CN116482418A - Test fixture of waveguide chip - Google Patents

Test fixture of waveguide chip Download PDF

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Publication number
CN116482418A
CN116482418A CN202310476832.XA CN202310476832A CN116482418A CN 116482418 A CN116482418 A CN 116482418A CN 202310476832 A CN202310476832 A CN 202310476832A CN 116482418 A CN116482418 A CN 116482418A
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CN
China
Prior art keywords
movable seat
waveguide
chip
test
waveguide chip
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310476832.XA
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Chinese (zh)
Inventor
林斌
刁玉龙
董传众
冯冲
詹昌吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Jipin Technology Co ltd
Original Assignee
Ningbo Jipin Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Jipin Technology Co ltd filed Critical Ningbo Jipin Technology Co ltd
Priority to CN202310476832.XA priority Critical patent/CN116482418A/en
Publication of CN116482418A publication Critical patent/CN116482418A/en
Pending legal-status Critical Current

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention provides a test fixture for a waveguide chip, relates to the technical field of chip test devices, and solves the technical problem that chips with integrated waveguide ports cannot be tested in the prior art. The test fixture of the waveguide chip comprises a test platform, wherein a base and a movable seat are arranged on the test platform; the base is fixedly arranged on the test platform, a chip storage area is arranged on the base, a transmission channel is arranged on the chip storage area and corresponds to a waveguide port on the waveguide chip, and grounding elastic probes are arranged around the transmission channel; the movable seat is provided with a needle seat area corresponding to the chip storage area, the needle seat area is provided with a low-frequency elastic probe, the movable seat is arranged on the test platform through a lifting mechanism, and the lifting mechanism drives the movable seat to lift and move so that the waveguide chip is clamped between the base and the movable seat. The invention is used for providing the test fixture for the waveguide chip, which can test the chip integrated with the waveguide port and has higher test efficiency.

