CN116481446A - Correction device and correction method - Google Patents

Correction device and correction method Download PDF

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Publication number
CN116481446A
CN116481446A CN202210047504.3A CN202210047504A CN116481446A CN 116481446 A CN116481446 A CN 116481446A CN 202210047504 A CN202210047504 A CN 202210047504A CN 116481446 A CN116481446 A CN 116481446A
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CN
China
Prior art keywords
distance information
edge ring
detection
functional device
correction
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CN202210047504.3A
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Chinese (zh)
Inventor
董帮亮
汪兵
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Changxin Memory Technologies Inc
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Changxin Memory Technologies Inc
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Application filed by Changxin Memory Technologies Inc filed Critical Changxin Memory Technologies Inc
Priority to CN202210047504.3A priority Critical patent/CN116481446A/en
Priority to PCT/CN2022/075439 priority patent/WO2023133953A1/en
Publication of CN116481446A publication Critical patent/CN116481446A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The disclosure provides a correction device and a correction method, and relates to the technical field of semiconductors. The correction device is used for correcting the relative position between the edge ring and the functional device of the semiconductor equipment, and comprises: the device comprises a plurality of support rods, a detection device and a controller, wherein one ends of the support rods are relatively fixed, and the other ends of the support rods are respectively arranged in a plurality of mounting holes of the functional device and are obliquely arranged; the plurality of detection devices are arranged on the plurality of support rods in a one-to-one correspondence manner, and the detection devices are used for detecting first distance information between the detection devices and the edge ring; the controller is electrically connected with the plurality of detection devices respectively. According to the method, the detection device on each supporting rod is used for detecting, the first distance information between the detection device and the edge ring is obtained, then the position correction of the edge ring is completed through the plurality of first distance information, the measurement accuracy is effectively improved, the consistency of the critical dimension of the semiconductor structure is further ensured, and the yield of the semiconductor structure is effectively improved.

Description

Correction device and correction method
Technical Field
The disclosure relates to the field of semiconductor technology, and in particular, to a correction device and a correction method.
Background
In the process of manufacturing semiconductor structures, it is necessary to etch the semiconductor structures in different processes. Etching techniques can be classified into wet etching and dry etching, and are important steps in semiconductor manufacturing processes, microelectronic manufacturing processes, and micro-nano-scale manufacturing processes.
During etching of the semiconductor structure, the relative spacing between the edge ring and the electrostatic chuck needs to be adjusted.
The current correction and adjustment method for the edge ring comprises the steps of placing the edge ring in a visual measurement mode, and measuring the relative distance between the edge of the edge ring and the edge of the electrostatic chuck by utilizing a vernier caliper and the like, so that the position of the edge ring is corrected and adjusted.
However, the above-mentioned manner of correcting and adjusting the relative position of the edge ring has measurement errors, so that the critical dimension of the subsequent semiconductor structure is not easy to control, and the performance and yield of the semiconductor structure are reduced.
Disclosure of Invention
The following is a summary of the subject matter of the detailed description of the present disclosure. This summary is not intended to limit the scope of the claims.
The present disclosure provides a correction device and a correction method.
A first aspect of the embodiments of the present disclosure provides a correction apparatus for correcting a relative position between an edge ring and a functional device of a semiconductor device, the correction apparatus including: the positions of one ends of the plurality of support rods are relatively fixed, the other ends of the plurality of support rods are respectively arranged in a plurality of mounting holes of the functional device, and the support rods are obliquely arranged relative to the functional device;
the detection devices are arranged on the support rods, are arranged in one-to-one correspondence with the support rods, and are used for detecting first distance information between the detection devices and the edge ring;
and the controller is electrically connected with the plurality of detection devices respectively.
According to some embodiments of the disclosure, the detection device comprises a detection unit capable of rotating relative to the support bar, the detection unit being configured to detect first distance information between the detection unit and the edge ring.
According to some embodiments of the disclosure, the detection unit comprises a laser ranging sensor.
According to some embodiments of the present disclosure, the detection device further comprises a display unit, the display unit being communicatively connected with the detection unit;
the display unit is used for displaying the first distance information.
According to some embodiments of the disclosure, the included angles formed between the plurality of support rods and the functional device are all the same.
According to some embodiments of the present disclosure, ends of the plurality of support rods remote from the functional device have an intersection point; or,
the extension lines of one end of the plurality of support rods far away from the functional device are provided with intersection points; or,
the orthographic projection of the plurality of support bars on the functional device has a midpoint.
According to some embodiments of the disclosure, the intersection or midpoint is located on a perpendicular line passing through a center point of the functional device.
According to some embodiments of the disclosure, the correction device further includes a fixing member for fixing one end of the plurality of support rods away from the functional device.
According to some embodiments of the disclosure, the fixing piece comprises a fixing seat, and a plurality of inserting holes are formed in the fixing seat, wherein one ends of the plurality of supporting rods are inserted into the inserting holes respectively.
