CN116477563B - Packaging method and device for monodisperse microsphere cavity coupling - Google Patents
Packaging method and device for monodisperse microsphere cavity coupling Download PDFInfo
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- CN116477563B CN116477563B CN202310233285.2A CN202310233285A CN116477563B CN 116477563 B CN116477563 B CN 116477563B CN 202310233285 A CN202310233285 A CN 202310233285A CN 116477563 B CN116477563 B CN 116477563B
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- 239000004005 microsphere Substances 0.000 title claims abstract description 226
- 238000010168 coupling process Methods 0.000 title claims abstract description 126
- 230000008878 coupling Effects 0.000 title claims abstract description 124
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 124
- 238000000034 method Methods 0.000 title claims abstract description 77
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 54
- 239000013307 optical fiber Substances 0.000 claims abstract description 270
- 239000003292 glue Substances 0.000 claims abstract description 100
- 238000001179 sorption measurement Methods 0.000 claims abstract description 20
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 42
- 239000000835 fiber Substances 0.000 claims description 32
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 21
- 239000001569 carbon dioxide Substances 0.000 claims description 21
- 239000000428 dust Substances 0.000 claims description 19
- 238000005538 encapsulation Methods 0.000 claims description 15
- 239000004744 fabric Substances 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 11
- 238000007598 dipping method Methods 0.000 claims description 10
- 238000010304 firing Methods 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 5
- 238000011049 filling Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 25
- 238000012546 transfer Methods 0.000 abstract description 16
- 230000004044 response Effects 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 230000008569 process Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 230000009471 action Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 230000001808 coupling effect Effects 0.000 description 7
- 230000005484 gravity Effects 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 238000013519 translation Methods 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 230000004927 fusion Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000012858 packaging process Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000005253 cladding Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention discloses a packaging method and a device for monodisperse microsphere cavity coupling, wherein the packaging method comprises the following steps: preparing an optical fiber cone; preparing tapered optical fibers; using the electrostatic adsorption of the optical fiber cone and the monodisperse microsphere cavity to transfer the monodisperse microsphere cavity to the tapered optical fiber; coupling the monodisperse microsphere cavity with a tapered region of the tapered optical fiber; transferring the low refractive index glue to the tapered optical fiber and the monodisperse microsphere cavity, and packaging; the refractive index of the low refractive index glue is smaller than that of the tapered optical fiber and the monodisperse microsphere cavity. The technical scheme of the embodiment of the invention opens up a packaging method of the small-mode-volume optical microsphere cavity, ensures that the packaged optical microsphere cavity is isolated from the external environment, and has extremely high sensitivity and extremely large bandwidth response to ultrasonic sensing.
Description
Technical Field
The invention relates to the technical field of optical fiber devices and preparation, in particular to a packaging method and device for monodisperse microsphere cavity coupling.
Background
The whispering gallery mode optical microcavity is a resonant cavity with the size distribution ranging from micrometers to millimeters, can limit photons in an extremely small space area for a long time, enhances the interaction between light and substances, and is widely applied to the fields of ultrasonic sensing, precision sensing, high-speed communication, light field regulation and control and the like.
At present, the conventional whispering gallery mode optical microcavity basically adopts CaF 2 、MgF 2 、SiO 2 And LiNbO 3 The material is obtained by an ultra-precise processing method, and some patents and articles disclose a preparation method and a packaging method thereof. However, monodisperse microsphere cavities have a smaller volume and the monodisperse microcavities of polymeric material are due toThe Young's modulus is smaller, the method has the advantages of higher sensitivity, larger bandwidth and the like in the field of ultrasonic sensing, but the small size (5-100 μm) and the single dispersion characteristic of the method also lead to the pain points of high transfer difficulty, high packaging difficulty and the like, and a mature coupling packaging scheme is not adopted.
At present, for other materials and the packaging method of the optical microcavity with larger volume, the optical microcavity and the optical fiber are basically packaged in a sealed shell, and the optical fiber and the optical microcavity are fixed through glue. However, since the monodisperse optical microcavity cannot be directly placed in the hermetic shell, if it is directly contacted with the package shell, the coupling field leaks, so that the light is almost completely lost, and it cannot be tested and used. And the sealing shell is adopted for packaging, so that the defects of large volume, serious reflection on ultrasonic signals and the like exist, and the sealing shell cannot be suitable for packaging the monodisperse microsphere cavity.
The coupling and packaging scheme of the existing monodisperse microsphere cavity only exists in the environment such as a laboratory and the like such as constant temperature, constant humidity, vibration isolation, dust free and the like, and the efficiency of free light coupling is low and unstable.
Disclosure of Invention
The invention provides a packaging method and a device for coupling a monodisperse microsphere cavity, which are used for solving the problems that the existing packaging method of a large-volume microsphere cavity cannot be suitable for the monodisperse microsphere cavity, and the coupling and packaging scheme of the existing monodisperse microsphere cavity only exists in the constant temperature, constant humidity, vibration isolation, dust free and other environments of a laboratory and the like, and the efficiency of free light coupling is very low and unstable.
According to an aspect of the present invention, there is provided a method for encapsulating monodisperse microsphere cavity coupling, including:
preparing an optical fiber cone;
preparing tapered optical fibers;
using the optical fiber cone and the monodisperse microsphere cavity to carry out electrostatic adsorption, and transferring the monodisperse microsphere cavity to the tapered optical fiber;
coupling the monodisperse microsphere cavity with a tapered region of the tapered optical fiber;
transferring low refractive index glue to the tapered optical fiber and the monodisperse microsphere cavity, and packaging;
the refractive index of the low refractive index glue is smaller than the refractive indexes of the tapered optical fiber and the monodisperse microsphere cavity.
Optionally, the preparing the optical fiber taper includes:
selecting a standard optical fiber, and hanging a weight at one end of the standard optical fiber;
firing at power P1 using a carbon dioxide laser;
monitoring the taper region length of the standard optical fiber, and increasing the power of the carbon dioxide laser from P1 to P2 in t1 time when the taper region length is greater than or equal to L1;
monitoring the cone length of the standard optical fiber, and when the cone length is greater than or equal to L2, increasing the power of the carbon dioxide laser from P2 to P3 in t2 time to fuse one end of the suspended weight of the standard optical fiber;
wherein L1 is less than L2; p3 > P2 > P1; t2 < t1.
Optionally, before the electrostatic adsorption using the optical fiber taper and the monodisperse microsphere cavity and transferring the monodisperse microsphere cavity to the tapered optical fiber, the method comprises:
dipping the low-refractive-index glue microdroplet by using the optical fiber cone;
adjusting the size of the low refractive index glue droplets;
transferring the low refractive index glue microdroplet with the diameter d1 to a taper region of the tapered optical fiber;
wherein d1 is less than or equal to 5 mu m.
Optionally, the transferring the low refractive index glue to the tapered optical fiber and the monodisperse microsphere cavity, and further packaging, includes:
dipping the low-refractive-index glue microdroplet by using the optical fiber cone;
adjusting the size of the low refractive index glue droplets;
transferring low refractive index glue droplets with a diameter d2 to the monodisperse microsphere cavity;
wherein d2 is less than or equal to 20 mu m.
Optionally, after transferring the low refractive index glue microdroplet with diameter d2 to the monodisperse microsphere cavity, the method further comprises:
dipping the low-refractive-index glue microdroplet by using the optical fiber cone;
adjusting the size of the low refractive index glue droplets;
transferring the low refractive index glue microdroplet with the diameter d3 to the monodisperse microsphere cavity and the tapered optical fiber;
wherein d3 is more than or equal to 30 mu m and less than or equal to 50 mu m.
Optionally, the coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber includes:
moving the fiber taper at a speed v1 in a direction perpendicular to the tapered fiber;
wherein v1 is less than or equal to 5 mu m/s.
Optionally, the coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber further includes:
and (3) scanning by using a tunable laser, and monitoring the coupling mode of the monodisperse microsphere cavity and the tapered optical fiber.
Optionally, before the electrostatic adsorption using the optical fiber taper and the monodisperse microsphere cavity, transferring the monodisperse microsphere cavity to the tapered optical fiber includes:
the monodisperse microsphere cavity solution is transferred to dust free paper or dust free cloth.
Optionally, after transferring the monodisperse microsphere cavity solution onto the dust-free paper or dust-free cloth, the method further comprises:
and drying the dust-free paper or dust-free cloth by using a heating plate.
Optionally, after the transferring the low refractive index glue to the tapered optical fiber and the monodisperse microsphere cavity, further packaging the package, the package further includes:
and sleeving the tail part of the tapered optical fiber into a glass sleeve, and filling the low-refractive-index glue into the glass sleeve.
Optionally, the tapered optical fiber includes a bent U-shaped tapered optical fiber or a straight tapered optical fiber.
According to another aspect of the present invention, there is provided a monodisperse microsphere cavity coupled device comprising a monodisperse microsphere cavity and a tapered optical fiber; the device for coupling the monodisperse microsphere cavity is prepared by using any encapsulation method for coupling the monodisperse microsphere cavity.
According to the technical scheme, the optical fiber taper and the monodisperse microsphere cavity are used for electrostatic adsorption, the monodisperse microsphere cavity is transferred to the tapered optical fiber, the monodisperse microsphere cavity is coupled with the tapered optical fiber, the low-refractive-index glue is further coated on the surfaces of the monodisperse microsphere cavity and the tapered optical fiber, the packaging of the monodisperse microsphere cavity and the tapered optical fiber is realized, the defects that the packaging size is large, the reflection on ultrasonic signals is serious and the like in the traditional packaging method for the large-volume optical microsphere cavity are overcome, the microsphere cavity and the optical fiber are packaged in a sealed shell, and the optical fiber and the optical microsphere cavity are fixed through the glue are overcome. And the existing coupling and packaging scheme of the package of the monodisperse microsphere cavity only exist in the environments of constant temperature, constant humidity, vibration isolation, dust free and the like in a laboratory and the like, and the free light coupling efficiency is low and the free light coupling is unstable. The packaging method provided by the embodiment of the invention has high stability and compactness, has a high quality factor, is isolated from the external environment, has extremely high sensitivity and large bandwidth response to ultrasonic sensing, opens up a road and a direction for the device in the field of optical microcavities, and has extremely large application advantages and development potential in the ultrasonic/photoacoustic detection and imaging and ultrasonic/photoacoustic endoscopic imaging directions.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow chart of a method for encapsulating monodisperse microsphere cavity coupling according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method for fabricating an optical fiber taper according to an embodiment of the present invention;
FIG. 3 is a flow chart of another method for encapsulating monodisperse microsphere cavity coupling according to an embodiment of the present invention;
FIG. 4 is a flow chart of another method for encapsulating monodisperse microsphere cavity coupling according to an embodiment of the present invention;
FIG. 5 is a diagram illustrating a process for fabricating an optical fiber taper according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of an apparatus for manufacturing a U-shaped tapered optical fiber according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a U-shaped tapered optical fiber according to an embodiment of the present invention;
FIG. 8 is a schematic diagram illustrating cavity transfer of monodisperse microspheres according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of a process for coupling and packaging a monodisperse microsphere cavity with an optical fiber according to an embodiment of the present invention;
fig. 10 is a schematic structural diagram of a device for coupling monodisperse microsphere cavities according to an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a flowchart of a method for packaging monodisperse microsphere cavity coupling according to an embodiment of the present invention. As shown in fig. 1, the method includes:
s110, preparing an optical fiber cone.
The optical fiber taper comprises, but is not limited to, a cavity for transferring monodisperse microspheres, and can also be used for transferring glue in the packaging process. The size of the light cone, such as the length and diameter of the cone region, can be selected according to the specification of the monodisperse microsphere cavity, the operation precision and the like; methods of preparing the fiber taper include, but are not limited to, melting the fiber by controlling the power of the laser, but other methods of preparation may be selected based on the ability to control the taper region length and diameter of the fiber taper.
Specifically, as one end of the optical fiber cone is provided with the cone region, on one hand, the transfer and the coupling of the monodisperse microsphere cavity can be realized through the monodisperse microsphere cavity with smaller electrostatic adsorption volume; on the other hand, the droplet size control in the glue coating and packaging process can be realized.
S120, preparing the tapered optical fiber.
The tapered optical fiber comprises, but is not limited to, a bent U-shaped tapered optical fiber, and a straight tapered optical fiber can be selected according to the actual application scene of the coupling device. The method for preparing the tapered optical fiber can be a fusion tapered method, and concretely comprises the steps of heating by hydrogen flame and stretching by an electric translation stage to prepare the tapered optical fiber. The taper region size of the tapered fiber may be between 1 μm and 2 μm in diameter, i.e., the size of a single mode fiber. Methods for preparing the tapered optical fiber also include chemical etching, mechanical polishing, and the like, and are not described in detail herein.
Specifically, the tapered region of the tapered optical fiber has smaller size, and can realize better coupling effect when being coupled with a monodisperse microsphere cavity with small size (5-100 μm).
S130, using the fiber cone and the monodisperse microsphere cavity to carry out electrostatic adsorption, and transferring the monodisperse microsphere cavity to the tapered fiber.
Wherein the electrostatic adsorption and transfer process can be performed under a microscope. The actual type and size of the monodisperse microsphere cavity can be selected according to the actual application scene of the coupling device, for example, the material is polystyrene, polymethyl methacrylate, alumina, silica and other microsphere cavities.
Specifically, the optical fiber taper is provided with the taper region, and the diameter of the taper region is smaller, so that the monodisperse microsphere cavity with smaller electrostatic adsorption volume can be transferred to the tapered optical fiber. Because of the structural characteristics of the monodisperse microsphere cavity, and the requirements of the optical microsphere cavity on the surface smoothness and sphericity of the microsphere are higher, if the existing large-volume optical microcavity is adopted, the coupling and packaging method of placing the optical microcavity and the optical fiber in the airtight shell is adopted, the monodisperse microsphere cavity directly contacts the shell to cause leakage of a coupling field, almost complete loss of light rays is caused, and the coupling device cannot be tested and used. And the operation precision and the actual specification of the optical fiber cone are limited only through electrostatic adsorption, compared with the traditional coupling and packaging method of the monodisperse microsphere cavity, the coupling and packaging method of the monodisperse microsphere cavity is only used in environments such as a laboratory and the like with constant temperature, constant humidity, vibration isolation, dust free and the like, the free optical coupling efficiency is low, the free optical coupling is unstable, and the technical scheme provided by the embodiment of the invention has higher realization degree and higher coupling quality.
And S140, coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber.
The coupling process can be realized under a microscope, and in the specific implementation, the coupling mode can be monitored by scanning frequency through a tunable laser.
Specifically, the monodisperse microsphere cavity is transferred to the tapered region of the tapered optical fiber, and due to the smaller diameter of the tapered region, higher quality coupling can be achieved by placing the monodisperse microsphere cavity close to the tapered region of the tapered optical fiber. And (3) moving an optical fiber cone of which one end is electrostatically adsorbed with the monodisperse microsphere cavity under a microscope, adjusting the relative position of the monodisperse microsphere cavity and the optical fiber in the cone region, and carrying out frequency sweep through a tunable laser to monitor the coupling mode of the monodisperse microsphere cavity. And further, the quality factor is monitored to obtain the coupling depth of the monodisperse microsphere cavity and the optical fiber, and when the quality factor reaches the coupling standard, the coupling is stopped.
S150, transferring the low-refractive-index glue to the tapered optical fiber and the monodisperse microsphere cavity, and packaging.
The refractive index of the low refractive index glue is smaller than that of the tapered optical fiber and the monodisperse microsphere cavity; the low refractive index glue is used for preventing light from leaking out. The number of times of transferring the glue with low refractive index and the size of the glue droplets can be set according to the actual packaging process, for example, the number of times of transferring the glue droplets can be two, and the droplet size can be adjusted according to the influence on the coupling mode of the monodisperse microsphere cavity and the optical fiber when the glue droplets are actually transferred, for example, the influence on the coupling evanescent field of the monodisperse microsphere cavity and the optical fiber.
Specifically, transferring the low-refractive-index glue to the tapered optical fiber and the monodisperse microsphere cavity, wrapping the monodisperse microsphere cavity, fixing the coupling, and transferring the low-refractive-index glue to the tapered optical fiber and the monodisperse microsphere cavity again after the glue is completely solidified, so as to wrap the whole optical fiber and the monodisperse microsphere cavity, and completing the packaging.
According to the technical scheme, the optical fiber taper and the monodisperse microsphere cavity are used for electrostatic adsorption, the monodisperse microsphere cavity is transferred to the tapered optical fiber, the monodisperse microsphere cavity is coupled with the tapered optical fiber, low-refractive-index glue is further coated on the surfaces of the monodisperse microsphere cavity and the tapered optical fiber step by step, packaging of the monodisperse microsphere cavity and the tapered optical fiber is achieved, the defects that the size is large, the reflection on ultrasonic signals is serious and the like due to the fact that the sealing shell is used for packaging are overcome in the existing packaging method of packaging the large-size optical microsphere cavity, the microsphere cavity and the optical fiber are packaged in the sealing shell, and the optical fiber and the optical microsphere cavity are fixed through the glue are overcome. And the existing coupling and packaging scheme of the package of the monodisperse microsphere cavity only exist in the environments of constant temperature, constant humidity, vibration isolation, dust free and the like in a laboratory and the like, and the free light coupling efficiency is low and the free light coupling is unstable. The packaging method provided by the embodiment of the invention has high stability and compactness, high quality factor, extremely high sensitivity and large bandwidth response to ultrasonic sensing, and great application advantages and development potential in the ultrasonic/photoacoustic detection and imaging and ultrasonic/photoacoustic endoscopic imaging directions, and the packaged optical microsphere cavity is isolated from the external environment.
