CN116625255A - Thickness gauge based on white light interference - Google Patents

Thickness gauge based on white light interference Download PDF

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Publication number
CN116625255A
CN116625255A CN202310911529.8A CN202310911529A CN116625255A CN 116625255 A CN116625255 A CN 116625255A CN 202310911529 A CN202310911529 A CN 202310911529A CN 116625255 A CN116625255 A CN 116625255A
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CN
China
Prior art keywords
fixedly connected
shaped
wall
block
thickness gauge
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Granted
Application number
CN202310911529.8A
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Chinese (zh)
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CN116625255B (en
Inventor
肖文科
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Boltzmann Guangzhou Technology Co ltd
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Boltzmann Guangzhou Technology Co ltd
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Priority to CN202310911529.8A priority Critical patent/CN116625255B/en
Publication of CN116625255A publication Critical patent/CN116625255A/en
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Publication of CN116625255B publication Critical patent/CN116625255B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/04Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/043Allowing translations
    • F16M11/046Allowing translations adapted to upward-downward translation movement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/02Heads
    • F16M11/18Heads with mechanism for moving the apparatus relatively to the stand
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/42Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters with arrangement for propelling the support stands on wheels
    • F16M11/425Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters with arrangement for propelling the support stands on wheels along guiding means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004Supports

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

The invention discloses a thickness gauge based on white light interference, which relates to the technical field of thickness gauges and comprises a support frame, a threaded screw rod, a first driving motor and a traction block, wherein the bottom end of the traction block is fixedly connected with a fixed disc, the bottom end of the fixed disc is slidably connected with a T-shaped sliding block, one end of the T-shaped sliding block is provided with a pulling connecting piece, an intermittent amplifier, a thickness gauge body and a calibration stabilizing mechanism. According to the invention, the pulling connecting piece is arranged, the output end of the second driving motor drives the second conical gear ring to rotate, the first bevel gear is driven to drive the first worm to rotate, the first worm wheel is driven to rotate through the rotating shaft, the rotating pushing frame is driven to transversely move through the rectangular pulling block by the rotating pushing column, the first driving motor drives the threaded screw rod to rotate, and the traction block is driven to drive the thickness gauge body to longitudinally move, so that the measuring range of the thickness gauge body is enlarged, and the detection accuracy is improved.

Description

Thickness gauge based on white light interference
Technical Field
The invention relates to the technical field of thickness gauges, in particular to a thickness gauge based on white light interference.
Background
With the rapid development of science and technology and production level, the requirements of people on product quality are increasingly improved, and in some engineering technical fields with high requirements on product precision, such as optical lens processing, aerospace material processing and the like, strict control on the thickness of a product or a product surface layer is required.
The current process of measuring the thickness of a transparent and semitransparent film by using a thickness gauge based on white light interferometry generally comprises the steps of measuring the surface density of the film, converting the surface density into the thickness of the film by using the material density, and not directly measuring the thickness of the film.
Disclosure of Invention
The invention aims at: in order to solve the problem that the thickness gauge based on white light interference is inaccurate in measurement, the thickness gauge based on white light interference is provided.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a thickness gauge based on white light is interfered, includes the support frame, the inboard rotation of support frame is connected with the screw thread lead screw, first driving motor is installed to the one end of support frame, first driving motor's output with screw thread lead screw is connected, the inboard sliding connection of support frame has the traction block, just the traction block cup joints the outer wall of screw thread lead screw, the bottom fixedly connected with fixed disk of traction block, the bottom sliding connection of fixed disk has T shape slider, the one end of T shape slider is provided with pulls the connecting piece, T shape slider outer wall is provided with the swing frame, the inboard of swing frame is provided with and extends to the outside intermittent type expander of T shape slider, the thickness gauge body is installed to the bottom of T shape slider, one side outer wall fixedly connected with mount of fixed disk, the bearing is installed to the inboard of mount, the swivel joint is installed to the inner circle of bearing, the outer wall of swivel joint is provided with calibration stabilizing mean.
As still further aspects of the invention: the rotary pushing device comprises a rotary pushing disc, a rotary pushing column, a rectangular pulling block and a rotary pushing frame, wherein the rotary pushing disc is fixedly connected to the bottom end of the rotary pushing disc, the rotary pushing column is fixedly connected to the bottom end of the rotary pushing disc, the rectangular pulling block is fixedly connected with one end of the T-shaped sliding block, one end of the rectangular pulling block penetrates through the rotary pushing frame and is fixedly connected with the outside of the fixed disc, a return groove is formed in the inner side of the rotary pushing frame, the rotary pushing column is arranged in the inner side of the return groove, and an intermittent driver is arranged on the top end of the fixed frame and the outer wall of the rotary shaft.
As still further aspects of the invention: the intermittent drive comprises a first worm wheel fixedly connected with the outer wall of the rotating shaft, a first connecting seat is fixedly connected with the top end of the fixing frame, a first worm is connected to the inner side of the first connecting seat in a rotating mode, the first worm is meshed with the first worm wheel, one end of the first worm is fixedly connected with a first bevel gear, the top end of the fixing disc is fixedly connected with an L-shaped connecting frame, a second driving motor is mounted on the inner side of the L-shaped connecting frame, a connecting shaft is connected with the output end of the second driving motor, and a second conical ring is fixedly connected with the outer wall of the connecting shaft.
As still further aspects of the invention: the calibration stabilizing mechanism comprises a second connecting seat fixedly connected to the top end of the fixing frame, a reciprocating screw rod is rotatably connected to the inner side of the second connecting seat, a rectangular guide block is fixedly connected to the inner side of the second connecting seat below the reciprocating screw rod, a rectangular sliding block is sleeved on the outer wall of the rectangular guide block, an L-shaped connecting rod is fixedly connected to one side outer wall of the rectangular sliding block, an arc-shaped calibration block is fixedly connected to one end of the L-shaped connecting rod, a plurality of balls are inlaid on the outer wall of the rotating shaft, first conical toothed rings are fixedly connected to the upper portions of the second conical toothed rings on the outer walls of the connecting shaft, a second conical gear is fixedly connected to one end of the reciprocating screw rod, and a correction auxiliary unit is arranged on the outer wall of the rectangular sliding block.
As still further aspects of the invention: the device comprises a plurality of arc-shaped calibration blocks, wherein two reciprocating screw rods are arranged, two reciprocating screw rods are fixedly connected between the two reciprocating screw rods, two rectangular sliding blocks, L-shaped connecting rods and the arc-shaped calibration blocks are respectively arranged, and crescent pins matched with the reciprocating screw rods are arranged on the inner sides of the two rectangular sliding blocks.
As still further aspects of the invention: the outer wall part of the first conical tooth ring is fixedly connected with a plurality of first bevel gears meshed with the second conical tooth ring, the outer wall part of the second conical tooth ring is fixedly connected with a plurality of second bevel gears meshed with the first conical tooth ring, the second bevel gears are initially meshed with the first conical tooth ring, and the first bevel gears are not initially meshed with the second conical tooth ring.
As still further aspects of the invention: the correction auxiliary unit comprises power rods which are respectively fixed on the outer walls of the rectangular sliding blocks, the bottom ends of the power rods are fixedly connected with L-shaped power blocks, correction blocks are connected to the inner sides of the L-shaped power blocks in a sliding mode, one ends of the correction blocks penetrate through discs which are fixedly connected with the outer portions of the L-shaped power blocks, springs are fixedly connected to the outer walls of the discs, and one ends of the springs are fixedly connected with the L-shaped power blocks.
