CN116540538A

CN116540538A - Water consumption adjusting method and system

Info

Publication number: CN116540538A
Application number: CN202310471694.6A
Authority: CN
Inventors: 王松
Original assignee: Beijing Jingyi Automation Equipment Co Ltd
Current assignee: Beijing Jingyi Automation Equipment Co Ltd
Priority date: 2023-04-27
Filing date: 2023-04-27
Publication date: 2023-08-04

Abstract

The invention relates to the technical field of computers, and provides a water consumption adjusting method and a system, wherein the method comprises the following steps: acquiring a turbidity sensor value and an acid-base sensor value; respectively carrying out fuzzy operation based on the value of the turbidity sensor and the value of the acid-base sensor to obtain a turbidity fuzzy set and an acidity fuzzy set; determining a water inlet credibility set based on the turbidity fuzzy set and the acidity fuzzy set, and determining a first credibility output based on the water inlet credibility set and a preset fuzzy control table; and determining a target new inflow water flow based on the first credibility output, and controlling the new inflow water to flow into the water regulation system according to the target new inflow water flow. In the water consumption adjusting process, the fuzzy control operation is carried out according to the turbidity sensor value and the acid-base sensor value, and the target new water inflow rate is determined, so that the water inflow rate flowing into the water consumption adjusting system is scientifically and accurately controlled according to the target new water inflow rate, the water consumption is reduced, and the energy conservation and emission reduction are realized.

Description

Water consumption adjusting method and system

Technical Field

The invention relates to the technical field of computers, in particular to a water consumption adjusting method and system.

Background

The water tank of the semiconductor waste gas treatment device generally has four liquid level sensors, namely a low (LL) liquid level sensor, a low (L) liquid level sensor, a high (H) liquid level sensor and a high (HH) liquid level sensor, and the existing logic is generally: when the high liquid level sensor detects that the liquid level reaches the H liquid level, water starts to drain, water starts to enter when the liquid level reaches the L liquid level, and the process is repeated. In the above logical case, one exhaust treatment station requires about 7200L (liters) of water per day. A semiconductor plant often requires hundreds or thousands of exhaust treatment devices, and therefore the amount of water required is staggering, resulting in wasted water.

Disclosure of Invention

The invention provides a water consumption adjusting method and a system, which aim to reduce water consumption and realize energy conservation and emission reduction.

In a first aspect, the present invention provides a water conditioning method comprising:

acquiring a turbidity sensor value and an acid-base sensor value;

respectively carrying out fuzzy operation based on the turbidity sensor value and the acid-base sensor value to obtain a turbidity fuzzy set and an acidity fuzzy set;

determining a water inflow credibility set based on the turbidity fuzzy set and the acidity fuzzy set, and determining a first credibility output based on the water inflow credibility set and a preset fuzzy control table;

And determining a target new water inflow rate based on the first credibility output, and controlling the new water inflow to the water regulation system according to the target new water inflow rate.

In one embodiment, the performing fuzzy operation based on the turbidity sensor value and the acid-base sensor value to obtain a turbidity fuzzy set and an acidity fuzzy set respectively includes:

matching a target turbidity membership function based on the turbidity sensor value, and matching a target acidity membership function based on the acid-base sensor value;

performing fuzzy operation based on the turbidity sensor value and the target turbidity membership function to obtain a plurality of turbidity fuzzy values, and collecting the plurality of turbidity fuzzy values to obtain the turbidity fuzzy set;

and carrying out fuzzy operation based on the acid-base sensor value and the target acidity membership function to obtain a plurality of acidity fuzzy values, and collecting the plurality of acidity fuzzy values to obtain the acidity fuzzy set.

The determining of the water inlet credibility set based on the turbidity fuzzy set and the acidity fuzzy set comprises the following steps:

combining any turbidity fuzzy value in the turbidity fuzzy set with any acidity fuzzy value in the acidity fuzzy set to obtain a plurality of turbidity acidity arrays;

And determining the minimum value in each turbidity acidity array as a water inlet credibility fuzzy value of each turbidity acidity array, and collecting the water inlet credibility fuzzy values of each turbidity acidity array to obtain the water inlet credibility set.

The determining the first reliability output based on the water inlet reliability set and a preset fuzzy control table comprises the following steps:

determining a target water inflow ambiguity of each turbidity and acidity array in the preset fuzzy control table based on a target turbidity membership function and a target acidity membership function of each turbidity and acidity array;

intersection is carried out on the water inlet credibility fuzzy value and the target water inlet fuzzy degree of each turbidity acidity array to obtain a plurality of membership degree outputs, and the membership degree outputs are collected to obtain the first credibility output.

The determining the new water inflow of the target based on the first credibility output comprises the following steps:

determining a target membership value and a target water inflow membership function based on the first reliability output;

and performing fuzzy operation based on the target membership value and the target water inflow membership function to obtain the target new water inflow.

The determining, based on the first confidence output, a target membership value and a target water inflow membership function includes:

in the first credibility output, for the same target water inflow ambiguity, determining a first membership degree output of a water inflow credibility ambiguity value with the smallest value, and deleting other second membership degree outputs;

collecting the first membership output and the third membership output to obtain updated second reliability output; the third membership output is the remaining membership output of the first confidence output divided by the first membership output and the second membership output;

determining the water inlet reliability fuzzy value with the largest value in the second reliability output as the target membership value;

and matching the target water inflow membership function according to the target water inflow ambiguity corresponding to the water inflow credibility ambiguity value with the largest value.

The fuzzy operation is performed based on the target membership value and the target water inflow membership function to obtain the target new water inflow, and the fuzzy operation comprises the following steps:

performing fuzzy operation on the target membership value and the target water inflow membership function to obtain a plurality of first new water inflow;

Calculating an average value based on the plurality of first new water inflow amounts to obtain a second new water inflow amount;

and reversely calculating the target new water inflow based on the second new water inflow and a preset conversion formula.

In a second aspect, the present invention provides a water usage regulating system of the water usage regulating method as described in the first aspect, comprising: the water tank acid-base neutralization system and the water tank filtering system;

the water tank acid-base neutralization system is used for carrying out alkaline neutralization treatment on water to be treated in the water tank to obtain circulating water;

the water tank filtering system is used for carrying out dust filtering treatment on water to be treated in the water tank to obtain circulating water.

In one embodiment, the water tank acid-base neutralization system comprises a water tank, a two-position three-way valve and a solid base catalyst filter tank;

the water outlet of the water tank is connected with the water inlet of the two-position three-way valve;

the first water outlet of the two-position three-way valve is connected with the water inlet of the solid base catalyst filter tank, and the second water outlet of the two-position three-way valve is connected with the water inlet of the water storage device of the machine; and the water outlet of the solid base catalyst filter tank is connected with the water inlet of the water storage device.

The water tank filtering system comprises a water tank, a diaphragm pump, a filter and a centrifugal water pump;

The first water outlet of the water tank is connected with the water inlet of the diaphragm pump, the water outlet of the diaphragm pump is connected with the water inlet of the filter, and the water outlet of the filter is connected with the water inlet of the water tank;

the second water outlet of the water tank is connected with the water inlet of the centrifugal water pump, and the water outlet of the centrifugal water pump is connected with the water inlet of the water storage device of the machine table;

the filter comprises a plurality of layers of filter screens;

the first position of the first water outlet is lower than the second position of the second water outlet.

In a third aspect, the present invention also provides an electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing the water usage adjustment method of the first aspect when executing the program.

In a fourth aspect, the present invention also provides a non-transitory computer readable storage medium comprising a computer program which, when executed by the processor, implements the water usage adjustment method of the first aspect.

In a fifth aspect, the invention also provides a computer program product comprising a computer program which, when executed by the processor, implements the water usage adjustment method of the first aspect.

The water consumption regulating method and system provided by the invention acquire the value of the turbidity sensor and the value of the acid-base sensor; respectively carrying out fuzzy operation based on the value of the turbidity sensor and the value of the acid-base sensor to obtain a turbidity fuzzy set and an acidity fuzzy set; determining a water inlet credibility set based on the turbidity fuzzy set and the acidity fuzzy set, and determining a first credibility output based on the water inlet credibility set and a preset fuzzy control table; and determining a target new inflow water flow based on the first credibility output, and controlling the new inflow water to flow into the water regulation system according to the target new inflow water flow. In the water consumption regulation process, fuzzy control operation is carried out according to the value of the turbidity sensor and the value of the acid-base sensor, and the target new water inflow rate is determined, so that the water inflow rate flowing into the water consumption regulation system is scientifically and accurately controlled according to the target new water inflow rate, the water consumption is reduced, and the energy conservation and emission reduction are realized.

Drawings

In order to more clearly illustrate the technical solutions of the present invention, the following description will be given with a brief introduction to the drawings used in the embodiments or the description of the prior art, it being obvious that the drawings in the following description are some embodiments of the present invention, and that other drawings can be obtained from these drawings without the inventive effort of a person skilled in the art.

FIG. 1 is a schematic flow chart of a water conditioning method provided by the present invention;

FIG. 2 is a schematic diagram of a fuzzy control water inlet and outlet system of the water tank provided by the invention;

FIG. 3 is a schematic diagram of acid-base neutralization of a water tank provided by the invention;

FIG. 4 is a schematic diagram of a tank filtration system provided by the present invention;

FIG. 5 is a flow chart of an overall scheme of the water conditioning method and system provided by the invention.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Embodiments of the present invention provide embodiments of water conditioning methods, it being noted that although a logic sequence is shown in the flow chart, the steps shown or described may be accomplished in a different order than that shown or described under certain data.

Referring to fig. 1, fig. 1 is a schematic flow chart of a water regulation method provided by the invention. The water consumption adjusting method provided by the embodiment of the invention comprises the following steps:

And 101, acquiring a turbidity sensor value and an acid-base sensor value.

In the embodiment of the invention, the machine is taken as an execution main body as an example, and the machine can be understood as a water consumption regulation management system.

Specifically, the embodiment of the invention adopts the water circulation system of the semiconductor waste gas treatment equipment, and on the basis of maintaining the waste water washing and removing function of the waste gas treatment equipment, the acid neutralization equipment and the filtering system are added in the water circulation system of the semiconductor waste gas treatment equipment, and the algorithm treatment for saving water is carried out. The treatment of semiconductor waste gas means that waste gas generated in the process of producing semiconductor is treated, waste gas generated is washed by a water circulation system, used water generates acidity in the process of treating acid gases such as hydrogen chloride gas and hydrogen fluoride gas, and dust insoluble in water is generated in the process of treating waste gas to become turbid.

Further, in the embodiment of the present invention, the main factors affecting the water inflow of the fresh water in the water circulation system are ph and turbidity, so that ph and turbidity need to be collected during the water circulation process. The pH value is acquired by an acid-base sensor, namely, the pH value is determined by acquiring the value of the acid-base sensor, and the turbidity is acquired by a turbidity sensor, namely, the value of the turbidity sensor is determined.

Therefore, referring to fig. 2, fig. 2 is a schematic diagram of a water tank fuzzy control water inlet and outlet system provided by the invention, wherein 1 represents a water tank, 2 represents a turbidity sensor, 3 represents an acid-base sensor, 4 represents a fresh water inlet pipe, 5 represents an angle valve, 6 represents a fresh water flowmeter, 7 represents a water outlet valve, 8 represents a waste water outlet pipe, and 9 represents a circulating water outlet pipe. It should be noted that, the bottom of the water tank is a relatively static area in the water tank, and the water quality change is relatively small, so that the turbidity sensor 2 and the acid-base sensor 3 are placed at the bottom of the water tank, and the stability of the measured value can be ensured.

