CN116497322B - High-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply - Google Patents
High-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply Download PDFInfo
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- CN116497322B CN116497322B CN202310324114.0A CN202310324114A CN116497322B CN 116497322 B CN116497322 B CN 116497322B CN 202310324114 A CN202310324114 A CN 202310324114A CN 116497322 B CN116497322 B CN 116497322B
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- 238000007733 ion plating Methods 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- 238000001816 cooling Methods 0.000 claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- 239000012528 membrane Substances 0.000 claims description 2
- 210000003437 trachea Anatomy 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 229920006257 Heat-shrinkable film Polymers 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
The invention discloses a high-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply, which comprises a shell, wherein a power module and a circuit board are arranged in the shell, a cooling component is arranged in the shell, the cooling component comprises a bracket, the bracket is connected in the shell in a sliding manner, the power module is arranged in the bracket, one side of the bracket is provided with a positioning mechanism, the positioning mechanism comprises positioning pipes, the positioning mechanisms are symmetrically arranged, the two positioning mechanisms are fixedly connected to the top wall of the interior of the shell, one side of the bracket is provided with a suction mechanism, the suction mechanism is inserted in the positioning pipes, a gas collecting mechanism is arranged in the shell, one end of the positioning pipe is communicated with the gas collecting mechanism, and two air bags are arranged in the shell.
Description
Technical Field
The invention relates to the technical field of power supplies, in particular to a high-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply.
Background
The multi-arc ion plating is a method of adopting arc discharge to directly evaporate metal on a solid cathode target, an evaporant is an ion of a cathode substance emitted from a cathode arc glow spot, so that the ion plating is deposited on the surface of a substrate to form a film, the ion plating is required to be applied to a multi-arc power supply, the problems of dust accumulation and poor heat dissipation are found in the conventional vacuum arc striking power supply in the use process, and the dust accumulation after long-time use further affects the heat dissipation performance, so that the power supply is more easily restarted due to downtime caused by overhigh temperature, explosion occurs when the temperature of a power supply module in the power supply is overhigh, and the power supply module can influence surrounding power supply modules, so that the power supply is damaged and cannot be normally used.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a high-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply with rapid temperature reduction and protection.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a high-efficient energy-conserving high reliable vacuum multi-arc ion plating power, includes the casing, the inside of casing is provided with power module and circuit board, the inside of casing is provided with the cooling subassembly, the cooling subassembly includes the support, support sliding connection is in the inside of casing, power module installs in the inside of support, one side of support is provided with positioning mechanism, positioning mechanism includes the locating tube, positioning mechanism symmetry sets up, and two the equal fixed connection of positioning mechanism is in the inside roof of casing, one side of support is provided with pumping mechanism, pumping mechanism inserts the inside of locating tube, the inside of casing is provided with gas collecting mechanism, the one end and the gas collecting mechanism of locating tube are linked together, the internally mounted of casing has two gasbags.
The invention is further provided with: the positioning mechanism further comprises conductive rods, the conductive rods are symmetrically arranged, one ends of the two conductive rods are fixedly connected to one side, close to the power module, of the support, a sleeve is sleeved on the outer side wall of each conductive rod, and the outer diameter of each sleeve is matched with the inner diameter of the positioning tube.
The invention is further provided with: the gas collecting mechanism comprises a gas collecting box, the gas collecting box is located inside a shell, one end of a positioning pipe is communicated with the gas collecting box, the gas collecting box divides an inner cavity of the shell into a first cavity and a second cavity, the circuit board is arranged on one side of the gas collecting box and located inside the first cavity, exhaust holes are evenly formed in the other side of the gas collecting box, and two air bags are located in the second cavity.
The invention is further provided with: the inside of gas-collecting tank is provided with subassembly one, subassembly one includes the water tank, the water tank is installed in the inside of gas-collecting tank, wear to be equipped with the cooling tube in the water tank, and the both ends of cooling tube communicate respectively in the top and the bottom of water tank, all communicate between two gasbags and the gas-collecting tank has the trachea.