As still further aspects of the invention: the intermittent expander comprises a rotating shaft fixedly connected to the inner side of the swing frame, one end of the rotating shaft penetrates through the inner side of the T-shaped sliding block and is in rotating connection with the T-shaped sliding block, a second worm wheel is fixedly connected to the outer wall of the rotating shaft, a U-shaped stand is fixedly connected to the outer wall of one side of the T-shaped sliding block, a second worm is connected to the inner side of the U-shaped stand in a rotating manner, and the second worm is meshed with the second worm wheel.
As still further aspects of the invention: the intermittent expander further comprises a rectangular connecting plate fixedly connected to the bottom end of the L-shaped power block, a sliding rod is connected to the inner side of the rectangular connecting plate in a sliding mode, a T-shaped pushing block is fixedly connected to the bottom end of the sliding rod, an auxiliary rod is fixedly connected to the bottom end of the T-shaped pushing block, a first straight gear is fixedly connected to the outer wall of the second worm, and a plurality of clamping teeth meshed with the first straight gear are fixedly connected to the inner side of the auxiliary rod.
As still further aspects of the invention: the latch is provided with a plurality of, a plurality of the latch equidistance distribute in the outer wall of auxiliary rod, the inboard of U-shaped grudging post seted up with T shape ejector pad assorted T-shaped groove, T shape ejector pad with U-shaped grudging post sliding connection.
Compared with the prior art, the invention has the beneficial effects that:
1. through setting up and pulling the connecting piece, the second driving motor output drives the second awl ring and rotates, when second awl ring outer wall helical tooth and first bevel gear contact, drive first bevel gear drive first worm rotate, thereby drive first worm wheel drive spiral push plate rotate through the swivel, and then promote through spiral push post and promote spiral push frame and drive T shape slider through the rectangle and carry out lateral shifting, thereby drive the calibrator body and carry out lateral shifting, first driving motor drive screw rod rotates, thereby drive traction block drive calibrator body carries out longitudinal movement, with this scope of extension calibrator body measurement, and then improve the precision of detection;
2. through setting up the calibration stabilizing mean, drive first bevel gear ring and rotate when the continuous axle rotates, when second bevel gear ring outer wall second bevel gear and first bevel gear are separated, first bevel gear of first bevel gear ring outer wall first bevel gear contacts with second bevel gear, drive second bevel gear and drive reciprocating screw and rotate, reciprocating screw rotation drive rectangular sliding block drives arc calibration piece and ball separation through L shape connecting rod, when first bevel gear ring outer wall first bevel gear and second bevel gear separation, rectangular sliding block has carried out reciprocating motion, thereby make two arc calibration pieces support respectively on the ball of swivel both sides, calibrate the axle position with this, thereby avoid bearing inner race and outer lane to take place the skew at the in-process axle center of long-time use, and then improved the accuracy that the thickness gauge body moved, make the thickness gauge body can realize that the data in the intermittent type measurement process is more accurate;
3. by arranging the correction auxiliary unit, when two rectangular sliding blocks respectively drive one L-shaped connecting rod to move in the direction away from the rotating shaft, one L-shaped power block is respectively driven by one power rod to approach the rectangular pulling block, and when the two correction blocks respectively prop against the outer wall of the rectangular pulling block, the positions of the correction blocks are calibrated, so that the accuracy of the thickness gauge body after moving is further improved;
4. through setting up intermittent type expander, when the correction piece supports and pulls the piece outer wall at the rectangle, pull spring one end when L shape power piece continues to remove, when L shape power piece continues to pull the piece direction to the rectangle, link the board through the rectangle, T shape ejector pad drives auxiliary lever and moves to first straight gear direction, when latch and first straight gear contact, drive first straight gear and drive the second worm and rotate, thereby drive the second worm wheel and drive the pivot and rotate, and then drive the calibrator body through the swinging frame and swing, with this fine setting to the calibrator body position, because a plurality of latches equidistance distributes in the outer wall of auxiliary lever, with this intermittent type formula swing that makes the calibrator body, thereby make the calibrator body stable when stopping, with this further precision that has improved the calibrator body measurement.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is an enlarged view of the invention at A in FIG. 1;
FIG. 3 is a schematic view of the bottom structure of the holding pan of the present invention;
FIG. 4 is a schematic diagram of a batch-type amplifier according to the present invention;
FIG. 5 is a schematic view of the inside structure of the auxiliary lever according to the present invention;
FIG. 6 is a schematic diagram of a deviation correcting auxiliary unit according to the present invention;
FIG. 7 is a schematic view of the top structure of the fixing frame of the present invention;
fig. 8 is an enlarged view of fig. 7 at B in accordance with the present invention.
