CN116473507A - Eye movement tracking structure - Google Patents
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- CN116473507A CN116473507A CN202310737627.4A CN202310737627A CN116473507A CN 116473507 A CN116473507 A CN 116473507A CN 202310737627 A CN202310737627 A CN 202310737627A CN 116473507 A CN116473507 A CN 116473507A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/113—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for determining or recording eye movement
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Abstract
The present disclosure relates to an eye movement tracking structure, which belongs to the technical field of eye movement tracking, and comprises: an inductive backplate including an inductive region; the infrared emitter and the infrared receiver are arranged on the same side of the induction backboard, and the infrared receiver is arranged corresponding to the induction area; the infrared emitter is used for emitting infrared detection signals to the eyes to be tracked; the infrared receiver is used for receiving an infrared echo signal formed by reflecting an infrared detection signal by the eye to be tracked and transmitting the infrared echo signal to the corresponding sensing area; the induction area induces the infrared echo signals to generate electric signals so as to realize eye movement tracking. Therefore, by arranging the infrared emitter and the infrared receiver on the same induction backboard, the whole volume is reduced, and the whole integration and the light weight of the equipment are facilitated.
Description
Technical Field
The present disclosure relates to the field of eye tracking technologies, and in particular, to an eye tracking structure.
Background
Currently, in existing AR or VR devices, the eye tracking device is generally a discrete device, i.e., an infrared emitting device is disposed at a certain position, and an infrared receiving device is disposed at another position, which is equivalent to the need of two devices to track the eye movement process of a single eye, and after further forming a modularized packaged product, the overall volume is larger, which is not beneficial to the integration and weight reduction of the whole device.
Disclosure of Invention
To solve or at least partially solve the above technical problems, the present disclosure provides an eye tracking structure.
The present disclosure provides an eye-tracking structure comprising:
an inductive backplate including an inductive region;
the infrared emitter and the infrared receiver are arranged on the same side of the induction backboard, and the infrared receiver is arranged corresponding to the induction area;
the infrared emitter is used for emitting infrared detection signals to eyes to be tracked; the infrared receiver is used for receiving an infrared echo signal formed by the infrared detection signal reflected by the eye to be tracked and transmitting the infrared echo signal to the corresponding sensing area; the induction area induces the infrared echo signals to generate electric signals so as to realize eye movement tracking.
Optionally, the infrared emitter comprises: an infrared emission component, a channel transmission component and a collimating micro lens;
the infrared emission component is positioned on one side of the induction backboard; the channel transmission assembly is positioned at one side of the infrared emission assembly, which is away from the induction backboard; the collimating micro lens is positioned on the light-emitting surface of the channel transmission assembly;
the infrared emission component is used for emitting an infrared detection signal to the channel transmission component; the collimating micro lens is used for collimating the infrared detection signals transmitted by the channel transmission assembly.
Optionally, the infrared emission assembly includes: the device comprises a resonant cavity, a multiple quantum well layer, a first type reflecting layer and a reflecting filling layer; the resonant cavity comprises a first surface and a second surface which are opposite to each other, and a joint surface for joining the first surface and the second surface, wherein the first surface corresponds to the light-emitting surface of the resonant cavity;
the multiple quantum well layer is arranged in the resonant cavity; the first type reflecting layer covers the second surface and the joint surface of the resonant cavity and covers part of the first surface of the resonant cavity; the reflection filling layer is arranged on a first surface of the resonant cavity which is not covered by the first type reflection layer;
the multi-quantum well layer is used for emitting infrared detection signals based on voltage control of the induction backboard; the resonant cavity is used for enhancing infrared detection signals emitted by the multiple quantum well layers based on internal oscillation; the first type reflecting layer is used for reflecting infrared detection signals in the resonant cavity; the reflection filling layer is used for enabling infrared detection signals reflected in the resonant cavity to be emitted to the channel transmission assembly through the reflection filling layer.
Optionally, the channel transmission assembly includes: a first metal polarization grating and a first transparent transmission channel;
the first metal polarization grating is arranged on the surface of one side of the reflection filling layer, which is away from the resonant cavity, and is embedded in the first transparent transmission channel;
the first metal polarization grating is used for forming polarization for infrared detection signals emitted by the reflection filling layer; the first transparent transmission channel is used for transmitting infrared detection signals polarized by the first metal polarization grating;
the length of the first metal polarization grating is greater than or equal to the length of the reflection filling layer along the direction perpendicular to one side of the light emitting surface of the resonant cavity.
Optionally, the infrared receiver includes: the optical filter assembly, the second transparent transmission channel and the converging micro lens;
the second transparent transmission channel is arranged on one side of the induction backboard; the optical filtering component is arranged on one side, away from the induction backboard, of the second transparent transmission channel; the converging micro lens is arranged on the light receiving surface of the light filtering component;
the converging micro lens is used for converging the infrared echo signals to the induction backboard; the optical filtering component is at least used for carrying out wavelength selection and polarization on the infrared echo signals converged by the converging micro lenses; the second transparent transmission channel is used for transmitting the infrared detection signals passing through the optical filtering assembly to the induction backboard.
