CN116520557A - Actuator and optical fiber scanner - Google Patents

Abstract

The embodiment of the application discloses an actuator and optical fiber scanner, and the actuator in this application includes at least: the first actuating part is provided with a first electrode, the second actuating part is provided with a second electrode, a gap is reserved between the first electrodes arranged on the outer surface of the first actuating part along the direction parallel to the axial direction of the actuator, a conductor is arranged in the gap, and the conductor is electrically connected to part or all of the second electrodes and is used for providing an electric signal for the second electrodes. Compared with the traditional flying lead mode, the wiring mode in the embodiment of the application can effectively reduce the interference on the swing of the second actuating part and can improve the stability of the actuator.

Description

Actuator and optical fiber scanner

The application is as follows: "201910943645.1", invention name: a patent application of an actuator and a fiber scanner.

Technical Field

The application relates to the technical field of scanning display, in particular to an actuator and an optical fiber scanner.

Background

Scanning display imaging is an emerging display technology, and can be used for various display scenes such as projection display, near-eye display and the like.

Scanning display imaging can be realized in particular by a scanning display module constituted by a digital micromirror device (Digital Micromirror Device, DMD) or an optical fiber scanner, in particular for which electrodes are usually provided on the surface of the actuator, which electrodes are electrically connected by means of "flying wire" type external conductors. However, when the optical fiber scanner works, the actuator drives the optical fiber to sweep together at a higher frequency, and the external wire connected to the surface of the actuator can have a certain adverse effect on the high-frequency vibration of the actuator.

Disclosure of Invention

The present application is directed to an actuator and a fiber scanner for reducing or avoiding the influence of wires on the actuator.

An embodiment of the present application provides an actuator including at least: the device comprises a first actuating part, a separation part, a second actuating part, a first electrode group arranged on the first actuating part, a second electrode group arranged on the second actuating part and a plurality of conductors, wherein the first electrode group comprises a plurality of first electrodes, the second electrode group comprises a plurality of second electrodes,

the conductor is attached to the surfaces of the first actuating part and the isolation part and is connected to part or all of the second electrode, and is used for providing an electric signal for the second electrode; and, the conductor is insulated from the first electrode;

in operation, the first actuating portion vibrates in a first axial direction and the second actuating portion vibrates in a second axial direction.

Optionally, the conductor comprises: printed circuits printed on the surface of the actuator, or flexible wires attached to the actuator.

Optionally, the actuator is a tube of piezoelectric material; the first electrode and the second electrode are communicated on the inner wall of the piezoelectric material tube to form a common inner electrode; the first electrode is symmetrically arranged on the outer surface of the first actuating part in the first axial direction, and the second electrode is symmetrically arranged on the outer surface of the second actuating part in the second axial direction;

gaps with set widths and parallel to the axial direction of the actuator are reserved between the first electrodes symmetrically distributed on the outer surface of the first actuating part, and the conductors are attached to the gaps and then connected to the second electrodes on the outer surface of the second actuating part through the surface of the isolating part.

Optionally, a gap with a set width is left between the second electrodes symmetrically arranged on the outer surface of the second actuating part, the gap is parallel to the axial direction of the actuator, and in the axial direction of the actuator, the gap corresponding to the first electrode is dislocated with the gap corresponding to the second electrode; the conductor is in contact with the second electrode on the side close to the isolation portion.

Optionally, when the conductor is a printed circuit, at least two layers of printed circuits are arranged on the actuator, each layer of printed circuit is mutually insulated, and each layer of printed circuit is respectively connected to a different second electrode, or is connected to a different second electrode and a corresponding inner electrode.

Optionally, the first actuating portion in the actuator is a strip-shaped piezoelectric material sheet, and the first electrodes are respectively arranged on two opposite surfaces in the first axial direction;

the second actuating part comprises a Fang Bangxing matrix and piezoelectric material sheets, the piezoelectric material sheets are arranged on two opposite side surfaces of the square column matrix towards the second axis direction, and the second electrodes are uniformly distributed on the inner and outer two opposite surfaces of each piezoelectric material sheet;

the number of the conductors is the same as that of the second electrodes, and the conductors are in one-to-one correspondence, attached to two opposite side surfaces of the first actuating part facing the second axis direction, and respectively connected to the second electrodes of each piezoelectric material sheet.