Alternatively, fig. 2 is a flowchart of a method for manufacturing an optical fiber taper according to an embodiment of the present invention, and the method for manufacturing an optical fiber taper shown in fig. 2 may be used in step S110 shown in fig. 1. As shown in fig. 2, the method for preparing an optical fiber taper according to the embodiment of the present invention includes:
s111, selecting a standard optical fiber, and hanging a weight at one end of the standard optical fiber.
Wherein the standard optical fiber comprises a 125 μm optical fiber, and 125 μm is the fiber cladding diameter; the size of the weight may be selected according to the size of the optical fiber taper and the manufacturing environment.
Specifically, the diameter of the standard optical fiber is 125 mu m, the volume of the monodisperse microsphere cavity is 5 mu m-100 mu m, and a heavy object is hung at one end of the standard optical fiber, so that the optical fiber can be deformed under the action of gravity after being melted in the process of firing the optical fiber, and a cone region with smaller diameter is formed.
S112, firing under the power P1 by using a carbon dioxide laser.
The actual value of the power P1 can be set on the basis that the standard optical fiber can be fused and cannot be fused under the action of the weight according to the preparation environment, the actual specification of the optical fiber and the weight and the requirements on the length and the cone area diameter of the optical fiber cone, and the parameter range of the power P1 can be obtained through fitting according to the fusion temperature of the standard optical fiber, the functional conversion of the carbon dioxide laser and the deformation quantity of the standard optical fiber under the action of gravity in specific implementation.
Specifically, a carbon dioxide laser is used for melting a standard optical fiber under the power P1, so that the optical fiber deforms under the action of gravity, and the optical fiber is elongated to form a conical region with a smaller diameter.
S113, monitoring the taper region length of the standard optical fiber, and increasing the power of the carbon dioxide laser from P1 to P2 in the time t1 when the taper region length is greater than or equal to L1.
Wherein P2 is greater than P1; the taper length L1, time t1 and power P2 can be set according to the manufacturing environment, the actual specifications of the fiber and the weight, and the requirements for the taper size of the fiber. Increasing the power of the carbon dioxide laser from P1 to P2, including but not limited to a linear increase, may be adapted to adjust the power of the carbon dioxide laser according to the actual length of the cone at the time of implementation.
Specifically, the length of the cone region of the standard optical fiber is monitored, when the length of the cone region is greater than or equal to L1, the power of the carbon dioxide laser is increased from P1 to P2 in t1, and the length and the diameter of the cone region can be effectively controlled by slowly increasing the firing power in a certain time, so that the optical fiber cone is provided with the cone region with smaller diameter and controllable length, and further the electrostatic adsorption and transfer of the monodisperse microsphere cavity are better adapted.
And S114, monitoring the taper area length of the standard optical fiber, and when the taper area length is greater than or equal to L2, increasing the power of the carbon dioxide laser from P2 to P3 in the time t2, and fusing one end of the standard optical fiber suspended weight.
Wherein L1 is less than L2; p3 > P2 > P1; t2 < t1. The actual values of the power P3 and the length L2 may be set according to the actual requirements, and t2 may be selected to be a shorter time, for example, 0.1S.
Specifically, the cone area length of the standard optical fiber is monitored, when the cone area length is greater than or equal to L2, the power of the carbon dioxide laser is increased from P2 to P3 in t2, one end of the standard optical fiber hanging weight is fused, the firing power is increased in a short time, the optical fiber is fused under the action of gravity, and then the preparation of the optical fiber cone is completed.
In summary, the technical solution of the embodiment of the present invention provides a method for manufacturing an optical fiber cone capable of being used for transferring a monodisperse microsphere cavity, by controlling the power of a carbon dioxide laser and the firing time under each power, and further controlling the length and diameter of a cone region, the diameter of the cone region can be smaller, and the length of the cone region is controllable, which is more beneficial to transferring the monodisperse microsphere cavity and low refractive index glue. Compared with the traditional method for preparing the optical fiber cone by fusion tapering, the method can control the length of the cone region of the optical fiber cone, so that the cone region is as short as possible, and high toughness can be maintained. The traditional fusion tapering method can lead to overlong taper area of the optical fiber, so the optical fiber is too soft and extremely easy to be influenced by air disturbance, and subsequent operation of transferring the monodisperse microsphere cavity and coupling cannot be performed.
Optionally, fig. 3 is a flowchart of another method for encapsulating monodisperse microsphere cavity coupling according to an embodiment of the present invention, as shown in fig. 3, where the method includes:
s210, preparing an optical fiber cone.
S220, preparing the tapered optical fiber.
S230, dipping the low-refractive-index glue microdroplet by using the optical fiber cone.
Specifically, because the optical fiber cone is provided with the cone area with the smaller diameter, the optical fiber cone is used for dipping the glue microdrops with the low refractive index, so that a small amount of glue with the low refractive index can be dipped, and the size of the glue microdrops can be effectively controlled.
S240, adjusting the size of the glue droplet with the low refractive index.
Wherein, the droplet size can be adjusted under a microscope by scraping the excessive low refractive index glue by using an additional unused fiber cone.
Specifically, before the monodisperse microsphere cavity is transferred to the tapered optical fiber to form coupling, the low refractive index glue is transferred to the tapered region of the tapered optical fiber, so that the monodisperse microsphere cavity and the optical fiber are conveniently fixed, it can be understood that coupling is formed between the monodisperse microsphere cavity and the optical fiber through an evanescent field, if glue liquid drops are too large, the distance between the monodisperse microsphere cavity and the optical fiber is larger than the range of the evanescent field, the coupling effect is further affected, and the influence on the coupling effect is reduced by adjusting the liquid drops to a smaller size.
S250, transferring the low-refractive-index glue microdroplet with the diameter d1 to the taper region of the tapered optical fiber.
Wherein the diameter d1 is less than or equal to 5 mu m.
Specifically, the low refractive index glue with the diameter of d1 and d1 less than or equal to 5 mu m is transferred to the cone region of the tapered optical fiber, so that the coupling process of the monodisperse microsphere cavity and the optical fiber is more stable.
