CN116576888A - MEMS gyroscope installation error calibration method based on wide-range autocollimator - Google Patents
MEMS gyroscope installation error calibration method based on wide-range autocollimator Download PDFInfo
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Abstract
The invention discloses a method for calibrating the installation error of an MEMS gyroscope based on a wide-range auto-collimator, which comprises the following steps: step 1, designing an auto-collimator in a measuring angle range of +/-9 degrees by utilizing a reflection angle sensitivity modulation mechanism of a non-standard pyramid HCCCR; step 2, constructing an evaluation reference of triaxial MEMS gyroscope measurement data by utilizing orthogonal combination between two large-range autocollimators; step 3, constructing a common data acquisition serial port between the autocollimator camera and the IMU upper computer, and realizing dimension unification and acquisition time synchronization between the autocollimator and the output reading value of the MEMS gyroscope through the integration of the reading value and time of the angular rate measurement of the MEMS gyroscope; and 4, calibrating the MEMS gyroscope installation error coefficient through the traditional precise angular rate output turntable, and performing a comparison experiment. Experiments show that the relative deviation of the IMU output after the compensation of the two calibration methods is lower than 0.3 percent.
Description
Technical Field
The invention belongs to the field of optical measuring instruments, and particularly provides a method for calibrating installation errors of a gyroscope by synchronously outputting three-axis attitude sensing reading values by using two wide-range auto-collimators with orthogonal structures and an MEMS gyroscope.
Background
MEMS (Micro Electro Mechanical systems ) gyroscopes have the important feature of being wearable and easy to integrate as miniaturized, low cost, high frequency response angular rate sensing devices, and are rapidly evolving from single application to multiple fields of mechanical control, personnel navigation, material positioning, etc. When the MEMS gyroscope is used for sensing and measuring the three-dimensional motion of the target, the orthogonality of the target needs to be strictly controlled, so that the measuring axis of the target is correspondingly overlapped with the coordinate system XYZ of the inertial measurement unit (Inertial Measurement Unit, IMU), and the linear misjudgment of the measured value is avoided. At present, a precise triaxial angular rate output turntable is mainly used as a calibration reference to measure a misinterpretation value output by the MEMS gyroscope, so that the calibration of the installation error is completed. However, precision three-axis turrets are extremely high in assembly and operational specifications due to lack of traceable benchmarks, and high frequency tuning cycles and harsh deployment conditions are more affordable to many laboratories.
To date, a number of inertial sensing and precision measurement laboratories in the world have developed research work for application of optically traceable measurement techniques in turntable angle readouts and gyroscope error calibrations, sachinNadig (literature s.nadig, S.Clark, and A.Lal, "DOME-DISC: diffractive optics metrology enabled dithering inertial sensor calibration," in Proc.IEEE 27th Int.Conf.on Micro Electro Mechanical Systems (MEMS), san Francisco, calif., USA,2014, pp.608-611.) devised a method of measuring scale factors and deviations of gyroscopes on dither tables using a nano-optical scale imaging system (NORIS), but the accuracy of this scheme calibration is affected by the imaging system pixels and system integration level, and needs improvement in experimental details; schwenke (document H.Schwenke, R.Schmitt, P.Jatzkowski, C.Warmann, "On-the-fly calibration of linear and rotary axes of machine tools and CMMs using a tracking interferomet)er, "cirprannals, vol.58, no.1, pp.477-480,2009.) laser tracking is used for six-degree-of-freedom calibration of the rotating machine axes, although laser tracking has some reliability for machine static and motion measurements at different speeds, the higher the speed, the greater the continuous measurement difference; jiapeng Mou (document J.Mou, J.Su, L.Miao and t.huang, "Research on field application technology of dynamic angle measurement based on fiber optic gyroscope and autocollimator," IEEE Sensors Journal, vol.21, no.13, pp.15308-15317,July 1,2021.) scale factor calibration of Fiber Optic Gyroscopes (FOG) using an optical autocollimator within ±0.05°; among them, the optical auto-collimation goniometer has the theoretical advantages of easy integration of structure and high angle measurement precision, and more attention is paid to the research. However, the MEMS gyroscope is limited by caliber size, so that the angular range is small, and the MEMS gyroscope is difficult to be used for error correction work under the condition of large dynamic range.
Herein, a method for calibrating MEMS gyroscope installation errors based on a wide range autocollimator is disclosed. By utilizing the traceable characteristic of the autocollimator, the limitation of insufficient measuring range of the autocollimator is broken through, the autocollimator with the measuring range of +/-9 degrees is designed, the data evaluation reference of the MEMS gyroscope is built by using two large-range autocollimator space orthogonal structures, and the calibration measurement of the installation error of the MEMS gyroscope is completed under the control of a computer synchronous acquisition time serial port.
Disclosure of Invention
The present invention is directed to solving the above problems of the prior art. A MEMS gyroscope installation error calibration method based on a wide-range auto-collimator is provided. The technical scheme of the invention is as follows:
a MEMS gyroscope installation error calibration method based on a wide-range autocollimator comprises the following steps:
step 1, designing an auto-collimator in a measuring angle range of +/-9 degrees by utilizing a reflection angle sensitivity modulation mechanism of a non-standard pyramid HCCCR;
step 2, constructing an evaluation reference of triaxial MEMS gyroscope measurement data by utilizing orthogonal combination between two large-range autocollimators;
step 3, constructing a common data acquisition serial port between the autocollimator camera and the IMU upper computer, and realizing dimension unification and acquisition time synchronization between the autocollimator and the output reading value of the MEMS gyroscope through the integration of the reading value and time of the angular rate measurement of the MEMS gyroscope;
and 4, calibrating an MEMS gyroscope installation error coefficient through a traditional precise angular rate output turntable, and performing a comparison test to verify the reliability of the method.
Furthermore, in the step 1, an autocollimator with an angle measurement range of ±9° is designed by using a reflection angle sensitivity modulation mechanism of a non-standard pyramid HCCCR, which specifically includes:
two non-standard pyramid mirrors are designed by rotating the standard pyramid mirror surfaces, the included angles of the mirror surfaces are respectively +_2_3=90 degrees 13', +_3_1=89 degrees 47', +_1_2=90 degrees 13', and the plane reflecting mirror is replaced by the non-standard pyramid mirror to be used as a reflector structure, so that a wide-range auto-collimator measuring system is obtained; when the nonstandard angular cone lens rotates along with the measured object, the wide-range autocollimator realizes displacement conversion of the light spot in the PSD plane by reading the output voltage of the PSD according toAnd->And finishing the attitude angle measurement of the non-standard cone angle mirror.
Further, the normal vectors of the three reflecting surfaces of the non-standard pyramid mirror in the step 1 are deduced and expressed as follows according to the mirror surface included angle relation after the rotation of the standard pyramid mirror:
wherein-delta 12 Is the angle of rotation of the mirror 1 along the OZ axis, delta 23 Is the angle of rotation of mirror 2 along the axis of OX, delta 13 Is the angle by which the mirror 1 rotates along the OY axis; from the above-mentioned non-standard gonioscopic obtaining process, it can be deduced that delta 1 ＝δ，δ 2 ＝δ，δ 3 = - δ, where δ is the mathematical linking angle of the angles of the three reflecting surfaces of the non-standard axicon, the vector change of the measuring beam after reflection by the 3-2-1 reflecting surface is:
thus, the reflectance angle sensitivity of the non-standard gonioscopic mirror is:
according to the formula (3), the sensitivity of the reflection angle of the nonstandard pyramid mirror is adjusted by setting the value of the connection angle delta; two non-standard cone mirrors with mathematical connection angles delta=13 'and mirror angles of < 2_3=90° 13', < 3_1=89°47', < 1_2=90°13' are designed.
According to the traditional autocollimator, a plane mirror is used as a reflector, and when the plane mirror generates yaw theta along with an object to be measured 1 And pitch theta 2 When the angle is rotated, the collimated light beam is inclined, and the light spot displacement change appears on the PSD detector, and the mathematical description of the process is as follows:
ΔX＝f·2·tan(Θ 1 ) (4)
ΔY＝f·2·tan(Θ 2 ) (5)
wherein f is the focal length of the collimating mirror, and DeltaX is the light spot along X 0 Displacement of the axis, ΔY being the spot along Y 0 Displacement of the shaft; if the non-standard pyramid mirror is replaced with a planar mirror, the formulas (4) and (5) should be rewritten as:
measurements were made with a NIKON-6D autocollimator equipped with a sony MI-20CMOS sensor, which can range from ±30' to ±9°, with a system resolution of less than 4 ".
Furthermore, the step 2 of constructing an evaluation reference of the triaxial MEMS gyroscope measurement data by using an orthogonal combination between two wide-range autocollimators specifically includes:
since the autocollimator is only used for yaw theta 1 And pitch theta 2 Angle sensitive, relative to roll angle theta 3 Insensitive, in order to obtain triaxial movement angle perception, two auto-collimators are calibrated by utilizing two adjacent coating surfaces of a high-precision cube reflecting module, so that the two auto-collimators aim at coordinate axes of the reflecting module respectively and are adjusted to be in a mutually orthogonal state; the cube reflecting module is replaced by the nonstandard angle cone mirror, and the alignment of the two autocollimators and the nonstandard angle cone mirror is completed by restoring the light spot state on the detection surface of the autocollimators, so that the turntable rotates theta along the yaw X axis 1 And pitch Y-axis rotation theta 2 When in angle, the autocollimator 1 is a calibration standard of a gyroscope; the turntable rotates theta along the roll Z axis 3 At an angle, the autocollimator 2 is a calibration standard.
Furthermore, the rotation angle of each axial direction of the three-axis turntable in the step 2 is respectively and simultaneously read through an autocollimator and a three-axis MEMS gyroscope; in order to obtain high-precision three-dimensional motion angle perception, two wide-range autocollimators are used for orthogonal combination design, and reference angle measurement of the three-axis gesture of the IMU is completed;
aligning two autocollimators by utilizing two adjacent coating surfaces of a high-precision cube reflecting module, adjusting the two autocollimators to be mutually orthogonal by observing that cross light spots of the two autocollimators are respectively positioned at the center positions of a sensor, and secondly, adjusting the space attitude angles of the square and the two autocollimators until the light spots of the autocollimators 1 always remain static in the process of rotating a turntable along a Z axis, and simultaneously ensuring that the light spots of the autocollimators 2 only move horizontally along a detection plane, wherein the step can ensure that the detection surfaces of the autocollimators 1 and 2 respectively coincide with the XOY and XOZ coordinate planes of the cube; and finally, replacing the cube reflecting module by a non-standard pyramid mirror, and observing the light spot state on the detection surface of the auto-collimator based on the plane reflection principle of the aperture surface to finish the alignment of the auto-collimator and the non-standard pyramid mirror emitter.
Furthermore, step 3, constructing a common data acquisition serial port between the autocollimator camera and the IMU upper computer, and realizing dimension unification and acquisition time synchronization between the autocollimator and the output reading value of the MEMS gyroscope by integrating the reading value and time of the angular rate measurement of the MEMS gyroscope, specifically comprising:
the attitude angle sensing reading values of the three-axis gyroscopes in the IMU are compared by utilizing the two autocollimators to measure the attitude angle reading values of the nonstandard angular cone lens; in the comparison of the read values of the two systems, a computer gives a common serial port of the auto-collimator PSD and the IMU corresponding to the measurement task to execute an acquisition instruction, so that acquisition time synchronization between the two systems is formed; the exposure time of PSD is taken as the comparison time of the acquired data of the IMU at one time, and the method comprises the following steps of θ i ＝[(ω i +ω i+1 )]*[(t i+1 -t i )]And/2, the angle measured by the MEMS gyroscope can be obtained, and the dimension unification between the output reading values of the autocollimator and the MEMS gyroscope is realized.
Furthermore, the MEMS gyroscope installation error calibration system in the step 3 consists of two mutually orthogonal wide-range autocollimators and a manual three-axis turntable; when the three-axis turntable rotates along the standard axis in sequence, the yaw theta corresponding to the IMU and the nonstandard pyramid lens is given 1 Pitching Θ 2 Or roll theta 3 A rotation angle; when the turntable starts to rotate, the computer gives the auto-collimator PSD and the IMU a common serial port to execute acquisition instructions so as to simultaneously measure the read values, wherein the turntable is along the yaw X-axis theta 1 And Y-axis pitch Θ 2 When the angle rotates, the autocollimator 1 is a calibration standard of gyroscope reading value, and the turntable transversely rolls along the Z axis to theta 3 The autocollimator 2 is used as a reading reference when the angle rotates;
the turntable measures within the range of +/-9 degrees, the exposure time of PSD is taken as the acquired data comparison time of an IMU, and the MEMS gyroscope acquires n times of data at equal frequency in the exposure time of PSD, so that the angle measured by the gyroscope is as follows:
wherein omega i The acquisition angular rate of the triaxial MEMS gyroscope in the PSD one-time exposure time is i=1, 2 and 3 … n, and t is the sampling interval time of the gyroscope; theta (theta) i Is the angle measured by the MEMS gyroscope in the time of one exposure of the corresponding autocollimator; and calibrating the installation error of the MEMS gyroscope by comparing the measured reading value of the attitude angle of the nonstandard angular cone mirror by the two autocollimators with the perceived reading value of the attitude angle of the triaxial gyroscope in the IMU.
Furthermore, the step 4 of calibrating the MEMS gyroscope installation error coefficient through the conventional precise angular rate output turntable specifically comprises the following steps:
rigidly fixing an IMU upper computer provided with a triaxial MEMS gyroscope and a nonstandard pyramid mirror on a PT5 type triaxial manual turntable, enabling the three-dimensional turntable to rotate within a range of +/-9 degrees along coordinate axes of the three-dimensional turntable, performing linear fitting and mean value processing on measured values of the triaxial MEMS gyroscope and a large-range autocollimator in each PSD exposure interval, and recording that the installation error coefficient of the triaxial MEMS gyroscope is K ij (i=x, y, z, j=x, y, z); then, verifying the reliability of the MEMS gyroscope by using a traditional method for calibrating the MEMS gyroscope installation error coefficient by using the precise angular rate output turntable; and finally, respectively using the mounting error coefficients calibrated by the two methods for data compensation of experimental results.
Further, the step 4 is to make the PT5 type three-dimensional manual turntable along the yaw theta respectively 1 Pitching Θ 2 And roll theta 3 The angle rotates within the range of +/-9 degrees, so that the triaxial MEMS gyroscope obtains the rotation angle measured by the wide-range autocollimator under each measurement reading value, the measurement value of the triaxial MEMS gyroscope and the wide-range autocollimator in each PSD exposure interval is compared, and the linear slope of the ratio of the measurement reading values is obtained after average processingInstallation error coefficient K of shaft MEMS gyroscope ij (i＝x,y,z，j＝x,y,z)。
By using a precision triaxial angular rate output turntable type I6082 (measurement range 0.001 DEG/s to 300 DEG/s, measurement accuracy is better than 0.05%), a MEMS gyroscope triaxial installation error is measured in a range of + -100 DEG/s at a step change of every 20 DEG/s, and an installation error coefficient K 'is recorded' ij (i=x, y, z, j=x, y, z); the installation error coefficients calibrated by the two methods are respectively used for data compensation of experimental results, and the compensation method is expressed as follows:
which indicates the angular velocity of the carrierWhen inputting, the output matrix of the MEMS gyroscope, ωx 0 、ωy 0 、ωz 0 The zero output of the gyroscope is zero output when the gyroscope is static, and the value of the zero output is very small and negligible; experiments prove that the relative deviation of the output of the IMU after being compensated by the two calibration methods is lower than 0.3 percent.
The invention has the advantages and beneficial effects as follows:
the invention provides a method for calibrating the installation error of an MEMS gyroscope based on a wide-range autocollimator, which increases the angle measurement range of an NIKON-6D autocollimator from +/-30 'to +/-9 degrees by designing a non-standard angular cone mirror with a mathematical connection angle delta of 13'. And the gesture characterization of the yaw, pitch and roll triaxial angle rotation process of the IMU to be calibrated is realized by using two orthogonal wide-range auto-collimator measurement systems. And finally, a computer is used for sending serial port signals to the autocollimator and the IMU host computer, so that synchronous data acquisition is realized. And through the integration of the MEMS gyroscope angular rate measurement reading value and time, the dimension unification and the acquisition time synchronization between the wide-range auto-collimator and the MEMS gyroscope output reading value are realized, and experiments show that compared with the traditional precision three-axis turntable calibration method, the calibration precision deviation of the MEMS gyroscope installation error is better than 0.3%.
Heretofore, the calibration of the MEMS gyroscope installation error has mainly used the precision triaxial angular rate output turntable as the calibration reference, however, the precision triaxial turntable lacks the traceable reference, the assembly and operation specifications of the precision triaxial turntable put very high requirements on the experimenters, and the high-frequency tuning period and the harsh configuration conditions are more difficult for numerous laboratories to bear. Based on the research of the past workers, a series of error sources of the gyroscope can be calibrated through optical traceability technologies such as a laser interferometer, a nanometer optical scale imaging and the like, but the technology is generally limited by the optical caliber size, so that the angle measurement range is small, and the method is difficult to be used for the mounting error calibration work of the MEMS gyroscope with the error reflecting characteristic under the large dynamic range. The method breaks through the limitation of insufficient measuring range of the autocollimator, and is helpful for promoting the development of the inertial sensing calibration technology to a traceable direction, thereby obviously reducing and simplifying the equipment cost and maintenance requirements of a laboratory.
Drawings
FIG. 1 is a theoretical block diagram of a non-standard pyramid reflector in accordance with a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of a wide range auto-collimator measurement system;
FIG. 3 is a view of a wide-range autocollimator quadrature state spot imaging based on a non-standard axicon;
FIG. 4 is a schematic diagram of a MEMS gyroscope mounting error calibration platform;
fig. 5 is a schematic diagram of a data acquisition system.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and specifically described below with reference to the drawings in the embodiments of the present invention. The described embodiments are only a few embodiments of the present invention.
The technical scheme for solving the technical problems is as follows:
a MEMS gyroscope installation error calibration method based on a wide-range autocollimator comprises the following steps:
1) According to the reflection angle sensitivity factor in the mathematical model of the standard pyramid, the standard pyramid mirror is changed by rotating the mirror surfaceThe normal vector of each reflecting surface is adjusted to a mathematical connection angle according to the changed reflecting surface reflecting vector matrix, and two non-standard angle conical mirrors are designed, wherein the mirror surface included angles of the two non-standard angle conical mirrors are respectively +.2_3=90 degrees 13', +.3_1=89 degrees 47', +.1_2=90 degrees 13'. And replacing the plane reflecting mirror with the nonstandard pyramid mirror to serve as a reflector structure, so as to obtain the wide-range auto-collimator measuring system. When the nonstandard angular cone lens rotates along with the measured object, the wide-range autocollimator realizes displacement conversion of the light spot in the PSD plane by reading the output voltage of the PSD according toAnd->And finishing the attitude angle measurement of the non-standard cone angle mirror. In order to ensure that imaging light spots are in the maximum allowable displacement range of the plane of the photoelectric sensor, the designed mathematical connection angle delta of the non-standard pyramid lens is 13', and experiments prove that the angle measurement range of the NIKON-6D autocollimator is expanded to +/-9 degrees from +/-30', the resolution is higher than 4 ', and the whole-process precision is better than the measurement performance of 18'.
2) Since the autocollimator is only used for yaw theta 1 And pitch theta 2 Angle sensitive, with respect to roll theta 3 In order to obtain three-axis motion angle perception, two large-range autocollimators are aligned by utilizing two adjacent coating surfaces of a high-precision cube reflecting module, cross light spots are respectively positioned at the center positions of PSD (position sensitive detector), so that the cross light spots are respectively aimed at coordinate axes of the reflecting module, then the space attitude angle of a cube mirror is finely adjusted until the light spots of the large-range autocollimator 1 always remain stationary in the rotating process of a turntable along a Z axis, and meanwhile, the light spots of the large-range autocollimator 2 only move horizontally along a detection plane, so that the two large-range autocollimators are mutually orthogonal; and then replacing the cube reflecting mirror with the non-standard angular cone mirror, and completing the alignment of the two large-range autocollimators and the non-standard angular cone mirror by restoring the light spot state on the PSD. So that the turntable rotates theta along the yaw X-axis 1 And pitch Y-axis rotation theta 2 When in angle, the autocollimator 1 is a calibration standard of a gyroscope; turntableRotating theta along roll Z axis 3 At an angle, the autocollimator 2 is a calibration standard.
3) And the three-axis turntable sequentially rotates along the coordinate axis of the three-axis turntable, yaw, pitch and roll rotation angles corresponding to the IMU upper computer and the non-standard pyramid mirror are given, and the two autocollimators are utilized to measure and read the attitude angle of the non-standard pyramid mirror to align the attitude angle sensing reading value of the three-axis gyroscope in the IMU. In the comparison of the read values of the two systems, a computer gives a common serial port of the auto-collimator PSD and the IMU corresponding to the measurement task to execute an acquisition instruction, so that acquisition time synchronization between the two systems is formed. The exposure time of PSD is taken as the comparison time of the acquired data of the IMU at one time, and the method comprises the following steps ofθ i ＝[(ω i +ω i+1 )]*[(t i+1 -t i )]And/2, the angle measured by the MEMS gyroscope can be obtained, and the dimension unification between the output reading values of the autocollimator and the MEMS gyroscope is realized.
4) By using the method, the measuring angular rate of the triaxial MEMS gyroscope corresponding to each exposure time of the PSD is measured, the measured rotation angle is obtained by integrating the measuring angular rate with the sampling time, the measuring values of the three-dimensional MEMS gyroscope and the large-range autocollimator are linearly fitted and processed in an average way, and the installation error coefficient of the triaxial MEMS gyroscope is recorded to be K ij (i=x, y, z, j=x, y, z); then, verifying the actual effect of calibrating the installation error of the method by using a traditional method for calibrating the installation error coefficient of the MEMS gyroscope by using the precise angular rate output turntable; and finally, respectively using the mounting error coefficients calibrated by the two methods for data compensation of experimental results, wherein the compensation results show that the relative deviation of the output of the IMU compensated by the two calibration methods is lower than 0.3%.
2. Preferably, the reflection vector of the light beam after passing through each reflection surface of the standard cone mirror in the step 1) is:
M d are opposite to each other for pyramid lensReflection matrix of the emission surface, N x ，N y ，N z The normal vector of each reflecting surface in the XYZ coordinate system is respectively shown. If the incident beam is reflected along the reflection sequence of the standard angular cone lens 3-2-1, the outgoing light vector can be expressed as:
B 321 ＝M 3 ·M 2 ·M 1 ·A (2)
a is the unit vector of incident light to the pyramidIt can be seen from the formulas (1) and (2) that the beam vector is +.>As can be seen from the law of reflection of light, the incident light reflected by the standard pyramid mirror is always parallel to the outgoing light, and the reflection angle sensitivity is 1.
The non-standard angular cone lens designed by the invention is obtained by continuously rotating a standard angular cone lens, wherein an angle of 2-3=90-delta is formed between the lens surfaces 2 and 3 2 The angle between the mirror 1 and the mirror 3 is 1-3=90-delta 3 The angle between the mirror 1 and the mirror 2 is 1-2=90-delta 1 . The normal vector of the rotatable mirror can be obtained as follows:
wherein-delta 12 Is the angle of rotation of the mirror 1 along the OZ axis, delta 23 Is the angle of rotation of mirror 2 along the axis of OX, delta 13 Is the angle by which the mirror 1 rotates along the OY axis. From the above-mentioned non-standard gonioscopic obtaining process, delta can be known 2 ＝δ 23 ，δ 3 ＝δ 13 The method comprises the steps of carrying out a first treatment on the surface of the Thus, normal vector N 1 And N 2 Can be expressed as:
bringing formula (3) into bandDelta can be obtained by entering the formula (4) 12 The expression of (2) is
While when delta 1 、δ 2 And delta 3 At small angles, equation (5) may be approximately equal to
δ 12 ＝δ 1 +δ 2 ·δ 3 (6)
From the reflection matrix of each reflecting surface of the gonioscopic mirror, the derivation can be made, if delta 1 ＝δ，δ 2 ＝δ，δ 3 = - δ, where δ is the mathematical linking angle of the angles of the three reflecting surfaces of the non-standard axicon, the vector change of the measuring beam after reflection by the 3-2-1 reflecting surface is:
thus, the reflectance angle sensitivity of the non-standard gonioscopic mirror is:
according to the formula (8), the adjustment of the sensitivity of the reflection angle of the nonstandard pyramid mirror can be realized by setting the value of the connection angle delta. According to the invention, two non-standard angular cone mirrors with mathematical connection angles delta=13 'and mirror angles of < 2_3=90° 13', < 3_1=89°47', < 1_2=90°13' are designed, so that when the non-standard angular cone mirrors are used as auto-collimator reflectors, reflected light beams are not limited by the caliber size of the collimating objective lens, and can always image on a photoelectric detector in a larger angle change range of the reflectors.
Taking NIKON-6D autocollimator equipped with Sony MI-20CMOS sensor as an example, the measurement range can be increased from + -30 ' to + -9 DEG, and the resolution is ensured to be higher than 4 ', and the whole-course precision is better than 18 '. According to the test performance of the wide-range auto-collimator, the method is suitable for the MEMS gyroscope dynamic installation error calibration test with the angular rate resolution lower than 4 '/0.55 s=0.002 DEG/s and the noise higher than 18'/0.55 s=0.009 DEG/s, wherein 0.55s is the minimum exposure time of CMOS.
3. Preferably, said step 2) takes into account that the autocollimator is only for yaw Θ 1 And pitch theta 2 In order to obtain high-precision three-dimensional motion angle perception, the angle sensitivity is achieved by using two large-range auto-collimators in an orthogonal combination design, and reference angle measurement of the three-axis gesture of the IMU is completed.
The two wide-range autocollimators are respectively aligned with two adjacent coating surfaces of the high-precision cube reflecting module, whether cross light spots of the two autocollimators are positioned at the center position of the sensor is observed, then the space attitude angles of the square and the two autocollimators are adjusted by fine adjustment until the light spots of the autocollimator 1 are always static in the rotating process of the turntable along the Z axis, and meanwhile, the light spots of the wide-range autocollimator 2 are ensured to only move horizontally along the detection plane, and the detection planes of the wide-range autocollimators 1 and 2 are ensured to be respectively overlapped with the XOY and XOZ coordinate planes of the cube. And then replacing the cube reflecting module by a non-standard angular cone mirror, and observing the light spot state on the detection surface of the auto-collimator based on the plane reflection principle of the aperture surface of the non-standard angular cone mirror to finish the alignment of the auto-collimator and the non-standard angular cone mirror emitter. And finally, rigidly fixing the nonstandard angular cone mirror and the IMU on a PT5 type triaxial manual rotary table, respectively rotating the triaxial rotary table within a range of +/-9 degrees along each axial direction, and simultaneously obtaining readings through an autocollimator and a triaxial MEMS gyroscope.
4. Preferably, the step 3) is that when the turntable starts to rotate, the computer gives a common serial port of the wide-range autocollimator PSD camera and the IMU to execute acquisition instructions so as to enable the acquisition instructions to simultaneously measure the read value, wherein the turntable is along the yaw X-axis Θ 1 And Y-axis pitch Θ 2 When the angle rotates, the wide-range auto-collimator 1 is used as a calibration standard of gyroscope reading value, and the turntable rolls along the Z axis to a certain degree 3 The wide-range autocollimator 2 is used as a reading reference when the angle rotates.
The turntable performs measurement within a range of +/-9 degrees, and the angular rate of the triaxial MEMS gyroscope corresponding to each exposure time of the PSD is integrated with sampling time respectively to obtain the rotation angle measured by the MEMS gyroscope, and the calculation method is as follows:
wherein omega i (i=1, 2, 3 … n) is the acquisition angular rate of the tri-axis MEMS gyroscope during the PSD one-shot exposure time, and t is the sampling interval time of the gyroscope. Theta (theta) i (i=1, 2, 3 … n) is the angle measured by the MEMS gyroscope for one exposure time of the autocollimator.
5. Preferably, the step 4) compares the three-axis MEMS gyroscope in each PSD exposure interval with the measured value of the wide-range autocollimator and processes the average value (linear slope of the ratio of the measured values), so as to obtain the installation error coefficient K of the three-axis MEMS gyroscope ij (i＝x,y,z，j＝x,y,z)，K ij For the ratio of the angle sensed by the j-axis of the MEMS gyroscope to the input angle when the turntable rotates along the i-axis, wherein the X-axis corresponds to the yaw theta of the turntable 1 Angle and Y-axis correspond to the pitch theta of the turntable 2 Rolling theta of angle and Z-axis corresponding turntable 3 Angle. In order to verify the actual effect of calibrating the installation error coefficient of the gyroscope based on the invention, a comparison experiment of a traditional method for calibrating the installation error coefficient of the MEMS by a precise angular rate output turntable is carried out, the experiment is carried out by modulating the precise turntable within +/-100 degrees/s, taking each 20 degrees/s as step change, respectively measuring the triaxial installation error of the MEMS gyroscope in the IMU, then carrying out linear fitting on experimental data, and recording the linear fitting as the installation error coefficient K '' ij (i＝x,y,z，j＝x,y,z)。
The installation error coefficients calibrated by the two methods are respectively used for data compensation of experimental results, and the compensation method is expressed as follows:
the three-axis MEMS gyroscope error values after calibration and compensation by the two methods are restrained within 0.12 degrees/s. In order to compare the deviation between the two mounting error calibration methods, the measurement data is subjected to mean value processing, and analysis shows that the relative deviation of the IMU output after the two calibration methods are compensated is lower than 0.3%.
Finally, according to the invention, a large-range autocollimator calibration MEMS gyroscope installation error platform with traceable characteristics is built, the calibration performance that the calibration precision deviation of the MEMS gyroscope installation error is better than 0.3% is obtained, in addition, the calibration platform parameters can calibrate the MEMS gyroscope installation error coefficient with angular rate resolution lower than 0.002 DEG/s and noise higher than 0.009 DEG/s, and the calibration is completed. The method is helpful to promote the development of the inertial sensing calibration technology to a traceable direction, thereby obviously reducing and simplifying the cost and maintenance requirements of laboratory equipment.
The system, apparatus, module or unit set forth in the above embodiments may be implemented in particular by a computer chip or entity, or by a product having a certain function. One typical implementation is a computer. In particular, the computer may be, for example, a personal computer, a laptop computer, a cellular telephone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article or apparatus that comprises the element.
The above examples should be understood as illustrative only and not limiting the scope of the invention. Various changes and modifications to the present invention may be made by one skilled in the art after reading the teachings herein, and such equivalent changes and modifications are intended to fall within the scope of the invention as defined in the appended claims.
Claims (10)
1. The MEMS gyroscope installation error calibration method based on the wide-range autocollimator is characterized by comprising the following steps of:
step 1, designing an auto-collimator in a measuring angle range of +/-9 degrees by utilizing a reflection angle sensitivity modulation mechanism of a non-standard pyramid HCCCR;
step 2, constructing an evaluation reference of triaxial MEMS gyroscope measurement data by utilizing orthogonal combination between two large-range autocollimators;
step 3, constructing a common data acquisition serial port between the autocollimator camera and the IMU upper computer, and realizing dimension unification and acquisition time synchronization between the autocollimator and the output reading value of the MEMS gyroscope through the integration of the reading value and time of the angular rate measurement of the MEMS gyroscope;
and 4, finally calibrating the MEMS gyroscope installation error coefficient through the traditional precise angular rate output turntable.
2. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range auto-collimator according to claim 1, wherein the step 1 designs the auto-collimator with the angle measurement range of ±9° by using a reflection angle sensitivity modulation mechanism of the non-standard pyramid HCCCR, and specifically comprises:
two non-standard pyramid mirrors are designed by rotating the standard pyramid mirror surfaces, the included angles of the mirror surfaces are respectively +_2_3=90 degrees 13', +_3_1=89 degrees 47', +_1_2=90 degrees 13', and the plane reflecting mirror is replaced by the non-standard pyramid mirror to be used as a reflector structure, so that a wide-range auto-collimator measuring system is obtained; when the nonstandard angular cone lens rotates along with the measured object, the wide-range autocollimator realizes displacement conversion of the light spot in the PSD plane by reading the output voltage of the PSD according toAnd->And finishing the attitude angle measurement of the non-standard cone angle mirror.
3. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range autocollimator according to claim 2, wherein the normal vectors of the three reflecting surfaces of the non-standard angular cone mirror in the step 1 are deduced according to the mirror angle relation after the rotation of the standard angular cone mirror and expressed as:
wherein-delta 12 Is the angle of rotation of the mirror 1 along the OZ axis, delta 23 Is the angle of rotation of mirror 2 along the axis of OX, delta 13 Is the angle by which the mirror 1 rotates along the OY axis; from the above-mentioned non-standard gonioscopic obtaining process, it can be deduced that delta 1 ＝δ，δ 2 ＝δ，δ 3 = - δ, where δ is the mathematical linking angle of the angles of the three reflecting surfaces of the non-standard axicon, the vector change of the measuring beam after reflection by the 3-2-1 reflecting surface is:
thus, the reflectance angle sensitivity of the non-standard gonioscopic mirror is:
according to the formula (3), the sensitivity of the reflection angle of the nonstandard pyramid mirror is adjusted by setting the value of the connection angle delta; two non-standard cone mirrors with mathematical connection angles delta=13 'and mirror angles of < 2_3=90° 13', < 3_1=89°47', < 1_2=90°13' are designed.
4. MEM based on wide range autocollimator as claimed in claim 2The method for calibrating the installation error of the S gyroscope is characterized in that the conventional autocollimator uses a plane mirror as a reflector, and when the plane mirror generates yaw theta along with an object to be measured 1 And pitch theta 2 When the angle is rotated, the collimated light beam is inclined, and the light spot displacement change appears on the PSD detector, and the mathematical description of the process is as follows:
ΔX＝f·2·tan(Θ 1 ) (4)
ΔY＝f·2·tan(Θ 2 ) (5)
wherein f is the focal length of the collimating mirror, and DeltaX is the light spot along X 0 Displacement of the axis, ΔY being the spot along Y 0 Displacement of the shaft; if the non-standard pyramid mirror is replaced with a planar mirror, the formulas (4) and (5) should be rewritten as:
when the NIKON-6D autocollimator of the Sony MI-20CMOS sensor is adopted, the measurement range can be increased from +/-30 'to +/-9 DEG, and the system resolution is less than 4'.
5. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range autocollimator according to claim 1, wherein the step 2 is characterized by constructing an evaluation reference of the measurement data of the three-axis MEMS gyroscope by utilizing an orthogonal combination between two wide-range autocollimators, and specifically comprises:
since the autocollimator is only used for yaw theta 1 And pitch theta 2 Angle sensitive, relative to roll angle theta 3 Insensitive, in order to obtain triaxial movement angle perception, two auto-collimators are calibrated by utilizing two adjacent coating surfaces of a high-precision cube reflecting module, so that the two auto-collimators aim at coordinate axes of the reflecting module respectively and are adjusted to be in a mutually orthogonal state; replacing cube-reflecting modules with non-standard axicon lenses, by self-reductionThe light spot state on the collimator detection surface finishes the alignment of the two autocollimators and the nonstandard angular cone mirror, so that the turntable rotates along the yaw X-axis to theta 1 And pitch Y-axis rotation theta 2 When in angle, the autocollimator 1 is a calibration standard of a gyroscope; the turntable rotates theta along the roll Z axis 3 At an angle, the autocollimator 2 is a calibration standard.
6. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range autocollimator according to claim 5, wherein the rotation angle of each axial direction of the three-axis turntable in the step 2 is respectively obtained by the autocollimator and the three-axis MEMS gyroscope at the same time; in order to obtain high-precision three-dimensional motion angle perception, two wide-range autocollimators are used for orthogonal combination design, and reference angle measurement of the three-axis gesture of the IMU is completed;
aligning two autocollimators by utilizing two adjacent coating surfaces of a high-precision cube reflecting module, adjusting the two autocollimators to be mutually orthogonal by observing that cross light spots of the two autocollimators are respectively positioned at the center positions of a sensor, and secondly, adjusting the space attitude angles of the square and the two autocollimators until the light spots of the autocollimators 1 always remain static in the process of rotating a turntable along a Z axis, and simultaneously ensuring that the light spots of the autocollimators 2 only move horizontally along a detection plane, wherein the step can ensure that the detection surfaces of the autocollimators 1 and 2 respectively coincide with the XOY and XOZ coordinate planes of the cube; and finally, replacing the cube reflecting module by a non-standard pyramid mirror, and observing the light spot state on the detection surface of the auto-collimator based on the plane reflection principle of the aperture surface to finish the alignment of the auto-collimator and the non-standard pyramid mirror emitter.
7. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range autocollimator according to claim 5, wherein the step 3 is to build a common data acquisition serial port between the autocollimator camera and the IMU host computer, and realize dimension unification and acquisition time synchronization between the autocollimator and the output reading value of the MEMS gyroscope by integrating the angular rate measurement reading value and time of the MEMS gyroscope, and specifically comprises the following steps:
the attitude angle sensing reading values of the three-axis gyroscopes in the IMU are compared by utilizing the two autocollimators to measure the attitude angle reading values of the nonstandard angular cone lens; in the comparison of the read values of the two systems, a computer gives a common serial port of the auto-collimator PSD and the IMU corresponding to the measurement task to execute an acquisition instruction, so that acquisition time synchronization between the two systems is formed; the exposure time of PSD is taken as the comparison time of the acquired data of the IMU at one time, and the method comprises the following steps of θ i ＝[(ω i +ω i+1 )]*[(t i+1 -t i )]And/2, the angle measured by the MEMS gyroscope can be obtained, and the dimension unification between the output reading values of the autocollimator and the MEMS gyroscope is realized.
8. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range auto-collimator according to claim 7, wherein the step 3MEMS gyroscope installation error calibration system is composed of two mutually orthogonal wide-range auto-collimators and a manual three-axis turntable; when the three-axis turntable rotates along the standard axis in sequence, the yaw theta corresponding to the IMU and the nonstandard pyramid lens is given 1 Pitching Θ 2 Or roll theta 3 A rotation angle; when the turntable starts to rotate, the computer gives the auto-collimator PSD and the IMU a common serial port to execute acquisition instructions so as to simultaneously measure the read values, wherein the turntable is along the yaw X-axis theta 1 And Y-axis pitch Θ 2 When the angle rotates, the autocollimator 1 is a calibration standard of gyroscope reading value, and the turntable transversely rolls along the Z axis to theta 3 The autocollimator 2 is used as a reading reference when the angle rotates;
the turntable measures within the range of +/-9 degrees, the exposure time of PSD is taken as the acquired data comparison time of an IMU, and the MEMS gyroscope acquires n times of data at equal frequency in the exposure time of PSD, so that the angle measured by the gyroscope is as follows:
wherein omega i The acquisition angular rate of the triaxial MEMS gyroscope in the PSD one-time exposure time is i=1, 2 and 3 … n, and t is the sampling interval time of the gyroscope; theta (theta) i Is the angle measured by the MEMS gyroscope in the time of one exposure of the corresponding autocollimator; and calibrating the installation error of the MEMS gyroscope by comparing the measured reading value of the attitude angle of the nonstandard angular cone mirror by the two autocollimators with the perceived reading value of the attitude angle of the triaxial gyroscope in the IMU.
9. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range auto-collimator according to claim 1, wherein the step 4 is to calibrate the installation error coefficient of the MEMS gyroscope by using a traditional precise angular rate output turntable, and the method is used for comparison experiments, and specifically comprises the following steps:
rigidly fixing an IMU upper computer provided with a triaxial MEMS gyroscope and a nonstandard pyramid mirror on a PT5 type triaxial manual turntable, enabling the three-dimensional turntable to rotate within a range of +/-9 degrees along coordinate axes of the three-dimensional turntable, performing linear fitting and mean value processing on measured values of the triaxial MEMS gyroscope and a large-range autocollimator in each PSD exposure interval, and recording that the installation error coefficient of the triaxial MEMS gyroscope is K ij (i=x, y, z, j=x, y, z); then, verifying the reliability of the MEMS gyroscope by using a traditional method for calibrating the MEMS gyroscope installation error coefficient by using the precise angular rate output turntable; and finally, respectively using the mounting error coefficients calibrated by the two methods for data compensation of experimental results.
10. The method for calibrating the installation error of the MEMS gyroscope based on the wide-range auto-collimator according to claim 9, wherein the step 4, the three-dimensional manual turret of the type pt5 are respectively along the yaw Θ 1 Pitching Θ 2 And roll theta 3 The angle rotates within the range of +/-9 degrees, so that the triaxial MEMS gyroscope obtains the rotation angle measured by the wide-range autocollimator under the condition of measuring the reading value each time, and the triaxial MEMS gyroscope and the wide-range autocollimator in each PSD exposure intervalThe linear slope of the ratio of the measured values of the range autocollimator and the measured reading value after the average value processing can be used for obtaining the installation error coefficient K of the triaxial MEMS gyroscope ij (i＝x,y,z，j＝x,y,z)。
By using a precision triaxial angular rate output turntable type I6082 (measurement range 0.001 DEG/s to 300 DEG/s, measurement accuracy is better than 0.05%), a MEMS gyroscope triaxial installation error is measured in a range of + -100 DEG/s at a step change of every 20 DEG/s, and an installation error coefficient K 'is recorded' ij (i=x, y, z, j=x, y, z); the installation error coefficients calibrated by the two methods are respectively used for data compensation of experimental results, and the compensation method is expressed as follows:
which indicates the angular velocity of the carrierWhen inputting, the output matrix of the MEMS gyroscope, ωx 0 、ωy 0 、ωz 0 The zero output of the gyroscope is zero output when the gyroscope is static, and the value of the zero output is very small and negligible; experiments prove that the relative deviation of the output of the IMU after being compensated by the two calibration methods is lower than 0.3 percent.
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