According to some embodiments of the disclosure, the correction device further comprises a plurality of locking members, and the support rod is fixed on the fixing base through the locking members.
According to some embodiments of the disclosure, the number of the support rods is at least three.
A second aspect of the present disclosure provides a correction method applied to the correction device as described above, the correction method including:
acquiring first distance information detected by each detection device, wherein the first distance information is used for representing the distance between each detection device and the edge ring;
acquiring second distance information of each supporting rod, wherein the second distance information is used for representing the geometric position relationship between the two end parts of the supporting rods and the functional device;
determining the relative distance between the functional device and the edge ring in the area where the support rod is located according to the first distance information and the second distance information;
and adjusting the position of the edge ring according to the difference value between the relative intervals.
According to some embodiments of the disclosure, the adjusting the position of the edge ring according to the difference between the relative pitches includes:
and when the difference value exceeds a preset threshold range, adjusting the position of the edge ring.
According to some embodiments of the present disclosure, the obtaining second distance information of each support rod, where the second distance information is used to characterize a geometric positional relationship between two ends of the support rod and a functional device, includes:
acquiring a first length, wherein the first length is used for representing the distance between the detection device and a mounting hole on the functional device;
acquiring an inclination angle of the support rod, wherein the inclination angle is used for representing an acute angle between the support rod and the functional device;
and obtaining a second length, wherein the second length is used for representing the distance between the mounting hole and the edge of the functional device.
According to some embodiments of the present disclosure, the determining, according to the first distance information and the second distance information, a relative distance between the functional device and the edge ring in the area where the support bar is located includes:
and determining the relative distance according to the first distance information, the first length, the inclination angle and the second length.
In the correction device and the correction method provided by the embodiment of the disclosure, one detection device is arranged on each support rod, the first distance information of the edge positions of the detection device and the edge ring is acquired by using the detection device, and then the relative positions of the edge ring are corrected by comparing a plurality of first distance information, so that the measurement precision is effectively improved, the consistency of the critical dimensions of the semiconductor structure is further ensured, and the yield of the semiconductor structure is improved.
Other aspects will become apparent upon reading and understanding the accompanying drawings and detailed description.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description, serve to explain the principles of the embodiments of the disclosure. In the drawings, like reference numerals are used to identify like elements. The drawings, which are included in the description, are some, but not all embodiments of the disclosure. Other figures can be derived from these figures by one of ordinary skill in the art without undue effort.
Fig. 1 is a schematic diagram of a correction device according to an exemplary embodiment.
Fig. 2 is a schematic view of a fixture of the correction device according to an exemplary embodiment.
FIG. 3 is a schematic diagram illustrating edge ring misalignment, according to an example embodiment.
FIG. 4 is a schematic diagram illustrating edge ring placement according to an example embodiment.
FIG. 5 is a schematic diagram illustrating a determination of relative spacing according to an example embodiment.
Fig. 6 is a flow chart illustrating a correction method according to an exemplary embodiment.
Reference numerals:
1. a support rod; 2. a detection device;
3. a controller; 4. a fixing member;
5. a locking member; 10. an edge ring;
20. a functional device; 21. a detection unit;
22. a display unit; 41. a fixing seat;
42. a plug hole; 210. a mounting hole;
a. first distance information; b. a first length;
d. a third length; e. a second length;
f. a fourth length; g. a fifth length;
A. an inclination angle; h1, a first vertical height;
h2, second vertical height; l, relative spacing;
p, intersection point; p1, midpoint;
s, the length of the supporting rod.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions in the disclosed embodiments will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present disclosure, and it is apparent that the described embodiments are some embodiments of the present disclosure, but not all embodiments. Based on the embodiments in this disclosure, all other embodiments that a person skilled in the art would obtain without making any inventive effort are within the scope of protection of this disclosure. It should be noted that, without conflict, the embodiments of the present disclosure and features of the embodiments may be arbitrarily combined with each other.
In the process of manufacturing semiconductor structures, it is necessary to etch the semiconductor structures in different processes. Etching techniques can be classified into wet etching and dry etching, and are important steps in semiconductor manufacturing processes, microelectronic manufacturing processes, and micro-nano-scale manufacturing processes.
In the etching process of the semiconductor structure, the relative distance between the edge ring and the electrostatic chuck needs to be corrected and adjusted.
The current correction and adjustment method for the edge ring comprises the steps of placing the edge ring in a visual measurement mode, and measuring the relative distance between the edge of the edge ring and the edge of the electrostatic chuck by utilizing a vernier caliper and the like, so that the position of the edge ring is corrected and adjusted.
After the cleaning procedure is carried out, the machine for manufacturing the semiconductor structure firstly places the edge ring at the edge of the electrostatic chuck when the edge ring is placed. Then, the relative spacing between the edge of the edge ring and the edge of the electrostatic chuck was measured using a vernier caliper. And selecting a plurality of positions to measure respectively, wherein when the relative gaps of the positions are all preset values, for example, the measurement results of the relative gaps of the positions are all 0.125mm, the positions of the edge ring are indicated to be aligned.
