CN116564840A - Measuring system using cam mechanism - Google Patents
Measuring system using cam mechanism Download PDFInfo
- Publication number
- CN116564840A CN116564840A CN202310481635.7A CN202310481635A CN116564840A CN 116564840 A CN116564840 A CN 116564840A CN 202310481635 A CN202310481635 A CN 202310481635A CN 116564840 A CN116564840 A CN 116564840A
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- CN
- China
- Prior art keywords
- cam
- measuring
- bar
- rod
- measuring system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 50
- 238000005259 measurement Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 abstract description 10
- 238000001514 detection method Methods 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000013461 design Methods 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Abstract
The invention discloses a measuring system applying a cam mechanism, which is arranged at the top of a machine table and comprises a measuring component arranged at one side of the machine table and a cam jacking component arranged at the top end of the machine table and at a position corresponding to the measuring component, wherein the measuring component comprises a measuring mechanism, a bracket for supporting the measuring mechanism and a driving mechanism for driving the bracket to transversely move. The invention has unique design, realizes on-line full detection by matching the cam lifting mechanism and the measuring assembly, and carries out lifting detection on each disk substrate in the cleaning box, thereby greatly improving the detection speed, realizing on-line detection and meeting the production requirement.
Description
Technical Field
The invention relates to the technical field of hard disks and wafers, in particular to a measuring system applying a cam mechanism.
Background
In the field of hard disk manufacturing, the requirement on products reaches a small UM level, the product test is changed from original spot check to full check, and the labor cost is high, so that a high-speed high-precision testing mechanism (UPH > 3600) is needed, the existing UM level precision measuring instrument can only perform spot check between tests, cannot perform online full check, and cannot meet the production requirement.
Disclosure of Invention
The present invention is directed to a measuring system using a cam mechanism, so as to solve the above-mentioned problems in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions: the measuring system comprises a measuring assembly arranged at one side of the machine table and a cam jacking assembly arranged at the position corresponding to the measuring assembly at the top end of the machine table, wherein the measuring assembly comprises a measuring mechanism, a bracket for supporting the measuring mechanism and a driving mechanism for driving the bracket to transversely move.
Preferably, the cam jacking component comprises a cam, a supporting frame for supporting the cam and a power element for driving the cam to rotate, one end of the lever is arranged at the bottom end of the cam, a jacking mechanism is arranged at the top of the other end of the lever, the cam comprises a rotating shaft and a plurality of cam pieces which are arranged on the outer wall of the rotating shaft in parallel, the protruding parts of the plurality of cam pieces are uniformly staggered in a ring shape, the protruding parts of the plurality of cam pieces are arranged at certain angle intervals, the side face of the cam pieces forms a gear shape, the jacking mechanism comprises a plurality of ejector rods, supporting pieces arranged at the top ends of the ejector rods and a frame for the ejector rods to move up and down, the plurality of ejector rods are uniformly arranged on the inner side of the frame from front to back, the lever comprises a shaft rod and a plurality of bar-shaped rods, one end of each bar-shaped rod is arranged on the outer wall of the shaft rod, one end of each bar-shaped rod can be in contact with the protruding parts of each cam piece, the other end of each bar-shaped rod is in contact with the bottom end of each ejector rod, each cam piece corresponds to each cam piece, each bar piece corresponds to each ejector rod, and each bar in each cam piece corresponds to each ejector rod is in a position, and each bar is located on the same plane.
Preferably, when the convex part of any one of the cam sheets contacts with the bar-shaped rod at the corresponding position, one end of the bar-shaped rod rotates around the shaft rod, and the other end of the bar-shaped rod lifts the ejector rod to rise.
Preferably, a cam plate, a bar-shaped rod rotating around the shaft rod and a push rod at corresponding positions form a lever lifting connecting rod.
Preferably, the measuring mechanism comprises a plurality of laser measuring heads and a frame body for adjusting the positions of the plurality of laser measuring heads.