Optionally, the filtering assembly includes: the third transparent transmission channel, the light deflection layer, the filter layer and the second metal polarization grating;
the second metal polarization grating is arranged on the surface of one side, away from the induction backboard, of the second transparent transmission channel; the filter layer and the light deflection layer are sequentially arranged at intervals on one side of the second metal polarization grating, which is away from the second transparent transmission channel; the light deflection layer, the light filtering layer and the second metal polarization grating are embedded in the third transparent transmission channel;
the light deflection layer is used for deflecting the infrared echo signals converged by the converging micro lenses by a preset angle; the filter layer is at least used for passing the infrared echo signals; the second metal polarization grating is used for forming polarization on the infrared echo signals passing through the filter layer.
Optionally, the sensing area and the second transparent transmission channel are aligned one by one;
the sensing area is used for receiving and processing the infrared echo signals converged by the converging micro lenses to the sensing backboard.
Optionally, the total length of the third transparent transmission channel and the second transparent transmission channel is equal to the focal length of the converging microlens.
Optionally, the eye movement tracking structure further comprises: a black matrix and a second type reflective layer; the second type reflecting layer comprises a first reflecting surface and a second reflecting surface which are arranged opposite to each other;
the black matrix is spaced between the first transparent transmission channel and the third transparent transmission channel; the second type reflecting layer is arranged between the first type reflecting layer and the second transparent transmission channel and coats the second transparent transmission channel and part of the sensing area;
the black matrix is used for absorbing interference signals; the first reflecting surface faces the second transparent transmission channel and is used for reflecting the infrared echo signals passing through the first reflecting surface; the second reflecting surface faces the first type reflecting layer and is used for reflecting the infrared detection signals passing through the second reflecting surface.
Optionally, the sensing backboard further comprises an array-arranged pixel area;
each pixel area is internally provided with a corresponding infrared emitter and a corresponding infrared receiver; the arrangement directions of the infrared emitters and the metal polarization gratings corresponding to the infrared receivers in each pixel area are the same; the arrangement directions of the metal polarization gratings corresponding to the adjacent pixel areas are mutually perpendicular so as to isolate the crosstalk of infrared detection signals and infrared echo signals of the adjacent pixel areas.
Compared with the prior art, the technical scheme provided by the embodiment of the disclosure has the following advantages:
an eye-tracking structure provided by an embodiment of the present disclosure includes: an inductive backplate including an inductive region; the infrared emitter and the infrared receiver are arranged on the same side of the induction backboard, and the infrared receiver is arranged corresponding to the induction area; the infrared emitter is used for emitting infrared detection signals to the eyes to be tracked; the infrared receiver is used for receiving an infrared echo signal formed by reflecting an infrared detection signal by the eye to be tracked and transmitting the infrared echo signal to the corresponding sensing area; the induction area induces the infrared echo signals to generate electric signals so as to realize eye movement tracking. Therefore, by arranging the infrared emitter and the infrared receiver on the same induction backboard, the whole volume is reduced, and the whole integration and the light weight of the equipment are facilitated.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure.
In order to more clearly illustrate the embodiments of the present disclosure or the solutions in the prior art, the drawings that are required for the description of the embodiments or the prior art will be briefly described below, and it will be obvious to those skilled in the art that other drawings can be obtained from these drawings without inventive effort.
Fig. 1 is a schematic structural diagram of an eye tracking structure according to an embodiment of the disclosure;
FIG. 2 is a schematic diagram of another eye tracking structure according to an embodiment of the present disclosure;
FIG. 3 is a schematic view of another eye tracking structure according to an embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of still another eye tracking structure according to an embodiment of the present disclosure.
110, sensing a backboard; 111. an induction zone; 120. an infrared emitter; 130. an infrared receiving body; 121. an infrared emission component; 122. a channel transfer assembly; 123. a collimating microlens; 1211. a resonant cavity; 1212. a multiple quantum well layer; 1213. a first type reflective layer; 1214. a reflective filler layer; 1221. a first metal polarization grating; 1222. a first transparent transmission channel; 131. a light filtering component; 132. a second transparent transmission channel; 133. converging microlenses; 1311. a third transparent transmission channel; 1312. a light deflection layer; 1313. a filter layer; 1314. a second metal polarization grating; 140. a black matrix; 150. a second type reflective layer.
Detailed Description
In order that the above objects, features and advantages of the present disclosure may be more clearly understood, a further description of aspects of the present disclosure will be provided below. It should be noted that, without conflict, the embodiments of the present disclosure and features in the embodiments may be combined with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure, but the present disclosure may be practiced otherwise than as described herein; it will be apparent that the embodiments in the specification are only some, but not all, embodiments of the disclosure.
An eye tracking structure provided by embodiments of the present disclosure is described below with reference to the accompanying drawings.