The invention is further provided with: two opposite sides of gasbag are provided with subassembly two, subassembly two includes the soft board, the soft board symmetry sets up respectively in two opposite sides of gasbag, two opposite sides of gasbag have symmetrically seted up two logical grooves respectively, the soft board is corresponding with logical groove, the internally mounted of casing has the pyrocondensation membrane, the top and the bottom of soft board all are connected with buckle mechanism, buckle mechanism and gasbag detachable connection.
The invention is further provided with: the suction mechanism comprises an electric push rod, the electric push rod is arranged in a sleeve, a piston is arranged on a piston rod of the sleeve, and the outer diameter of the piston is matched with the inner diameter of the positioning pipe.
The invention is further provided with: the electric push rod is characterized in that one end, close to the sleeve, of the electric push rod is provided with a conductive contact, the conductive contact is electrically connected with the electric push rod through a wire, a spring is connected between one end, close to the support, of the sleeve and one side of the support, the spring is located on the outer side wall of the conductive rod, and a baffle ring is arranged in the positioning tube.
The invention is further provided with: and a grid is arranged on one side of the support, which is far away from the power module.
The invention is further provided with: the inside diapire of casing installs the gib block, support sliding connection is in gib block top.
The invention is further provided with: the top of the shell is provided with a filter plate.
The invention has the advantages that through the arrangement of the gas collecting tank, when the sleeve slides in the positioning pipe, the sleeve drives the electric push rod and the piston to slide into the positioning pipe, and the electric push rod continuously drives the piston to reciprocate in the positioning pipe, so that air in the shell is sucked into the positioning pipe through the gas collecting tank or discharged into the gas collecting tank and the shell from the positioning pipe, the air in the shell flows, and the water tank in the gas collecting tank is matched for continuously cooling the power supply module, thereby avoiding overhigh overvoltage temperature of the power supply, and greatly prolonging the service life of the power supply.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the structure of the bracket in the pulled-out state of the present invention;
FIG. 3 is a schematic view of the internal structure of the sleeve according to the present invention;
FIG. 4 is a schematic view of the connecting structure of the positioning pipe and the gas collecting tank of the present invention;
FIG. 5 is a schematic view of an assembly of the present invention in one embodiment;
FIG. 6 is a schematic diagram of a second embodiment of the assembly of the present invention;
FIG. 7 is a schematic view of the connection structure of the housing and heat shrinkable film of the present invention;
in the figure: 1. a housing; 2. a filter plate; 3. a cooling component; 31. a bracket; 32. a grille; 33. a positioning mechanism; 331. a conductive rod; 332. a sleeve; 333. a positioning tube; 34. a suction mechanism; 341. an electric push rod; 342. a piston; 343. a spring; 344. a baffle ring; 345. a conductive contact; 35. a gas collecting mechanism; 351. a gas collection box; 352. an exhaust hole; 353. a first component; 3531. a water tank; 3532. a cooling tube; 3533. An air pipe; 36. a second component; 361. a buckle mechanism; 362. a through groove; 363. a flexible board; 364. a heat shrinkage film; 37. a guide bar; 38. an air bag; 4. a power module; 5. a circuit board.
Description of the embodiments
It should be noted that, without conflict, the embodiments and features of the embodiments in the present application may be combined with each other 4. The invention will be described in detail below with reference to the drawings in connection with embodiments.
It is noted that all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs unless otherwise indicated.
In the present invention, unless otherwise indicated, the terms "upper" and "lower" are used generally with respect to the directions shown in the drawings, or with respect to the vertical, vertical or gravitational directions; also, for ease of understanding and description, "left, right" is generally directed to the left, right as shown in the drawings; "inner and outer" refer to inner and outer relative to the outline of the components themselves, but the above-described orientation terms are not intended to limit the present invention.