Description

Test fixture of waveguide chip
Technical Field
The invention relates to the technical field of chip testing devices, in particular to a testing fixture for a waveguide chip.
Background
The waveguide chip is compared with the front edge at present, and the corresponding testing method is less. In order to ensure that the waveguide chip meets the product performance requirements, the waveguide chip needs to be tested. The test requirement is that the chip can be tested in a nondestructive mode at two points, and the chip can be tested on the upper surface and the lower surface of the chip at the same time.
Currently, two types of waveguide chips to be tested exist, as shown in fig. 6-7, one type of chip is provided with a waveguide port A on the bottom surface and a low-frequency port B on the top surface; the other is that the bottom surface is provided with a waveguide port A, the top surface is provided with a low-frequency port B and a radio-frequency port C; when the waveguide chip to be tested is tested, the existing testing device can only test the low-frequency port B or the low-frequency port B and the radio-frequency port C on one side or two sides, but cannot test the chip integrated with the waveguide port.
Disclosure of Invention
The invention aims to provide a test fixture for a waveguide chip, which solves the technical problem that the chip with an integrated waveguide port cannot be tested in the prior art The preferred technical solutions of the technical solutions provided by the present invention can produce a plurality of technical effects described below.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the invention provides a test fixture of a waveguide chip, which comprises a test platform, wherein a base and a movable seat are arranged on the test platform;
the base is fixedly arranged on the test platform, a chip storage area is arranged on the base and used for placing a waveguide chip, a transmission channel is arranged on the chip storage area and corresponds to a waveguide port on the waveguide chip, and grounding elastic probes are arranged around the transmission channel;
the movable seat is provided with a needle seat area corresponding to the chip storage area, the needle seat area is provided with a low-frequency elastic probe, the movable seat is arranged on the test platform through a lifting mechanism, and the lifting mechanism drives the movable seat to move up and down so as to clamp the waveguide chip between the base and the movable seat.
As a further improvement of the invention, a limit post is arranged on the base, and the limit post is positioned on the moving path of the movable seat.
As a further improvement of the invention, a radio frequency connector is also arranged on the movable seat.
As a further improvement of the invention, the chip storage area comprises a bottom plate, a panel and a limiting frame, wherein the base is provided with a mounting opening, the section of the mounting opening is in a ladder shape, and the bottom plate, the panel and the limiting frame are sequentially arranged on the mounting opening;
the limiting frame is provided with a limiting opening matched with the waveguide chip, and the transmission channel is arranged on the bottom plate and the panel;
the panel is provided with a plurality of through holes around the transmission channel, and the grounding elastic probes are embedded in the through holes on the panel.
As a further improvement of the invention, a plurality of positioning posts are also arranged on the panel.
As a further development of the invention, the test system is connected to the transmission channel via a waveguide flange and a waveguide.
As a further improvement of the invention, the lifting mechanism comprises a guide part, a sliding part and a driving part, wherein the guide part is arranged on the test platform, the guide part is matched with the sliding part, the sliding part moves back and forth on the guide part, and the movable seat is connected with the sliding part;
the driving part is arranged on the test platform and is connected with the movable seat to drive the movable seat to move up and down on the guide part.
As a further improvement of the invention, the guide part is a guide post, the sliding part is a linear bearing, the linear bearing is matched with the guide post, the movable seat is connected with the linear bearing, and the movable seat is connected to the guide post in a lifting way through the linear bearing.
As a further improvement of the invention, a return spring is sleeved on the guide post, and the return spring is arranged between the test platform and the movable seat.
As a further improvement of the invention, the guide part is a linear guide rail, the sliding part is a sliding block, the sliding block is matched with the linear guide rail, the movable seat is connected with the sliding block, and the movable seat is connected to the linear guide rail in a lifting manner through the sliding block.
As a further improvement of the invention, the driving part is a quick clamp, a back plate is arranged on the test platform, a fixing plate is arranged on the back plate, and the quick clamp is fixed on the fixing plate.
The beneficial effects of the invention are as follows: the invention provides a test fixture for a waveguide chip, which comprises a test platform, wherein a base and a movable seat are arranged on the test platform, and the movable seat is driven by a lifting mechanism to reciprocate relative to the base so as to clamp the waveguide chip between the base and the movable seat; the chip storage area on the base is provided with a transmission channel and a grounding elastic probe, and the movable seat is provided with a low-frequency elastic probe at a position corresponding to the chip storage area, so that simultaneous testing of waveguide ports and low-frequency ports on two sides of a waveguide chip is realized, testing of the chip integrated with the waveguide port is completed, and the test efficiency is high; by adopting the grounding elastic probe and the low-frequency elastic probe, firstly, reliable contact of the chip bonding pad can be ensured, and secondly, the influence on the bonding pad during testing is minimum.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a first embodiment of the present invention;
FIG. 2 is a schematic view of a portion of the structure of the present invention;
FIG. 3 is a schematic structural view of a second embodiment of the present invention;
FIG. 4 is a cross-sectional view of the movable seat of the present invention;
FIG. 5 is a schematic view of a part of the structure of the movable seat of the present invention;
FIG. 6 is a schematic diagram of the structure of a first waveguide chip;
fig. 7 is a schematic structural view of a second waveguide chip.
In the figure 1, a test platform; 2. a base; 3. a movable seat; 4. a chip storage area; 5. a grounded elastic probe; 6. a hub region; 7. a low frequency elastic probe; 8. a lifting mechanism; 9. a radio frequency measurement connector; 11. a back plate; 12. a fixing plate; 21. a limit column; 22. a mounting port; 41. a bottom plate; 42. a panel; 43. a limit frame; 44. a transmission channel; 45. a limit opening; 46. positioning columns; 47. a through hole; 48. a waveguide flange; 49. a waveguide; 81. a guide post; 82. a linear bearing; 83. quick clamping; 84. a return spring; A. a waveguide port; B. a low frequency port; C. a radio frequency port.
Detailed Description
The following description of the invention and the differences between the invention and the prior art will be understood with reference to the accompanying figures 1-7 and the text. The following describes the invention in further detail, including preferred embodiments, by way of the accompanying drawings and by way of examples of some alternative embodiments of the invention. It should be noted that: any technical feature and any technical solution in this embodiment are one or several of various optional technical features or optional technical solutions, and in order to describe brevity, all of the optional technical features and the optional technical solutions of the present invention cannot be exhausted in this document, and it is inconvenient for an implementation of each technical feature to emphasize that it is one of various optional implementations, so those skilled in the art should know: any one of the technical means provided by the invention can be replaced or any two or more of the technical means or technical features provided by the invention can be mutually combined to obtain a new technical scheme. Any technical features and any technical solutions in the present embodiment do not limit the protection scope of the present invention, and the protection scope of the present invention should include any alternative technical solution that can be conceived by a person skilled in the art without performing creative efforts, and a new technical solution obtained by combining any two or more technical means or technical features provided by the present invention with each other by a person skilled in the art.
In the description of the present invention, it is to be noted that, unless otherwise indicated, the meaning of "plurality" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", etc., refer to an orientation or positional relationship based on that shown in the drawings, and are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "mounted", "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention can be understood as appropriate by those of ordinary skill in the art.
The invention provides a test fixture for a waveguide chip, which can test a chip integrated with a waveguide port and has higher test efficiency.
The technical scheme provided by the invention is described in more detail below with reference to fig. 1 to 7.
The invention provides a test fixture of a waveguide chip, which comprises a test platform, wherein a base and a movable seat are arranged on the test platform;
the base is fixedly arranged on the test platform, a chip storage area is arranged on the base and used for placing a waveguide chip, a transmission channel is arranged on the chip storage area and corresponds to a waveguide port on the waveguide chip, and grounding elastic probes are arranged around the transmission channel;
the movable seat is provided with a needle seat area corresponding to the chip storage area, the needle seat area is provided with a low-frequency elastic probe, the movable seat is arranged on the test platform through a lifting mechanism, and the lifting mechanism drives the movable seat to move up and down so as to clamp the waveguide chip between the base and the movable seat.
The invention provides a test fixture for a waveguide chip, which comprises a test platform, wherein a base and a movable seat are arranged on the test platform, and the movable seat is driven by a lifting mechanism to reciprocate relative to the base so as to clamp the waveguide chip between the base and the movable seat; the chip storage area on the base is provided with a transmission channel and a grounding elastic probe, and the movable seat is provided with a low-frequency elastic probe at a position corresponding to the chip storage area, so that simultaneous testing of waveguide ports and low-frequency ports on two sides of a waveguide chip is realized, testing of the chip integrated with the waveguide port is completed, and the test efficiency is high; by adopting the grounding elastic probe and the low-frequency elastic probe, firstly, reliable contact of the chip bonding pad can be ensured, and secondly, the influence on the bonding pad during testing is minimum.
As a further improvement of the invention, a limit post is arranged on the base, and the limit post is positioned on the moving path of the movable seat.
In this further improvement, set up spacing post on the base, spacing post is used for restricting the distance that the movable seat moved downwards to ensure waveguide chip's centre gripping effect, avoid waveguide chip to damage.
As a further improvement of the invention, a radio frequency connector is also arranged on the movable seat. The radio frequency test connector adopts an elastic test connector to correspond to a radio frequency port on the test waveguide chip, and in addition, a radio frequency channel can be constructed by an elastic needle first, and then the radio frequency channel is led out by a radio frequency coaxial cable to form a standard connector interface.
In the further improvement, the radio frequency testing connector is arranged on the movable seat and corresponds to the radio frequency port on the waveguide chip so as to meet the test of the radio frequency port, so that the test fixture of the waveguide chip provided by the invention can simultaneously realize the simultaneous test of the waveguide port, the radio frequency port and the low frequency port, and the test efficiency is improved.
