CN116591934A - Pump body heating control system and pump body heating control method - Google Patents
Pump body heating control system and pump body heating control method Download PDFInfo
- Publication number
- CN116591934A CN116591934A CN202310390646.4A CN202310390646A CN116591934A CN 116591934 A CN116591934 A CN 116591934A CN 202310390646 A CN202310390646 A CN 202310390646A CN 116591934 A CN116591934 A CN 116591934A
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- temperature
- pump body
- acquisition module
- module
- vacuum pump
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 90
- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000007613 environmental effect Effects 0.000 claims abstract description 42
- 230000036760 body temperature Effects 0.000 claims description 28
- 230000003750 conditioning effect Effects 0.000 claims description 16
- 230000000694 effects Effects 0.000 abstract description 12
- 239000007789 gas Substances 0.000 description 54
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 238000009529 body temperature measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000003993 interaction Effects 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 5
- 230000005494 condensation Effects 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/06—Cooling; Heating; Prevention of freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B51/00—Testing machines, pumps, or pumping installations
Abstract
The application provides a pump body heating control system and a pump body heating control method, wherein the pump body heating control system comprises: a heating module; the temperature acquisition module is used for acquiring the temperature of the vacuum pump; the environment information acquisition module is used for acquiring environment information in the vacuum pump; and the control module is in signal connection with the temperature acquisition module, the environment information acquisition module and the heating module and is used for controlling the heating module to heat the pump body of the vacuum pump based on the temperature acquired by the temperature acquisition module and the environment information acquired by the environment information acquisition module. According to the application, the environmental information acquisition module is additionally arranged in the pump body heating control system, and the control module controls the heating module to heat the vacuum pump based on the acquisition results of the temperature acquisition module and the environmental information acquisition module, so that the heating control is more targeted, and the effect of preventing gas cold energy in the vacuum pump is improved.
Description
Technical Field
The application relates to the technical field of vacuum pumps, in particular to a pump body heating control system and a pump body heating control method.
Background
In the prior art, in order to avoid that the condensation of the gas in the vacuum pump affects the use of the vacuum pump, the vacuum pump is usually required to be properly heated during the operation of the vacuum pump. At present, heating control is generally performed according to a difference between a pump body temperature measured in real time and a unified preset temperature value. However, since the gas in the vacuum pump may be doped with impurities and the gas state may be different, such a heating control manner cannot obtain a good effect of preventing gas condensation.
Disclosure of Invention
The application aims to provide a pump body heating control system and a pump body heating control method, which are used for solving the problem that a pump body heating control mode in the prior art cannot achieve a good gas condensation prevention effect.
The application provides a pump body heating control system, comprising: a heating module; the temperature acquisition module is used for acquiring the temperature of the vacuum pump; the environment information acquisition module is used for acquiring environment information in the vacuum pump; the control module is connected with the temperature acquisition module, the environment information acquisition module and the heating module and is used for controlling the heating module to heat the pump body of the vacuum pump based on the temperature acquired by the temperature acquisition module and the environment information acquired by the environment information acquisition module.
According to the application, the environmental information acquisition module is additionally arranged in the pump body heating control system, and the control module controls the heating module to heat the vacuum pump based on the acquisition results of the temperature acquisition module and the environmental information acquisition module, so that the heating control can be more specific, and the effect of preventing gas cold energy in the vacuum pump can be improved.
In one embodiment, the environmental information collection module includes at least one of a gas type sensor, a gas flow sensor, and a pressure sensor.
Because the environmental information acquisition module comprises at least one of the gas type sensor, the gas flow sensor and the pressure sensor, the gas composition, the gas flow or the gas pressure in the vacuum pump are taken into consideration at least when the pump body is heated and controlled, so that the heating control can be more targeted to a certain extent, and the effect of preventing the cold energy of the gas in the vacuum pump is improved.
In an embodiment, the environmental information acquisition module includes a gas type sensor, a gas flow sensor and a pressure sensor, the pump body heating control system further includes an analog signal acquisition module, the analog signal acquisition module is connected between the pressure sensor, the gas flow sensor, the temperature acquisition module and the control module, and the gas type sensor is connected with the control module.
