CN116609040A - Auxiliary device and method for detecting right angle errors of pentaprism - Google Patents
Auxiliary device and method for detecting right angle errors of pentaprism Download PDFInfo
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- CN116609040A CN116609040A CN202310690457.9A CN202310690457A CN116609040A CN 116609040 A CN116609040 A CN 116609040A CN 202310690457 A CN202310690457 A CN 202310690457A CN 116609040 A CN116609040 A CN 116609040A
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- 238000001514 detection method Methods 0.000 claims abstract description 34
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 238000012360 testing method Methods 0.000 claims abstract description 10
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000002372 labelling Methods 0.000 description 3
- 238000004556 laser interferometry Methods 0.000 description 3
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- 238000004458 analytical method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
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Abstract
The application provides a penta prism right angle error detection auxiliary device and a detection method, wherein the auxiliary device comprises: the first standard plane mirror is used for being arranged on an optical path output port of the first interferometer; the included angle between the second standard plane mirror and the first standard plane mirror is fixed to be 90 degrees. During detection, the light beam emitted by the first interferometer is folded by the first standard plane mirror and the measured pentaprism and then enters the second standard plane mirror, and then is reflected by the second standard plane mirror, interference occurs between the light beam and the reference light reflected by the first standard plane mirror, and then a test result can be obtained through the Huili instrument test software. The application can assist to realize high-precision automatic measurement of the right angle error detection of the pentaprism, does not need to adjust the position of the pentaprism again, simplifies the operation steps, can accurately measure and adjust the included angle between the first standard plane mirror and the second standard plane mirror to be 90 degrees through another interferometer and the standard plane mirror, and improves the measurement precision.
Description
Technical Field
The application belongs to the field of optical measurement, and particularly relates to a penta prism right angle error detection auxiliary device and a detection method.
Background
The pentaprism is one of common beam fixed angle diverters, and has two refracting surfaces and two reflecting surfaces, and has optical characteristics that the optical path in the main section is vertically folded and no mirror image is generated, and the main section of the ideal pentaprism 1 is shown in fig. 4. The pentaprism is widely applied in engineering, such as wavefront detection by adopting a pentaprism scanning method, focal plane monitoring of a collimator by utilizing the turning characteristic of the pentaprism, surface shape detection of an optical element by utilizing the pentaprism, and the like.
The pentaprism in engineering application cannot be absolutely ideal, and the manufacturing error is mainly represented by that the < A, < B, < E and < F in the main section are different from ideal values. The existence of angle manufacturing errors can change the constant rotation characteristic of the light rays of the pentaprism and directly influence the engineering application result of the pentaprism. For example, in a space photoelectric tracking system, the combination of a large-caliber collimator and a pentaprism is often used for calibrating the optical axis parallelism of each optoelectronic system, and the manufacturing error of the pentaprism directly influences the calibrating accuracy of multi-optical axis parallelism. Therefore, error analysis is required for the pentaprism to correct the test result.
The method and process for measuring the manufacturing error of the pentaprism 1 by adopting the auto-collimation principle by the existing measuring device are as follows: first, as shown in fig. 5, the photo-autocollimator 2 and the plane mirror 3 are placed, the visual axis of the photo-autocollimator 2 is adjusted to be horizontal, the mirror surface of the plane mirror 3 is adjusted to be perpendicular to the visual axis, and the incident surface of the pentaprism 1 to be measured is adjusted to be perpendicular to the visual axis. Next, the dial of the multi-tooth index table 4 is placed at 0 ° 0'0", the plane mirror 3 is aligned with the adjusted photo-autocollimator 2 without the pentaprism 1 being placed, the cross image reflected by the plane mirror 3 is superimposed on the reticle of the photo-autocollimator 2, and the data α is read out at this time 1 . Then, as shown in fig. 6, the multi-tooth indexing table 4 is rotated clockwise by 90 ° 0', the plane reflecting mirror 3 is also rotated clockwise by 90 ° 0' along with the multi-tooth indexing table 4, the measured pentaprism 1 is placed on the multi-tooth indexing table 4, the light emitted by the photoelectric autocollimator 2 is faced to the plane reflecting mirror 3 again through the pentaprism 1, and then reflected back to the photoelectric autocollimator 2 through the pentaprism 1, thus obtaining the reading alpha 2 . Further, if the angular refraction of the pentaprism 1 is 90 °, the reading of the photo-autocollimator 2 should be α 2 ＝α 1 When there is an error Deltaalpha in the folding angle, alpha 2 ≠α 1 And has Δα=α 2 -α 1 。
The practice shows that the measuring device and the measuring method can bring more errors in the operation process, and the repeated adjustment is needed, so that the problem of low measuring precision exists. The errors mainly comprise a photoelectric auto-collimator reading error, a reading error, an error caused by photoelectric aiming repeatability, a multi-tooth indexing table indexing error and an adjustment error.
