CN116592864B - All-solid-state surface acoustic wave gyroscope based on phonon crystal - Google Patents
All-solid-state surface acoustic wave gyroscope based on phonon crystal Download PDFInfo
- Publication number
- CN116592864B CN116592864B CN202310599739.8A CN202310599739A CN116592864B CN 116592864 B CN116592864 B CN 116592864B CN 202310599739 A CN202310599739 A CN 202310599739A CN 116592864 B CN116592864 B CN 116592864B
- Authority
- CN
- China
- Prior art keywords
- surface wave
- phonon crystal
- acoustic wave
- surface acoustic
- phonon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 67
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 31
- 230000005284 excitation Effects 0.000 claims abstract description 31
- 230000005540 biological transmission Effects 0.000 claims abstract description 24
- 239000004038 photonic crystal Substances 0.000 claims abstract description 21
- 238000012545 processing Methods 0.000 claims abstract description 10
- 230000000694 effects Effects 0.000 claims abstract description 9
- 230000007547 defect Effects 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 230000005489 elastic deformation Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000009471 action Effects 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000012814 acoustic material Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5698—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using acoustic waves, e.g. surface acoustic wave gyros
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention relates to an inertial measurement device, in particular to an all-solid-state surface acoustic wave gyroscope based on phononic crystals; according to the invention, the whispering gallery mode in the surface acoustic wave excited phonon crystal is utilized, the whispering gallery mode produces precession under the action of angular velocity, the precession can influence the property of the output surface acoustic wave, the angular velocity can be measured by detecting the characteristics of the output elastic wave, and the problem of weak gyroscopic effect caused by directly modulating the surface wave by the angular velocity of the existing all-solid-state surface acoustic wave gyroscope is solved. The invention discloses an all-solid-state surface acoustic wave gyroscope based on a photonic crystal, which comprises a signal generator, a surface wave excitation transmission module, a photonic crystal sensitive structure, a surface wave vibration meter and a data acquisition and processing module. The invention is suitable for angular velocity measurement.
Description
Technical Field
The invention belongs to the technical field of inertial measurement, and particularly relates to an all-solid-state surface acoustic wave gyroscope based on phononic crystals.
Background
The all-solid-state surface wave gyroscope is a gyroscope for realizing angular velocity measurement by utilizing the surface acoustic wave in a solid substrate, has a manufacturing process compatible with a CMOS process, can work in an impact environment of more than 20000g, and has great research value and application prospect. However, the existing all-solid-state surface wave gyroscopes depend on the angular velocity to directly modulate the surface wave, so that the gyroscopic effect is weak and difficult to be practically applied, and therefore new mechanisms and schemes are needed.
The phononic crystal is used as a periodic artificial acoustic material and can be used for controlling elastic waves and sound waves; meanwhile, the whispering gallery mode of the hollow column phonon crystal has a similar vibration mode and the same essence as the working mode of the hemispherical resonator gyroscope. The hemispherical resonator gyroscope is the Coriolis vibration gyroscope with the best comprehensive performance at present, so that the phonon crystal with the whispering gallery mode can provide a new thought for the all-solid-state surface wave gyroscope.
Based on the above, it is necessary to develop an all-solid-state surface acoustic wave gyroscope based on phonon crystals so as to solve the problems that the detection sensitivity of the existing all-solid-state surface acoustic wave gyroscope is difficult to improve and the gyroscopic effect is weak.
Disclosure of Invention
In order to solve the problems, the invention discloses an all-solid-state surface acoustic wave gyroscope based on phonon crystals, which has reasonable structure and ingenious design, and effectively solves the problems that the detection sensitivity of the existing all-solid-state surface acoustic wave gyroscope is difficult to improve and the gyroscopic effect is weak.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
An all-solid-state surface acoustic wave gyroscope based on a photonic crystal comprises a signal generator, a surface wave excitation transmission module, a photonic crystal sensitive structure, a surface wave vibration meter and a data acquisition and processing module;
the signal generator is a high-power signal generator and is connected with the surface wave excitation transmission module; the surface wave excitation transmission module is fixed on the surface of the phonon crystal sensitive structure; the phonon crystal sensitive structure is connected with the surface wave vibration meter; the output end of the surface wave vibration meter is connected with the data acquisition and processing module.
