CN116619599A - Squaring device, control method thereof, medium and computer equipment - Google Patents

Squaring device, control method thereof, medium and computer equipment Download PDF

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Publication number
CN116619599A
CN116619599A CN202310411894.2A CN202310411894A CN116619599A CN 116619599 A CN116619599 A CN 116619599A CN 202310411894 A CN202310411894 A CN 202310411894A CN 116619599 A CN116619599 A CN 116619599A
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CN
China
Prior art keywords
chuck
workpiece
machined
sub
adjustment
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Pending
Application number
CN202310411894.2A
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Chinese (zh)
Inventor
徐德军
卢凯文
马飞
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Qingdao Gaoce Technology Co Ltd
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Qingdao Gaoce Technology Co Ltd
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Publication date
Application filed by Qingdao Gaoce Technology Co Ltd filed Critical Qingdao Gaoce Technology Co Ltd
Priority to CN202310411894.2A priority Critical patent/CN116619599A/en
Publication of CN116619599A publication Critical patent/CN116619599A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0088Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

The invention relates to the technical field of hard and brittle material processing equipment, in particular to a squaring device, a control method thereof, a medium and computer equipment, and aims to solve the problem of bar loss caused by poor perpendicularity between the end face of a silicon rod waiting workpiece and an axis. The squaring device comprises a first chuck and a second chuck, the second chuck is provided with an adjusting part, and the control method comprises the following steps: judging whether the state of the end face of the workpiece to be processed meets the condition of squaring operation according to the detection result of the detection component; if not, at least the second chuck is activated, thereby: the posture of the workpiece to be machined between the first chuck and the second chuck is changed through the movement of the adjusting part, and the posture of the end face of the workpiece to be machined is adjusted accordingly. Based on the adjustment of the end face posture of the silicon rod, the problem that the square rod is lost in a slicing link due to the fact that the end face is inclined can be effectively solved.

Description

Squaring device, control method thereof, medium and computer equipment
Technical Field
The invention relates to the technical field of hard and brittle material processing equipment, and particularly provides a squaring device, a control method of the squaring device, a non-transitory computer readable storage medium and computer equipment.
Background
Taking a hard and brittle material as a silicon rod as an example, the squarer is mainly used for processing an original rod into a square rod, and specifically: the working principle of (2) is as follows: after the round bar is fed and clamped, the square bar is subjected to squaring operation in a wire saw cutting mode along the direction parallel to the axis of the round bar through a pair of diamond wire cutting sections, so that a pair of side skins are cut off, and a pair of faces to be ground are formed. At present, when the squaring machine is used for feeding, the side part (the outer circle) of the round bar is used as a positioning surface for positioning, so that the perpendicularity between two end surfaces and four side surfaces of the square bar formed after the squaring operation is performed on the round bar cannot be ensured.
When the square rod is subjected to slicing treatment, a certain thickness is needed to be reserved at a position corresponding to the end part of the square rod when the net is split in a slicing process link. The correlation between the guillotine, squarer and slicer is shown in fig. 1 with the silicon rod as medium. Referring mainly to fig. 1, during the chopping process, the two end faces of the silicon rod 1 are substantially parallel and non-perpendicular (with a certain inclination) to the axis of the silicon rod. On this basis, when the first wire roller 21 and the second wire roller 22 for slicing the silicon rod are used for manual wire arrangement (wire arrangement net 23), two thicknesses L1 and L2 are required to be reserved for the two ends of the silicon rod respectively, and in general, the value range of L1 and L2 is 1-1.5mm, so that 2-3mm allowance is left at the two ends of the silicon rod, and the silicon loss of about 10 pieces is caused for each silicon rod according to the wire distance of the wire roller being 0.213mm, and in particular, the shorter the silicon rod is, the higher the silicon loss ratio is.
Disclosure of Invention
The present invention aims to at least partially solve the above-mentioned technical problems, in particular to adjust the perpendicularity of a silicon rod by means of a chuck assembly before the work piece is to be worked on, such as a silicon rod, and thereby to reduce the bar loss caused thereby.
In a first aspect, the present invention provides an squaring device comprising a collet assembly comprising a first collet and a second collet between which a work piece to be machined can be gripped and supported, wherein the second collet is provided with or formed with an adjustment portion for: the posture of the workpiece to be machined between the first chuck and the second chuck is changed through the movement of the adjusting part, and the posture of the end face of the workpiece to be machined is adjusted accordingly.
By the structure, the posture of the workpiece to be processed is expected to be continuously adjusted by the movement of the adjusting part, so that the obtained square rod can have better verticality under the condition that the square operation is performed on the adjusted silicon rod. Based on this, when it is subjected to the slicing operation, the thickness of the reserve can be reduced and thus the loss of the chips caused thereby can be reduced.
It is understood that the number of the components included in the adjusting portion, the correspondence relationship between the components and the first chuck and the second chuck, the movable form corresponding to the adjusting function, the specific structure for generating the movable form, and the like can be determined by those skilled in the art according to actual requirements. The method can be as follows: the adjusting part only comprises one component arranged on the first chuck or the second chuck; the adjusting part comprises a part A, a part B and a part C, wherein the part A is arranged on the first chuck, and the part B and the part C are arranged on the second chuck; etc.
For the above-mentioned squaring device, in one possible embodiment, the adjustment means comprise a first adjustment portion comprising an eccentric structure and a second adjustment portion to be able to provide the necessary adaptation for the fact that: when the eccentric structure rotates, the eccentric structure is allowed to drive the workpiece to be processed to be close to the end of the eccentric structure, and the movement is generated along with the rotation.
By means of the structure, the posture of the workpiece to be processed is hopefully adjusted through the matching of the two adjusting parts, so that the workpiece to be processed can have better perpendicularity when the workpiece to be processed is subjected to squaring operation.
It will be appreciated that the adaptation referred to herein should be understood as: any form of accompanying movement by the first adjustment portion, such as a larger-amplitude movement or a smaller-amplitude movement, may be required, and the form of movement may include one or more, and the degree of freedom involved in the movement may include one or more, while still maintaining the state in which the workpiece to be machined is reliably clamped to the first chuck and the second chuck, while allowing the form of movement of the eccentric structure to occur. On the premise of realizing corresponding activities, a person skilled in the art can determine the structural form, the number, the setting position and the like of the second adjusting part according to actual requirements. The method can be as follows: the end part of the workpiece to be processed, which is close to the eccentric structure, synchronously rotates with the eccentric structure; a certain amount of activity can also be generated between the end part of the workpiece to be processed, which is close to the eccentric structure, and the eccentric structure, so that the end part of the silicon rod generates a synthetic motion; etc.
In this way, with the aid of the adaptive adjustment, when there is a significant silicon loss in continuing the squaring operation in accordance with the current attitude in accordance with the perpendicularity between the end face and the axis of the silicon rod (for example, when an angle is formed between a plane perpendicular to the axis of the silicon rod and the end face of the silicon rod), the position of the end face can be changed by the rotation of the eccentric structure, and based on the adjustment, the end face is made to be as horizontal as possible, and after the squaring operation is performed on this basis, a square rod with a good perpendicularity is expected to be obtained. Thus, when the square bar is sliced, silicon loss due to the problem of poor verticality can be avoided.