However, the above-mentioned manner of correcting and adjusting the relative position of the edge ring has measurement errors, so that the critical dimension of the subsequent semiconductor structure is not easy to control, and the performance and yield of the semiconductor structure are reduced.
In order to solve one of the above-described technical problems, exemplary embodiments of the present disclosure provide a correction device. As shown in fig. 1, fig. 1 shows a schematic diagram of a correction device provided according to an exemplary embodiment, and the correction device is described below with reference to fig. 1 to 5.
As shown in fig. 1 to 4, an exemplary embodiment of the present disclosure provides a correction apparatus for correcting a relative position between an edge ring 10 and a functional device 20 of a semiconductor device. The functional device 20 includes an electrostatic chuck, and it should be noted that the functional device 20 may also be other structures in a semiconductor device, which is not specifically limited herein. Wherein the correction device comprises a plurality of support rods 1, a plurality of detection devices 2 and a controller 3.
Referring to fig. 1 to 4, in some embodiments, the number of support rods 1 is plural. The position of one end of any one support bar 1 among the plurality of support bars 1 is relatively fixed, wherein the relatively fixed end of the support bar 1 may be an upper end or a lower end of the support bar 1. In this embodiment, the upper end of the support rod 1 is fixed. The other ends of the plurality of support rods 1 are respectively installed in a plurality of installation holes 210 of the functional device 20 (such as an electrostatic chuck), and the number of the installation holes 210 is the same as that of the support rods 1. Meanwhile, each support bar 1 is disposed obliquely with respect to the top surface of the function device 20.
In some embodiments, the upper end of each support bar 1 of the plurality of support bars 1 is fixedly connected. The fixed connection mode can be that the upper ends of any two support rods 1 are fixedly overlapped, or the upper ends of a plurality of support rods 1 are fixedly connected through fixing pieces, so that a structural form of the support frame is formed, wherein the fixing pieces can comprise fixing blocks or connecting rods and the like.
As shown in fig. 1 to 4, a plurality of detection devices 2 are provided on a plurality of support rods 1 in one-to-one correspondence, and the support rods 1 are provided obliquely. Wherein the detecting means 2 may be provided at any position of the support bar 1. The detecting means 2 is for detecting first distance information between the detecting end of the detecting means 2 on each support bar 1 and the edge of the edge ring 10. Here, the edge of the edge ring 10 in the present embodiment refers to the inner edge of the edge ring 10, and in other embodiments, the distance between the detection end of the detection device 2 and the inner edge of the edge ring 10 may be used as the first distance information.
In some embodiments, to facilitate subsequent quick acquisition of the first distance information and easy installation and positioning, the detection device 2 may be disposed at a position half of the effective length of the support rod 1. It should be noted that the effective length of the support rod 1 is used to characterize the length between the surface of the functional device 20 and the top end of the support rod 1 at the fixed position. In this embodiment, the detecting device 2 is disposed at a position of one half of the effective length of the support bar 1, and the support bar 1 is disposed obliquely, whereby the vertical distance between the support bar 1 and the functional device 20, the surface of the functional device 20, and the like are connected to each other to form a triangle or a right triangle, so that the first information can be quickly obtained according to the similar triangle theorem, the pythagorean theorem, and the like, the correction time of the edge ring 10 is saved, and the correction efficiency is improved, thereby improving the productivity of the semiconductor structure.
Referring to fig. 1, in some embodiments, the correction device further comprises a controller 3, the controller 3 being electrically connected to the plurality of detection devices 2. The controller 3 may include a programmable logic controller (Programmable Logic Controller, PLC) that employs a programmable memory in which instructions for performing operations such as logic operations, sequence control, timing, counting, and arithmetic operations are stored, and controls various types of machine equipment or production processes through digital or analog input and output. Alternatively, the controller 3 may also include a single-chip microcomputer or the like.
In this embodiment, a detection device is disposed on each support rod, and the detection device is used to accurately obtain the first distance information of the edge position corresponding to the edge ring, and then the relative position of the edge ring is corrected by comparing the plurality of first distance information, so that the measurement accuracy is effectively improved, the consistency of the critical dimension of the semiconductor structure is further ensured, and the yield of the semiconductor structure is improved.
As shown in fig. 1, in some embodiments, the detection device 2 includes a detection unit 21, and the detection unit 21 can rotate relative to the support rod 1. Wherein the detection unit 21 is configured to detect first distance information between the detection unit and an inner edge of the edge ring 10.
In this embodiment, the detection angle of the detection end of the detection unit 21 can be adjusted by the relative rotation of the detection unit 21, so that the detection data (i.e., the first distance information) of the corresponding detection unit 21 can be directly acquired later.
On the other hand, the detection angle of the detection unit 21 may be adjusted according to different positions of the mounting hole 210 on the functional device 20, for example, the detection angle of the detection end of the detection unit may be adjusted according to positions of the pin holes (i.e., the mounting hole 210) in the electrostatic chuck (i.e., the functional device 20) with different dimensions, so as to facilitate the operation and use of the detection device 2, and save the detection period.
