CN116469985B - Micro LED structure and preparation method thereof - Google Patents
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Abstract
The disclosure relates to a Micro LED structure and a preparation method thereof, and belongs to the technical field of Micro LED display, wherein the Micro LED structure comprises a first luminous pixel, a second luminous pixel and a third luminous pixel which are arranged along a light emitting direction; overlapping exists between the second light-emitting pixel and the vertical projection of the first light-emitting pixel on a preset plane, and overlapping exists between the third light-emitting pixel and the vertical projection of the first light-emitting pixel on the preset plane; the preset plane is a plane perpendicular to the light emitting direction; the polarization component is arranged on the light emitting surface of each luminous pixel; for a first light emitting pixel, the polarizing component comprises two polarizing components located in different overlapping areas; the polarization components comprise one polarization component positioned in an overlapped area and the other polarization component positioned in a non-overlapped area for the second light-emitting pixel and the third light-emitting pixel; the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization. This increases the overall pixel density and expands the display modes.
Description
Technical Field
The disclosure relates to the technical field of Micro LED display, in particular to a Micro LED structure and a preparation method thereof.
Background
At present, most of existing Micro LED display technologies adopt a huge amount transfer technology to transfer Red (Red, R), green (Green, G) and Blue (Blue, B), that is, RGB three-color pixels to the same plane on a driving substrate to be arranged, and the RGB three single-color pixels are utilized to emit light respectively to display all colors in a combined manner.
Disclosure of Invention
In order to solve the technical problems described above or at least partially solve the technical problems described above, the present disclosure provides a Micro LED structure and a method of manufacturing the same.
The present disclosure provides a Micro LED structure, comprising:
a first light emitting pixel, a second light emitting pixel, and a third light emitting pixel disposed along the light emitting direction; overlapping exists between the second light-emitting pixel and the vertical projection of the first light-emitting pixel on a preset plane, and overlapping exists between the third light-emitting pixel and the vertical projection of the first light-emitting pixel on the preset plane; the preset plane is a plane perpendicular to the light emitting direction;
the polarization component is arranged on the light emitting surface of each luminous pixel; for the first light emitting pixel, the polarization component comprises two polarization components positioned in different overlapping areas; for the second and third light emitting pixels, the polarization component includes one polarization component in an overlap region and another polarization component in a non-overlap region;
the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization.
Optionally, the single-sided overlapping area of the first light emitting pixel is less than 1/2 of the total area of the first light emitting pixel and equal to or greater than 1/4 of the total area of the first light emitting pixel.
Optionally, the polarization component includes a liquid crystal polarization module and a metal polarization grating, and the metal polarization grating is located at one side of the liquid crystal polarization module away from the light-emitting pixel;
the liquid crystal polarization module is used for controlling the polarization direction of light emitted by each luminous pixel;
the metal polarization grating is used for controlling the light emitting state based on the polarization direction of the light emitted by the liquid crystal polarization module; the light-emitting state comprises one of light emitted completely through the liquid crystal polarization module, light emitted partially through the liquid crystal polarization module and light emitted without passing through the liquid crystal polarization module.
Optionally, the liquid crystal polarization module comprises a first electrode, a liquid crystal alignment layer, a liquid crystal layer and a second electrode, wherein the first electrode, the liquid crystal alignment layer, the liquid crystal layer and the second electrode are stacked along the light emitting direction;
the liquid crystal orientation layer is used for setting the initial arrangement direction of liquid crystals in the liquid crystal layer; the first electrode and the second electrode are used for controlling the voltage of the liquid crystal layer; the liquid crystal layer is used for deflecting by a preset angle based on the voltage control;
the metal polarization grating comprises rectangular structures which are arranged at intervals;
the rectangular structures arranged at intervals are used for preventing light emitted by the liquid crystal layer from being transmitted when the liquid crystal is perpendicular to the rectangular structures, or preventing light emitted by the liquid crystal layer from being transmitted when the liquid crystal is parallel to the rectangular structures.
Optionally, the Micro LED structure further includes a first light emitting substrate, a second light emitting substrate, a third light emitting substrate, an anode layer, and a driving substrate;
the first light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the first light-emitting substrate, the second light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the second light-emitting substrate, and the third light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the third light-emitting substrate; the anode layer is arranged on the backlight surface of each luminous pixel; the driving substrate is arranged on one side of the first light-emitting substrate, which is away from the second light-emitting substrate.
