CN1165952A - Measuring method for laser power and energy from beam outside - Google Patents
Measuring method for laser power and energy from beam outside Download PDFInfo
- Publication number
- CN1165952A CN1165952A CN97104160A CN97104160A CN1165952A CN 1165952 A CN1165952 A CN 1165952A CN 97104160 A CN97104160 A CN 97104160A CN 97104160 A CN97104160 A CN 97104160A CN 1165952 A CN1165952 A CN 1165952A
- Authority
- CN
- China
- Prior art keywords
- power
- energy
- laser beam
- laser
- measurement method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title abstract description 7
- 230000003071 parasitic effect Effects 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 6
- 238000000691 measurement method Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000012886 linear function Methods 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 2
- 210000001367 artery Anatomy 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Abstract
A method for measuring power of strong laser quickly and correctly without cutting off the laser beam features that a receiver is arranged at a position (angle) outside the laser beam to measure the power or energy of stray light of laser beam, and the power or energy of the laser beam can be obtained according to the linear function relation between the stray light and laser beam. Said method can also be used to measure the pulse frequency, waveform, pulse width and peak power of laser beam.
Description
The present invention relates to the measuring method of laser beam power, energy.
Now all laser powers, the measurement of energy all are that laser beam is directly measured, promptly surveying instrument (probe) is placed the path of laser beam, allow the laser direct irradiation on the probe of surveying instrument, take all or part of laser to measure, it is feasible measuring the lower laser of energy in this way, but to high-power, the measurement of light laser exists very big difficulty and inconvenience.As laser pick-off device destructible very under high-power irradiation; Can stop passing through of all or part of laser during measurement, cut off light beam, be difficult for realizing monitoring.
The object of the present invention is to provide and a kind ofly do not cut off light beam and quick and precisely measure the power of high power strong laser, the method for energy.
Technical scheme of the present invention is as follows:
Most energy of laser are to concentrate on the laser beam, but also there is the less parasitic light that comes out by bombardment with laser beams of energy in the periphery of laser beam, there are linear functional relation in power, the energy of parasitic light that this part radiates and laser beam itself, therefore utilize this feature to utilize linear functional relation to proofread and correct actual whole power, the energy of laser beam then at power, the energy of laser beam external pelivimetry parasitic light.
The laser pickoff that uses during measurement (probe) can be selected the photoelectric device of high sensitivity fast-response for use,-or pyroelectric electric device, or photoconductive device, diaphragm type thermoelectric pile etc., also can several the uses that combine, it is placed on (facing on the certain angle of light beam) on the outer certain position of laser beam, and opening (window) before and after being encapsulated in, only can pass through beam diameter, in the magazine that other light are tightly covered-environment parasitic light shielding box (bias light can zero clearing or use standard correction), measure the power of laser beam parasitic light, energy is calculated the general power of laser beam, energy.Computation process can be finished by electronic circuit, proofreaies and correct with reference power meter then.Airborne dust, the content of water vapor changes, and its can be to the power of parasitic light, and the measurement of energy exerts an influence, and therefore the influence that must cause these factors when as zlasing mode bigger variation being arranged, also can influence measured value to the measured value correction.Particularly (the bundle position is unstable) also can bring influence when laser beam drift, and bundle external detector position should be placed on the fixed position of magazine window.
Background stray light source as measure field is stable, then can adopt the method for background zero clearing to measure, not environment for use parasitic light shielding box.
Accompanying drawing of the present invention is as follows:
Accompanying drawing 1 is bundle external detector structural representation.
Accompanying drawing 2 is attenuator (tube) synoptic diagram.
Among the figure, 1 is laser beam, and 2 is environment parasitic light shielding box, and 3 for being placed in the detection instrument in the shielding box, and 4 for eliminating light beam parasitic light delustring tube in addition, and 5 are delustring screw thread or serial light hurdle ring (black).
Embodiments of the invention 1 are: make laser power with photoelectric device, the probe of energy meter, be placed on the laser beam outside, fix its position and angle towards light beam, measure the power of laser beam parasitic light, energy is proofreaied and correct with the calibration power energy meter again, just obtain correct laser beam power, energy.When measuring light initialize signal and termination signal, just can determine laser repetition pulse frequency, detector is linked to each other with oscillograph, can obtain optical pulse waveform.The pulse waveform and the burst length that measure are calculated, just can obtain the peak power of laser beam;
Embodiment 2 is: above-mentioned tester is linked to each other with single card microcomputer, then can finish machine many reference amounts and measure, that is: power, energy, light arteries and veins medium frequency, light wave shape, optical pulse time, peak power.