Preferably, the driving mechanism comprises a second motor, and the second motor converts the rotary motion of the second motor into the transverse reciprocating motion of the movable seat through the threaded connection of the screw rod and the movable seat.
The measuring system using the cam mechanism has the beneficial effects that: the invention has unique design, realizes on-line full detection by matching the cam lifting mechanism and the measuring assembly, and carries out lifting detection on each disk substrate in the cleaning box, thereby greatly improving the detection speed, realizing on-line detection and meeting the production requirement.
Drawings
FIG. 1 is an overall isometric view of the present invention;
FIG. 2 is a left side view of the present invention;
FIG. 3 is an isometric view of a cam jack mechanism of the present invention;
FIG. 4 is a front view of the cam jack mechanism of the present invention;
FIG. 5 is a rear view of the measurement assembly of the present invention;
FIG. 6 is a top view of the measurement assembly of the present invention;
fig. 7 is a side view of a measurement assembly of the present invention.
In the figure: 1. the device comprises a machine table, 2, a cam jacking mechanism, 2-1, a base, 2-2, a base, 2-3, a support plate, 2-4, a vertical seat, 2-5, a motor I, 2-6, a coupler, 2-7, a support, 2-8, a rotating shaft, 2-9, a rotating wheel, 2-10, a protrusion, 2-11, a shaft lever, 2-12, a lever, 2-13, a frame body, 2-14, a top seat, 2-15, a towing bar, 2-16, a bracket, 2-17, a support plate, 3, a driving mechanism, 3-1, a shell, 3-2, a motor II, 3-3, a rectangular frame, 3-4, a lead screw, 3-5, a moving seat, 4, a support, 4-1, a vertical plate, 4-2, a transverse plate, 5, a measuring mechanism, 5-1, a rectangular plate, 5-2, a fixed seat, 5-3, a sliding seat, 5-4, a measuring seat, 5-5, a laser measuring head, 6, a conveying rail, 7, a cleaning box, 8 and a disk substrate.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples
Referring to fig. 1-2, a measuring system using a cam mechanism includes a machine 1, a top end measuring assembly of the machine 1, a cam jacking mechanism 2 installed at a position corresponding to the machine 1 of the measuring assembly, a conveying rail 6 installed above the cam jacking mechanism 2, a cleaning box 7 positioned in the conveying rail 6, a plurality of disk substrates 8 placed in the cleaning box 7, a hollow bottom of the cleaning box 7, and a jacking unit of the cam jacking mechanism 2 capable of being inserted into the cleaning box 7 to jack the disk substrates 8;
referring to fig. 5-7, the measuring assembly includes a driving mechanism 3, a bracket 4 and a measuring mechanism 5;
the driving mechanism 3 comprises a shell 3-1 and a rectangular frame 3-3, a motor II 3-2 is arranged in the inner cavity of the shell 3-1, a lead screw 3-4 is arranged in the inner cavity of the rectangular frame 3-3, one end of the lead screw 3-4 extends out of the rectangular frame 3-3 to be connected with the output end of the motor II 3-2, the other end of the lead screw 3-4 is connected with the bearing inner ring on the side wall of the rectangular frame 3-3, the outer wall of the lead screw 3-4 is in threaded connection with a movable seat 3-5, the movable seat 3-5 is T-shaped, a vertical rod is in threaded connection with the lead screw 3-4, and a cross rod is in sliding connection with the top end of the rectangular frame 3-3;
after the motor II 3-2 is powered on, the motor II 3-2 drives the screw rod 3-4 to start rotating, and the movable seat 3-5 moves leftwards or rightwards under the action of threaded connection with the screw rod 3-4;
the bracket 4 comprises a vertical plate 4-1 arranged at the top end of the movable seat 3-5 and a transverse plate 4-2 arranged at the top end of the vertical plate 4-1;
the measuring mechanism 5 comprises a rectangular plate 5-1 and fixed seats 5-2 arranged at the left end and the right end of the front side wall of the rectangular plate 5-1, a track is arranged at the front side of the fixed seat 5-2, a sliding seat 5-3 is arranged on the track and can be fixed through bolts, a measuring seat 5-4 is arranged at the front side of the sliding seat 5-3, the measuring seat 5-4 is formed by a hollow disc and a turntable rotationally connected with the inner cavity of the measuring seat 5-4, a laser measuring head 5-5 is arranged at the inner side of the measuring seat 5-4, the sliding seat 5-3 can adjust the transverse position of the laser measuring head 5-5, the laser measuring head 5-5 is connected with the turntable of the inner cavity of the measuring seat 5-4, and the measuring seat 5-4 can adjust and fix the angle of the laser measuring head 5-5;