As shown in fig. 1, in some embodiments, the detection unit 21 includes a laser ranging sensor. After the detection angle of the detection end of the laser ranging sensor is adjusted, a plurality of first distance information between the inner edge of the edge ring 10 and the outer edge of the functional device 20 is detected by using a plurality of laser ranging sensors. A plurality of relative distances between the outer edge of the functional device 20 and the inner edge of the edge ring 10 are derived based on the plurality of first distances, and then whether the position of the edge ring 10 needs to be corrected is determined according to the plurality of relative distance differences. Therefore, in the embodiment, the electronic laser ranging sensor is utilized to effectively improve the accuracy of a detection result, reduce detection errors caused by manual measurement, and simultaneously avoid the problems of particle pollution and the like caused by the manual measurement process of semiconductor equipment, thereby effectively ensuring and improving the consistency and yield of the key size of a subsequent semiconductor structure.
As shown in fig. 1, in some embodiments, the detection device 2 further includes a display unit 22 for displaying the first distance information, where the display unit 22 is communicatively connected to the detection unit 21, and the display unit 22 is disposed on the support rod 1. The display unit 22 may include, but is not limited to, an electronic display screen, a tablet, a cell phone, a computer monitor, or the like.
It should be noted that, in one example, the display unit 22 employs an electronic display screen. The number of the electronic display screens is at least one. When the number of the electronic display screens is one, the plurality of detection units 21 are all connected with the electronic display screens in a communication manner.
Or, each supporting rod 1 is correspondingly provided with an electronic display screen, that is, the number of the electronic display screens is consistent with that of the detecting units 21. The electronic display screen may be provided at an arbitrary position on the support bar 1, wherein the electronic display screen may be provided at a position above the detection unit 21 on the support bar 1 in order to facilitate detection by the detection unit 21. In some embodiments, the electronic display screen may have a length of 30mm and a width of 20mm, so that the detection by the detection unit 21 is facilitated while the detection result is conveniently read.
In this embodiment, the display unit 22 can more intuitively read the detection result of each detection unit 21, thereby improving the detection efficiency.
As shown in fig. 1, in some embodiments, the angles formed between the plurality of support rods 1 and the functional device 20 are all the same. That is, the plurality of support rods 1 cooperate with the surface of the functional device 20 to form a regular pyramid structure. The perpendicular line from the vertex of the regular pyramid to the surface of the functional device 20 passes through the center of the functional device 20, so that the first distance information can be quickly and accurately obtained, the subsequent calculation and deduction process of the relative distance between the functional device 20 and the edge ring 10 is simplified, and the detection efficiency is improved.
As shown in fig. 1 to 5, in some embodiments, the ends of the plurality of support rods 1 remote from the functional device 20 have an intersection point P. Wherein, the one end that function device 20 was kept away from to bracing piece 1 is its upper end, the upper end of a plurality of bracing pieces 1 can be fixed through connecting rod or fixed block to guarantee that the length that is located every bracing piece 1 of function device 20 top is the same, then, fix a plurality of laser rangefinder sensor one-to-one on a plurality of bracing pieces 1 the same position, and then usable laser rangefinder sensor short-term test first distance information, the relative interval between the inward flange of accurate determination edge ring 10 and the outward flange of function device 20, in order to judge whether the relative position of edge ring 10 needs to correct.
Alternatively, the extension lines of the ends of the plurality of support rods 1 remote from the function device 20 have the intersection point P. That is, the upper ends of the plurality of support rods 1 may be fixedly connected by a fixing block, in one example, the upper ends of the plurality of support rods 1 are inserted into the fixing block, and the lower ends of the plurality of support rods 1 are mounted in the plurality of mounting holes 210 of the functional device 20. From this, a plurality of bracing pieces 1 are stable fix between functional device 20 and fixed block to improve laser rangefinder sensor's detection accuracy, then improve detection result's precision and efficiency.
Alternatively, the projection pattern surrounded by the orthographic projections of the plurality of support rods 1 on the functional device 20 has a midpoint P1. That is, the orthographic projection of the crossing position of the plurality of support rods 1 coincides with the midpoint of the projection pattern, the plurality of support rods 1 of this structure is easily mounted on the functional device 20, and the stability of the plurality of support rods 1 during ranging can be ensured. The laser ranging sensor can be arranged at a preset position below the staggered position of the supporting rod, and then the laser ranging sensor is used for rapidly detecting the first distance information, so that the accuracy of a detection result is improved.
As shown in fig. 5, in some embodiments, the intersection or midpoint in the above examples is located on a perpendicular line passing through the center point of feature 20. That is, the intersection point of the plurality of support rods 1 or the midpoint of the orthographic projection is located directly above the center point of the functional device 20. The plurality of support rods 1 are constructed in a regular pyramid structure in cooperation with the top surface of the functional device 20, thereby facilitating the subsequent rapid detection of a plurality of first distance information by the detection unit 21. Then, whether the placement position of the edge ring 10 needs to be corrected is judged by utilizing the plurality of first distance information, meanwhile, the regular pyramid structure has good stability, the accuracy of the detection result of the detection unit 21 can be improved, the detection efficiency and the detection precision are improved, and the consistency and the yield of the critical dimension of the semiconductor structure are further ensured and improved.
As shown in fig. 1 and 2, in some embodiments, the correction device further comprises a fixture 4. The fixing member 4 is used to fix one end of the plurality of support rods 1 away from the functional device 20. In this embodiment, the fixing member 4 is used to fix the upper ends of the plurality of support rods 1, so as to improve the stability of the detection unit 21 in the detection process, and further improve the accuracy of the detection result.
As shown in fig. 2, in some embodiments, the fixing member 4 includes a fixing base 41, and a plurality of inserting holes 42 are provided on a bottom surface of the fixing base 41, where one ends (such as upper ends) of the plurality of support rods 1 are respectively inserted into the plurality of inserting holes 42. It should be noted that the plugging hole 42 may be obliquely disposed on the fixing base 41, so as to facilitate plugging of the support rod 1. In this embodiment, utilize the spliced eye on the fixing base, the bracing piece of being convenient for carries out quick assembly or dismantlement between functional device and fixing base, improves installation and dismantlement efficiency to in improving detection efficiency, also can effectively improve detecting element's stability.
It should be noted that in some embodiments, the calibration device further includes a locking member 5. The number of the locking pieces 5 is multiple, and the locking pieces 5 are in one-to-one correspondence with the supporting rods 1. One end of the locking member 5 passes through a side wall of the fixing seat 41 and extends into the inserting hole 42 to fix the support rod 1 on the fixing seat 41, thereby improving the stability of connection between the fixing seat 41 and the support rod 1.
In one example, the locking member 5 comprises a locking bolt screwed onto a side wall of the fixing base, wherein the side wall of the fixing base is perpendicular to the bottom surface of the fixing base.
As shown in fig. 1, in some embodiments, the number of the support rods 1 is at least three, for example, the number of the support rods 1 may be three, four or more.
When the number of the support rods 1 is three, a regular triangular pyramid structure may be constructed, and correspondingly, three mounting holes 210 may be formed on three vertexes of an equilateral triangle, and a perpendicular line from the vertex of the regular triangular pyramid to the surface of the functional device 20 passes through the center of the functional device 20 and the center of the equilateral triangle, so that three pieces of first distance information can be rapidly acquired by the detecting device 2, and whether the placement position of the edge ring 10 is correct or not can be determined by using the first distance information.
It should be noted that, in some embodiments, the three support rods 1 may also be configured as a triangular pyramid structure, and a perpendicular line from the vertex of the triangular pyramid to the surface of the functional device 20 may not pass through the center of the functional device 20. Thus, according to the inclination angle of each support bar 1, the length of the support bar 1, and the height of the position of the detection device 2 on the support bar 1, a plurality of first distance information can be obtained by using the pythagorean theorem, the similar triangle theorem, and the like, and whether the position of the edge ring 10 needs to be corrected can be determined by the first distance information.
When the number of the support bars 1 is four or more, a polygonal pyramid structure such as a regular square pyramid, a regular hexagonal pyramid, or the like may be constructed. The perpendicular passing through the apex of the regular pyramid passes through the center of the functional device 20, or the perpendicular passing through the apex of the polygonal pyramid does not pass through the center of the functional device 20. Thus, the calculation process of determining whether the position of the edge ring 10 needs correction in this embodiment may refer to the calculation process of the support rod 1 having three numbers.
The process of calculating and determining whether the position of the edge ring 10 needs to be corrected using the plurality of support rods 1 and the plurality of detecting devices 2 is described in the following correction method.
In this embodiment, a regular pyramid structure or a polygonal pyramid structure is constructed by the plurality of support rods 1, and the similar triangle theorem, the Pythagorean theorem and the like are utilized, so that the first distance information between the detection device 2 and the inner edge of the edge ring 10 is rapidly detected, the detection efficiency and the detection precision are improved, and the consistency and the yield of the critical dimension of the semiconductor structure are further ensured and improved.
As shown in fig. 6, an exemplary embodiment of the present disclosure provides a correction method applied to the correction device described above. The correction method of the embodiment comprises the following steps:
s100: and acquiring first distance information detected by each detection device, wherein the first distance information is used for representing the distance between each detection device and the edge ring.
Step S200: and acquiring second distance information of each supporting rod, wherein the second distance information is used for representing the geometric position relationship between the two ends of the supporting rod and the functional device.
Step S300: and determining the relative distance between the functional device and the edge ring in the area where the support rod is positioned according to the first distance information and the second distance information.
Step S400: and adjusting the position of the edge ring according to the difference value between the relative intervals.