As a further improvement of the invention, the chip storage area comprises a bottom plate, a panel and a limiting frame, wherein the base is provided with a mounting opening, the section of the mounting opening is in a ladder shape, and the bottom plate, the panel and the limiting frame are sequentially arranged on the mounting opening;
the limiting frame is provided with a limiting opening matched with the waveguide chip, and the transmission channel is arranged on the bottom plate and the panel;
the panel is provided with a plurality of through holes around the transmission channel, and the grounding elastic probes are embedded in the through holes on the panel.
In this further improvement, the chip storage area comprises bottom plate, panel and stopper, sets up spacing mouth on the spacing frame, spacing mouth and waveguide chip looks adaptation, and waveguide chip is placed in spacing mouth, and the through-hole sets up on the panel, ground elasticity probe inlays and establishes in the through-hole on the panel, ground elasticity probe's bottom and bottom plate contact make it have better ground contact.
As a further improvement of the invention, a plurality of positioning posts are also arranged on the panel. By arranging the positioning column, the waveguide chip is supported, and the positioning accuracy of the waveguide chip is ensured.
As a further development of the invention, the test system is connected to the transmission channel via a waveguide flange and a waveguide. The waveguide flange adopts the FUGP type flange plate, and the waveguide flange has the advantages that the waveguide flange is directly provided with the alignment pins and the docking screws so as to realize rapid and accurate docking and locking. The waveguide tube adopts a bent structure, and two ends of the bent structure are 90 degrees, so that the waveguide opening in the vertical direction is turned to the side surface, and the butt joint with a testing system is facilitated.
As a further improvement of the invention, the lifting mechanism comprises a guide part, a sliding part and a driving part, wherein the guide part is arranged on the test platform, the guide part is matched with the sliding part, the sliding part moves back and forth on the guide part, and the movable seat is connected with the sliding part;
the driving part is arranged on the test platform and is connected with the movable seat to drive the movable seat to move up and down on the guide part.
As a further improvement of the invention, the guide part is a guide post, the sliding part is a linear bearing, the linear bearing is matched with the guide post, the movable seat is connected with the linear bearing, and the movable seat is connected to the guide post in a lifting way through the linear bearing.
As a further improvement of the invention, a return spring is sleeved on the guide post, and the return spring is arranged between the test platform and the movable seat.
In the further improvement, the lifting mechanism comprises a guide post, a linear bearing and a driving part, the accurate lifting of the movable seat is realized through the cooperation of the axial bearing and the guide post, the movable seat is driven to move to a testing position through the driving part, the automatic reset after the test of the movable seat is finished is realized through a reset spring, and the testing efficiency and the testing accuracy are greatly improved.
As a further improvement of the invention, the guide part is a linear guide rail, the sliding part is a sliding block, the sliding block is matched with the linear guide rail, the movable seat is connected with the sliding block, and the movable seat is connected to the linear guide rail in a lifting manner through the sliding block.
It can be understood that besides adopting the guide post and the linear bearing to finish lifting movement, the lifting movement can be realized by adopting a mode that the linear guide rail is matched with the sliding block, and the lifting movement has higher precision and meets the test requirement.
As a further improvement of the invention, the driving part is a quick clamp, a back plate is arranged on the test platform, a fixing plate is arranged on the back plate, and the quick clamp is fixed on the fixing plate.
In this further improvement, the drive part adopts quick clamp, quick clamp simple structure, simple to operate, simple operation, convenient to use, can quick adjustment fastening degree.
Example 1:
the invention provides a test fixture of a waveguide chip, which comprises a test platform 1, wherein a base 2 and a movable seat 3 are arranged on the test platform 1;
the base 2 is fixedly arranged on the test platform 1, a chip storage area 4 is arranged on the base 2, the chip storage area 4 is used for placing a waveguide chip, and a grounding elastic probe 5 is arranged in the chip storage area 4;
the movable seat 3 is provided with a needle seat area 6 corresponding to the chip storage area 4, the needle seat area 6 is provided with a low-frequency elastic probe 7, the movable seat 3 is arranged on the test platform 1 through a lifting mechanism 8, and the lifting mechanism 8 drives the movable seat 3 to lift and move so as to clamp the waveguide chip between the base 2 and the movable seat 3. And a limit post 21 is arranged on the base 2, and the limit post 21 is positioned on the moving path of the movable seat 3.
Specifically, the chip storage area 4 includes a bottom plate 41, a panel 42 and a limiting frame 43, the base 2 is provided with a mounting opening 22, the cross section of the mounting opening 22 is in a step shape, and the bottom plate 41, the panel 42 and the limiting frame 43 are sequentially arranged on the mounting opening 22;
the limiting frame 43 is provided with a limiting opening 45 matched with the waveguide chip, the panel 42 is provided with a plurality of positioning columns 46, and the bottom plate 41 and the panel 42 are provided with a transmission channel 44 corresponding to the waveguide opening on the waveguide chip;
a plurality of through holes 47 are provided on the panel 42 around the transmission path 44, and the ground elastic probes 5 are embedded in the through holes 47 on the panel 42.