According to the application, the environment information acquisition module comprises the gas type sensor, the gas flow sensor and the pressure sensor, so that the heating control can be more targeted, and the effect of preventing the cold energy of the gas in the vacuum pump is further improved. The physical quantity collected by the pressure sensor, the gas flow sensor and the temperature collection module can be converted into the physical quantity which can be identified and processed by the control module through the arrangement of the analog signal collection module. The gas type sensor is connected with the control module and can directly transmit the detection result to the control module.
In an embodiment, the temperature acquisition module includes a plurality of pump body temperature sensors and a tail row temperature sensor, pump body temperature sensor is used for dispersedly setting up on the pump body of vacuum pump, and all with analog signal acquisition module connects, tail row temperature sensor is used for setting up on the blast pipe of vacuum pump, and with analog signal acquisition module connects.
According to the application, the temperature acquisition module comprises a plurality of pump body temperature sensors and a tail row temperature sensor, so that more accurate pump body temperature can be acquired, and the accuracy of pump body heating control can be improved.
In an embodiment, the pump body temperature sensor and the tail row temperature sensor are PT100 temperature sensors.
The pump body temperature sensor and the tail row temperature sensor both adopt PT100 temperature sensors, on one hand, the platinum resistor has the characteristics of high precision, reliable performance, good stability and the like, and the linearity of the relation curve of the relative change rate of the resistance of the platinum resistor and the temperature is best, so that the accuracy of temperature measurement can be ensured; on the other hand, the influence of self-heating of the resistor on temperature measurement can be avoided, and the accuracy of temperature measurement is further ensured.
In an embodiment, the temperature acquisition module further comprises constant current source units, the constant current source units are in one-to-one correspondence with the pump body temperature sensors and the tail row temperature sensors, and each constant current source unit is connected between the corresponding pump body temperature sensor or tail row temperature sensor and the analog signal acquisition module.
In one embodiment, the output current of the constant current source unit is between 0.5mA and 2 mA.
According to the application, the output current of the constant current source unit is set to be between 0.5mA and 2mA, so that on one hand, the influence of spontaneous heating of the temperature sensor on temperature measurement is reduced, and on the other hand, the problem that the temperature sensor is easy to be interfered by noise due to low current can be avoided.
In an embodiment, the temperature acquisition module further includes signal conditioning units, the signal conditioning units are in one-to-one correspondence with the constant current source units, and each signal conditioning unit is connected between the corresponding constant current source unit and the analog signal acquisition module.
In an embodiment, the analog signal acquisition module includes an analog signal multiplexer and an analog signal acquisition unit, the analog signal multiplexer is connected between the signal conditioning unit and the analog signal acquisition unit, and the analog signal acquisition unit is further connected with the control module.
The application also provides a pump body heating control method, which comprises the following steps: acquiring current environmental information in a vacuum pump and current temperature of the vacuum pump, wherein the current environmental information comprises at least one of the type of gas currently introduced into the vacuum pump, the current pressure value in the vacuum pump and the gas flow in unit time in the vacuum pump; determining a target temperature corresponding to the current environmental information according to the current environmental information; and controlling the pump body heating of the vacuum pump based on the difference value of the current temperature and the target temperature.
The details of one or more embodiments of the application are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the application will be apparent from the description and drawings, and from the claims.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a block diagram of a pump body heating control system according to an embodiment of the present application.
Fig. 2 is a block diagram of the heating module of fig. 1.
Fig. 3 is a block diagram of a temperature acquisition module in the pump body heating control system of fig. 1.
Fig. 4 is a circuit diagram of a constant current source unit according to an embodiment of the present application.
Fig. 5 is a circuit connection diagram of the pump body temperature sensor (or the tail temperature sensor) and the constant current source unit and the signal conditioning unit in an embodiment of the application.
Fig. 6 is a block diagram of the analog signal acquisition module of fig. 1.
Fig. 7 is a block diagram illustrating a structure of the environmental information collection module of fig. 1.
Fig. 8 is a circuit diagram of a signal adjusting unit according to an embodiment of the application.