In this embodiment, a plurality of first distance information is acquired by using a detection device, then, a plurality of relative distances between the functional device and the edge ring are determined according to the plurality of first distance information and the second distance information of each support rod, and then, whether the position of the edge ring needs to be adjusted is determined according to the difference value between the relative distance brackets. The correction method is simple to operate, and can effectively ensure and improve the consistency and yield of the key size of the subsequent semiconductor structure.
According to an exemplary embodiment, this embodiment is a further description of step S100 above.
Referring to fig. 4, in some embodiments, the first distance information a may be detected by the detection means 2. The detection device 2 comprises a detection unit 21 and a display unit 22, wherein the detection unit 21 can adopt a laser ranging sensor, and the laser ranging sensor is in communication connection with the display unit 22.
In the process of acquiring the first distance information a, the laser ranging sensor is firstly installed at a preset position of the supporting rod 1, and the angle of the detection end of the laser ranging sensor is adjusted. The orthographic projection of the detection light emitted by the detection end of the laser ranging sensor on the functional device 20 and the orthographic projection of the support rod 1 on the functional device 20 are positioned on the same straight line, that is, the detection angle adjustment of the laser ranging sensor is completed. Then, the laser ranging sensor is turned on, the laser ranging sensor emits detection light, and after the detection light touches the inner edge of the edge ring 10, part of the detection light is reflected back to the laser ranging sensor, so that the first distance information a is detected rapidly. Finally, the first distance information a is digitally displayed by the display unit 22.
In this embodiment, the orthographic projection of the detection light emitted from the detection end of the laser ranging sensor on the functional device 20 and the orthographic projection of the support rod 1 on the functional device 20 are located on the same straight line, so that the calculation process of the relative distance between the subsequent edge ring 10 and the functional device 20 can be simplified, and the detection efficiency is improved.
It should be noted that, in other embodiments, the front projection of the detection light emitted by the laser ranging sensor on the functional device 20 and the front projection of the support rod 1 on the functional device 20 may not be located on the same line. In this embodiment, the relative distance between the edge ring 10 and the functional device 20 can also be calculated by deflecting the detection ends of the plurality of laser ranging sensors in the same direction and rotating the same angle. For example, the detection ends of the plurality of laser ranging sensors may deflect by the same angle clockwise or counterclockwise, and then the relative distance between the edge ring 10 and the functional device 20 may be calculated using the similar triangle theorem, the pythagorean theorem, and the like.
According to an exemplary embodiment, this embodiment is a further description of step S200 above.
As shown in fig. 3 and 4, in some embodiments, the second distance information is used to characterize the geometric positional relationship between the two ends of the support rods 1 and the functional device 20, wherein the process of obtaining the second distance information for each support rod 1 is as follows:
a first length b is obtained, which is used to characterize the distance between the detection device 2 and the mounting hole 210 on the functional device 20, wherein the first length b can be directly measured. In some embodiments, two ends of the supporting rod 1 are respectively installed in the mounting hole 210 and the plugging hole of the fixing seat, at this time, the length of the supporting rod 1 between the mounting hole 210 and the bottom surface of the fixing seat is S, and the detecting device 2 is installed at any position of the supporting rod 1, for example, the proportional relationship between the first length b and the length S of the supporting rod 1 is b: s=1: (2-5). In other embodiments, since the position of the mounting hole 210 is preset, the first length b may be pre-stored in the controller in a pre-storing manner, and when the use is needed, the first length b is directly called.
The inclination angle a of the support rod 1 is obtained, and the inclination angle a is used for representing the acute angle between the support rod 1 and the functional device 20. Wherein the acute angle may be rapidly measured by an angle gauge or the like, or may be determined according to the specifications of the functional device 20. For example, the specification of the functional device 20 is determined according to the process requirements of the semiconductor structure, and then a third length d is determined, where the third length d is used to characterize the distance from the mounting hole 210 on the functional device 20 to the center of the functional device 20. In one example, the length S of the support rod 1 may be set to be twice the third length d, and the inclination angle a is 60 degrees when the front projection of the tip of the support rod 1 on the function device 20 coincides with the center of the function device 20.
A second length e is obtained, which is used to characterize the distance of the mounting hole 210 from the edge of the functional device 20. Wherein the actual value of the second length e is known after the usage specification of the functional device 20 is determined.
The second distance information includes a first length b, an inclination angle a, a second length e, and a third length d. In this embodiment, the second length e and the third length d can be directly obtained by using the specifications of the functional device, the inclination angle a can be directly obtained by using a measuring tool such as an angle measuring instrument, and the length of the support rod 1 can be calculated and processed. Therefore, the acquisition rate of the second distance information is effectively improved, and the efficiency of the subsequent edge ring position correction is further improved.
According to an exemplary embodiment, this embodiment is a further description of step S300 above.
Referring to fig. 3 and 4, the relative distance L between the functional device 20 and the edge ring 10 in the area where the support bar 1 is located is determined based on the first distance information a and the second distance information.
In determining the relative distance L, parameters of the first distance information a, the first length b, the length S of the support rod 1, the inclination angle a, and the second length e need to be calculated according to a preset rule.