It will be appreciated that the specific configuration of the eccentric structure and the specific manner in which it constitutes the first/second chuck may be determined by one skilled in the art based on actual requirements. The eccentric structure can be an eccentric shaft, an eccentric sleeve, an eccentric shell and the like. The eccentric structure can be formed by the following specific ways of the first/second clamping heads: the eccentric structure belongs to the original structure of the first/second clamping head and is an additional structure, so that the axial position of the silicon rod is changed based on the eccentric principle by adding a part for the first/second clamping head; as a result of the eccentric structure improving the existing structure of the first/second chucks, the axial position of the silicon rod is changed based on the eccentric principle by introducing the additional structure into the first/second chucks, thereby changing the way of the parts of the first/second chucks; etc.
For the above-mentioned squaring device, in one possible embodiment, the first adjusting portion includes: a driving part; a first portion drivingly connected to the drive member; and a second portion connected to the first portion and capable of generating a certain amount of movement relative to the first portion, a side portion of the second portion remote from the first portion being capable of abutting against a workpiece to be machined; wherein the eccentric structure is disposed between the drive member and the first portion and/or between the first portion and the second portion; and/or the first portion and/or the second portion comprises an eccentric structure.
By such a construction, a possible form of the eccentric structure constituting the first/second chuck is given.
It should be noted that the driving connection in the "first portion, which is in driving connection with the driving member", shall be understood as: when the driving member performs a driving operation, the first portion performs an operation associated with the driving operation, that is, the first portion performs an operation such as a rotation in response to the driving of the driving member. For example, the drive member may be in direct drive connection or in indirect drive connection with the first portion.
It will be appreciated that the configuration of the first portion and the second portion and the particular manner in which the two form the first chuck may be determined by one skilled in the art based on actual requirements. For example, the first/second part may be a part of the first chuck, or may be a structure additionally provided on the basis of the first chuck.
For the above-mentioned squaring device, in one possible embodiment, the first part comprises a first sub-part and a second sub-part distributed along the axial direction of the driving member, the first sub-part being in driving connection with the driving member, the second sub-part being in connection with the second part, wherein the first sub-part and/or the second sub-part comprises an eccentric structure; and/or the eccentric structure is disposed between the first sub-portion and the second sub-portion; and/or the first sub-portion and the second sub-portion constitute the eccentric structure.
By such a construction, a possible form of the eccentric structure constituting the first part is given.
For the above-mentioned squaring device, in one possible embodiment, the first sub-portion is a first cylindrical structure, the second sub-portion is a second cylindrical structure, and the axes of the first and second cylindrical structures are not concentric.
By this construction, a specific structural form of the first portion having the eccentric function is given.
It will be appreciated that the structural form of the first/second cylindrical structure, the manner in which the first portion is formed therebetween, the specific degree of eccentricity, etc. can be flexibly determined by those skilled in the art according to actual needs. If the shapes of the first and second cylindrical structures can be the same or different, the first and second cylindrical structures can be integrally formed or fixedly connected.
For the above-described squaring device, in one possible embodiment, a self-aligning roller bearing is provided between the second sub-portion and the second portion.
With this configuration, the self-aligning roller bearing can be allowed to allow the inner and outer rings (e.g., the outer ring is fixed to the second portion and the inner ring is fixed to the first portion) to have a certain angular deviation while the first portion and the second portion are rotated by the driving member, so that the second portion can be inclined at a certain angle with respect to the eccentric first portion in any direction.
In one possible embodiment, the second adjusting portion is a floating structure disposed or formed on the first chuck and/or the second chuck, so that the first chuck and/or the second chuck is changed to a floating chuck, wherein the end of the floating chuck near the workpiece to be processed can generate a floating amount along with the rotation of the eccentric structure.
By means of this construction, a possible design of the second adjusting part is provided.
Here, the floating is one of the foregoing adaptive adjustment modes, and specifically, the floating of any magnitude/angle/direction by the first adjustment portion is required on the premise that the motion mode of allowing the rotation of the eccentric structure occurs, and may be any degree of freedom floating or floating after a part of degrees of freedom is constrained. Illustratively, it is only allowed to float within a single plane.
It will be appreciated that a person skilled in the art may choose any second chuck that can generate floating or add any reasonable structure to the second chuck as the second chuck comprising the second adjusting part according to the present invention according to actual requirements. In other words, based on the improvement of the first chuck, only the second chuck is needed to cooperate, so that the squaring device comprising the chuck assembly achieves the technical effects intended by the invention, while how the second chuck is arranged, improved or selected has a considerable space for choice. The floating cartridge may be constructed by introducing spring attachment structures such as reeds. For example, the reed is respectively connected with the fixed part and the movable part (which can be abutted with the end face of the silicon rod) of the second chuck, so that the movable part generates a certain floating amount relative to the fixed part depending on the deformation of the reed.
For the above-mentioned squaring device, in one possible embodiment, the first and/or the second collet is formed or provided with an extension end at a side close to the work piece to be worked, said extension end abutting to the work piece to be worked.
By means of the structure, a specific structure mode depending on the abutting of the first chuck and the second chuck and the workpiece to be processed is provided.
It will be appreciated that the configuration, number and distribution of the protruding ends on the movable part may be determined by a person skilled in the art according to the actual situation. For example, the protruding end can be one or a combination of a plurality of columnar structures, round tables, spherical structures and the like.
For the above-mentioned squaring device, in a possible implementation manner, the protruding end has a planar structure or a curved structure at a side portion close to the workpiece to be machined; and/or the protruding end is provided with a hole.
By means of this construction, a possible design of the projecting end is provided. For example, the curved surface structure can be a spherical surface, an arc surface or a special-shaped surface. By providing the hole on the protruding end, the friction force between the protruding end and the workpiece to be machined can be increased in the case where the protruding end abuts against the workpiece to be machined, on the basis of which it is expected that the workpiece to be machined is more reliably clamped between the first chuck and the second chuck. It will be appreciated that the configuration, number and distribution of the protruding ends on the first/second clips, etc. may be determined by those skilled in the art according to the actual situation.
For the above-mentioned squaring device, in one possible embodiment, the squaring device comprises: a cutting assembly capable of cutting a workpiece to be machined clamped between the first chuck and the second chuck to generate a side skin; the edge skin supporting assembly can support the position of the workpiece to be machined, which corresponds to the edge skin; and the edge skin assembly can support the position of the workpiece to be machined, which corresponds to the edge skin.
By means of this construction, possible configurations of the squaring device are provided.
It will be appreciated that the structural form, number, specific manner in which the cutting assembly, the edge skin support assembly, the edge skin assembly are configured, specific manner in which they form the squaring device, specific manner in which no interference between the various components is ensured during the squaring operation, etc. may be determined by one skilled in the art based on actual requirements. Illustratively, the hemming support assembly and the second chuck are disposed together (as in the base, etc.), and the hemming assembly and the first chuck are disposed together (as in the slipway, etc.).
