CN116551608B - Auxiliary assembly jig for polishing table and assembly method for polishing table - Google Patents

Abstract

The application provides an auxiliary assembly jig for a polishing table and an assembly method for the polishing table, wherein an upper polishing disk of the polishing table comprises at least one first positioning groove, a lower polishing disk comprises at least one first positioning piece, the auxiliary assembly jig for the polishing table comprises a first annular piece, a second annular piece, at least one group of first positioning pieces and at least one group of second positioning pieces, the first annular piece is detachably arranged on the circumference of the upper polishing disk, any first positioning piece is connected with the first annular piece, the second annular piece is detachably arranged on the circumference of the lower polishing disk, any second positioning piece is connected with the second annular piece, any first positioning piece comprises a second positioning piece, any second positioning piece comprises a third positioning piece, and when the second positioning piece is aligned and connected with the corresponding third positioning piece, any first positioning piece is embedded in the corresponding first positioning groove; the auxiliary assembly jig for the polishing table can effectively realize the accurate assembly of the upper polishing disc and the lower polishing disc, and the installation process is safe, reliable and quick.

Description

Auxiliary assembly jig for polishing table and assembly method for polishing table

Technical Field

The application relates to the field of semiconductor device manufacturing, in particular to an auxiliary assembly jig for a polishing table and an assembly method for the polishing table.

Background

Chemical Mechanical Polishing (CMP) equipment is mainly used for polishing and grinding the surface of a wafer during wafer processing. In polishing a wafer, the wafer needs to be transferred to a polishing table to be polished and ground.

The polishing table comprises an upper polishing disk and a lower polishing disk which are of circular plate-shaped structures, are parallel and are in fit arrangement, and are detachably connected. The upper polishing disk is provided with a polishing pad, and the wafer is polished on the polishing pad. When the upper polishing disc has a problem, the upper polishing disc needs to be disassembled and overhauled and then assembled again, and in the process of assembling the upper polishing disc, a worker usually needs to hold the upper polishing disc by using both hands and directly mount the upper polishing disc on the lower polishing disc without any auxiliary jig. The upper polishing disk and the lower polishing disk are arranged in a certain installation position, so that the requirement on the installation accuracy is high, and the upper polishing disk and the lower polishing disk are oppositely attached and installed surface to surface, so that the upper polishing disk can fall instantly in the process of falling installation while aligning, and certain personal injury or equipment damage is caused.

As shown in fig. 1, the polishing table 200 includes an upper polishing platen 210 and a lower polishing platen 220, both of which are circular plate-like structures, and in order to facilitate surface-to-surface alignment assembly of both, the upper polishing platen 210 includes at least one first positioning groove 211, and the lower polishing platen 220 includes at least one first positioning piece 221, which are aligned when the upper polishing platen 210 is attached to the lower polishing platen 220 and either first positioning piece 221 is inserted into the corresponding first positioning groove 211. Generally, the lower polishing pad 220 includes two first positioning members 221, and for distinction, the diameters of the two first positioning members 221 are different, and correspondingly, the diameters of the two corresponding first positioning grooves 211 are also different, and can be distinguished by naked eyes, so that an operator can pre-judge the assembly direction of the upper polishing pad 210 according to the difference of the diameters of the two first positioning grooves 211 above the upper polishing pad 210. The two first positioning members 221 are matched with the two first positioning grooves 211, so that rapid and accurate assembly is facilitated, and the relative stability of the upper polishing disc 210 and the lower polishing disc 220 in the horizontal direction after assembly can be effectively ensured.

Therefore, an auxiliary assembly jig for the polishing table needs to be found so as to realize accurate and convenient assembly of the upper polishing disc and the lower polishing disc.

Disclosure of Invention

The application aims to provide an auxiliary assembly jig for a polishing table and an assembly method for the polishing table, which can effectively improve the accuracy and safety of assembly of an upper polishing disk and a lower polishing disk.

