CN116500046A - Film type object scanning method, device, system, equipment and storage medium - Google Patents
Film type object scanning method, device, system, equipment and storage medium Download PDFInfo
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- CN116500046A CN116500046A CN202310753942.6A CN202310753942A CN116500046A CN 116500046 A CN116500046 A CN 116500046A CN 202310753942 A CN202310753942 A CN 202310753942A CN 116500046 A CN116500046 A CN 116500046A
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000010408 film Substances 0.000 claims abstract description 82
- 239000010409 thin film Substances 0.000 claims abstract description 38
- 238000001514 detection method Methods 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 10
- 238000004590 computer program Methods 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 5
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000012491 analyte Substances 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000013461 design Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 5
- 229920001621 AMOLED Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000010191 image analysis Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The application discloses a film type object scanning method, device, system, equipment and storage medium, and relates to the technical field of product scanning. The method comprises the steps of firstly controlling a horizontal moving mechanism to drive a laser range finder to horizontally move, measuring a corresponding distance value to an object stage surface when the laser range finder moves to a corresponding point aiming at each two-dimensional coordinate point, then controlling a vertical moving mechanism to lift and adjust the height of a camera in advance according to the distance value of each two-dimensional coordinate point when the thin film type object to be measured placed on the object stage surface is subjected to running point scanning, so that the distance from the camera to the thin film type object to be measured is kept within a depth of field range, and finally performing image acquisition work, thereby automatically focusing in advance according to the distance requirement, avoiding overlong scanning time, ensuring that the whole production time beat can be followed, being particularly suitable for scenes with insufficient processing precision on the object stage surface, and further reducing the processing cost and the processing failure probability of the object stage surface.
Description
Technical Field
The invention belongs to the technical field of product scanning, and particularly relates to a method, a device, a system, equipment and a storage medium for scanning a film type object to be measured.
Background
In the process of TFT-LCD (Thin Film Transistor Liquid Crystal Display, thin film transistor liquid crystal display, which is one of the most important components in liquid crystal panels, it uses thin film transistor technology to improve the image quality), AMOLED (Active-matrix organic light-patterning diode, active matrix organic light emitting diode or Active matrix organic light emitting diode), or CF (Color Filter, which is the most important component in liquid crystal panels), it is often necessary to perform line scan detection on thin film products. However, the stage surface of the film-type product has a problem of insufficient processing accuracy (for example, the higher the flatness requirement of the stage surface is, the more the processing cost is required and the lower the yield is, while the stage surface of the film-type product is made of glass, the middle area sags due to the fact that the middle area cannot be supported when the stage surface faces large-size glass), so that the distance from the line scanning camera to the film-type product cannot be matched with the depth of field of the camera (namely, the front-rear distance range of the object measured by imaging the front edge of a camera or other imagers, the distance from the aperture, the lens and the focal plane to the object is an important factor influencing the depth of field), further the scanned image is out of focus, and the follow-up image analysis work is unfavorable, for example, when the line scanning is performed, the image analysis is generally under 3um, and the deviation range of the boundary value and the center value of the depth of field is required to be +/-35 um.
At present, when line scanning detection is carried out on a film type product by using the existing equipment on the market, the scanning needs to be stopped at all times and then focused to keep the definition of an image, so that the result is that the scanning time is too long, and the overall production time beat is influenced. Therefore, in order to solve the problem of insufficient processing precision of the stage surface, it is a urgent task for those skilled in the art to provide a new scheme suitable for rapid focusing scanning of a thin film type object to be measured.
Disclosure of Invention
The invention aims to provide a film type object to be tested scanning method, a device, a system, computer equipment and a computer readable storage medium, which are used for solving the problem that the whole production time beat is influenced due to overlong scanning time in the traditional film type product line scanning detection scheme.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
in a first aspect, there is provided a film type object scanning method performed by a control device communicatively connecting a horizontal moving mechanism, a vertical moving mechanism, a laser range finder, and a camera, respectively, including:
controlling the horizontal moving mechanism to drive the laser range finder to horizontally move on a horizontal plane, wherein the horizontal plane is positioned right above the object stage surface, and the laser range finder is fixedly arranged on a horizontal moving part of the horizontal moving mechanism and enables the laser emission direction of the laser range finder to vertically face downwards;
for each two-dimensional coordinate point on the horizontal plane, when the laser range finder moves to a corresponding point, measuring by the laser range finder to obtain a corresponding distance value from the corresponding point to the object stage surface;
after the film type object to be measured is placed on the object stage surface, the film type object to be measured is subjected to running point scanning according to the distance value of each two-dimensional coordinate point in the following mode:
for each two-dimensional coordinate point, before the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, firstly, according to the corresponding distance value and the known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film type measured object is kept within the depth of field of the camera, then, the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, finally, the image acquisition work of the film type measured object at the corresponding point is completed through the camera, wherein the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, so that the lens is vertically downward.
Based on the above-mentioned summary, a new scanning scheme for carrying out stage surface detection in advance is provided, namely, a horizontal moving mechanism is controlled to drive a laser distance meter to horizontally move on a horizontal plane, and for each two-dimensional coordinate point, a corresponding distance value from the corresponding point to the stage surface is measured when the laser distance meter moves to the corresponding point, then when the thin film type detected object placed on the stage surface is subjected to running point scanning, the vertical moving mechanism is controlled to lift and adjust the height of the camera in advance according to the distance value of each two-dimensional coordinate point, so that the distance from the camera to the thin film type detected object is kept within the depth of field of the camera, and finally image acquisition is carried out, thus, automatic focusing can be carried out in advance according to the distance requirement, overlong scanning time is avoided, the integral production time beat can be ensured, the method is particularly suitable for a scene with insufficient processing precision on the stage surface, further reducing the processing cost of the stage surface and reducing the processing failure probability, and being convenient for practical application and popularization.
In one possible design, the stage surface includes a detection stage surface made of an aluminum alloy material or a detection stage surface made of a glass material.
In one possible design, for a certain two-dimensional coordinate point on the horizontal plane, according to a corresponding distance value and a known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film type object to be measured is kept within the depth of field of the camera, and the method comprises the following steps:
according to the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane, calculating to obtain the current distance from the camera to the film type measured object;
judging whether the current distance from the camera to the film type measured object is within the depth of field of the camera or not;
if so, not controlling the vertical moving mechanism to lift and adjust the height of the camera, otherwise, when the current distance from the camera to the film type measured object is larger than the upper limit value of the depth of field range, controlling the vertical moving mechanism to reduce and adjust the height of the camera until the current distance from the camera to the film type measured object is smaller than the upper limit value of the depth of field range, and when the current distance from the camera to the film type measured object is smaller than the lower limit value of the depth of field range, controlling the vertical moving mechanism to lift and adjust the height of the camera until the current distance from the camera to the film type measured object is larger than the lower limit value of the depth of field range.
In one possible design, according to the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane, the current distance from the camera to the film-type object to be measured is calculated, including:
and calculating the current distance from the camera to the film type measured object according to the distance value of the certain two-dimensional coordinate point, the known current height of the camera relative to the horizontal plane and the known thickness of the film type measured object.
In one possible design, after the thin film type object is placed on the stage surface, performing the running point scanning on the thin film type object according to the distance value of each two-dimensional coordinate point includes:
after a film type object to be detected is placed on the object stage surface, at least one two-dimensional area corresponding to at least one distance range is obtained according to the distance value of each two-dimensional coordinate point, and then the film type object to be detected is sequentially scanned for the running points in each two-dimensional area in the at least one two-dimensional area according to the sequence from small to large or from large to small.
In a second aspect, a film type object scanning device is provided, which is suitable for being arranged in control equipment which is respectively connected with a horizontal moving mechanism, a vertical moving mechanism, a laser range finder and a camera in a communication mode, and comprises a moving control module, a distance measuring module and a running point scanning module which are sequentially connected in a communication mode;
the movement control module is used for controlling the horizontal movement mechanism to drive the laser range finder to horizontally move on a horizontal plane, wherein the horizontal plane is positioned right above the object stage surface, and the laser range finder is fixedly arranged on a horizontal movement component of the horizontal movement mechanism and enables the laser emission direction of the laser range finder to vertically face downwards;
the distance measuring module is used for measuring a distance value from a corresponding point to the object stage surface through the laser range finder when the laser range finder moves to the corresponding point for each two-dimensional coordinate point on the horizontal plane;
the running point scanning module is used for carrying out running point scanning on the film type measured object according to the distance value of each two-dimensional coordinate point after the film type measured object is placed on the object stage surface in the following mode:
for each two-dimensional coordinate point, before the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, firstly, according to the corresponding distance value and the known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film type measured object is kept within the depth of field of the camera, then, the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, finally, the image acquisition work of the film type measured object at the corresponding point is completed through the camera, wherein the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, so that the lens is vertically downward.
In a third aspect, the invention provides a film type object scanning system, which comprises a horizontal moving mechanism, a vertical moving mechanism, a laser range finder, a camera and control equipment;
the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, the laser range finder is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, the laser emission direction of the laser range finder is vertically downward, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, and the lens is vertically downward;
the control device is respectively in communication connection with the horizontal moving mechanism, the vertical moving mechanism, the laser range finder and the camera, and is used for executing the thin film type object scanning method which is possibly designed in the first aspect or the first aspect.
In one possible design, the control device employs an industrial personal computer based on a programmable logic controller.
In a fourth aspect, the present invention provides a computer device, including a memory, a processor and a transceiver, which are connected in communication in sequence, where the memory is configured to store a computer program, the transceiver is configured to send and receive a message, and the processor is configured to read the computer program, and execute the thin film type object scanning method according to any of the first aspect or the first aspect.
In a fifth aspect, the present invention provides a computer-readable storage medium having instructions stored thereon that, when executed on a computer, perform a method of scanning a thin film type test object as described in the first aspect or any of the possible designs of the first aspect.
In a sixth aspect, the present invention provides a computer program product comprising instructions which, when run on a computer, cause the computer to perform a method of scanning a thin film type object as described in the first aspect or any of the possible designs of the first aspect.
The beneficial effect of above-mentioned scheme:
(1) The invention creatively provides a novel scanning scheme for carrying out object stage surface detection in advance, namely a horizontal moving mechanism is controlled to drive a laser distance meter to horizontally move on a horizontal plane, and for each two-dimensional coordinate point, a corresponding distance value from the corresponding point to the object stage surface is measured when the laser distance meter moves to the corresponding point, then when a thin film type object to be detected placed on the object stage surface is subjected to running point scanning, the vertical moving mechanism is controlled to lift and adjust the height of a camera in advance according to the distance value of each two-dimensional coordinate point, so that the distance from the camera to the thin film type object to be detected is kept within the depth of field of the camera, and finally image acquisition is carried out.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a flow chart of a method for scanning a film type object to be measured according to an embodiment of the present application.
Fig. 2 is a schematic diagram of a positional relationship between a horizontal moving mechanism, a vertical moving mechanism, a laser range finder, a camera, a stage surface and a film type object to be measured according to an embodiment of the present application.
Fig. 3 is a schematic structural diagram of a thin film type object scanning device according to an embodiment of the present application.
Fig. 4 is a schematic structural diagram of a film type object scanning system according to an embodiment of the present application.
Fig. 5 is a schematic structural diagram of a computer device according to an embodiment of the present application.
In the above figures: 100-a horizontal movement mechanism; a linear reciprocating sub-mechanism in the 101-X direction; 102-Y direction linear reciprocating motion sub-mechanism; 200-a vertical movement mechanism; 300-laser range finder; 400-a camera; 500-stage surface; 600-thin film type test object.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be briefly described below with reference to the accompanying drawings and the description of the embodiments or the prior art, and it is obvious that the following description of the structure of the drawings is only some embodiments of the present invention, and other drawings can be obtained according to these drawings without inventive effort to a person skilled in the art. It should be noted that the description of these examples is for aiding in understanding the present invention, but is not intended to limit the present invention.
It should be understood that although the terms first and second, etc. may be used herein to describe various objects, these objects should not be limited by these terms. These terms are only used to distinguish one object from another. For example, a first object may be referred to as a second object, and similarly a second object may be referred to as a first object, without departing from the scope of example embodiments of the invention.
It should be understood that for the term "and/or" that may appear herein, it is merely one association relationship that describes an associated object, meaning that there may be three relationships, e.g., a and/or B, may represent: three cases of A alone, B alone or both A and B exist; as another example, A, B and/or C, can represent the presence of any one of A, B and C or any combination thereof; for the term "/and" that may appear herein, which is descriptive of another associative object relationship, it means that there may be two relationships, e.g., a/and B, it may be expressed that: the two cases of A and B exist independently or simultaneously; in addition, for the character "/" that may appear herein, it is generally indicated that the context associated object is an "or" relationship.
Examples:
as shown in fig. 1, the method for scanning a film-type object to be measured according to the first aspect of the present embodiment may be, but is not limited to, executed by a control device having a certain computing resource and respectively connected to a horizontal moving mechanism, a vertical moving mechanism, a laser range finder and a camera in a communication manner, for example, executed by a control device such as an industrial personal computer. As shown in fig. 1, the method for scanning a thin film type object to be measured may include, but is not limited to, the following steps S1 to S3.
S1, controlling the horizontal moving mechanism to drive the laser range finder to horizontally move on a horizontal plane, wherein the horizontal plane is positioned right above the object stage surface, and the laser range finder is fixedly installed on a horizontal moving part of the horizontal moving mechanism and enables the laser emission direction of the laser range finder to vertically face downwards.
In the step S1, as shown in fig. 2, the horizontal moving mechanism 100 includes an X-direction linear reciprocating sub-mechanism 101 and a Y-direction linear reciprocating sub-mechanism 102, where a fixing component of the Y-direction linear reciprocating sub-mechanism 102 is fixedly mounted on a moving component of the X-direction linear reciprocating sub-mechanism 101, and the laser rangefinder is fixedly mounted on a moving component of the Y-direction linear reciprocating sub-mechanism 102 (i.e., a horizontal moving component of the horizontal moving mechanism), so that the horizontal moving mechanism 100 can be obtained based on the existing linear reciprocating mechanism combination, and the purpose of driving the laser rangefinder 300 to perform horizontal movement by controlling the horizontal moving mechanism 100 is achieved. The laser range finder 300 is used for measuring distance values from the horizontal plane to the stage surface at different positions based on the existing laser range finding technology, and thus it is required to make the laser emission direction of the laser range finder vertically downward. In addition, the stage surface 500 includes, but is not limited to, a detection stage surface made of an aluminum alloy material, a detection stage surface made of a glass material, or the like.
S2, measuring a distance value which corresponds to each two-dimensional coordinate point on the horizontal plane and is from the corresponding point to the object stage surface through the laser distance measuring instrument when the laser distance measuring instrument moves to the corresponding point.
S3, after the film type object to be detected is placed on the object stage surface, performing running point scanning on the film type object to be detected according to the distance value of each two-dimensional coordinate point in the following mode: for each two-dimensional coordinate point, before the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, firstly, according to the corresponding distance value and the known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film type measured object is kept within the depth of field of the camera, then, the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, finally, the image acquisition work of the film type measured object at the corresponding point is completed through the camera, wherein the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, so that the lens is vertically downward.
In the step S3, the thin film type test object 600 may be, but is not limited to, a thin film type product in a TFT-LCD, AMOLED or CF process. The vertical moving mechanism 200 may also be implemented by using a conventional linear reciprocating mechanism, and as shown in fig. 2, a fixed part of the vertical moving mechanism 200 is fixedly mounted on a moving part of the Y-direction linear reciprocating sub-mechanism 102. The camera is used for acquiring images of the film-type object 600 so as to obtain image data capable of performing image analysis, so as to achieve the purpose of scanning and detecting the film-type object 600, and may be implemented by using an existing camera such as a CCD (Charge-coupled Device) camera.
In the step S3, specifically, for a certain two-dimensional coordinate point on the horizontal plane, according to a corresponding distance value and a known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film-type object to be measured is kept within the depth of field of the camera, including but not limited to the following steps S31 to S33.
S31, calculating to obtain the current distance from the camera to the film type measured object according to the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane.
In the step S31, since the fixed part of the vertical movement mechanism 200 is fixedly mounted on the horizontal movement part of the horizontal movement mechanism 100 and the camera 400 is fixedly mounted on the vertical movement part of the vertical movement mechanism 200, the known current height of the camera with respect to the horizontal plane can be conventionally obtained according to the known current movement amount of the vertical movement part. In detail, the specific calculation formula may be as follows: the current distance from the camera to the film type measured object is equal to the sum of the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane. In addition, considering that the film-type object 600 may also have a certain thickness, in order to further accurately obtain the current distance from the camera to the film-type object, it is preferable to calculate the current distance from the camera to the film-type object according to the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane, which includes, but is not limited to: and calculating the current distance from the camera to the film type measured object according to the distance value of the certain two-dimensional coordinate point, the known current height of the camera relative to the horizontal plane and the known thickness (such as average thickness) of the film type measured object, namely, the current distance from the camera to the film type measured object is equal to the sum of the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane, and subtracting the known thickness of the film type measured object.
S32, judging whether the current distance from the camera to the film type measured object is within the depth of field of the camera.
S33, if so, not controlling the vertical moving mechanism to lift and adjust the height of the camera, otherwise, when the current distance from the camera to the film type object to be measured is greater than the upper limit value of the depth of field range, controlling the vertical moving mechanism to reduce and adjust the height of the camera until the current distance from the camera to the film type object to be measured is less than the upper limit value of the depth of field range (preferably equal to the middle value of the depth of field range), and when the current distance from the camera to the film type object to be measured is less than the lower limit value of the depth of field range, controlling the vertical moving mechanism to lift and adjust the height of the camera until the current distance from the camera to the film type object to be measured is greater than the lower limit value of the depth of field range (preferably equal to the middle value of the depth of field range).
In step S3, in order to reduce the number of times of lifting adjustment of the vertical movement mechanism, it is preferable that after the thin film type object to be measured is placed on the stage surface, the thin film type object to be measured is subjected to the running point scanning according to the distance value of each two-dimensional coordinate point, including but not limited to: after a film type object to be detected is placed on the object stage surface, at least one two-dimensional area corresponding to at least one distance range is obtained according to the distance value of each two-dimensional coordinate point, and then the film type object to be detected is sequentially scanned for the running points in each two-dimensional area in the at least one two-dimensional area according to the sequence from small to large or from large to small. For example, according to the distance value of each two-dimensional coordinate point, 3 two-dimensional areas are obtained: the two-dimensional area A, the two-dimensional area B and the two-dimensional area C have the corresponding distance ranges of (50 um,100 um), (100 um,150 um) and (150 um,200 um), respectively, the two-dimensional area A can be subjected to the running point scanning, the two-dimensional area B can be subjected to the running point scanning, and the two-dimensional area C can be subjected to the running point scanning, or the two-dimensional area C can be subjected to the running point scanning, the two-dimensional area B can be subjected to the running point scanning, and the two-dimensional area A can be subjected to the running point scanning, wherein the stepping length of the at least one distance range is preferably half of the upper limit difference value and the lower limit difference value of the depth of field range.
The scanning method for the film type object to be detected is based on the steps S1-S3, and a new scanning scheme for detecting the object surface of the object stage is provided, namely, a horizontal moving mechanism is controlled to drive a laser distance meter to horizontally move on a horizontal plane, and for each two-dimensional coordinate point, a corresponding distance value from the corresponding point to the object surface is measured when the laser distance meter moves to the corresponding point, then when the film type object to be detected placed on the object stage surface is subjected to running point scanning, the vertical moving mechanism is controlled to lift and adjust the height of a camera in advance according to the distance value of each two-dimensional coordinate point, so that the distance from the camera to the film type object to be detected is kept within the depth of field of the camera, and finally image acquisition work is performed.
As shown in fig. 3, a second aspect of the present embodiment provides a virtual device for implementing the method for scanning a film-type object under test according to the first aspect, which is adapted to be disposed in a control device that is communicatively connected to a horizontal moving mechanism, a vertical moving mechanism, a laser rangefinder, and a camera, and includes a movement control module, a distance measurement module, and a running point scanning module that are sequentially communicatively connected to each other;
the movement control module is used for controlling the horizontal movement mechanism to drive the laser range finder to horizontally move on a horizontal plane, wherein the horizontal plane is positioned right above the object stage surface, and the laser range finder is fixedly arranged on a horizontal movement component of the horizontal movement mechanism and enables the laser emission direction of the laser range finder to vertically face downwards;
the distance measuring module is used for measuring a distance value from a corresponding point to the object stage surface through the laser range finder when the laser range finder moves to the corresponding point for each two-dimensional coordinate point on the horizontal plane;
the running point scanning module is used for carrying out running point scanning on the film type measured object according to the distance value of each two-dimensional coordinate point after the film type measured object is placed on the object stage surface in the following mode:
for each two-dimensional coordinate point, before the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, firstly, according to the corresponding distance value and the known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film type measured object is kept within the depth of field of the camera, then, the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, finally, the image acquisition work of the film type measured object at the corresponding point is completed through the camera, wherein the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, so that the lens is vertically downward.
The working process, working details and technical effects of the foregoing device provided in the second aspect of the present embodiment may refer to the method for scanning a film type object to be measured described in the first aspect, which are not described herein again.
As shown in fig. 4, a third aspect of the present embodiment provides an entity system for implementing the method for scanning a film type object to be measured according to the first aspect, where the entity system includes a horizontal moving mechanism, a vertical moving mechanism, a laser range finder, a camera and a control device;
the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, the laser range finder is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, the laser emission direction of the laser range finder is vertically downward, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, and the lens is vertically downward;
the control device is respectively in communication connection with the horizontal moving mechanism, the vertical moving mechanism, the laser range finder and the camera, and is used for executing the film type object scanning method according to the first aspect. The control device preferably adopts an industrial personal computer based on a programmable logic controller.
The working process, working details and technical effects of the foregoing system provided in the third aspect of the present embodiment may refer to the method for scanning a film type object to be measured described in the first aspect, which are not described herein again.
As shown in fig. 5, a fourth aspect of the present embodiment provides a computer device for performing the thin film type object scanning method according to the first aspect, including a memory, a processor, and a transceiver, which are sequentially communicatively connected, where the memory is configured to store a computer program, the transceiver is configured to send and receive a message, and the processor is configured to read the computer program, and perform the thin film type object scanning method according to the first aspect. By way of specific example, the Memory may include, but is not limited to, random-Access Memory (RAM), read-Only Memory (ROM), flash Memory (Flash Memory), first-in first-out Memory (First Input First Output, FIFO), and/or first-in last-out Memory (First Input Last Output, FILO), etc.; the processor may be, but is not limited to, a microprocessor of the type STM32F105 family. In addition, the computer device may include, but is not limited to, a power module, a display screen, and other necessary components.
The working process, working details and technical effects of the foregoing computer device provided in the fourth aspect of the present embodiment may refer to the method for scanning a film type object to be measured described in the first aspect, which are not described herein again.
A fifth aspect of the present embodiment provides a computer-readable storage medium storing instructions containing the thin film type object scanning method according to the first aspect, i.e., the computer-readable storage medium has instructions stored thereon that, when executed on a computer, perform the thin film type object scanning method according to the first aspect. The computer readable storage medium refers to a carrier for storing data, and may include, but is not limited to, a floppy disk, an optical disk, a hard disk, a flash Memory, and/or a Memory Stick (Memory Stick), where the computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable devices.
The working process, working details and technical effects of the foregoing computer readable storage medium provided in the fifth aspect of the present embodiment may refer to the method for scanning a film type object to be measured as described in the first aspect, which are not described herein again.
A sixth aspect of the present embodiment provides a computer program product comprising instructions which, when run on a computer, cause the computer to perform the method of scanning a thin film type object under test according to the first aspect. Wherein the computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus.
Finally, it should be noted that: the foregoing description is only of the preferred embodiments of the invention and is not intended to limit the scope of the invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A thin film type object scanning method, characterized by being executed by control devices communicatively connected to a horizontal moving mechanism, a vertical moving mechanism, a laser range finder, and a camera, respectively, comprising:
controlling the horizontal moving mechanism to drive the laser range finder to horizontally move on a horizontal plane, wherein the horizontal plane is positioned right above the object stage surface, and the laser range finder is fixedly arranged on a horizontal moving part of the horizontal moving mechanism and enables the laser emission direction of the laser range finder to vertically face downwards;
for each two-dimensional coordinate point on the horizontal plane, when the laser range finder moves to a corresponding point, measuring by the laser range finder to obtain a corresponding distance value from the corresponding point to the object stage surface;
after the film type object to be measured is placed on the object stage surface, the film type object to be measured is subjected to running point scanning according to the distance value of each two-dimensional coordinate point in the following mode:
for each two-dimensional coordinate point, before the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, firstly, according to the corresponding distance value and the known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film type measured object is kept within the depth of field of the camera, then, the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, finally, the image acquisition work of the film type measured object at the corresponding point is completed through the camera, wherein the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, so that the lens is vertically downward.
2. The method according to claim 1, wherein the stage surface includes a detection stage surface made of an aluminum alloy material or a detection stage surface made of a glass material.
3. The method according to claim 1, wherein for a certain two-dimensional coordinate point on the horizontal plane, according to a corresponding distance value and a known current height of the camera relative to the horizontal plane, the vertical movement mechanism is controlled to adjust the height of the camera in a lifting manner, so that a distance from the camera to the thin-film type object to be measured is kept within a depth of field of the camera, comprising:
according to the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane, calculating to obtain the current distance from the camera to the film type measured object;
judging whether the current distance from the camera to the film type measured object is within the depth of field of the camera or not;
if so, not controlling the vertical moving mechanism to lift and adjust the height of the camera, otherwise, when the current distance from the camera to the film type measured object is larger than the upper limit value of the depth of field range, controlling the vertical moving mechanism to reduce and adjust the height of the camera until the current distance from the camera to the film type measured object is smaller than the upper limit value of the depth of field range, and when the current distance from the camera to the film type measured object is smaller than the lower limit value of the depth of field range, controlling the vertical moving mechanism to lift and adjust the height of the camera until the current distance from the camera to the film type measured object is larger than the lower limit value of the depth of field range.
4. The method for scanning a thin film type object according to claim 3, wherein calculating a current distance from the camera to the thin film type object according to the distance value of the certain two-dimensional coordinate point and the known current height of the camera relative to the horizontal plane comprises:
and calculating the current distance from the camera to the film type measured object according to the distance value of the certain two-dimensional coordinate point, the known current height of the camera relative to the horizontal plane and the known thickness of the film type measured object.
5. The method according to claim 1, wherein after the thin film type object is placed on the stage surface, performing the running point scan on the thin film type object based on the distance values of the respective two-dimensional coordinate points, comprises:
after a film type object to be detected is placed on the object stage surface, at least one two-dimensional area corresponding to at least one distance range is obtained according to the distance value of each two-dimensional coordinate point, and then the film type object to be detected is sequentially scanned for the running points in each two-dimensional area in the at least one two-dimensional area according to the sequence from small to large or from large to small.
6. The film type object scanning device is characterized by being suitable for being arranged in control equipment which is respectively connected with a horizontal moving mechanism, a vertical moving mechanism, a laser range finder and a camera in a communication mode, and comprising a moving control module, a distance measuring module and a running point scanning module which are sequentially connected in a communication mode;
the movement control module is used for controlling the horizontal movement mechanism to drive the laser range finder to horizontally move on a horizontal plane, wherein the horizontal plane is positioned right above the object stage surface, and the laser range finder is fixedly arranged on a horizontal movement component of the horizontal movement mechanism and enables the laser emission direction of the laser range finder to vertically face downwards;
the distance measuring module is used for measuring a distance value from a corresponding point to the object stage surface through the laser range finder when the laser range finder moves to the corresponding point for each two-dimensional coordinate point on the horizontal plane;
the running point scanning module is used for carrying out running point scanning on the film type measured object according to the distance value of each two-dimensional coordinate point after the film type measured object is placed on the object stage surface in the following mode:
for each two-dimensional coordinate point, before the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, firstly, according to the corresponding distance value and the known current height of the camera relative to the horizontal plane, the vertical moving mechanism is controlled to lift and adjust the height of the camera, so that the distance from the camera to the film type measured object is kept within the depth of field of the camera, then, the horizontal moving mechanism is controlled to drive the camera to move to the corresponding point, finally, the image acquisition work of the film type measured object at the corresponding point is completed through the camera, wherein the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, so that the lens is vertically downward.
7. The film type object scanning system is characterized by comprising a horizontal moving mechanism, a vertical moving mechanism, a laser range finder, a camera and control equipment;
the fixing part of the vertical moving mechanism is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, the laser range finder is fixedly arranged on the horizontal moving part of the horizontal moving mechanism, the laser emission direction of the laser range finder is vertically downward, and the camera is fixedly arranged on the vertical moving part of the vertical moving mechanism, and the lens is vertically downward;
the control device is respectively in communication connection with the horizontal moving mechanism, the vertical moving mechanism, the laser range finder and the camera, and is used for executing the film type object scanning method according to any one of claims 1 to 5.
8. The thin film type analyte scanning system of claim 7, wherein the control device employs an industrial personal computer based on a programmable logic controller.
9. A computer device comprising a memory, a processor and a transceiver in communication connection in sequence, wherein the memory is used for storing a computer program, the transceiver is used for receiving and transmitting messages, and the processor is used for reading the computer program and executing the thin film type object scanning method according to any one of claims 1 to 5.
10. A computer-readable storage medium having instructions stored thereon that, when executed on a computer, perform the method of scanning a thin film type object according to any one of claims 1 to 5.
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