In one example, the specific calculation of the relative spacing L may employ the following method:
first, first distance information a is detected and acquired by a laser ranging sensor.
Then, the second length e and the third length d are determined according to the specifications of the functional device 20 used; the length S of the support bar 1 is directly measured and acquired, and the first length b is measured or deducted according to the installation position of the laser ranging sensor.
Then, in the first step: the first vertical height H1 can be determined by the Pythagorean theorem through the length S and the third length d of the supporting rod 1, and the first vertical height H1 is used for representing the vertical distance between the top end of the supporting rod 1 and the functional device 20; alternatively, the first vertical height H1 is used to characterize the vertical distance between the intersection of the plurality of support rods 1 and the functional device 20.
And a second step of: the first vertical height H1 and the first length b are used to determine a fourth length f and a second vertical height H2 by using the similar triangle theorem and the pythagorean theorem, wherein the fourth length f is used to represent a straight line distance between the orthographic projection of the detection unit 21 on the functional device 20 and the mounting hole 210, and the second vertical height H2 is used to represent a vertical distance between the position height of the detection unit 21 and the functional device 20.
And a third step of: by means of the first distance information a, the second vertical height H2, a fifth length g is determined by the pythagorean theorem, which fifth length g is used to characterize the distance between the orthographic projection of the detection unit 21 on the functional device 20 and the inner edge of the edge ring 10.
Finally, the relative spacing L is determined using the fifth length g, the fourth length f, and the second length e. That is, the fourth length f and the second length e are directly subtracted from the fifth length g, and the remaining value is the relative pitch L.
In another example, the specific calculation of the relative distance L may also employ the following method:
first, a second length e is determined according to the specifications of the functional device 20 used; directly measuring and acquiring the length S of the support rod 1, and measuring or deducing to determine a first length b according to the installation position of the laser ranging sensor; acquiring an inclination angle A by using a measuring tool; the first distance information a is detected and acquired by a laser ranging sensor.
Then, by the inclination angle a and the first length b, a fourth length f and a second vertical height H2 are determined by using sine theorem or cosine theorem, wherein the fourth length f is used for representing a straight line distance between the orthographic projection of the detection unit 21 on the functional device 20 and the mounting hole 210, and the second vertical height H2 is used for representing a vertical distance between the position height of the detection unit 21 and the functional device 20.
Then, by means of the first distance information a, the second vertical height H2, a fifth length g is determined, using the pythagorean theorem, which is used to characterize the distance between the orthographic projection of the detection unit 21 onto the functional device 20 and the inner edge of the edge ring 10,
finally, the relative spacing L is determined using the fifth length g, the fourth length f, and the second length e. That is, the fourth length f and the second length e are directly subtracted from the fifth length g, and the remaining value is the relative pitch L.
In the above embodiment, after the related parameters of the geometric position relationship are obtained, so that the following is convenient according to the parameters and the first distance information a, and the relative distance between the inner edge of the edge ring and the outer edge of the functional device can be accurately calculated by using preset rules such as the similar triangle theorem, the Pythagorean theorem and the sine and cosine theorem, and then, through the difference value between the multiple relative distances, whether the position of the edge ring 10 needs to be corrected is determined.
According to an exemplary embodiment, this embodiment is a further description of step S400 above.
Referring to fig. 2 and 3, in some embodiments, the following method may be used in adjusting the position of the edge ring 10 according to the difference between the plurality of relative pitches L:
after a plurality of relative pitches L are to be determined, when the difference between any two of the relative pitches L exceeds a preset threshold range, the position of the edge ring 10 is adjusted. The preset threshold value may be in the range of 0mm to 0.05mm.
In one example, three support rods 1 are uniformly distributed on the functional device 20. Thus, in the correction of the position of the edge ring 10, three relative pitches L, namely, a relative pitch L1, a relative pitch L2, and a relative pitch L3 can be determined by the implementation of the laser ranging sensor and the correction method described above.
Further, a difference between the relative pitch L1 and the relative pitch L2, a difference between the relative pitch L2 and the relative pitch L3, and a difference between the relative pitch L1 and the relative pitch L3 are determined, wherein when the three differences are within 0.05mm, the position of the edge ring 10 is indicated to be aligned.
But when the difference between the relative pitch L1 and the relative pitch L2 is greater than 0.05mm; alternatively, the difference between the relative spacing L1 and the relative spacing L3 is greater than 0.05mm; alternatively, if the difference between the relative distance L2 and the relative distance L3 is greater than 0.05mm, it means that the position of the edge ring 10 is not aligned, and correction of the position of the edge ring 10 is required.
In this embodiment, according to the first distance information a and the second distance information, a plurality of relative distances L between the edge ring 10 and the functional device 20 are derived, the difference between any two relative distances L is compared with a preset threshold range, when the difference exceeds the preset threshold range, the position of the edge ring 10 needs to be corrected, and when the difference is within the preset threshold range, the position of the edge ring 10 is indicated to be aligned, and at this time, no adjustment is required to the position of the edge ring 10. The method is simple to operate, and the electronic laser ranging sensor is utilized, so that the accuracy of a detection result can be effectively improved, the detection error caused by manual measurement is reduced, meanwhile, particle pollution and the like caused by the manual measurement process of the semiconductor equipment can be avoided, and the consistency and yield of the key size of the subsequent semiconductor structure are effectively ensured and improved.