In the figure: 1. a support frame; 2. a first driving motor; 3. a threaded screw rod; 4. a traction block; 5. a fixed plate; 6. an L-shaped connecting frame; 7. a second driving motor; 8. a first conical ring gear; 9. a rotary pushing disc; 10. a fixing frame; 11. a first connection base; 12. a second conical ring; 13. a first bevel gear; 14. a first worm; 15. a bearing; 16. a first worm wheel; 17. a ball; 18. an arc calibration block; 19. an L-shaped connecting rod; 20. a second connecting seat; 21. a reciprocating screw rod; 22. a rectangular slide block; 23. a rotating shaft; 24. a rectangular guide block; 25. pushing the frame in a rotating way; 26. a second bevel gear; 27. a power lever; 28. an L-shaped power block; 29. a return groove; 30. a rotary pushing column; 31. rectangular connecting plates; 32. a slide bar; 33. t-shaped pushing blocks; 34. a thickness gauge body; 35. a T-shaped slider; 36. a rectangular pulling block; 37. a swing frame; 38. a rotating shaft; 39. a U-shaped stand; 40. a second worm wheel; 41. a second worm; 42. a first straight gear; 43. an auxiliary lever; 44. latch teeth; 45. a correction block; 46. a disc; 47. a spring; 48. and (5) connecting shafts.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "configured" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. Hereinafter, an embodiment of the present invention will be described in accordance with its entire structure.
Referring to fig. 1 to 8, in an embodiment of the invention, a thickness gauge based on white light interference comprises a support frame 1, wherein a threaded screw rod 3 is rotatably connected to the inner side of the support frame 1, a first driving motor 2 is installed at one end of the support frame 1, an output end of the first driving motor 2 is connected with the threaded screw rod 3, a traction block 4 is slidably connected to the inner side of the support frame 1, the traction block 4 is sleeved on the outer wall of the threaded screw rod 3, a fixed disk 5 is fixedly connected to the bottom end of the traction block 4, a T-shaped sliding block 35 is slidably connected to the bottom end of the fixed disk 5, a pulling connecting piece is arranged at one end of the T-shaped sliding block 35, a swinging frame 37 is arranged on the outer wall of the T-shaped sliding block 35, an intermittent amplifier extending to the outer portion of the T-shaped sliding block 35 is arranged at the inner side of the swinging frame 37, a thickness gauge body 34 is installed at the bottom end of the T-shaped sliding block 35, a fixing frame 10 is fixedly connected to one side outer wall of the fixed disk 5, a bearing 15 is installed at the inner side of the fixing frame 10, a rotating shaft 23 is installed at the inner ring of the bearing 15, and a calibrating and stabilizing mechanism is arranged on the outer wall of the rotating shaft 23.
In this embodiment: the first driving motor 2 is started, the first driving motor 2 drives the threaded screw rod 3 to rotate, and accordingly the traction block 4 is driven to drive the thickness gauge body 34 to move, and accordingly accuracy of measurement of the thickness gauge body 34 is improved.
