CN116494403B - Vacuum gas circuit filtering device and filtering method of dicing saw - Google Patents
Vacuum gas circuit filtering device and filtering method of dicing saw Download PDFInfo
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- CN116494403B CN116494403B CN202310770591.XA CN202310770591A CN116494403B CN 116494403 B CN116494403 B CN 116494403B CN 202310770591 A CN202310770591 A CN 202310770591A CN 116494403 B CN116494403 B CN 116494403B
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- 238000001914 filtration Methods 0.000 title claims abstract description 97
- 238000000034 method Methods 0.000 title claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 217
- 238000001816 cooling Methods 0.000 claims abstract description 51
- 239000007921 spray Substances 0.000 claims description 14
- 238000005520 cutting process Methods 0.000 claims description 13
- 230000005484 gravity Effects 0.000 claims description 4
- 229920000742 Cotton Polymers 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005507 spraying Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/265—Drying gases or vapours by refrigeration (condensation)
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/266—Drying gases or vapours by filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
Abstract
The embodiment of the invention provides a vacuum gas circuit filtering device and a vacuum gas circuit filtering method for a dicing saw, and relates to the technical field of dicing saws. This scribing machine vacuum gas circuit filter equipment includes vacuum working dish, the filter tank, first vacuum pipeline, first vacuum generator and filter plug, filter tank and vacuum working dish intercommunication, the filter tank is used for collecting steam, the one end and the filter tank intercommunication of first vacuum pipeline, the other end of first vacuum generator and first vacuum pipeline is connected, first vacuum generator is used for the suction of the steam in the filter tank to first vacuum pipeline, the filter plug sets up in the filter tank, the tip intercommunication of filter plug and first vacuum pipeline, the bottom of filter plug is run through there is the guiding gutter, the filter plug is used for cooling the steam that gets into first vacuum pipeline makes the steam liquefaction, the water after the liquefaction flows back to the filter tank through the guiding gutter. The effect of removing water vapor in the vacuum gas circuit can be effectively improved, and the stability of the vacuum gas circuit is ensured.
Description
Technical Field
The invention relates to the technical field of dicing saw, in particular to a vacuum gas circuit filtering device and a vacuum gas circuit filtering method of a dicing saw.
Background
The water spraying cooling and waste removing operation can be carried out in the process of cutting the workpiece by the dicing saw, a certain gap exists when the workpiece is dismounted from the vacuum working disk, so that water enters the vacuum gas path, when a small amount of water enters, the water can be discharged through the gas outlet, when the water inflow is overlarge, water drops or ice crystals can be condensed at the vacuum outlet, and the phenomenon of unstable vacuum can occur; if water exists in the vacuum gas circuit for a long time, after the water is blown back by vacuum, the water is blown back into each branch, and electronic components such as a vacuum meter in vacuum and the like can be damaged, so that the production of the dicing saw is affected. Therefore, a drainage device is generally arranged on the dicing saw to drain water in the vacuum air path.
The drainage device of the dicing saw in the prior art has the problem of poor drainage effect.
Disclosure of Invention
The invention provides a vacuum gas circuit filtering device and a filtering method of a dicing saw, which can effectively improve the effect of removing water vapor in a vacuum gas circuit, further ensure the stability of the vacuum gas circuit and avoid damaging electronic elements so as to influence the production operation of the dicing saw.
Embodiments of the invention may be implemented as follows:
the embodiment of the invention provides a vacuum gas circuit filtering device of a dicing saw, which comprises:
the vacuum working disc is used for bearing a workpiece;
the filtering water tank is communicated with the vacuum working disc and is used for collecting water vapor entering the vacuum working disc;
one end of the first vacuum pipeline is communicated with the filtering water tank;
the first vacuum generator is connected with the other end of the first vacuum pipeline and is used for vacuumizing the first vacuum pipeline so as to absorb water vapor in the filtering water tank into the first vacuum pipeline;
the filter plug, the filter plug sets up along X axis direction, the filter plug set up in filter tank, just filter plug with the tip intercommunication of first vacuum pipeline, the bottom of filter plug is run through there is the guiding gutter, the guiding gutter is followed the length direction setting of filter plug, the filter plug is used for getting into the steam of first vacuum pipeline cools off for the steam liquefaction, the water after the liquefaction passes through the guiding gutter flows back to filter tank.
Optionally, the two ends of the filter plug are an inlet end and an outlet end, the inlet end is communicated with the filter water tank, the outlet end is communicated with the end part of the first vacuum pipeline, and the end face size of the inlet end is larger than the end face size of the outlet end, so that the diversion trench is obliquely arranged, and water flowing into the diversion trench flows back to the filter water tank.
Optionally, the inlet end and the outlet end are both circular structures, and the diameter of the inlet end is larger than the diameter of the outlet end.
Optionally, the filter plug includes cooling segment and linkage segment, the cooling segment with the linkage segment intercommunication, the entrance point set up in the cooling segment, the exit end set up in the linkage segment, the linkage segment with the entry intercommunication of first vacuum pipeline, the cooling segment is used for the cooling get into the steam of filter plug for the steam liquefaction, the water after the liquefaction gets into under the action of gravity the guiding gutter, and the back flows back the filter tank.
Optionally, the cooling section is equipped with a plurality of filter, a plurality of filter sets up along the length direction interval of cooling section, the filter is used for getting into the steam of cooling section is cooled off for the steam liquefaction.
Optionally, a plurality of filter holes penetrate through the filter plate.
Optionally, the filter plate is filter cotton.
Optionally, the cooling section is in a horn structure.
Optionally, the dicing saw vacuum gas circuit filtering device further comprises a second vacuum pipeline, and the end part of the second vacuum pipeline is communicated with the bottom of the filtering water tank.
Optionally, the dicing saw vacuum gas circuit filtering device further comprises a second vacuum generator, the second vacuum generator is communicated with one end, far away from the filtering water tank, of the second vacuum pipeline, and the second vacuum generator is used for vacuumizing the second vacuum pipeline.
The embodiment of the invention also provides a filtering method, which utilizes the vacuum gas circuit filtering device of the dicing saw to filter, and comprises the following steps:
vacuum adsorption fixing is carried out on the workpiece through the vacuum working disc, the surface of the workpiece is cut by the rotary cutting piece, and the water spray cooling piece sprays water towards the surface of the workpiece for cooling in the cutting process;
starting the first vacuum generator to vacuumize, and adsorbing the water vapor entering the vacuum working disc into the filtering water tank;
continuing to suck the water vapor in the filtering water tank so that the water vapor enters the first vacuum pipeline;
the filter plug cools and liquefies the water vapor entering the first vacuum pipeline, and the liquefied water falls down to the diversion trench and flows back to the filter water tank along the diversion trench.
The vacuum gas circuit filtering device and the filtering method of the dicing saw have the beneficial effects that:
this scribing machine vacuum gas circuit filter equipment includes vacuum working dish, the filtration water tank, first vacuum pipeline, first vacuum generator and filter plug, the vacuum working dish is used for bearing the work piece, filtration water tank and vacuum working dish intercommunication, the filtration water tank is used for collecting the steam that gets into the vacuum working dish, the one end and the filtration water tank intercommunication of first vacuum pipeline, the other end of first vacuum generator and first vacuum pipeline are connected, first vacuum generator is used for evacuating first vacuum pipeline, thereby adsorb the steam in the filtration water tank into first vacuum pipeline, the filter plug sets up along X axis direction, the filter plug sets up in the filtration water tank, and the tip intercommunication of filter plug and first vacuum pipeline, the guiding gutter has been run through to the bottom of filter plug, the guiding gutter sets up along the length direction of filter plug, the filter plug is used for cooling the steam that gets into first vacuum pipeline, make the steam liquefaction, the water after the liquefaction flows back through the guiding gutter and filters the water tank. This dicing saw vacuum gas circuit filter equipment when using, first vacuum generator work is to first vacuum pipeline and filter tank evacuation, in the vacuum gas circuit of vacuum working dish steam can inhale the filter tank, because first vacuum generator and first vacuum pipeline intercommunication, steam in the filter tank can adsorb and get into in the first vacuum pipeline, steam can pass through the filter plug after getting into first vacuum pipeline, the filter plug is used for cooling the steam that gets into first vacuum pipeline for the steam liquefaction, the steam can drop down and get into the guiding gutter after the liquefaction of water, and collect in the backward flow filter tank through the guiding gutter. This dicing saw vacuum gas circuit filter equipment can concentrate the steam and collect in the filtration water tank, can effectively improve the effect of getting rid of the steam in the vacuum gas circuit, further guarantees the stability of vacuum gas circuit, thereby avoids steam to flow everywhere and damages electronic component and influences the production operation of dicing saw.
The filtering method comprises the steps of carrying out vacuum adsorption and fixation on a workpiece through a vacuum working disc, rotating a cutting piece to cut the surface of the workpiece, and spraying water to cool the workpiece by a water spraying cooling piece in the cutting process; starting a first vacuum generator to vacuumize, and adsorbing water vapor entering a vacuum working disc into a filtering water tank; continuously sucking the water vapor in the filtering water tank to enable the water vapor to enter the first vacuum pipeline; the filter plug cools and liquefies the water vapor entering the first vacuum pipeline, and the liquefied water falls into the diversion trench and flows back to the filter water tank along the diversion trench. The filtering method can filter and collect the water vapor in the vacuum working disc in the filtering water tank, can effectively improve the effect of removing the water vapor in the vacuum air path, and further ensures the stability of the vacuum air path.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a first view angle of a vacuum gas path filtering device of a dicing saw according to the present embodiment;
fig. 2 is a schematic structural diagram of a second view angle of the vacuum gas path filtering device of the dicing saw according to the present embodiment;
fig. 3 is a schematic structural view of a filter plug according to the present embodiment;
fig. 4 is a cross-sectional view of the filter plug provided in this embodiment.
Icon: 10-a vacuum working disc; 11-vacuum gas circuit; 20-a filter tank; 30-a first vacuum line; 40-a first vacuum generator; 50-a filter plug; 51-an inlet end; 52-an outlet end; 53-a cooling section; 54-connection segment; 60-filtering plates; 70-filtration pores; 80-a second vacuum line; 90-a second vacuum generator; 100-rotating the scribe; 200-spraying water cooling piece; 1000-a vacuum gas circuit filtering device of the dicing saw; 101-a workpiece; 102-diversion trench.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present invention and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
The dicing saw can perform water spray cooling and waste removal operation in the process of cutting the workpiece 101, because a certain gap exists when the workpiece 101 and the vacuum working disc are disassembled, water enters a vacuum gas path, when a small amount of water enters, the water can be discharged through an exhaust port, and when the water inflow is overlarge, water drops or ice crystals can be condensed at the vacuum port, so that the phenomenon of unstable vacuum can occur; if water exists in the vacuum gas circuit for a long time, after the water is blown back by vacuum, the water is blown back into each branch, and electronic components such as a vacuum meter in vacuum and the like can be damaged, so that the production of the dicing saw is affected. Therefore, a drainage device is generally arranged on the dicing saw to drain water in the vacuum air path.
The drainage device of the dicing saw in the related art has the problem of poor drainage effect.
Referring to fig. 1-4, the present embodiment provides a vacuum air path filtering device 1000 for dicing saw, which can effectively improve the above-mentioned technical problems, can effectively improve the effect of removing water vapor in the vacuum air path 11, further ensure the stability of the vacuum air path 11, and avoid damaging electronic components to affect the production operation of the dicing saw.
Referring to fig. 1-4, the present embodiment provides a dicing saw vacuum air path filtering device 1000, which includes a vacuum working disk 10, a filtering water tank 20, a first vacuum pipeline 30, a first vacuum generator 40 and a filter plug 50, wherein the vacuum working disk 10 is used for carrying a workpiece 101, the filtering water tank 20 is communicated with the vacuum working disk 10, the filtering water tank 20 is used for collecting water vapor entering the vacuum working disk 10, one end of the first vacuum pipeline 30 is communicated with the filtering water tank 20, the first vacuum generator 40 is connected with the other end of the first vacuum pipeline 30, the first vacuum generator 40 is used for vacuumizing the first vacuum pipeline 30, so that water vapor in the filtering water tank 20 is absorbed into the first vacuum pipeline 30, the filter plug 50 is arranged along the X-axis direction, the filter plug 50 is arranged on the filtering water tank 20, the end of the filter plug 50 is communicated with the end of the first vacuum pipeline 30, a guide groove 102 penetrates through the bottom of the filter plug 50, the guide groove 102 is arranged along the length direction of the filter plug 50, the filter plug 50 is used for cooling the water vapor entering the first vacuum pipeline 30, and the liquefied water vapor is enabled to flow back through the guide groove 102.
Specifically, the service life of the water draining device of the dicing saw in the prior art is extremely short; in addition, in the prior art, a one-way valve is arranged on a vacuum gas path of the vacuum working disc to avoid water vapor from entering, but the pressure inside the vacuum gas path can not be released after the vacuum is closed because the vacuum degree can always keep pressure. The drainage effect of the drainage device of the dicing saw in the prior art is not ideal. In order to solve the technical problem, when the dicing saw vacuum gas circuit filtering device 1000 provided in this embodiment is used, the first vacuum generator 40 works to vacuumize the first vacuum pipeline 30 and the filtering water tank 20, and the water vapor in the vacuum gas circuit 11 of the vacuum working disk 10 can be sucked into the filtering water tank 20, because the first vacuum generator 40 is communicated with the first vacuum pipeline 30, the water vapor in the filtering water tank 20 can be adsorbed into the first vacuum pipeline 30, the water vapor can pass through the filtering plug 50 after entering the first vacuum pipeline 30, the filtering plug 50 is used for cooling the water vapor entering the first vacuum pipeline 30, so that the water vapor is liquefied, and the water vapor drops down into the diversion trench 102 after being liquefied into water, and flows back into the filtering water tank 20 to be collected through the diversion trench 102. The dicing saw vacuum gas circuit filtering device 1000 can collect water vapor in the filtering water tank 20 in a concentrated manner, can effectively improve the effect of removing the water vapor in the vacuum gas circuit 11, further ensures the stability of the vacuum gas circuit 11, and avoids the influence of the water vapor on the production operation of the dicing saw due to the fact that the water vapor flows everywhere to damage electronic elements.
In this embodiment, the filter water tank 20 is communicated with the vacuum air channel 11 of the vacuum working disk 10, one end of the vacuum air channel 11 is communicated with the bottom of the vacuum working disk 10, the other end of the vacuum air channel 11 is communicated with the top of the filter water tank 20, and after the first vacuum generator 40 is started, the gas in the vacuum air channel 11 is adsorbed to the filter water tank 20 and continuously enters the first vacuum pipeline 30. Because work piece 101 will carry out the water spray cooling to work piece 101 with water spray cooling piece 200 in the cutting process, can lead to vacuum gas circuit 11 of vacuum working dish 10 to intake, consequently, can have water in adsorbing the gas to filter tank 20 and first vacuum pipeline 30, filter plug 50 can cool off the steam and make its liquefaction, the water after the liquefaction can flow back to filter tank 20 through guiding gutter 102 and collect, can avoid steam to lead to electric component impaired after flowing out through first vacuum pipeline 30, filter tank 20 and filter plug 50 all set up on the circuit of vacuum working dish 10 evacuation simultaneously, can not influence the normal absorption work of vacuum working dish 10 yet when realizing the drainage effect, can guarantee the vacuum degree of vacuum working dish 10.
Specifically, the end of the first vacuum line 30 is connected to the top of the sidewall of the filter tank 20 such that the first vacuum line 30 can adsorb moisture in the filter tank 20 to the maximum extent.
Specifically, the two ends of the filter plug 50 are an inlet end 51 and an outlet end 52, the inlet end 51 is communicated with the filter water tank 20, the outlet end 52 is communicated with the end of the first vacuum pipeline 30, and the end face size of the inlet end 51 is larger than the end face size of the outlet end 52, so that the diversion trench 102 is obliquely arranged, and water flowing into the diversion trench 102 flows back to the filter water tank 20.
In this embodiment, the inlet end 51 and the outlet end 52 are both circular in configuration, and the diameter of the inlet end 51 is greater than the diameter of the outlet end 52. Wherein the diameter of the inlet end 51 is larger than the diameter of the outlet end 52, such that the side wall of the filter plug 50 is inclined downwards away from the area of the first vacuum line 30, i.e. the channel 102 is inclined downwards away from the channel of the first vacuum line 30, such that water entering the channel 102 can flow in a direction away from the first vacuum line 30, i.e. in a direction towards the filter tank 20, and finally back into the filter tank 20.
Further, the larger diameter of the inlet end 51 of the filter plug 50 than the diameter of the outlet end 52 better prevents water from entering the first vacuum line 30 and from exiting the first vacuum line 30 and contaminating the electronic components.
It should be noted that, the filter plug 50 includes a cooling section 53 and a connecting section 54, the cooling section 53 is communicated with the connecting section 54, the inlet end 51 is disposed at the cooling section 53, the outlet end 52 is disposed at the connecting section 54, the connecting section 54 is communicated with the inlet of the first vacuum pipeline 30, the cooling section 53 is used for cooling the water vapor entering the filter plug 50, so that the water vapor is liquefied, and the liquefied water enters the diversion trench 102 under the action of gravity and flows back to the filter water tank 20.
Specifically, the connecting section 54 is of cylindrical configuration.
It should be further noted that the cooling section 53 is provided with a plurality of filter plates 60, and the plurality of filter plates 60 are disposed at intervals along the length direction of the cooling section 53, and the filter plates 60 are used for cooling the water vapor entering the cooling section 53, so that the water vapor is liquefied.
In the present embodiment, the number of the filter plates 60 is two, and two filter plates 60 are disposed at intervals along the length direction of the cooling section 53, and in other embodiments, the number of the filter plates 60 may be increased or decreased, which is not particularly limited herein.
It will be appreciated that the filter plate 60 has a plurality of filter holes 70 extending therethrough.
In this embodiment, the filter plate 60 is filter cotton. The filter plug 50 is made of PVC.
In the present embodiment, the cooling section 53 has a horn-like structure.
In addition, the dicing saw vacuum air path filtering apparatus 1000 further includes a second vacuum pipe 80, and an end of the second vacuum pipe 80 is communicated with the bottom of the filtering water tank 20. The second vacuum line 80 is capable of sucking water from the filter tank 20 to drain water.
It will be appreciated that the dicing saw vacuum air path filter apparatus 1000 further comprises a second vacuum generator 90, the second vacuum generator 90 being in communication with an end of the second vacuum line 80 remote from the filter water tank 20, the second vacuum generator 90 being adapted to evacuate the second vacuum line 80.
The embodiment of the invention also provides a filtering method, which uses the vacuum gas circuit filtering device 1000 of the dicing saw for filtering, and comprises the following steps:
s1: the workpiece 101 is vacuum adsorbed and fixed through the vacuum working disc 10, the surface of the workpiece 101 is cut by the rotary cutting piece 100, and the water spray cooling piece 200 sprays water to cool the surface of the workpiece 101 in the cutting process;
specifically, the dicing saw vacuum air path filtering device 1000 further includes a rotary dicing member 100 and a water spray cooling member 200, the rotary dicing member 100 is movably disposed above the vacuum working disk 10, the water spray cooling member 200 is connected with the rotary dicing member 100, the rotary dicing member 100 cuts the workpiece 101 under the condition of rotation, and the water spray cooling member 200 sprays water to cool the workpiece 101 surface during the cutting process and clean residual dirt on the workpiece 101 surface.
Further, the rotary scribe 100 is provided with a blade rotating at a high speed, which cuts the surface of the workpiece 101 while rotating.
S2: starting the first vacuum generator 40 to vacuumize, and adsorbing the water vapor entering the vacuum working disk 10 into the filtering water tank 20;
specifically, after the first vacuum generator 40 is started, the vacuumized gas reaches the vacuum working disk 10 through the vacuum gas circuit 11, so that the vacuum working disk 10 adsorbs and fixes the workpiece 101, in the vacuumized process, the water vapor in the vacuum gas circuit 11 can enter the filtering water tank 20, the liquid water is collected at the bottom of the filtering water tank 20, and the gas water flows at the upper part of the filtering water tank 20.
S3: continuing to draw water vapor from the filter tank 20 so that water vapor enters the first vacuum line 30;
specifically, moisture continues into the first vacuum line 30 under the influence of the first vacuum generator 40.
S4: the filter plug 50 cools and liquefies the water vapor entering the first vacuum pipeline 30, and the liquefied water falls into the diversion trench 102 and flows back to the filter water tank 20 along the diversion trench 102;
specifically, the filter plug 50 cools the water vapor entering the first vacuum line 30, so that the water vapor is liquefied, and the liquefied water enters the diversion trench 102 under the action of gravity and flows back to the filter water tank 20.
S5: after the second vacuum generator 90 is started, water in the filter tank 20 is adsorbed into the second vacuum pipeline 80 and finally discharged;
specifically, the second vacuum pipe 80 is externally connected with a water vapor receiving tank, and the discharged water is finally carried out in the water vapor receiving tank, so that the filtering and draining operation is completed.
In summary, the embodiment of the invention provides a dicing saw vacuum gas path filtering device 1000 and a filtering method, the dicing saw vacuum gas path filtering device 1000 comprises a vacuum working disk 10, a filter water tank 20, a first vacuum pipeline 30, a first vacuum generator 40 and a filter plug 50, the vacuum working disk 10 is used for bearing a workpiece 101, the filter water tank 20 is communicated with the vacuum working disk 10, the filter water tank 20 is used for collecting water vapor entering the vacuum working disk 10, one end of the first vacuum pipeline 30 is communicated with the filter water tank 20, the first vacuum generator 40 is connected with the other end of the first vacuum pipeline 30, the first vacuum generator 40 is used for vacuumizing the first vacuum pipeline 30, so that water vapor in the filter water tank 20 is absorbed into the first vacuum pipeline 30, the filter plug 50 is arranged along the X-axis direction, the filter plug 50 is arranged on the filter water tank 20, the end of the filter plug 50 is communicated with the end of the first vacuum pipeline 30, the guide groove 102 penetrates through the bottom of the filter plug 50, the guide groove 102 is arranged along the length direction of the filter plug 50, the filter plug 50 is used for cooling the water vapor entering the first vacuum pipeline 30, and the guide groove is enabled to flow back through the filter water tank 102 after the water is liquefied by the guide groove 102. When the dicing saw vacuum gas circuit filtering device 1000 is used, the first vacuum generator 40 is used for vacuumizing the first vacuum pipeline 30 and the filtering water tank 20, water vapor in the vacuum gas circuit 11 of the vacuum working disk 10 can be sucked into the filtering water tank 20, the first vacuum generator 40 is communicated with the first vacuum pipeline 30, so that the water vapor in the filtering water tank 20 can be adsorbed into the first vacuum pipeline 30, the water vapor can pass through the filtering plug 50 after entering the first vacuum pipeline 30, the filtering plug 50 is used for cooling the water vapor entering the first vacuum pipeline 30, so that the water vapor is liquefied, and can fall into the guide groove 102 after being liquefied into water, and flow back into the filtering water tank 20 through the guide groove 102 for collection. The dicing saw vacuum gas circuit filtering device 1000 can collect water vapor in the filtering water tank 20 in a concentrated manner, can effectively improve the effect of removing the water vapor in the vacuum gas circuit 11, further ensures the stability of the vacuum gas circuit 11, and avoids the influence of the water vapor on the production operation of the dicing saw due to the fact that the water vapor flows everywhere to damage electronic elements.
The filtering method utilizes a vacuum gas circuit filtering device 1000 of a dicing saw to filter, and comprises the steps of vacuum adsorbing and fixing a workpiece 101 through a vacuum working disc 10, rotating a dicing piece 100 to cut the surface of the workpiece 101, and spraying water to cool the workpiece 101 by a water spray cooling piece 200 in the cutting process; starting the first vacuum generator 40 to vacuumize, and adsorbing the water vapor entering the vacuum working disk 10 into the filtering water tank 20; continuing to draw water vapor from the filter tank 20 so that water vapor enters the first vacuum line 30; the filter plug 50 cools and liquefies the water vapor entering the first vacuum pipeline 30, and the liquefied water falls down to the diversion trench 102 and flows back to the filter water tank 20 along the diversion trench 102. The filtering method can filter and collect the water vapor in the vacuum working disc 10 in the filtering water tank 20, can effectively improve the effect of removing the water vapor in the vacuum air channel 11, and further ensures the stability of the vacuum air channel 11.
The present invention is not limited to the above embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the invention is subject to the protection scope of the claims.
Claims (10)
1. The utility model provides a dicing saw vacuum gas circuit filter equipment which characterized in that includes:
a vacuum working plate (10), the vacuum working plate (10) being used for carrying a workpiece (101);
a filter water tank (20), wherein the filter water tank (20) is communicated with the vacuum working disc (10), and the filter water tank (20) is used for collecting water vapor entering the vacuum working disc (10);
a first vacuum line (30), one end of the first vacuum line (30) being in communication with the filter tank (20);
a first vacuum generator (40), wherein the first vacuum generator (40) is connected with the other end of the first vacuum pipeline (30), and the first vacuum generator (40) is used for vacuumizing the first vacuum pipeline (30) so as to absorb water vapor in the filtering water tank (20) into the first vacuum pipeline (30);
the filter plug (50), filter plug (50) set up along X axis direction, filter plug (50) set up in filter water tank (20), just filter plug (50) with the tip intercommunication of first vacuum pipeline (30), the bottom of filter plug (50) is run through has guiding gutter (102), guiding gutter (102) are followed the length direction setting of filter plug (50), filter plug (50) are used for cooling the steam that gets into first vacuum pipeline (30) for the steam liquefaction, the water after the liquefaction is through guiding gutter (102) is backward flow filter water tank (20);
the two ends of the filter plug (50) are respectively an inlet end (51) and an outlet end (52), the inlet end (51) is communicated with the filter water tank (20), the outlet end (52) is communicated with the end part of the first vacuum pipeline (30), and the end face size of the inlet end (51) is larger than that of the outlet end (52), so that the diversion trench (102) is obliquely arranged, and water flowing into the diversion trench (102) flows back to the filter water tank (20).
2. The vacuum air path filter device of a dicing saw according to claim 1, wherein the inlet end (51) and the outlet end (52) are both of a circular structure, and the diameter of the inlet end (51) is larger than the diameter of the outlet end (52).
3. The dicing saw vacuum air path filtering apparatus according to claim 1, wherein the filter plug (50) comprises a cooling section (53) and a connecting section (54), the cooling section (53) is communicated with the connecting section (54), the inlet end (51) is arranged at the cooling section (53), the outlet end (52) is arranged at the connecting section (54), the connecting section (54) is communicated with the inlet of the first vacuum pipe (30), the cooling section (53) is used for cooling water vapor entering the filter plug (50), so that the water vapor is liquefied, and the liquefied water enters the diversion trench (102) under the action of gravity and flows back to the filter water tank (20).
4. A dicing saw vacuum air path filtering apparatus according to claim 3, wherein the cooling section (53) is provided with a plurality of filter plates (60), the plurality of filter plates (60) being arranged at intervals along the length direction of the cooling section (53), the filter plates (60) being adapted to cool water vapor entering the cooling section (53) so that the water vapor liquefies.
5. The vacuum air path filter device of a dicing saw according to claim 4, wherein a plurality of filter holes (70) are formed through the filter plate (60).
6. The dicing saw vacuum air path filtering apparatus according to claim 4, wherein the filter plate (60) is filter cotton.
7. A dicing saw vacuum air path filter according to claim 3, wherein the cooling section (53) is of a horn-like structure.
8. The dicing saw vacuum air path filtering apparatus according to any one of claims 1-7, wherein the dicing saw vacuum air path filtering apparatus (1000) further comprises a second vacuum pipe (80), an end of the second vacuum pipe (80) being in communication with a bottom of the filtering water tank (20).
9. The dicing saw vacuum air path filter device according to claim 8, wherein the dicing saw vacuum air path filter device (1000) further comprises a second vacuum generator (90), the second vacuum generator (90) and an end of the second vacuum pipe (80) remote from the filter water tank (20) are communicated, the second vacuum generator (90) being adapted to evacuate the second vacuum pipe (80).
10. A filtering method using the dicing saw vacuum air path filtering apparatus according to any one of claims 1 to 9, wherein the filtering method comprises:
vacuum adsorption fixing is carried out on a workpiece (101) through the vacuum working disc (10), the surface of the workpiece (101) is cut by the rotary cutting piece (100), and in the cutting process, the water spray cooling piece (200) sprays water to cool the surface of the workpiece (101);
starting the first vacuum generator (40) to vacuumize, and adsorbing water vapor entering the vacuum working disc (10) into the filtering water tank (20);
continuing to suck the water vapor in the filter water tank (20) so that the water vapor enters the first vacuum pipeline (30);
the filter plug (50) cools and liquefies the water vapor entering the first vacuum pipeline (30), and the liquefied water falls down to the diversion trench (102) and flows back to the filter water tank (20) along the diversion trench (102).
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| CN202310770591.XA CN116494403B (en) | 2023-06-28 | 2023-06-28 | Vacuum gas circuit filtering device and filtering method of dicing saw |
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| CN202310770591.XA CN116494403B (en) | 2023-06-28 | 2023-06-28 | Vacuum gas circuit filtering device and filtering method of dicing saw |
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| CN116494403A (en) | 2023-07-28 |
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