Fig. 9 is a flowchart of a pump body heating control method according to an embodiment of the application.
Icon: pump body heating control system-10; a heating module-11; a temperature acquisition module-13; an environmental information acquisition module-15; a control module-17; a heating plate-111; a heating block-113; a pump body temperature sensor-131; tail row temperature sensor-132; a constant current source unit-133; a signal conditioning unit-134; an analog signal acquisition module-12; an analog signal multiplexer-121; analog signal collector-122; a signal adjustment unit-151; and a man-machine interaction module-16.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
Referring to fig. 1, an embodiment of the present application provides a pump body heating control system 10 for controlling a heating process of a pump body of a vacuum pump. The pump body heating control system 10 may include a heating module 11, a temperature acquisition module 13, an environmental information acquisition module 15, and a control module 17.
The heating module 11 is used for being installed on the vacuum pump body so as to heat the vacuum pump body. Referring to fig. 2, the heating module 11 may include a heating plate 111 and a heating block 113. The number of the heating blocks 113 may be plural, and the plurality of heating blocks 113 may be all disposed on the heating plate 111. After the heating module 11 is mounted on the vacuum pump body, the heating block 113 may be located between the heating plate and the vacuum pump body.
The temperature acquisition module 13 is used for acquiring the temperature of the vacuum pump.
Referring to fig. 3, the temperature acquisition module 13 may include a plurality of pump body temperature sensors 131 and a tail row temperature sensor 132. At this time, in order to enable the data collected by the temperature collection module 13 to be recognized and used by the control module 17, the pump body heating control system 10 may further include an analog signal collection module 12. The analog signal acquisition module 12 may be connected between the pump body temperature sensor 131 and the tail row temperature sensor 132 and the control module 17.
The plurality of pump body temperature sensors 131 may be dispersedly disposed on the vacuum pump body, and the tail row temperature sensor 132 may be disposed on the vacuum pump exhaust pipe. So set up, can gather comparatively accurate vacuum pump temperature.
The temperature measuring range of the pump body temperature sensor 131 and the tail row temperature sensor 132 can be between 0 ℃ and 175 ℃, and the temperature measuring precision is between +/-1 ℃. Therefore, the temperature measurement requirement of the vacuum pump can be guaranteed.
The pump body temperature sensor 131 and the tail row temperature sensor 132 may each be a thermal resistance temperature sensor. Because the platinum resistor in the thermal resistor has the characteristics of high precision, reliable performance, good stability and the like, and the linear characteristic of the relation curve of the relative change rate of the resistance of the platinum resistor and the temperature is obvious, the platinum resistor can be selected as the sensitive element of the pump body temperature sensor 131 and the tail array circumference sensor 132 in order to ensure the accuracy of temperature measurement.
Illustratively, the pump body temperature sensor 131 and the tail row temperature sensor 132 may each employ a PT100 or PT1000 temperature sensor.
Further, in order to reduce the influence of the resistance self-heating on the temperature measurement, the pump body temperature sensor 131 and the tail row temperature sensor 132 may each employ a PT100 temperature sensor.
In the prior art, when a thermal resistor is connected to a temperature measuring circuit, various connection methods exist. Among them, the three-wire system connection method is common. However, after the thermal resistor is connected to the temperature measuring circuit by adopting the three-wire connection method, the contact resistance of the adjustable resistor may be connected with the resistance of the bridge arm, so that the zero point of the bridge is unstable. To avoid this problem, the embodiment of the application uses a four-wire connection method to connect the thermal resistor to the temperature measuring circuit.
In an embodiment, the temperature acquisition module 13 may further include a constant current source unit 133. The constant current source units 133 are in one-to-one correspondence with the pump body temperature sensors 131 and the tail row temperature sensors 132. Each constant current source unit 133 is connected between the pump body temperature sensor 131 or the tail row temperature sensor 132 corresponding thereto and the analog signal acquisition module 12.