referring to fig. 3-4, the cam jack mechanism 2 comprises a base 2-1, a support plate 2-3 is mounted at the bottom end of the base 2-1, a base 2-2 is mounted at the rear side of the support plate 2-3, a stand 2-4 and two supports 2-7 are mounted at the left side of the top end of the base 2-1 from the front rear side, a certain distance exists between the two supports 2-7, a motor 1-5 is mounted at the rear side of the stand 2-4, a rotating shaft 2-8 is mounted at the inner side of the two supports 2-7, bearings are arranged at the joint of the rotating shaft 2-8 and the two supports 27, one end of the rotating shaft 2-8 extends out of the support 2-7 close to the stand 2-4 and is connected with the output end of the motor 1-5 through a coupler 2-6, a cam is mounted on the outer wall of the rotating shaft 2-8 and consists of 25 cam pieces in parallel, the protruding parts of the 25 cam sheets are evenly staggered in a ring shape, the protruding interval angle is 14.4 degrees, the protruding side faces of the protruding parts of the 25 cam sheets which are staggered form a gear shape, the cam sheets are composed of rotating wheels 2-9 and protruding parts 2-10 which are arranged on the outer walls of the rotating wheels 2-9, shaft rods 2-11 are arranged at the bottom ends of the inner walls of two supports 27, one ends of 25 levers 212 are sleeved on the outer walls of the shaft rods 2-11, the positions of the 25 levers 2-12 correspond to the positions of the 25 cam sheets, a frame body 2-13 is arranged on the right side of the top end of the base 2-1, 25 jacking units are sequentially spliced on the inner walls of the frame body 2-13 from front to back, the 25 jacking units correspond to the positions of the other ends of the 25 levers 2-12, the bottom ends of the 25 jacking units are in contact connection with the other ends of the 25 levers 2-12, the top ends of the frame bodies 2-13 are provided with top seats 2-14, the jacking units comprise bottom hauling bars 2-15, the top ends of the hauling bars 2-15 extend out of the top seats 2-14 to be provided with supporting seats 2-16, the top ends of the supporting seats 2-16 are provided with supporting pieces 2-7, and the positions of the 25 supporting pieces 2-17 correspond to the positions of 25 disk substrates 8 in the cleaning box 7;
when the disk substrate 8 in the cleaning box 7 is detected, an external power supply of a motor I2-5 is connected, the motor I2-5 drives a rotating shaft 2-8 to rotate through a coupler 2-6, the rotating shaft 2-8 drives 25 cam pieces to start rotating, when a bulge 2-10 in one cam piece of the 25 cam pieces is contacted with the left end of a lever 2-12, the lever 2-12 starts rotating with an origin of 2-11 positions of a shaft lever, the right end of the lever 2-12 swings upwards, the lever 212 drives a jacking unit to jack a supporting piece 217 at a corresponding position, the supporting piece 217 is positioned between two laser measuring heads 55, and the two laser measuring heads detect the supporting piece 217;
when the next adjacent supporting piece 217 is detected, along with the continuous rotation of the motor I25, the bulge 210 in the adjacent cam piece is contacted with the left end of the lever 212, the lever 212 starts to rotate by the origin of the shaft lever 211, the right end of the lever 212 swings upwards, the lever 212 drives the jacking unit to lift the supporting piece 217 at the corresponding position, meanwhile, the motor II 32 drives the screw 34 to start to rotate, the movable seat 35 starts to move transversely under the action of the screw 34 in threaded connection, the movable seat 35 drives the two laser measuring heads 55 to move transversely through the bracket 4, the position of the supported supporting piece 217 corresponds to that of the supported supporting piece 217, the supporting piece 217 is positioned between the two laser measuring heads 55, and the two laser measuring heads detect the supporting piece 217;
the above-mentioned actions are repeated until all the disk substrates 8 in the cleaning box 7 are detected, the repeated precision is 0.5um to meet the test requirement, the UPH is 3800 to meet the production requirement, and the mixing of different products is prevented to meet the process requirement.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides an use cam mechanism's measurement system, sets up at the top of board, its characterized in that: the device comprises a measuring assembly arranged on one side of a machine table and a cam jacking assembly arranged at the position, corresponding to the measuring assembly, of the top end of the machine table, wherein the measuring assembly comprises a measuring mechanism, a bracket for supporting the measuring mechanism and a driving mechanism for driving the bracket to transversely move.