Optionally, the Micro LED structure further comprises an insulating layer;
the insulating layer is arranged between the first light-emitting substrate and the second light-emitting substrate, between the second light-emitting substrate and the third light-emitting substrate, the polarizing component is covered by the insulating layer, and the metal polarization grating and the liquid crystal polarization module are separated by the insulating layer.
The disclosure also provides a preparation method of the Micro LED structure, which is used for preparing any one of the Micro LED structures; the method comprises the following steps:
preparing a first light-emitting pixel, a second light-emitting pixel and a third light-emitting pixel along a light-emitting direction; overlapping exists between the second light-emitting pixel and the vertical projection of the first light-emitting pixel on a preset plane, and overlapping exists between the third light-emitting pixel and the vertical projection of the first light-emitting pixel on the preset plane; the preset plane is a plane perpendicular to the light emitting direction;
preparing a polarization component on the light emitting surface of each luminous pixel; for the first light emitting pixel, the polarization component comprises two polarization components positioned in different overlapping areas; for the second and third light emitting pixels, the polarization component includes one polarization component in an overlap region and another polarization component in a non-overlap region; the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization.
Optionally, the preparing the first, second, and third light emitting pixels includes:
providing a first light-emitting substrate, a second light-emitting substrate and a third light-emitting substrate;
preparing a first light emitting pixel in the first light emitting substrate;
preparing a second light emitting pixel in the second light emitting substrate based on the first light emitting substrate;
and preparing a third light-emitting pixel in the third light-emitting substrate based on the second light-emitting substrate.
Optionally, the preparing a polarizing component includes:
preparing liquid crystal polarization modules corresponding to the first light-emitting pixels, the second light-emitting pixels and the third light-emitting pixels in the first light-emitting substrate, the second light-emitting substrate and the third light-emitting substrate respectively;
and preparing a metal polarization grating on one side of the liquid crystal polarization module, which is away from the luminous pixel.
Optionally, the method further comprises:
an insulating layer is formed between the first light-emitting substrate and the second light-emitting substrate and between the second light-emitting substrate and the third light-emitting substrate, the polarizing component is covered by the insulating layer, and the metal polarization grating and the liquid crystal polarization module are separated by the insulating layer.
Compared with the prior art, the technical scheme provided by the embodiment of the disclosure has the following advantages:
the Micro LED structure provided by the embodiment of the disclosure comprises a first light-emitting pixel, a second light-emitting pixel and a third light-emitting pixel which are arranged along a light-emitting direction; overlapping exists between the second light-emitting pixel and the vertical projection of the first light-emitting pixel on a preset plane, and overlapping exists between the third light-emitting pixel and the vertical projection of the first light-emitting pixel on the preset plane; the preset plane is a plane perpendicular to the light emitting direction; the polarization component is arranged on the light emitting surface of each luminous pixel; for a first light emitting pixel, the polarizing component comprises two polarizing components located in different overlapping areas; the polarization components comprise one polarization component positioned in an overlapped area and the other polarization component positioned in a non-overlapped area for the second light-emitting pixel and the third light-emitting pixel; the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization. Thus, the pixel density of the Micro LED structure is increased and the display mode is expanded.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure.
In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings that are required to be used in the description of the embodiments or the prior art will be briefly described below, and it will be obvious to those skilled in the art that other drawings may be obtained from these drawings without inventive effort.
Fig. 1 is a schematic structural diagram of a Micro LED structure according to an embodiment of the present disclosure;
fig. 2 is a schematic structural diagram of another Micro LED structure provided in an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of a Micro LED structure according to another embodiment of the present disclosure;
fig. 4 is a schematic flow chart of a method for manufacturing a Micro LED structure according to an embodiment of the disclosure.
Wherein 110, the first luminescent pixel; 120. a second light emitting pixel; 130. a third light emitting pixel; 140. a polarizing component; 1411. a first electrode; 1412. a liquid crystal alignment layer; 1413. a liquid crystal layer; 1414. a second electrode; 150. a first light-emitting substrate; 160. a second light-emitting substrate; 170. a third light-emitting substrate; 100. an anode layer; 180. an insulating layer; 190. a driving substrate; 191. internal wiring; 01. and a through hole.
Detailed Description
In order that the above objects, features and advantages of the present disclosure may be more clearly understood, a further description of aspects of the present disclosure will be provided below. It should be noted that, without conflict, the embodiments of the present disclosure and features in the embodiments may be combined with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure, but the present disclosure may be practiced otherwise than as described herein; it will be apparent that the embodiments in the specification are only some, but not all, embodiments of the disclosure.
The Micro LED structure and the preparation method thereof provided by the embodiment of the present disclosure are described below by way of example with reference to the accompanying drawings.