Disclosure of Invention
The present application has been made to solve the above-described problems, and an object of the present application is to provide a pentaprism right angle error detection support apparatus and a detection method.
The application provides a pentaprism right angle error detection auxiliary device, which has the following characteristics: the first standard plane mirror is used for being arranged on an optical path output port of the first interferometer and is perpendicular to the optical axis of the first interferometer; the second standard plane mirror is arranged in front of the optical path output port of the first interferometer, and an included angle between the mirror surface and the mirror surface of the first standard plane mirror is fixed to be 90 degrees; the first standard plane mirror is a transmission mirror, and the second labeling plane mirror is a reflecting mirror or a transmission mirror.
The auxiliary device for detecting the right angle error of the pentaprism provided by the application can also have the characteristics that: the included angle fixing device is used for setting and fixing an included angle between the first standard plane mirror and the second standard plane mirror to be 90 degrees.
The auxiliary device for detecting the right angle error of the pentaprism provided by the application can also have the following characteristics: the pentaprism has an incident plane and an emergent plane perpendicular to each other, and the mirror surfaces of the first standard plane mirror and the second standard plane mirror are respectively parallel to the incident plane and the emergent plane when detecting.
The application also provides a pentaprism right angle error detection method, which has the characteristics that the pentaprism right angle error detection auxiliary device comprises the following steps: setting a first standard plane mirror on an optical path output port of a first interferometer, wherein a mirror surface is perpendicular to an optical axis of the first interferometer, setting a second standard plane mirror in front of the optical path output port of the first interferometer, and fixing an included angle between the mirror surface and the mirror surface of the first standard plane mirror to be 90 degrees; controlling a first interferometer to emit light beams, when the light beams are transmitted to a first standard plane mirror, one part of the light beams are reflected back as reference light, the other part of the light beams are transmitted and are incident perpendicular to an incident surface of a pentaprism, then the light beams are reflected by two reflecting surfaces in the pentaprism, and then are emitted through an emergent surface and reach a second standard plane mirror, wherein one part of the light beams are reflected back by the second standard plane mirror, and the light beams reflected back by the part of the light beams interfere with the first reference light after passing through the pentaprism and the first standard plane mirror in sequence; and obtaining a right angle error test result of the pentaprism through the Huili instrument test software matched with the first interferometer.
The right angle error detection method of the pentaprism provided by the application can also have the following characteristics: after the first standard plane mirror and the second standard plane mirror are arranged and before the first interferometer is controlled to emit light beams, the second interferometer is controlled to emit light beams by utilizing the second interferometer and a transmission mirror which is arranged on an optical path output port of the second interferometer and is used as a third standard plane mirror, when the light beams are transmitted to the third standard plane mirror, one part of the light beams are reflected back as second reference light, the other part of the light beams are transmitted out and are reflected back through the first standard plane mirror and the second standard plane mirror to interfere with the second reference light, and the included angle between the first standard plane mirror and the second standard plane mirror is obtained through the intelligent instrument test software of the matched second interferometer, so that the included angle between the first standard plane mirror and the second standard plane mirror is adjusted and is accurately calibrated to 90 degrees.