Illustratively, in some embodiments, fig. 1 is a schematic structural diagram of an eye tracking structure provided by an embodiment of the present disclosure. Referring to fig. 1, the eye tracking structure includes: a sensing backplate 110 including a sensing region 111; the infrared emitter 120 and the infrared receiver 130 are disposed on the same side of the sensing back plate 110, and the infrared receiver 130 is disposed corresponding to the sensing area 111; wherein, the infrared emitter 120 is used for emitting infrared detection signals to the eye to be tracked; the infrared receiver 130 is configured to receive an infrared echo signal formed by reflecting an infrared detection signal by an eye to be tracked, and transmit the infrared echo signal to the corresponding sensing region 111; the sensing area 111 senses the infrared echo signal to generate an electrical signal for eye tracking.
For example, taking the orientation and structure shown in fig. 1 as an example, in the preset area of the sensing back plate 110, the infrared emitter 120 and the infrared receiver 130 may be disposed above the sensing back plate 110, and since the reflection range formed by the eye to be tracked after receiving the infrared detection signal is generally concentrated near the infrared emitter 120, the infrared receivers 130 may be disposed at two opposite sides of the infrared emitter 120, so that the infrared echo signal formed by the eye to be tracked after reflecting the infrared detection signal is received by the infrared receivers 130 at two sides of the infrared emitter 120, and in other embodiments, the number and positions of the infrared emitters 120 and the infrared receivers 130 may be set according to the application requirement of eye tracking, which is not limited herein.
The sensing backplate 110 is a backplate for providing a sensing sensor and related internal circuits, and the infrared echo signals are sensed and processed through the internal sensing area 111 to implement eye tracking, for example, the sensing backplate 110 may be a Complementary Metal Oxide Semiconductor (CMOS) backplate or other type of backplate for capturing electrons, which is not limited herein. Illustratively, the sensing areas 111 in the sensing back plate 110 may be aligned with the infrared receiving bodies 130 above the sensing back plate, so that the infrared echo signals are received by the infrared receiving bodies 130 and further transmitted to the corresponding sensing areas 111 below the infrared receiving bodies 130, which is beneficial to the eye tracking structure to process the infrared echo signals correspondingly in time, thereby improving the sensing and processing speed, and regarding the specific arrangement position and working process of the sensing areas 111 are exemplified below.
It is to be understood that the infrared detection signal sent by the infrared emitter 120 is infrared light, and correspondingly, the infrared echo signal received by the infrared receiver 130 is infrared light reflected by the eye to be tracked, so that the sensing area 111 senses the infrared light transmitted by the infrared receiver 130, and performs operation processing on the infrared light after generating a corresponding electric signal, thereby finally obtaining the eye movement condition of the eye to be tracked and realizing eye movement tracking.
An eye-tracking structure provided by an embodiment of the present disclosure includes: a sensing backplate 110 including a sensing region 111; the infrared emitter 120 and the infrared receiver 130 are disposed on the same side of the sensing back plate 110, and the infrared receiver 130 is disposed corresponding to the sensing area 111; wherein, the infrared emitter 120 is used for emitting infrared detection signals to the eye to be tracked; the infrared receiver 130 is configured to receive an infrared echo signal formed by reflecting an infrared detection signal by an eye to be tracked, and transmit the infrared echo signal to the corresponding sensing region 111; the sensing area 111 senses the infrared echo signal to generate an electrical signal for eye tracking. Thus, by arranging the infrared emitter and the infrared receiver on the same induction backboard 110, the whole volume is reduced, and the whole integration and the light weight of the equipment are facilitated.
In some embodiments, fig. 2 is a schematic structural diagram of another eye tracking structure according to an embodiment of the disclosure. Referring to fig. 2 on the basis of fig. 1, the infrared emitter 120 includes: an infrared emission component 121, a channel transmission component 122, and a collimating microlens 123; the infrared emission component 121 is positioned at one side of the induction back plate 110; the channel transmission assembly 122 is positioned at one side of the infrared emission assembly 121 away from the induction back plate 110; the collimating micro lens 123 is located on the light-emitting surface of the channel transmission assembly 122; the infrared emission component 121 is configured to emit an infrared detection signal to the channel transmission component 122; the collimating microlens 123 is used for collimating the infrared detection signal transmitted by the channel transmission assembly 122.
Illustratively, taking the orientation and structure shown in fig. 2 as an example, the infrared emission component 121 is disposed above the sensing back plate 110, and the channel transmission component 122 and the collimating micro lens 123 are sequentially disposed above the infrared emission component 121 along the light emitting direction of the infrared detection signal emitted by the infrared emission component 121. For example, a wafer-to-wafer hybrid bonding (W2W hybrid bonding) approach may be used to bond the inductive backplate and the infrared emitting component, ensuring good interconnection density.
It should be noted that, the eye tracking structure and the optical waveguide provided in the embodiments of the present disclosure are connected in a matching manner, so that the infrared detection signal is led into the eye to be tracked by using the optical waveguide. Specifically, after the infrared detection signal sent by the infrared emission component 121 is transmitted by the channel transmission component 122, the infrared detection signal is collimated by the collimating micro lens 123 located on the light emitting surface of the channel transmission component 122, so that the infrared detection signal, that is, infrared light can form parallel infrared light, and is emitted from the collimating micro lens 123, and then the optical waveguide receives the parallel infrared light and guides the parallel infrared light to the eye to be tracked, so that a subsequent infrared echo signal is formed.