Illustratively, in some embodiments, fig. 1 is a schematic structural diagram of a Micro LED structure provided by an embodiment of the present disclosure. Referring to fig. 1, comprising: a first light emitting pixel 110, a second light emitting pixel 120, and a third light emitting pixel 130 disposed along a light emitting direction; the second light emitting pixel 120 overlaps with the vertical projection of the first light emitting pixel 110 on the preset plane, and the third light emitting pixel 130 overlaps with the vertical projection of the first light emitting pixel 110 on the preset plane; the preset plane is a plane perpendicular to the light emitting direction; the polarization component 140 is arranged on the light emitting surface of each luminous pixel; for the first light emitting pixel 110, the polarization component 140 comprises two polarization components located in different overlapping areas; for the second and third light emitting pixels 120 and 130, the polarization component 140 includes one polarization component in the overlap region and another polarization component in the non-overlap region; the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization.
The first, second and third light-emitting pixels 110, 120 and 130 are light-emitting elements emitting light of different colors, respectively. It should be noted that, along the light emitting direction, the arrangement order of the light emitting pixels may be set according to the wavelength of the emitted light. Illustratively, the light emitting pixels may be sequentially arranged in order of wavelength from long to short, for example, in a light emitting direction, the first light emitting pixel 110 may be an LED (red LED) emitting red light, the second light emitting pixel 120 may be an LED (green LED) emitting green light, and the third light emitting pixel 130 may be an LED (blue LED) emitting blue light; taking the orientation and structure shown in fig. 1 as an example, by disposing the shortest wavelength LED, i.e., the blue light-emitting LED, at the uppermost side, it is possible to prevent the blue light from irradiating the red light-emitting LED and the green light-emitting LED to generate photoluminescence.
Taking the orientation and structure shown in fig. 1 as an example, there is an overlapping between the vertical projection of the left side of the second light emitting pixel 120 and the right side of the first light emitting pixel 110 on the plane perpendicular to the light emitting direction, and there is an overlapping between the vertical projection of the right side of the third light emitting pixel 130 and the vertical projection of the left side of the first light emitting pixel 110 on the plane perpendicular to the light emitting direction, so that the pixel density of the Micro LED structure is increased and the high density integration of the three light emitting pixels is realized.
Taking the orientation and structure shown in fig. 1 as an example, there is overlap for the vertical projection of the above three pixels near the side, correspondingly, the polarization component 140 may be disposed at the upper left of each pixel and at the upper right of each pixel such that the upper side of the first pixel 110 includes two polarization components at different overlap regions, and the upper sides of the second 120 and third 130 pixels include one polarization component at the overlap region and another polarization component at the non-overlap region. It will be appreciated that the different overlapping regions are the overlapping region of the second light emitting pixel 120 corresponding to the first light emitting pixel 110 and the overlapping region of the third light emitting pixel 130 corresponding to the first light emitting pixel 110.
It should be noted that, by separately controlling the two polarization components above each pixel, the transmission of the light emitted from the corresponding position of the pixel can be controlled, for example, since the polarization component 140 is disposed above and above the left side of each pixel and above and to the right side of each pixel, the polarization component 140 can control whether the light emitted from the left side and the right side of the pixel is transmitted or not based on the polarization, and further regulate the color of the light emitted from the corresponding region.
For example, when the light emitted from the left side of the first light-emitting pixel 110 (e.g., red LED) cannot pass through the corresponding polarization component, and the light emitted from the right side of the third light-emitting pixel 130 (e.g., blue LED) can pass through the corresponding polarization component, the overlapping area of the third light-emitting pixel 130 corresponding to the first light-emitting pixel 110 is monochromatic light, and the light-emitting color is blue light; alternatively, when the light emitted from the left side of the first light emitting pixel 110 and the light emitted from the right side of the third light emitting pixel 130 can both pass through the corresponding polarization components, the overlapping region of the third light emitting pixel 130 corresponding to the first light emitting pixel 110 is mixed light, and the working principle of the polarization components 140 will be exemplified hereinafter.
The Micro LED structure provided by the embodiment of the disclosure comprises: a first light emitting pixel 110, a second light emitting pixel 120, and a third light emitting pixel 130 disposed along a light emitting direction; the second light emitting pixel 120 overlaps with the vertical projection of the first light emitting pixel 110 on the preset plane, and the third light emitting pixel 130 overlaps with the vertical projection of the first light emitting pixel 110 on the preset plane; the preset plane is a plane perpendicular to the light emitting direction; the polarization component 140 is arranged on the light emitting surface of each luminous pixel; for the first light emitting pixel 110, the polarization component 140 comprises two polarization components located in different overlapping areas; for the second and third light emitting pixels 120 and 130, the polarization component 140 includes one polarization component in the overlap region and another polarization component in the non-overlap region; the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization. Thus, the pixel density of the Micro LED structure is increased and the display mode is expanded.