Effects and effects of the application
According to the auxiliary device and the detection method for the right angle error of the pentaprism, when the right angle error of the pentaprism is detected based on a laser interferometry, the first standard plane mirror is arranged on the interferometer, so that the interferometer still plays the role of a standard mirror, light beams emitted by the interferometer are folded by the first standard plane mirror and the pentaprism to be detected and then reach the second standard plane mirror, and as the second marked plane mirror is a reflecting mirror or a transmitting mirror, part of the light beams reaching the second standard plane mirror can be reflected back, and then the light beams sequentially pass through the pentaprism to be detected and the first standard plane mirror and interfere with reference light partially reflected by the first standard plane mirror, and then collected wave surface data are processed through the testing software of a comatic instrument, so that the included angle between the wave surface of the light reflected by the standard mirror and the wave surface which is folded by the pentaprism and reflected by the second standard plane mirror can be obtained. Compared with the prior art, the application can assist in realizing high-precision automatic measurement of the right angle error detection of the pentaprism, and the position of the pentaprism is not required to be regulated again during detection operation, so that the operation steps are simplified, the included angle between the first standard plane mirror and the second standard plane mirror can be accurately measured and regulated to be fixed to 90 degrees through the other interferometer, the other standard plane mirror and the matched testing software of the Huili instrument, the error is extremely small, the regulation is not required, and the measurement precision is improved.
Drawings
FIG. 1 is a schematic diagram of a right angle error detection auxiliary device for a pentaprism according to an embodiment of the present application;
FIG. 2 is a schematic diagram of an optical path of a penta prism right angle error detection assisting device in calibration according to an embodiment of the present application;
FIG. 3 is a schematic view of an optical path of a pentaprism right angle error detection assisting device according to an embodiment of the present application;
FIG. 4 is a schematic view of the main section of an ideal pentaprism of the prior art;
FIG. 5 is a schematic diagram of a prior art measurement device using the auto-collimation principle;
fig. 6 is a schematic diagram of a prior art measuring device using the auto-collimation principle to measure pentaprism.
Reference numerals illustrate:
a pentaprism 1; 2, an photoelectric auto-collimator; a 3 plane mirror; 4 a multi-tooth indexing table; 5 a first interferometer; 10 a first standard plane mirror; a second standard plane mirror 20; a second interferometer 30; 40 third standard plane mirror.
Detailed Description
In order to make the technical means, the creation features, the achievement of the purpose and the effect of the present application easy to understand, the present application is specifically described below with reference to the accompanying drawings.
Examples
Fig. 1 is a schematic structural diagram of a penta prism right angle error detection auxiliary device.
As shown in fig. 1, the present embodiment provides a right angle error detection auxiliary device for a pentaprism, which includes a first standard plane mirror 10 and a second standard plane mirror 20.
The first standard plane mirror 10 is used for being arranged on an optical path output port of the first interferometer 5, the mirror surface is perpendicular to the optical axis of the first interferometer 5, and the first standard plane mirror 10 is a transmission mirror.
The second standard plane mirror 20 is used for being arranged in front of the optical path output port of the first interferometer 5, and the included angle between the mirror surface and the mirror surface of the first standard plane mirror 10 is fixed to be 90 degrees, and the second labeling plane mirror 20 can be a reflecting mirror or a transmitting mirror.
In practical implementation, the first standard plane mirror 10 and the second standard plane mirror 20 can ensure that the included angle between the two is fixed to 90 ° by a special included angle fixing device, and the included angle fixing device can be a clamp, a bracket or other similar devices in the prior art. After the installation, the second interferometer 30, the matched testing software of the intelligent instrument and the third standard plane mirror 40 can be used for measuring and calibrating the included angle between the first standard plane mirror 10 and the second standard plane mirror 20, so that the dihedral angle is ensured to be precisely fixed to 90 degrees, and the third standard plane mirror 40 is a transmission mirror, as shown in fig. 2.
Fig. 3 is a schematic view of an optical path when the pentaprism right angle error detection assisting device is used for detecting the pentaprism 1.
The right angle error detection auxiliary device for the pentaprism can assist in measuring right angle errors of a single pentaprism 1 by a laser interferometry.
Before the measurement starts, the right angle error detection auxiliary device of the pentaprism needs to be installed, and the specific process is as follows: a first standard plane mirror 10 with high precision is arranged on the light path output port of the interferometer 5, a second standard plane mirror 20 with high precision is arranged in front of the light path output port of the interferometer 5 through an included angle fixing device, and the included angle between the second standard plane mirror 20 and the first standard plane mirror 10 is 90 degrees.
Further, the included angle between the second standard plane mirror 20 and the first standard plane mirror 10 is calibrated, the mirror surface of the first standard plane mirror 10 is perpendicular to the optical axis of the interferometer 5, the mirror surface of the second standard plane mirror 20 is parallel to the optical axis of the interferometer 5, and then the right angle error of the pentaprism 1 can be measured. The process of calibrating the included angle between the second standard plane mirror 20 and the first standard plane mirror 10 is shown in fig. 2, the second interferometer 30 is disposed at a position corresponding to the included angle between the first standard plane mirror 10 and the second standard plane mirror 20, the aperture of the second interferometer 30 covers the first standard plane mirror 10 and the second standard plane mirror 20, the emitted light beam can strike the edges of the first standard plane mirror 10 and the second standard plane mirror 20, the third standard plane mirror 40 is mounted on the optical path output port of the second interferometer 30, when the second interferometer 30 is calibrated, the second interferometer 30 emits the light beam, when the light beam strikes the third standard plane mirror 40, a part of the light beam is reflected back as the second reference light, another part of the light beam is transmitted, and is reflected back through the first standard plane mirror 10 and the second standard plane mirror 20, the second interferometer 30 is used as the second test light to interfere with the second reference light, and the included angle between the first standard plane mirror 10 and the second standard plane mirror 20 is obtained through the intelligent instrument test software matched with the second interferometer 30, and accordingly, the included angle between the first plane mirror 10 and the second standard plane mirror 20 can be accurately controlled to be in order of magnitude of seconds.
As shown in fig. 3, the detection method and process for detecting the right angle error of the pentaprism by using the right angle error detection auxiliary device of the pentaprism are as follows: the interferometer 5 emits light beams through the light path output port, one part of the light beams firstly strikes the first standard plane mirror 10 and is reflected back as first reference light, the other part of the light beams are transmitted, the transmitted light beams are incident perpendicular to the refraction (incidence) surface AE of the pentaprism 1, and the light beams are reflected by the reflection surface BC and the reflection surface DE in the pentaprism 1 and then emitted through the other refraction (emission) surface AB. When the light beam exiting from the refracting surface AB reaches the second standard plane mirror 20, since the second labeling plane mirror 20 may be a reflecting mirror or a transmitting mirror, all or a part of the light beam is reflected back by the second standard plane mirror 20, and after passing through the pentaprism 1 and the first standard plane mirror 10 in sequence, the reflected light beam is used as the first test light to interfere with the first reference light, and meanwhile, the right angle error of the pentaprism 1 can be obtained in the comatic instrument test software of the matched interferometer 5 on the computer.
The test result is directly output through the intelligent instrument test software on the computer, and can be conveniently networked with other automatic equipment to realize test automation.
It should be further noted that the above-mentioned intelligent instrument test software has the following functions: and processing the collected wave surface data of the reference light and the test light which interfere with each other to obtain an included angle between the wave surface of the reference light and the wave surface of the test light. The application relates to a Huili instrument test software, which belongs to the prior art and does not relate to software improvement.
Effects and effects of the examples
According to the auxiliary device and the detection method for the right angle error of the pentaprism, based on a laser interferometry, when the right angle error of the pentaprism is detected, the first standard plane mirror is arranged on the interferometer, so that the interferometer still plays a role of a standard mirror, light beams emitted by the interferometer are folded by the first standard plane mirror and the pentaprism to be detected and then reach the second standard plane mirror, and as the second marked plane mirror is a reflecting mirror or a transmitting mirror, part of light beams reaching the second standard plane mirror can be reflected back, and then the light beams sequentially pass through the pentaprism to be detected and the first standard plane mirror and interfere with reference light partially reflected by the first standard plane mirror, and then collected wave surface data are processed through the testing software of a comatic instrument, so that the included angle between the wave surface of the light reflected by the standard mirror and the wave surface reflected by the pentaprism and reflected by the second standard plane mirror can be obtained. Compared with the prior art, the application can assist in realizing high-precision automatic measurement of the right angle error detection of the pentaprism, and the position of the pentaprism is not required to be regulated again during detection operation, so that the operation steps are simplified, the included angle between the first standard plane mirror and the second standard plane mirror can be accurately measured and regulated to be fixed to 90 degrees through the other interferometer, the other standard plane mirror and the matched testing software of the Huili instrument, the error is extremely small, the regulation is not required, and the measurement precision is improved.