In a second aspect, the present invention provides a control method of an squaring device including a detection assembly and a chuck assembly including a first chuck and a second chuck between which a workpiece to be machined can be gripped and supported, wherein the second chuck is provided with or formed with an adjustment portion, the control method comprising: judging whether the state of the end face of the to-be-machined workpiece meets the condition of performing the squaring operation on the to-be-machined workpiece according to the detection result of the detection component under the condition that the to-be-machined workpiece is at the theoretical squaring position; if not, at least the second chuck provided with or formed with the adjusting part is moved, thereby: the posture of the workpiece to be machined between the first chuck and the second chuck is changed through the movement of the adjusting part, and the posture of the end face of the workpiece to be machined is adjusted accordingly.
With this configuration, the posture of the end face of the workpiece can be adjusted by the chuck assembly including the adjustment portion. It is to be understood that the adjusting part may be the adjusting part in the squaring device according to any of the foregoing, or may be another reasonable form of adjusting part.
In the case of the work piece being in the theoretical setting position
In one possible embodiment, the adjusting part includes a first adjusting part and a second adjusting part, the first adjusting part is an eccentric structure, and the second chuck provided with or formed with the adjusting part is at least moved, so that: changing the posture of the workpiece to be machined between the first chuck and the second chuck by the movement of the adjusting part, and thus adjusting the posture of the end face of the workpiece to be machined "includes: rotating at least the second chuck provided with or formed with the first adjustment portion so as to: the first chuck provided with or formed with the second adjusting portion is accompanied by an adaptive adjustment required when "upon rotation of the eccentric structure, allowing it to bring the workpiece to be processed close to the end of the eccentric structure with the amount of movement accompanying the rotation" occurs, changing the posture of the workpiece to be processed between the first chuck and the second chuck, and thus adjusting the posture of the end face of the workpiece to be processed.
With such a configuration, the introduction of the eccentric structure can be achieved so that the collet assembly including the adjustment portion can realize a function of being able to change the posture of the end face of the workpiece.
In one possible embodiment, the method for controlling the squaring device described above, the "rotating at least the second chuck provided with or formed with the first adjustment portion" includes: rotating the second chuck provided with or formed with the first adjustment portion in a state in which the workpiece to be machined reaches the theoretical setting position, and causing the first chuck not provided with or formed with the first adjustment portion to generate an amount of activity adapted to the rotation so as to: and adjusting the posture of the end face of the workpiece to be machined.
By this construction, a specific adjustment is given.
In one possible embodiment of the above control method for the cutting device, in the step of rotating the second chuck provided with or formed with the first adjustment portion in the case where the workpiece to be processed reaches the theoretical cutting position, the manner in which the workpiece to be processed reaches the theoretical cutting position is: and enabling the first chuck and the second chuck to rotate so as to drive the workpiece to be processed to reach a theoretical opening position.
With this configuration, the manner of reaching the reference position before the eccentricity adjustment is given.
In one possible implementation manner, the method for controlling the squaring device includes that the rotating the first chuck and the second chuck drives the workpiece to reach the theoretical squaring position includes: enabling the first chuck and the second chuck to rotate so as to drive a workpiece to be processed to reach a theoretical opening position; at least the first chuck is separated from abutting with the workpiece to be machined, and the second chuck is rotated to abut with the end face of the workpiece to be machined in a set inclined orientation, so that: based on the inclined orientation, the posture of the end face of the workpiece to be machined is changed by the adjusting portion.
With such a configuration, the chuck assembly of the present invention can be effectively adjusted by abutting the inclined end surface in the set orientation, and for example, if the eccentric adjustment is only possible in the positive/negative X-axis direction and the positive Y-axis direction, the abutment should be made so as to avoid the eccentric adjustment from the negative Y-axis direction based on the current abutment posture based on the inclination state of the end surface that is detectable.
In one possible embodiment, the first adjusting part includes a driving part, a first part and a second part, and the eccentric structure is disposed between the driving part and the first part and/or between the first part and the second part; and/or the first portion and/or the second portion is an eccentric structure; the "rotating at least the second chuck provided with or formed with the first adjustment portion" includes: causing the driving member to drive the eccentric structure to rotate, thereby: so that the second part abutting against the workpiece to be machined has a certain activity amount relative to the first part.
By means of such a construction, a possible construction of the first adjustment portion and a corresponding possible implementation of the change of the position of the end face of the workpiece to be machined are given.
In one possible implementation manner, the first part comprises a first sub-part and a second sub-part, and the first sub-part and/or the second sub-part are/is of an eccentric structure; and/or the eccentric structure is disposed between the first sub-portion and the second sub-portion; and/or the first and second sub-portions constitute the eccentric structure; the "causing the driving member to drive the eccentric structure to rotate" includes: causing the drive member to rotate by driving the first sub-portion such that: so that the second sub-part and the second part abutting against the workpiece to be machined have a certain activity relative to the first sub-part.
By means of this configuration, a possible design of the first part and a corresponding implementation of the end face position adjustment are provided.
The second adjusting portion is a floating structure provided on or formed on the first chuck so as to change the first chuck to a floating chuck, and the "required adaptation when the first chuck provided with or formed with the second adjusting portion is allowed to bring a workpiece to be processed close to an end of the eccentric structure along with rotation when the eccentric structure is rotated" provided along with the first chuck includes: the floating collet is caused to provide an adaptive adjustment that allows the amount of play to occur as the eccentric structure rotates.
By means of this embodiment, a possible design of the second adjustment part and a corresponding implementation of the adaptation is provided.
In a third aspect, the invention provides a non-transitory computer readable storage medium comprising a memory adapted to store a plurality of program codes adapted to be loaded and executed by a processor to perform the method of controlling an prescribing device of any of the preceding claims.
It can be appreciated that the non-transitory computer readable storage medium has all technical effects of the control method of the prescription device described in any one of the foregoing, and will not be described herein.
It will be appreciated by those skilled in the art that the present invention may implement all or part of the flow of the control method of the prescription device, and may be implemented by a computer program for instructing relevant hardware, where the computer program may be stored in a computer readable storage medium, and the computer program may implement the steps of the above-described method embodiments when executed by a processor. Wherein the computer program comprises computer program code, it being understood that the program code comprises, but is not limited to, program code for performing the above-mentioned control method of the prescription device. For convenience of explanation, only parts relevant to the present invention are shown. The computer program code may be in the form of source code, object code, executable files, or in some intermediate form. The computer readable storage medium may include: any entity or device, medium, usb disk, removable hard disk, magnetic disk, optical disk, computer memory, read-only memory, random access memory, electrical carrier wave signals, telecommunications signals, software distribution media, and the like capable of carrying the computer program code. It should be noted that the computer readable storage medium may include content that is subject to appropriate increases and decreases as required by jurisdictions and by jurisdictions in which such computer readable storage medium does not include electrical carrier signals and telecommunications signals.
In a fourth aspect, the invention provides a computer apparatus comprising a memory and a processor, the memory being adapted to store a plurality of program codes adapted to be loaded and executed by the processor to perform the method of controlling an prescribing device of any of the preceding claims.
It will be appreciated that the apparatus has all technical effects of the control method of the squaring device described in any of the foregoing, and will not be described in detail herein. The device may be a computer controlled device formed from a variety of electronic devices.