In some embodiments, with continued reference to fig. 1, the single-sided overlap area of the first light emitting pixel 110 is less than 1/2 of the total area of the first light emitting pixel 110 and is equal to or greater than 1/4 of the total area of the first light emitting pixel 110.
Wherein the single-sided overlap area of the first light emitting pixel 110 is related to the manufacturing process thereof. Illustratively, the size of the single-sided overlapping area of the first light emitting pixel 110 may be set according to different manufacturing processes, for example: the single-side overlapping area of the first light emitting pixel 110 may be 1/3 of the total area of the first light emitting pixel 110, and accordingly, the right-side overlapping area of the third light emitting pixel 130 is also 1/3 of the total area of the third light emitting pixel 130, and the left-side overlapping area of the second light emitting pixel 120 is also 1/3 of the total area of the second light emitting pixel 120, which is not particularly limited herein with respect to the size of the single-side overlapping area of the first light emitting pixel 110.
In some embodiments, fig. 2 is a schematic structural diagram of another Micro LED structure provided in an embodiment of the disclosure. Referring to fig. 2 on the basis of fig. 1, the polarizing component 140 includes a liquid crystal polarizing module 141 and a metal polarizing grating 142, and the metal polarizing grating 142 is located at a side of the liquid crystal polarizing module 141 facing away from the light emitting pixel; the liquid crystal polarization module 141 is used for controlling the polarization direction of light emitted by each luminous pixel; the metal polarization grating 142 is used for controlling the light emitting state based on the polarization direction of the light emitted by the liquid crystal polarization module 141; the light-emitting state includes one of light emitted completely through the liquid crystal polarization module 141, light emitted partially through the liquid crystal polarization module 141, and light emitted without passing through the liquid crystal polarization module 141.
Taking the orientation and structure shown in fig. 2 as an example, the metal polarization grating 142 is located above the liquid crystal polarization module 141. For example, a preset interval may exist between the metal polarization grating 142 and the liquid crystal polarization module 141 to provide a corresponding insulating layer at the preset interval, preventing the metal polarization grating 142 and the liquid crystal polarization module 141 from contacting to cause a short circuit, and a specific arrangement position of the insulating layer will be exemplarily described later.
Specifically, the polarization direction of the light emitted from the position corresponding to the light emitting pixel is controlled by the liquid crystal polarization module 141, so as to form light with a preset polarization direction, then the metal polarization grating 142 performs polarization analysis on the light with the preset polarization direction emitted from the liquid crystal polarization module 141, and whether the light with the preset polarization direction emitted from the liquid crystal polarization module 141 can be transmitted or not is controlled, that is, the light emitted from the liquid crystal polarization module 141 can be controlled to be completely transmitted, partially transmitted or not transmitted, so that the regulation and control of the brightness of the light emitted from the metal polarization grating 142 are realized, and the specific working principle of controlling the light emitting state of the metal polarization grating 142 is described later.
For the mixed light emitting scenario, when the light emitted from the right side of the first light emitting pixel 110 (e.g., red LED) and the light emitted from the left side of the second light emitting pixel 120 (e.g., green LED) can both pass through the corresponding metal polarization grating, the overlapping region of the second light emitting pixel 120 and the first light emitting pixel 110 forms mixed light emitting and the light emitting color is yellow.
It should be noted that, the embodiments of the present disclosure may also implement monochromatic light emission for various situations, for example, monochromatic light emission for overlapping regions of light emitting pixels may be implemented by using the polarization component 140, or monochromatic light emission for non-overlapping regions of light emitting pixels may be implemented by using the polarization component 140, or monochromatic light emission may be implemented by directly using the light emitting pixels. It is to be understood that, since the upper left and upper right of each pixel are provided with the polarization components, the pixels can perform monochromatic light emission by using the middle position of the non-corresponding polarization component, so as to realize normalized monochromatic light emission.