Referring to fig. 2 to 7, the pulling connection piece includes a pushing disc 9 fixedly connected to the bottom end of a rotating shaft 23, a pushing post 30 fixedly connected to the bottom end of the pushing disc 9, a rectangular pulling block 36 fixedly connected to one end of a t-shaped slider 35, a pushing frame 25 fixedly connected to the outside of the fixed disc 5, a back-shaped groove 29 formed in the inner side of the pushing frame 25, the pushing post 30 disposed in the back-shaped groove 29, an intermittent driver disposed on the top end of the fixed frame 10 and the outer wall of the rotating shaft 23, a first worm wheel 16 fixedly connected to the outer wall of the rotating shaft 23, a first connection seat 11 fixedly connected to the top end of the fixed frame 10, a first worm 14 rotatably connected to the inner side of the first connection seat 11, a first bevel gear 13 fixedly connected to one end of the first worm 14, an L-shaped connection frame 6 fixedly connected to the top end of the fixed disc 5, a second driving motor 7 formed in the inner side of the L-shaped connection frame 6, an output end of the second driving motor 7 connected to the outer wall 48 of the fixed shaft 48, and a second bevel gear 12 fixedly connected to the outer wall 48 of the fixed shaft 48.
In this embodiment: firstly, after the thickness gauge body 34 measures a measure at one place, the second driving motor 7 is started, the output end of the second driving motor 7 drives the second conical gear ring 12 to rotate, when the inclined teeth on the outer wall of the second conical gear ring 12 are contacted with the first conical gear 13, the first conical gear 13 is driven to drive the first worm 14 to rotate, the first worm wheel 16 is driven to rotate through the rotating shaft 23, the rotating pushing disc 9 is driven to rotate through the rotating pushing column 30, the rotating pushing frame 25 is driven to transversely move through the rectangular pulling block 36, the thickness gauge body 34 is driven to transversely move, the measuring range of the thickness gauge body 34 is enlarged, and the detecting precision is improved.
Referring to fig. 2-8, the calibration and stabilization mechanism comprises a second connecting seat 20 fixedly connected to the top end of the fixing frame 10, a reciprocating screw rod 21 is rotatably connected to the inner side of the second connecting seat 20, a rectangular guide block 24 is fixedly connected to the inner side of the second connecting seat 20 below the reciprocating screw rod 21, a rectangular slide block 22 is sleeved on the outer walls of the reciprocating screw rod 21 and the rectangular guide block 24, an L-shaped connecting rod 19 is fixedly connected to one side outer wall of the rectangular slide block 22, one end of the L-shaped connecting rod 19 is fixedly connected with an arc calibration block 18, a plurality of balls 17 are inlaid on the outer wall of a rotating shaft 23, a first bevel gear 8 is fixedly connected to the upper side of a second bevel gear 12 on the outer wall of the connecting shaft 48, a second bevel gear 26 is fixedly connected to one end of the reciprocating screw rod 21, an auxiliary unit is arranged on the outer wall of the rectangular slide block 22, two crescent moon-shaped guide blocks 24 are fixedly connected between the reciprocating screw rod 21, two rectangular slide blocks 22 and the outer walls of the L-shaped connecting rod 19 are respectively provided with two rectangular slide blocks 22, a plurality of rectangular slide blocks 19 are fixedly connected with a plurality of round bevel pins matched with the reciprocating screw rod 21, the first bevel gear 8 is fixedly connected with a plurality of bevel gears 13, a plurality of first bevel gears 13 are fixedly meshed with the second bevel gears 13, and a plurality of bevel gears 13 are fixedly meshed with the first bevel gears 13 and the first bevel gears are fixedly meshed with the second bevel gears 13.
In this embodiment: when the connecting shaft 48 rotates and drives the first bevel gear ring 8 to rotate, when the second bevel gear on the outer wall of the second bevel gear ring 12 is separated from the first bevel gear 13, the first bevel gear on the outer wall of the first bevel gear ring 8 is contacted with the second bevel gear 26, the second bevel gear 26 is driven to drive the reciprocating screw rod 21 to rotate, the reciprocating screw rod 21 rotationally drives the rectangular sliding block 22 to drive the arc-shaped calibration block 18 to separate from the ball 17 through the L-shaped connecting rod 19, and when the first bevel gear on the outer wall of the first bevel gear ring 8 is separated from the second bevel gear 26, the rectangular sliding block 22 reciprocates, so that the two arc-shaped calibration blocks 18 respectively abut against the balls 17 on two sides of the rotating shaft 23 to calibrate the position of the rotating shaft 23, thereby avoiding the axial deviation of the inner ring and the outer ring of the bearing 15 in the long-time use process, further improving the moving precision of the thickness gauge body 34 and enabling the data in the intermittent measurement process to be more accurate.