S260, using the fiber cone and the monodisperse microsphere cavity to carry out electrostatic adsorption, and transferring the monodisperse microsphere cavity to the tapered fiber.
S270, coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber.
S280, transferring the low-refractive-index glue to the tapered optical fiber and the monodisperse microsphere cavity, and packaging; the refractive index of the low refractive index glue is smaller than that of the tapered optical fiber and the monodisperse microsphere cavity.
In summary, according to the technical scheme of the embodiment of the present invention, on the basis of the above embodiment, before transferring the monodisperse microsphere cavity to the tapered optical fiber, transferring the low refractive index glue droplet to the tapered region of the tapered optical fiber, and adjusting the size of the glue droplet, so as to reduce the influence on the evanescent field coupling the monodisperse microsphere cavity and the optical fiber, and ensure the coupling quality while fixing the monodisperse microsphere cavity.
Optionally, fig. 4 is a flowchart of another method for encapsulating monodisperse microsphere cavity coupling according to an embodiment of the present invention, as shown in fig. 4, where the method includes:
s310, preparing an optical fiber cone.
S320, preparing the tapered optical fiber.
S330, using the fiber taper and the monodisperse microsphere cavity to carry out electrostatic adsorption, and transferring the monodisperse microsphere cavity to the tapered fiber.
And S340, coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber.
S350, dipping the low-refractive-index glue microdroplet by using an optical fiber cone.
S360, adjusting the size of the glue microdroplet with low refractive index.
S370, transferring the low refractive index glue microdroplet with the diameter d2 to the monodisperse microsphere cavity.
Wherein the diameter d2 is less than or equal to 20 mu m.
Specifically, after coupling the monodisperse microsphere cavity with the taper region of the tapered optical fiber, transferring the low refractive index glue microdroplet to the monodisperse microsphere cavity, and wrapping and fixing the monodisperse microsphere cavity, it can be understood that after coupling the monodisperse microsphere cavity and the optical fiber, transferring the glue microdroplet to the monodisperse microsphere cavity, and due to the influence of factors such as droplet flow and gravity, if the droplet is too large, the coupling can be destroyed, so that the coupling quality is reduced, and therefore, by adjusting the diameter of the glue droplet to d2, and d2 is less than or equal to 20 mu m, the damage and influence on the coupling can be reduced.
Optionally, after wrapping and fixing the monodisperse microsphere cavity, the optical fiber and the entire monodisperse microsphere cavity need to be wrapped, and the packaging is completed, with continued reference to fig. 4, after step S370, transferring the low refractive index glue microdroplet with a diameter d2 to the monodisperse microsphere cavity, the method further includes:
s381, dipping the low-refractive-index glue microdroplet by using an optical fiber cone.
S382, adjusting the size of the glue droplet with low refractive index.
S383, transferring the low-refractive-index glue microdroplet with the diameter d3 to a monodisperse microsphere cavity and a tapered optical fiber; wherein the diameter d3 is less than or equal to 30 mu m and less than or equal to 50 mu m.
Specifically, after the encapsulation and fixation of the monodisperse microsphere cavity are completed, the optical fiber and the coupling device of the monodisperse microsphere cavity need to be encapsulated, it can be understood that after the glue droplet transferred in step S370 is completely solidified, the glue droplet is transferred to the coupling device again, although the encapsulation and fixation of the microsphere cavity are completed, the contact area where the fixation is completed is still affected by the flowing glue droplet due to the small volume of the microsphere cavity and the small diameter of the tapered optical fiber, so that the glue droplet is adjusted to a proper size, the coupling quality is ensured while the encapsulation is completed, and the encapsulation of the coupling device is further completed by further encapsulation, so that the encapsulated optical microsphere cavity is isolated from the external environment.
In the technical solution of the above embodiment, only the coupling and packaging of the polystyrene microsphere cavity with the size of 30 μm and the cone region with the diameter of 1 μm-2 μm are exemplified. According to the application and preparation conditions of the coupling device, other sizes and types of monodisperse microsphere cavities and optical fibers are selected, and the coupling and packaging method provided by the embodiment of the invention is also applicable.
In summary, the technical solution of the embodiments of the present invention provides a method for gradually completing packaging of a coupling device based on the embodiments described above, where the glue packaging process is divided into a plurality of steps, and the size of glue droplets is strictly adjusted, so as to reduce the damage to coupling and ensure the coupling quality.
Optionally, the steps provided by the embodiment of the invention are as follows: coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber comprising:
moving the fiber taper out at a speed v1 in a direction perpendicular to the tapered fiber;
wherein the velocity v1 is less than or equal to 5 mu m/s.
Specifically, the monodisperse microsphere cavity is transferred to the cone region of the tapered optical fiber by using the optical fiber cone, and it can be understood that the electrostatic adsorption acting force is small, for example, the optical fiber cone is pulled out rapidly, the microsphere cavity is excessively stressed by the friction force of the optical fiber, so that the microsphere cavity falls off, the optical fiber cone is pulled out at a speed v1 along the direction perpendicular to the tapered optical fiber, the speed v1 is ensured to be less than or equal to 5 mu m/s under the action of a micro-control instrument and the observation of a microscope, the optical fiber cone can be pulled out completely, and the microsphere cavity is placed in the cone region and does not fall off, so that the coupling is completed.
Optionally, the steps provided by the embodiment of the invention are as follows: coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber further comprises: and (3) using a tunable laser to sweep frequency and monitoring the coupling mode of the monodisperse microsphere cavity and the tapered optical fiber.
The coupling mode comprises a quality factor, a coupling depth and the like, and the higher the quality factor is, the deeper the coupling degree is, the better the coupling effect is.
Specifically, in practical application of the microsphere cavity and the optical fiber coupling device, the light beam is transmitted to the coupling area along the optical fiber, and is diffused to the outer side of the optical fiber due to the smaller diameter of the conical area, enters the microsphere cavity under the action of the evanescent field, and resonates in the optical microsphere cavity, and the light beam which does not meet the resonance condition enters the optical fiber again. And the relative positions of the microsphere cavity and the optical fiber are adjusted while the frequency sweep is carried out through the tunable laser, the coupling mode is monitored, the coupling depth and the quality factor are obtained, and the coupling of the microsphere cavity and the optical fiber is completed.