In some embodiments, with continued reference to fig. 2, the liquid crystal polarization module 141 includes a first electrode 1411, a liquid crystal alignment layer 1412, a liquid crystal layer 1413, and a second electrode 1414, which are stacked in the light-exiting direction; the liquid crystal alignment layer 1412 is used to set the initial arrangement direction of the liquid crystals in the liquid crystal layer 1413; the first electrode 1411 and the second electrode 1414 are used for voltage control of the liquid crystal layer 1413; the liquid crystal layer 1413 is used for performing deflection of a preset angle based on voltage control; the metal polarization grating 142 includes rectangular structures arranged at intervals; the rectangular structures arranged at intervals are used to not transmit light emitted from the liquid crystal layer 1413 when the liquid crystal is perpendicular to the rectangular structures, or to transmit all light emitted from the liquid crystal layer 1413 when the liquid crystal is parallel to the rectangular structures.
The liquid crystal alignment layer 1412 has a structure for making the initial arrangement direction of liquid crystal the same as the arrangement direction inside the liquid crystal alignment layer 1412. Illustratively, the liquid crystal alignment layer 1412 may include a rectangular structure arranged at intervals, or include grooves arranged at intervals, and in other embodiments, may be other structures known to those skilled in the art. Specifically, before the voltage is applied to the first electrode 1411 and the second electrode 1414, the arrangement of the liquid crystals in the liquid crystal layer 1413 is disordered and the overall arrangement direction is not uniform, and by placing the liquid crystals by using the internal structure (such as grooves) of the liquid crystal alignment layer 1412, the liquid crystals in the liquid crystal layer 1413 can be uniformly arranged along the grooves arranged at intervals, thereby realizing the arrangement of the initial arrangement direction of the liquid crystals.
The first electrode 1411 and the second electrode 1414 are electrodes for providing voltages to the corresponding liquid crystal layer 1413, so that each of the two polarization components of the same light emitting pixel can be independently controlled. By way of example, the first electrode 1411 and the second electrode 1414 may each be transparent electrodes, such as electrodes made of Indium Tin Oxide (ITO) doped materials, and in other embodiments, electrodes made of other materials known to those skilled in the art, without limitation.
Illustratively, when the first electrode 1411 and the second electrode 1414 provide the voltage required for deflection to the liquid crystal layer 1413, the liquid crystal in the liquid crystal layer 1413 will deflect by a preset angle, so that the arrangement direction of the liquid crystal is changed, for example, the liquid crystal in the liquid crystal layer 1413 can deflect to be perpendicular to the rectangular structure in the metal polarization grating 142, and at this time, the metal polarization grating 142 does not transmit the light emitted from the liquid crystal layer 1413; alternatively, the liquid crystals in the liquid crystal layer 1413 may all deflect to be parallel to the rectangular structure in the metal polarization grating 142, at this time, the metal polarization grating 142 transmits all the light emitted from the liquid crystal layer 1413, and the brightness of the light emitted from the metal polarization grating 142 is the largest; alternatively, the angle between the liquid crystal in the liquid crystal layer 1413 and the rectangular structure in the metal polarization grating 142 is acute, and at this time, the metal polarization grating 142 can partially transmit the light emitted from the liquid crystal layer 1413.
In conjunction with the above process of deflecting the liquid crystal, it should be noted that when the liquid crystal in the liquid crystal layer 1413 is deflected to be perpendicular to the rectangular structure in the metal polarization grating 142, the polarization direction of the light emitted from the liquid crystal layer 1413 is parallel to the rectangular structure in the metal polarization grating 142, and when the polarization direction of the electric field is parallel to the rectangular structure in the metal polarization grating 142, the free electrons on the metal polarization grating 142 are driven to move along the rectangular structure, so as to consume the energy of the electric field, and at the same time, the metal polarization grating 142 reflects the light, so that the light emitted from the liquid crystal layer 1413 cannot penetrate the metal polarization grating 142; accordingly, when the liquid crystals in the liquid crystal layer 1413 are all deflected to be parallel to the rectangular structure in the metal polarization grating 142, the polarization direction of the light emitted from the liquid crystal layer 1413 is perpendicular to the rectangular structure in the metal polarization grating 142, and the light emitted from the liquid crystal layer 1413 is completely transmitted by the metal polarization grating 142.
In some embodiments, fig. 3 is a schematic structural diagram of yet another Micro LED structure provided in an embodiment of the disclosure. Referring to fig. 3 on the basis of fig. 2, the Micro LED structure further includes a first light emitting substrate 150, a second light emitting substrate 160, a third light emitting substrate 170, an anode layer 100, and a driving substrate 190; the first light-emitting pixel 110 and the corresponding liquid crystal polarization module are arranged in the first light-emitting substrate 150, the second light-emitting pixel 120 and the corresponding liquid crystal polarization module are arranged in the second light-emitting substrate 160, and the third light-emitting pixel 130 and the corresponding liquid crystal polarization module are arranged in the third light-emitting substrate 170; the anode layer 100 is disposed on the backlight surface of each light emitting pixel; the driving substrate 190 is disposed at a side of the first light emitting substrate 150 facing away from the second light emitting substrate 160.
The driving substrate 190 is a substrate for providing a logic circuit connected to an external control chip. Illustratively, taking the orientation and structure shown in fig. 3 as an example, the internal wiring 191 of the driving substrate 190 is also shown in the figure, the first light emitting pixel 110, the second light emitting pixel 120 and the third light emitting pixel 130 are all embedded in the corresponding light emitting substrates, meanwhile, the liquid crystal polarization module corresponding to each light emitting pixel is also embedded in the corresponding light emitting substrate and is located above the corresponding light emitting pixel, and the anode layer 100 is connected below each light emitting pixel, so that the driving substrate 190 can control whether each light emitting pixel is lightened or not by using the corresponding driving circuit (not shown in the figure) and the internal wiring 191, and the lightening intensity and the lightening time.
It should be noted that, fig. 3 also shows the through holes (Through Silicon Via, TSV) 01 of the electrodes (corresponding to the second electrodes 1414) for routing wires in the first light-emitting substrate 150, and the filling material in the through holes may be the same as the preparation material of the second electrodes 1414, so as to achieve connection with the internal wires 191 of the driving substrate 190, which is not described herein.
In some embodiments, with continued reference to fig. 3, the Micro LED structure further includes an insulating layer 180; the insulating layer 180 is disposed between the first light emitting substrate 150 and the second light emitting substrate 160, and between the second light emitting substrate 160 and the third light emitting substrate 170, and the polarizing component 140 is covered by the insulating layer 180, and the metal polarization grating 142 and the liquid crystal polarization module 141 are separated by the insulating layer 180.
Wherein the insulating layer 180 is a structure for electrical insulation. Specifically, by disposing the insulating layer 180 between the adjacent light emitting substrates, a short circuit is prevented from occurring between the adjacent light emitting substrates, and at the same time, the insulating layer 180 covers the polarization assembly 140, and the metal polarization grating 142 and the liquid crystal polarization module 141 are separated by the insulating layer 180 in order to prevent the metal polarization grating 142 from being in contact with the second electrode 1414 in the liquid crystal polarization module 141 and from being shorted.
On the basis of the above embodiment, the embodiment of the present disclosure further provides a method for manufacturing a Micro LED structure, which is used for manufacturing any one of the Micro LED structures provided in the above embodiment, and has a corresponding beneficial effect.
Exemplary, fig. 4 is a schematic flow chart of a method for manufacturing a Micro LED structure according to an embodiment of the disclosure. Referring to fig. 4, the method includes:
s210, preparing a first light-emitting pixel, a second light-emitting pixel and a third light-emitting pixel along the light-emitting direction.
Wherein, the second light-emitting pixel and the first light-emitting pixel have overlapping in vertical projection on the preset plane, and the third light-emitting pixel and the first light-emitting pixel have overlapping in vertical projection on the preset plane; the preset plane is a plane perpendicular to the light emitting direction.
Illustratively, the first, second, and third light emitting pixels may be light emitting elements prepared from quantum dot materials, such as: when the first light emitting pixel is for emitting red light, it may be a multiple quantum well (Multiple Quantum Well, MQW) structure for red light; when the second light emitting pixel is used to emit green light, it may be a multiple quantum well structure for green light; when the third light emitting pixel is used to emit blue light, it may be a multi-quantum well structure for blue light, and the specific composition structure and preparation materials of the multi-quantum well structure are not limited.
S220, preparing a polarization component on the light emitting surface of each luminous pixel.
Wherein, for a first light emitting pixel, the polarizing component comprises two polarizing components located in different overlapping areas; the polarization components comprise one polarization component positioned in an overlapped area and the other polarization component positioned in a non-overlapped area for the second light-emitting pixel and the third light-emitting pixel; the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization.
For example, when the light emitting surface corresponds to the upper side of each light emitting pixel, on the basis of the formed first light emitting pixel, a liquid crystal polarization module may be formed first on the upper left side and the upper right side of the first light emitting pixel, and then metal polarization gratings may be formed respectively on the upper sides of the two liquid crystal polarization modules to form a polarization component for the first light emitting pixel; also, a polarizing component for the second light emitting pixel and a polarizing component for the third light emitting pixel may be sequentially formed thereafter, and a specific manufacturing process of the polarizing component is exemplified hereinafter.