Since the self-heating effect of the thermal resistor has a negative effect on the temperature measurement, it is necessary to ensure that the current flowing through the thermal resistor is as small as possible in order to reduce the effect, however, if the current is too small, the temperature measurement is easily disturbed by noise, and in order to avoid the above-mentioned problems, the output current of the constant current source unit 133 in the present application is between 0.5mA and 2mA, for example, 1mA.
The constant current source unit 133 may be a constant current source formed by the constant voltage source chip TL431 using current negative feedback conversion, for example, and a circuit diagram thereof may be as shown in fig. 4. The accuracy of the constant current source unit 133 is about 0.4%. The operational amplifier U4 in the constant current source unit 133 is used to improve the load capacity of the current source. The resistors R2, R3, R9, and R10 in the constant current source unit 133 may be resistors with 0.1% accuracy.
In an embodiment, the temperature acquisition module 13 may further include a signal conditioning unit 134. The signal conditioning units 134 are in one-to-one correspondence with the constant current source units 133. Each signal conditioning unit 134 is connected between its corresponding constant current source unit 133 and the analog signal acquisition module 12.
Referring to fig. 5, illustratively, the output of the two constant current source units 133 (in which reference numerals of the respective elements of the two constant current source units 133 are distinguished, and the circuit structures of the two constant current source units 133 are substantially the same) may be used as a differential input of an instrument amplifier of the signal conditioning unit 134 to construct a subtracting circuit, thereby extracting the voltage when the pump body temperature sensor 131 (or the tail row temperature sensor 132) is changed in the range of 0-175 ℃. Fig. 5 shows the connection relationship of the pump body temperature sensor 131 (or the tail row temperature sensor 132) with the constant current source unit 133 and the signal conditioning unit 134.
Referring to fig. 6, in one embodiment, the analog signal acquisition module 12 includes an analog signal multiplexer 121 and an analog signal acquirer 122. The analog signal multiplexer 121 is connected between the signal conditioning unit 134 and the analog signal collector 122, and the analog signal collector 122 is also connected with the control module 17.
The environmental information collection module 15 is used for collecting environmental information in the vacuum pump.
The environmental information collection module 15 may be disposed within a vacuum pump.
The environmental information collection module 15 may include at least one of a gas type sensor, a gas flow sensor, and a pressure sensor. Therefore, when the pump body heating control is performed, at least the gas composition, the gas flow rate or the gas pressure in the vacuum pump is taken into consideration, so that the heating control can be more targeted to a certain extent, and the effect of preventing the gas cold energy in the vacuum pump is improved.
Compared with a voltage type sensor with an output signal of voltage, a current type sensor with an output signal of current has stronger anti-interference capability in the signal transmission process, so that the gas flow sensor and the pressure sensor can be both current type sensors. Further, the gas flow sensor and the pressure sensor can be selected from current type sensors with output current of 4mA-20 mA.
Referring to fig. 7, in one embodiment, the environmental information collection module 15 may include a gas type sensor, a gas flow sensor, and a pressure sensor. The analog signal acquisition module 12 may also be connected between the pressure sensor and the gas flow sensor and the control module 17. Specifically, an analog multiplexer 121 is connected between the pressure sensor and the gas flow sensor and an analog signal collector 122. The gas type sensor is connected to the control module 17. Illustratively, the gas type sensor may communicate the detected different types of gases to the control module 17 via an I2C bus interface. The control module 17 recognizes the gas type according to a predetermined communication protocol.
Further, the environmental information collection module 15 may further include a signal adjustment unit 151. The signal adjustment unit 151 is disposed in one-to-one correspondence with the pressure sensor and the gas flow sensor, and is connected between the corresponding sensor and the analog multiplexer 121 of the analog signal acquisition module 12. For example, the circuit structure of the signal adjustment unit 151 may be as shown IN fig. 8, IN which an output signal of the pressure sensor (or gas flow sensor) is input into the signal adjustment unit 151 through an ANA IN port, and the signal adjustment unit 151 outputs the adjusted signal through an ANA OUT port.
The control module 17 is connected with the temperature acquisition module 13, the environmental information acquisition module 15 and the heating module 11, and is used for controlling the heating module 11 to heat the pump body of the vacuum pump based on the temperature acquired by the temperature acquisition module 13 and the environmental information acquired by the environmental information acquisition module 15.