Optionally, the steps provided by the embodiment of the invention are as follows: using electrostatic adsorption of the fiber taper and the monodisperse microsphere cavity, transferring the monodisperse microsphere cavity to the tapered fiber comprises: the monodisperse microsphere cavity solution is transferred to dust free paper or dust free cloth.
Specifically, the large monodisperse optical microsphere cavity is stored in deionized water, and before the single microsphere cavity is transferred by using the electrostatic adsorption of the optical fiber cone, a liquid shifter is needed to drop the microcavity solution on dust-free paper/cloth, so that the moisture on the surface of the microsphere cavity is quickly absorbed, and the subsequent electrostatic adsorption transfer is facilitated.
Optionally, after transferring the monodisperse microsphere cavity solution onto the dust free paper or dust free cloth, further comprising: and drying the dust-free paper or dust-free cloth by using a heating plate.
Specifically, in order to accelerate the drying of the surface moisture of the microsphere cavity, a heating plate is used for drying, and the temperature of the heating plate can be 40-60 ℃, so that the process is accelerated.
Optionally, after transferring the low refractive index glue to the tapered optical fiber and the monodisperse microsphere cavity, and packaging, the method further comprises:
and sleeving the tail part of the tapered optical fiber into a glass sleeve, and filling low-refractive-index glue in the glass sleeve.
Specifically, when the tapered optical fiber is a bent U-shaped tapered optical fiber, the tail part of the tapered optical fiber can be sleeved into the glass sleeve, and the glass sleeve is filled with low-refractive-index glue, so that the isolation of the coupling device and the external environment is ensured. It should be noted that the optical microsphere cavity is at least partially exposed to the exterior of the glass sleeve to ensure an effective response to ultrasonic sensing.
Optionally, the tapered optical fiber provided by the embodiment of the invention includes a bent U-shaped tapered optical fiber or a straight tapered optical fiber.
In another embodiment, the encapsulation process of monodisperse microsphere cavity coupling comprises the steps of:
first, an optical fiber taper is prepared. Fig. 5 is a diagram of a manufacturing process of an optical fiber taper according to an embodiment of the present invention, and as shown in fig. 5, a device required for manufacturing an optical fiber taper includes: a standard optical fiber 10, a weight 20 and a carbon dioxide laser 30, wherein the standard optical fiber is a 125 μm optical fiber.
As shown in fig. 5a, the weight 20 is first hung on one end of the standard optical fiber 10 so that the standard optical fiber 10 is straightened in the vertical direction by gravity. With continued reference to fig. 5b, the standard optical fiber 20 is fired using a carbon dioxide laser 30. In the firing process, the power of the carbon dioxide laser 30 is controlled to be P1, the standard optical fiber 10 is fired, the standard optical fiber 10 is heated and melted, and is stretched in the vertical direction under the action of the weight 20 to form the cone region 11, the length of the cone region 11 is monitored in the firing process, and when the length of the cone region 11 is greater than or equal to L1, the power of the carbon dioxide laser 30 is slowly increased to P2 within a certain time t1, so that the cone region 11 is gradually stretched under the firing action, and therefore a finer cone region is obtained. With continued reference to fig. 5c, the length of the cone region 11 is continuously monitored, when the length of the cone region 11 is greater than or equal to L2, and at this time, the length of the cone region 11 reaches the manufacturing standard of the optical fiber cone, and in a short time t2, the power of the carbon dioxide laser 30 is increased to P3, and the lower end of the hanging weight 20 is fused with the higher power, so as to obtain the optical fiber cone 40 as shown in fig. 5 d.
And secondly, preparing the tapered optical fiber. Fig. 6 is a schematic diagram of an apparatus for preparing a U-shaped tapered optical fiber according to an embodiment of the present invention, where the apparatus includes: the optical fiber rack 50 and the optical fiber rack pressing pieces 51 arranged at two ends of the optical fiber rack 50, a hydrogen flame (not shown in fig. 6), a one-dimensional electric translation table (not shown in fig. 6) and a slide way 60, a small clamping tool 70, and the optical fiber rack 50 is connected with the one-dimensional electric translation table.
In a specific implementation, two ends of the optical fiber 80 with the cladding removed from the middle part are respectively fixed on the optical fiber holder pressing sheets 51 to form a state that the two ends are clamped and suspended in the middle, the hydrogen flame is further used for heating the part of the optical fiber with the cladding removed from the middle, meanwhile, the optical fiber holder 50 is controlled to move along the slideway 60 towards the direction away from the middle part of the optical fiber through the one-dimensional electric translation table, a tapering area is formed in the middle part of the optical fiber under the conditions that the hydrogen flame is fired and melted and the electric translation table is stretched, when the diameter of the optical fiber in the tapering area reaches 1-2 mu m, namely, the size of a single-mode optical fiber, the electric translation table is controlled to stop moving, and the hydrogen flame is closed, at the moment, if the tapering optical fiber which is required to be coupled with the monodisperse microsphere cavity is a straight tapering optical fiber, the optical fiber can be taken down, and the microsphere cavity transfer operation is carried out in the next step.
If the tapered optical fiber to be coupled with the monodisperse microsphere cavity is a bent U-shaped tapered optical fiber, the optical fiber holder plate 51 at one end is further controlled to move along the slideway 60 for a certain distance towards the middle direction of the optical fiber, so that the middle of the optical fiber is bent to form a U-shaped region, and the moving distance can be adjusted according to the total length of the optical fiber and the length of the tapered region. One end of the tapered optical fiber is clamped using a small clamping tool and the optical fiber holder preform 51 of the same end is opened. The small-sized clamping tool 70 is rotated to bend and fold the optical fiber to overlap, completing the preparation of the U-shaped tapered optical fiber 90 as shown in fig. 7. And then the U-shaped tapered optical fiber 90 is taken down to be connected with the operation support rod, so that the coupling with the monodisperse microsphere cavity is further completed.