Referring to fig. 2, 3 and 6, the correction auxiliary unit includes power rods 27 respectively fixed on the outer walls of a rectangular slide block 22, the bottom ends of the power rods 27 are fixedly connected with L-shaped power blocks 28, the inner sides of the L-shaped power blocks 28 are slidably connected with correction blocks 45, one ends of the correction blocks 45 penetrate through to the outer sides of the L-shaped power blocks 28 and are fixedly connected with discs 46, the outer walls of the discs 46 are fixedly connected with springs 47, and one ends of the springs 47 are fixedly connected with the L-shaped power blocks 28.
In this embodiment: when two rectangular sliding blocks 22 respectively drive an L-shaped connecting rod 19 to move towards the direction far away from the rotating shaft 23, an L-shaped power block 28 is respectively driven by a power rod 27 to approach the rectangular pulling block 36, and when two correction blocks 45 respectively prop against the outer wall of the rectangular pulling block 36, the positions of the correction blocks 45 are calibrated, so that the accuracy of the thickness gauge body 34 after moving is further improved.
Referring to fig. 2 to 5, the intermittent amplifier includes a rotating shaft 38 fixedly connected to the inner side of the swinging frame 37, one end of the rotating shaft 38 penetrates through the inner side of the T-shaped sliding block 35 and is rotatably connected with the T-shaped sliding block 35, the outer wall of the rotating shaft 38 is fixedly connected with a second worm gear 40, one side outer wall of the T-shaped sliding block 35 is fixedly connected with a U-shaped stand 39, the inner side of the U-shaped stand 39 is rotatably connected with a second worm 41, the second worm 41 is meshed with the second worm gear 40, the intermittent amplifier further includes a rectangular connecting plate 31 fixedly connected to the bottom end of the L-shaped power block 28, the inner side of the rectangular connecting plate 31 is slidably connected with a sliding rod 32, the bottom end of the sliding rod 32 is fixedly connected with a T-shaped pushing block 33, the bottom end of the T-shaped pushing block 33 is fixedly connected with an auxiliary rod 43, the outer wall of the second worm 41 is fixedly connected with a first straight gear 42, the inner side of the auxiliary rod 43 is fixedly connected with a plurality of latches 44 meshed with the first straight gear 42, the plurality of latches 44 are equidistantly distributed on the outer wall of the auxiliary rod 43, the inner side of the U-shaped stand 39 is provided with a T-shaped pushing block 33, and the T-shaped pushing block 33 is matched with the T-shaped sliding block 33.
In this embodiment: when the correction block 45 is propped against the outer wall of the rectangular pulling block 36, one end of the spring 47 is pulled when the L-shaped power block 28 continues to move, when the L-shaped power block 28 continues to move towards the direction of the rectangular pulling block 36, the auxiliary rod 43 is driven to move towards the first straight gear 42 through the rectangular connecting plate 31 and the T-shaped pushing block 33, when the clamping teeth 44 are contacted with the first straight gear 42, the first straight gear 42 is driven to drive the second worm 41 to rotate, the second worm wheel 40 is driven to drive the rotating shaft 38 to rotate, and the thickness gauge body 34 is driven to swing through the swinging frame 37, so that the position of the thickness gauge body 34 is finely adjusted, and the plurality of clamping teeth 44 are equidistantly distributed on the outer wall of the auxiliary rod 43, so that the thickness gauge body 34 can swing intermittently, and therefore the thickness gauge body 34 can measure stably in a pause state, and the measurement accuracy of the thickness gauge body 34 is further improved.