Drawings
The following takes a silicon rod to be ground (hereinafter referred to as a silicon rod) as a workpiece to be ground and a squaring device as an squaring machine as an example, and describes a preferred embodiment of the present invention with reference to the accompanying drawings, in which:
FIG. 1 is a schematic diagram showing the principle of a silicon rod in a slicing step according to the prior art;
FIG. 2 shows a schematic diagram of a squarer according to an embodiment of the invention;
FIG. 3 shows a schematic structural view of an adjustment chuck assembly of an squarer according to one embodiment of the invention;
FIG. 4 is a schematic view showing the structure of a movable chuck in an adjustment chuck assembly of a squarer according to an embodiment of the present invention;
FIG. 5 shows an enlarged schematic view of section A of FIG. 4;
FIG. 6 is a schematic view showing the structure of an inner housing in an adjusting part of the squarer according to one embodiment of the present invention;
FIG. 7 is a schematic view showing a rotation locus of a center point of an outer case in an squarer according to an embodiment of the present invention;
FIG. 8 shows a schematic view of the chuck assembly of the squarer according to one embodiment of the invention;
FIG. 9 is a schematic view showing the structure of a fixed jaw assembly of the squarer according to one embodiment of the present invention;
FIG. 10 shows a schematic view of the structure of a floating collet in a fixed collet assembly of a squarer according to one embodiment of the invention;
FIG. 11 shows a schematic diagram II of a squaring machine (including a silicon rod handling device) according to one embodiment of the invention;
FIG. 12 shows a schematic diagram of the detection of the squarer according to one embodiment of the invention;
FIG. 13 shows a second detection schematic of the squarer according to one embodiment of the invention;
FIG. 14 shows a schematic diagram III of the structure of an squarer (including a cutter head assembly) according to one embodiment of the invention;
FIG. 15 shows a schematic diagram of the squarer according to one embodiment of the invention in comparison to the attitude of the squarer before and after adjustment of the silicon rod;
FIG. 16 is a flow chart of a method of controlling a squarer according to one embodiment of the invention;
FIG. 17 shows a schematic structural view of an squarer of another embodiment; and
Fig. 18 shows a schematic drawing of the attitude of a silicon rod of another embodiment.
List of reference numerals:
1. a silicon rod;
21. a first wire roll; 22. a second wire roll; 23. a wire net;
3. a work table; 4. a column; 5. adjusting the chuck assembly;
51. a movable chuck base; 52. a dynamic chuck bearing housing; 53. a movable chuck motor; 54. a moving chuck decelerator; 55. an adjusting part;
551. an inner housing of the movable chuck; 5511. a first sub-portion; 5512. a second sub-portion;
552. a movable chuck outer housing; 5521. a movable chuck jacking block;
553. a self-aligning roller bearing; 5531. a retainer ring for holes; 5532. a gland;
6. a fixed chuck assembly;
61. a fixed chuck base; 62. a fixed chuck motor; 63. a floating head;
631. a fixed chuck inner housing; 632. a fixed chuck outer shell; 633. a reed; 634. a floating ball; 6351. a first set of screws; 6352. a second set of screws; 637. a fixed chuck jacking block;
7. a verticality detection assembly; 71. a verticality detection probe;
8. a trimming skin assembly; 9. an edge skin support assembly; 10. a blowback assembly; 1. a spray assembly;
12. a silicon rod transfer device; 121. a warp detection probe; 122. a clamping jaw;
13. a cutting device; 131. a cutting wheel; 132. and cutting the section by using a diamond wire.
Detailed Description
Preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present invention, and are not intended to limit the scope of the present invention. For example, although the present embodiment is described in connection with a squaring machine, it is apparent that the technical solution of the present invention is also applicable to other devices including a squaring station/function, such as a squaring machine.
It should be noted that, in the description of the present invention, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Furthermore, it should be noted that, in the description of the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "configured," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be directly connected, can be indirectly connected through an intermediate medium, and can also be communicated with the inside of two elements. The specific meaning of the above terms in the present invention can be understood by those skilled in the art according to the specific circumstances.
Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, it will be appreciated by those skilled in the art that the present invention may be practiced without some of these specific details. In some instances, principles of a squarer or the like, which are well known to those skilled in the art, have not been described in detail so as to highlight the gist of the present invention.
The apparatus for processing a silicon rod as a workpiece generally includes a cutter for cutting a bar (round rod) according to a length specification, an squarer for cutting a round rod of a certain length into a square rod, a grinder for grinding (a grinding surface and a chamfer) of the square rod including rough grinding and finish grinding, and a slicer for slicing the square rod having a precision up to standard after the grinding. As described in the background art, if the squarer is positioned with the end surfaces (outer circles) of both ends thereof as positioning surfaces at the time of feeding, the squarer does not have a function of correcting deviation of perpendicularity of the round bar generated during the cutting process, and thus the perpendicularity is equivalent to or worse than the level of perpendicularity of the round bar cut by the cutter. According to the invention, the movable chuck of the squaring machine is improved so as to adjust the posture of the silicon rod to be cut on the basis, thereby obtaining the square rod with improved verticality. As shown in fig. 1, on the basis of the improved verticality of the square rod, it is expected to reduce or cancel the reserved thickness at both ends of the silicon rod, thereby reducing the silicon loss caused thereby.
Referring to fig. 1, for convenience of explanation, in the present example, it is assumed that the case of the silicon rod is as follows: after the truncation process, both end faces of the silicon rod have the same verticality. Illustratively, as in the present example, the longitudinal section of the silicon rod is a parallelogram (the hypotenuse is inclined leftward from top to bottom in accordance with the orientation of fig. 1). Thus, only one of the end faces needs to be adjusted, and the perpendicularity of the other end face can be adjusted with equal precision. The invention will be elucidated hereinafter with reference to fig. 2 to 16 and to all or part of fig. 1 mentioned in the background.
Referring primarily to fig. 2, 3 and 9, in one possible embodiment, the squarer generally includes a table 3, a column 4 disposed on the table, an adjustment collet assembly 5 disposed on the column, and a fixed collet assembly 6 disposed on the table. Wherein, be provided with vertical slide rail on the stand, adjust chuck subassembly and can follow the slide rail motion. The adjustment collet assembly and the fixed collet assembly are capable of clamping the silicon rod 1 and the fixed collet assembly is capable of supporting the silicon rod thereon. In the invention, the squaring machine further comprises a verticality detection assembly, and the verticality detection assembly 7 comprises a verticality detection probe 71, wherein the detection probe can detect the distance between the end faces of the silicon rods.
In one possible embodiment, the squaring machine further comprises a side skin supporting component 8, a side skin supporting component 9, a back blowing component 10 and a spraying component 11, wherein the side skin supporting component can support the position of the silicon rod corresponding to the side skin on the upper side so as to prevent the side skin from falling off and crushing after the squaring. The edge skin supporting component can support the position of the silicon rod corresponding to the edge skin at the lower side. The back-blowing assembly 10 is mainly used for blowing off moisture on the end face of the silicon rod in a blowing mode. The spray assembly is mainly used for reducing the adhesion of silicon powder on the end face in a spray cleaning mode. As in the present example, the verticality detection assembly 7, the trimming skin assembly 8, the blowback assembly 10, the spray assembly 11 are integrally provided with the adjustment chuck assembly. As in the present example, one verticality detection assembly 7 is provided for the collet adjustment assembly 5, that is, the posture at the position of the end face of the silicon rod corresponding to the mounting position thereof is detected by only one verticality detection probe 71 at a time.
Referring primarily to fig. 4-8, in one possible embodiment, the adjustment chuck assembly 5 basically includes a movable chuck base 51 that is slidable along a slide rail, a movable chuck bearing housing 52, a movable chuck motor 53 (drive member), a movable chuck reducer 54 and a movable chuck (first chuck) 55. The movable chuck motor is connected with the upper side main shaft of the movable chuck bearing box through a movable chuck speed reducer, and the lower side main shaft of the movable chuck bearing box is connected with the movable chuck. In the invention, the movable clamp is provided with the adjusting part 55, and the adjusting part is provided with an eccentric structure, so that the end part of the silicon rod (such as the end part of the movable clamp) abutted against the movable clamp is driven by the rotation of the movable clamp motor to generate a certain offset relative to the end part (such as the end part of the fixed clamp) corresponding to the fixed clamp, thereby generating a certain angle offset between the end surface of the silicon rod after the offset and the end surface of the silicon rod before the offset. In this way, the position of the end face of the silicon rod held between the (fixed and movable) chucks is expected to be changed, and accordingly, it is expected that a square rod having a preferable perpendicularity between the end face and the side face can be obtained by squaring the end face. Specifically, after the edge skin is removed, the position of the end face is adjusted, and the axis of the obtained square rod also forms an included angle with the axis of the round rod before the square rod is opened. And because the allowance between the round bar and the square bar in the squaring operation is enough, the change of the included angle between the axes does not influence the normal operation of the squaring operation.
In one possible embodiment, the adjustment portion 55 mainly includes a moving-collet inner housing 551 (first portion) and a moving-collet outer housing 552 (second portion), wherein the moving-collet inner housing is an eccentric inner housing, between which a moving-aligning roller bearing 553 is provided. Because the self-aligning roller bearing allows a certain angular deviation of the inner ring and the outer ring, the movable chuck outer shell can incline at an angle relative to the eccentric inner shell in any direction. Illustratively, the self-aligning roller bearing realizes the positioning of the bearing outer ring and the bearing inner ring of the self-aligning roller bearing through the retainer ring 5531 and the gland 5532 respectively. Based on the above, the movable chuck outer shell is expected to rotate relative to the eccentric inner shell, so that the posture of the end face of the silicon rod in front of the opposite side is changed to a certain extent, for example, the non-coaxiality between the axis of the silicon rod and the axis of the chuck is reduced or even eliminated.
In one possible embodiment, the eccentric inner housing includes a first sub-portion 5511 and a second sub-portion 5512 that are distributed along the chuck axis, wherein the axes of the first and second sub-portions are not concentric. As with reference to fig. 6 and in accordance with the orientation in fig. 6, in this example the right side portion of the dashed line is a first subsection and the left side portion of the dashed line is a second subsection, the axis of the first subsection being substantially coincident with the spindle axis (the axis of the moving chuck bearing housing being coincident with the axis of the moving chuck motor), the axis of the second subsection being substantially parallel to the axis of the first subsection, such as by noting the distance between the axes of the first subsection and the second subsection as the eccentricity L.
When the movable chuck motor drives the upper spindle of the movable chuck bearing box to rotate through the movable chuck speed reducer, the eccentric inner shell and the lower spindle of the movable chuck bearing box synchronously rotate, and simultaneously, the central point of the movable chuck outer shell rotates by taking the axis of the movable chuck as the center and taking the eccentric distance L as the radius along with the rotation. After the silicon rod is clamped by the fixed chuck and the movable chuck, relative dislocation between the movable chuck outer shell and the silicon rod does not occur, namely, the relative position between the end part of the silicon rod corresponding to the adjusting chuck assembly and the movable chuck outer shell is unchanged, so that the center point of the end part of the silicon rod, which is abutted by the adjusting chuck assembly, is changed along with the end part of the silicon rod, and the end surface of the silicon rod is gradually converted from an inclined state to a horizontal state. In this way, the movable chuck outer housing moves circumferentially about the spindle axis by an eccentric distance L, and the eccentric movement locus of the center point of the movable chuck outer housing is shown by the broken line in fig. 7.
In fig. 7, the initial position of the center point of the movable chuck housing is located on the right side (positive direction) of the Y axis of the spindle axis, and based on this assumption, the center point of the end face of the silicon rod can be adjusted in the positive/negative direction of the X axis and the negative direction of the Y axis by means of the eccentric structure, but cannot be adjusted further in the positive direction of the Y axis. In other words, if a situation is actually encountered in which the positive direction adjustment to the Y axis is required, the end face of the silicon rod cannot be adjusted in accordance with the expectation based on the current structure. Since the inclined state of the end face of the silicon rod is detectable, the present invention performs such an intervention in order to avoid the occurrence of the above-described situation: the end face of the silicon rod is deliberately brought into an initial attitude "without adjustment to the Y-axis positive direction". Specifically, after the silicon rod is clamped, the deflection condition of the end face of the silicon rod is detected, and the high point position of the end face is rotated to the negative Y-axis direction according to the detection result, so that the adjustment based on the posture does not involve the adjustment in the positive Y-axis direction, and the effectiveness of the adjustment of the end face of the silicon rod can be ensured.
Referring primarily to fig. 9 and 10, in one possible embodiment, the fixed jaw assembly 6 basically includes a fixed jaw base 61, a fixed jaw motor 62 and a floating head 63. The fixed chuck motor is connected with a left main shaft of the fixed chuck bearing box through a fixed chuck speed reducer, and a right main shaft of the fixed chuck bearing box is connected to the floating head.
In one possible embodiment, floating head 63 basically comprises a fixed chuck inner housing 631, a fixed chuck outer housing 632, a reed 633 and a floating ball 634, wherein a fixed chuck motor is coupled to the fixed chuck inner housing, and the fixed chuck inner housing and the fixed chuck outer housing are coupled by the reed. In order to ensure that the fixed chuck outer shell can move relative to the fixed chuck inner shell, if a certain offset/inclination amount can occur in any direction, the floating ball is arranged between the fixed chuck (inner shell and outer shell), and if the fixed chuck (inner shell and outer shell) are respectively provided with a ball seat at the position corresponding to the floating ball.
In one possible embodiment, two sets of oppositely directed screws (denoted as first set 6351 and second set 6352, respectively) are provided on the reed for securing the reed to the fixed-clamp (inner, outer) housing, respectively. As in the present example, the reed is of a generally hexagonal ring-like structure, one screw being provided at each apex corresponding to the hexagon, the screws corresponding to the collet (inner, outer) housings being spaced apart, i.e.: the first set of screws and the second set of screws each comprise three screws. Taking the first set of screws as an example, the stud portion of the screws is fixedly connected with the inner shell of the fixed chuck, and the nut portion of the screws is freely accommodated in the mounting position 636 (such as a through hole in this example) formed at the corresponding position on the outer shell of the fixed chuck. In this way, under the condition that the reed is deformed, the stud part of the screw can keep the connection relation between the reed and the corresponding fixed chuck (inner and outer) shells, and the nut part of the screw can move in the through hole in a manner of adapting to the deformation.
It is obvious that the person skilled in the art can flexibly choose the structure of the reed, the distribution of the two sets of screws corresponding to the (fixed, movable) jaws and the form of the first/second connection structure (e.g. other fasteners or connectors than screws) by means of which the reed and the fixed jaw (inner, outer) housing are connected, according to the actual requirements.
In this example, a plurality of fixed-collet jacks 637 (protruding ends) are provided on the upper side of the fixed-collet outer case, and both end portions are respectively in contact with a plurality of facets corresponding to the plurality of fixed-collet jacks in a state where the silicon rod is clamped. If the number of the fixed chuck jacking blocks is three or more. As in the present example, the underside of the movable jaw housing is also provided with a similar protruding end, which may be referred to as a movable jaw top block 5521 (see fig. 5).
In one embodiment, the fixed/movable chuck top blocks may be modified as follows: a plurality of holes distributed along the axis thereof may be provided in the surface of the fixed/movable chuck top block. With such an arrangement, in the case of sandwiching the silicon rod between the (fixed and movable) chucks, since the friction coefficient on the contact surface is increased, the friction force between the silicon rod and the fixed chuck top block is increased, thereby ensuring the reliability of the sandwiching.
It is obvious that the floating head with the above structure is only an exemplary description, and those skilled in the art can select any other reasonable structure according to actual needs to enable the fixed chuck to float. In this case, the body portion may be provided with a plurality of receiving spaces, and the end portions of the plurality of columnar bodies extend out of the receiving spaces and are partially and freely received in the receiving spaces, and the mold springs are provided for the columnar bodies. Based on this, by the movement of the die spring in its installation space and the elastic deformation of the die spring, the columnar body can move in the accommodation space and thus a certain amount of movement occurs with respect to the main body portion, so that the end face of the silicon rod abutting on the columnar body generates a certain amount of floating with respect to the main body portion.
It will be appreciated that the configuration of the fixed and movable jaws with fixed and movable jaw motors, respectively, to rotate the silicon rod after the (fixed and movable) jaws grip the silicon rod, to rotate from one set of faces to be ground to the other set of faces to be ground, is only one of the power configurations, as may be accomplished with only one motor of greater power.
Referring mainly to fig. 11 to 16, based on the above-described structure, in one possible embodiment, the method of adjusting the end face of the silicon rod according to the present invention is mainly divided into the following two links:
1. And determining the initial position of the silicon rod before the end face posture adjustment.
In this example, the initial position includes a theoretical open position and an initial position where the effectiveness of the eccentric adjustment assembly can be ensured. The link mainly comprises the following steps:
s1601, determining a forward theoretical squaring position of the silicon rod. Referring mainly to fig. 11 and 12, in one possible embodiment, the adjustment chuck assembly (referred to as an upper chuck in this example) and the fixed chuck assembly (referred to as a lower chuck in this example) of the squaring machine are rotated to the 0 ° position at the same time, and after the silicon rod 1 is fed by the silicon rod running device 12, the (upper and lower) chucks clamp and synchronously rotate the silicon rod, warp detection is performed by the warp detection probe 121, the forward theoretical squaring position of the silicon rod is determined, and the angle (denoted as α0) required to rotate based on the current position to reach the theoretical squaring position is calculated.
Based on this, the (upper and lower) chucks are rotated by α0 in synchronization. The measurement point corresponding to the perpendicularity detection probe at this position is referred to as the P1 point.
S1603, determining the end face inclination state of the silicon rod. On the basis of P1, the upper and lower chucks clamp the silicon rod and synchronously rotate by 90 degrees, 180 degrees and 270 degrees in sequence to obtain three other detection points which are respectively marked as P2, P3 and P4, corresponding measurement points are detected by the perpendicularity detection probes, and the inclination condition of the end face of the silicon rod can be known by measuring four positions P1 to P4 by the perpendicularity detection probes.
S1605, determining the state of the silicon rod before eccentric adjustment by referring to the inclined state of the end surface.
With reference to the description hereinabove regarding ensuring the effectiveness of adjusting the collet assembly, the initial position corresponding to the high point of the end face should be adjusted to a position corresponding to α0. As in the present example, this adjustment is achieved in such a way that: in the case of bringing the (upper, lower) jaws back to 0 deg. holding the silicon rod, the upper jaw is raised and the rod transfer device is caused to lift the silicon rod by the jaws 122 and rotate the (upper, lower) jaws to an angular position of-a 0, after which the rod transfer device lowers the silicon rod to the lower jaw and the upper jaw moves down to clamp the silicon rod again.
It can be seen that in this example, the highest point except the end face of the silicon rod is determined by rough measurement, and then the highest point is adjusted to be approximately at the highest position by clamping jaw intervention. It can be appreciated that, on the premise of ensuring the effectiveness of the end face adjustment, a person skilled in the art can flexibly select the adjustment mode and the adjustment timing of the initial position according to the actual requirement. Such as without having to rotate exactly to an angular position of-alpha 0, completely separate the adjustment of the end face from the adjustment of the warp thread, or with a more accurate tilt measurement.
2. And adjusting the end face posture of the silicon rod to an optimal belt cutting state. The link mainly comprises the following steps:
s1607, determination of an adjustment amount corresponding to the eccentric adjustment. Referring primarily to fig. 13, in one possible embodiment, referring to the position of the perpendicularity detection probe on the adjustment chuck assembly in this example, assuming that the aforementioned P1-P4 detection values are directly employed, the degree of tilt of each dimension can only be used for two of them when calculating the degree of tilt of the silicon rod. In order to increase the calculation accuracy of the inclination degree, such a process is performed in this example: the initial position of the end face of the silicon rod corresponding to the vertical detection probe is marked as a point A0, the silicon rod rotates for 45 degrees, 90 degrees and 90 degrees on the basis of the point A0 in sequence, four detection points corresponding to the vertical detection probe on the adjustment chuck assembly are obtained, the detection points are respectively marked as points A1, A2, A3 and A4, and then the silicon rod rotates for 45 degrees to return to the initial position. The adjustment amount of the end surface at the time of the opening of the 0 ° surface (the end surface is adjusted to be horizontal) can be calculated based on the detection data for the four detection points for each opening operation. In the manner of starting to determine the detection point on the basis of 45 ° rotation as compared with the aforementioned P1 to P4, since four detection data can participate in calculation at the time of determining the degree of inclination of each dimension, the calculation accuracy can be improved.
It should be understood that the above manner of improving the calculation accuracy is merely an exemplary description, and those skilled in the art may determine, according to actual needs, a manner of ensuring the calculation accuracy of the adjustment amount, for example, may be: the method comprises the steps of adopting a multi-side verticality detection probe, adjusting the setting position of the verticality detection probe on an adjustment chuck assembly, and enabling the verticality detection probe and the adjustment chuck assembly to be not integrally set or move in an unsynchronized mode.
S1609, based on the calculated adjustment amount, adjusting the posture of the end face of the silicon rod by the cooperation of the fixed chuck assembly and the adjustment chuck assembly including the eccentric structure. Specifically, the movable chuck motor drives the eccentric structure (the movable chuck inner shell) to rotate, so that the position of the center point of the movable chuck outer shell which is abutted with the upper end surface of the silicon rod is driven to change. During the period, the fixed chuck motor does not rotate, but only the lower end surface of the silicon rod which is abutted with the floating head generates the adaptability adjustment required for changing the position of the center point of the movable chuck shell body by virtue of the structure of the floating head.