Optionally, at least one surface of the square rod-shaped matrix facing the first axial direction is further provided with a correction piezoelectric material sheet, and the inner surface and the outer surface of the correction piezoelectric material sheet are provided with third electrodes;

and a conductor connected with a third electrode on the correction piezoelectric material sheet, attached to the first actuating part along the side surface of the first actuating part in the second axial direction, and attached to the joint of the first actuating part and the second actuating part, and used for transmitting an external correction signal to the correction piezoelectric material sheet.

Optionally, the number of conductors is the same as the number of second electrodes.

Optionally, the conductor is attached to the first actuator portion outer surface in an insulating manner.

The embodiment of the application provides an optical fiber scanner, which at least comprises an actuator, a scanning optical fiber, a fixing part, a lens group and a packaging shell in the scheme, wherein,

the scanning optical fiber extends outwards from the swinging end of the second actuating part to form a cantilever structure, and the cantilever optical fiber scans and outputs an image beam according to a set track under the drive of the actuator;

the fixing part is arranged at the tail end of the first actuating part so as to integrally fix the actuator in the packaging shell;

the lens group is fixed at the light emitting end of the packaging shell, and the image light beams scanned and output by the scanning optical fibers are emitted after passing through the lens group.

The following technical effects can be achieved by adopting the technical scheme in the embodiment of the application:

by adopting the scheme in the application, the actuator does not need to be provided with a wire in a flying wire shape, and the conductor is arranged in a mode of being attached to the surface of the actuator, so that the influence of the conductor on the swing of the actuator is reduced.

In particular, when the actuator is operated, the first actuating portion swings in the Y-axis direction, the deformation (bending) degree of the surface thereof in the Y-axis direction is the greatest, and the deformation (bending) degree of the side surface of the first actuating portion in the X-axis direction is the smallest, so that the conductors are arranged on the side surface of the first actuating portion in the X-axis direction, the influence of the deformation on the conductors is the smallest, and the adverse influence on the stability of the conductors themselves and on the swing of the first actuating portion is the smallest.

Obviously, compared with the traditional flying lead mode, the wiring mode in the embodiment of the application can effectively reduce the interference on the swing of the second actuating part and can improve the stability of the actuator.

Drawings

Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the following drawings, in which:

FIG. 1a is a schematic diagram of an illustrative optical module provided in an embodiment of the present application;

FIG. 1b is a schematic diagram of an optical fiber scanner according to an embodiment of the present application;

FIG. 2 is a schematic diagram of an actuator in a flying lead configuration according to an embodiment of the present application;

fig. 3a is a schematic structural view of a circular tube type actuator according to an embodiment of the present application;

FIG. 3b is a schematic diagram of deformation of the first actuator portion as it swings;

FIG. 4 is a schematic view of a structure in which a plurality of electrode pairs are arranged on the surface of an actuator;

FIG. 5a is a schematic view of a square rod actuator according to an embodiment of the present application;

FIG. 5b is a schematic illustration of another square rod actuator provided in an embodiment of the present application;

fig. 6 is a schematic structural diagram of an optical fiber scanner according to an embodiment of the present application.

Detailed Description

The present application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.

Illustrative optical Module

As shown in fig. 1a, an illustrative optical module in the present application mainly includes:

processor 100, laser group 110, fiber scanner 120, transmission fiber 130, light source modulation circuit 140, scan driving circuit 150, and beam combining unit 160. Wherein:

the processor 100 may be a graphics processor (Graphics Processing Unit, GPU), a central processing unit (Central Processing Unit, CPU), or other chip or circuit with control functions, image processing functions, and is not limited in detail herein.

When the system is in operation, the processor 100 can control the light source modulation circuit 140 to modulate the laser set 110 according to the image data to be displayed, wherein the laser set 110 comprises a plurality of monochromatic lasers, and the monochromatic lasers respectively emit light beams with different colors. As can be seen from fig. 1, a Red (Red, R), green (Green, G), blue (Blue, B) trichromatic laser may be used in the laser group. The light beams emitted by the lasers in the laser set 110 are combined into a single laser beam by the beam combining unit 160 and coupled into the transmission fiber 130.

The processor 100 may also control the scan driving circuit 150 to drive the optical fiber scanner 120 to scan, thereby scanning out the light beam transmitted in the transmission optical fiber 130.