The present invention has following characteristics: the different kinds of parameters such as power, energy that 1) can survey the laser beam of any intensity; 2) because In the bundle external pelivimetry, light beam itself is had no effect, can realize the at any time monitoring to laser beam; 3) reaction is fast; 4) instrument Safety is used in small volume and less weight, and the life-span is long, can not burnt by light beam.
Claims (4)
1, the outer laser power of bundle, energy measurement method, be with measuring sonde Laser Measurement beam power, energy, it is characterized in that measuring sonde places on the outer certain position (angle) of laser beam, measure power, the energy of laser beam parasitic light, according to the power of parasitic light and laser beam itself, the feature that there is linear functional relation in energy, proofread and correct out power, the energy of laser beam.
2, the outer laser power of bundle according to claim 1, energy measurement method is characterized in that measuring sonde is by the photovoltaic type device, photoconductive device, pyroelectric electric device, one or several the use that combines in the diaphragm type thermoelectric pile.
3, the outer laser power of bundle according to claim 1, energy measurement method is characterized in that testing tool can extremely link to each other with display or veneer, measure parameters such as power, energy, optical pulse frequency, optical pulse time, optical pulse waveform, peak power.
4, the outer laser power of bundle according to claim 1 and 2, energy measurement method is characterized in that detector is installed in the environment parasitic light shielding box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN97104160A CN1165952A (en) | 1997-04-29 | 1997-04-29 | Measuring method for laser power and energy from beam outside |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN97104160A CN1165952A (en) | 1997-04-29 | 1997-04-29 | Measuring method for laser power and energy from beam outside |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1165952A true CN1165952A (en) | 1997-11-26 |
Family
ID=5167187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN97104160A Pending CN1165952A (en) | 1997-04-29 | 1997-04-29 | Measuring method for laser power and energy from beam outside |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1165952A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101988852A (en) * | 2009-08-06 | 2011-03-23 | 陈顺林 | Laser ergometer |
| US8545669B2 (en) | 2003-08-14 | 2013-10-01 | Kla-Tencor Corporation | Sensor array for measuring plasma characteristics in plasma processing environments |
| CN103368063A (en) * | 2012-03-29 | 2013-10-23 | 三菱电机株式会社 | Laser module |
| CN103604495A (en) * | 2013-11-20 | 2014-02-26 | 中国工程物理研究院应用电子学研究所 | High energy laser beam stray light energy measuring system |
| CN104335018A (en) * | 2012-05-30 | 2015-02-04 | Ipg光子公司 | Laser power sensor |
| CN105953916A (en) * | 2016-06-17 | 2016-09-21 | 中国工程物理研究院激光聚变研究中心 | Laser power sampling method and device |
-
1997
- 1997-04-29 CN CN97104160A patent/CN1165952A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8545669B2 (en) | 2003-08-14 | 2013-10-01 | Kla-Tencor Corporation | Sensor array for measuring plasma characteristics in plasma processing environments |
| CN101988852A (en) * | 2009-08-06 | 2011-03-23 | 陈顺林 | Laser ergometer |
| CN103368063A (en) * | 2012-03-29 | 2013-10-23 | 三菱电机株式会社 | Laser module |
| US9182272B2 (en) | 2012-03-29 | 2015-11-10 | Mitsubishi Electric Corporation | Laser module |
| CN103368063B (en) * | 2012-03-29 | 2016-08-31 | 三菱电机株式会社 | Laser module |
| CN104335018A (en) * | 2012-05-30 | 2015-02-04 | Ipg光子公司 | Laser power sensor |
| CN103604495A (en) * | 2013-11-20 | 2014-02-26 | 中国工程物理研究院应用电子学研究所 | High energy laser beam stray light energy measuring system |
| CN103604495B (en) * | 2013-11-20 | 2016-04-27 | 中国工程物理研究院应用电子学研究所 | A kind of high energy laser beam parasitic light energy gauge |
| CN105953916A (en) * | 2016-06-17 | 2016-09-21 | 中国工程物理研究院激光聚变研究中心 | Laser power sampling method and device |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |