CN109307507A - A kind of micro-light electromechanical gyro based on multipath acoustic waveguide structure - Google Patents
A kind of micro-light electromechanical gyro based on multipath acoustic waveguide structure Download PDFInfo
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- CN109307507A CN109307507A CN201710618716.1A CN201710618716A CN109307507A CN 109307507 A CN109307507 A CN 109307507A CN 201710618716 A CN201710618716 A CN 201710618716A CN 109307507 A CN109307507 A CN 109307507A
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- acoustic waveguide
- micro
- light
- base material
- multipath
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
Abstract
The present invention relates to a kind of micro-light electromechanical gyros based on multipath acoustic waveguide structure, comprising: base material (11), the interdigital transducer (15) being set on base material (11), optical fiber (12), the polarizer (13), analyzer (18) harmony optical waveguiding region (16)；Optical fiber (12) is used for the polarizer (13) input optical signal, the optical signal successively after the processing of the polarizer (13), acoustic waveguide region (16) and analyzer (18), generates the polarized light signal modulated through surface acoustic wave；The acoustic waveguide region (16) is the S-shaped channel structure on base material (11), and is covered by the surface acoustic wave that interdigital transducer (15) generate.The present invention by using S-shaped structure acoustic waveguide region, effectively increase the contact area for the sound wave that optical signal generates in transmission process with interdigital transducer, the result of micro-light electromechanical gyro in compared with the existing technology, sensitivity with higher, angular velocity is more accurate.
Description
Technical field
The present invention relates to micro-light electromechanical gyro field, in particular to a kind of low-light machine based on multipath acoustic waveguide structure
Electric top.
Background technique
In recent years, surface acoustic wave sensor continues to develop.1980, Lao proposed surface acoustic wave gyro effect, that is, utilized
The surface acoustic wave of Propagation incudes the angular speed of moving object.Due to surface acoustic wave gyro have size it is small, it is light-weight,
The advantages that at low cost and low in energy consumption, has broad application prospects in microminiature angular-rate sensor field.Although SAW gyro
It quickly grows, but its accuracy and sensitivity need to be improved compared to optical fiber, laser gyro.Since SAW gyro utilizes Ge Shi
The influence of power changes acoustic velocity, and the sensitive cuts of piezoelectric substrate can be found out by calculating, and later, or passes through pressure welding metal dots
Battle array increases coriolis force, or changes detection mode, or changes SAW gyro chip structure to improve its accuracy and sensitivity.
The scheme reported at present for improving the use of SAW gyro has double passage differential SAW gyro, mass block standing wave SAW top
The influence such as thermal perturbation is effectively reduced using differential design in spiral shell, light deflector type acousto-optic SAW gyro etc., double passage differential SAW gyro,
But its frequency is very faint with angular speed variation, remolding sensitivity is lower.Mass block standing wave SAW gyro is mentioned by increasing quality
The sensitivity of high gyro, but its structure is complex, processing difficulties.It is high that optical detection precision is utilized in light deflector type acousto-optic SAW gyro
The characteristics of improve SAW gyro, but by calculate, sensitivity is not as good as mass block standing wave SAW gyro.Therefore, institute in the prior art
The above-mentioned various SAW gyros provided are to be further improved and developed.
Summary of the invention
It is an object of the present invention to which it is low to there is measurement sensitivity for various micro-light electromechanical gyros in the prior art
Technical problem proposes a kind of micro-light electromechanical gyro of high sensitive multipath diameter acoustic waveguide structure, utilizes gyro to measure angle speed
Degree, can be improved the sensitivity of detection.
To achieve the above object, a kind of micro-light electromechanical gyro based on multipath acoustic waveguide structure provided by the invention,
Including base material and the interdigital transducer that is set on base material, the micro-light electromechanical gyro further include: optical fiber, the polarizer,
Analyzer harmony optical waveguiding region；The optical fiber is used for polarizer input optical signal, and the optical signal is successively through being polarized
After device, acoustic waveguide region and analyzer processing, the polarized light signal modulated through surface acoustic wave is generated；The acoustic waveguide area
Domain is the S-shaped channel structure on base material, and is covered by the surface acoustic wave that interdigital transducer generates.
As a further improvement of the above technical scheme, the micro-light electromechanical gyro further includes sound absorption band, the fork
The both ends of finger transducer are respectively provided with a sound absorption band, for absorbing base material because the ultrasound that surface acoustic wave effect generates is returned
Wave.
As a further improvement of the above technical scheme, the micro-light electromechanical gyro further includes electrooptic modulator, described
The two sides in acoustic waveguide region are respectively provided with an electrooptic modulator, for carrying out width to the optical signal transmitted in acoustic waveguide region
Degree modulation.
As a further improvement of the above technical scheme, the acoustic waveguide region on base material by using light
Quarter, plated film, diffusion or etching technics are made；The base material uses acoustic waveguide medium, comprising: LiNbO3, PbMoO4,
GaAs, Si, TeO2 crystal or synthetic organic material.
As a further improvement of the above technical scheme, the acoustic waveguide region is using titanium diffusion technique in substrate material
It is made on material.
As a further improvement of the above technical scheme, the optical fiber is single mode fibers or multi-mode optical fiber.
A kind of micro-light electromechanical gyro advantage based on multipath acoustic waveguide structure of the invention is:
The micro-light electromechanical gyro of high sensitive multipath diameter acoustic waveguide structure of the invention, acoustic waveguide region use S type
Structure effectively increases connecing for the sound wave that optical signal generates in transmission process with interdigital transducer compared to slab optical waveguide
Contacting surface product so that acoustic signals preferably act on optical signal, compared with the existing technology in micro-light electromechanical gyro, have higher
Sensitivity, the result of angular velocity is more accurate.
Detailed description of the invention
Fig. 1 is the micro-light electromechanical gyro structural schematic diagram of multipath acoustic waveguide structure provided by the invention；
Fig. 2 is the structural schematic diagram of the interdigital transducer harmony optical waveguiding region in the embodiment of the present invention.
Appended drawing reference
11, base material 12, optical fiber 13, the polarizer
14, sound absorption band 15, interdigital transducer 16, acoustic waveguide region
17, electrooptic modulator 18, analyzer 21, pressure welding electrode
22, bridging electrode 23, interdigital electrode
Specific embodiment
Technical solution provided by the present invention is further illustrated with reference to embodiments.
As shown in Figure 1, a kind of micro-light electromechanical gyro of high sensitive multipath diameter optical fiber structure provided by the invention, comprising:
Input optical fibre 12, the polarizer 13, interdigital transducer 15, acoustic waveguide region 16, analyzer 18 and base material 11.In substrate material
Photoetching, plated film, diffusion or etching technics can be used on material 11, embedded acoustic waveguide region is made.The interdigital transducer 15
Harmony optical waveguiding region 16 is set on base material 11, and the interdigital transducer 15 crosses over acoustic waveguide region 16, is generated
Surface acoustic wave cover acoustic waveguide region 16.The optical fiber 12 is used for 13 input optical signal of the polarizer, the light letter
Number successively after the processing of the polarizer 13, acoustic waveguide region 16 and analyzer 18, generates polarised light modulate through surface acoustic wave and believe
Number.The embedded acoustic waveguide region uses S type channel structure, and is covered by the surface acoustic wave that interdigital transducer 15 generates
Lid.The path passed through from channel by lengthening signal, effectively increases the contact area of signal Yu interdigital transducer sound wave,
So that acoustic signals preferably act on optical signal, signal acquisition is more accurate sensitive, to improve the sensitivity of detection.
Single mode fibers or multi-mode optical fiber can be used in micro-light electromechanical gyro based on above structure, the optical fiber 12.
The multi-mode optical fiber allows the light of different mode to transmit on same optical fiber, in this way by believing optical fiber output
Difference processing number is done, reduces background noise, and then improve detection sensitivity.Its inner core diameter is wider relative to single mode fibers.
Multi-mode optical fiber can be used more single fibers and be composed.Inside of optical fibre has enough optical powers to transmit in this way, output signal
Acquisition is just more convenient sensitiveer.
The polarizer and analyzer, polarizer are that the optical signal for transmitting optical fiber is converted to polarised light, and analyzer is only
The light wave of special polarization state is allowed to pass through, to obtain the optical signal of required wavelength, to achieve the purpose that mode is converted.
In the present embodiment, acoustic waveguide medium can be used in the base material, comprising: LiNbO3、PbMoO4、GaAs、
Si、TeO2Crystal or synthetic organic material.The acoustic waveguide region can be made on base material embedding using titanium diffusion technique
Entering formula S type channel, so that the path that optical signal passes through from channel is longer, obtains bigger effective contact area, by
Light signal energy to external influence is directly proportional to contact area size, and the size of light signal energy directly affects sensitive monitoring
Degree, energy is bigger, and detection sensitivity is higher, can sufficiently be acted on by sensitive amount, acquisition is just more acurrate sensitiveer, so that entirely
Micro-light electromechanical gyro detection is more sensitive.
To effectively increase the contact area in signals transmission with interdigital transducer sound wave, so that signal acquisition
It is more accurate sensitive, improve the sensitivity and accuracy of detection.
In addition, as shown in Figure 1, the micro-light electromechanical gyro may also include sound absorption band 14 and electrooptic modulator 17.Institute
The both ends for stating interdigital transducer 15 are respectively provided with a sound absorption band 14, the sound absorption band, for absorb base material 11 because
The ultrasonic echo that surface acoustic wave effect generates, does its purpose is to prevent sound wave from strong reflection occurs after encountering substrate boundary
Disturb useful signal.The two sides in the acoustic waveguide region 16 are respectively provided with an electrooptic modulator 17, and the electrooptic modulator is used
Amplitude modulation is carried out in the optical signal that will be transmitted on acoustic waveguide region 16, facilitates the subsequent acquisition process to optical signal,
Its purpose is to facilitate demodulation and increase the sensitivity of gyro, setting electrooptic modulator adjusts the phase of light wave.
The interdigital transducer 15 includes pressure welding electrode 21, bridging electrode 22 and interdigital electrode 23.
The specific structure of the interdigital transducer and acoustic waveguide that provide in the present embodiment is as shown in Figure 2.Acoustic waveguide region
16 surfaces add one group of interdigital transducer 15 to be used as SAW transmitter and receiver, and the electrode structure of interdigital transducer 15 is divided into two groups,
The two sides up and down in acoustic waveguide region 16 are located at, are connected to pass through acousto-optic wave by bridging electrode 22 between two arrays of electrodes
Lead region 16.Pressure welding electrode 21 is as access input voltage signal section, in the signal for receiving single mode or multi-mode optical fiber 12
Afterwards, through the voltage-drop loading on pressure welding electrode 21 in interdigital electrode 23, sound wave is excited using piezoelectric effect.
The bridging electrode 22 plays the role of connecting lower channel interdigital transducer 15.Bridging electrode provides light wave
The space existing for transducer area is led, under the premise of keeping acousto-optic interaction area acoustic wavefield constant, is subtracted in the form of bridging
The metal electrode area of few optical waveguiding region, can not only keep the property of acoustic waveguide, but also metal electrode can be effectively reduced to light
The absorption of wave.
In the present embodiment, base material 11 is spread using titanium or particle exchanging technology produces embedded acoustic waveguide area
Domain 16 makes the emitter and repellel of interdigital transducer 15 thereon, and the interdigital transducer 15 driven through sound wave driving circuit produces
Raw surface acoustic wave is transmitted along 16 direction of acoustic waveguide region, forms density grating, makes to transmit in optical waveguide below the acoustic waveguide
Polarised light is modulated, and the light wave of analyzer 18 permission special polarization states passes through at this time, since object can generate brother when rotated
Family name's power causes the slight adaptation of acoustic-optio coupling, eventually leads to diffraction polarization light so that the propagation characteristic parameter of sound wave changes
Light intensity changes, and after detector receives diffraction light wave, the angular speed letter of coriolis force sensitivity is demodulated from the variation of polarized light intensity
Breath.
The concrete operating principle of micro-light electromechanical gyro provided by the invention are as follows:
Surface acoustic wave is generated after interdigital transducer is by voltage drive and is propagated, and generates coriolis force when object rotation,
Effect of the surface acoustic wave by coriolis force, spread speed change, and the surface acoustic wave that velocity variations occur can be to acousto-optic wave
The light-wave energy for leading the optical signal of regional spread generates different influences, and the light wave after being acted on continues along acoustic waveguide region
It propagates, follow-up signal is facilitated so that signal energy is loaded by the modulation that electrooptic modulator carries out signal amplitude to optical signal
Demodulation read.By using analyzer, extraction obtains lightwave signal, and signal energy is established and the corresponding line of coriolis force size
Sexual intercourse can demodulate coriolis force size, and then calibrate the rotary acceleration of object.
The present invention described above that can be seen that is improved by the acoustic waveguide structure to micro-light electromechanical gyro, by item
Shape structure is changed to S type multichannel gauge structure, thus increases the contact area of optical signal and conduct acoustic waves, to improve micro photo-electro-mechanical
The sensitivity of gyro expands its use scope, while its cost of manufacture is lower.
It should be noted last that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting.Although ginseng
It is described the invention in detail according to embodiment, those skilled in the art should understand that, to technical side of the invention
Case is modified or replaced equivalently, and without departure from the spirit and scope of technical solution of the present invention, should all be covered in the present invention
Scope of the claims in.
Claims (6)
1. a kind of micro-light electromechanical gyro based on multipath acoustic waveguide structure, including base material (11) and it is set to substrate material
Expect (11) on interdigital transducer (15), which is characterized in that the micro-light electromechanical gyro further include: optical fiber (12), the polarizer (13),
Analyzer (18) harmony optical waveguiding region (16)；The optical fiber (12) is used for the polarizer (13) input optical signal, described
Optical signal successively after the processing of the polarizer (13), acoustic waveguide region (16) and analyzer (18), modulate through surface acoustic wave by generation
Polarized light signal；The acoustic waveguide region (16) is the S-shaped channel structure on base material (11), and interdigital
The surface acoustic wave that energy converter (15) generates is covered.
2. the micro-light electromechanical gyro according to claim 1 based on multipath acoustic waveguide structure, which is characterized in that described
Micro-light electromechanical gyro further include sound absorption band (14), the both ends of the interdigital transducer (15) are respectively provided with a sound absorption band
(14), the ultrasonic echo generated for absorbing base material (11) by surface acoustic wave effect.
3. the micro-light electromechanical gyro according to claim 1 based on multipath acoustic waveguide structure, which is characterized in that described
Micro-light electromechanical gyro further include electrooptic modulator (17), the two sides of the acoustic waveguide region (16) are respectively provided with an electric light tune
Device (17) processed, for carrying out amplitude modulation to the optical signal transmitted in acoustic waveguide region (16).
4. the micro-light electromechanical gyro according to claim 1 based on multipath acoustic waveguide structure, which is characterized in that described
Acoustic waveguide region (16) by base material (11) use photoetching, plated film, diffusion or etching technics be made；Described
Base material (11) uses acoustic waveguide medium, comprising: LiNbO3、PbMoO4、GaAs、Si、TeO2Crystal or the organic material of synthesis
Material.
5. the micro-light electromechanical gyro according to claim 4 based on multipath acoustic waveguide structure, which is characterized in that described
Acoustic waveguide region (16) be made on base material (11) using titanium diffusion technique.
6. the micro-light electromechanical gyro according to claim 1 based on multipath acoustic waveguide structure, which is characterized in that described
Optical fiber (12) be single mode fibers or multi-mode optical fiber.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113340289A (en) * | 2021-06-04 | 2021-09-03 | 西北工业大学 | Chip-level disc type acousto-optic standing wave gyroscope |
| CN115793291A (en) * | 2023-02-06 | 2023-03-14 | 福建玻尔光电科技有限责任公司 | Acousto-optic modulator combining interdigital transducer and traveling wave electrode |
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| CN104297951A (en) * | 2014-09-22 | 2015-01-21 | 江苏骏龙电力科技股份有限公司 | Acousto-optic tunable optical filter |
| CN207123291U (en) * | 2017-07-26 | 2018-03-20 | 中国科学院声学研究所 | A kind of micro-light electromechanical gyro based on multipath acoustic waveguide structure |
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| JPH05172574A (en) * | 1992-06-09 | 1993-07-09 | Hitachi Ltd | Optical fiber gyro system |
| US5418866A (en) * | 1993-10-08 | 1995-05-23 | E. I. Du Pont De Nemours And Company | Surface acoustic wave devices for controlling high frequency signals using modified crystalline materials |
| US5530410A (en) * | 1993-10-08 | 1996-06-25 | E. I. Du Pont De Nemours And Company | Acoustic frequency mixing devices using potassium titanyl phosphate and its analogs |
| US5677971A (en) * | 1994-08-26 | 1997-10-14 | Oki Electric Industry Co., Ltd. | Optical wavelength filter with reduced sidelobes and simple design |
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| CN101645698A (en) * | 2009-01-09 | 2010-02-10 | 中国科学院声学研究所 | Bridge type surface acoustic wave transducer in micro-optical-electro-mechanical gyroscope |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113340289A (en) * | 2021-06-04 | 2021-09-03 | 西北工业大学 | Chip-level disc type acousto-optic standing wave gyroscope |
| WO2022252459A1 (en) * | 2021-06-04 | 2022-12-08 | 西北工业大学 | Chip-scale disc-type acousto-optic standing-wave gyroscope |
| CN113340289B (en) * | 2021-06-04 | 2023-01-24 | 西北工业大学 | Chip-level disc type acousto-optic standing wave gyroscope |
| CN115793291A (en) * | 2023-02-06 | 2023-03-14 | 福建玻尔光电科技有限责任公司 | Acousto-optic modulator combining interdigital transducer and traveling wave electrode |
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