Phonon crystal sensitive structures are formed by introducing defect cells with whispering gallery modes in the complete phonon crystal.
Preferably, the photonic crystal unit is composed of a base plate and a solid cylinder, and the photonic crystal unit is periodically arranged in an array of m×n with a as lattice constant, thereby forming a complete photonic crystal.
Preferably, the phonon crystal defect unit is composed of a base plate and a hollow cylinder, and one unit in the center of the complete phonon crystal is replaced by a defect unit, thereby forming a phonon crystal with point defects. The whispering gallery mode of the hollow column photonic crystal unit is used as a defect mode, and the whispering gallery mode is designed in the local resonance band gap of the complete photonic crystal.
Preferably, the mechanism of phonon crystal sensitivity angular velocity is as follows: the whispering gallery mode of the phonon crystal can stably vibrate reciprocally in a two-antinode vibration mode at no angular velocity. When there is an angular velocity, the whispering gallery modes precess under the effect of coriolis forces, and the precession angle is proportional to the integral of the angular velocity over time. Precession of the whispering gallery mode can further affect characteristics such as frequency, amplitude, phase and the like of the output surface wave, and the characterization of angular velocity is achieved by detecting changes in the properties of the output surface wave.
Preferably, the specific working process of the all-solid-state surface acoustic wave gyroscope based on the phonon crystal is as follows: the signal generator generates a high-power signal, the high-power signal is applied to the input end of the surface wave excitation transmission module, and the surface wave excitation transmission module is used for exciting corresponding elastic deformation at the signal receiving end of the phonon crystal structure substrate by utilizing the inverse piezoelectric effect, so that the electric signal generated by the signal generator is converted into a surface acoustic wave signal. The surface wave excitation transmission module is specifically designed, so that the central frequency of the surface wave generated by the surface wave excitation transmission module is consistent with the whispering gallery mode of the hollow column phonon crystal, and the surface wave excitation transmission module has the characteristics of narrow line width, low attenuation and the like. The surface acoustic wave signal is transmitted from the near excitation section to the far excitation section in the photonic crystal structure substrate, and continuous vibration of the whispering gallery defect mode is excited when the surface acoustic wave signal passes through the photonic crystal sensitive structure. The surface wave vibration meter measures light and focuses on the surface of the substrate of the phonon crystal structure, when the substrate of the phonon crystal structure vibrates, the surface wave vibration meter measures light to generate Doppler frequency shift, the Doppler frequency shift reflects the Doppler frequency shift back to the surface wave vibration measuring system and interferes with reference light to obtain surface vibration information of the substrate of the phonon crystal structure, frequency signals of the surface wave vibration meter are converted into vibration signals of the phonon crystal structure, the vibration signals of the phonon crystal structure collected by the surface wave vibration meter are input into a data collecting and processing module to be subjected to modal collecting and analyzing resolving when the high-frequency vibration and the high-speed rotation are carried out, and finally, the result of analyzing resolving is stored.
The beneficial effects of the invention are as follows:
the invention has reasonable structure and ingenious design, utilizes the whispering gallery mode in the acoustic surface wave excited phonon crystal, and the whispering gallery mode produces precession under the action of angular velocity, and the precession can influence the property of the output surface wave, and the angular velocity can be measured by detecting the characteristics of the output elastic wave, thereby effectively solving the problems that the detection sensitivity of the existing all-solid-state surface wave gyro is difficult to improve and the gyro effect is weak, and being applicable to an inertial navigation system.
Drawings
FIG. 1 is a schematic diagram of an all-solid-state SAW gyroscope based on photonic crystals in the present invention;
FIG. 2 is a schematic diagram of the principle of precession of a photonic crystal hollow column unit under the influence of Coriolis force in the present invention;
FIG. 3 is a schematic diagram of the precession mode of the photonic crystal hollow column unit under the influence of Coriolis force in the present invention.
Description of the embodiments
The present invention is further illustrated in the following drawings and detailed description, which are to be understood as being merely illustrative of the invention and not limiting the scope of the invention.