And thirdly, obtaining a single dry microsphere cavity from the monodisperse microsphere cavity solution. FIG. 8 is a schematic diagram illustrating cavity transfer of monodisperse microspheres according to an embodiment of the invention. As shown in fig. 8a, the monodisperse microsphere cavity solution is transferred onto the dust free paper/dust free cloth 100, and the dust free paper/dust free cloth 100 is dried by the heating plate 110, and then electrostatic adsorption is generated between the surface-dried monodisperse microsphere cavity 120 and the optical fiber taper 40 as shown in fig. 8b, and the single monodisperse microsphere cavity 120 is transferred by the optical fiber taper 40.
And fourthly, transferring the monodisperse microsphere cavity to a cone region of the tapered optical fiber to finish packaging. Fig. 9 is a schematic diagram of a process for coupling and packaging a monodisperse microsphere cavity and an optical fiber according to an embodiment of the present invention. As shown in fig. 9a, the taper 40 is used to dip the low refractive index glue to form a droplet of low refractive index glue, and the low refractive index glue is transferred to the upper end 91 of the U-shaped tapered optical fiber 90, so that the tapered bent optical fiber is firmer. Further as shown in fig. 9b, on the basis that the glue transferred in fig. 9a is completely solidified, the clean optical fiber taper 40 is used to transfer the glue droplets to the taper area 92 of the U-shaped tapered optical fiber, it can be understood that the too large droplets can make the distance between the microsphere cavity and the optical fiber larger than the range of the evanescent field, so as to affect the coupling quality, therefore, the size of the glue droplets is adjusted, generally, the diameter of the glue droplets does not exceed 5 μm, and the glue droplets can be transferred by using a spot coating mode, so that the coupling quality is ensured while the coupling is stable.
Further, as shown in fig. 9c, the monodisperse microsphere cavity 120 is electrostatically adsorbed by the fiber taper 40, and is transferred to the taper region 92 of the U-shaped tapered fiber, and the coupling mode thereof, including quality factor and coupling depth, can be monitored by sweeping the frequency with a tunable laser (not shown in fig. 9), wherein the higher the quality factor, the deeper the coupling degree, and the better the coupling effect. The position of the monodisperse microsphere cavity is adjusted in real time by utilizing the optical fiber cone according to the condition of the coupling effect, so that the coupling effect is optimized, the step can realize micro operation through a precise displacement table under a microscope, when the coupling standard is reached, the adjustment of the relative position of the monodisperse microsphere cavity and the optical fiber is stopped, the optical fiber cone is slowly pulled out along the direction perpendicular to the coupled optical fiber (the speed is controlled to be less than or equal to 5 microns/second), otherwise, the force is too large, so that the monodisperse microsphere cavity is easy to fall off in the process.
Further, after the transfer glue in fig. 9b is completely solidified after the coupling is completed, a droplet of the low refractive index glue is dipped again by using the dried optical fiber taper 40, as shown in fig. 9d, a larger droplet of the low refractive index glue is transferred to wrap and re-reinforce the whole monodisperse microsphere cavity 120, and the size of the transferred droplet of the low refractive index glue is not more than 20 μm because the last package is not firm, otherwise, the coupling is damaged because of the oversized droplet.
Further, after the low refractive index glue transferred in fig. 9d is completely solidified, as shown in fig. 9e, a clean optical fiber taper 40 is used again to transfer a larger drop (30-50 μm) of the low refractive index glue, and the whole monodisperse microsphere cavity 120 and the whole U-shaped optical fiber 90 are packaged from the side to complete the complete package, thereby obtaining a device for coupling the monodisperse microsphere cavity and the optical fiber.
The fourth step is to transfer the monodisperse microsphere cavity to the taper region of the tapered optical fiber to complete the encapsulation, and only the coupling encapsulation of the monodisperse microsphere cavity and the bent U-shaped tapered optical fiber is illustrated, so that the coupling scheme of the monodisperse microsphere cavity and the straight tapered optical fiber can adapt to the adjustment of the glue transfer position, transfer sequence and droplet size on the basis of the encapsulation completed by the gradual glue transfer provided by the above embodiment.
Optionally, after the complete encapsulation of the monodisperse microsphere cavity and the optical fiber provided in the foregoing embodiment is completed, in order to maintain the high stability of the whole monodisperse optical microsphere cavity, the present invention further provides a monodisperse microsphere cavity coupling device, and fig. 10 is a schematic structural diagram of a monodisperse microsphere cavity coupling device provided in the embodiment of the present invention, as shown in fig. 10, on the basis of the coupling device shown in fig. 9e, the tail portion of the U-shaped optical fiber is further sleeved into the glass tube sleeve 130 for further fixing, and the tube sleeve is filled with low refractive index glue. It should be noted that the optical microsphere cavity is at least partially exposed to the exterior of the glass sleeve 130 to ensure an effective response to ultrasonic sensing.