Referring again to FIG. 1, it is to be appreciated that the pump body heating control system 10 may also include a human-machine interaction module 16. The man-machine interaction module 16 is connected with the control module 17. The man-machine interaction module 16 may include a display unit and an input unit. The user can acquire the temperature information acquired by the temperature acquisition module 13 and the environmental information acquired by the environmental information acquisition module through the display unit of the man-machine interaction module 16, and can set the upper temperature limit and other information of each temperature sensor in the temperature acquisition module 13 through the input unit of the man-machine interaction module 16.
According to the embodiment of the application, the environmental information acquisition module is additionally arranged in the pump body heating control system, and the control module controls the heating module to heat the vacuum pump based on the acquisition results of the temperature acquisition module and the environmental information acquisition module, so that the heating control can be more targeted, and the effect of preventing gas cold energy in the vacuum pump can be improved.
Referring to fig. 9, based on the same inventive concept, the embodiment of the application further provides a pump body heating control method. The method may be applied to the control module 17 in the pump body heating control system 10 described previously.
In one embodiment, the method may include the following steps.
Step S11, current environmental information in the vacuum pump and the current temperature of the vacuum pump are obtained, wherein the current environmental information comprises at least one of the type of the currently introduced gas in the vacuum pump, the current pressure value in the vacuum pump and the gas flow in the vacuum pump in unit time.
Specifically, the control module 17 may obtain current environmental information within the vacuum pump from the environmental information collection module 15 and the current temperature of the vacuum pump from the temperature collection module 13.
Step S12, determining a target temperature corresponding to the current environment information according to the current environment information.
In one embodiment, step S12 may include: and searching the target temperature corresponding to the current environmental information from a preset corresponding relation table according to the current environmental information. It should be noted that, the preset correspondence table may record the correspondence between various environmental information and the regulation temperature, for example, the correspondence between the type of the gas in the vacuum pump and the regulation temperature, the correspondence between the pressure and the regulation temperature, and the correspondence between the flow rate of the gas and the regulation temperature; or, the corresponding relation between the type of the gas and the pressure in the vacuum pump and the regulation temperature, the corresponding relation between the type of the gas and the flow of the gas in the vacuum pump and the regulation temperature, and the corresponding relation between the pressure in the vacuum pump and the flow of the gas and the regulation temperature are recorded; or, the corresponding relation between the type, pressure and flow of the gas in the vacuum pump and the regulation temperature is recorded; alternatively, all the correspondence relationships outlined above are recorded. The regulation temperature corresponding to each environmental information is the temperature required for obtaining the best gas condensation prevention effect in the environment corresponding to the environmental information.
And step S13, controlling the pump body heating of the vacuum pump based on the difference between the current temperature and the target temperature.
In one embodiment, step S13 may include: when the current temperature is lower than the target temperature, starting the pump body to heat; and stopping heating the pump body when the temperature reaches the target temperature. Specifically, when the current temperature is lower than the target temperature, the heating module 11 is started to heat the pump body of the vacuum pump; when the temperature reaches the target temperature, the control heating module 11 stops heating the pump body of the vacuum pump.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. A pump body heating control system, comprising:
a heating module;
the temperature acquisition module is used for acquiring the temperature of the vacuum pump;
the environment information acquisition module is used for acquiring environment information in the vacuum pump;
the control module is connected with the temperature acquisition module, the environment information acquisition module and the heating module and is used for controlling the heating module to heat the pump body of the vacuum pump based on the temperature acquired by the temperature acquisition module and the environment information acquired by the environment information acquisition module.
2. The pump body heating control system of claim 1, wherein the environmental information collection module comprises at least one of a gas type sensor, a gas flow sensor, and a pressure sensor.
3. The pump body heating control system of claim 2, wherein the environmental information acquisition module comprises a gas type sensor, a gas flow sensor, and a pressure sensor, the pump body heating control system further comprises an analog signal acquisition module connected between the pressure sensor, the gas flow sensor, and the temperature acquisition module and the control module, and the gas type sensor is connected with the control module.