As shown in the figure, the all-solid-state surface acoustic wave gyroscope based on the phononic crystal comprises a signal generator 1, a surface acoustic wave excitation transmission module 2, a phononic crystal structure 3, a surface acoustic wave vibrometer 4 and a data acquisition and processing module 5.
The signal generator 1 is a high-power signal generator and is connected with the surface wave excitation transmission module 2; the surface wave excitation transmission module 2 is fixed on the surface of the phonon crystal sensitive structure 3; the phonon crystal structure 3 is connected with a surface wave vibration meter 4; the output end of the surface wave vibration meter 4 is connected with a data acquisition and processing module 5.
The above all-solid-state surface acoustic wave gyroscope based on phonon crystals, wherein the phonon crystal sensitive structure is formed by introducing defect units with whispering gallery modes into the complete phonon crystal. The phonon crystal units are composed of a base plate and a solid cylinder, and the phonon crystal units are periodically arranged into 9*5 arrays with a as lattice constant, so that complete phonon crystals are formed.
The phonon crystal defect unit consists of a base plate and a hollow cylinder, and one unit in the center of the complete phonon crystal is replaced by a defect unit, so that the phonon crystal with point defects is formed. The whispering gallery mode of the hollow column phonon crystal unit is taken as a defect mode, the thickness of a lattice unit bottom plate is taken as 0.2a, the radius of a solid cylinder is taken as 0.46a of a substrate structure, the height is 0.6a, the inner height of the hollow column structure is 0.4a, the outer height of the hollow column structure is 0.65a, the inner diameter of the hollow column structure is 0.25a, and the outer diameter of the hollow column structure is 0.3a, so that the whispering gallery mode is designed in the local resonance band gap of the complete phonon crystal.
The specific working process of the all-solid-state surface acoustic wave gyroscope based on the phonon crystal is realized by the following steps: the signal generator generates a high-power signal, the high-power signal is applied to the input end of the surface wave excitation transmission module, and the surface wave excitation transmission module is used for exciting corresponding elastic deformation at the signal receiving end of the phonon crystal structure substrate by utilizing the inverse piezoelectric effect, so that the electric signal generated by the signal generator is converted into a surface acoustic wave signal. The surface wave excitation transmission module is specifically designed, so that the central frequency of the surface wave generated by the surface wave excitation transmission module is consistent with the whispering gallery mode of the hollow column phonon crystal, and the surface wave excitation transmission module has the characteristics of narrow line width, low attenuation and the like. The surface acoustic wave signal is transmitted from the near excitation section to the far excitation section in the photonic crystal structure substrate, and continuous vibration of the whispering gallery defect mode is excited when the surface acoustic wave signal passes through the photonic crystal sensitive structure. The surface wave vibration meter measures light and focuses on the surface of the substrate of the phonon crystal structure, when the substrate of the phonon crystal structure vibrates, the surface wave vibration meter measures light to generate Doppler frequency shift, the Doppler frequency shift reflects the Doppler frequency shift back to the surface wave vibration measuring system and interferes with reference light to obtain surface vibration information of the substrate of the phonon crystal structure, frequency signals of the surface wave vibration meter are converted into vibration signals of the phonon crystal structure, the vibration signals of the phonon crystal structure collected by the surface wave vibration meter are input into a data collecting and processing module to be subjected to modal collecting and analyzing resolving when the high-frequency vibration and the high-speed rotation are carried out, and finally, the result of analyzing resolving is stored.
It should be noted that the foregoing merely illustrates the technical idea of the present invention and is not intended to limit the scope of the present invention, and that a person skilled in the art may make several improvements and modifications without departing from the principles of the present invention, which fall within the scope of the claims of the present invention.
Claims (2)
1. An all-solid-state surface acoustic wave gyroscope based on phonon crystals is characterized in that: the surface wave excitation device comprises a signal generator (1), a surface wave excitation transmission module (2), a phonon crystal sensitive structure (3), a surface wave vibration meter (4) and a data acquisition and processing module (5);
The signal generator (1) is a high-power signal generator and is connected with the surface wave excitation transmission module (2); the surface wave excitation transmission module (2) is fixed on the surface of the phonon crystal sensitive structure (3); the phonon crystal sensitive structure (3) is connected with the surface wave vibration meter (4); the output end of the surface wave vibration meter (4) is connected with the data acquisition and processing module (5);
Introducing a defect unit with an echo gallery mode into the complete phonon crystal to form a phonon crystal sensitive structure capable of sensing angular velocity;
the phonon crystal defect unit consists of a base plate and a hollow cylinder, and one unit in the center of the complete phonon crystal is replaced by a defect unit, so that a phonon crystal with point defects is formed; the whispering gallery mode of the hollow column photonic crystal unit is used as a defect mode, and the whispering gallery mode is designed in the local resonance band gap of the complete photonic crystal.