In this specification, each embodiment or implementation is described in a progressive manner, and each embodiment focuses on a difference from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
In the description of the present specification, descriptions of the terms "example," "exemplary embodiment," "some embodiments," "illustrative embodiments," "examples," and the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure.
In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In the description of the present disclosure, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present disclosure.
It will be understood that the terms "first," "second," and the like, as used in this disclosure, may be used to describe various structures, but these structures are not limited by these terms. These terms are only used to distinguish one structure from another structure.
In one or more of the drawings, like elements are referred to by like reference numerals. For clarity, the various parts in the drawings are not drawn to scale. Furthermore, some well-known portions may not be shown. The structure obtained after several steps may be depicted in one figure for simplicity. Numerous specific details of the present disclosure, such as device structures, materials, dimensions, processing techniques and technologies, are set forth in the following description in order to provide a more thorough understanding of the present disclosure. However, as will be understood by those skilled in the art, the present disclosure may be practiced without these specific details.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present disclosure, and not for limiting the same; although the present disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art will appreciate that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.

Claims (15)

1. A correction apparatus for correcting a relative position between an edge ring and a functional device of a semiconductor device, the correction apparatus comprising: the positions of one ends of the plurality of support rods are relatively fixed, the other ends of the plurality of support rods are respectively arranged in a plurality of mounting holes of the functional device, and the support rods are obliquely arranged relative to the functional device;
the detection devices are arranged on the support rods, are arranged in one-to-one correspondence with the support rods, and are used for detecting first distance information between the detection devices and the edge ring;
and the controller is electrically connected with the plurality of detection devices respectively.
2. The correction device according to claim 1, wherein the detection device includes a detection unit rotatable with respect to the support bar, the detection unit being configured to detect first distance information between the detection unit and the edge ring.
3. Correction device according to claim 2, characterized in that the detection unit comprises a laser ranging sensor.
4. The correction device of claim 2, wherein the detection device further comprises a display unit, the display unit being communicatively connected to the detection unit;
the display unit is used for displaying the first distance information.
5. The correction device of claim 1, wherein the plurality of support rods are all at the same angle to the functional element.
6. The correction device according to claim 1, wherein ends of the plurality of support rods remote from the functional means have intersections; or,
the extension lines of one end of the plurality of support rods far away from the functional device are provided with intersection points; or,
the orthographic projection of the plurality of support bars on the functional device has a midpoint.
7. A correction device according to claim 6, characterized in that the intersection or midpoint is located on a perpendicular line passing through the centre point of the functional device.
8. The correction device according to claim 1, further comprising a fixing member for fixing one end of the plurality of support rods away from the functional means.
9. The correction device according to claim 8, wherein the fixing member comprises a fixing seat, and a plurality of inserting holes are formed in the fixing seat, wherein one ends of the plurality of supporting rods are inserted into the inserting holes respectively.
10. The alignment device of claim 9 further comprising a plurality of locking members, wherein the support bar is secured to the mounting base by the locking members.
11. The correction device according to any one of claims 1 to 10, wherein the number of support rods is at least three.
12. A correction method applied to the correction device according to any one of claims 1 to 11, the correction method comprising:
acquiring first distance information detected by each detection device, wherein the first distance information is used for representing the distance between each detection device and the edge ring;
acquiring second distance information of each supporting rod, wherein the second distance information is used for representing the geometric position relationship between the two end parts of the supporting rods and the functional device;
determining the relative distance between the functional device and the edge ring in the area where the support rod is located according to the first distance information and the second distance information;
and adjusting the position of the edge ring according to the difference value between the relative intervals.
13. The method of calibrating according to claim 12, wherein adjusting the position of the edge ring according to the difference between the relative pitches includes:
and when the difference value exceeds a preset threshold range, adjusting the position of the edge ring.
14. The method of calibrating according to claim 12, wherein the acquiring second distance information of each support rod, the second distance information being used to characterize a geometric positional relationship between both ends of the support rod and a functional device, includes:
acquiring a first length, wherein the first length is used for representing the distance between the detection device and a mounting hole on the functional device;
acquiring an inclination angle of the support rod, wherein the inclination angle is used for representing an acute angle between the support rod and the functional device;
and obtaining a second length, wherein the second length is used for representing the distance between the mounting hole and the edge of the functional device.
15. The method of calibrating according to claim 14, wherein determining a relative distance between the functional device and the edge ring in the area where the support bar is located based on the first distance information and the second distance information includes:
and determining the relative distance according to the first distance information, the first length, the inclination angle and the second length.
CN202210047504.3A 2022-01-17 2022-01-17 Correction device and correction method Pending CN116481446A (en)

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