In some embodiments, with continued reference to fig. 2, infrared emission assembly 121 includes: a resonant cavity 1211, a multiple quantum well layer 1212, a first type reflective layer 1213, and a reflective fill layer 1214; the resonant cavity 1211 includes a first surface and a second surface opposite to each other, and a joining surface joining the first surface and the second surface, the first surface corresponding to the light-emitting surface of the resonant cavity 1211; the multiple quantum well layer 1212 is disposed within the resonant cavity 1211; the first type reflective layer 1213 encapsulates the second surface and the junction of the resonant cavity 1211, and encapsulates a portion of the first surface of the resonant cavity 1211; the reflection filling layer 1214 is disposed on a first surface of the resonant cavity 1211 not covered by the first type reflection layer 1213; the multiple quantum well layer 1212 is configured to emit an infrared detection signal based on voltage control of the sensing backplate 110; the resonant cavity 1211 is used for enhancing an infrared detection signal emitted by the multi-quantum well layer 1212 based on internal oscillation; the first type reflective layer 1213 is used to reflect the infrared detection signal within the resonant cavity 1211; the reflective filling layer 1214 is used to enable the infrared detection signal reflected in the resonant cavity 1211 to exit from the reflective filling layer 1214 to the channel transmission component 122.
Illustratively, taking the orientation and structure shown in fig. 2 as an example, the multiple quantum well layer 1212 is located below the inside of the resonant cavity 1211, the surface above the resonant cavity 1211 is the first surface, the surface below is the second surface, and correspondingly, the corresponding surfaces on the left and right sides of the resonant cavity 1211 are the joint surfaces, for this purpose, the first type reflective layer 1213 covers the surface below the resonant cavity 1211 and the surfaces on the left and right sides, and covers part of the surface above the resonant cavity 1211, and the specific position of the multiple quantum well layer 1212 and the area of the first type reflective layer 1213 covering the first surface can be set according to the emission requirement of the infrared emission component 121, which is not limited herein.
Specifically, under the voltage control of the sensing backplate 110, electrons and holes in the multiple quantum well layer 1212 emit infrared light based on the stimulated radiation formed by recombination, and since the first type reflecting layer 1213 is disposed around the resonant cavity 1211, the infrared light emitted by the multiple quantum well layer 1212 is continuously reflected in the resonant cavity 1211, so that continuous oscillation of the stimulated radiation can be formed in the resonant cavity 1211, so as to enhance the infrared light emitted by the multiple quantum well layer 1212, and then the enhanced infrared light is emitted to the channel transmission assembly 122 by the reflection filling layer 1214, so that the channel transmission assembly 122 and the collimating micro lens 123 perform subsequent actions thereon. Illustratively, the fabrication materials of the multiple quantum well layer 1212 may include quantum dots or other materials, which are not limited herein.
In combination with the above operation process of the infrared emission component 121, the first type reflective layer 1213 covering the joint surface of the resonant cavity 1211 is used for reflecting the infrared light beside the resonant cavity 1211, and the first type reflective layer 1213 covering the second surface of the resonant cavity 1211 is used for reflecting the infrared light under the resonant cavity 1211, so as to improve the utilization rate of the infrared light, and meanwhile, provide an insulation effect for the infrared emission component 121, so that the infrared emission component 121 and the infrared receiver 130 are prevented from being contacted to generate optical crosstalk.
Further, the first type reflective layer 1213 and the reflective filler layer 1214 above the resonator 1211 are commonly used to restrict the exit angle and direction of infrared light oscillated inside the resonator 1211, specifically as follows: the use of the first type reflective layer 1213 over the resonant cavity 1211 allows the infrared light to be totally reflected, allowing the infrared light within the resonant cavity 1211 to be continually reflected and oscillated to enhance, ultimately exiting the infrared light to the channel transmission assembly 122 through the reflective fill layer 1214 through which the infrared light is able to pass.
Illustratively, the first type of reflective layer 1213 surrounding the second surface and the junction of the resonant cavity 1211 may be a distributed Bragg reflector (distributed Bragg reflection, DBR); the first type reflective layer 1213 covering a portion of the first surface of the resonator 1211 may be composed of a material capable of forming total reflection; the reflective fill layer 1214 may be made of silicon monoxide (SiOx) or other insulating materials, none of which are limited herein.
In some embodiments, with continued reference to fig. 2, the channel transfer component 122 includes: a first metallic polarization grating 1221 and a first transparent transmission channel 1222; the first metal polarization grating 1221 is disposed on a surface of the reflection filling layer 1214 opposite to the side of the resonant cavity 1211, and is embedded in the first transparent transmission channel 1222; the first metal polarization grating 1221 is used for forming polarization for infrared detection signals emitted by the reflection filling layer; the first transparent transmission channel is used for transmitting the infrared detection signal polarized by the first metal polarization grating; the length of the first metal polarization grating is greater than or equal to the length of the reflective filling layer 1214 along the direction perpendicular to the light-emitting surface of the resonant cavity.