2. The photonic crystal-based all-solid-state surface acoustic wave gyroscope of claim 1, wherein: the specific working process is as follows:
The signal generator generates a high-power signal, the high-power signal is applied to the input end of the surface wave excitation transmission module, and the surface wave excitation transmission module is used for exciting corresponding elastic deformation at the signal receiving end of the phonon crystal structure substrate by utilizing the inverse piezoelectric effect so as to convert the electric signal generated by the signal generator into a surface acoustic wave signal; the center frequency of the surface wave generated by the surface wave excitation transmission module is consistent with the whispering gallery mode of the hollow column phonon crystal, and the surface wave excitation transmission module has the characteristics of narrow linewidth and low attenuation; the surface acoustic wave signal is transmitted from a near excitation section to a far excitation section in the photonic crystal structure substrate, and continuous vibration of a whispering gallery defect mode is excited when the surface acoustic wave signal passes through a photonic crystal sensitive structure; the surface wave vibration meter measures light and focuses on the surface of the substrate of the phonon crystal structure, when the substrate of the phonon crystal structure vibrates, the surface wave vibration meter measures light to generate Doppler frequency shift, the Doppler frequency shift reflects the Doppler frequency shift back to the surface wave vibration measuring system and interferes with reference light to obtain surface vibration information of the substrate of the phonon crystal structure, frequency signals of the surface wave vibration meter are converted into vibration signals of the phonon crystal structure, the vibration signals of the phonon crystal structure collected by the surface wave vibration meter are input into a data collecting and processing module to be subjected to modal collecting and analyzing resolving when the high-frequency vibration and the high-speed rotation are carried out, and finally, the result of analyzing resolving is stored.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310599739.8A CN116592864B (en) | 2023-05-25 | 2023-05-25 | All-solid-state surface acoustic wave gyroscope based on phonon crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310599739.8A CN116592864B (en) | 2023-05-25 | 2023-05-25 | All-solid-state surface acoustic wave gyroscope based on phonon crystal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116592864A CN116592864A (en) | 2023-08-15 |
| CN116592864B true CN116592864B (en) | 2024-05-03 |
Family
ID=87605985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310599739.8A Active CN116592864B (en) | 2023-05-25 | 2023-05-25 | All-solid-state surface acoustic wave gyroscope based on phonon crystal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116592864B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09264745A (en) * | 1996-03-29 | 1997-10-07 | Minolta Co Ltd | Surface acoustic wave gyroscope |
| CN104084249A (en) * | 2014-07-14 | 2014-10-08 | 中国科学院上海微系统与信息技术研究所 | Photonic crystal based microfluidic structure, microfluidic device and fabrication method of microfluidic device |
| CN108413953A (en) * | 2018-02-27 | 2018-08-17 | 郑州轻工业学院 | A kind of adjustable gain control surface acoustic wave gyroscope based on graphene film |
| CN109781087A (en) * | 2018-12-05 | 2019-05-21 | 中北大学 | A kind of SAW gyroscope based on standing wave mode |
| CN112066967A (en) * | 2020-07-07 | 2020-12-11 | 西北工业大学 | Chip-level resonant acousto-optic coupling solid-state fluctuation gyroscope |
| CN112299361A (en) * | 2020-05-29 | 2021-02-02 | 南京理工大学 | MEMS device with vibration isolation plate |
| CN115855011A (en) * | 2023-03-03 | 2023-03-28 | 西北工业大学 | Chip-level high-dynamic MEMS annular sound surface standing wave gyroscope |
-
2023