The foregoing description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical solution of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.

Claims (10)

1. The utility model provides a thickness gauge based on white light is interfered, includes support frame (1), its characterized in that, the inboard rotation of support frame (1) is connected with screw thread lead screw (3), first driving motor (2) are installed to the one end of support frame (1), the output of first driving motor (2) with screw thread lead screw (3) are connected, the inboard sliding connection of support frame (1) has traction block (4), just traction block (4) cup joint the outer wall of screw thread lead screw (3), the bottom fixedly connected with fixed disk (5) of traction block (4), the bottom sliding connection of fixed disk (5) has T shape slider (35), the one end of T shape slider (35) is provided with pulls the connecting piece, T shape slider (35) outer wall is provided with swing frame (37), the inboard of swing frame (37) is provided with extend to the outside intermittent type expander of T shape slider (35), thickness gauge body (34) are installed to the bottom inboard of T shape slider (35), one side fixed disk (5) outer wall fixedly connected with T shape slider (35) has the bearing (10), the inner race (23) is installed to the bearing (15), the bearing (15) is installed to the inner race (15).
2. The white light interference-based thickness gauge according to claim 1, wherein the pulling connecting piece comprises a rotary pushing disc (9) fixedly connected to the bottom end of the rotary shaft (23), a rotary pushing column (30) is fixedly connected to the bottom end of the rotary pushing disc (9), a rectangular pulling block (36) is fixedly connected to one end of the T-shaped sliding block (35), a rotary pushing frame (25) is fixedly connected to the outside of the fixed disc (5) from one end of the rectangular pulling block (36), a return groove (29) is formed in the inner side of the rotary pushing frame (25), the rotary pushing column (30) is arranged in the inner side of the return groove (29), and an intermittent driver is arranged between the top end of the fixed frame (10) and the outer wall of the rotary shaft (23).
3. The thickness gauge based on white light interference according to claim 2, wherein the intermittent driver comprises a first worm wheel (16) fixedly connected to the outer wall of the rotating shaft (23), a first connecting seat (11) is fixedly connected to the top end of the fixing frame (10), a first worm (14) is rotatably connected to the inner side of the first connecting seat (11), the first worm (14) is meshed with the first worm wheel (16), a first bevel gear (13) is fixedly connected to one end of the first worm (14), an L-shaped connecting frame (6) is fixedly connected to the top end of the fixing disc (5), a second driving motor (7) is mounted on the inner side of the L-shaped connecting frame (6), a connecting shaft (48) is connected to the output end of the second driving motor (7), and a second bevel ring (12) is fixedly connected to the outer wall of the connecting shaft (48).
4. The white light interference-based thickness gauge according to claim 3, wherein the calibration and stabilization mechanism comprises a second connecting seat (20) fixedly connected to the top end of the fixing frame (10), a reciprocating screw rod (21) is rotatably connected to the inner side of the second connecting seat (20), a rectangular guide block (24) is fixedly connected to the inner side of the second connecting seat (20) below the reciprocating screw rod (21), a rectangular sliding block (22) is sleeved on the outer wall of the reciprocating screw rod (21) and the outer wall of the rectangular guide block (24), an L-shaped connecting rod (19) is fixedly connected to one side outer wall of the rectangular sliding block (22), an arc calibration block (18) is fixedly connected to one end of the L-shaped connecting rod (19), a plurality of balls (17) are embedded on the outer wall of the rotating shaft (23), a first conical ring (8) is fixedly connected to the outer wall of the connecting shaft (48), a second conical gear (26) is fixedly connected to one end of the reciprocating screw rod (21), and an auxiliary deviation rectifying unit is arranged on the outer wall of the reciprocating screw rod (22).