According to the preparation method of the Micro LED structure, overlapped first, second and third light-emitting pixels exist in vertical projection on the preset plane, and the polarization component is prepared on the light-emitting surface of each light-emitting pixel, so that the light transmission condition of light emitted at the corresponding position of the light-emitting pixel is controlled by the polarization component, the light-emitting color of the corresponding region is regulated and controlled, the pixel density of the Micro LED structure is increased, and the display mode is expanded.
In addition, the huge transfer technology adopted in the related Micro LED display technology is not mature enough, for example, when the Micro LED structure is prepared by adopting the elastic seal Micro transfer technology, the laser transfer technology and other technologies, the yield and the transfer efficiency can not reach the level of Micro LED mass production, and meanwhile, the manufacturing cost is increased, so that the selling price of the current Micro LED product is high. And in the embodiment of the disclosure, the Micro LED structure prepared based on the hybrid bonding mode greatly improves the yield and transfer efficiency of the Micro LED structure, reduces the manufacturing cost of the Micro LED structure, and is beneficial to large-scale mass production of products.
In some embodiments, referring to fig. 4, preparing the first, second, and third light emitting pixels in S210 includes the steps of:
step one: a first light-emitting substrate, a second light-emitting substrate, and a third light-emitting substrate are provided.
Specifically, since the second light-emitting substrate is located between the first light-emitting substrate and the third light-emitting substrate, the first light-emitting pixel and the corresponding liquid crystal polarization module can be prepared inside the first light-emitting substrate, the second light-emitting pixel and the corresponding liquid crystal polarization module can be prepared inside the second light-emitting substrate, and the third light-emitting pixel and the corresponding liquid crystal polarization module can be prepared inside the third light-emitting substrate.
Step two: a first light emitting pixel is prepared in a first light emitting substrate.
For example, the first light emitting substrate may be polished and thinned, and then a multi-quantum well structure for red light may be formed inside the first light emitting substrate using a semiconductor manufacturing process, which is not limited with respect to the manufacturing process of the first light emitting pixel.
Step three: the second light emitting pixels are prepared in the second light emitting substrate based on the first light emitting substrate.
Illustratively, the second light-emitting substrate is polished and thinned on the basis of the formed first light-emitting substrate, and then a multi-quantum well structure for green light is formed inside the second light-emitting substrate by using a semiconductor manufacturing process, which is not limited with respect to the manufacturing process of the second light-emitting pixel.
Step four: third light-emitting pixels are prepared in the third light-emitting substrate based on the second light-emitting substrate.
Illustratively, the third light-emitting substrate is polished and thinned on the basis of the formed second light-emitting substrate, and then a multi-quantum well structure for blue light is formed inside the third light-emitting substrate by using a semiconductor manufacturing process, which is not limited with respect to the manufacturing process of the third light-emitting pixel.
In some embodiments, referring to fig. 4, preparing a polarizing component in S220 includes the steps of:
step one: and respectively preparing liquid crystal polarization modules corresponding to the first light-emitting pixels, the second light-emitting pixels and the third light-emitting pixels in the first light-emitting substrate, the second light-emitting substrate and the third light-emitting substrate.
Specifically, for the first light-emitting pixel in the first light-emitting substrate, a liquid crystal polarizing module may be prepared at the upper left and upper right of the first light-emitting pixel, for example, in the process of preparing the liquid crystal polarizing module at the upper left of the first light-emitting pixel, a first electrode, a liquid crystal alignment layer, a liquid crystal layer, and a second electrode are stacked in the light-emitting direction.
Illustratively, the space position of the liquid crystal polarization module can be reserved above the first luminescent pixel by adopting the processes of photoetching, etching and the like, then an insulating layer is deposited by utilizing the processes of chemical vapor deposition (Chemical Vapor Deposition, CVD), then the space position of the liquid crystal polarization module is reserved by photoetching and etching, a first electrode is formed on the formed insulating layer by utilizing the processes of physical vapor deposition (Physical Vapor Deposition, PVD), photoetching, etching and the like, then a liquid crystal orientation layer is coated, ultraviolet polarized light orientation is used for the insulating layer, then baking and curing are carried out in a nitrogen atmosphere, then the liquid crystal layer is coated, baking and curing are carried out in the nitrogen atmosphere, finally a second electrode is formed by utilizing the processes of physical vapor deposition, photoetching, etching and the like, the insulating layer is deposited again above the formed second electrode, and the insulating layer is ground flat by chemical mechanical polishing (Chemical Mechanical Polishing, CMP), so that the liquid crystal polarization module coated by the insulating layer is formed.