2. A measuring system employing a cam mechanism as claimed in claim 1, wherein: the cam jacking component comprises a cam, a supporting frame for supporting the cam and a power element for driving the cam to rotate, one end of a lever is arranged at the bottom end of the cam, and a jacking mechanism is arranged at the top of the other end of the lever.
3. A measuring system employing a cam mechanism as claimed in claim 2, wherein: the cam comprises a rotating shaft and a plurality of cam pieces which are arranged on the outer wall of the rotating shaft in parallel, wherein the protruding parts of the plurality of cam pieces are uniformly staggered in a ring shape, the protruding parts of the plurality of cam pieces are arranged at a certain angle interval, and the side face of the cam piece forms a gear shape.
4. A measuring system employing a cam mechanism according to claim 3, wherein: the jacking mechanism comprises a plurality of ejector rods, a supporting piece arranged at the top ends of the ejector rods and a frame for the ejector rods to move up and down, and the ejector rods are uniformly arranged on the inner side of the frame from front to back.
5. A measuring system employing a cam mechanism as defined in claim 4, wherein: the lever comprises a shaft rod and a plurality of bar-shaped rods, one ends of the bar-shaped rods are arranged on the outer wall of the shaft rod, one ends of the bar-shaped rods can be in contact with the protrusions of the cam pieces, and the other ends of the bar-shaped rods are in contact with the bottom ends of the ejector rods.
6. A measuring system employing a cam mechanism as defined in claim 5, wherein: the cam sheets and the bar rods are positioned on the same plane, and the bar rods are positioned on the same plane.
7. A measuring system employing a cam mechanism as defined in claim 6, wherein: when the convex part of any one of the cam sheets is contacted with the bar-shaped rod at the corresponding position, one end of the bar-shaped rod rotates around the shaft rod, and the other end of the bar-shaped rod lifts the ejector rod to rise.
8. A measuring system employing a cam mechanism as defined in claim 7, wherein: a cam plate, a bar-shaped rod rotating around the shaft rod and a push rod at corresponding positions form a lever lifting connecting rod.
9. A measuring system employing a cam mechanism according to any one of claims 1-8, wherein: the measuring mechanism comprises a plurality of laser measuring heads and a frame body for adjusting the positions of the laser measuring heads.
10. A measuring system employing a cam mechanism as claimed in claim 9, wherein: the driving mechanism comprises a motor II, and the motor II converts the rotary motion of the motor II into the transverse reciprocating motion of the movable seat through the threaded connection of the screw rod and the movable seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310481635.7A CN116564840A (en) | 2023-04-27 | 2023-04-27 | Measuring system using cam mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310481635.7A CN116564840A (en) | 2023-04-27 | 2023-04-27 | Measuring system using cam mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116564840A true CN116564840A (en) | 2023-08-08 |
Family
ID=87487306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310481635.7A Pending CN116564840A (en) | 2023-04-27 | 2023-04-27 | Measuring system using cam mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116564840A (en) |
-
2023
- 2023-04-27 CN CN202310481635.7A patent/CN116564840A/en active Pending
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