Illustratively, taking the orientation and structure shown in FIG. 2 as an example, the first transparent transmission channel 1222 is disposed in a plane above the reflective fill layer 1214, and the first metallic polarization grating 1221 is embedded in the surface of the first transparent transmission channel 1222 above the reflective fill layer 1214. Specifically, the infrared light emitted from the reflective filler layer 1214 is first polarized by the first metal polarization grating 1221 to form infrared light having a polarized state (corresponding to linearly polarized light), and then transmitted to the collimating microlens 123 through the first transparent transmission channel 1222.
It should be understood that, the first metal polarization gratings 1221 shown in fig. 2 are actually metal grating bars arranged at intervals, the length of the first metal polarization gratings 1221 includes the lengths of the metal grating bars and the intervals thereof shown in fig. 2, and the length of the first metal polarization gratings 1221 is greater than or equal to the length of the reflective filling layer 1214 along the direction perpendicular to the light-emitting surface side of the resonant cavity 1211, that is, the horizontal direction, so as to ensure that all the infrared light emitted by the reflective filling layer 1214 can be polarized by the first metal polarization gratings 1221, that is, all the linearly polarized light is formed, and a better polarization effect is achieved.
In some embodiments, fig. 3 is a schematic structural diagram of still another eye tracking structure according to an embodiment of the present disclosure. Referring to fig. 3 on the basis of fig. 2, the infrared receiver 130 includes: a filter assembly 131, a second transparent transmission channel 132, and a converging microlens 133; the second transparent transmission channel 132 is disposed at one side of the sensing back plate 110; the optical filter assembly 131 is disposed on a side of the second transparent transmission channel 132 facing away from the sensing back plate 110; the converging micro lens 133 is disposed on the light receiving surface of the filter assembly 131; the converging microlens 133 is used for converging the infrared echo signals to the sensing backboard 110; the filter assembly 131 is at least used for performing wavelength selection and polarization on the infrared echo signals converged by the converging microlens 133; the second transparent transmission channel 132 is configured to transmit the infrared detection signal after passing through the filter assembly 131 to the sensing back plate 110.
Illustratively, in connection with fig. 2, taking the orientation and structure shown in fig. 3 as an example, infrared receivers 130 located on the left and right sides of the infrared emitter 120 are shown in fig. 3 within a predetermined area. The method specifically comprises the following steps: for each infrared receiver 130, the second transparent transmission channel 132 is located on the surface above the sensing backboard 110, the optical filter assembly 131 and the converging microlens 133 are both located above the second transparent transmission channel 132, and the optical filter assembly 131 is located between the second transparent transmission channel 132 and the converging microlens 133; in this way, the converging microlens 133 is disposed on the light receiving surface of the filtering component 131, so as to converge the infrared light reflected by the eye to be tracked.
Specifically, after the eye to be tracked reflects the infrared light, i.e. the infrared echo signal, firstly, the converging micro lens 133 can converge the light in all directions, including the infrared light reflected by the eye to be tracked and other interference light, so as to improve the utilization rate of the infrared light through the converging effect, and then, the filtering component 131 is utilized to perform wavelength selection on the light in all directions converged by the converging micro lens 133, polarize the infrared light reflected by the eye to be tracked, and transmit the polarized infrared light to the sensing area 111 in the sensing backboard 110 through the second transparent transmission channel 132. It should be noted that, the converging microlens 133 may converge the infrared light reflected by the eye to be tracked into one light spot to the sensing region 111, and the specific working principle of the converging microlens 133 will be described hereinafter as an example.
In some embodiments, with continued reference to fig. 3, the filter assembly 131 includes: a third transparent transmission channel 1311, a light deflecting layer 1312, a filter layer 1313, and a second metal polarization grating 1314; the second metal polarization grating 1314 is disposed on a surface of a side of the second transparent transmission channel 132 facing away from the sensing back plate 110; the filter layer 1313 and the light deflecting layer 1312 are sequentially disposed at intervals on one side of the second metal polarization grating 1314 away from the second transparent transmission channel 132; the light deflecting layer 1312, the filter layer 1313 and the second metal polarization grating 1314 are embedded in the third transparent transmission channel 1311; the optical deflection layer 1312 is used for deflecting the infrared echo signals converged by the converging microlens 133 by a preset angle; the filter layer 1313 is at least used for passing infrared echo signals; the second metal polarization grating 1314 is used to polarize the infrared echo signals passing through the filter layer 1313.
Illustratively, taking the orientation and structure shown in fig. 3 as an example, the third transparent transmission channel 1311 is located between the second transparent transmission channel 132 and the converging microlens 133, the second metal polarization grating 1314 in the third transparent transmission channel 1311 is located on the surface above the second transparent transmission channel 132, and the filter layer 1313 and the light deflecting layer 1312 in the third transparent transmission channel 1311 are sequentially disposed above the second metal polarization grating 1314 at intervals.
Specifically, first, the light deflection layer 1312 deflects the light in each direction converged by the converging microlens 133 by a preset angle, and the angles of deflection are different for the light with different wavelengths, for example, for the visible light in other interference light, the angle of deflection of the visible light by the light deflection layer 1312 is larger, so that the visible light cannot be transmitted to the filter layer 1313 below in the converging direction; for infrared light, the light deflecting layer 1312 can deflect the infrared light by a small angle or not so that the infrared light can continue to transmit to the underlying filter layer 1313 in a converging direction; then, the filter layer 1313 performs wavelength selection on the transmitted light, only passes through the infrared light and blocks the possibly remaining interference light from passing through, and then the second metal polarization grating 1314 polarizes the infrared light passing through the filter layer 1313, and the polarized infrared light is transmitted to the sensing region 111 through the second transparent transmission channel 132.
Illustratively, the light deflecting layer 1312 may be a super-surface material, in other embodiments, and may be other types of materials known to those skilled in the art, without limitation.
In some embodiments, with continued reference to fig. 3, the sensing region 111 and the second transparent transmission channel 132 are disposed in a one-to-one alignment; the sensing area 111 is used for receiving and processing the infrared echo signals converged by the converging microlens 133 to the sensing backboard 110.
Wherein, along the horizontal direction, the length of the sensing region 111 is equal to the length of the second transparent transmission channel 132. Illustratively, taking the orientation and structure shown in fig. 3 as an example, the sensing region 111 is located directly below the second transparent transmission channel 132 to achieve one-to-one alignment of the sensing region 111 and the second transparent transmission channel 132.
It is to be understood that the reflectivity of the eyeball and the non-eyeball area are different, for example, the reflectivity of the eye white is larger than the reflectivity of the eye pupil, so that when the infrared light reflected by the glasses to be tracked is received by the sensing area 111 in the sensing backboard 110, the sensing area 111 performs operation processing according to the electric signals formed by the infrared light reflected by the eyeball and the non-eyeball area, so as to obtain the actual eye movement condition.
In some embodiments, with continued reference to fig. 3, the total length of the third transparent transmission channel 1311 and the second transparent transmission channel 132 is equal to the focal length of the converging microlens 133.
For the scenario that the infrared receiver 130 receives infrared light, in order to enable the infrared light converged by the converging micro lens 133 to be converged into light spots on the sensing area 111, the total length of the third transparent transmission channel 1311 and the second transparent transmission channel 132 needs to be equal to the focal length of the converging micro lens 133, so that the focal point of the converging micro lens 133 is located in the sensing area 111, and thus, by setting the total length of the third transparent transmission channel 1311 and the second transparent transmission channel 132, the infrared light reflected by the glasses to be tracked can be converged in the sensing area 111, so that the converged light spots have higher energy, not only the utilization rate of the infrared light is improved, but also the sensing sensitivity of the sensing area 111 to the infrared light is improved, and the accurate detection of infrared echo signals is facilitated. Correspondingly, for the scenario where infrared emitter 120 emits infrared light, the focal point corresponding to collimating microlens 123 is located on reflective filler layer 1214, so that infrared light emitted by reflective filler layer 1214 can be finally collimated into parallel infrared light by collimating microlens 123.
It should be noted that, in combination with the above working principles of the collimating micro-lens 123 and the converging micro-lens 133, the diameters and heights of the collimating micro-lens 123 and the converging micro-lens 133 are different, for example, by changing the heights of the collimating micro-lens 123 and the converging micro-lens 133, the positions of the focuses of the collimating micro-lens 123 and the converging micro-lens 133 can be further changed; illustratively, the diameter and height of the collimating microlenses 123 may be greater than the diameter and height of the converging microlenses 133 to maximize the light collection rate, which is not described in detail herein.
In some embodiments, with continued reference to fig. 3, the eye-tracking structure further comprises: a black matrix 140 and a second type reflective layer 150; the second type reflective layer 150 includes a first reflective surface and a second reflective surface disposed opposite to each other; the black matrix 140 is spaced between the first transparent transmission channel 1222 and the third transparent transmission channel 1311; the second type reflective layer 150 is disposed between the first type reflective layer 1213 and the second transparent transmission channel 132, and covers the second transparent transmission channel 132 and a portion of the sensing region 111; the black matrix 140 is used for absorbing interference signals; the first reflecting surface faces the second transparent transmission channel 132, and is used for reflecting the infrared echo signal passing through the first reflecting surface; the second reflective surface faces the first type reflective layer 1213 for reflecting the infrared detection signal passing through the second reflective surface.
Taking the orientation and structure shown in fig. 3 as an example, the length of the second type reflective layer 150 is equal to or greater than the total length of the second transparent transmission channel 132 and the sensing region 111 in the vertical direction, so as to improve the utilization rate of infrared light. Illustratively, the second type reflective layer 150 can be made of a material such as tungsten or aluminum, which has a relatively high reflectivity, and the second type reflective layer 150 is not electrically conductive to isolate electrical crosstalk between the infrared emitter 120 and the infrared receiver 130.
Illustratively, the first reflective surface of the second type reflective layer 150 is in contact with the second transparent transmission channel 132 and the second reflective surface of the second type reflective layer 150 is in contact with the first type reflective layer 1213. Specifically, for the infrared receiver 130 to receive infrared light, when the infrared light is transmitted to the second transparent transmission channel 132, the infrared light with poor convergence effect can be reflected by using the first reflection surface of the second type reflection layer 150, so that the utilization rate of infrared echo signals is improved; accordingly, for infrared emitter 120 to emit infrared light, when the infrared light is transmitted within resonant cavity 1211, the infrared light escaping from first type reflective layer 1213 can be reflected again by the second reflection surface, improving the utilization ratio of the infrared detection signal.
The black matrix 140 is a structure for absorbing disturbance light. Illustratively, for the infrared receiver 130 to receive infrared light, the light deflecting layer 1312 deflects the interference light such as the short wavelength visible light to a larger angle, so that the visible light is absorbed by the black matrices 140 on both sides of the light deflecting layer 1312, and the visible light cannot be continuously transmitted to the filter layer 1313 below in the converging direction; further, in order to ensure effective elimination of the interference light, the length of the black matrix 140 may be equal to the length of the third transparent transmission channel 1311 in the vertical direction while the black matrix 140 is disposed between the first transparent transmission channel 1222 and the third transparent transmission channel 1311.
In some embodiments, fig. 4 is a schematic structural diagram of yet another eye tracking structure provided in an embodiment of the present disclosure. On the basis of fig. 3, referring to fig. 4, the sensing backboard further comprises pixel areas arranged in an array; each pixel region is provided with a corresponding infrared emitter 120 and infrared receiver 130; the arrangement directions of the metal polarization gratings corresponding to the infrared emitter 120 and the infrared receiver 130 in each pixel area are the same; the arrangement directions of the metal polarization gratings corresponding to the adjacent pixel areas are mutually perpendicular so as to isolate the crosstalk of infrared detection signals and infrared echo signals of the adjacent pixel areas.
Wherein the preset area corresponds to each pixel area. Specifically, referring to fig. 4, the arrangement directions of the first metal polarization grating 1221 corresponding to the infrared emitter 120 and the second metal polarization grating 1314 corresponding to the infrared receiver 130 in each pixel area are the same, on this basis, the arrangement directions of the metal polarization gratings corresponding to the adjacent pixel areas are perpendicular to each other, so that it is ensured that infrared light in a certain pixel area cannot pass through the metal polarization grating corresponding to the adjacent pixel area, crosstalk between infrared detection signals and infrared echo signals in the adjacent pixel area is prevented, and the utilization rate of infrared light is further improved.
In addition, fig. 4 also shows an internal trace 160, where the sensing backplate 110 is interconnected with the infrared emitting component 121 through the internal trace 160, and a voltage is provided to the infrared emitting component 121 through the internal trace 160 to excite the multiple quantum well layer 1212 to emit infrared light.
Illustratively, the fabrication materials of the first transparent transmission channel 1222 and the third transparent transmission channel 1311 may be transparent organic materials, such as photoresist, reducing fabrication costs; the second transparent transmission channel 132 may be made of a silicon oxide material, which is simple to manufacture and improves convenience in the manufacturing process.
Therefore, the embodiment of the disclosure solves the problem of overlarge overall volume caused by separately arranging the infrared emitting device and the infrared receiving device in the related technology by arranging the corresponding infrared emitting body 120 and the corresponding infrared receiving body 130 in each smaller pixel area, and realizes the eye movement tracking structure with higher precision and integrated emission and receiving. In addition, on the basis that the arrangement directions of the metal polarization gratings corresponding to the adjacent pixel areas are mutually perpendicular, the light deflection layer 1312 and the optical filter layer 1313 are combined, so that the light source obtained by each pixel area in the eye tracking structure is ensured to be infrared light emitted by the corresponding infrared emission component 121, and signal noise is reduced.
It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The foregoing is merely a specific embodiment of the disclosure to enable one skilled in the art to understand or practice the disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown and described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An eye tracking structure comprising:
an inductive backplate including an inductive region;
the infrared emitter and the infrared receiver are arranged on the same side of the induction backboard, and the infrared receiver is arranged corresponding to the induction area;
the infrared emitter is used for emitting infrared detection signals to eyes to be tracked; the infrared receiver is used for receiving an infrared echo signal formed by the infrared detection signal reflected by the eye to be tracked and transmitting the infrared echo signal to the corresponding sensing area; the induction area induces the infrared echo signals to generate electric signals so as to realize eye movement tracking.
2. The eye-tracking structure according to claim 1, wherein the infrared emitter comprises: an infrared emission component, a channel transmission component and a collimating micro lens;
the infrared emission component is positioned on one side of the induction backboard; the channel transmission assembly is positioned at one side of the infrared emission assembly, which is away from the induction backboard; the collimating micro lens is positioned on the light-emitting surface of the channel transmission assembly;
the infrared emission component is used for emitting an infrared detection signal to the channel transmission component; the collimating micro lens is used for collimating the infrared detection signals transmitted by the channel transmission assembly.
3. The eye-tracking structure according to claim 2, wherein the infrared emitting assembly comprises: the device comprises a resonant cavity, a multiple quantum well layer, a first type reflecting layer and a reflecting filling layer; the resonant cavity comprises a first surface and a second surface which are opposite to each other, and a joint surface for joining the first surface and the second surface, wherein the first surface corresponds to the light-emitting surface of the resonant cavity;
the multiple quantum well layer is arranged in the resonant cavity; the first type reflecting layer covers the second surface and the joint surface of the resonant cavity and covers part of the first surface of the resonant cavity; the reflection filling layer is arranged on a first surface of the resonant cavity which is not covered by the first type reflection layer;
the multi-quantum well layer is used for emitting infrared detection signals based on voltage control of the induction backboard; the resonant cavity is used for enhancing infrared detection signals emitted by the multiple quantum well layers based on internal oscillation; the first type reflecting layer is used for reflecting infrared detection signals in the resonant cavity; the reflection filling layer is used for enabling infrared detection signals reflected in the resonant cavity to be emitted to the channel transmission assembly through the reflection filling layer.
4. An eye-tracking structure according to claim 3, wherein the channel transfer assembly comprises: a first metal polarization grating and a first transparent transmission channel;
the first metal polarization grating is arranged on the surface of one side of the reflection filling layer, which is away from the resonant cavity, and is embedded in the first transparent transmission channel;
the first metal polarization grating is used for forming polarization for infrared detection signals emitted by the reflection filling layer; the first transparent transmission channel is used for transmitting infrared detection signals polarized by the first metal polarization grating;
the length of the first metal polarization grating is greater than or equal to the length of the reflection filling layer along the direction perpendicular to one side of the light emitting surface of the resonant cavity.
5. The eye-tracking structure according to claim 4, wherein the infrared receiver comprises: the optical filter assembly, the second transparent transmission channel and the converging micro lens;
the second transparent transmission channel is arranged on one side of the induction backboard; the optical filtering component is arranged on one side, away from the induction backboard, of the second transparent transmission channel; the converging micro lens is arranged on the light receiving surface of the light filtering component;
the converging micro lens is used for converging the infrared echo signals to the induction backboard; the optical filtering component is at least used for carrying out wavelength selection and polarization on the infrared echo signals converged by the converging micro lenses; the second transparent transmission channel is used for transmitting the infrared detection signals passing through the optical filtering assembly to the induction backboard.
6. The eye-tracking structure according to claim 5, wherein the filter assembly comprises: the third transparent transmission channel, the light deflection layer, the filter layer and the second metal polarization grating;
the second metal polarization grating is arranged on the surface of one side, away from the induction backboard, of the second transparent transmission channel; the filter layer and the light deflection layer are sequentially arranged at intervals on one side of the second metal polarization grating, which is away from the second transparent transmission channel; the light deflection layer, the light filtering layer and the second metal polarization grating are embedded in the third transparent transmission channel;
the light deflection layer is used for deflecting the infrared echo signals converged by the converging micro lenses by a preset angle; the filter layer is at least used for passing the infrared echo signals; the second metal polarization grating is used for forming polarization on the infrared echo signals passing through the filter layer.
7. The eye-tracking structure according to claim 5, wherein the sensing area and the second transparent transmission channel are disposed in a one-to-one alignment;
the sensing area is used for receiving and processing the infrared echo signals converged by the converging micro lenses to the sensing backboard.
8. The eye-tracking structure according to claim 6, wherein a total length of the third transparent transmission channel and the second transparent transmission channel is equal to a focal length of the converging microlens.
9. The eye-tracking structure according to claim 6, further comprising: a black matrix and a second type reflective layer; the second type reflecting layer comprises a first reflecting surface and a second reflecting surface which are arranged opposite to each other;
the black matrix is spaced between the first transparent transmission channel and the third transparent transmission channel; the second type reflecting layer is arranged between the first type reflecting layer and the second transparent transmission channel and coats the second transparent transmission channel and part of the sensing area;
the black matrix is used for absorbing interference signals; the first reflecting surface faces the second transparent transmission channel and is used for reflecting the infrared echo signals passing through the first reflecting surface; the second reflecting surface faces the first type reflecting layer and is used for reflecting the infrared detection signals passing through the second reflecting surface.
10. The eye-tracking structure according to claim 6, wherein the sensing backplate further comprises an array of pixel regions;
each pixel area is internally provided with a corresponding infrared emitter and a corresponding infrared receiver; the arrangement directions of the infrared emitters and the metal polarization gratings corresponding to the infrared receivers in each pixel area are the same; the arrangement directions of the metal polarization gratings corresponding to the adjacent pixel areas are mutually perpendicular so as to isolate the crosstalk of infrared detection signals and infrared echo signals of the adjacent pixel areas.
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