4. The pump body heating control system of claim 3, wherein the temperature acquisition module comprises a plurality of pump body temperature sensors and a tail row temperature sensor, wherein the pump body temperature sensors are used for being arranged on a pump body of the vacuum pump in a dispersed manner and are all connected with the analog signal acquisition module, and the tail row temperature sensor is used for being arranged on an exhaust pipe of the vacuum pump and is connected with the analog signal acquisition module.
5. The pump body heating control system of claim 4, wherein the pump body temperature sensor and the tail row temperature sensor are both PT100 temperature sensors.
6. The pump body heating control system of claim 4, wherein the temperature acquisition module further comprises constant current source units, the constant current source units are in one-to-one correspondence with the pump body temperature sensors and the tail row temperature sensors, and each constant current source unit is connected between the corresponding pump body temperature sensor or tail row temperature sensor and the analog signal acquisition module.
7. The pump body heating control system according to claim 6, wherein the output current of the constant current source unit is between 0.5mA and 2 mA.
8. The pump body heating control system of claim 6, wherein the temperature acquisition module further comprises signal conditioning units, the signal conditioning units are in one-to-one correspondence with the constant current source units, and each signal conditioning unit is connected between the corresponding constant current source unit and the analog signal acquisition module.
9. The pump body heating control system of claim 8, wherein the analog signal acquisition module comprises an analog signal multiplexer and an analog signal acquisition, the analog signal multiplexer being connected between the signal conditioning unit and the analog signal acquisition, the analog signal acquisition being further connected with the control module.
10. A pump body heating control method, characterized by comprising:
acquiring current environmental information in a vacuum pump and current temperature of the vacuum pump, wherein the current environmental information comprises at least one of the type of gas currently introduced into the vacuum pump, the current pressure value in the vacuum pump and the gas flow in unit time in the vacuum pump;
determining a target temperature corresponding to the current environmental information according to the current environmental information;
and controlling the pump body heating of the vacuum pump based on the difference value of the current temperature and the target temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310390646.4A CN116591934A (en) | 2023-04-13 | 2023-04-13 | Pump body heating control system and pump body heating control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310390646.4A CN116591934A (en) | 2023-04-13 | 2023-04-13 | Pump body heating control system and pump body heating control method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116591934A true CN116591934A (en) | 2023-08-15 |
Family
ID=87594515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310390646.4A Pending CN116591934A (en) | 2023-04-13 | 2023-04-13 | Pump body heating control system and pump body heating control method |
Country Status (1)
| Country | Link |
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| CN (1) | CN116591934A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4904155A (en) * | 1987-07-15 | 1990-02-27 | Hitachi, Ltd. | Vacuum pump |
| DE4220015A1 (en) * | 1992-06-19 | 1993-12-23 | Leybold Ag | Gas friction vacuum pump with high vacuum section and pre-vacuum section - has cooling system for high vacuum section and pump is equipped with heater at its pre-vacuum section |
| US20020090309A1 (en) * | 2000-11-22 | 2002-07-11 | Yoshihiro Yamashita | Vacuum pump |
| CN209368165U (en) * | 2018-12-20 | 2019-09-10 | 长垣县源宏包装新材料有限公司 | A kind of polycondensation vessel anti-clogging vacuum evacuation device |
-
2023
- 2023-04-13 CN CN202310390646.4A patent/CN116591934A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4904155A (en) * | 1987-07-15 | 1990-02-27 | Hitachi, Ltd. | Vacuum pump |
| DE4220015A1 (en) * | 1992-06-19 | 1993-12-23 | Leybold Ag | Gas friction vacuum pump with high vacuum section and pre-vacuum section - has cooling system for high vacuum section and pump is equipped with heater at its pre-vacuum section |
| US20020090309A1 (en) * | 2000-11-22 | 2002-07-11 | Yoshihiro Yamashita | Vacuum pump |
| CN209368165U (en) * | 2018-12-20 | 2019-09-10 | 长垣县源宏包装新材料有限公司 | A kind of polycondensation vessel anti-clogging vacuum evacuation device |
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