The above embodiments are preferred examples of the present application, and are not intended to limit the scope of the present application.
Claims (5)
1. The utility model provides a pentaprism right angle error detection auxiliary device which characterized in that includes:
the first standard plane mirror is used for being arranged on an optical path output port of the first interferometer, and the mirror surface is perpendicular to the optical axis of the first interferometer; and
the second standard plane mirror is arranged in front of the optical path output port of the first interferometer, and an included angle between the mirror surface and the mirror surface of the first standard plane mirror is fixed to be 90 degrees;
wherein the first standard plane mirror is a transmission mirror,
the second standard plane mirror is a reflecting mirror or a transmitting mirror.
2. The penta prism right angle error detection assist apparatus of claim 1 further comprising:
and the included angle fixing device is used for setting and fixing the included angle between the first standard plane mirror and the second standard plane mirror to be 90 degrees.
3. The pentaprism right angle error-detecting auxiliary device according to claim 1, wherein:
wherein the pentaprism is provided with an incident surface and an emergent surface which are perpendicular to each other,
the mirror surfaces of the first standard plane mirror and the second standard plane mirror are respectively parallel to the incident surface and the emergent surface during detection.
4. A method for detecting a right angle error of a pentaprism having an entrance surface, an exit surface, two reflection surfaces, and an auxiliary surface, characterized by using the right angle error detection auxiliary device of the pentaprism according to any one of claims 1 to 3, comprising the steps of:
setting a first standard plane mirror on an optical path output port of a first interferometer, wherein a mirror surface is perpendicular to an optical axis of the first interferometer, setting a second standard plane mirror in front of the optical path output port of the first interferometer, and fixing an included angle between the mirror surface and the mirror surface of the first standard plane mirror to be 90 degrees;
when the light beam is transmitted to the first standard plane mirror, one part of the light beam is reflected back as first reference light, the other part of the light beam is transmitted to the incidence surface of the pentaprism and is incident perpendicularly, then the light beam is reflected by two reflection surfaces in the pentaprism and then is emitted to the second standard plane mirror through the emission surface, wherein one part of the light beam is reflected back by the second standard plane mirror, and the light beam reflected back by the part of the light beam is interfered with the first reference light after passing through the pentaprism and the first standard plane mirror in sequence;
and obtaining a right angle error test result of the pentaprism through the Huili instrument test software matched with the first interferometer.
5. The method for detecting right angle errors of pentaprism according to claim 4, wherein:
after the first standard plane mirror and the second standard plane mirror are arranged and before the first interferometer is controlled to emit light beams, the second interferometer and a transmission mirror which is arranged on an optical path output port of the second interferometer and serves as a third standard plane mirror are utilized to control the second interferometer to emit light beams, when the light beams are transmitted to the third standard plane mirror, one part of the light beams are reflected back as second reference light, the other part of the light beams are transmitted and reflected back through the first standard plane mirror and the second standard plane mirror, interference is generated with the second reference light, and an included angle between the first standard plane mirror and the second standard plane mirror is obtained through a smart instrument test software matched with the second interferometer, so that the included angle between the first standard plane mirror and the second standard plane mirror is adjusted, and the included angle is accurately calibrated to 90 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310690457.9A CN116609040A (en) | 2023-06-12 | 2023-06-12 | Auxiliary device and method for detecting right angle errors of pentaprism |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310690457.9A CN116609040A (en) | 2023-06-12 | 2023-06-12 | Auxiliary device and method for detecting right angle errors of pentaprism |
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| CN116609040A true CN116609040A (en) | 2023-08-18 |
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| CN202310690457.9A Pending CN116609040A (en) | 2023-06-12 | 2023-06-12 | Auxiliary device and method for detecting right angle errors of pentaprism |
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| CN (1) | CN116609040A (en) |
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- 2023-06-12 CN CN202310690457.9A patent/CN116609040A/en active Pending
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