Examples
Referring to fig. 1-6, the present invention provides the following technical solutions:
specifically, the efficient energy-saving high-reliability vacuum multi-arc ion plating power supply comprises a shell 1, a power module 4 and a circuit board 5 are arranged in the shell 1, a cooling component 3 is arranged in the shell 1, the cooling component 3 comprises a support 31, the support 31 is slidably connected in the shell 1, a guide strip 37 is arranged on the bottom wall of the shell 1, the support 31 is slidably connected to the top of the guide strip 37, the guide strip 37 is used for guiding the support 31, the support 31 is prevented from deviating when the support 31 slides in the shell 1, the power module 4 is arranged in the support 31, the support 31 is used for bearing the power module 4, a grid 32 is arranged on one side of the support 31 far away from the power module 4, a filter plate 2 is arranged on the top of the shell 1, the grid 32 and the filter plate 2 are used for ventilating the inside and outside of the shell 1, heat can not be discharged, and dust in the air outside the shell 1 is filtered;
one side of support 31 is provided with positioning mechanism 33, and positioning mechanism 33 includes locating tube 333, and positioning mechanism 33 symmetry sets up, and two equal fixed connection of positioning mechanism 33 in the inside roof of casing 1, and the internally mounted of casing 1 has two air bags 38, and when support 31 and power module 4 shrink in the inside of casing 1, two air bags 38 extrude power module 4's both sides, avoid power module 4 to take place the displacement in the inside of casing 1.
The positioning mechanism 33 further comprises conductive rods 331, the conductive rods 331 are symmetrically arranged, one ends of the two conductive rods 331 are fixedly connected to one side, close to the power module 4, of the support 31, a sleeve 332 is sleeved on the outer side wall of the conductive rods 331, the outer diameter of the sleeve 332 is matched with the inner diameter of the positioning tube 333, when the support 31 slides in the shell 1, the support 31 drives the conductive rods 331 and the sleeve 332 to slide in the positioning tube 333, and accordingly guiding effect is achieved when the support 31 slides.
One side of the bracket 31 is provided with a suction mechanism 34, the suction mechanism 34 is inserted into the positioning tube 333, the suction mechanism 34 comprises an electric push rod 341, the electric push rod 341 is arranged in the sleeve 332, a piston 342 is arranged on a piston rod of the sleeve 332, the outer diameter of the piston 342 is matched with the inner diameter of the positioning tube 333, when the sleeve 332 slides in the positioning tube 333, the sleeve 332 drives the electric push rod 341 and the piston 342 to slide in the positioning tube 333, and air in the shell 1 is sucked into the positioning tube 333 or discharged from the positioning tube 333, so that the air in the shell 1 flows;
the electric push rod 341 is close to one end of the sleeve 332 and is provided with a conductive contact 345, the conductive contact 345 is electrically connected with the electric push rod 341 through a wire, a spring 343 is connected between one end of the sleeve 332 close to the bracket 31 and one side of the bracket 31, the spring 343 is positioned on the outer side wall of the conductive rod 331, a baffle ring 344 is arranged in the positioning tube 333, when the electric push rod 341 slides into the positioning tube 333, the baffle ring 344 limits the electric push rod 341, a piston 342 slides through the baffle ring 344, the electric push rod 341 is attached to one end of the baffle ring 344, the electric push rod 341 and the sleeve 332 keep static along with the continuous sliding of the electric push rod 341 into the positioning tube 333, the bracket 31 drives the conductive rod 331 to slide in the sleeve 332, when the bracket 31 slides into the inside of the shell 1 completely, the spring 343 is in a compressed state, one end of the conductive rod 331 far away from the bracket 31 is contacted with the conductive contact 345, and the power supply module 4 supplies power to the electric push rod 341 through the conductive rod 331 and the conductive contact 345, and the electric push rod 341 drives the piston 342 to reciprocate in the positioning tube 333;
when the electric push rod 341 extends, the piston 342 extrudes the air in the positioning tube 333 from the positioning tube 333, and when the electric push rod 341 contracts, the piston 342 sucks the air in the positioning tube 333 from the housing 1 into the positioning tube 333, and the air in the housing 1 continuously flows;
the inside of the shell 1 is provided with a gas collecting mechanism 35, the gas collecting mechanism 35 comprises a gas collecting box 351, the gas collecting box 351 is positioned in the shell 1, one end of a positioning pipe 333 is communicated with the gas collecting box 351, the gas collecting box 351 divides the inner cavity of the shell 1 into a first chamber and a second chamber, a circuit board 5 is arranged on one side of the gas collecting box 351 and positioned in the first chamber, the other side of the gas collecting box 351 is uniformly provided with a vent 352, a first component 353 is arranged in the gas collecting box 351, the first component 353 comprises a water tank 3531, the water tank 3531 is arranged in the gas collecting box 351, a cooling pipe 3532 is arranged in the water tank 3531 in a penetrating manner, two ends of the cooling pipe 3532 are respectively communicated with the top and the bottom of the water tank 3531, when air is continuously discharged from the positioning pipe 333, the air is discharged into the gas collecting box 351, and thus the cooled in the water tank 3531, the cooled air enters the shell 1 through the vent 352, thus the power supply module 4 is cooled, the air in the power supply module 354, the air in the shell 1 is subjected to cooling by the air bag 354, and the air is synchronously sucked into the two air collecting boxes in the air bag 3538, and the two air bags in the air bag 3538 are synchronously connected with the two air collecting boxes in the air bag 351, and the air bag 38, and the two air bag 38 in the air bag 3 is simultaneously cooled in the air bag 3 and the air bag 3;
the principle of the embodiment is as follows: the staff pulls the support 31 and pulls the support 31 out of the shell 1, the staff places a plurality of power modules 4 on the support 31 according to requirements and electrically connects the power modules 4 with the conducting rods 331, after the placement of the power modules 4 is completed, the staff pushes the support 31 back into the shell 1, the grille 32 and the filter plates 2 are used for ventilating the inside and the outside of the shell 1, heat is prevented from being discharged, and dust in the air outside the shell 1 is filtered;
when the support 31 is retracted into the shell 1, the support 31 drives the conductive rod 331 and the sleeve 332 to displace, and when the support 31 slides in the shell 1, the support 31 drives the conductive rod 331 and the sleeve 332 to slide in the positioning tube 333, so that a guiding effect is achieved when the support 31 slides;
when the sleeve 332 slides in the positioning tube 333, the sleeve 332 drives the electric push rod 341 and the piston 342 to slide in the positioning tube 333, when the electric push rod 341 slides in the positioning tube 333, the baffle ring 344 limits the electric push rod 341, the piston 342 passes through the baffle ring 344, the electric push rod 341 is attached to one end of the baffle ring 344, the electric push rod 341 and the sleeve 332 keep still along with the continuous sliding of the electric push rod 341 in the positioning tube 333, the support 31 drives the conductive rod 331 to slide in the sleeve 332, when the support 31 completely slides in the housing 1, the spring 343 is in a compressed state, one end of the conductive rod 331 far away from the support 31 is in contact with the conductive contact 345, at the moment, the power module 4 supplies power to the electric push rod 341 through the conductive rod 331 and the conductive contact 345, and the electric push rod 341 drives the piston 342 to reciprocate in the positioning tube 333;
when the electric push rod 341 extends, the piston 342 extrudes the air in the positioning tube 333 from the positioning tube 333, and when the electric push rod 341 contracts, the piston 342 sucks the air in the positioning tube 333 from the housing 1 into the positioning tube 333, and the air in the housing 1 continuously flows;
when the air is continuously discharged from the positioning pipe 333, the air in the positioning pipe 333 is discharged into the air collecting box 351, the air flows in the cooling pipe 3532 arranged in the water tank 3531, so that the air is cooled, the cooled air enters the shell 1 through the exhaust hole 352, the power module 4 is cooled, the air in the shell 1 is heated by the heat emitted by the power module 4, and when the hot air is continuously sucked into the air collecting box 351 from the shell 1, the water tank 3531 in the air collecting box 351 cools the hot air again and enters the positioning pipe 333, so that the purpose of cooling the power module 4 is achieved;
after the bracket 31 is completely retracted into the shell 1, the two air bags 38 squeeze the two sides of the power module 4, so that the power module 4 is prevented from being displaced in the shell 1;
the air pipe 3533 is used for communicating the air bag 38 with the air collection box 351, when air in the air collection box 351 flows, the air in the air bag 38 synchronously flows, so that the air in the air bag 38 is synchronously cooled, and the air bag 38 is attached to the power module 4, so that the air bag 38 cooperates with cold air in the air bag to simultaneously cool the power module 4;
examples
According to the embodiment shown in fig. 7, the improvement is that, based on the first embodiment, a second component 36 is provided on the opposite side of the two air bags 38, the second component 36 includes a flexible board 363, the flexible board 363 is symmetrically provided on the opposite side of the two air bags 38, two through slots 362 are symmetrically provided on the opposite side of the two air bags 38, the through slots 362 are used for discharging air in the air bags 38, the flexible board 363 is used for covering the through slots 362, the flexible board 363 corresponds to the through slots 362, a heat shrinkage film 364 is installed in the casing 1, the top and bottom of the flexible board 363 are both connected with a buckle mechanism 361, the buckle mechanism 361 is detachably connected with the air bags 38, the buckle mechanism 361 is used for installing the flexible board 363 on the air bags 38, and the heat shrinkage film 364 is used for wrapping the power module 4;
the principle of the embodiment is as follows: as the bracket 31 drives the power module 4 to slide into the housing 1, the heat shrinkage film 364 continuously wraps the power module 4 and the power module 4 continuously extrudes the air bag 38, when the bracket 31 slides into the housing 1 completely, the heat shrinkage film 364 wraps the side wall of the power module 4 completely, the heat shrinkage film 364 is attached to the side wall of the power module 4, the air bag 38 is attached to the side wall of the power module 4, and the soft board 363 is attached to the heat shrinkage film 364;
when the power module 4 is overheated and damaged, the heat shrinkage film 364 is heated and shrunk to tightly wrap the power supply, and the heat shrinkage film 364 continuously shrinks to pull the soft board 363 to be uncovered from the air bag 38, so that the through groove 362 is exposed, and cold air in the air bag 38 is discharged through the through groove 362 to be in contact with the power module 4, so that the power module 4 is rapidly cooled, and the influence on the circuit board 5 when the power module 4 is overheated and damaged is avoided.
It will be apparent that the embodiments described above are merely some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
It should be noted that the terms "first," "second," and the like in the description and claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or described herein.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (7)
1. The utility model provides a high-efficient energy-conserving high reliable vacuum multi-arc ion plating power, includes casing (1), the inside of casing (1) is provided with power module (4) and circuit board (5), its characterized in that: the cooling assembly is characterized in that the cooling assembly (3) is arranged inside the shell (1), the cooling assembly (3) comprises a support (31), the support (31) is connected inside the shell (1) in a sliding mode, the power module (4) is arranged inside the support (31), one side of the support (31) is provided with a positioning mechanism (33), the positioning mechanism (33) comprises positioning pipes (333), the positioning mechanisms (33) are symmetrically arranged, two positioning mechanisms (33) are fixedly connected to the inner top wall of the shell (1), one side of the support (31) is provided with a suction mechanism (34), the suction mechanism (34) is inserted inside the positioning pipes (333), a gas collecting mechanism (35) is arranged inside the shell (1), one end of the positioning pipe (333) is communicated with the gas collecting mechanism (35), and two air bags (38) are arranged inside the shell (1). The positioning mechanism (33) further comprises conductive rods (331), the conductive rods (331) are symmetrically arranged, one ends of the two conductive rods (331) are fixedly connected to one side, close to the power module (4), of the support (31), a sleeve (332) is sleeved on the outer side wall of each conductive rod (331), and the outer diameter of each sleeve (332) is matched with the inner diameter of the positioning tube (333); the gas collecting mechanism (35) comprises a gas collecting box (351), the gas collecting box (351) is positioned in the shell (1), one end of the positioning pipe (333) is communicated with the gas collecting box (351), the gas collecting box (351) divides the inner cavity of the shell (1) into a first cavity and a second cavity, the circuit board (5) is arranged on one side of the gas collecting box (351) and positioned in the first cavity, the other side of the gas collecting box (351) is uniformly provided with exhaust holes (352), and the two air bags (38) are positioned in the second cavity; the inside of gas collection box (351) is provided with subassembly one (353), subassembly one (353) includes water tank (3531), water tank (3531) are installed in the inside of gas collection box (351), wear to be equipped with cooling tube (3532) in water tank (3531), and the both ends of cooling tube (3532) communicate respectively in the top and the bottom of water tank (3531), all communicate between two gasbag (38) and gas collection box (351) have trachea (3533).
2. The efficient energy-saving high-reliability vacuum multi-arc ion plating power supply according to claim 1, wherein the power supply is characterized in that: two opposite sides of gasbag (38) are provided with subassembly two (36), subassembly two (36) are including soft board (363), soft board (363) symmetry sets up respectively in two opposite sides of gasbag (38), two logical groove (362) have been seted up respectively to two opposite sides of gasbag (38) symmetry, soft board (363) are corresponding with logical groove (362), internally mounted of casing (1) has pyrocondensation membrane (364), the top and the bottom of soft board (363) all are connected with buckle mechanism (361), buckle mechanism (361) can dismantle with gasbag (38) and be connected.
3. The high-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply according to claim 1 or 2, characterized in that: the suction mechanism (34) comprises an electric push rod (341), the electric push rod (341) is arranged in the sleeve (332), a piston (342) is arranged on a piston rod of the sleeve (332), and the outer diameter of the piston (342) is matched with the inner diameter of the positioning tube (333).
4. The high efficiency energy saving high reliability vacuum multi-arc ion plating power supply according to claim 3, wherein: the electric push rod is characterized in that one end of the electric push rod (341) close to the sleeve (332) is provided with a conductive contact (345), the conductive contact (345) is electrically connected with the electric push rod (341) through a wire, a spring (343) is connected between one end of the sleeve (332) close to the bracket (31) and one side of the bracket (31), the spring (343) is located on the outer side wall of the conductive rod (331), and a baffle ring (344) is arranged in the positioning tube (333).
5. The efficient energy-saving high-reliability vacuum multi-arc ion plating power supply according to claim 1, wherein the power supply is characterized in that: a grid (32) is arranged on one side, far away from the power module (4), of the support (31).
6. The high-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply according to claim 5, wherein the power supply is characterized in that: the guide strip (37) is arranged on the inner bottom wall of the shell (1), and the support (31) is connected to the top of the guide strip (37) in a sliding mode.
7. The efficient energy-saving high-reliability vacuum multi-arc ion plating power supply according to claim 6, wherein the power supply is characterized in that: the top of the shell (1) is provided with a filter plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310324114.0A CN116497322B (en) | 2023-03-30 | 2023-03-30 | High-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310324114.0A CN116497322B (en) | 2023-03-30 | 2023-03-30 | High-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply |
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| CN116497322A CN116497322A (en) | 2023-07-28 |
| CN116497322B true CN116497322B (en) | 2024-03-29 |
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| CN218041178U (en) * | 2022-07-05 | 2022-12-13 | 江阴市天马电源制造有限公司 | High-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply |
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- 2023-03-30 CN CN202310324114.0A patent/CN116497322B/en active Active
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| JP2014181406A (en) * | 2013-03-15 | 2014-09-29 | Vapor Technol Inc | Low pressure arc plasma immersion coating deposition and ion processing |
| CN214701379U (en) * | 2021-05-13 | 2021-11-12 | 四川锦成国泰真空设备有限公司 | Cooling device for vacuum coating machine |
| CN214572954U (en) * | 2021-05-31 | 2021-11-02 | 济宁华隆机械制造有限公司 | Disc type heat dispersion device |
| CN215724547U (en) * | 2021-10-08 | 2022-02-01 | 唐山中土科技发展有限公司 | Cooling circulation structure for small ion coating machine |
| CN218041178U (en) * | 2022-07-05 | 2022-12-13 | 江阴市天马电源制造有限公司 | High-efficiency energy-saving high-reliability vacuum multi-arc ion plating power supply |
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