In order to achieve the above purpose, the present application proposes the following technical scheme:

in a first aspect, an auxiliary assembly jig for a polishing table is provided, the polishing table comprises an upper polishing disc and a lower polishing disc, the upper polishing disc comprises at least one first positioning groove, the lower polishing disc comprises at least one first positioning piece, the auxiliary assembly jig for the polishing table comprises a first annular piece, a second annular piece, at least one group of first positioning pieces and at least one group of second positioning pieces, the first annular piece is detachably arranged on the circumference of the upper polishing disc in a ring-shaped manner, any one of the first positioning pieces is connected with the first annular piece, the second annular piece is detachably arranged on the circumference of the lower polishing disc in a ring-shaped manner, and any one of the second positioning pieces is connected with the second annular piece;

any one of the first positioning components comprises a second positioning piece, any one of the second positioning components comprises a third positioning piece, and when the second positioning piece is aligned and connected with the corresponding third positioning piece, any one of the first positioning pieces is embedded in the corresponding first positioning groove so as to realize the assembly of the upper polishing disk and the lower polishing disk.

In a preferred embodiment, any one of the first positioning assemblies further includes a connecting member, the connecting member is connected to the first ring member, and the second positioning member is movably sleeved on the connecting member;

when the second positioning piece rotates to a first position towards the circle center direction of the upper polishing disk, the second positioning piece is matched and connected with the first positioning groove;

when the second positioning piece rotates to a second position in the direction away from the center of the upper polishing disk, the second positioning piece is connected with the third positioning piece.

In a preferred embodiment, the second positioning member includes a slider and a first positioning pin, the first positioning pin is disposed on a surface of the slider, which is close to the upper polishing disk, and when the second positioning member rotates to the first position, the first positioning pin is inserted into the first positioning groove.

In a preferred embodiment, the second positioning member further includes a second positioning pin, the second positioning pin is disposed on a surface of the slider, which is far away from the upper polishing disk, and the third positioning member is provided with a second positioning groove, and when the second positioning member rotates to the second position, the second positioning pin is inserted into the second positioning groove.

In a preferred embodiment, the first positioning assembly further comprises a torsion spring, the torsion spring is sleeved on the connecting piece, one end of the torsion spring is connected with the first annular piece, and the other end of the torsion spring is connected with the second positioning piece.

In a preferred embodiment, the first annular member is provided with at least one third positioning groove with an opening facing the lower polishing disc, at least part of the connecting member is arranged in the third positioning groove, and the connecting member is connected with the bottom of the third positioning groove and extends along the depth direction of the third positioning groove.

In a preferred embodiment, the second positioning member is slidably disposed along the connecting member near or far from the bottom of the third positioning groove.

In a preferred embodiment, any of the second positioning assemblies further comprises a fourth positioning member slidably coupled to the third positioning member for movement toward or away from the first positioning member.

In a preferred embodiment, the fourth positioning member is provided with a fourth positioning groove, an opening of the fourth positioning groove faces the first positioning member, and when the fourth positioning member moves towards the first positioning member, a part of the first positioning member is clamped in the fourth positioning groove.

In a preferred embodiment, the polishing table auxiliary assembly fixture further includes a pair of holding structures, and any one of the holding structures is connected to a side of the first ring member away from the lower polishing disc.

In a second aspect, there is provided a polishing table assembly method, the polishing table including an upper polishing platen and a lower polishing platen, the upper polishing platen including at least one first positioning groove, the lower polishing platen including at least one first positioning member, the polishing table auxiliary assembly jig including a first ring member, a second ring member, at least one set of first positioning members, and at least one set of second positioning members, the assembly method comprising:

the first annular piece is sleeved on the circumference of the upper polishing disk and positioned, and the second annular piece is sleeved on the circumference of the lower polishing disk and positioned;

the upper polishing disk is close to the lower polishing disk along the vertical direction of the lower polishing disk, and a second positioning piece included in any one of the first positioning components is aligned and connected with a third positioning piece included in the corresponding second positioning component, so that the first positioning piece is embedded in the corresponding first positioning groove;

the first ring member is removed from the upper polishing platen and the second ring member is removed from the lower polishing platen.

