CN116525403A - Ion source ionizer assembly, ion source and secondary ion mass spectrometer - Google Patents
Ion source ionizer assembly, ion source and secondary ion mass spectrometer Download PDFInfo
- Publication number
- CN116525403A CN116525403A CN202310382391.7A CN202310382391A CN116525403A CN 116525403 A CN116525403 A CN 116525403A CN 202310382391 A CN202310382391 A CN 202310382391A CN 116525403 A CN116525403 A CN 116525403A
- Authority
- CN
- China
- Prior art keywords
- compound
- ionizer assembly
- ionizer
- ion source
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims abstract description 69
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 238000009792 diffusion process Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910052792 caesium Inorganic materials 0.000 claims description 2
- -1 cesium compound Chemical class 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 5
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- 150000002500 ions Chemical class 0.000 description 43
- 239000000523 sample Substances 0.000 description 9
- 238000010884 ion-beam technique Methods 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- FJDQFPXHSGXQBY-UHFFFAOYSA-L caesium carbonate Chemical compound [Cs+].[Cs+].[O-]C([O-])=O FJDQFPXHSGXQBY-UHFFFAOYSA-L 0.000 description 1
- 229910000024 caesium carbonate Inorganic materials 0.000 description 1
- NCMHKCKGHRPLCM-UHFFFAOYSA-N caesium(1+) Chemical compound [Cs+] NCMHKCKGHRPLCM-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010249 in-situ analysis Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- WPFGFHJALYCVMO-UHFFFAOYSA-L rubidium carbonate Chemical compound [Rb+].[Rb+].[O-]C([O-])=O WPFGFHJALYCVMO-UHFFFAOYSA-L 0.000 description 1
- 229910000026 rubidium carbonate Inorganic materials 0.000 description 1
- 150000003298 rubidium compounds Chemical class 0.000 description 1
- 229910001419 rubidium ion Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
The application provides an ionizer subassembly, ion source and secondary ion mass spectrometer of ion source, separates the compound warehouse into a plurality of regions, all sets up the compound in a plurality of regions, makes the total surface area of compound be greater than the total surface area of compound among the correlation technique to can make the compound by the complete consumption in the course of the work, the life-span of ionizer subassembly is prolonged when saving the resource.
Description
Technical Field
The present application relates to the field of sample analysis technology, and in particular, to an ionizer module for an ion source, and a secondary ion mass spectrometer.
Background
Compounds in the compound reservoirs of the ionizer assemblies of the related art ion sources tend to be underutilized resulting in a substantial reduction in the lifetime of the ionizer assemblies.
Disclosure of Invention
In view of this, it is an object of the present application to provide an ionizer assembly for an ion source, an ion source and a secondary ion mass spectrometer.
In view of the above, the present application provides an ionizer assembly of an ion source for secondary ion mass spectrometry, the ionizer assembly comprising a compound reservoir;
at least one separating sheet is arranged in the compound reservoir and divides the compound reservoir into at least two areas, and each area is respectively provided with a compound for generating steam.
The application also provides an ion source comprising the above-mentioned ionizer assembly.
The application also provides a secondary ion mass spectrometer comprising the ion source.
From the above, it can be seen that the ionizer component of the ion source, the ion source and the secondary ion mass spectrometer provided by the present application divide the compound reservoir into a plurality of areas, and the plurality of areas are all provided with the compound, so that the total surface area of the compound is larger than that of the compound in the related art, thereby the compound can be completely consumed in the working process, the resources are saved, and the service life of the ionizer component is prolonged.
Drawings
In order to more clearly illustrate the technical solutions of the present application, the following description will briefly explain the drawings needed in the description of the embodiments, it being evident that the drawings in the following description are only embodiments of the present application, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of an ion source of the related art.
Fig. 2 is a schematic structural view of an ionizer assembly according to an embodiment of the present application.
Reference numerals in the drawings include: ionization end 1, compound storehouse 2, ionization end wire 3, storehouse wire 4, vapor transmission pipeline 5, dead lever 6, ion extraction plate 7, vapor diffusion area 8, bracing piece 9.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail below with reference to the accompanying drawings.
It should be noted that unless otherwise defined, technical or scientific terms used in the embodiments of the present application should be given the ordinary meaning as understood by one of ordinary skill in the art to which the present application belongs. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.
Secondary Ion mass spectrometry (Secondary Ion Mass Spectrometry), or Ion probe (Ion probe), is an advanced method of micro-area in situ analysis. The accelerated primary ion beam is used for focusing and bombarding the surface of a sample to be detected, the components on the surface of the sample are sputtered, partial atoms, molecules and atomic groups are ionized, namely secondary ions, and the sample enters a mass spectrometer for analysis after being accelerated by high pressure on the surface of the sample, so that the element and isotope information of the sample in the micro-area range is obtained.
In ion probe analysis, the brightness and stability of the ion source are one of the most critical parameters. Fig. 1 shows a structure of an ion source of the related art. The ion source comprises an ionizer assembly and an ion extractor plate 7. The ionizer assembly consists of an ionization end 1, a compound reservoir 2, a vapor transmission pipeline 5, a high-pressure loader and a fixed rod 6. The high voltage loader loads thousands of volts of positive high voltage electricity on the ionizer module, and current is supplied to the reservoir wire 4 around the compound reservoir 2, so that the reservoir wire 4 is heated, and electrons escaping from the reservoir wire 4 due to the high temperature are attracted by the positive high voltage electricity on the ionizer module to bombard the compound reservoir 2. The energy of the electrons striking the compound reservoir 2 heats the compound reservoir 2, causing partial evaporation of the compound therein, and the vapor generated by the evaporation diffuses through the vapor transport conduit 5 to the ionization end 1. And current is supplied to the ionization end metal wire 3 around the ionization end 1, and electrons are emitted by the ionization end metal wire 3 to heat the ionization end 1 to more than 800 ℃ so that the steam diffused to the ionization end 1 is ionized in a high-temperature environment. Ions generated by ionization are accelerated by an electric field between the ionization end 1 and the ion extractor plate 7 and enter the subsequent ion beam path. And the amount of steam generated in the store can be controlled by varying the amount of current flowing in the store wire 4, thereby controlling the intensity of the ion beam.
Therefore, to ensure brightness and stability of the ion source, the ionizer module of the ion source is a module that is often replaced as a consumable, and when the compound therein is unable to supply steam, the ionizer module needs to be replaced.
The compound reservoir of the related art ionizer module is heated, and the compound powder therein gradually forms a block-shaped solid after being heated, resulting in a gradual decrease of the heated surface area. Thus, to maintain a fixed emitted ion beam intensity, it is necessary to increase the current to the reservoir wire 4 to raise the temperature of the compound reservoir location. However, when the volume of the compound is reduced to about one third of the original volume, continuous steam cannot be obtained even if the current to the reservoir wire 4 is greatly increased. That is, the ionizer assembly loses about one third of its useful life.
Based on the disadvantage of the service life loss of the ionizer component in the related art, the embodiment of the application provides an ionizer component of an ion source, the ion source and a secondary ion mass spectrometer.
The ionizer component of the ion source, the ion source and the secondary ion mass spectrometer divide a compound reservoir into a plurality of areas, and compounds are arranged in the plurality of areas, so that the total surface area of the compounds is larger than that of the compounds in the related technology, the compounds can be completely consumed in the working process, and the service life of the ionizer component is prolonged while resources are saved.
Fig. 2 shows the structure of an ionizer assembly of an embodiment of the present application.
As shown in fig. 2, an embodiment of the present application provides an ionizer assembly of an ion source for secondary ion mass spectrometry, the ionizer assembly comprising a compound reservoir 2.
At least one dividing sheet is arranged in the compound reservoir 2, and divides the compound reservoir 2 into at least two areas, and each area is respectively provided with a compound for generating steam.
Referring to fig. 2, in this embodiment, the separator may be eight sheets, which evenly distribute the compound reservoir 2 into eight regions. The number of the separation sheets can be six or ten, and the embodiment of the application is not limited.
In this way, the compounds in each zone can be heated sufficiently and the separate compounds allow a substantial increase in the overall surface area of the compounds so that the compounds can be fully consumed, both saving energy and extending the useful life of the ionizer module by about one third.
As an alternative embodiment, the ionizer assembly further comprises an ionization end 1, a vapor transfer tube 5, a first wire, a second wire, a first current source, a second current source, and a voltage loader.
Two ends of the steam transmission pipeline 5 are respectively connected with the compound reservoir 2 and the ionization end 1; the first metal wire is arranged at the periphery of the compound reservoir 2, and the first current source is connected with the first metal wire; the second metal wire is arranged at the periphery of the ionization end 1, and the second current source is connected with the second metal wire; the voltage loader is connected to the compound reservoir 2.
In this embodiment, a voltage loader is used to load thousands of volts of positive high voltage on the compound bank 2, and then a first current source is used to supply current to the first wire 4 around the compound bank 2, so that the first wire 4 is heated, and electrons escaping from the first wire due to high temperature are attracted by the positive high voltage on the compound bank 2 to bombard the compound bank 2. The energy of the electrons striking the compound reservoir 2 heats the compound reservoir 2, causing partial evaporation of the compound therein, and the vapor generated by the evaporation diffuses through the vapor transport conduit 5 to the ionization end 1. And a second current source is used for supplying current to the second metal wire 3 around the ionization end 1, electrons are emitted by the second metal wire to heat the ionization end 1 to more than 800 ℃, and the steam diffused to the ionization end 1 is ionized in a high-temperature environment.
Thus, by combining the above components with the compound reservoir 2, the compound is vaporized to generate vapor, and diffused to the ionization end 1 for ionization to generate ions.
As an alternative embodiment, the separator sheet may be provided with sheet-like protrusions, and the material may be a metallic material having a thermal conductivity higher than a preset threshold.
In this embodiment, the surface area of the separator is increased by providing the sheet-like projections, the efficiency of heat conduction to the compound is increased, and the efficiency of heat conduction to the compound is further increased by selecting a metal material having a thermal conductivity higher than a preset threshold.
Therefore, the ion beam current which is high enough can be obtained when the current which is fed into the first metal wire by the first current source is small, and the energy is further saved.
In the course of carrying out the present application, it was found that the newly put-to-use ionizer module was in a large variation in ion beam intensity at the early stage of use due to uneven evaporation of the compound.
To address the problem of large variations in ion beam intensity, as an alternative embodiment, the vapor transmission conduit 5 is provided with a vapor diffusion region 8.
The radial cross-sectional area of the vapor diffusion region 8 is larger than the radial cross-sectional area of the rest of the vapor transfer conduit 5.
In this embodiment, the vapor is buffered and homogenized by the vapor diffusion region 8. In this way, the steam can pass more uniformly through the ionization end 1, thereby obtaining a more stable ion beam.
As an alternative embodiment, the ionizer assembly further comprises a support rod 9. The compound reservoir 2, the ionization end 1 and the vapor transfer tube 5 are all fixed to a support rod 9.
In this way, the support bar 9 supports the components, ensuring a stable connection between the components.
As an alternative example, the compound may be a cesium compound, such as cesium carbonate (Cs 2 CO 3 ) The method comprises the steps of carrying out a first treatment on the surface of the The compound may also be a rubidium compound, such as rubidium carbonate (Rb) 2 CO 3 )。
Cesium ion sources and rubidium ion sources have extremely high ionization efficiency for nonmetallic elements and are widely applied to secondary ion mass spectrometers.
As an alternative embodiment, the material of the first and second wires is tungsten.
Tungsten has a relatively high melting point and is suitable for preparing the first and second wires for generating electrons.
Based on the same inventive concept, the present disclosure also provides an ion source, corresponding to the ionizer assembly of any of the embodiments described above, comprising the ionizer assembly of any of the embodiments described above.
Based on the same inventive concept, the present disclosure also provides a secondary ion mass spectrometer including the ion source of the above embodiments, corresponding to the ion source of the above embodiments.
Those of ordinary skill in the art will appreciate that: the discussion of any of the embodiments above is merely exemplary and is not intended to suggest that the scope of the application (including the claims) is limited to these examples; the technical features of the above embodiments or in the different embodiments may also be combined within the idea of the present application, the steps may be implemented in any order, and there are many other variations of the different aspects of the embodiments of the present application as described above, which are not provided in detail for the sake of brevity.
While the present application has been described in conjunction with specific embodiments thereof, many alternatives, modifications, and variations of those embodiments will be apparent to those skilled in the art in light of the foregoing description.
The present embodiments are intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Accordingly, any omissions, modifications, equivalents, improvements and/or the like which are within the spirit and principles of the embodiments are intended to be included within the scope of the present application.
Claims (10)
1. An ionizer assembly of an ion source for secondary ion mass spectrometry, the ionizer assembly comprising a compound reservoir;
at least one separating sheet is arranged in the compound storage, the compound storage is divided into at least two areas by the at least one separating sheet, and each area is respectively provided with a compound for generating steam.
2. The ionizer assembly of claim 1 further comprising an ionization end, a vapor transfer tube, a first wire, a second wire, a first current source, a second current source, and a voltage loader;
two ends of the steam transmission pipeline are respectively connected with the compound reservoir and the ionization end; the first metal wire is arranged at the periphery of the compound reservoir, and the first current source is connected with the first metal wire; the second metal wire is arranged at the periphery of the ionization end, and the second current source is connected with the second metal wire; the voltage loader is connected with the compound reservoir.
3. The ionizer assembly of claim 1 wherein the separator sheet is provided with a sheet-like protrusion.
4. The ionizer assembly of claim 1 wherein the material of the separator sheet is a metallic material having a thermal conductivity above a predetermined threshold.
5. The ionizer assembly of claim 1 wherein the vapor transport conduit is provided with a vapor diffusion region;
the radial cross-sectional area of the vapor diffusion region is greater than the radial cross-sectional area of the remainder of the vapor transfer conduit.
6. The ionizer assembly of claim 1 further comprising a support rod;
the compound reservoir, the ionization end and the vapor transport tube are all fixed on the support rod.
7. The ionizer assembly of claim 1 wherein the compound is a cesium compound.
8. The ionizer assembly of claim 2 wherein the material of said first and second wires is tungsten.
9. An ion source comprising an ionizer assembly according to any one of claims 1 to 8.
10. A secondary ion mass spectrometer comprising an ion source as claimed in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310382391.7A CN116525403A (en) | 2023-04-11 | 2023-04-11 | Ion source ionizer assembly, ion source and secondary ion mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310382391.7A CN116525403A (en) | 2023-04-11 | 2023-04-11 | Ion source ionizer assembly, ion source and secondary ion mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116525403A true CN116525403A (en) | 2023-08-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310382391.7A Pending CN116525403A (en) | 2023-04-11 | 2023-04-11 | Ion source ionizer assembly, ion source and secondary ion mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116525403A (en) |
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2023
- 2023-04-11 CN CN202310382391.7A patent/CN116525403A/en active Pending
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