5. The white light interference-based thickness gauge according to claim 4, wherein two reciprocating screw rods (21) are provided, the two reciprocating screw rods (21) are fixedly connected, two rectangular sliding blocks (22), two L-shaped connecting rods (19) and two arc-shaped calibration blocks (18) are respectively provided, and crescent pins matched with the reciprocating screw rods (21) are arranged on the inner sides of the two rectangular sliding blocks (22).
6. The white light interference-based thickness gauge according to claim 4, wherein a plurality of first bevel gears meshed with the second bevel gears (26) are locally fixedly connected to the outer wall of the first bevel gear ring (8), a plurality of second bevel gears meshed with the first bevel gears (13) are locally fixedly connected to the outer wall of the second bevel gear ring (12), the second bevel gears are initially meshed with the first bevel gears (13), and the first bevel gears are not initially meshed with the second bevel gears (26).
7. The white light interference-based thickness gauge according to claim 5, wherein the correction auxiliary unit comprises power rods (27) fixed on the outer walls of the rectangular sliding blocks (22) respectively, the bottom ends of the power rods (27) are fixedly connected with L-shaped power blocks (28), the inner sides of the L-shaped power blocks (28) are slidably connected with correction blocks (45), one ends of the correction blocks (45) penetrate through to the outer parts of the L-shaped power blocks (28) and are fixedly connected with discs (46), springs (47) are fixedly connected to the outer walls of the discs (46), and one ends of the springs (47) are fixedly connected with the L-shaped power blocks (28).
8. The white light interference-based thickness gauge according to claim 7, wherein the intermittent amplifier comprises a rotating shaft (38) fixedly connected to the inner side of the swinging frame (37), one end of the rotating shaft (38) penetrates through the inner side of the T-shaped sliding block (35) and is rotationally connected with the T-shaped sliding block (35), a second worm wheel (40) is fixedly connected to the outer wall of the rotating shaft (38), a U-shaped stand (39) is fixedly connected to the outer wall of one side of the T-shaped sliding block (35), a second worm (41) is rotationally connected to the inner side of the U-shaped stand (39), and the second worm (41) is meshed with the second worm wheel (40).
9. The white light interference-based thickness gauge according to claim 8, wherein the intermittent amplifier further comprises a rectangular connecting plate (31) fixedly connected to the bottom end of the L-shaped power block (28), a sliding rod (32) is slidably connected to the inner side of the rectangular connecting plate (31), a T-shaped pushing block (33) is fixedly connected to the bottom end of the sliding rod (32), an auxiliary rod (43) is fixedly connected to the bottom end of the T-shaped pushing block (33), a first straight gear (42) is fixedly connected to the outer wall of the second worm (41), and a plurality of clamping teeth (44) meshed with the first straight gear (42) are fixedly connected to the inner side of the auxiliary rod (43).
10. The white light interference-based thickness gauge according to claim 9, wherein a plurality of latches (44) are provided, the latches (44) are equidistantly distributed on the outer wall of the auxiliary rod (43), a T-shaped groove matched with the T-shaped pushing block (33) is formed in the inner side of the U-shaped stand (39), and the T-shaped pushing block (33) is in sliding connection with the U-shaped stand (39).
CN202310911529.8A 2023-07-25 2023-07-25 Thickness gauge based on white light interference Active CN116625255B (en)

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CN116857513A (en) * 2023-08-29 2023-10-10 钛玛科(江苏)工业科技有限公司 Adjustable positioning scanning frame of X-ray thickness gauge
CN117129310A (en) * 2023-09-06 2023-11-28 江苏科泰检测技术服务有限公司 Metal material hardness testing device and testing method thereof

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CN211012822U (en) * 2019-09-03 2020-07-14 龙岩市计量所 Stay-supported linear displacement sensor calibrating device

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CN202204476U (en) * 2011-09-07 2012-04-25 上海大学 Constant-inclination angle surface contact film lubrication measuring apparatus
JP2018105646A (en) * 2016-12-22 2018-07-05 東レエンジニアリング株式会社 Film thickness distribution measuring apparatus
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