CN116576999A

CN116576999A - Resistance strain type six-dimensional force sensor based on shear strain detection

Info

Publication number: CN116576999A
Application number: CN202310615479.9A
Authority: CN
Inventors: 宋逸; 钟似辉; 文亚; 王芳楠; 吴化平
Original assignee: Zhejiang University of Technology ZJUT
Current assignee: Zhejiang University of Technology ZJUT
Priority date: 2023-05-29
Filing date: 2023-05-29
Publication date: 2023-08-11

Abstract

The invention discloses a resistance strain type six-dimensional force sensor based on shear strain detection. The sensor comprises a sensor platform and a resistance strain gauge, wherein the resistance strain gauge is arranged on the sensor platform, the sensor platform is arranged at a fixed position, and the bearing plate is arranged on the sensor platform; every two resistance strain gauges are connected in series to form a Wheatstone full bridge, the Wheatstone full bridge is electrically connected with a voltage measuring end and a direct current power supply, and the voltage measuring end is sequentially and electrically connected with an amplifying circuit, a data collector and a PC terminal. The resistance strain gauge of the sensor can detect the shear strain of each beam after being loaded, and the corresponding load detection can be realized after the resistance strain gauge is connected into a Wheatstone bridge. The sensor has the advantages of small volume, simple structure, small dead weight influence, low sensitivity to the position of the patch, high sensitivity, capability of accurately testing the force/moment in the directions of X, Y, Z and capability of being used for industrial measurement.

Description

Resistance strain type six-dimensional force sensor based on shear strain detection

Technical Field

The invention relates to a force sensor, in particular to a resistance strain type six-dimensional force sensor based on shear strain detection.

Background

Multidimensional force sensor technology plays an important role in human production and life. For example, the technology can provide bionic mechanical data in the aspects of a motion mechanism, gait and the like, and can be used in the fields of automatic control, manipulators, robots, automatic assembly equipment and the like. Various types of multidimensional force sensors have been developed by researchers at home and abroad.

The Waston six-dimensional wrist force sensor is of an upper, middle and lower 3-layer structure, and consists of three vertical strain beams and an upper rim and a lower rim, wherein the three vertical beams are arranged on the rims according to 120 degrees. A six-dimensional force sensor of a plane cross beam structure is adopted, six-dimensional force and moment acting on the sensor are obtained through bending strain of a beam, the sensor has high sensitivity, no radial effect and easy calibration, but the overload resistance in the vertical direction is poor, and the dynamic performance is difficult to improve. A capacitive six-dimensional force sensor, both 3-dimensional force and 3-dimensional moment, can be indicated by a change in its capacitance value. A piezoelectric six-dimensional force sensor is composed of 8 sealed sensitive elements and has wider dynamic range. An optical six-dimensional force sensor adopts a 6-beam structure, wherein four-type optical sensors are arranged on three beams, 3 light sources are respectively shot to the 3 optical sensors at the center positions of the beams, and micro deformation is measured through the optical sensors, so that six-dimensional force is measured. The six-dimensional force measuring system has the advantages that the elastic body adopts the integral structure of the 8 vertical beams, and can directly obtain six-dimensional force signals by combining a specific patch mode, so that the rigidity of the elastic body is improved, hysteresis is reduced, and the practicability is greatly improved. The sensor eliminates coupling in principle, simplifies post-processing of signals and has good real-time performance.

The basic principle of the resistance strain type six-dimensional force sensor is that under the action of external force, an elastic body is mechanically deformed, a strain gauge stuck on the elastic body generates corresponding strain to cause resistance value change, and then the resistance value change is converted into voltage or current output through an electric bridge. And has the advantages of structure, measuring range, cost, sensitivity and dynamic performance.

The existing resistive strain type six-dimensional force sensor is mostly realized based on positive strain measurement, but in most cases, the gradient of the positive strain in a patch area is large, so that the deviation of the patch position is greatly affected. The shear strain can be kept almost uniformly distributed in a larger range through structural design, so that the dependence on the patch position is reduced.

Disclosure of Invention

In order to solve the problems in the background art, the invention provides a resistance strain type six-dimensional force sensor based on shear strain detection.

The technical scheme adopted by the invention is as follows:

the resistance strain type six-dimensional force sensor based on shear strain detection comprises a sensor platform and twelve resistance strain gauges, wherein each resistance strain gauge is arranged on the sensor platform, the sensor platform is arranged at a fixed position, and a bearing plate is arranged on the sensor platform; every two resistance strain gauges are connected in series to form a Wheatstone full bridge, each Wheatstone full bridge is electrically connected with a respective voltage measuring end and a direct current power supply, and each voltage measuring end is sequentially and electrically connected with an amplifying circuit, a data collector and a PC terminal.

The sensor platform is formed by an I-beam, a loading boss and a fixed platform in an integral mode, the fixed platform is of a square platy axisymmetric structure, a square through groove perpendicular to the center of the square side face of the fixed platform is formed in the center of the square side face of the fixed platform, and four groove faces of the square through groove are respectively parallel to four outer side faces of the fixed platform; the loading lug boss is positioned at the center of the square through groove, the loading lug boss is in a regular quadrangular shape, four outer side surfaces of the loading lug boss are respectively connected to four groove surfaces of the square through groove through the I-beam, the four outer side surfaces of the loading lug boss are respectively parallel to the groove surfaces of the square through groove which are respectively opposite to each other, and twelve resistance strain gauges are arranged on the I-beam; the center of loading boss has offered the square centre screw hole that link up that is on a parallel with the groove face of square logical groove of length, and the symmetry position department of four angles of fixed platform has offered the screw hole that link up that is on a parallel with centre screw hole, and one side square face of sensor platform passes through screw hole and four bolts to be installed in fixed position department, and the loading board passes through centre screw hole and a bolt to be installed and is kept away from a side of fixed position department at loading boss.

The I-beam is respectively positioned between the four outer side surfaces of the loading boss and the groove surfaces of the square through grooves of the fixed platforms which are opposite to each other, two parallel side plates of the I-beam are perpendicular to the groove surfaces of the square through grooves which are connected with each other and parallel to the length direction of the central threaded hole, and the middle plate of the I-beam is perpendicular to the groove surfaces of the square through grooves which are connected with each other and perpendicular to the length direction of the central threaded hole; the first I-beam is located between the first threaded hole and the second threaded hole, the second I-beam is located between the second threaded hole and the third threaded hole, the third I-beam is located between the third threaded hole and the fourth threaded hole, the fourth I-beam is located between the first threaded hole and the fourth threaded hole of the fourth I-beam Liang Weiyu, and three resistance strain gauges are respectively installed on the I-beam.

The square surface on one side of the loading boss is positioned outside the square through groove of the fixed platform, a space is reserved between the square surface on one side of the loading boss and the square surface on one side of the loading boss, which is close to the loading boss, and the end surface of the I-beam, which is close to the notch on one side of the square through groove, is flush with the square surface on one side of the loading boss; the square surface on the other side of the loading boss is positioned outside the square through groove of the loading boss, a space is reserved between the square surface on the other side of the loading boss and the square surface on the other side of the loading boss, which is close to the loading boss, and the end surface of the I-beam, which is close to the square surface on the other side of the loading boss, is flush with the square surface on the other side of the loading boss; one side square of the loading boss is provided with a bearing plate through a central threaded hole and one bolt, and the other side square surface of the fixing platform is arranged at a fixing position through the threaded hole and four bolts.

