the capacitor formed by the upper polar plate 8 and the lower polar plates 9-1 and 9-2 is caused by the pressure of the measured fluid, and the pressure of the measured fluid can be measured by measuring the change of the capacitance value.
Alternatively, the annular insulating plate 15 and the disc insulating plate 5 may be made of the same ceramic sheet, and the annular insulating plate 15 and the disc insulating plate 5 may be cut and separated by a laser cutter after the ceramic sheet is bonded to the lower end face 13 of the base 1 and the lower end face 4 of the cylinder 3. This method can better ensure that the disc-shaped insulating plate 5 and the annular insulating plate 15 are as flush as possible.
What has been described above is merely some embodiments of the present application. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit of the application.
Claims (8)
1. The high-range integrated capacitive pressure sensor is characterized by comprising a base (1) made of metal materials integrally, an isolation gap (2), a cylinder (3) with the upper end connected with the lower end plate of the base (1) and the lower end plate of the cylinder (3) being sealed, wherein the lower end plate is thicker than the cylinder wall of the cylinder (3), a pressure guiding port (12), a circular insulating plate (15) and a circular insulating plate (5) are respectively bonded on the lower end surface (13) of the base (1) and the lower end surface (4) of the cylinder (3) correspondingly through bonding materials (14), a metal film is plated on the surface of the circular insulating plate (5) as an upper polar plate (8) of a variable capacitor, a metal film is plated on the surface of the circular insulating plate (15) as an annular gasket (7), an insulating plate (16) with the upper surface plated with a metal film, two semicircular metal films which are separated from each other are respectively used as a lower polar plate (9-1) and a lower polar plate (9-2) of the variable capacitor, and the circular insulating plates (9-1) and (10-2) are respectively bonded with the lower polar plate (9-1-2) and the circular insulating plate (16) through bonding materials.
2. The high range integrated capacitive pressure sensor of claim 1 wherein the metallic material is stainless steel or aluminum alloy material.
3. The high-range integrated capacitive pressure sensor according to claim 1, wherein the wall thickness of the cylinder (3) is 0.2-0.5 mm, and the thickness of the plate at the lower end of the cylinder (3) is 1-3 mm.
4. The high range integrated capacitive pressure sensor of claim 1 wherein the bonding materials (11) and (14) are epoxy glue or low temperature sintered glass with low coefficients of linear expansion.
5. The high-range integrated capacitive pressure sensor according to claim 1, characterized in that the annular insulating plate (15) and the circular insulating plate (5) are alumina ceramic insulating plates.
6. The high-range integrated capacitive pressure sensor according to claim 1, characterized in that the thickness of the metal film on the surface of the disc-shaped insulating plate (5) is less than 1 micron.
7. The high-range integrated capacitive pressure sensor according to claim 1, characterized in that the thickness of the metal film plated on the surface of the annular insulating plate (15) is 3-10 microns.
8. The high-range integrated capacitive pressure sensor according to claim 1, characterized in that the disc-shaped insulating plate (5) and the annular insulating plate (15) are in the same plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310921476.8A CN116625568B (en) | 2023-07-26 | 2023-07-26 | High-range integrated capacitive pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310921476.8A CN116625568B (en) | 2023-07-26 | 2023-07-26 | High-range integrated capacitive pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116625568A true CN116625568A (en) | 2023-08-22 |
| CN116625568B CN116625568B (en) | 2023-11-10 |
Family
ID=87597756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310921476.8A Active CN116625568B (en) | 2023-07-26 | 2023-07-26 | High-range integrated capacitive pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116625568B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1142049A (en) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | Ceramic capacitor-type pressure transmitter and production technology thereof |
| US5656780A (en) * | 1996-03-28 | 1997-08-12 | Kavlico Corporation | Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm |
| CN1334451A (en) * | 2000-07-15 | 2002-02-06 | 山东省硅酸盐研究设计院 | Ceramic pressure sensor and differential pressure sensor |
| WO2020057218A1 (en) * | 2018-09-17 | 2020-03-26 | 胡耿 | Capacitive force sensor of micropolar spacing and manufacturing method therefor |
| CN212779682U (en) * | 2020-09-04 | 2021-03-23 | 瑞安市福达汽车部件有限公司 | Capacitive pressure sensor |
| CN115585934A (en) * | 2022-12-14 | 2023-01-10 | 深圳市长天智能有限公司 | Silicon capacitance type pressure sensor and manufacturing method thereof |
| CN115790954A (en) * | 2022-12-27 | 2023-03-14 | 中航光电华亿(沈阳)电子科技有限公司 | Capacitive pressure core |
-
2023
- 2023-07-26 CN CN202310921476.8A patent/CN116625568B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1142049A (en) * | 1995-07-28 | 1997-02-05 | 山东三鑫科技(集团)股份有限公司 | Ceramic capacitor-type pressure transmitter and production technology thereof |
| US5656780A (en) * | 1996-03-28 | 1997-08-12 | Kavlico Corporation | Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm |
| CN1334451A (en) * | 2000-07-15 | 2002-02-06 | 山东省硅酸盐研究设计院 | Ceramic pressure sensor and differential pressure sensor |
| WO2020057218A1 (en) * | 2018-09-17 | 2020-03-26 | 胡耿 | Capacitive force sensor of micropolar spacing and manufacturing method therefor |
| CN212779682U (en) * | 2020-09-04 | 2021-03-23 | 瑞安市福达汽车部件有限公司 | Capacitive pressure sensor |
| CN115585934A (en) * | 2022-12-14 | 2023-01-10 | 深圳市长天智能有限公司 | Silicon capacitance type pressure sensor and manufacturing method thereof |
| CN115790954A (en) * | 2022-12-27 | 2023-03-14 | 中航光电华亿(沈阳)电子科技有限公司 | Capacitive pressure core |
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| Publication number | Publication date |
|---|---|
| CN116625568B (en) | 2023-11-10 |
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