Based on the same conception, the embodiment of the invention also provides a device for coupling the monodisperse microsphere cavity, which comprises the monodisperse microsphere cavity and the tapered optical fiber. The monodisperse microsphere cavity coupled device can be prepared by the encapsulation method for monodisperse microsphere cavity coupling provided in the above embodiment, and the preparation process of the monodisperse microsphere cavity coupled device is not described herein.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present invention may be performed in parallel, sequentially, or in a different order, so long as the desired results of the technical solution of the present invention are achieved, and the present invention is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (11)
1. The encapsulation method of monodisperse microsphere cavity coupling is characterized by comprising the following steps:
preparing an optical fiber cone;
preparing tapered optical fibers;
using the optical fiber cone and the monodisperse microsphere cavity to carry out electrostatic adsorption, and transferring the monodisperse microsphere cavity to the tapered optical fiber;
coupling the monodisperse microsphere cavity with a tapered region of the tapered optical fiber;
transferring low refractive index glue to the tapered optical fiber and the monodisperse microsphere cavity, and packaging;
the refractive index of the low refractive index glue is smaller than the refractive indexes of the tapered optical fiber and the monodisperse microsphere cavity;
wherein, the preparation optical fiber taper includes:
selecting a standard optical fiber, and hanging a weight at one end of the standard optical fiber;
firing at power P1 using a carbon dioxide laser;
monitoring the taper region length of the standard optical fiber, and increasing the power of the carbon dioxide laser from P1 to P2 in t1 time when the taper region length is greater than or equal to L1;
monitoring the cone length of the standard optical fiber, and when the cone length is greater than or equal to L2, increasing the power of the carbon dioxide laser from P2 to P3 in t2 time to fuse one end of the suspended weight of the standard optical fiber;
wherein L1 is less than L2; p3 > P2 > P1; t2 is less than t1;
wherein, power increases to P2 for slowly increasing from P1, and control t1 time period internal cone district diameter and length slowly increase, and power increases to P3 for quick increase from P2, and optic fibre hangs heavy object one end quick-time fusing, and control t2 time period internal cone district diameter and length are unchangeable for the optic fibre awl possesses high toughness, can anti air disturbance at the in-process that shifts monodisperse microballon chamber.
2. The method of packaging monodisperse microsphere cavity coupling according to claim 1, comprising, prior to said electrostatically attaching said monodisperse microsphere cavity to said tapered optical fiber using said optical fiber taper,:
dipping the low-refractive-index glue microdroplet by using the optical fiber cone;
adjusting the size of the low refractive index glue droplets;
transferring the low refractive index glue microdroplet with the diameter d1 to a taper region of the tapered optical fiber;
wherein d1 is less than or equal to 5 mu m.
3. The method of claim 1, wherein transferring the low refractive index glue to the tapered optical fiber and the monodisperse microsphere cavity for encapsulation comprises:
dipping the low-refractive-index glue microdroplet by using the optical fiber cone;
adjusting the size of the low refractive index glue droplets;
transferring low refractive index glue droplets with a diameter d2 to the monodisperse microsphere cavity;
wherein d2 is less than or equal to 20 mu m.
4. The method of encapsulating monodisperse microsphere cavity coupling according to claim 3, further comprising, after said transferring said low refractive index glue microdroplet of diameter d2 to said monodisperse microsphere cavity:
dipping the low-refractive-index glue microdroplet by using the optical fiber cone;
adjusting the size of the low refractive index glue droplets;
transferring the low refractive index glue microdroplet with the diameter d3 to the monodisperse microsphere cavity and the tapered optical fiber;
wherein d3 is more than or equal to 30 mu m and less than or equal to 50 mu m.
5. The method of packaging monodisperse microsphere cavity coupling according to claim 1, wherein said coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber comprises:
moving the fiber taper at a speed v1 in a direction perpendicular to the tapered fiber;
wherein v1 is less than or equal to 5 mu m/s.
6. The method of packaging monodisperse microsphere cavity coupling according to claim 5, wherein said coupling the monodisperse microsphere cavity with the tapered region of the tapered optical fiber further comprises:
and (3) scanning by using a tunable laser, and monitoring the coupling mode of the monodisperse microsphere cavity and the tapered optical fiber.
7. The method of packaging monodisperse microsphere cavity coupling according to claim 1, wherein before said using said fiber taper to electrostatically adsorb said monodisperse microsphere cavity, transferring said monodisperse microsphere cavity to said tapered fiber comprises:
the monodisperse microsphere cavity solution is transferred to dust free paper or dust free cloth.
8. The method of encapsulating monodisperse microsphere cavity coupling according to claim 7, further comprising, after transferring the monodisperse microsphere cavity solution onto a dust free paper or dust free cloth:
and drying the dust-free paper or dust-free cloth by using a heating plate.
9. The method of packaging monodisperse microsphere cavity coupling according to claim 1, further comprising, after said transferring low refractive index glue to said tapered optical fiber and said monodisperse microsphere cavity, and further packaging:
and sleeving the tail part of the tapered optical fiber into a glass sleeve, and filling the low-refractive-index glue into the glass sleeve.
10. The method of packaging monodisperse microsphere cavity coupling according to claim 1, wherein the tapered fiber comprises a bent U-shaped tapered fiber or a straight tapered fiber.
11. The device for coupling the monodisperse microsphere cavity is characterized by comprising the monodisperse microsphere cavity and a tapered optical fiber; the monodisperse microsphere cavity coupled device is prepared by the encapsulation method of monodisperse microsphere cavity coupling according to any one of claims 1-10.
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| CN103311788A (en) * | 2013-06-28 | 2013-09-18 | 厦门大学 | Preparation method of bottle-type optical micro resonant cavity |
| CN207036130U (en) * | 2017-05-11 | 2018-02-23 | 复旦大学 | The encapsulation type light miniflow microcavity biochemical sensor of radial direction higher order mode can be retained |
| CN109031520A (en) * | 2018-08-03 | 2018-12-18 | 广州米德红外科技有限公司 | A kind of sulphur system microballoon on piece coupling device of high stability |
| CN109141489A (en) * | 2018-08-06 | 2019-01-04 | 上海大学 | Echo wall die micro chamber device and its manufacturing method are coupled based on probe-type hollow-core fiber |
| CN109855760A (en) * | 2019-02-15 | 2019-06-07 | 哈尔滨工程大学 | A kind of Whispering-gallery-mode resonant cavity temperature sensor and preparation method |
| CN115031874A (en) * | 2022-06-20 | 2022-09-09 | 中北大学 | Pressure sensor based on UV (ultraviolet) adhesive microsphere resonant cavity and preparation method thereof |
| CN115421343A (en) * | 2022-08-17 | 2022-12-02 | 北京大学长三角光电科学研究院 | Optical micro-disk cavity packaging structure and packaging method, electronic equipment and storage medium |
| CN115468944A (en) * | 2022-09-05 | 2022-12-13 | 暨南大学 | Monomolecular Raman fiber optical tweezers based on core-shell microlens and manufacturing method thereof |
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