The test system is connected to the transmission channel 44 via a waveguide flange 48 and a waveguide 49. Waveguide flange 48 employs a FUGP type flange plate with the benefit of directly carrying alignment pins and docking screws for virtually quick and accurate docking and locking. The waveguide 49 is in a bent structure, and two ends of the bent structure are 90 degrees, so that a waveguide port in the vertical direction is turned to the side surface, and the test system can be conveniently docked.
Further, the lifting mechanism 8 comprises a guide post 81, a linear bearing 82 and a quick clamp 83, the guide post 81 is arranged on the test platform 1, the guide post 81 is matched with the linear bearing 82, the linear bearing 82 moves back and forth on the guide post 81, and the movable seat 3 is connected with the linear bearing 82;
the test platform 1 is provided with a back plate 11, the back plate 11 is provided with a fixed plate 12, the quick clamp 83 is fixed on the fixed plate 12, and the quick clamp 83 is connected with the movable seat 3 to drive the movable seat 3 to lift and move on the guide pillar 81.
A return spring 84 is sleeved on the guide post 81, and the return spring 84 is arranged between the test platform 1 and the movable seat 3.
Example 2:
the present embodiment 2 is different from embodiment 1 in that: the movable seat 3 is also provided with a radio frequency measurement connector 9. In this embodiment, the rf test connector 9 is an elastic test connector of GSG structure. The radio frequency test connector 9 corresponds to a radio frequency port on the waveguide chip to test the radio frequency port of the coplanar waveguide structure on the waveguide chip.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. The test fixture for the waveguide chip is characterized by comprising a test platform, wherein a base and a movable seat are arranged on the test platform;
the base is fixedly arranged on the test platform, a chip storage area is arranged on the base and used for placing a waveguide chip, a transmission channel is arranged on the chip storage area and corresponds to a waveguide port on the waveguide chip, and grounding elastic probes are arranged around the transmission channel;
the movable seat is provided with a needle seat area corresponding to the chip storage area, the needle seat area is provided with a low-frequency elastic probe, the movable seat is arranged on the test platform through a lifting mechanism, and the lifting mechanism drives the movable seat to move up and down so as to clamp the waveguide chip between the base and the movable seat.
2. The waveguide chip test fixture according to claim 1, wherein a limit post is provided on the base, the limit post being located on a moving path of the movable base.
3. The waveguide chip test fixture of claim 1, wherein a radio frequency test connector is further provided on the movable mount.
4. The waveguide chip testing fixture according to claim 1, wherein the chip storage area comprises a bottom plate, a panel and a limiting frame, a mounting opening is formed in the base, the section of the mounting opening is stepped, and the bottom plate, the panel and the limiting frame are sequentially arranged on the mounting opening;
the limiting frame is provided with a limiting opening matched with the waveguide chip, and the transmission channel is arranged on the bottom plate and the panel;
the panel is provided with a plurality of through holes around the transmission channel, and the grounding elastic probes are embedded in the through holes on the panel.
5. The waveguide chip test fixture of claim 4, wherein the test system is coupled to the transmission channel via a waveguide flange and a waveguide.
6. The waveguide chip test fixture according to any one of claims 1 to 5, wherein the lifting mechanism comprises a guide part, a sliding part and a driving part, the guide part is arranged on the test platform, the guide part is matched with the sliding part, the sliding part moves reciprocally on the guide part, and the movable seat is connected with the sliding part;
the driving part is arranged on the test platform and is connected with the movable seat to drive the movable seat to move up and down on the guide part.
7. The waveguide chip testing fixture according to claim 6, wherein the guide portion is a guide post, the sliding portion is a linear bearing, the linear bearing is matched with the guide post, the movable seat is connected with the linear bearing, and the movable seat is connected to the guide post in a lifting manner through the linear bearing.
8. The waveguide chip test fixture according to claim 7, wherein a return spring is sleeved on the guide post, and the return spring is arranged between the test platform and the movable seat.
9. The waveguide chip testing fixture according to claim 6, wherein the guide portion is a linear guide rail, the sliding portion is a sliding block, the sliding block is matched with the linear guide rail, the movable seat is connected with the sliding block, and the movable seat is connected to the linear guide rail in a lifting manner through the sliding block.
10. The waveguide chip test fixture according to claim 6, wherein the driving part is a snap clamp, a back plate is provided on the test platform, a fixing plate is provided on the back plate, and the snap clamp is fixed on the fixing plate.
CN202310476832.XA 2023-04-25 2023-04-25 Test fixture of waveguide chip Pending CN116482418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310476832.XA CN116482418A (en) 2023-04-25 2023-04-25 Test fixture of waveguide chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310476832.XA CN116482418A (en) 2023-04-25 2023-04-25 Test fixture of waveguide chip

Publications (1)

Publication Number Publication Date
CN116482418A true CN116482418A (en) 2023-07-25

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ID=87217558

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310476832.XA Pending CN116482418A (en) 2023-04-25 2023-04-25 Test fixture of waveguide chip

Country Status (1)

Country Link
CN (1) CN116482418A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117590203A (en) * 2024-01-18 2024-02-23 宁波吉品科技有限公司 Chip radio frequency test platform

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117590203A (en) * 2024-01-18 2024-02-23 宁波吉品科技有限公司 Chip radio frequency test platform
CN117590203B (en) * 2024-01-18 2024-04-19 宁波吉品科技有限公司 Chip radio frequency test platform

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