Referring to fig. 15, in this example, both the upper end surface and the lower end surface of the silicon rod are inclined downward from left to right by an α posture before the eccentricity adjustment (after the initial adjustment of the abutment position of the movable chuck with the upper end surface). The axis of the silicon rod is now arranged in the vertical direction. Assuming that the square bar is cut by adopting the cutting device according to the current posture, a square bar with a vertical axis and an inclined end face is obtained, and when the square bar is sliced, silicon loss corresponding to the inclination is necessarily present at two ends of the square bar. After eccentric adjustment, the upper end face and the lower end face of the silicon rod are approximately horizontal. At this time, the axis of the round bar has an included angle with the vertical direction. The cutting device is adopted to cut according to the current posture, so that a square bar with a vertical axis and a horizontal end face can be obtained, and when the square bar is subjected to slicing operation, the precision of the two ends of the square bar can be more fully matched with the requirement of the slicing operation, so that the silicon loss can be obviously reduced.
Referring primarily to fig. 14 and 15, in one possible embodiment, cutting device 13 generally comprises a cutting post, a cutting feed assembly disposed on the cutting post, and a cutting head assembly capable of forming a diamond wire cutting segment, typically comprising a take-up and pay-off device, a wire-laying wheel, a tension wheel, a cutting wheel, and a plurality of passing wheels, such as diamond wire between two cutting wheels 131, forming a diamond wire cutting segment 132. The cutting feeding assembly slides along the cutting upright column so as to drive the diamond wire cutting section to cut the silicon rod and generate the edge skin, the top edge skin assembly is abutted to the position, corresponding to the edge skin, of the bottom of the silicon rod during the cutting operation, and the edge skin assembly is abutted to the position, corresponding to the edge skin, of the top of the silicon rod, so that the edge skin generated by cutting is stably supported at the cutting station through cooperation of the top edge skin assembly and the edge skin assembly. Specifically, after the posture adjustment of the silicon rod (round rod) to be cut is completed, the diamond wire cutting section 132 between the two cutting wheels 131 performs the cutting operation on the silicon rod from top to bottom as the cutting feed assembly slides along the cutting column.
In this example, the diamond wire cutting segment includes one, such as a silicon rod may also be double wire cut by a pair of diamond wire cutting segments. Accordingly, for example, the cutting feed assembly generally includes a vertical cutting feed assembly and a lateral cutting feed assembly. Under the drive of a vertical cutting feed motor and under the guidance of a vertical cutting linear guide rail, for example, the vertical cutting feed assembly can drive a pair of diamond wire cutting sections and related mechanisms to realize the movement of the diamond wire cutting sections along the vertical direction (Z direction), so that the silicon rod is cut, specifically, the round rod is cut into square rods, and a pair of side skins are generated along with each cutting operation. Such as a fly-cutting feed assembly, is primarily used to adjust the distance (open/close) between a pair of diamond wire cutting segments to enable double wire cutting of silicon rods of different gauge radial dimensions.
In one possible embodiment, the squaring machine may further comprise a side skin unloading device and a side skin collecting device, wherein the side skin unloading device is mainly used for transferring side skin generated by cutting from the position of the cutting operation to the side skin collecting device, and the side skin collecting device is mainly used for collecting side skin generated by the cutting operation and removing the side skin from the working area of the squaring machine, for example, the collected side skin can be removed from the working area of the squaring machine by means of manual blanking or docking with an automatic device such as an AGV.
Referring primarily to fig. 17 and 18, fig. 17 shows a schematic structural view of another embodiment of the squarer; fig. 18 shows a schematic drawing of the attitude of a silicon rod of another embodiment. The foregoing manner of detecting one end can be adjusted only according to one end face (corresponding to the assumption of the end face structure of the silicon rod in fig. 1), and in the case that the two end faces of the silicon rod are not parallel, a large error is necessarily present in the manner of detecting one end. Illustratively, the upper end surface of the silicon rod is inclined upward from left to right (inclination angle β), and the lower end surface is inclined downward from left to right (inclination angle γ). For such a case, the verticality detecting unit 7 may be added to the other end surface in addition to the aforementioned one-end detection. The detection method of the detection probe is the same as the one-end detection method described above. Therefore, the situation of non-perpendicularity of the two end faces of the silicon rod can be considered through simultaneous measurement of the upper end face and the lower end face of the silicon rod, and the posture of the silicon rod is optimally adjusted according to the measurement result, so that the optimal effect of comprehensive perpendicularity of the end faces is obtained based on the current posture of the silicon rod. On the basis, the silicon rod is subjected to double-wire cutting twice through a pair of diamond wire cutting sections between two pairs of cutting wheels, and the round rod can be processed into a square rod.
It can be seen that in the squaring machine of the present invention, by arranging the adjustment chuck assembly in a structure including an eccentric structure, the end face posture of the silicon rod can be adjusted by the rotational engagement of the adjustment chuck assembly and the fixed chuck assembly. On the basis of the adjustment, the square rod is hopefully ensured to have good perpendicularity when being obtained by the square rod, so that the problem of silicon loss caused by the axial inclination of the end face relative to the silicon rod when the silicon rod is sliced can be effectively reduced or even avoided. Meanwhile, the initial adjustment state of the end face can be reasonably limited according to the detectable end face inclination state, so that the condition that the adjustment chuck assembly fails in adjustment is avoided.
Thus far, the technical solution of the present invention has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present invention is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present invention, and such modifications and substitutions will fall within the scope of the present invention.

Claims (20)

1. A cutting device is characterized by comprising a chuck assembly, wherein the chuck assembly comprises a first chuck and a second chuck, a workpiece to be processed can be clamped between the first chuck and the second chuck and supported on the second chuck,
wherein the second chuck is provided with or formed with an adjustment portion so as to:
the posture of the workpiece to be machined between the first chuck and the second chuck is changed through the movement of the adjusting part, and the posture of the end face of the workpiece to be machined is adjusted accordingly.
2. The squaring device according to claim 1, characterized in that said adjustment means comprise a first adjustment portion comprising an eccentric structure and a second adjustment portion capable of providing an adaptive adjustment required for the fact that:
when the eccentric structure rotates, the eccentric structure is allowed to drive the workpiece to be processed to be close to the end of the eccentric structure, and the movement is generated along with the rotation.
3. The squaring device according to claim 2, wherein said first adjustment portion comprises:
a driving part;
a first portion drivingly connected to the drive member; and
A second portion connected to the first portion and capable of a certain amount of movement relative to the first portion, a side of the second portion remote from the first portion being capable of abutting against a workpiece to be machined;
wherein the eccentric structure is disposed between the drive member and the first portion and/or between the first portion and the second portion; and/or
The first portion and/or the second portion comprises the eccentric structure.