Compared with the prior art, the application has the following beneficial effects:

the application provides an auxiliary assembly jig for a polishing table and an assembly method for the polishing table, wherein the polishing table comprises an upper polishing disk and a lower polishing disk, the upper polishing disk comprises at least one first positioning groove, the lower polishing disk comprises at least one first positioning piece, the auxiliary assembly jig for the polishing table comprises a first annular piece, a second annular piece, at least one group of first positioning pieces and at least one group of second positioning pieces, the first annular piece is detachably arranged on the circumference of the upper polishing disk, any one first positioning piece is connected with the first annular piece, the second annular piece is detachably arranged on the circumference of the lower polishing disk, any one second positioning piece is connected with the second annular piece, any one first positioning piece comprises a second positioning piece, any one second positioning piece comprises a third positioning piece, and when the second positioning piece is aligned and connected with the corresponding third positioning piece, any one first positioning piece is embedded in the corresponding first positioning groove to realize the assembly of the upper polishing disk and the lower polishing disk; the auxiliary assembly jig for the polishing table can effectively realize the accurate assembly of the upper polishing disc and the lower polishing disc, and the installation process is safe, reliable and quick;

any one of the first positioning components further comprises a connecting piece, the connecting piece is connected with the first annular piece, and the second positioning piece is movably sleeved on the connecting piece; when the second positioning piece rotates to the first position towards the circle center direction of the upper polishing disk, the second positioning piece is matched and connected with the first positioning groove; when the second positioning piece rotates to a second position in the direction away from the center of the upper polishing disk, the second positioning piece is connected with the third positioning piece; according to the auxiliary assembly jig for the polishing table, the first positioning component is arranged, so that the auxiliary assembly jig can be used for accurately and quickly mounting the upper polishing disk on the lower polishing disk through the cooperation of the first positioning component and the second positioning component;

of course, the present application is only required to achieve at least one of the above technical effects.

Drawings

FIG. 1 is a schematic view of a structure of a polishing table in the background art when not assembled;

FIG. 2 is a schematic view showing the structure of the polishing table in accordance with the embodiment 1, in which the polishing table auxiliary assembling jig is used;

fig. 3 is an enlarged view of the first positioning assembly 30 of fig. 2;

fig. 4 is an enlarged view of the second positioning assembly 40 of fig. 2;

fig. 5 is a schematic view of the second positioning member 31 in the second position.

The marks in the figure: 200-polishing table, 210-upper polishing disk, 211-first positioning groove, 220-lower polishing disk, 221-first positioning piece, 10-first ring piece, 11-first ring piece body, 111-third positioning groove, 20-second ring piece, 30-first positioning piece, 31-second positioning piece, 311-slide block, 312-first positioning pin, 313-second positioning pin, 32-connecting piece, 40-second positioning piece, 41-third positioning piece, 411-second positioning groove, 42-fourth positioning piece, 421-fourth positioning groove, 50-holding structure.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

In the description of the present application, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "top", "side", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

Examples

As shown in fig. 2 to 5, the present embodiment provides an auxiliary assembly jig for polishing table, which is used for assembling polishing table 200, and is specifically used for mounting upper polishing disk 210 onto lower polishing disk 220, so that the two can be assembled accurately and conveniently according to the required assembly position and surface.

As shown in fig. 2, the polishing table auxiliary assembly jig includes a first ring member 10, a second ring member 20, at least one set of first positioning members 30, and at least one set of second positioning members 40. The first ring member 10 is detachably disposed around the upper polishing platen 210, and any one of the first positioning members 30 is connected to the first ring member 10. And, the second ring member 20 is detachably disposed around the lower polishing disk 220, and any one of the second positioning assemblies 40 is connected to the second ring member 20. Any one of the first positioning members 30 is correspondingly coupled to the corresponding second positioning member 40 for positioning assembly of the upper polishing platen 210 and the lower polishing platen 220. And, any one of the first positioning members 30 is used for pre-positioning the first ring member 10 and the upper polishing platen 210, and any one of the second positioning members 40 is used for pre-positioning the second ring member 20 and the lower polishing platen 220.