In the water tank fuzzy control water inlet and drainage system, a water inlet of an angle valve 5 is connected with a fresh water inlet pipe 4 and used for controlling the flow of fresh water. The water inlet of the new water flowmeter 6 is connected with the water outlet of the angle valve 5, and the water outlet of the new water flowmeter 6 is connected with the water inlet of the water tank 1 for measuring the flow rate of the new water. The water inlet of the circulating water drain pipe 9 is connected with the first water outlet of the water tank 1, the water outlet of the circulating water drain pipe 9 is connected with the water inlet of the water storage device of the machine table, and the circulating water is circulated water obtained by performing alkaline neutralization treatment and dust filtration treatment on water to be treated in the water tank 1. The water inlet of the drainage valve 7 is connected with the second water outlet of the water tank 1, and the water outlet of the drainage valve 7 is connected with the water inlet of the waste water drain pipe 8 for controlling the drainage of waste water with a certain drainage flow.

Further, the acidity and alkalinity represent the strength of an acidic environment, and the more acidic the acid is, the more acidic the acid is generated in the exhaust gas treatment process, and the service life of the exhaust gas treatment device is affected, so that the acid neutralization device is added in the water circulation system of the semiconductor exhaust gas treatment device. Meanwhile, turbidity represents the amount of generated water-insoluble dust, and the more dust, the more turbid the water, the water circulation system is blocked, so a filtering system is added in the water circulation system of the semiconductor waste gas treatment equipment.

And 102, respectively carrying out fuzzy operation based on the turbidity sensor value and the acid-base sensor value to obtain a turbidity fuzzy set and an acidity fuzzy set.

The turbidity value a is divided into three fuzzy sets in advance, wherein the three fuzzy sets of the turbidity value a are low turbidity, medium turbidity and high turbidity, the low turbidity is expressed as SD, the medium turbidity is expressed as MD, and the high turbidity is expressed as LD. The turbidity membership functions corresponding to the low turbidity SD, the medium turbidity MD and the high turbidity LD are preset.

For the acidity value b, the acidity value b is divided into three fuzzy sets in advance, the three fuzzy sets of the acidity value b are low acidity, medium acidity and strong acidity, the low acidity is denoted as SA, the medium acidity is denoted as MA, and the strong acidity is denoted as LA. The acidity is low SA, and both MA and LA are preset with corresponding acidity membership functions.

The new water inflow c of the new water in the water tank is divided into five fuzzy sets in advance, wherein the five fuzzy sets of the new water inflow c are small in inflow, medium in inflow, large in inflow and large in inflow, the small in inflow is expressed as VS, the small in inflow is expressed as S, the medium in inflow is expressed as M, the large in inflow is expressed as L, and the large in inflow is expressed as VL. The water inflow is small in VS, small in S, M, large in L and large in VL, and the corresponding water inflow membership functions are preset. The new water inflow of the water tank is the new water inflow when the water tank changes water in the waste gas treatment process by the water circulation system.

Further, a turbidity membership function is determined according to the turbidity sensor value, fuzzy operation is carried out on the turbidity sensor value and the turbidity membership function, and the obtained plurality of turbidity fuzzy values are collected to obtain a turbidity fuzzy set. And meanwhile, determining an acidity membership function according to the value of the acid-base sensor, performing fuzzy operation on the value of the acid-base sensor and the output acidity membership function, and collecting a plurality of obtained acidity fuzzy values to obtain an acidity fuzzy set.

Step 103, determining a water inflow credibility set based on the turbidity fuzzy set and the acidity fuzzy set, and determining a first credibility output based on the water inflow credibility set and a preset fuzzy control table;

and 104, determining a target new water inflow rate based on the first credibility output, and controlling the new water inflow to the water regulation system according to the target new water inflow rate.

Specifically, referring to table 1, table 1 is a preset fuzzy control table. As is clear from Table 1, the larger the turbidity value a, the larger the acidity value b, the larger the fresh water inflow c, and the larger the tank replacement water amount, and vice versa. The turbidity value a is determined according to the value of the turbidity sensor, the value of the turbidity sensor is 0-100, the acidity value b is determined according to the value of the acid-base sensor, and the value of the acid-base sensor is 7-1, so that the turbidity value a and the acidity value b are converted into 0-100 through a preset conversion formula, and the fresh water inflow c is determined according to the turbidity value a and the acidity value b.

Table 1 preset fuzzy control table

Further, any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set are taken, and the obtained arbitrary two values are combined to obtain a plurality of turbidity acidity arrays. And (3) taking the minimum value of two values in each turbidity and acidity array, determining the obtained minimum value as a water inlet credibility fuzzy value of each turbidity and acidity array, and collecting all the water inlet credibility fuzzy values to obtain a water inlet credibility set. Determining the target water inflow ambiguity of each turbidity and acidity array in a preset fuzzy control table based on the target turbidity membership function and the target acidity membership function of each turbidity and acidity array, intersecting the water inflow credibility ambiguity value of each turbidity and acidity array and the target water inflow ambiguity thereof, and collecting to obtain a first credibility output.

Further, based on the first confidence output, a target new water inflow rate is determined, and the new water inflow into the water regulation system is controlled according to the target new water inflow rate.

According to the water use regulation method provided by the embodiment of the invention, the values of the turbidity sensor and the acid-base sensor are obtained; respectively carrying out fuzzy operation based on the value of the turbidity sensor and the value of the acid-base sensor to obtain a turbidity fuzzy set and an acidity fuzzy set; determining a water inlet credibility set based on the turbidity fuzzy set and the acidity fuzzy set, and determining a first credibility output based on the water inlet credibility set and a preset fuzzy control table; and determining a target new inflow water flow based on the first credibility output, and controlling the new inflow water to flow into the water regulation system according to the target new inflow water flow. In the water consumption regulation process, fuzzy control operation is carried out according to the value of the turbidity sensor and the value of the acid-base sensor, and the target new water inflow rate is determined, so that the water inflow rate flowing into the water consumption regulation system is scientifically and accurately controlled according to the target new water inflow rate, the water consumption is reduced, and the energy conservation and emission reduction are realized.

Further, step 102 performs fuzzy operation based on the turbidity sensor value and the acid-base sensor value, to obtain a turbidity fuzzy set and an acidity fuzzy set, including:

Specifically, the turbidity value a, namely the value of the turbidity sensor is 0-100, the value of the acid-base sensor is 7-1, the smaller the value is, the stronger the acidity is, and the value of the acid-base sensor needs to be reversely converted into the acidity value b of 0-100 through a preset conversion formula. Normally, the new water inflow c of the water tank is a value of 0 to 100, and thus, the new water inflow c of the water tank needs to be reversely converted into a new water inflow of 3 to 9L/min through a preset conversion formula.

In this embodiment, the preset conversion formula adopted for the conversion of the acidity value b is:

wherein x is the acid-base sensor value 7-1, and y is the acidity value b.

The numerical conversion of the new water inflow of the water tank adopts a preset conversion formula as follows:

wherein x is new water inflow, and y is new water inflow c of the water tank.

It should be further noted that the preset turbidity membership function is:

turbidity membership function for low turbidity SD

Turbidity membership function of MD in turbidity is

The turbidity membership function of the high-turbidity LD is

The preset acidity membership function is:

acidity membership function for acidity low SA

The acidity membership function of MA in acidity is

Acidity membership function of strong acidity LA is

The preset new water inflow membership function is as follows:

the new water inlet membership function with little water inlet VS is

The new water inlet membership function with less water inlet S is

The new water inflow membership function of M in inflow is

The new water inflow membership function with multiple L inflow is

The new water inflow membership function of a plurality of VL with water inflow is

It should be noted that the membership function is a function commonly used in fuzzy logic and fuzzy sets, and is used to describe the degree to which an element belongs to a fuzzy set, and is usually represented by a real number between 0 and 1. A membership function is a mathematical function whose input is an element and whose output is the membership of the element to the fuzzy set of interest.

Further, matching is performed in a preset turbidity membership function according to the turbidity value to obtain a target turbidity membership function, and matching is performed in a preset acidity membership function according to the acidity value to obtain a target acidity membership function.

Further, in this embodiment, the turbidity value is substituted into the target turbidity membership function, a plurality of turbidity fuzzy values are calculated through fuzzy operation of the target turbidity membership function, and the calculated plurality of turbidity fuzzy values are aggregated to obtain a turbidity fuzzy set. Substituting the acidity value into a target acidity membership function, calculating a plurality of acidity fuzzy values through a fuzzy operation mode of the target acidity membership function, and collecting the calculated plurality of acidity fuzzy values to obtain an acidity fuzzy set.

In one embodiment, the turbidity value a is 30, and the target turbidity membership function matched according to the turbidity value a=30 isSubstituting turbidity value a=30 into the target turbidity membership function +.>In (3) obtaining a haze value of +.>Substituting turbidity value a=30 into the target turbidity membership function +.>In (3) obtaining a haze value of +.>Haze blur value is +.>And->Collecting to obtain turbidity fuzzy set +.>The acidity value b is 60, and the target acidity membership function matched according to the acidity value b=60 is Substituting acidity value b=60 into target acidity membership function +.>In (3) obtaining an acidity blur value of +.>Substituting acidity value b=60 into target acidity membership function +.>In (3) obtaining an acidity blur value of +.>The value of the acidity blur is +.>And->Collecting to obtain acidity fuzzy set of +.>

Further, step 103 determines a feed water confidence set based on the turbidity fuzzy set and the acidity fuzzy set, comprising:

Specifically, any one of the turbidity blur values in the turbidity blur set and any one of the acidity blur values in the acidity blur set are taken, and any two values obtained are combined to obtain a plurality of turbidity acidity arrays, each of which can be expressed as (turbidity blur value, acidity blur value).

Further, comparing the two values in each turbidity acidity array to obtain the minimum value in the turbidity acidity array, namely determining the acidity fuzzy value as the minimum value of the turbidity acidity array if the turbidity fuzzy value in the turbidity acidity array is larger than the acidity fuzzy value.

Further, the minimum value of each turbidity acidity array is determined as the inlet water confidence ambiguity value of each turbidity acidity array. Further, the water inlet credibility fuzzy values of all turbidity acidity arrays are collected to obtain a water inlet credibility set.

In one embodiment, the turbidity blur set comprises turbidity blur valuesAnd->The acidity blur set contains the acidity blur value +.>And->Combining any turbidity fuzzy value in the turbidity fuzzy set with any acidity fuzzy value in the acidity fuzzy set to obtain a plurality of turbidity acidity arrays, namely, turbidity fuzzy valuesRespectively and the value of the acidity blur->And->Combining the turbidity blur values +.>Respectively and the value of the acidity blur->And->Combining to obtain multiple turbidity and acidity arrays respectivelyComparing the two values in each turbidity acidity array to obtain the minimum value in the turbidity acidity array, and determining the minimum value of each turbidity acidity array as the water inlet credibility fuzzy value of each turbidity acidity array, so that the turbidity acidity array- >The water inflow reliability fuzzy value of (2) is +.>Turbidity acidity array->The water inflow reliability fuzzy value of (2) is +.>Turbidity acidity array->The water inflow reliability fuzzy value of (2) is +.>Turbidity acidity array->The water inflow reliability fuzzy value of (2) is +.>Collecting the fuzzy values of the water inflow credibility of each turbidity acidity array to obtain a water inflow credibility set of +.>

Further, step 103 determines a first confidence output based on the incoming water confidence set and a preset fuzzy control table, including:

Specifically, each turbidity and acidity array is obtained by combining any turbidity fuzzy value and any acidity fuzzy value, so that a target turbidity membership function and a target acidity membership function are determined according to the turbidity fuzzy value and the acidity fuzzy value, and the target water inflow ambiguity of each turbidity and acidity array is determined according to the target turbidity membership function and the target acidity membership function which are matched in a preset fuzzy control table as shown in the table 1. In one embodiment, the target turbidity membership function of turbidity acidity array A is U _SD (a) The target acidity membership function is U _SA (b) The target water inflow ambiguity matched with the turbidity acidity array A in the preset fuzzy control table is U with little water inflow _VS 。

Further, intersection is performed on the water inlet reliability fuzzy value of each turbidity acidity array and the determined target water inlet fuzzy value thereof to obtain a plurality of membership degree outputs, wherein the membership degree can be expressed as (water inlet reliability fuzzy value, target water inlet fuzzy value), and the plurality of membership degree outputs are aggregated to obtain a first reliability degree output.

In one embodiment, the turbidity blur set comprises turbidity blur valuesAnd->The acidity blur set contains the acidity blur value +.>And->The four turbidity acidity arrays are obtained after arbitrary combinationHaze blur value->The determined target turbidity membership function is U _SD Haze valueThe determined target turbidity membership function is U _MD Acidity blur value +.>The determined target acidity membership function is U _MA Acidity blur valueThe determined target acidity membership function is U _LA Membership function U according to target turbidity _SD And a target acidity membership function U _MA Matching in the preset fuzzy control table as described in the above Table 1 to determine turbidity acidity array +.>Target water inflow ambiguity of (1) is U _S Membership function U according to target turbidity _MD And a target acidity membership function U _MA Matching in the preset fuzzy control table as described in the above Table 1 to determine turbidity acidity array +.>Target water inflow ambiguity of (1) is U _M Membership function U according to target turbidity _SD And a target acidity membership function U _LA Matching in the preset fuzzy control table as shown in the above table 1 to determine turbidity acidity arrayTarget water inflow ambiguity of (1) is U _M Membership function U according to target turbidity _MD And a target acidity membership function U _LA Matching in the preset fuzzy control table as described in the above Table 1 to determine turbidity acidity array +.>Target water inflow ambiguity of (1) is U _L . Taking the minimum value of two values in each turbidity and acidity array, and determining the obtained minimum value as the water inlet credibility fuzzy value of each turbidity and acidity array, wherein the water inlet credibility fuzzy value is +.>Intersection is carried out on the water inflow credibility fuzzy value of each turbidity acidity array and the target water inflow fuzzy degree determined by the water inflow credibility fuzzy value to obtain a plurality of membership degree outputs of +.>Collecting a plurality of membership degree outputs to obtain a first confidence degree output of +.>

Further, step 104, based on the first confidence output, determines a target fresh water flow, and controls the inflow of fresh water into the water regulation system according to the target fresh water flow, including:

Specifically, in the first credibility output, the same target water inflow ambiguity needs to be subjected to a small-taking process, specifically: and comparing the values of the water inflow credibility fuzzy values corresponding to the same target water inflow fuzzy degree according to the same target water inflow fuzzy degree, and taking the water inflow credibility fuzzy value with the minimum value. Further, the first membership degree output of the fuzzy value of the water inflow credibility with the minimum value is stored, the rest of the second membership degree outputs are deleted, and the second membership degree output is the membership degree output of the fuzzy value of the water inflow credibility with the non-minimum value. In one embodiment, in the first confidence output, for the water inflow ambiguity U _L The corresponding water inlet credibility fuzzy value isThe first confidence output contains +.>And->Due to->Is greater than->Thus, the first membership output is saved +.>Deleting second membership output

Further, the first membership output and the third membership output are aggregated to obtain an updated second membership output, and it is to be noted that the third membership output is the remaining membership output except the first membership output and the second membership output in the first membership output.

Further, the same target water inflow ambiguity is subjected to a fetching process, specifically: and comparing the values of the water inlet credibility fuzzy values in the second credibility output, determining the water inlet credibility fuzzy value with the largest value in the second credibility output, and determining the water inlet credibility fuzzy value with the largest value as a target membership value. Further, according to the target water inflow ambiguity corresponding to the target membership value, a target water inflow membership function is determined.

In one embodiment, the plurality of membership outputs in the first confidence output are (c 1, U) _S )，(c2,U _M )，(c3,U _M )，(c4,U _L ) Wherein, c1, c2, c3 and c4 are the confidence fuzzy values of the water inlet,U _S 、U _M 、U _L is of the orderAnd (5) marking the water inlet ambiguity. For the same target water intake ambiguity, i.e. membership degree output (c 2, U _M ) And (c 3, U) _M ) And (2) andless than->Intake reliability ambiguity value +.>That is, c2, determining that the first membership degree of the minimum water inflow reliability fuzzy value is (c 2, U) _M ) Deleting the remaining second membership outputs (c 3, U _M ). The remaining membership outputs of the first confidence output other than the first membership output and the second membership output are a third membership, the third membership being (c 1, U) _S )，(c4,U _L ). The first membership degree output and the third membership degree output are assembled to obtain updated second reliability degree output, and the updated second reliability degree output is (c 1, U) _S )，(c2,U _M )，(c4,U _L ) That is to say Determining a target membership value according to the water inlet reliability fuzzy value with the maximum value in the second reliability output, wherein the target membership value is defined by ∈>Obtaining a target membership value of +.>Obtaining a target water inlet ambiguity U according to the water inlet confidence ambiguity value with the largest value _M And matches the target water inflow membership function of +.> It should be further noted that, generally, the confidence ambiguity values of the water inflow have nine values of c1, c2, c3, c4, c5, c6, c7, c8 and c9, wherein, when a plurality of zero values occur in c1 to c9, the corresponding array is invalid, and only valid data is taken.

Further, step 104 determines a target fresh water flow based on the first confidence output, and controls the inflow of fresh water into the water regulation system according to the target fresh water flow, and further includes:

Specifically, substituting the target membership value into a target water inflow membership function to perform fuzzy operation to obtain a plurality of first new water inflow, and performing average calculation on the plurality of first water inflow to obtain a second new water inflow. Further, substituting the second new water inflow into a preset conversion formulaAnd (5) performing reverse calculation to calculate the target new water inflow.

In one embodiment, the target membership value isDetermining that the corresponding target water inflow ambiguity is U _M ，U _M The matched target water inflow membership function is +.> Target membership value->Substitution of the target water inflow membership function>Wherein the first new water inflow is 35, and the target membership value is +. >Substitution of the target water inflow membership function>The first new water inflow is 65, and the average value of the first new water inflow 35 and the first new water inflow 65 is calculated to obtain the second new water inflow 50. Obtaining a preset conversion formula of new water inflow as +.>Substituting the second new inflow y=50 into a preset conversion formula +.>And calculating the target new water inflow rate to be 6L/min in a reverse way when x=6 is obtained.

Further, the water use regulating system of the water use regulating method comprises: the water tank acid-base neutralization system and the water tank filtering system;

Specifically, in the water consumption regulating system based on the water consumption regulating method, the main factors influencing the water inflow of the new water in the water circulation system are pH value and turbidity, so that the water tank acid-base neutralization system and the water tank filtering system are adopted on the basis of the water consumption regulating method.

The water tank acid-base neutralization system is used for carrying out alkaline neutralization treatment on water to be treated in the water tank to obtain circulating water, and the water tank filtering system is used for carrying out dust filtering treatment on the water to be treated in the water tank to obtain the circulating water.

Further, the water tank acid-base neutralization system comprises a water tank, a two-position three-way valve and a solid alkali catalyst filter tank;

Specifically, referring to fig. 3, fig. 3 is a schematic diagram of acid-base neutralization of a water tank provided by the invention, 10 represents a low-liquid-level floating ball, 11 represents a low-liquid-level floating ball, 12 represents a high-liquid-level floating ball, 13 represents a high-liquid-level floating ball, 14 represents a two-position three-way valve, and 15 represents a solid base catalyst canister. There are four liquid level floating balls in the water tank, these four liquid level floating balls are low liquid level floating ball 10, low liquid level floating ball 11, high liquid level floating ball 12 and high liquid level floating ball 13 respectively, low liquid level floating ball 10 is used for detecting low liquid level, low liquid level floating ball 11 is used for detecting low liquid level, high liquid level floating ball 12 is used for detecting high liquid level, high liquid level floating ball 13 is used for detecting high liquid level. In the water changing process, when the high-liquid-level floating ball 12 detects that the water to be treated in the water tank reaches the high liquid level, the machine platform performs water draining work, and meanwhile, the water draining flow is far greater than the water inflow flow, so that the fresh water needs to be kept in the water inflow state of the fresh water inlet. In the water changing process, when the liquid level floating ball detects that water to be treated in the water tank reaches a high liquid level or a low liquid level, the machine is down, so that the safety of the machine is guaranteed. On the basis of the water regulation method, the water tank still maintains the basic structure of four liquid level floating balls, and the purpose is to ensure the logic property of water inlet and water discharge.

Further, a water outlet of a water tank in the water tank acid-base neutralization system is connected with a water inlet of a two-position three-way valve 14, a first water outlet of the two-position three-way valve 14 is connected with a water inlet of a solid base catalyst filter tank 15, a second water outlet of the two-position three-way valve 14 is connected with a water inlet of a water storage device, and a water outlet of the solid base catalyst filter tank 15 is connected with the water inlet of the water storage device. When water to be treated in the water tank is subjected to alkaline neutralization treatment, if the acidity is too strong, the circulating water flows through the solid base catalyst filter tank 15 through the first water outlet of the two-position three-way valve 14, the acidity is rapidly neutralized, long-term use of the circulating water in the water tank is ensured, and the circulating water subjected to acid-base neutralization treatment flows into the water inlet of the water storage device through the water outlet of the solid base catalyst filter tank 15. When the water to be treated in the water tank is subjected to alkaline neutralization treatment, if the acidity is weak, the circulating water directly flows into the water inlet of the water storage device from the second water outlet of the two-position three-way valve 14 without passing through the solid alkali catalyst filter tank 15. It should be noted that the two-position three-way valve 14 is a common electromagnetic valve having two control positions and three channels, wherein one channel is an input channel and the other two channels are output channels.

Further, after the solid base catalyst filter tank 15 is started for a period of time, if the acidity of the water after the acid-base neutralization treatment is not reduced, the alarm device is used for informing that the solid base catalyst filter tank 15 needs to be replaced, and the forced function of the two-position three-way valve 14 is used for realizing the replacement of the solid base catalyst filter tank 15 without stopping the machine. It should be noted that, the forced function of the two-position three-way valve 14 is to close the channel of the second water outlet of the two-position three-way valve 14, and the channel of the first water outlet of the two-position three-way valve 14 is normally opened, so as to prevent the circulating water from flowing through the solid base catalyst filter tank 15, thereby affecting the replacement of the solid base catalyst filter tank 15. The neutralization of the acid water is carried out by the solid base catalyst filter tank in the acid-base neutralization system to prolong the service time of the circulating water, thereby reducing the water consumption and realizing energy conservation and emission reduction.

Further, the water tank filtering system comprises a water tank, a diaphragm pump, a filter and a centrifugal water pump;

the filter comprises a plurality of layers of filter screens;

Specifically, referring to fig. 4, fig. 4 is a schematic diagram of a water tank filtration system provided by the present invention, 16 represents a centrifugal water pump, 17 represents a diaphragm pump, 18 represents a filter, and 19 represents a filter screen. The first water outlet of the water tank is connected with the water inlet of the diaphragm pump 17, the water outlet of the diaphragm pump 17 is connected with the water inlet of the filter 18, and the water outlet of the filter 18 is connected with the water inlet of the water tank. The first water outlet connected with the water inlet of the diaphragm pump 17 is arranged in the water tank near the bottom, so that the dust-containing water at the lower part can be pumped into the filter 18, the separation of dust and water is realized through the multi-layer filter screen 19 in the filter 18, and finally the separated water flows into the water inlet of the water tank. Further, the water inlet of the centrifugal water pump 16 is connected to the second water outlet of the water tank, and the second water outlet of the water tank is disposed at a first position higher than the first water outlet in order to draw out the circulating water into the water inlet of the water storage device in order to leave the dust having a large specific gravity in the water tank.

The diaphragm pump 17 is a pump that sucks the liquid into the diaphragm chamber by pressure and conveys the liquid outward by using a diaphragm as a moving member, and the centrifugal pump 16 is a pump that conveys the liquid by centrifugal force by acting on the liquid so as to flow the liquid to the outer periphery by the centrifugal force. The filter in the filtering system is used for separating dust from water to prolong the service time of the circulating water, thereby reducing the water consumption and realizing energy conservation and emission reduction.

Further, after the filter 18 is started for a period of time, if the dust content in the water passing through the filter 18 is not reduced, the alarm device informs that the filter screen 19 in the filter 18 needs to be replaced, and the filter screen 19 is replaced without stopping the water pumping action of the forced diaphragm pump 17.

Further, referring to fig. 5, fig. 5 is a flowchart of an overall scheme of the water usage adjustment method and system provided by the present invention, and the overall process of the water usage adjustment method and system provided by the embodiment of the present invention may be understood as follows:

the embodiment of the invention adopts the water circulation system of the semiconductor waste gas treatment equipment, and on the basis of maintaining the waste water washing and removing functions of the waste gas treatment equipment, the acid neutralization equipment and the filtering system are added in the water circulation system of the semiconductor waste gas treatment equipment, and the algorithm treatment for saving water is carried out. After the equipment of the machine is finished, and the machine is determined to run normally, the machine starts to run. The new water inflow of the water tank is controlled in a fuzzy manner to realize the demand control of the new water inflow.

Further, the main factors influencing the water inflow of the new water in the water circulation system are pH value and turbidity, so that the pH value is determined by acquiring an acid-base sensor value by adopting an acid-base sensor, and the turbidity is determined by acquiring a turbidity sensor value by adopting a turbidity sensor. For the turbidity value a, the turbidity value a is divided into three fuzzy sets in advance, and the three fuzzy sets of the turbidity value a are low in turbidity and high in turbidity. For the acidity value b, the acidity value b is divided into three fuzzy sets in advance, and the three fuzzy sets of the acidity value b are low in acidity and strong in acidity neutralization. The new water inflow c of the new water of the water tank is divided into five fuzzy sets in advance aiming at the new water inflow c, and the five fuzzy sets of the new water inflow c are small in inflow, medium in inflow, large in inflow and large in inflow. The turbidity value a, the acidity value b and the fresh water inflow c are preset with corresponding turbidity membership functions, acidity membership functions and fresh water inflow membership functions.

Further, the turbidity value a is 0-100 of the turbidity sensor value, the acidity value b is 0-100 of the acid-base sensor value 7-1 obtained by reverse conversion through a preset conversion formula, and the new water inflow rate 3-9L/min is obtained by reverse conversion of the value of the new water inflow rate c of the water tank of 0-100 through the preset conversion formula.

Further, substituting the turbidity value into a target turbidity membership function, calculating a plurality of turbidity fuzzy values through a fuzzy operation mode of the target turbidity membership function, and collecting the calculated plurality of turbidity fuzzy values to obtain a turbidity fuzzy set. Substituting the acidity value into a target acidity membership function, calculating a plurality of acidity fuzzy values through a fuzzy operation mode of the target acidity membership function, and collecting the calculated plurality of acidity fuzzy values to obtain an acidity fuzzy set.

Further, any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set are taken, and the obtained arbitrary two values are combined to obtain a plurality of turbidity acidity arrays. And (3) taking the minimum value of two values in each turbidity and acidity array, determining the obtained minimum value as a water inlet credibility fuzzy value of each turbidity and acidity array, and collecting all the water inlet credibility fuzzy values to obtain a water inlet credibility set.

Further, a target turbidity membership function and a target acidity membership function are determined through the turbidity fuzzy value and the acidity fuzzy value corresponding to each turbidity and acidity array, and the target water inflow ambiguity of each turbidity and acidity array is determined based on a preset fuzzy control table. Intersection is carried out on the water inlet credibility fuzzy value of each turbidity acidity array and the determined target water inlet fuzzy degree to obtain a plurality of membership degree outputs, and the membership degree outputs are aggregated to obtain a first credibility output.

Further, in the first credibility output, for the same target water inflow ambiguity, in the water inflow credibility ambiguity values corresponding to the same target water inflow ambiguity, the water inflow credibility ambiguity value with the smallest value is taken, the first membership degree output of the water inflow credibility ambiguity value with the smallest value is determined, and the rest second membership degree outputs are deleted. And collecting the first membership output and the third membership output to obtain updated second reliability output.

Further, determining a target membership value according to the water inlet reliability fuzzy value with the largest value in the second reliability output. And matching the target water inflow ambiguity corresponding to the water inflow confidence ambiguity value with the largest value to obtain a corresponding target water inflow membership function. And performing fuzzy operation on the target membership value and the target water inflow membership function to obtain a plurality of first new water inflow, and performing average value calculation on the plurality of first water inflow to obtain a second new water inflow as an average value. And reversely calculating the target water inflow through a preset conversion formula according to the second new water inflow.

Further, the water to be treated in the water tank is in a strong acid environment or a multi-dust environment, and the water tank acid-base neutralization system and the water tank filtering system in the water regulating system are adopted to carry out acid-base neutralization treatment and dust filtering treatment on the water to be treated in the water tank. Judging whether the water tank is always in a strong acid environment after a period of time, and judging whether the water tank is always in a multi-dust environment.

Further, if the water tank is always in a strong acid environment after a period of time, circulating water in the water tank flows through a solid base catalyst filter tank in the two-position three-way valve, so that acidity is quickly neutralized; if the water tank is in a multi-dust environment after a period of time, the water containing dust in the water tank is pumped out through the diaphragm pump and flows through the filter screen in the filter to separate the dust from the water. If the water tank is not in a strong acid environment or a dust environment after a period of time, the fresh water inflow of the water tank is continuously controlled according to fuzzy control.

Further, after the solid base catalyst filter tank is started for a period of time, the service life of the solid base catalyst filter tank is judged. If the acidity of the water subjected to acid-base neutralization treatment is not reduced, the solid base catalyst filter tank is informed of the need of replacement through an alarm device after the fact that the solid base catalyst filter tank cannot work normally is confirmed, and the solid base catalyst filter tank is replaced without stopping the operation through the forced function of the two-position three-way valve. After the filter is started for a period of time, the dust accumulation of the filter screen is judged, if the dust amount in the water passing through the filter is not reduced, the filter screen in the filter is confirmed to need to be replaced, and the filter screen is replaced without stopping the water pumping action by forcing the diaphragm pump.

The water supply system of the water tank can be self-regulated by the water regulation method and the logic control of the system, and the self-regulation of the waterway system can be realized under different results of different waste gas treatment processes. For the process without acid and dust or the machine test operation stage, the action of no or little fresh water can be realized according to fuzzy control, and the aim of saving water to the greatest extent of the machine is fulfilled; for the strong acid process, in order to ensure long-term use of the machine, the supply of fresh water is increased or a solid base catalyst filter tank is used for neutralization, so that the service cycle of circulating water is prolonged; for the multi-dust process, the filter is used to separate dust and water while increasing the water change rate, so that the service period of the circulating water is prolonged, and the load of field personnel is reduced. In the water consumption regulation process, fuzzy control operation is carried out according to the value of the turbidity sensor and the value of the acid-base sensor, and the target new water inflow rate is determined, so that the water inflow rate flowing into the water consumption regulation system is scientifically and accurately controlled according to the target new water inflow rate, the water consumption is reduced, and the energy conservation and emission reduction are realized.

In one embodiment, the turbidity sensor value collected by the turbidity sensor is 30, and the acid-base sensor value collected by the acid-base sensor is 3.4. The turbidity value a was determined to be 30 based on the turbidity sensor value. Reversely converting the value of the acidity sensor into an acidity value b through a preset conversion formula, and substituting the value 3.4 of the acid-base sensor into the preset conversion formula An acidity value b of 60 is obtained.

Further, matching the turbidity value a=30 in a preset turbidity membership function to obtain a target turbidity membership function asSubstituting turbidity value a=30 into the target turbidity membership function +.>In (3) obtaining a haze value of +.>Substituting turbidity value a=30 into the target turbidity membership function +.>In (3) obtaining a haze value of +.>Haze blur value is +.>And->Collecting to obtain turbidity fuzzy set +.>Matching in preset acidity membership functions according to acidity value b=60 to obtain target acidity membership function as +.>Substituting acidity value b=60 into the target acidity membership functionIn (3) obtaining an acidity blur value of +.>Substituting acidity value b=60 into target acidity membership function +.>In (3) obtaining an acidity blur value of +.>The value of the acidity blur is +.>Andcollecting to obtain acidity fuzzy set of +.>

Further blur the turbidity valueRespectively and the value of the acidity blur->And->Combining the turbidity blur values +.>Respectively and the value of the acidity blur->And->Combining to obtain multiple turbidity and acidity arrays (respectively +)>Turbidity acidity array->The water inflow reliability fuzzy value of (2) is +.>Turbidity acidity array->The water inflow reliability fuzzy value of (2) is +.>Turbidity acidity array- >The water inflow reliability fuzzy value of (2) is +.>Turbidity acidity array->The water inflow reliability fuzzy value of (2) is +.>Collecting the fuzzy values of the water inflow credibility of each turbidity acidity array to obtain a water inflow credibility set of +.>

Further, based on the preset fuzzy control table of table 1, the turbidity acidity array can be determinedThe ambiguity of the target water inflow is U _S Turbidity acidity array->The ambiguity of the target water inflow is U _M Turbidity acidity array->The ambiguity of the target water inflow is U _M Turbidity acidity array->The ambiguity of the target water inflow is U _L . Intersection of the water inlet credibility fuzzy value of each turbidity acidity array and the target water inlet fuzzy degree determined by the water inlet credibility fuzzy value to obtain a plurality of membership degreesOutput is->Referring to table 2, table 2 is a fuzzy control table. Collecting a plurality of membership degree outputs to obtain a first confidence degree output of +.>

Table 2 fuzzy control table

Further, for the same target water inflow ambiguity, there are two membership degrees ofAnd->Intake reliability ambiguity value +.>The first membership degree output for determining the minimum intake confidence fuzzy value is +.>Deleting the second membership output +.>The third membership output is +. >And->The first membership degree output and the third membership degree output are aggregated to obtain updated second confidence degree output asThe process of obtaining the second reliability output U (c) is as follows:

further, according to the water inlet reliability fuzzy value with the largest value in the second reliability output, determining the target membership value asObtaining a target water inlet ambiguity U according to the water inlet confidence ambiguity value with the largest value _S And matches the target water inflow membership function of +.> Target membership value->Substitution of the target water inflow membership function>The first new water inflow is 10, the target membership value is +.>Substitution of the target water inflow membership function>Obtain the firstThe new water inflow is 40, and the average value of the two first new water inflow is calculated to obtain the second new water inflow which is 25. Substituting the second new inflow 25 into a preset conversion formula +.>And obtaining x=4.5, and finally reversely calculating the target new water inflow rate to be 4.5L/min.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; and such modifications or substitutions; without departing from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A water conditioning method, comprising:

acquiring a turbidity sensor value and an acid-base sensor value;

2. The water consumption adjustment method according to claim 1, wherein the performing fuzzy operation based on the turbidity sensor value and the acid-base sensor value to obtain a turbidity fuzzy set and an acidity fuzzy set respectively includes:

3. The water usage adjustment method according to claim 1, wherein said determining a water intake confidence level set based on said turbidity fuzzy set and said acidity fuzzy set comprises:

4. The water usage adjustment method according to claim 1, wherein the determining the first confidence output based on the set of incoming water confidence levels and a preset fuzzy control table comprises:

5. The water usage adjustment method according to any one of claims 1 to 4, wherein the determining a target fresh water flow based on the first confidence output includes:

6. The water usage adjustment method according to claim 5, wherein determining a target membership value and a target water inflow membership function based on the first confidence output comprises:

7. The water consumption adjustment method according to claim 5, wherein the performing a fuzzy operation based on the target membership value and the target water intake membership function to obtain the target new water intake flow rate includes:

8. A water usage adjustment system of the water usage adjustment method of any one of claims 1 to 7, comprising: the water tank acid-base neutralization system and the water tank filtering system;

9. The water usage adjustment system according to claim 8, wherein the tank acid-base neutralization system comprises a tank, a two-position three-way valve, and a solid base catalyst canister;

10. The water conditioning system of claim 8, wherein the tank filtration system comprises a tank, a diaphragm pump, a filter, and a centrifugal water pump;

The filter comprises a plurality of layers of filter screens;