The light beam scanned by the optical fiber scanner 120 acts on a certain pixel point position on the medium surface, and forms a light spot on the pixel point position, so that the scanning of the pixel point position is realized. The output end of the transmission optical fiber 130 is scanned according to a certain scanning track under the driving of the optical fiber scanner 120, so that the light beam moves to the corresponding pixel point for scanning. During the actual scanning process, the light beam output by the transmission fiber 130 will form a spot with corresponding image information (e.g., color, gray scale, or brightness) at each pixel location. In one frame time, the light beam traverses each pixel point position at a high enough speed to complete the scanning of one frame of image, and the human eye can not perceive the movement of the light beam at each pixel point position, but can see one complete frame of image because of the characteristic of 'vision residue' of the human eye observation object.

With continued reference to FIG. 1b, a specific structure of the fiber scanner 120 is shown, including: an actuator 121, a fiber cantilever 122, a lens 123, a scanner housing 124, and a fixture 125. The actuator 121 is fixed in the scanner package 124 through the fixing member 125, the transmission optical fiber 130 extends at the free end of the actuator 121 to form an optical fiber cantilever 122 (also referred to as a scanning optical fiber), and when in operation, the actuator 121 vibrates along the Y-axis direction (also referred to as a first axis direction in the present application) and the X-axis direction (also referred to as a second axis direction in the present application) under the driving of the scanning driving signal, and driven by the actuator 121, the free end of the optical fiber cantilever 122 sweeps along a preset track and emits a light beam, and the emitted light beam can scan on the medium surface through the lens 123.

With further reference to fig. 2, for the circular tube type actuator 121 shown in fig. 1b, it may further comprise: the first actuating portion 10, the second actuating portion 20, and the spacer portion 23, the first actuating portion 10 and the second actuating portion 20 are each made of a piezoelectric material such as piezoceramics. External electrodes 44 are disposed on the outer surfaces of the first and second actuating portions 10 and 20. The outer electrode 44 is formed by connecting the wires 200 in a flying-wire manner, and therefore, for the outer electrode 44 disposed on the outer surface of the second actuating portion 20, since the second actuating portion 20 has extremely high swinging frequency during operation, the flying-wire-shaped wires 200 can block the high-frequency swinging of the second actuating portion 20 to a certain extent, and even affect the swinging track of the second actuating portion 20, so that the scanned and output images are distorted, incomplete, and the like.

Therefore, in the embodiment of the application, the optical fiber scanning actuator is provided, electrodes are not connected in a flying wire mode, and influence on the swinging of the actuator can be reduced to a certain extent.

Round tube type actuator

Referring to fig. 3a, a circular tube type actuator 300 is provided in this embodiment, which at least includes: a first actuating portion 301, a second actuating portion 302, a spacer portion 303, a first electrode group, a second electrode group, two conductors 307, and a fixing portion 33.

The body of the circular tube type actuator 300 may be made of a piezoelectric material into an integrally formed piezoelectric material tube, and according to different application scenarios, for example: the diameter of the circular tube type actuator 300 may vary from several micrometers to several hundred micrometers, and the length may vary from several millimeters to tens of centimeters, for example, of the AR display device or the projection display device, and will be specific to the needs of the actual application, but is not particularly limited herein.

Electrodes are disposed on the surface of the circular tube type actuator 300, so that the circular tube type actuator 300 vibrates under the piezoelectric effect generated by the cooperation of the electrodes and the piezoelectric material. It should be noted that the first electrode group includes a plurality of first electrodes disposed at the positions of the first actuating portions 301, and similarly, the second electrode group includes a plurality of second electrodes disposed at the positions of the second actuating portions 302. In this embodiment, the first electrodes in the first electrode group and the second electrodes in the second electrode group may be divided into: an inner electrode and an outer electrode.

On the inner tube wall of the tubular actuator 300, a part of the first electrode and a part of the second electrode are communicated to form a common inner electrode (not shown in fig. 3 a). The inner electrode may be electrically connected to the fixing portion 33.

On the outer tube wall of the circular tube type actuator 300, a part of the first electrode (herein referred to as a first electrode 305) is symmetrically arranged on the outer surface of the first actuating portion 301 in the Y-axis direction (i.e., the first axis direction) in the form of an electrode pair, and specifically, an electrode thin layer/electrode thin film may be formed on the outer surface of the first actuating portion 301 by a process such as coating, printing, vapor deposition, or the like. The outer electrode portions (i.e., the first electrodes 305) in the form of electrode pairs leave a gap between the two side edges parallel to the axial direction of the actuator 300 (i.e., the electrode pairs do not adhere to each other). Part of the second electrode (herein, referred to as a first electrode 306) is also symmetrically arranged on the outer surface of the second actuating portion 302 in the X-axis direction in the form of an electrode pair, and the same process as that of the first electrode 305 can be adopted, and a gap is also left between two side edges of the second electrode 306 parallel to the axial direction of the actuator 300.

As can be seen in fig. 3a, the outer surface of the spacer 303 is not provided with electrodes, so that the position of the spacer 303 does not vibrate spontaneously when the actuator 300 is in operation.

The conductor 307 is disposed on the outer surface of the actuator 300, specifically disposed in the gap between the symmetrically disposed first electrodes 305, and is connected to the second electrode 306 after passing through the outer surface of the isolation portion 303, so as to provide an electrical signal to the second electrode 306. In fig. 3a, the conductor 307 is in contact with the second electrode 306 but does not extend to the second actuator 302 so as to maximally not interfere with the high frequency oscillation of the second actuator 302.

The fixing portion 33 may be used to fix the actuator 300 in the package of the optical fiber scanner, and the fixing portion 33 is fixed when the actuator 300 is operated, thereby providing stable support for the actuator 300. The fixing portion 33 may be provided with corresponding electrical connection ports (not shown in fig. 3 a) at positions contacting the external electrode portion of the first electrode 305, the internal electrode (not shown in fig. 3 a), and the conductor 307, which may be connected to an external circuit (e.g., the scan driving circuit 150 in the foregoing) through leads. The electrical connection ports may be metal soldering tabs (such as electrode pads), conductor cores with outer cladding removed, etc., and the electrical connection ports may be soldered to the electrodes and conductors, which is, of course, only a practical implementation in the present application, and should not be construed as limiting the present application.

In fig. 3a, only one side structure of the actuator 300 is shown for view angle reasons, it should be understood that on the other side of the actuator 300, which is not shown, there is a symmetrical structure, i.e. another conductor 307 is also arranged on the other side and is connected to the second electrode 306 through the gap of the first electrode 305 on the other side, which will not be described in more detail here.

Here, referring to fig. 3b, when the first actuator 301 swings, the area covered by the outer electrode portion of the first electrode 305 swings (swings up and down in the Y-axis direction) due to the piezoelectric effect on the piezoelectric material, and the deformation (bending) degree of the first actuator 301 is minimal at the gap position between the first electrodes 305, so that the deformation influence of the portion of the conductor 307 disposed in the gap is minimal, and the stability of the conductor 307 itself and the adverse influence on the swinging of the first actuator 301 are small.

The conductors 307 may be in the form of printed circuits or a soft conductive material of lower hardness. Specifically, in the case where the conductor 307 is a printed circuit, the outer surface of the actuator 300 may be printed; in the case where the conductor 307 is a soft conductive material having a low hardness, the surface of the actuator 300 may be provided with a paste. Whatever the process used, the conductor 307 is attached to the outer surface of the first actuator 301 by an insulating means, such as: insulation may be achieved between the conductor 307 and the surface of the first actuator 301 by means of an insulating coating or the like so that the piezoelectric material of the first actuator 301 is not affected when the conductor 307 provides an electrical signal to the second electrode 306. Of course, the specific process is not limited in this respect, and may be combined with the actual need.

Of course, in some practical applications, the outer electrode portion of the second electrode on the outer surface of the second actuating portion is not just a pair of electrodes, but may be two or more pairs of electrodes, for example, a quarter electrode (two pairs of electrodes), a sixth electrode (three pairs of electrodes), etc., referring to fig. 4, a case of a quarter electrode is shown, in which two pieces of electrodes 41 are pairs of electrodes, and two pieces of electrodes 42 are also pairs of electrodes, and together act with the inner electrode 43, so that the second actuating portion 402 swings in the X-axis direction on the outer surface of the second actuating portion 402. To achieve electrical connection to multiple electrodes, in one embodiment of the present application, two or more layers of printed circuits may be employed, each layer of printed circuit connecting a different electrode. It should be noted that, each layer of printed circuit is insulated, specifically, after the first layer of printed circuit is printed, an insulating layer may be coated or printed on the surface of the first layer of printed circuit, and a second layer of printed circuit may be printed on the insulating layer. Of course, nothing herein should be construed as limiting the application.

Compared with the traditional flying lead mode, the wiring mode in the embodiment can effectively reduce the interference on the swing of the second actuating part and improve the stability of the actuator.

Square rod type actuator

In the above embodiments, the round tube type actuator and the corresponding conductor layout are shown, and in practical applications, the actuator may also adopt a non-round tube type. Referring to fig. 5a, the first actuating portion 501 of the actuator 500 is a strip-shaped piezoelectric material sheet (e.g. a piezoelectric ceramic sheet), and the first electrodes 504 are respectively disposed on two opposite surfaces in the Y-axis direction, that is, the first electrodes 504 are formed as electrode pairs on two opposite surfaces in the Y-axis direction of the first actuating portion 501, and the manner in which the first electrodes 504 are disposed is referred to the foregoing, and will not be described herein again. In operation, under the action of the first electrode 504, the swinging end of the first actuating portion 501 can swing in the Y-axis direction, so as to drive the second actuating portion 502 to swing in the Y-axis direction.

The swinging end of the first actuating portion 501 is connected to the base 028 of the second actuating portion 502, and as a possible embodiment, the first actuating portion 501 and the base 028 of the second actuating portion 502 are integrally formed. The other end of the first actuating portion 501 (i.e. the lower left end in fig. 5 a) is adapted to be fixedly connected to a corresponding fixing portion (not shown in fig. 5a, reference may be made to the fixing portion 33 in fig. 3 a) when applied, and the specific fixing manner will depend on the actual application. In fig. 5a, a through hole for accommodating an optical fiber is disposed at a center of the fixed end of the first actuating portion 501, and the optical fiber can extend to form a cantilever structure at the free end of the second actuating portion 502 through the through hole, which is not described in detail herein.

The second actuating portion 502 is in the form of a square bar, and further includes a base 028 and a sheet 506 of piezoelectric material. The substrate 028 is in a square bar shape, the two sides of the substrate 028 facing the X-axis direction are respectively provided with a piezoelectric material sheet 506 (for example, a piezoelectric ceramic sheet), the inner and outer surfaces of the piezoelectric material sheet 506 are uniformly provided with the second electrodes 505, and generally, the electrode coated on the surface of the piezoelectric material sheet 506 facing the substrate 028 can be regarded as an inner electrode portion (not shown in fig. 5 a) of the second electrode 505, and correspondingly, the electrode coated on the other surface of the piezoelectric material sheet 506 can be regarded as an outer electrode portion of the second electrode 505.

When the second electrode 505 is operated, each piezoelectric material piece 506 is acted on by the second electrode 505, and a piezoelectric effect is generated, so that the second actuating portion 502 can swing rapidly in the X-axis direction.

The conductors 503 are attached to the outer surface of the actuator 500, specifically, the conductors 503 are disposed on two opposite side surfaces of the first actuating portion 501 facing the X-axis direction, for example, one side surface of the first actuating portion 501 is provided with two conductors 5031 and 5032, which are isolated from each other, one conductor 5031 (i.e., the conductor near the upper surface of the first actuating portion 501 in fig. 5 a) is connected to the inner electrode portion of the second electrode 505 on the piezoelectric material piece 506, and the other conductor 5032 (i.e., the conductor near the lower surface of the first actuating portion 501 in fig. 5 a) is bent and attached to the end surface of the piezoelectric material piece 506 at the connection point with the second actuating portion 502, and is connected to the outer electrode portion of the second electrode 505 on the surface of the piezoelectric material piece 506. Similar to the previous embodiments, the conductor 503 in this embodiment may be a printed circuit or a flexible wire.

Here, the conductor 503 is attached to the outer surface of the first actuator 501 in an insulating manner, so as to avoid interference with the first electrode 504, and is electrically connected to the surface of the second electrode 505. As a possible way, an insulating coating/film may be disposed between the conductor 503 and the outer surface of the first actuating portion 501, which will not be described in detail herein.

In addition to the above-described structure shown in fig. 5a, in practical applications, it is also possible to use an actuator as shown in fig. 5 b. Specifically, a square rod type actuator 600 is shown in fig. 5b, comprising a similar main body structure as the actuator 500 in fig. 5 a: the first actuating portion 601, the second actuating portion 602, the first electrode 604, the second electrode 605, and the actuating piezoelectric material sheet 606 are not described in detail herein, and the third electrode 607, the correction piezoelectric material sheet 608, and the conductor 603. Wherein:

the second actuating portion 502 is provided with the correction piezoelectric material pieces 608 on two opposite outer surfaces in the Y-axis direction, and of course, the correction piezoelectric material pieces 608 are not limited to being provided on two opposite outer surfaces, and in some cases, it is also possible to arrange the correction piezoelectric material pieces 608 on only one of the surfaces facing the Y-axis direction. The correction piezoelectric material piece 608 may be a piezoelectric ceramic piece, wherein the inner and outer surfaces of the piezoelectric ceramic piece are uniformly provided with third electrodes 607, and the correction piezoelectric material piece 608 can correct the swing track of the second actuating portion 602 in the high-frequency swing to a certain extent under the action of the correction signal output by the third electrodes 607.

The conductors 603 are attached to the four edges of the first actuating portion 501 in a pair-wise manner, i.e., two conductors 603 are arranged along each edge, respectively, such that eight conductors 603 are arranged in total, the conductors 603 being connected to the second electrode 505 on the actuating piezoelectric material piece 506 and to the third electrode 607 on the correcting piezoelectric material piece 608, respectively, on the second actuating portion. In other words, four of the conductors 603 are used to connect the inner electrode portions of the respective piezoelectric material pieces, and the other four conductors 603 are used to connect the outer electrode portions of the respective piezoelectric material pieces. Of course, each conductor 603 is attached to a surface of the actuator 600. In this embodiment, the third electrode 607 for connecting to the correction piezoelectric material piece 608 may be connected to an external correction control circuit for transmitting a correction signal.

Optical fiber scanner

Referring to fig. 6, an optical fiber scanner 700 is provided in the present application, where the optical fiber scanner 700 uses an actuator 710 (for example, a circular tube type actuator in the foregoing embodiment), a corresponding transmission optical fiber (not shown in fig. 6) extends at a free end of the actuator 710 to form a scanning optical fiber 720 after passing through the actuator 710, together with the scanning optical fiber 720 and the fixing portion 730, is fixedly packaged in a package 740, and a corresponding lens group 750 is also fixed at an emitting end of the package 740. In operation, the scanning optical fiber 720 scans light along a set scanning trajectory under the driving of the actuator 710, and the scanning modes include, but are not limited to: raster scan, spiral scan, lissajous scan, and the like.

In the above description, according to the present embodiment, the conductor is not required to be arranged on the actuator in the form of a "flying wire", but is arranged so as to be attached to the surface of the actuator, thereby reducing the influence of the conductor on the swing of the actuator. In particular, when the actuator is operated, the first actuating portion swings in the Y-axis direction, the deformation (bending) degree of the surface thereof in the Y-axis direction is the greatest, and the deformation (bending) degree of the side surface of the first actuating portion in the X-axis direction is the smallest, so that the conductors are arranged on the side surface of the first actuating portion in the X-axis direction, the influence of the deformation on the conductors is the smallest, and the adverse influence on the stability of the conductors themselves and on the swing of the first actuating portion is the smallest.

Obviously, compared with the traditional flying lead mode, the wiring mode in the embodiment of the application can effectively reduce the interference on the swing of the second actuating part and can improve the stability of the actuator.

All embodiments in the application are described in a progressive manner, and identical and similar parts of all embodiments are mutually referred, so that each embodiment mainly describes differences from other embodiments. In particular, for the apparatus, device and medium embodiments, since they are substantially similar to the method embodiments, the description is relatively simple, and the relevant parts will be referred to in the description of the method embodiments, which is not repeated herein.

Thus, particular embodiments of the present subject matter have been described. Other embodiments are within the scope of the following claims. In some cases, the actions recited in the claims can be performed in a different order and still achieve desirable results. In addition, the processes depicted in the accompanying figures do not necessarily require the particular order shown, or sequential order, to achieve desirable results. In some embodiments, multitasking and parallel processing may be advantageous.

The terms "first," "second," "the first," or "the second," as used in various embodiments of the present disclosure, may modify various components without regard to order and/or importance, but these terms do not limit the corresponding components. The above description is only configured for the purpose of distinguishing an element from other elements. For example, the first user device and the second user device represent different user devices, although both are user devices. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the present disclosure.

When an element (e.g., a first element) is referred to as being "coupled" (operatively or communicatively) to "another element (e.g., a second element) or" connected "to another element (e.g., a second element), it is understood that the one element is directly connected to the other element or the one element is indirectly connected to the other element via yet another element (e.g., a third element). In contrast, it will be understood that when an element (e.g., a first element) is referred to as being "directly connected" or "directly coupled" to another element (a second element), then no element (e.g., a third element) is interposed therebetween.

The foregoing description is only of the preferred embodiments of the present application and is presented as a description of the principles of the technology being utilized. It will be appreciated by persons skilled in the art that the scope of the invention referred to in this application is not limited to the specific combinations of features described above, but it is intended to cover other embodiments in which any combination of features described above or equivalents thereof is possible without departing from the spirit of the invention. Such as the above-described features and technical features having similar functions (but not limited to) disclosed in the present application are replaced with each other.

Claims (10)

1. An actuator, comprising at least: the first actuating part and the second actuating part are characterized in that a first electrode is arranged on the first actuating part, a second electrode is arranged on the second actuating part, wherein,

a gap is reserved between the first electrodes arranged on the outer surface of the first actuating part along the direction parallel to the axial direction of the actuator, a conductor is arranged in the gap, and the conductor is electrically connected to part or all of the second electrodes and is used for providing electric signals for the second electrodes.

2. The actuator of claim 1, wherein the gap formed by the first electrode at the outer surface of the first actuating portion is located in a direction orthogonal to a deformation direction on the first actuating portion.

3. An actuator according to claim 1 or claim 2, wherein the conductor is insulated from the first actuator surface and is not in contact with the first electrode.

4. An actuator according to claim 3, wherein the conductor comprises: printed circuits printed on the surface of the actuator, or flexible wires attached to the actuator.

5. An actuator according to claim 3, wherein the actuator is a tube of piezoelectric material; the first electrode and the second electrode are communicated on the inner wall of the piezoelectric material tube to form a common inner electrode; the first electrode is symmetrically arranged on the outer surface of the first actuating part in the first axial direction, and the second electrode is symmetrically arranged on the outer surface of the second actuating part in the second axial direction.

6. The actuator of claim 5, wherein a gap of a set width is left between the second electrodes symmetrically disposed on the outer surface of the second actuating portion in parallel with the axial direction of the actuator, and the gap formed by the first electrode is offset from the gap formed by the second electrode in the axial direction of the actuator.

7. An actuator according to claim 3, wherein the first actuating portion in the actuator is a strip-shaped piezoelectric material sheet, and the first electrodes are respectively arranged on two opposite surfaces in a first axial direction;

the second actuating part comprises a Fang Bangxing matrix and piezoelectric material sheets, the piezoelectric material sheets are arranged on two opposite side surfaces of the square column matrix towards the second axis direction, and the second electrodes are uniformly distributed on the inner and outer two opposite surfaces of each piezoelectric material sheet;

the conductors are attached to two opposite side surfaces of the first actuating portion facing the second axis direction, and are respectively connected to the second electrodes of each of the piezoelectric material pieces.

8. The actuator of claim 7, wherein the square bar-shaped substrate is further provided with a correction piezoelectric material sheet on at least one surface facing the first axis direction, and third electrodes are arranged on both inner and outer surfaces of the correction piezoelectric material sheet;

and a conductor connected with a third electrode on the correction piezoelectric material sheet, attached to the first actuating part along the side surface of the first actuating part in the second axial direction, and attached to the joint of the first actuating part and the second actuating part, and used for transmitting an external correction signal to the correction piezoelectric material sheet.

9. An actuator according to claim 7 or 8, wherein the number of conductors matches the number of second electrodes disposed on the outer surface of the second actuating portion.

10. An optical fiber scanner comprising at least the actuator of any one of claims 1 to 9, a scanning optical fiber, a fixing portion, a lens group, and a package, wherein,

the scanning optical fiber extends outwards from the swinging end of the second actuating part to form a cantilever structure, and the cantilever optical fiber scans and outputs an image beam according to a set track under the drive of the actuator;

the fixing part is arranged at the tail end of the first actuating part so as to integrally fix the actuator in the packaging shell;

the lens group is fixed at the light emitting end of the packaging shell, and the image light beams scanned and output by the scanning optical fibers are emitted after passing through the lens group.