Preferably, the first positioning assembly 30 includes at least two groups, and the second positioning assembly 40 includes at least two groups, so as to realize rapid and precise docking in a mode of correspondingly matching two groups.

Specifically, the first ring member 10 is a hollow ring formed by connecting at least two circular arc members with the same diameter end to end, and the central angles of the at least two circular arc members are the same or different. Preferably, any one of the arc members has a semicircular arc structure. One end of each of the adjacent circular arc members is hinged, so that the two circular arc members can be opened and closed when the first annular member 10 is mounted on the upper polishing disc 210. The other ends of the adjacent arc pieces are detachably connected, such as by clamping the mutually matched clamping assemblies, or by combining screws, bolts, nuts and the like, so that the first annular piece 10 and the upper polishing disc 210 are fixed after being positioned, and in this embodiment, the structure reliability is improved by adopting a screw and nut matched mode. The second ring member 20 has a similar connection structure to the first ring member 10, and is also a hollow ring formed by connecting at least two circular arc members with the same diameter end to end.

Further, since the first ring member 10 and the upper polishing plate 210 are fixed and then are required to be moved and transferred frequently, in order to improve the operation safety, the first ring member 10 includes a first ring member body 11 and an annular edge connected to the first ring member body 11, the first ring member body 11 is attached to a side surface of the upper polishing plate 210, and the annular edge is attached to a side surface of the upper polishing plate 210 facing the lower polishing plate 220, so as to support the upper polishing plate 210 from the bottom. Specifically, the first ring body 11 is attached to the arcuate outer wall of the upper polishing platen 210, and the annular rim is in opposing contact with the end surface of the second ring 20 when assembled. The width of the first ring body 11 and the width of the annular edge are not limited in this embodiment, and the thickness of the first ring body 11 that is greater than, equal to, or less than the thickness of the upper polishing disc 210 is one of the implementation manners in this embodiment. The second ring member 20 may have any wrapping structure, and the width thereof is not limited as long as it has no load-bearing requirements. In particular, the second ring member 20 is positioned in the circumferential direction of the side of the lower polishing platen 220 adjacent to the upper polishing platen 210.

And, as shown in fig. 2 to 4, any one of the first positioning components 30 includes a second positioning member 31, any one of the second positioning components 40 includes a third positioning member 41, and when the upper polishing platen 210 approaches to the lower polishing platen 220 and the second positioning member 31 is aligned with the corresponding third positioning member 41, the first positioning member 221 provided on any one of the lower polishing platens 220 is embedded in the first positioning groove 211 provided on the corresponding upper polishing platen 210, so as to realize the assembly of the upper polishing platen 210 and the lower polishing platen 220.

The first positioning assembly 30 further includes a connector 32 and a torsion spring (not shown). The connecting piece 32 is connected with the first ring-shaped piece 10, and the length direction of the connecting piece 32 is perpendicular to the circumference formed by the first ring-shaped piece body 11. The second positioning member 31 is movably sleeved on the connecting member 32, the second positioning member 31 can slide along the length direction of the connecting member 32 to adjust the position of the second positioning member on the connecting member 32, and the second positioning member 31 can rotate 360 ° around the connecting member 32 as an axis to adjust the direction of the second positioning member towards or away from the upper polishing disk 210. When the second positioning member 31 rotates to the first position toward the center of the upper polishing platen 210, the second positioning member 31 is exactly aligned with the first positioning groove 211, and thus the second positioning member 31 is coupled with the first positioning groove 211 (the first positioning pin 312 is inserted into the first positioning groove 211 in the following embodiment) for the pre-positioning of the first ring member 10 and the upper polishing platen 210, as shown in fig. 5. When the second positioning member 31 is rotated to the second position (the position shown in fig. 3) away from the center of the upper polishing platen 210, the second positioning member 31 is position-matched with the third positioning member 41, and thus the connection of the second positioning member 31 and the third positioning member 41 is achieved for positioning the upper polishing platen 210 and the lower polishing platen 220, as shown in fig. 2 and 3.