The first resistance strain gauge, the fifth resistance strain gauge and the tenth resistance strain gauge are arranged on the first I-beam, the first resistance strain gauge and the fifth resistance strain gauge are arranged on one side surface, close to the bearing plate, of the middle plate of the first I-beam, and the tenth resistance strain gauge is arranged on one side surface, close to the first threaded hole, of one side plate of the two side plates of the first I-beam; the third resistance strain gauge, the eighth resistance strain gauge and the twelfth resistance strain gauge are arranged on the second I-beam, the third resistance strain gauge is arranged on one side surface, close to the bearing plate, of the middle plate of the second I-beam, and the eighth resistance strain gauge and the twelfth resistance strain gauge are arranged on one side surface, close to the second threaded hole, of one of two side plates of the second I-beam; the second resistance strain gauge, the sixth resistance strain gauge and the ninth resistance strain gauge are arranged on the third I-beam, the second resistance strain gauge and the sixth resistance strain gauge are respectively arranged on one side surface of the middle plate of the third I-beam, which is far away from and close to the bearing plate, and the ninth resistance strain gauge is arranged on one side surface of one of two side plates of the third I-beam, which is close to the third threaded hole; the fourth resistance strain gauge, the seventh resistance strain gauge and the eleventh resistance strain gauge are arranged on the fourth I-beam, the fourth resistance strain gauge is arranged on one side surface, close to the bearing plate, of the middle plate of the fourth I-beam, the seventh resistance strain gauge is arranged on one side surface, close to the fourth threaded hole, of one of two side plates of the fourth I-beam, and the eleventh resistance strain gauge is arranged on one side surface, close to the first threaded hole, of the other side plate of the two side plates of the fourth I-beam.

The first resistance strain gauge, the second resistance strain gauge, the third resistance strain gauge, the fourth resistance strain gauge, the fifth resistance strain gauge, the sixth resistance strain gauge, the seventh resistance strain gauge, the eighth resistance strain gauge, the ninth resistance strain gauge, the tenth resistance strain gauge, the eleventh resistance strain gauge and the twelfth resistance strain gauge are respectively connected in series to form a Wheatstone full bridge.

The sensor platform takes the connecting line direction of the center of the first threaded hole and the center of the second threaded hole as the X-axis positive direction, takes the connecting line direction of the center of the second threaded hole and the center of the third threaded hole as the Y-axis positive direction, and takes the straight line direction from the square surface of the other side of the loading boss to the square surface of one side as the Z-axis positive direction; each resistance strain gauge comprises two strain gauges connected in series, wherein one ends of the two strain gauges are close to each other and form 90 degrees.

The first resistance strain gauge comprises a first strain gauge R1 and a second strain gauge R2, the fifth resistance strain gauge comprises a ninth strain gauge R9 and a tenth strain gauge R10, the tenth resistance strain gauge comprises a nineteenth strain gauge R19 and a twentieth strain gauge R20, and the first strain gauge R1, the second strain gauge R2, the ninth strain gauge R9 and the tenth strain gauge R10 are attached to the center of one side face of the middle plate of the first I-beam, which faces the positive direction of the Z axis, and are distributed in a cross shape symmetrical to the X axis and the Y axis; the nineteenth strain gauge R19 and the twentieth strain gauge R20 are symmetrical to the plane where the middle plate of the first i-beam is located and the intersection point between the two is located at the center of one of the two side plates of the first i-beam, and the 90 ° openings of the nineteenth strain gauge R19 and the twentieth strain gauge R20 face the loading boss.

The third resistance strain gauge includes a fifth strain gauge R5 and a sixth strain gauge R6, the eighth resistance strain gauge includes a fifteenth strain gauge R15 and a sixteenth strain gauge R16, the twelfth resistance strain gauge includes a twenty-third strain gauge R23 and a twenty-fourth strain gauge R24, the fifth strain gauge R5 and the sixth strain gauge R6 are attached to one side of the middle plate of the second i-beam toward the Z-axis forward direction and an intersection point between the two is located at the center of the middle plate of the second i-beam, the fifth strain gauge R5 and the sixth strain gauge R6 are symmetrical to the X-axis and the 90 ° opening is oriented to the loading boss, and the fifteenth strain gauge R15, the sixteenth strain gauge R16, the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24 are attached to the center of one of the two side plates of the second i-beam and are distributed symmetrically to the cross of the X-axis and the Z-axis.

The second resistance strain gauge comprises a third strain gauge R3 and a fourth strain gauge R4, the sixth resistance strain gauge comprises an eleventh strain gauge R11 and a twelfth strain gauge R12, the ninth resistance strain gauge comprises a seventeenth strain gauge R17 and an eighteenth strain gauge R18, the eleventh strain gauge R11 and the twelfth strain gauge R12 are attached to one side face of the middle plate of the third i-beam, which faces the positive direction of the Z-axis, and an intersection point between the eleventh strain gauge R11 and the twelfth strain gauge R12 is located at the center of the middle plate of the third i-beam, the eleventh strain gauge R11 and the twelfth strain gauge R12 are symmetrical to the Y-axis and the 90 ° opening faces the loading boss, the third strain gauge R3 and the fourth strain gauge R4 are attached to one side face of the middle plate of the third i-beam, which faces the negative direction of the Z-axis, and an intersection point between the eleventh strain gauge R11 and the twelfth strain gauge R12 are located at the center of the middle plate of the third i-beam, and the second resistance strain gauge and the sixth resistance gauge are symmetrical to the middle plate of the third i-beam; the seventeenth strain gauge R17 and the eighteenth strain gauge R18 are symmetrical to the plane where the middle plate of the third i-beam is located, and the intersection point between the seventeenth strain gauge R17 and the eighteenth strain gauge R18 is located at the center of one of the two side plates of the third i-beam, and the 90 ° opening of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 faces the loading boss.

The fourth resistance strain gauge comprises a seventh strain gauge R7 and an eighth strain gauge R8, the seventh resistance strain gauge comprises a thirteenth strain gauge R13 and a fourteenth strain gauge R14, the eleventh resistance strain gauge comprises a twenty-first strain gauge R21 and a twenty-second strain gauge R22, the seventh strain gauge R7 and the eighth strain gauge R8 are attached to one side face of the middle plate of the fourth I-beam, which faces the negative direction of the Z axis, and the intersection point between the seventh strain gauge R7 and the eighth strain gauge R8 is positioned at the center of the middle plate of the fourth I-beam, the seventh strain gauge R7 and the eighth strain gauge R8 are symmetrical to the X axis, and the 90-degree opening faces the opposite direction of the loading boss; the thirteenth strain gauge R13 and the fourteenth strain gauge R14 are symmetrical to the plane where the middle plate of the fourth I-beam is located, and the intersection point between the thirteenth strain gauge R13 and the fourteenth strain gauge R14 is located at the center of one of the two side plates of the fourth I-beam, and the 90-degree openings of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 face the loading boss; the first twenty-first strain gauge R21 and the twenty-second strain gauge R22 are symmetrical to the plane where the middle plate of the fourth I-beam is located, and the intersection point between the first and the twenty-second strain gauges R21 and R22 is located at the center of the other one of the two side plates of the fourth I-beam, and the 90-degree opening of the first twenty-first strain gauge R21 and the twenty-second strain gauge R22 faces the loading boss.