4. The squaring device according to claim 3, wherein said first portion comprises a first sub-portion and a second sub-portion distributed along an axial direction of said driving member, said first sub-portion being in driving connection with said driving member, said second sub-portion being in connection with said second portion,
wherein the first sub-portion and/or the second sub-portion comprises an eccentric structure; and/or
The eccentric structure is arranged between the first sub-part and the second sub-part; and/or
The first sub-portion and the second sub-portion constitute the eccentric structure.
5. The squaring device of claim 4, wherein the first sub-portion is a first tubular structure and the second sub-portion is a second tubular structure, the axes of the first and second tubular structures being non-concentric.
6. The squaring device according to claim 5, wherein a self-aligning roller bearing is arranged between said second sub-portion and said second portion.
7. The squaring device according to claim 2, wherein said second adjustment portion is a floating structure provided or formed on said second collet, such that said second collet is changed to a floating collet,
the end part of the floating chuck, which is close to the workpiece to be machined, can generate floating quantity along with rotation of the eccentric structure.
8. The squaring device according to any one of claims 1 to 7, characterized in that the first and/or the second collet is formed or provided with an extension end at a side near the work piece to be worked, which extension end abuts against the work piece to be worked.
9. The squaring device according to claim 8, wherein the protruding end has a planar or curved configuration at a side adjacent to the work piece to be worked; and or (b)
The protruding end is provided with a hole.
10. The squaring device according to claim 1, characterized in that it comprises:
a cutting assembly capable of cutting a workpiece to be machined clamped between the first chuck and the second chuck to generate a side skin;
The edge skin supporting assembly can support the position of the workpiece to be machined, which corresponds to the edge skin; and
the edge skin assembly can support the position of the workpiece to be machined, which corresponds to the edge skin.
11. A control method of a squaring device is characterized in that the squaring device comprises a detection assembly and a chuck assembly, the chuck assembly comprises a first chuck and a second chuck, a workpiece to be machined can be clamped between the first chuck and the second chuck and supported on the second chuck,
wherein the second chuck is provided with or formed with an adjusting part,
the control method comprises the following steps:
judging whether the state of the end face of the to-be-machined workpiece meets the condition of performing the squaring operation on the to-be-machined workpiece according to the detection result of the detection component under the condition that the to-be-machined workpiece is at the theoretical squaring position;
if not, at least the second chuck provided with or formed with the adjusting part is moved, thereby:
the posture of the workpiece to be machined between the first chuck and the second chuck is changed through the movement of the adjusting part, and the posture of the end face of the workpiece to be machined is adjusted accordingly.
12. The method of controlling an opening device according to claim 11, wherein the adjusting portion includes a first adjusting portion and a second adjusting portion, the first adjusting portion is of an eccentric structure,
Said "at least the second chuck provided with or formed with the adjusting portion is made movable so that: changing the posture of the workpiece to be machined between the first chuck and the second chuck by the movement of the adjusting part, and thus adjusting the posture of the end face of the workpiece to be machined "includes:
rotating at least the second chuck provided with or formed with the first adjustment portion so as to:
the first chuck provided with or formed with the second adjusting portion is accompanied by an adaptive adjustment required when "upon rotation of the eccentric structure, allowing it to bring the workpiece to be processed close to the end of the eccentric structure with the amount of movement accompanying the rotation" occurs, changing the posture of the workpiece to be processed between the first chuck and the second chuck, and thus adjusting the posture of the end face of the workpiece to be processed.
13. The method of controlling an opening device according to claim 12, wherein the "rotating at least the second chuck provided with or formed with the first adjustment portion" includes:
rotating the second chuck provided with or formed with the first adjustment portion in a state in which the workpiece to be machined reaches the theoretical setting position, and causing the first chuck not provided with or formed with the first adjustment portion to generate an amount of activity adapted to the rotation so as to:
And adjusting the posture of the end face of the workpiece to be machined.
14. The control method of the squaring device according to claim 13, wherein in the step of rotating the second chuck provided with or formed with the first adjustment portion in a case where the workpiece to be machined reaches the theoretical squaring position, the manner in which the workpiece to be machined reaches the theoretical squaring position is:
and enabling the first chuck and the second chuck to rotate so as to drive the workpiece to be processed to reach a theoretical opening position.
15. The method of claim 14, wherein rotating the first chuck and the second chuck to bring the workpiece to the theoretical cutting position comprises:
enabling the first chuck and the second chuck to rotate so as to drive a workpiece to be processed to reach a theoretical opening position;
at least the first chuck is separated from abutting with the workpiece to be machined, and the second chuck is rotated to abut with the end face of the workpiece to be machined in a set inclined orientation, so that:
based on the inclined orientation, the posture of the end face of the workpiece to be machined is changed by the adjusting portion.
16. The method of controlling an squaring device according to claim 12, wherein the first adjusting portion comprises a driving member, a first portion and a second portion,
The eccentric structure is arranged between the driving part and the first part and/or between the first part and the second part; and/or
The first part and/or the second part is/are eccentric;
the "rotating at least the second chuck provided with or formed with the first adjustment portion" includes:
causing the driving member to drive the eccentric structure to rotate, thereby:
so that the second part abutting against the workpiece to be machined has a certain activity amount relative to the first part.
17. The method of controlling an squaring device according to claim 16, wherein the first portion comprises a first sub-portion and a second sub-portion,
the first sub-portion and/or the second sub-portion is of an eccentric configuration; and/or
The eccentric structure is arranged between the first sub-part and the second sub-part; and/or
The first sub-portion and the second sub-portion form the eccentric structure;
the "causing the driving member to drive the eccentric structure to rotate" includes:
causing the drive member to rotate by driving the first sub-portion such that:
so that the second sub-part and the second part abutting against the workpiece to be machined have a certain activity relative to the first sub-part.
18. The method of controlling an squaring device according to claim 12, wherein the second adjusting portion is a floating structure provided or formed on the first collet so as to change the first collet to a floating collet,
the "adaptation required when the first chuck provided with or formed with the second adjustment portion allows the workpiece to be brought close to the end of the eccentric structure to generate the movement amount accompanying the rotation" when the eccentric structure rotates "includes:
the floating collet is caused to provide an adaptive adjustment that allows the amount of play to occur as the eccentric structure rotates.
19. A non-transitory computer readable storage medium comprising a memory adapted to store a plurality of program codes, characterized in that the program codes are adapted to be loaded and executed by a processor to perform the method of controlling an prescribing device according to any of claims 11 to 18.
20. A computer device comprising a memory and a processor, the memory being adapted to store a plurality of program codes, characterized in that the program codes are adapted to be loaded and run by the processor to perform the method of controlling an prescribing device according to any of claims 11 to 18.
CN202310411894.2A 2023-04-18 2023-04-18 Squaring device, control method thereof, medium and computer equipment Pending CN116619599A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310411894.2A CN116619599A (en) 2023-04-18 2023-04-18 Squaring device, control method thereof, medium and computer equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310411894.2A CN116619599A (en) 2023-04-18 2023-04-18 Squaring device, control method thereof, medium and computer equipment

Publications (1)

Publication Number Publication Date
CN116619599A true CN116619599A (en) 2023-08-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310411894.2A Pending CN116619599A (en) 2023-04-18 2023-04-18 Squaring device, control method thereof, medium and computer equipment

Country Status (1)

Country Link
CN (1) CN116619599A (en)

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