As shown in fig. 3, the second positioning member 31 includes a slider 311, a first positioning pin 312, and a second positioning pin 313, wherein the first positioning pin 312 is disposed on a side surface of the slider 311 near the upper polishing disk 210, and the second positioning pin 313 is disposed on a side surface of the slider 311 far from the upper polishing disk 210. Preferably, the first positioning pin 312 and the second positioning pin 313 are both located at one end of the slider 311 away from the connecting piece 32. Preferably, the slider 311 has a plate-like structure, the connecting member 32 has a round bar structure, one end of the slider 311 is sleeved on the connecting member 32, and the first positioning pin 312 and the second positioning pin 313 are respectively arranged on two opposite surfaces of the slider 311. Therefore, when the second positioning member 31 rotates to the first position, the first positioning pin 312 is inserted into the first positioning groove 211.

And the torsion spring is sleeved on the connecting piece 32, one end of the torsion spring is connected with the first annular piece 10, and the other end of the torsion spring is connected with the second positioning piece 31. Thereby realizing automatic resetting after the sliding block 311 rotates to a certain angle around the connecting piece 32 and loosens.

As shown in fig. 2, the third positioning member 41 is fixedly connected with the second annular member 20, and corresponds to the second positioning member 31, the third positioning member 41 is provided with a second positioning slot 411, and when the second positioning member 31 rotates to the second position, the second positioning pin 313 is inserted into the second positioning slot 411. The second positioning slot 411 may be a hollow slot or a U-shaped slot with a regular or irregular shape, and as a preferred embodiment, the second positioning slot 411 in this embodiment adopts a U-shaped slot with an opening facing away from the second ring member 20, so that on the premise of effectively improving the assembly accuracy of the upper polishing disc 210 and the lower polishing disc 220, the convenience of inserting the second positioning pin 313 and the third positioning member 41 during assembly is further improved.

The connecting member 32 may be embedded in the first ring member 10 or connected to the outside of the first ring member 10. In order to improve the compactness, the connecting piece 32 in the present embodiment is embedded in the first ring-shaped piece 10, and further, the connecting piece 32 is embedded in the first ring-shaped piece body 11. Specifically, the first annular member body 11 is provided with at least one third positioning groove 111 with an opening facing the lower polishing disc 220, at least part of the connecting member 32 is arranged in the third positioning groove 111, and the connecting member 32 is connected with the bottom of the third positioning groove 111 and extends along the depth opposite direction of the third positioning groove 111. Therefore, one end of the torsion spring is connected to the bottom of the third positioning groove 111, the other end is connected to the slider 311, and the slider 311 is located at the second position in the natural state of the torsion spring.

Preferably, when the connecting piece 32 is embedded in the third positioning groove 111, the width of the sliding block 311 is smaller than the width of the third positioning groove 111, and when the sliding block 311 is located at the first position or the second position, part of the sliding block 311 is embedded in the third positioning groove 111. The second positioning member 31 is slidably disposed along the connecting member 32 toward or away from the bottom of the third positioning groove 111. With this structure, part of the connecting member 32 extends out of the third positioning groove 111, so as to avoid interference of the first ring body 11 when the first position and the second position of the slider 311 need to be switched. That is, when the second positioning member 31 needs to adjust the position orientation, the sliding block 311 slides out of the third positioning slot 111 and rotates to the preset orientation, and then the sliding block 311 slides into the third positioning slot 111 again.

And, any one of the second positioning assemblies 40 further includes a fourth positioning member 42 slidably coupled to the third positioning member 41 to move toward or away from the first positioning member 221. Preferably, the third positioning member 41 extends in a direction away from the second ring member 20. Further, the third positioning member 41 has a bar-shaped structure with a second positioning slot 411 having a U-shaped opening at one end, and the fourth positioning member 42 is attached to the third positioning member 41 and disposed in parallel.

As shown in fig. 2 and 4, a sliding groove is formed on one side of the third positioning member 41 facing the fourth positioning member 42, and a part of the fourth positioning member 42 is embedded in the sliding groove to realize the sliding. Preferably, the fourth positioning member 42 is provided with a fourth positioning groove 421, and the opening of the fourth positioning groove 421 faces the first positioning member 221, and further preferably, the fourth positioning member 42 has a U-shaped structure. When the fourth positioning member 42 moves towards the first positioning member 221, a portion of the first positioning member 221 is clamped in the fourth positioning groove 421. It will be appreciated that the fourth positioning member 42 is disposed perpendicular to the first positioning member 221. Therefore, when the fourth positioning member 42 slides along the third positioning member 41 toward the inside of the second ring member 20, the second ring member 20 and the lower polishing pad 220 achieve a predetermined position when the first positioning member 221 is vertically clamped with the fourth positioning member 42.

It should be noted that, the second ring member 20 is provided with a through hole for the fourth positioning member 42 to pass through, and after the second ring member 20 and the lower polishing disc 220 are pre-positioned and the second ring member 20 is fixed on the lower polishing disc 220 circumferentially, the fourth positioning member 42 needs to be withdrawn from the second ring member 20 to avoid the interference between the upper polishing disc 210 and the lower polishing disc 220. And, the auxiliary assembly fixture further includes at least a pair of holding structures 50, wherein any holding structure 50 is connected to a side of the first ring member 10 away from the lower polishing disk 220. The oppositely disposed holding structure 50 is used for an operator to hold and pull the upper polishing pad 210 to more easily and safely move it over the lower polishing pad 220 and to align it for assembly.

Based on the polishing table auxiliary assembly jig, the embodiment further provides a polishing table assembly method, which includes:

s10, sleeving and positioning the first annular piece 10 on the circumference of the upper polishing disk 210, and sleeving and positioning the second annular piece 20 on the circumference of the lower polishing disk 220;

s20, the upper polishing disk 210 is close to the lower polishing disk 220 along the vertical direction of the lower polishing disk 220, and the second positioning piece 31 included in any first positioning component 30 is aligned and connected with the third positioning piece 41 included in the corresponding second positioning component 40, so that the first positioning piece 221 is embedded in the corresponding first positioning groove 211;

s30, removing the first ring member 10 from the upper polishing platen 210, and removing the second ring member 20 from the lower polishing platen 220.

The step S10 specifically includes:

s11, sleeving the first annular piece 10 on the circumferential direction of the upper polishing disc 210;

s12, after the sliding block 311 moves to slide out of the third positioning groove 111 along the direction that the connecting piece 32 deviates from the upper polishing disk 210, the sliding block 311 rotates to a first position so that the first positioning pins 312 are embedded into the corresponding first positioning grooves 211, and the pre-positioning of the first annular piece 10 and the upper polishing disk 210 is realized;

s13, fixing the first annular piece 10 so that the first annular piece body 11 is attached to the periphery of the upper polishing disc 210, and attaching an annular wrapping edge to one side of the upper polishing disc 210 facing the lower polishing disc 220;

s14, after the sliding block 311 moves to slide out of the third positioning groove 111 along the direction that the connecting piece 32 deviates from the upper polishing disk 210, the first positioning pin 312 exits the corresponding first positioning groove 211, and the sliding block 311 is loosened so as to be rotationally reset to the second position under the action of the torsion spring;

s15, inserting the fourth positioning piece 42 into the second annular piece 20 along the third positioning piece 41 and clamping the fourth positioning piece with the first positioning piece 221 to realize the pre-positioning of the second annular piece 20 and the lower polishing disc 220;

s16, fixing the second annular piece 20 to be attached to the circumference of the lower polishing disc 220;

and S17, taking out the fourth positioning piece 42.

The execution sequence of steps S11 to S14 and steps S15 to S17 is not limited.

In summary, the auxiliary assembly jig for the polishing table in the embodiment can effectively realize the accurate assembly of the upper polishing disc and the lower polishing disc, and the installation process is safe, reliable and quick; further, the polishing table auxiliary assembly jig not only can realize the pre-positioning installation of the polishing table auxiliary assembly jig and the upper polishing disc through the first positioning assembly, but also can accurately and quickly install the upper polishing disc on the lower polishing disc through the cooperation of the first positioning assembly and the second positioning assembly.

All the above optional technical solutions can be combined to form an optional embodiment of the present application, and any multiple embodiments can be combined, so as to obtain the requirements of coping with different application scenarios, which are all within the protection scope of the present application, and are not described in detail herein.

It should be noted that the above-mentioned embodiments are only preferred embodiments of the present application, and are not intended to limit the present application, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (5)

1. The polishing table comprises an upper polishing disc and a lower polishing disc, the upper polishing disc comprises at least one first positioning groove, the lower polishing disc comprises at least one first positioning piece, and the polishing table is characterized by comprising a first annular piece, a second annular piece, at least one group of first positioning components and at least one group of second positioning components, wherein the first annular piece is detachably arranged on the circumference of the upper polishing disc in a ring mode, any one of the first positioning components is connected with the first annular piece, the second annular piece is detachably arranged on the circumference of the lower polishing disc in a ring mode, and any one of the second positioning components is connected with the second annular piece;

any one of the first positioning components comprises a second positioning piece, a connecting piece and a torsion spring, and any one of the second positioning components comprises a third positioning piece and a fourth positioning piece, when the second positioning piece is aligned and connected with the corresponding third positioning piece, any one of the first positioning pieces is embedded in the corresponding first positioning groove so as to realize the assembly of the upper polishing disk and the lower polishing disk; the connecting piece is connected with the first annular piece, and the second positioning piece is movably sleeved on the connecting piece; when the second positioning piece rotates to a first position towards the circle center direction of the upper polishing disk, the second positioning piece is matched and connected with the first positioning groove; when the second positioning piece rotates to a second position in the direction away from the center of the circle of the upper polishing disk, the second positioning piece is connected with the third positioning piece; the torsion spring is sleeved on the connecting piece, one end of the torsion spring is connected with the first annular piece, and the other end of the torsion spring is connected with the second positioning piece; the fourth positioning piece is in sliding connection with the third positioning piece so as to move towards or away from the first positioning piece;

the second positioning piece comprises a sliding block and a first positioning pin, the first positioning pin is arranged on the surface of one side, close to the upper polishing disc, of the sliding block, and when the second positioning piece rotates to the first position, the first positioning pin is inserted into the first positioning groove;

the first annular piece is provided with at least one third positioning groove with an opening facing the lower polishing disc, at least part of the connecting piece is arranged in the third positioning groove, and the connecting piece is connected with the bottom of the third positioning groove and extends along the depth opposite direction of the third positioning groove;

the second locating piece is arranged along the connecting piece and is close to or far away from the bottom of the third locating groove in a sliding mode.

2. The polishing table auxiliary assembly jig according to claim 1, wherein the second positioning member further comprises a second positioning pin, the second positioning pin is disposed on a surface of the slider, which is far away from the upper polishing disc, the third positioning member is provided with a second positioning groove, and when the second positioning member rotates to the second position, the second positioning pin is inserted into the second positioning groove.

3. The polishing station assist assembly fixture of claim 1, wherein the fourth positioning member is provided with a fourth positioning slot, an opening of the fourth positioning slot faces the first positioning member, and when the fourth positioning member moves toward the first positioning member, a portion of the first positioning member is clamped in the fourth positioning slot.

4. The polishing station assist assembly fixture of claim 1 further comprising a pair of gripping structures, any of the gripping structures being connected to a side of the first ring member remote from the lower polishing platen.

5. A polishing table assembling method applied to the polishing table auxiliary assembling jig according to claim 1, characterized in that the assembling method comprises: the first annular piece is sleeved on the circumference of the upper polishing disk and positioned, and the second annular piece is sleeved on the circumference of the lower polishing disk and positioned;

the upper polishing disk is close to the lower polishing disk along the vertical direction of the lower polishing disk, and a second positioning piece included in any one of the first positioning components is aligned and connected with a third positioning piece included in the corresponding second positioning component, so that the first positioning piece is embedded in the corresponding first positioning groove;

the first ring member is removed from the upper polishing platen and the second ring member is removed from the lower polishing platen.