The first strain gauge R1, the second strain gauge R2, the third strain gauge R3 and the fourth strain gauge R4 are sequentially connected in series to form a first Wheatstone full bridge for measuring X-direction force Fx of the resistance strain six-dimensional force sensor, one end of a voltage measuring end Ui is connected between the first strain gauge R1 and the second strain gauge R2, and the other end of the voltage measuring end Ui is connected between the third strain gauge R3 and the fourth strain gauge R4; one end of the direct current power supply U is connected between the first strain gauge R1 and the fourth strain gauge R4, and the other end of the direct current power supply U is connected between the second strain gauge R2 and the third strain gauge R3.

The fifth strain gauge R5, the sixth strain gauge R6, the seventh strain gauge R7 and the eighth strain gauge R8 are sequentially connected in series to form a second Wheatstone full bridge for measuring Y-direction force Fy of the resistance strain six-dimensional force sensor, one end of a voltage measuring end Ui is connected between the fifth strain gauge R5 and the sixth strain gauge R6, and the other end of the voltage measuring end Ui is connected between the seventh strain gauge R7 and the eighth strain gauge R8; one end of the direct current power supply U is connected between the fifth strain gauge R5 and the eighth strain gauge R8, and the other end of the direct current power supply U is connected between the sixth strain gauge R6 and the seventh strain gauge R7.

The ninth strain gauge R9, the tenth strain gauge R10, the eleventh strain gauge R11 and the twelfth strain gauge R12 are sequentially connected in series to form a third Wheatstone full bridge for measuring the Z-direction moment Mz of the resistance strain type ten-dimensional force sensor, one end of the voltage measuring end Ui is connected between the ninth strain gauge R9 and the tenth strain gauge R10, and the other end of the voltage measuring end Ui is connected between the eleventh strain gauge R11 and the twelfth strain gauge R12; the direct current power supply U has one end connected between the ninth strain gauge R9 and the twelfth strain gauge R12, and the other end connected between the tenth strain gauge R10 and the eleventh strain gauge R11.

The thirteenth strain gauge R13, the fourteenth strain gauge R14, the fifteenth strain gauge R15 and the sixteenth strain gauge R16 are sequentially connected in series to form a fourth Wheatstone full bridge for measuring the X-direction moment Mx of the resistance strain type ten-dimensional force sensor, one end of the voltage measuring end Ui is connected between the thirteenth strain gauge R13 and the fourteenth strain gauge R14, and the other end of the voltage measuring end Ui is connected between the fifteenth strain gauge R15 and the sixteenth strain gauge R16; one end of the direct current power supply U is connected between the thirteenth strain gauge R13 and the sixteenth strain gauge R16, and the other end of the direct current power supply U is connected between the fourteenth strain gauge R14 and the fifteenth strain gauge R15.

The seventeenth strain gauge R17, the eighteenth strain gauge R18, the nineteenth strain gauge R19 and the twentieth strain gauge R20 are sequentially connected in series to form a fifth Wheatstone full bridge for measuring the Y-direction moment My of the resistance strain type ten-dimensional force sensor, one end of the voltage measuring end Ui is connected between the seventeenth strain gauge R17 and the eighteenth strain gauge R18, and the other end of the voltage measuring end Ui is connected between the nineteenth strain gauge R19 and the twentieth strain gauge R20; the direct current power supply U has one end connected between the seventeenth strain gauge R17 and the twentieth strain gauge R20 and the other end connected between the eighteenth strain gauge R18 and the nineteenth strain gauge R19.

The twenty-first strain gauge R21, the twenty-second strain gauge R22, the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24 are sequentially connected in series to form a sixth Wheatstone full bridge for measuring the Z-direction force Fz of the resistance strain type ten-dimensional force sensor, one end of the voltage measuring end Ui is connected between the twenty-first strain gauge R21 and the twenty-second strain gauge R22, and the other end of the voltage measuring end Ui is connected between the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24; the direct current power supply U is connected between the twenty-second strain gauge R21 and the twenty-fourth strain gauge R24 at one end, and connected between the twenty-second strain gauge R22 and the twenty-third strain gauge R23 at the other end.

The detection method of the resistance strain type six-dimensional force sensor comprises the following steps:

step one: and applying forces with different loads on the bearing plate, obtaining the resistance change of each Wheatstone full bridge through each voltage measuring end Ui, converting the resistance change into voltage change, sequentially outputting the voltage change to an amplifying circuit, a data acquisition unit and a PC terminal, and obtaining a voltage-load relation curve by the PC terminal according to the relation between the load of each force and each output voltage change.

Step two: when the force bearing plate is subjected to force measurement, voltage change is obtained through the PC terminal, then the load to be measured is obtained according to the voltage-load relation curve, and finally the shear strain detection of the force is realized.

The beneficial effects of the invention are as follows:

the sensor has the advantages of small volume, simple structure, small dead weight influence, low sensitivity to the position of the patch, high sensitivity, capability of accurately testing the force/moment in the directions of X, Y, Z and capability of being used for industrial measurement.

Drawings

FIG. 1 is a perspective view of a resistance strain type six-dimensional force sensor of the present invention;

FIG. 2 is a top view of a resistive strain six-dimensional force sensor of the present invention;

FIG. 3 is a cross-sectional view of a resistance strain type six-dimensional force sensor of the present invention;

FIG. 4 is a top view of the strain gage distribution of the present invention;

FIG. 5 is a graph showing the distribution of strain gage R13-14 according to the present invention;

FIG. 6 is a graph showing the distribution of strain gages R15-16 and R21-24 according to the present invention;

FIG. 7 is a graph showing the distribution of strain gage R19-20 according to the present invention;

FIG. 8 is a graph showing the distribution of strain gage R17-18 according to the present invention;

FIG. 9 is a schematic diagram of a Wheatstone full bridge of strain gages in accordance with the present invention;

FIG. 10 is a diagram illustrating data transmission according to the present invention;

in the figure: 1. the device comprises a first threaded hole, 2, a first I-beam, 3, a second threaded hole, 4, a second I-beam, 5, a third threaded hole, 6, a third I-beam, 7, a fourth threaded hole, 8, a fourth I-beam, 9, a loading boss, 10, a central threaded hole, 11 and a fixed platform.

Detailed Description

The invention will be described in further detail with reference to the accompanying drawings and specific examples.

As shown in fig. 1, 2, 3 and 10, the resistance strain type six-dimensional force sensor based on shear strain detection comprises a sensor platform and twelve resistance strain gauges, wherein each resistance strain gauge is arranged on the sensor platform, the sensor platform is arranged at a fixed position, and a bearing plate is arranged on the sensor platform; every two resistance strain gauges are connected in series to form a Wheatstone full bridge, each Wheatstone full bridge is electrically connected with a respective voltage measuring end and a direct current power supply, and each voltage measuring end is sequentially and electrically connected with an amplifying circuit, a data collector and a PC terminal.

The sensor platform is formed by integrally forming I-beams 2, 4, 6 and 8, a loading boss 9 and a fixing platform 11, wherein the fixing platform 11 is of a square platy axisymmetric structure, a square through groove perpendicular to the sensor platform is formed in the center of a square side surface of the fixing platform 11, and four groove surfaces of the square through groove are respectively parallel to four outer side surfaces of the fixing platform 11; the loading boss 9 is positioned at the center of the square through groove, the loading boss 9 is in a regular quadrangular shape, four outer side surfaces of the loading boss 9 are respectively connected to four groove surfaces of the square through groove through I-beams 2, 4, 6 and 8, the four outer side surfaces of the loading boss 9 are respectively parallel to the groove surfaces of the square through groove which are respectively opposite, and twelve resistance strain gauges are arranged on the I-beams 2, 4, 6 and 8; the center of the loading boss 9 is provided with a through center threaded hole 10 with a length square and parallel to the groove surface of the square through groove, symmetrical positions of four corners of the fixing platform 11 are provided with through threaded holes 1, 3, 5 and 7 parallel to the center threaded hole 10, one side square surface of the sensor platform is arranged at a fixed position through the threaded holes 1, 3, 5 and 7 and four bolts, and the bearing plate is arranged on one side surface of the loading boss 9 far away from the fixed position through the center threaded hole 10 and one bolt.

The I-beams 2, 4, 6 and 8 are respectively positioned between the four outer side surfaces of the loading boss 9 and the groove surfaces of the square through grooves of the fixed platform 11 which are opposite to each other, two parallel two side plates of the I-beams 2, 4, 6 and 8 are perpendicular to the groove surfaces of the square through grooves which are connected with each other and parallel to the length direction of the central threaded hole 10, and the middle plates of the I-beams 2, 4, 6 and 8 are perpendicular to the groove surfaces of the square through grooves which are connected with each other and perpendicular to the length direction of the central threaded hole 10; the first I-beam 2 is located between the first threaded hole 1 and the second threaded hole 3, the second I-beam 4 is located between the second threaded hole 3 and the third threaded hole 5, the third I-beam 6 is located between the third threaded hole 5 and the fourth threaded hole 7, the fourth I-beam 8 is located between the first threaded hole 1 and the fourth threaded hole 7, and three resistance strain gauges are respectively installed on the I-beams 2, 4, 6 and 8.

The square surface on one side of the loading boss 9 is positioned outside the square through groove of the fixed platform 11, a space is reserved between the square surface on one side of the loading boss 9 and the square surface on one side of the loading boss 9 which is close to the loading boss, and the end surface of the I-beam 2, 4, 6 and 8, which is close to the notch on one side of the square through groove, is flush with the square surface on one side of the loading boss 9; the square surface on the other side of the loading boss 9 is positioned outside the square through groove of the loading boss 9, a space is reserved between the square surface on the other side of the loading boss 9 and the square surface on the other side of the loading boss 9 which is close to the loading boss 9, and the end surfaces of the I-beams 2, 4, 6 and 8 which are close to the square surface on the other side of the loading boss 9 are flush with the square surface on the other side of the loading boss 9; the loading platform 9 is provided with a bearing plate on one side in a square shape through a central threaded hole 10 and one bolt, and the other side square surface of the fixing platform 11 is arranged at a fixing position through threaded holes 1, 3, 5 and 7 and four bolts.

The first resistance strain gauge, the fifth resistance strain gauge and the tenth resistance strain gauge are arranged on the first I-beam 2, the first resistance strain gauge and the fifth resistance strain gauge are arranged on one side surface, close to the bearing plate, of the middle plate of the first I-beam 2, and the tenth resistance strain gauge is arranged on one side surface, close to the first threaded hole 1, of one side plate of two side plates of the first I-beam 2; the third resistance strain gauge, the eighth resistance strain gauge and the twelfth resistance strain gauge are mounted on the second I-beam 4, the third resistance strain gauge is mounted on one side surface of the middle plate of the second I-beam 4, which is close to the bearing plate, and the eighth resistance strain gauge and the twelfth resistance strain gauge are mounted on one side surface of one of two side plates of the second I-beam 4, which is close to the second threaded hole 3; the second resistance strain gauge, the sixth resistance strain gauge and the ninth resistance strain gauge are mounted on the third I-beam 6, the second resistance strain gauge and the sixth resistance strain gauge are respectively mounted on one side surface of the middle plate of the third I-beam 6, which is far away from and close to the bearing plate, and the ninth resistance strain gauge is mounted on one side surface of one of two side plates of the third I-beam 6, which is close to the third threaded hole 5; the fourth resistance strain gauge, the seventh resistance strain gauge and the eleventh resistance strain gauge are mounted on the fourth i-beam 8, the fourth resistance strain gauge is mounted on a side surface of the middle plate of the fourth i-beam 8, which is close to the bearing plate, the seventh resistance strain gauge is mounted on a side surface of one of the two side plates of the fourth i-beam 8, which is close to the fourth threaded hole 7, and the eleventh resistance strain gauge is mounted on a side surface of the other one of the two side plates of the fourth i-beam 8, which is close to the first threaded hole 1.

The sensor platform takes the connecting line direction of the center of the first threaded hole 1 and the center of the second threaded hole 3 as the X-axis positive direction, takes the connecting line direction of the center of the second threaded hole 3 and the center of the third threaded hole 5 as the Y-axis positive direction, and takes the straight line direction from the square surface of the other side of the loading boss 9 to the square surface of one side as the Z-axis positive direction; each resistance strain gauge comprises two strain gauges connected in series, wherein one ends of the two strain gauges are close to each other and form 90 degrees.

As shown in fig. 4, 5, 6, 7 and 8, the first resistance strain gauge includes a first strain gauge R1 and a second strain gauge R2, the fifth resistance strain gauge includes a ninth strain gauge R9 and a tenth strain gauge R10, the tenth resistance strain gauge includes a nineteenth strain gauge R19 and a twentieth strain gauge R20, and the first strain gauge R1, the second strain gauge R2, the ninth strain gauge R9 and the tenth strain gauge R10 are attached to the center of a side face of the intermediate plate of the first i-beam 2 facing the Z-axis forward direction and are distributed in a cross shape symmetrical to the X-axis and the Y-axis; the nineteenth strain gauge R19 and the twentieth strain gauge R20 are symmetrical to the plane in which the middle plate of the first i-beam 2 is located and the intersection point between the two is located at the center of one of the two side plates of the first i-beam 2, and the 90 ° openings of the nineteenth strain gauge R19 and the twentieth strain gauge R20 face the loading boss 9.

The third resistance strain gauge includes a fifth strain gauge R5 and a sixth strain gauge R6, the eighth resistance strain gauge includes a fifteenth strain gauge R15 and a sixteenth strain gauge R16, the twelfth resistance strain gauge includes a twenty-third strain gauge R23 and a twenty-fourth strain gauge R24, the fifth strain gauge R5 and the sixth strain gauge R6 are attached to one side of the middle plate of the second i-beam 4 facing the Z-axis and an intersection point between the two is located at the center of the middle plate of the second i-beam 4, the fifth strain gauge R5 and the sixth strain gauge R6 are symmetrical to the X-axis and open at 90 ° toward the loading boss 9, and the fifteenth strain gauge R15, the sixteenth strain gauge R16, the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24 are attached to the center of one of the two side plates of the second i-beam 4 and are distributed in a cross symmetrical manner to the X-axis and the Z-axis.

The second resistance strain gauge includes a third strain gauge R3 and a fourth strain gauge R4, the sixth resistance strain gauge includes an eleventh strain gauge R11 and a twelfth strain gauge R12, the ninth resistance strain gauge includes a seventeenth strain gauge R17 and an eighteenth strain gauge R18, the eleventh strain gauge R11 and the twelfth strain gauge R12 are attached to one side face of the intermediate plate of the third i-beam 6 toward the positive Z-axis and an intersection point between the both is located at the center of the intermediate plate of the third i-beam 6, the eleventh strain gauge R11 and the twelfth strain gauge R12 are symmetrical to the Y-axis and open at 90 ° toward the loading boss 9, the third strain gauge R3 and the fourth strain gauge R4 are attached to one side face of the intermediate plate of the third i-beam 6 toward the negative Z-axis and an intersection point between the both is located at the center of the intermediate plate of the third i-beam 6, and the second resistance strain gauge and the sixth resistance strain gauge are symmetrical to the intermediate plate of the third i-beam 6; the seventeenth strain gauge R17 and the eighteenth strain gauge R18 are symmetrical to the plane where the middle plate of the third i-beam 6 is located and the intersection point between the seventeenth strain gauge R17 and the eighteenth strain gauge R18 is located at the center of one of the two side plates of the third i-beam 6, and the 90 ° opening of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 faces the loading boss 9.

The fourth resistance strain gauge includes a seventh strain gauge R7 and an eighth strain gauge R8, the seventh resistance strain gauge includes a thirteenth strain gauge R13 and a fourteenth strain gauge R14, the eleventh resistance strain gauge includes a twenty-first strain gauge R21 and a twenty-second strain gauge R22, the seventh strain gauge R7 and the eighth strain gauge R8 are attached to one side face of the middle plate of the fourth i-beam 8, which faces the negative direction of the Z-axis, and an intersection point between the two is located at the center of the middle plate of the fourth i-beam 8, the seventh strain gauge R7 and the eighth strain gauge R8 are symmetrical to the X-axis and the 90 ° opening faces the opposite direction of the loading boss 9; the thirteenth strain gauge R13 and the fourteenth strain gauge R14 are symmetrical to the plane where the middle plate of the fourth I-beam 8 is located, and the intersection point between the thirteenth strain gauge R13 and the fourteenth strain gauge R14 is located at the center of one of the two side plates of the fourth I-beam 8, and the 90-degree openings of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 face the loading boss 9; the first and second strain gages R21 and R22 are symmetrical to the plane of the middle plate of the fourth i-beam 8, and the intersection point between the two is located at the center of the other one of the two side plates of the fourth i-beam 8, and the 90 ° openings of the first and second strain gages R21 and R22 face the loading boss 9.

As shown in fig. 9, the first strain gauge R1, the second strain gauge R2, the third strain gauge R3 and the fourth strain gauge R4 are sequentially connected in series to form a first wheatstone full bridge for measuring the X-direction force Fx of the resistive strain type six-dimensional force sensor, one end of the voltage measurement end Ui is connected between the first strain gauge R1 and the second strain gauge R2, and the other end of the voltage measurement end Ui is connected between the third strain gauge R3 and the fourth strain gauge R4; one end of the direct current power supply U is connected between the first strain gauge R1 and the fourth strain gauge R4, and the other end of the direct current power supply U is connected between the second strain gauge R2 and the third strain gauge R3.

As shown in fig. 3, the height of the loading boss 9 is 1mm greater than that of the fixed platform 11 so as to facilitate loading, a gap of 1mm is formed between the loading boss 9 and the bottom surface of the fixed platform 11 so as to realize mechanical deformation, and the gap between the loading boss 9 and the bottom surface of the fixed platform 11 can be adjusted so as to realize overload protection. The thickness of the horizontally placed transverse plates of the front I-beam 2, the rear I-beam 6, the left I-beam 8 and the right I-beam 4 is 1mm, and the thickness of the vertically placed wing plates is 1mm, so that the transverse plates mainly bear the shear load in the horizontal plane and the wing plates mainly bear the shear load in the vertical plane, the measurement of the shear strain is facilitated, in addition, the design can ensure that the shear strain distribution of each plate is uniform, and the sensitivity of the measurement result to the patch position can be effectively reduced. The front i-beam 2, the rear i-beam 6, the left i-beam 8 and the right i-beam 4 are arranged symmetrically in the thickness direction, and the arrangement is such that the shear strain distribution of the web is opposite up and down with the transverse plate as the axis under a specific deformation.

When the top of the loading boss 9 receives force in the X direction, the left I-beam 8 and the right I-beam 4 receive axial force, and shearing strain is not generated on the vertical plates; the front I-beam 2 and the rear I-beam 6 are subjected to shearing force and bending moment, certain shearing strain is generated on the vertical plate, but the I-beam is in a configuration that the shearing strain of the vertical plate is extremely small and the signs of the upper side and the lower side of the central layer are opposite; when the top of the loading boss 9 receives Y-direction force, the left I-beam 8 and the right I-beam 4 receive shearing force and bending moment, certain shearing strain is generated on the vertical plate, but the I-beam is in a configuration that the shearing strain of the vertical plate is extremely small and the signs of the upper side and the lower side of the central layer are opposite; the front I-beam 2 and the rear I-beam 6 are subjected to axial force, and shearing strain is not generated on the vertical plates; when the loading boss 9 receives force in the Z direction, the front I-beam 2, the rear I-beam 6, the left I-beam 8 and the right I-beam 4 are subjected to shearing force and bending moment, certain shearing strain is generated on the vertical plates, the shearing strain signs of the two vertical plates of the front I-beam 2 are the same, the shearing strain signs of the two vertical plates of the rear I-beam 6 are the same, the shearing strain signs of the two vertical plates of the left I-beam 8 are the same, the shearing strain signs of the two vertical plates of the right I-beam 4 are the same, but the shearing strain signs of the two vertical plates of the front I-beam 2 are opposite to the shearing strain signs of the two vertical plates of the rear I-beam 6, and the shearing strain signs of the two vertical plates of the left I-beam 8 are opposite to the shearing strain signs of the two vertical plates of the right I-beam 4; when the top of the loading boss 9 receives moment in the X direction, the front I-beam 2 and the rear I-beam 6, the left I-beam 8 and the right I-beam 4 receive the action of shearing force and bending moment, a certain degree of shearing strain is generated on the two vertical plates, the signs of the vertical plates on the left side and the right side of the front I-beam 2 are opposite, the signs of the vertical plates on the left side and the right side of the rear I-beam 6 are opposite, and the shearing strain signs of the two vertical plates of the left I-beam 8 are the same as the signs of the shearing strain on the two vertical plates of the right I-beam 4; when the top of the loading boss 9 receives moment in the Y direction, the front I-beam 2, the rear I-beam 6, the left I-beam 8 and the right I-beam 4 generate a certain degree of shear strain on the two vertical plates, the signs of the vertical plates on the left side and the right side of the left I-beam 8 are opposite, the signs of the vertical plates on the left side and the right side of the right I-beam 4 are opposite, and the shear strain signs of the two vertical plates of the front I-beam 2 are the same as the shear strain signs of the two vertical plates of the rear I-beam 6; when the top of the loading boss 9 receives moment in the Z direction, the front I-beam 2, the rear I-beam 6, the left I-beam 4 and the right I-beam 8 receive only the action of bending moment, the surfaces of the vertical plates are subjected to complete positive strain rather than shear strain, and the shear strain is not generated on the vertical plates. Thus, by providing the strain gages R21, R22, R23, R24 and forming a Wheatstone bridge, the shear strain on the riser surfaces of the left and right I-beams 8, 4 due to the Z-direction force can be measured and the effect of other loads removed. By arranging the strain gauges R17, R18, R19 and R20 and forming a Wheatstone bridge, the shearing strain of the vertical plate surfaces of the front I-beam 2 and the rear I-beam 6 when only moment in the X direction is exerted can be measured, and the influence of other loads is eliminated. By arranging the strain gauges R13, R14, R15 and R16 and forming a Wheatstone bridge, the shearing strain of the vertical plate surfaces of the left I-beam 8 and the right I-beam 4 when only moment in the Y direction is exerted can be measured, and the influence of other loads is eliminated.

When the loading boss 9 receives force in the X direction, the front I-beam 2 and the rear I-beam 6 receive the shearing force and the bending moment, shearing strain is generated on the transverse plate, the shearing strain generated on the transverse plate surface of the front I-beam 2 is opposite to that of the rear I-beam 6, and the left I-beam 8 and the right I-beam 4 receive axial force and do not generate shearing strain; when the loading boss 9 receives Y-direction force, the front I-beam 2 and the rear I-beam 6 receive axial force, shearing strain is not generated, the left I-beam 8 and the right I-beam 4 receive shearing force and bending moment, shearing strain is generated on the transverse plates, and the shearing strain on the transverse plates of the left I-beam is opposite to the shearing strain on the transverse plates of the right I-beam; when the loading boss 9 receives force in the Z direction, the transverse plates of the front I-beam 2, the rear I-beam 6, the left I-beam 8 and the right I-beam 4 mainly generate complete positive strain rather than shear strain; when the top of the loading boss 9 receives moment in the X direction, the front I-beam 2 and the rear I-beam 6 are mainly subjected to torsion, the shear strain on the transverse plates of the front I-beam 2 and the rear I-beam 6 are opposite in sign, and the transverse plates of the left I-beam 8 and the right I-beam 4 mainly generate bending normal stress rather than shear stress; when the top of the loading boss 9 receives moment in the Y direction, the transverse plates of the left I-beam 8 and the right I-beam 4 mainly generate bending normal stress instead of shearing stress, the front I-beam 2 and the rear I-beam 6 are twisted, and the shearing stress signs on the transverse plates of the front I-beam 2 and the rear I-beam 6 are opposite; when the top of the loading boss 9 receives moment in the Z direction, the front I-beam 2, the rear I-beam 6, the left I-beam 8 and the right I-beam 4 receive shearing force and bending moment, the signs of shearing strain on the transverse plates of the front I-beam 2 and the rear I-beam 6 are the same, the signs of shearing strain on the transverse plates of the left I-beam 8 and the right I-beam 4 are the same, the signs of shearing strain on the transverse plates of the front I-beam 2 are opposite to the signs of shearing strain on the transverse plates of the left I-beam 8, and the influence of other loads is eliminated by arranging the strain gauges R1, R2, R3 and R4 and forming a Wheatstone bridge to measure the shearing strain on the transverse plate surfaces of the front I-beam 2 and the rear I-beam 6 only due to X-direction force; the strain gauges R5, R6, R7 and R8 are arranged and form a Wheatstone bridge, so that the shearing strain of the transverse plate surfaces of the left I-beam 8 and the right I-beam 4 only caused by Y-direction force can be measured, and the influence of other loads is eliminated; by arranging the strain gauges R9, R10, R11 and R12 and forming a Wheatstone bridge, the shearing strain of the transverse plate surfaces of the front I-beam 2 and the rear I-beam 6, which is only generated by the moment in the Z direction, can be measured, and the influence of other loads is eliminated.

As shown in fig. 9, the strain gauge bridge circuit changes the resistance change of the strain gauge on the small-size large-range six-dimensional force sensor into voltage change and outputs the voltage change, and the exact relation between the output and the load can be obtained after calibration.

As shown in fig. 10, when in use, screw holes 1, 3, 5 and 7 on a fixed platform 11 are respectively fixed by bolts, on the basis, a loading boss 9 is connected with a bearing plate, measured voltage Ui is amplified by an amplifying circuit and then data acquisition is carried out, and acquired data is led into a PC terminal.

The overall size of the elastic body of the sensor is preferably 30mm multiplied by 12mm, the thickness of the thin-wall beam is 1mm, the height of the side beam is 10mm, and the width of the horizontal beam is 4mm; the preferred material for the elastomer of the sensor is stainless steel 17-4ph; the preferred form of the resistance strain gauge is a series feather strain gauge; the preferred resistance of the resistance strain gauge is 350 ohms; the preferred dimensions of the resistance strain gauge are no more than 5 x 4mm; the measuring ranges of the sensor are preferably Fz, fx and Fy of 2000N, and the measuring ranges of the moments Mx, my and Mz are preferably 40 N.m.

The present application is not limited to the above-described preferred embodiments, and any person can obtain various other products under the present application, but any changes in shape or structure can be made, and all the technical solutions that are the same or similar to the present application fall within the scope of the present application.

Claims

1. The utility model provides a resistance strain type six-dimensional force transducer based on shear strain detects which characterized in that: the sensor comprises a sensor platform and twelve resistance strain gauges, wherein each resistance strain gauge is arranged on the sensor platform, the sensor platform is arranged at a fixed position, and a bearing plate is arranged on the sensor platform; every two resistance strain gauges are connected in series to form a Wheatstone full bridge, each Wheatstone full bridge is electrically connected with a respective voltage measuring end and a direct current power supply, and each voltage measuring end is sequentially and electrically connected with an amplifying circuit, a data collector and a PC terminal.

2. A resistive strain six-dimensional force sensor based on shear strain detection as in claim 1, wherein: the sensor platform is formed by integrally forming I-beams (2, 4, 6 and 8), a loading boss (9) and a fixing platform (11), wherein the fixing platform (11) is of a square platy axisymmetric structure, a square through groove perpendicular to the sensor platform is formed in the center of a square side surface of the fixing platform (11), and four groove surfaces of the square through groove are respectively parallel to four outer side surfaces of the fixing platform (11); the loading lug boss (9) is positioned at the center of the square through groove, the loading lug boss (9) is in a regular quadrangular shape, four outer side surfaces of the loading lug boss (9) are respectively connected to four groove surfaces of the square through groove through I-beams (2, 4, 6 and 8), the four outer side surfaces of the loading lug boss (9) are respectively parallel to the groove surfaces of the square through groove which are respectively opposite, and twelve resistance strain gauges are arranged on the I-beams (2, 4, 6 and 8); the center of loading boss (9) has offered the centre screw hole (10) that link up of the groove face that the square is on a parallel with square through groove of length, and the symmetry position department of four angles of fixed platform (11) has offered the screw hole (1, 3, 5, 7) that link up that are on a parallel with centre screw hole (10), and one side square face of sensor platform passes through screw hole (1, 3, 5, 7) and four bolts and installs in fixed position department, and the loading board passes through centre screw hole (10) and a bolt and installs one side of keeping away from fixed position department at loading boss (9).

3. A resistive strain six-dimensional force sensor based on shear strain detection as in claim 2, wherein: the I-beam (2, 4, 6, 8) is respectively positioned between four outer side surfaces of the loading boss (9) and the groove surfaces of square through grooves of the fixed platform (11) which are opposite to each other, two parallel two side plates of the I-beam (2, 4, 6, 8) are perpendicular to the groove surfaces of the square through grooves which are connected with each other and parallel to the length direction of the central threaded hole (10), and the middle plate of the I-beam (2, 4, 6, 8) is perpendicular to the groove surfaces of the square through grooves which are connected with each other and perpendicular to the length direction of the central threaded hole (10); the first I-beam (2) is located between the first threaded hole (1) and the second threaded hole (3), the second I-beam (4) is located between the second threaded hole (3) and the third threaded hole (5), the third I-beam (6) is located between the third threaded hole (5) and the fourth threaded hole (7), the fourth I-beam (8) is located between the first threaded hole (1) and the fourth threaded hole (7), and three resistance strain gauges are respectively installed on the I-beams (2, 4, 6 and 8).

4. A resistive strain six-dimensional force sensor based on shear strain detection as in claim 2, wherein: the square surface on one side of the loading boss (9) is positioned outside the square through groove of the fixed platform (11), a space is reserved between the square surface on one side of the loading boss (9) and the square surface on one side of the loading boss (9) which is close to the loading boss, and the end surface of the I-beam (2, 4, 6, 8) on one side of the opening close to the square through groove is flush with the square surface on one side of the loading boss (9); the square surface on the other side of the loading boss (9) is positioned outside the square through groove of the loading boss (9), a space is reserved between the square surface on the other side of the loading boss (9) and the square surface on the other side of the loading boss (9) which is close to the loading boss (9), and the end surface of the I-beam (2, 4, 6, 8) which is close to the square surface on the other side of the loading boss (9) is flush with the square surface on the other side of the loading boss (9); one side square of the loading boss (9) is provided with a bearing plate through a central threaded hole (10) and one bolt, and the other side square surface of the fixing platform (11) is arranged at a fixing position through threaded holes (1, 3, 5 and 7) and four bolts.

5. The resistive strain six-dimensional force sensor based on shear strain detection of claim 4, wherein: the first resistance strain gauge, the fifth resistance strain gauge and the tenth resistance strain gauge are arranged on the first I-beam (2), the first resistance strain gauge and the fifth resistance strain gauge are arranged on one side surface, close to the bearing plate, of the middle plate of the first I-beam (2), and the tenth resistance strain gauge is arranged on one side surface, close to the first threaded hole (1), of one of two side plates of the first I-beam (2); the third resistance strain gauge, the eighth resistance strain gauge and the twelfth resistance strain gauge are arranged on the second I-beam (4), the third resistance strain gauge is arranged on one side surface, close to the bearing plate, of the middle plate of the second I-beam (4), and the eighth resistance strain gauge and the twelfth resistance strain gauge are arranged on one side surface, close to the second threaded hole (3), of one side plate of two side plates of the second I-beam (4); the second resistance strain gauge, the sixth resistance strain gauge and the ninth resistance strain gauge are mounted on a third I-beam (6), the second resistance strain gauge and the sixth resistance strain gauge are respectively mounted on one side surface of a middle plate of the third I-beam (6) far away from and close to the bearing plate, and the ninth resistance strain gauge is mounted on one side surface of one side plate of two side plates of the third I-beam (6) close to the third threaded hole (5); the fourth resistance strain gauge, the seventh resistance strain gauge and the eleventh resistance strain gauge are mounted on a fourth I-beam (8), the fourth resistance strain gauge is mounted on one side surface, close to the bearing plate, of the middle plate of the fourth I-beam (8), the seventh resistance strain gauge is mounted on one side surface, close to the fourth threaded hole (7), of one side plate of two side plates of the fourth I-beam (8), and the eleventh resistance strain gauge is mounted on one side surface, close to the first threaded hole (1), of the other side plate of the two side plates of the fourth I-beam (8);

6. The resistive strain six-dimensional force sensor based on shear strain detection of claim 5, wherein: the sensor platform takes the connecting line direction of the center of the first threaded hole (1) and the center of the second threaded hole (3) as the X-axis forward direction, takes the connecting line direction of the center of the second threaded hole (3) and the center of the third threaded hole (5) as the Y-axis forward direction, and takes the straight line direction from the square surface of the other side of the loading boss (9) to the square surface of one side as the Z-axis forward direction; each resistance strain gauge comprises two strain gauges connected in series, wherein one end of each strain gauge is close to and forms 90 degrees;

the first resistance strain gauge comprises a first strain gauge R1 and a second strain gauge R2, the fifth resistance strain gauge comprises a ninth strain gauge R9 and a tenth strain gauge R10, the tenth resistance strain gauge comprises a nineteenth strain gauge R19 and a twentieth strain gauge R20, and the first strain gauge R1, the second strain gauge R2, the ninth strain gauge R9 and the tenth strain gauge R10 are attached to the center of one side face of the middle plate of the first I-beam (2) facing the positive direction of the Z axis and are distributed in a cross shape symmetrical to the X axis and the Y axis; the nineteenth strain gauge R19 and the twentieth strain gauge R20 are symmetrical to the plane where the middle plate of the first I-beam (2) is located, and the intersection point between the nineteenth strain gauge R19 and the twentieth strain gauge R20 is located at the center of one of the two side plates of the first I-beam (2), and the 90-degree opening of the nineteenth strain gauge R19 and the twentieth strain gauge R20 faces the loading boss (9);

The third resistance strain gauge comprises a fifth strain gauge R5 and a sixth strain gauge R6, the eighth resistance strain gauge comprises a fifteenth strain gauge R15 and a sixteenth strain gauge R16, the twelfth resistance strain gauge comprises a twenty-third strain gauge R23 and a twenty-fourth strain gauge R24, the fifth strain gauge R5 and the sixth strain gauge R6 are attached to one side face, facing the Z axis, of the middle plate of the second I-beam (4), of the middle plate, and the intersection point between the fifth strain gauge R5 and the sixth strain gauge R6 is located at the center of the middle plate of the second I-beam (4), the fifth strain gauge R5 and the sixth strain gauge R6 are symmetrical to the X axis and the 90-degree opening faces the loading boss (9), and the fifteenth strain gauge R15, the sixteenth strain gauge R16, the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24 are attached to the center of one side plate of the two side plates of the second I-beam (4) and are distributed in a cross shape symmetrical to the X axis and the Z axis;

the second resistance strain gauge comprises a third strain gauge R3 and a fourth strain gauge R4, the sixth resistance strain gauge comprises an eleventh strain gauge R11 and a twelfth strain gauge R12, the ninth resistance strain gauge comprises a seventeenth strain gauge R17 and an eighteenth strain gauge R18, the eleventh strain gauge R11 and the twelfth strain gauge R12 are attached to one side face of the middle plate of the third I-beam (6) facing the positive Z-axis and an intersection point between the eleventh strain gauge R11 and the twelfth strain gauge R12 is located at the center of the middle plate of the third I-beam (6), the eleventh strain gauge R11 and the twelfth strain gauge R12 are symmetrical to the Y-axis and a 90-degree opening faces the loading boss (9), the third strain gauge R3 and the fourth strain gauge R4 are attached to one side face of the middle plate of the third I-beam (6) facing the negative Z-axis and an intersection point between the eleventh strain gauge R11 and the twelfth strain gauge R12 is located at the center of the middle plate of the third I-beam (6), and the second resistance and the sixth resistance strain gauge are symmetrical to the middle plate of the third I-beam (6); the seventeenth strain gauge R17 and the eighteenth strain gauge R18 are symmetrical to the plane where the middle plate of the third I-beam (6) is located, and the intersection point between the seventeenth strain gauge R17 and the eighteenth strain gauge R18 is located at the center of one of the two side plates of the third I-beam (6), and the 90-degree opening of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 faces the loading boss (9);

The fourth resistance strain gauge comprises a seventh strain gauge R7 and an eighth strain gauge R8, the seventh resistance strain gauge comprises a thirteenth strain gauge R13 and a fourteenth strain gauge R14, the eleventh resistance strain gauge comprises a twenty-first strain gauge R21 and a twenty-second strain gauge R22, the seventh strain gauge R7 and the eighth strain gauge R8 are attached to one side face of the middle plate of the fourth I-beam (8) facing the negative direction of the Z axis, and an intersection point between the seventh strain gauge R7 and the eighth strain gauge R8 is positioned at the center of the middle plate of the fourth I-beam (8), the seventh strain gauge R7 and the eighth strain gauge R8 are symmetrical to the X axis and the 90-degree opening faces the opposite direction of the loading boss (9); the thirteenth strain gauge R13 and the fourteenth strain gauge R14 are symmetrical to the plane where the middle plate of the fourth I-beam (8) is located, and the intersection point between the thirteenth strain gauge R13 and the fourteenth strain gauge R14 is located at the center of one of the two side plates of the fourth I-beam (8), and the 90-degree openings of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 face the loading boss (9); the first twenty-first strain gauge R21 and the twenty-second strain gauge R22 are symmetrical to the plane of the middle plate of the fourth I-beam (8), and the intersection point between the first strain gauge R21 and the twenty-second strain gauge R22 is positioned at the center of the other side plate of the two side plates of the fourth I-beam (8), and the 90-degree opening of the first twenty-first strain gauge R21 and the twenty-second strain gauge R22 faces the loading boss (9).

7. The resistive strain six-dimensional force sensor based on shear strain detection of claim 6, wherein: the first strain gauge R1, the second strain gauge R2, the third strain gauge R3 and the fourth strain gauge R4 are sequentially connected in series to form a first Wheatstone full bridge for measuring X-direction force Fx of the resistance strain six-dimensional force sensor, one end of a voltage measuring end Ui is connected between the first strain gauge R1 and the second strain gauge R2, and the other end of the voltage measuring end Ui is connected between the third strain gauge R3 and the fourth strain gauge R4; one end of the direct current power supply U is connected between the first strain gauge R1 and the fourth strain gauge R4, and the other end of the direct current power supply U is connected between the second strain gauge R2 and the third strain gauge R3;

the fifth strain gauge R5, the sixth strain gauge R6, the seventh strain gauge R7 and the eighth strain gauge R8 are sequentially connected in series to form a second Wheatstone full bridge for measuring Y-direction force Fy of the resistance strain six-dimensional force sensor, one end of a voltage measuring end Ui is connected between the fifth strain gauge R5 and the sixth strain gauge R6, and the other end of the voltage measuring end Ui is connected between the seventh strain gauge R7 and the eighth strain gauge R8; one end of the direct current power supply U is connected between the fifth strain gauge R5 and the eighth strain gauge R8, and the other end of the direct current power supply U is connected between the sixth strain gauge R6 and the seventh strain gauge R7;

The ninth strain gauge R9, the tenth strain gauge R10, the eleventh strain gauge R11 and the twelfth strain gauge R12 are sequentially connected in series to form a third Wheatstone full bridge for measuring the Z-direction moment Mz of the resistance strain type ten-dimensional force sensor, one end of the voltage measuring end Ui is connected between the ninth strain gauge R9 and the tenth strain gauge R10, and the other end of the voltage measuring end Ui is connected between the eleventh strain gauge R11 and the twelfth strain gauge R12; one end of the direct current power supply U is connected between the ninth strain gauge R9 and the twelfth strain gauge R12, and the other end of the direct current power supply U is connected between the tenth strain gauge R10 and the eleventh strain gauge R11;

the thirteenth strain gauge R13, the fourteenth strain gauge R14, the fifteenth strain gauge R15 and the sixteenth strain gauge R16 are sequentially connected in series to form a fourth Wheatstone full bridge for measuring the X-direction moment Mx of the resistance strain type ten-dimensional force sensor, one end of the voltage measuring end Ui is connected between the thirteenth strain gauge R13 and the fourteenth strain gauge R14, and the other end of the voltage measuring end Ui is connected between the fifteenth strain gauge R15 and the sixteenth strain gauge R16; one end of the direct current power supply U is connected between the thirteenth strain gauge R13 and the sixteenth strain gauge R16, and the other end of the direct current power supply U is connected between the fourteenth strain gauge R14 and the fifteenth strain gauge R15;

The seventeenth strain gauge R17, the eighteenth strain gauge R18, the nineteenth strain gauge R19 and the twentieth strain gauge R20 are sequentially connected in series to form a fifth Wheatstone full bridge for measuring the Y-direction moment My of the resistance strain type ten-dimensional force sensor, one end of the voltage measuring end Ui is connected between the seventeenth strain gauge R17 and the eighteenth strain gauge R18, and the other end of the voltage measuring end Ui is connected between the nineteenth strain gauge R19 and the twentieth strain gauge R20; one end of the direct current power supply U is connected between the seventeenth strain gauge R17 and the twentieth strain gauge R20, and the other end of the direct current power supply U is connected between the eighteenth strain gauge R18 and the nineteenth strain gauge R19;

8. The detection method of the resistance strain type six-dimensional force sensor according to any one of claims 1 to 7, characterized in that: the method comprises the following steps:

step one: applying forces with different loads on the bearing plate, obtaining resistance change of each Wheatstone full bridge through each voltage measuring end Ui, converting the resistance change into voltage change, sequentially outputting the voltage change to an amplifying circuit, a data acquisition unit and a PC terminal, and obtaining a voltage-load relation curve by the PC terminal according to the relation between the load of each force and each output voltage change;