- 2023-05-25 CN CN202310599739.8A patent/CN116592864B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09264745A (en) * | 1996-03-29 | 1997-10-07 | Minolta Co Ltd | Surface acoustic wave gyroscope |
| CN104084249A (en) * | 2014-07-14 | 2014-10-08 | 中国科学院上海微系统与信息技术研究所 | Photonic crystal based microfluidic structure, microfluidic device and fabrication method of microfluidic device |
| CN108413953A (en) * | 2018-02-27 | 2018-08-17 | 郑州轻工业学院 | A kind of adjustable gain control surface acoustic wave gyroscope based on graphene film |
| CN109781087A (en) * | 2018-12-05 | 2019-05-21 | 中北大学 | A kind of SAW gyroscope based on standing wave mode |
| CN112299361A (en) * | 2020-05-29 | 2021-02-02 | 南京理工大学 | MEMS device with vibration isolation plate |
| CN112066967A (en) * | 2020-07-07 | 2020-12-11 | 西北工业大学 | Chip-level resonant acousto-optic coupling solid-state fluctuation gyroscope |
| WO2022007981A1 (en) * | 2020-07-07 | 2022-01-13 | 西北工业大学 | Chip-level, resonant, acousto-optically coupled, solid-state wave gyroscope |
| CN115855011A (en) * | 2023-03-03 | 2023-03-28 | 西北工业大学 | Chip-level high-dynamic MEMS annular sound surface standing wave gyroscope |
Non-Patent Citations (3)
| Title |
|---|
| Gyroscopes based on surface acoustic waves;Haekwan Oh等;Micro and Nano Systems Letters;20151231;全文 * |
| MEMS-IDT声表面波陀螺;吕志清, 胡爱民;微纳电子技术;20030425(第04期);全文 * |
| 石英晶体上的声表面波陀螺效应;陈智军;李良儿;施文康;吉小军;韩韬;;压电与声光;20061028(第05期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116592864A (en) | 2023-08-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Migliori et al. | Implementation of a modern resonant ultrasound spectroscopy system for the measurement of the elastic moduli of small solid specimens | |
| KR101673887B1 (en) | Vibrating micro-mechanical sensor of angular velocity | |
| CN105203132B (en) | A kind of output frequency detection method of resonance type vibration gyro | |
| Brocanelli et al. | Measurement of low-strain material damping and wave velocity with bender elements in the frequency domain | |
| RU2518587C2 (en) | Low-frequency foldable pendulum with high coefficient of mechanical quality and seismic sensor with said pendulum | |
| US10295507B2 (en) | Method and device for multiple-frequency tracking of oscillating systems | |
| WO2020062675A1 (en) | Acoustic micro-mass sensor and detection method | |
| CN101294824B (en) | Electromagnetic micro-torsional pendulum resonant vibration type sensor based on micro-electronic mechanical skill | |
| EP1533611A1 (en) | Apparatus and method for measuring micro mass using oscillation circuit | |
| Kageyama et al. | Doppler effect in flexible and expandable light waveguide and development of new fiber-optic vibration/acoustic sensor | |
| Lipiäinen et al. | Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization | |
| US4199990A (en) | Elastic surface wave accelerometer | |
| CN116592864B (en) | All-solid-state surface acoustic wave gyroscope based on phonon crystal | |
| Gast | Sensors with oscillating elements | |
| JPH08334330A (en) | Wave gyroscope and rotational angular velocity-detecting method using the gyroscope | |
| US6822929B1 (en) | Micro acoustic spectrum analyzer | |
| Lonsdale | Dynamic rotary torque measurement using surface acoustic waves | |
| CN207123291U (en) | A kind of micro-light electromechanical gyro based on multipath acoustic waveguide structure | |
| US20010010173A1 (en) | Piezo-electric vibration gyroscope | |
| CN109307507A (en) | A kind of micro-light electromechanical gyro based on multipath acoustic waveguide structure | |
| CN209727986U (en) | A kind of two-way surface acoustic wave acceleration transducer of lever | |
| Pinrod et al. | High-overtone bulk diffraction wave gyroscope | |
| Liao et al. | Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors | |
| JP2011095092A (en) | Glass destruction detector | |
| KR100258173B1 (en) | Resonance type micro gyroscope and method of manufacturing the same and method of measuring an angular velocity using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |