CN116482866A - Variable light spot laser shaping system suitable for workpiece surface treatment - Google Patents
Variable light spot laser shaping system suitable for workpiece surface treatment Download PDFInfo
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- CN116482866A CN116482866A CN202310365584.1A CN202310365584A CN116482866A CN 116482866 A CN116482866 A CN 116482866A CN 202310365584 A CN202310365584 A CN 202310365584A CN 116482866 A CN116482866 A CN 116482866A
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- 238000007493 shaping process Methods 0.000 title claims abstract description 47
- 238000004381 surface treatment Methods 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 8
- 238000009826 distribution Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 238000000137 annealing Methods 0.000 abstract description 3
- 238000011112 process operation Methods 0.000 abstract description 3
- 238000010791 quenching Methods 0.000 abstract description 3
- 230000000171 quenching effect Effects 0.000 abstract description 3
- 238000012545 processing Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 5
- 238000003491 array Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000265 homogenisation Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0911—Anamorphotic systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lenses (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention belongs to the technical field of optical lenses, and discloses a variable light spot laser shaping system suitable for workpiece surface treatment. The variable facula laser shaping system comprises a laser body, wherein a beam channel is arranged in the laser body, and a micro lens array, a front fixed group, a zoom group and a compensation group are coaxially arranged in the beam channel in sequence along the beam propagation direction. The distance between the variable-magnification group and the front fixed group and the distance between the compensation group and the variable-magnification group are adjustable. The invention is an integrated homogenizing system, can realize the light spots with the energy distribution width stabilized between 1mm and the length stabilized between 5 and 50mm by adjusting the positions of the zoom group and the compensation group, can flexibly process highly complex work tasks, is suitable for most processes, and improves the efficiency of a series of process operations of large-area workpiece surface treatment such as quenching, annealing, softening and the like. The variable light spot laser shaping system provided by the invention has the advantages of wide application range and low use cost, and can be matched with additional components such as a camera and the like.
Description
Technical Field
The invention relates to the technical field of optical lenses, in particular to a variable light spot laser shaping system suitable for industrial automation, such as workpiece surface treatment, die production and the like.
Background
With the development of scientific technology, the degree of industrial automation is gradually increased, and in this era, laser is an indispensable tool. The laser has good space control and time control, and has great freedom degree on the material, shape, size and processing environment of the processing object, and is particularly suitable for automatic processing.
The laser technology is a technology for processing or detecting a specific target by using a laser. However, the output beam of the semiconductor laser has uneven light intensity distribution, and the far-field light spot distribution is elliptical gaussian, which cannot meet the industrial use requirements, so that the laser needs to be homogenized and shaped. At present, the laser homogenizing and shaping system on the market has the problems of complex structure, high processing difficulty, limited light spot size and the like. The technology of realizing laser homogenization and shaping by adopting a micro lens array has appeared, but a plurality of micro lens arrays or a plurality of different lenses are usually adopted to realize laser homogenization and shaping by matching with the micro lens arrays, so the technology has the advantages of high cost, difficult processing, limited light spot size and inapplicability to processing and use of large-area workpieces.
Disclosure of Invention
In view of the above technical problems in the prior art, the present invention aims to provide a variable spot laser shaping system with low cost, simple structure, and applicability to a series of process operations such as quenching, annealing, softening, etc. for surface treatment of a large-area workpiece. The variable-facula laser shaping system can improve the efficiency of surface treatment of a large-area workpiece, and the homogenized linear facula size can be suitable for almost all processes, so that the optimal result is realized. Meanwhile, the variable light spot laser shaping system allows dynamic adjustment of the light spot size, and a user can adjust the laser light spot size without changing a processing lens group on laser application which frequently needs to change the lens group.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
the invention provides a variable light spot laser shaping system suitable for workpiece surface treatment, which comprises a laser body, wherein a beam channel is arranged in the laser body, a micro lens array, a first lens group serving as a front fixed group, a second lens group serving as a variable magnification group and a third lens group serving as a compensation group are coaxially arranged in the beam channel in sequence along the beam propagation direction, and the distances between the first lens group and the second lens group as well as between the first lens group and the third lens group are adjustable.
Further, the laser body comprises a fixed lens barrel, a first movable lens barrel and a second movable lens barrel, wherein the fixed lens barrel, the first movable lens barrel and the second movable lens barrel are coaxially sleeved, and the first movable lens barrel and the second movable lens barrel can move back and forth along the axis; the micro lens array is installed in the fixed lens barrel through a lens fixing bracket, the first lens group is installed in the fixed lens barrel, and the second lens group and the third lens group are installed in the first movable lens barrel and the second movable lens barrel respectively.
Further, the object plane side of the micro lens array is a plane, and the image plane side is a sub lens array plane; the first lens group comprises a first spherical lens, the object plane side of the first spherical lens is a convex surface, and the image plane side of the first spherical lens is a convex surface; the second lens group comprises a second spherical lens, the object plane side of the second spherical lens is a concave surface, and the image plane side of the second spherical lens is a concave surface; the third lens group comprises a third spherical lens and a fourth spherical lens, the object plane side of the third spherical lens is a convex surface, the image plane side of the third spherical lens is a convex surface, the object plane side of the fourth spherical lens is a convex surface, and the image plane side of the fourth spherical lens is a convex surface.
Further, the micro-lens array is a cuboid micro-lens array, the length and the width are 32.2mm, and 46 sub-lenses are arranged; the width of one of the sub-lenses is 0.7mm;
the first lens group comprises a first spherical lens, wherein the curvature radius of the convex surface on the object plane side of the first spherical lens is R110.16mm, the curvature radius of the convex surface on the image plane side of the first spherical lens is R258.02mm, and the center thickness of the first spherical lens is 9.58mm;
the second lens group comprises a second spherical lens, wherein the curvature radius of the concave surface on the object plane side of the second spherical lens is R57.14mm, and the curvature radius of the concave surface on the image plane side of the second spherical lens is R32.78mm; the center thickness of the second spherical lens is 9.73mm;
the third lens group comprises a third spherical lens and a fourth spherical lens, the curvature radius of the convex surface of the object surface side of the third spherical lens is R2222.22mm, and the curvature radius of the convex surface of the image surface side is R142.86mm; the center thickness of the third spherical lens is 12.00mm; the curvature radius of the convex surface on the object plane side of the fourth spherical lens is R202.43mm, and the curvature radius of the convex surface on the image plane side is R418.41mm; the center thickness of the fourth spherical lens is 12.00mm.
Further, the materials of the micro lens array, the first lens group, the second lens group and the third lens group are all quartz.
Further, the variable spot laser shaping system can be used with additional components such as a camera.
In the technical scheme, the light beams firstly pass through the micro lens array to form light beams with different focal powers in meridian and sagittal directions, then the front fixed group is used for adjusting the divergence angle of the light beams, and finally the positions of the variable-magnification group and the compensation group (namely, the distance between the variable-magnification group and the front fixed group and the distance between the variable-magnification group and the compensation group) are moved to control the shape of the linear light spots, so that highly complex work tasks can be flexibly processed through dynamic adjustment.
Compared with the prior art, the invention is suitable for surface treatment of large-area workpieces, in particular to local heating for precise temperature control, and is suitable for processing workpieces with various shapes. The variable light spot laser shaping system has low cost and can form light spots with energy distribution width stabilized at 1mm and length stabilized between 5 and 50 mm. The imaging uniformity is excellent. Meanwhile, in the variable light spot laser shaping system, only one micro lens array is used, and the rest optical lenses are spherical lenses which are easy to process, so that the overall cost is low, the structure is simple, and the processing is easy.
The invention has the following beneficial effects:
1. the laser shaping system can dynamically adjust the size of the light spot, realizes the light spot with the energy distribution width stable at 1mm and the length stable between 5 and 50mm, is suitable for most processes, and can improve the efficiency of a series of process operations of surface treatment of a large-area workpiece, such as quenching, annealing, softening and the like.
2. The variable-facula laser shaping system is an integrated homogenizing system, the distance adjustment between the front fixed group and the variable-power group is realized through the movement of the first movable lens barrel, the distance adjustment between the variable-power group and the compensation group is realized through the movement of the second movable lens barrel, any component is not required to be replaced, and highly complex work tasks can be flexibly processed.
3. The laser shaping system only adopts a group of micro lens arrays, and the other lenses are spherical lenses, so that the laser shaping system has the advantages of simple structure, easy processing, wide application range and low use cost.
Drawings
FIG. 1 is a schematic view of the lens position of the variable spot laser shaping system of embodiment 1 of the present invention when the spot length is 5 mm;
FIG. 2 is a schematic view of the optical path of the variable spot laser shaping system according to embodiment 1 of the present invention when the spot length is 5 mm;
FIG. 3 is a graph showing illuminance at a spot length of 5mm for the variable spot laser shaping system according to example 1 of the present invention;
FIG. 4 is an isometric view of the variable spot laser shaping system of example 1 of the present invention with a spot length of 5 mm;
FIG. 5 is a schematic view of a lens with a spot length of 50mm in the variable spot laser shaping system according to embodiment 1 of the present invention;
FIG. 6 is a schematic view of the optical path of the variable spot laser shaping system according to embodiment 1 of the present invention when the spot length is 50 mm;
FIG. 7 is a diagram showing illuminance at a spot length of 50mm in the variable spot laser shaping system according to example 1 of the present invention;
FIG. 8 is an isometric view of a variable spot laser shaping system of example 1 of the present invention with a spot length of 50 mm;
wherein 1 is a micro lens array, 2 is a first spherical lens (front fixed group, first lens group), 3 is a second spherical lens (zoom group, second lens group), 4 is a third spherical lens, and 5 is a fourth spherical lens.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to specific embodiments and attached drawings. The specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Example 1
The present embodiment relates to a variable spot laser shaping system suitable for workpiece surface treatment, as shown in fig. 1 or 5, the variable spot laser shaping system includes a laser body, a beam path is provided in the laser body, a microlens array 1, a first lens group 2 as a front fixed group, a second lens group 3 as a variable magnification group, and a third lens group as a compensation group are coaxially arranged in the beam path in sequence along a beam propagation direction (i.e. a lens from an object plane to an image plane), wherein distances between the first lens group 2 and the second lens group 3, and distances between the second lens group 3 and the third lens group are adjustable. The materials of the micro lens array 1, the first lens group 2, the second lens group 3 and the third lens group are all quartz. The variable spot laser shaping system can be used with additional components such as cameras.
The laser body comprises a fixed lens barrel, a first movable lens barrel and a second movable lens barrel, wherein the fixed lens barrel, the first movable lens barrel and the second movable lens barrel are coaxially sleeved, and the first movable lens barrel and the second movable lens barrel can move back and forth along an axis; the microlens array 1 is mounted in a fixed barrel through a lens fixing bracket, the first lens group 2 is mounted in the fixed barrel, and the second lens group 3 and the third lens group are mounted in a first movable barrel and a second movable barrel, respectively.
The micro-lens array 1 is a cuboid micro-lens array, the length and the width are 32.2mm, and 46 sub-lenses are arranged; the width of one of the sub-lenses is 0.7mm;
the first lens group comprises a first spherical lens 2, the curvature radius of the convex surface on the object side is R110.16mm, the curvature radius of the convex surface on the image side is R258.02mm, and the center thickness of the first spherical lens 2 is 9.58mm;
the second lens group comprises a second spherical lens 3, wherein the curvature radius of the concave surface on the object plane side is R57.14mm, and the curvature radius of the concave surface on the image plane side is R32.78mm; the center thickness of the second spherical lens 3 is 9.73mm;
table 1 lens parameters for variable spot laser shaping system at the shortest line
| Surf | Radius | Thickness | nd | vd |
| OBJ | Infinite number of cases | Infinite number of cases | ||
| 1 (micro lens) | Infinite number of cases | 2 | 1.458464 | 67.8214 |
| 2 | 8.400 | 33.500 | ||
| 3 | 110.160 | 9.584 | 1.458464 | 67.8214 |
| 4 | 258.020 | 33.420 | ||
| 5 | -57.143 | 9.725 | 1.458464 | 67.8214 |
| 6 | 32.776 | 162.280 | ||
| 7 | 2222.220 | 12.000 | 1.458464 | 67.8214 |
| 8 | -142.857 | 8.000 | ||
| 9 | 202.429 | 12.000 | 1.458464 | 67.8214 |
| 10 | -418.410 | 398.000 | ||
| IMA | Infinite number of cases | - |
As shown in fig. 4 and 8, the third lens group includes a third spherical lens 4 and a fourth spherical lens 5, the radius of curvature of the convex surface on the object plane side of the third spherical lens 4 is r2222.22mm, and the radius of curvature of the convex surface on the image plane side is r142.86mm; the center thickness of the third spherical lens 4 is 12.00mm; the radius of curvature of the convex surface on the object plane side of the fourth spherical lens 5 is r202.43mm, and the radius of curvature of the convex surface on the image plane side is r418.41mm; the center thickness of the fourth spherical lens 5 is 12.00mm. As can be seen from fig. 4 or 8, the microlens array 1 has a plane object plane and a sub-lens array plane as an image plane, the object plane of the first spherical lens 2 is a convex surface, the image plane is a convex surface, the object plane of the second spherical lens 3 is a concave surface, the image plane is a concave surface, the object plane of the third spherical lens 4 is a convex surface, the image plane is a convex surface, the object plane of the fourth spherical lens 5 is a convex surface, and the image plane is a convex surface.
Specifically, specific parameters of each lens at the shortest line in the variable spot laser shaping system of the present embodiment are shown in table 1, and the optical path diagram at this time is shown in fig. 2.
Specifically, specific parameters of each lens at the longest line of the variable-spot laser shaping system of the present invention are shown in table 2, and the optical path diagram at this time is shown in fig. 6.
Table 2 lens parameters for variable spot laser shaping system at longest line
| Surf | Radius | Thickness | nd | vd |
| OBJ | Infinite number of cases | Infinite number of cases | ||
| 1 (micro lens) | Infinite number of cases | 2 | 1.458464 | 67.8214 |
| 2 | 8.400 | 33.500 | ||
| 3 | 110.160 | 9.584 | 1.458464 | 67.8214 |
| 4 | 258.020 | 105.420 | ||
| 5 | -57.143 | 9.725 | 1.458464 | 67.8214 |
| 6 | 32.776 | 10.280 | ||
| 7 | 2222.220 | 12.000 | 1.458464 | 67.8214 |
| 8 | -142.857 | 8.000 | ||
| 9 | 202.429 | 12.000 | 1.458464 | 67.8214 |
| 10 | -418.410 | 478.000 | ||
| IMA | Infinite number of cases | - |
In order to verify the optical performance of the variable spot laser shaping system suitable for surface treatment of a large area workpiece of this embodiment, a verification test was performed on the variable spot laser shaping system of this embodiment, the test results are shown in fig. 3 and 7,
the total length of the variable facula laser shaping system is 685.50mm, and the shortest length of the emitted laser can reach 5mm, the width of the emitted laser can reach 1mm, and the longest length of the emitted laser can reach 50mm, and the width of the emitted laser can reach 1mm. The flexible length-variable line can meet the application requirements in different scenes by selecting different laser powers and flexible spot sizes.
The technical scheme of the invention is not limited to the specific embodiment, and all technical modifications made according to the technical scheme of the invention fall within the protection scope of the invention.
Claims (9)
1. The variable light spot laser shaping system is characterized by comprising a laser body, wherein a beam channel is arranged in the laser body, a micro lens array, a first lens group serving as a front fixed group, a second lens group serving as a variable-magnification group and a third lens group serving as a compensation group are coaxially arranged in the beam channel in sequence along the beam propagation direction, and the distances between the first lens group and the second lens group as well as between the second lens group and the third lens group are adjustable.
2. The variable spot laser shaping system for workpiece surface treatment according to claim 1, wherein the laser body comprises a fixed barrel, a first movable barrel, and a second movable barrel, the fixed barrel, the first movable barrel, and the second movable barrel being coaxially sleeved, the first movable barrel and the second movable barrel being movable back and forth along an axis; the micro lens array is installed in the fixed lens barrel through a lens fixing bracket, the first lens group is installed in the fixed lens barrel, and the second lens group and the third lens group are installed in the first movable lens barrel and the second movable lens barrel respectively.
3. The variable spot laser shaping system for workpiece surface treatment according to claim 1, wherein the microlens array has a plane surface and a sub-lens array surface on an object plane side; the first lens group comprises a first spherical lens, the object plane side of the first spherical lens is a convex surface, and the image plane side of the first spherical lens is a convex surface; the second lens group comprises a second spherical lens, the object plane side of the second spherical lens is a concave surface, and the image plane side of the second spherical lens is a concave surface; the third lens group comprises a third spherical lens and a fourth spherical lens, wherein the object plane side of the third spherical lens is a convex surface, the image plane side of the third spherical lens is a convex surface, the object plane side of the fourth spherical lens is a convex surface, and the image plane side of the fourth spherical lens is a convex surface.
4. The variable spot laser shaping system for workpiece surface treatment according to claim 1, wherein the microlens array is a rectangular parallelepiped microlens array, each having a length and a width of 32.2mm, and arranged by 46 sub-lenses.
5. The variable spot laser shaping system according to claim 1, wherein the first lens group comprises a first spherical lens, which is a spherical lens, the radius of curvature of the convex surface on the object plane side is r110.16mm, the radius of curvature of the convex surface on the image plane side is r258.02mm, and the center thickness of the first spherical lens is 9.58mm.
6. The variable spot laser shaping system according to claim 1, wherein the second lens group comprises a second spherical lens, is a spherical lens, has a radius of curvature of a concave surface on an object plane side of r57.14mm, and has a radius of curvature of a concave surface on an image plane side of r32.78mm; the center thickness of the second spherical lens was 9.73mm.
7. The variable spot laser shaping system according to claim 1, wherein the third lens group includes a third spherical lens and a fourth spherical lens, the third spherical lens is a spherical lens, a radius of curvature of a convex surface on an object plane side is r2222.22mm, and a radius of curvature of a convex surface on an image plane side is r142.86mm; the center thickness of the third spherical lens is 12.00mm;
the fourth spherical lens is a spherical lens, the curvature radius of the convex surface on the object plane side is R202.43mm, and the curvature radius of the convex surface on the image plane side is R418.41mm; the center thickness of the fourth spherical lens is 12.00mm.
8. The variable spot laser shaping system for workpiece surface treatment according to claim 1, wherein the materials of the microlens array, the first lens group, the second lens group, and the third lens group are all quartz.
9. The variable spot laser shaping system of claim 1 adapted for use with a camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310365584.1A CN116482866A (en) | 2023-04-07 | 2023-04-07 | Variable light spot laser shaping system suitable for workpiece surface treatment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310365584.1A CN116482866A (en) | 2023-04-07 | 2023-04-07 | Variable light spot laser shaping system suitable for workpiece surface treatment |
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| CN116482866A true CN116482866A (en) | 2023-07-25 |
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| CN202310365584.1A Pending CN116482866A (en) | 2023-04-07 | 2023-04-07 | Variable light spot laser shaping system suitable for workpiece surface treatment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117444385A (en) * | 2023-12-21 | 2024-01-26 | 武汉引领光学技术有限公司 | Laser shaping processing device with continuously adjustable shaping light spots and adjusting method thereof |
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2023
- 2023-04-07 CN CN202310365584.1A patent/CN116482866A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117444385A (en) * | 2023-12-21 | 2024-01-26 | 武汉引领光学技术有限公司 | Laser shaping processing device with continuously adjustable shaping light spots and adjusting method thereof |
| CN117444385B (en) * | 2023-12-21 | 2024-03-29 | 武汉引领光学技术有限公司 | Laser shaping processing device with continuously adjustable shaping light spots and adjusting method thereof |
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