It should be noted that, before preparing the light-emitting pixels inside the light-emitting substrate, the driving substrate may be manufactured first, then the corresponding light-emitting substrate is placed on the driving substrate, the anode layer for electrical connection is formed at the corresponding position of the driving substrate and the light-emitting substrate, and the driving substrate and the light-emitting substrate are connected by hybrid bonding. For example, the anode layer may be made of a combination of tantalum nitride (TaN), tantalum (Ta) and copper (Cu), for example, a stack of tantalum nitride (TaN), tantalum (Ta) and copper (Cu) may be formed under the light emitting pixel to form the anode layer, and the anode layer is not limited to the material.
By way of example, in combination with the above preparation process of the liquid crystal polarization module, after the liquid crystal polarization module is formed, the lithography and etching process are adopted to form the through hole leading-out position of the electrode (such as the second electrode), the corresponding through hole is etched, then the physical vapor deposition process is adopted to fill the corresponding material in the through hole, and on the basis, the lithography and etching process are adopted to form the internal wiring in the driving substrate.
Step two: and preparing a metal polarization grating on one side of the liquid crystal polarization module, which is away from the luminous pixels.
After forming the liquid crystal polarization module coated by the insulating layer, a metal polarization grating coated by the insulating layer is formed. The metal polarization grating may be a metal wire grid of aluminum material, for example, and in other embodiments, may be a grating of other metal materials known to those skilled in the art, neither being limited herein with respect to the type or materials of the metal polarization grating.
In some embodiments, referring to fig. 4, the method of making further comprises:
an insulating layer is formed between the first light-emitting substrate and the second light-emitting substrate and between the second light-emitting substrate and the third light-emitting substrate, and the polarizing component is covered by the insulating layer, and the metal polarization grating and the liquid crystal polarization module are separated by the insulating layer.
Illustratively, in combination with the above preparation process of the liquid crystal polarizing module, when the insulating layer is redeposited over the formed second electrode by using a physical vapor deposition process, an insulating layer for separating from the subsequent second light emitting substrate may be formed over the first light emitting substrate, and a metal polarizing grating may be formed over the liquid crystal polarizing module, and the metal polarizing grating may be separated from the liquid crystal polarizing module by using the insulating layer. Therefore, on the basis of forming the driving substrate, the first light-emitting pixels and the corresponding polarization components, the second light-emitting substrate, the second light-emitting pixels and the corresponding polarization components, and the third light-emitting substrate, the third light-emitting pixels and the corresponding polarization components are formed upwards, which can be understood in combination with the above related preparation process, and are not described herein again.
It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The foregoing is merely a specific embodiment of the disclosure to enable one skilled in the art to understand or practice the disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown and described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A Micro LED structure comprising:
a first light emitting pixel, a second light emitting pixel, and a third light emitting pixel disposed along the light emitting direction; overlapping exists between the second light-emitting pixel and the vertical projection of the first light-emitting pixel on a preset plane, and overlapping exists between the third light-emitting pixel and the vertical projection of the first light-emitting pixel on the preset plane; the preset plane is a plane perpendicular to the light emitting direction;
the polarization component is arranged on the light emitting surface of each luminous pixel; for the first light emitting pixel, the polarization component comprises two polarization components positioned in different overlapping areas; for the second and third light emitting pixels, the polarization component includes one polarization component in an overlap region and another polarization component in a non-overlap region;
the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization.
2. The Micro LED structure of claim 1, wherein the single side overlapping area of the first light emitting pixel is less than 1/2 of the total area of the first light emitting pixel and equal to or greater than 1/4 of the total area of the first light emitting pixel.
3. The Micro LED structure of claim 1 or 2, wherein the polarization component comprises a liquid crystal polarization module and a metal polarization grating, the metal polarization grating being located at a side of the liquid crystal polarization module facing away from the light emitting pixel;
the liquid crystal polarization module is used for controlling the polarization direction of light emitted by each luminous pixel;
the metal polarization grating is used for controlling the light emitting state based on the polarization direction of the light emitted by the liquid crystal polarization module; the light-emitting state comprises one of light emitted completely through the liquid crystal polarization module, light emitted partially through the liquid crystal polarization module and light emitted without passing through the liquid crystal polarization module.
4. The Micro LED structure of claim 3, wherein the liquid crystal polarization module comprises a first electrode, a liquid crystal alignment layer, a liquid crystal layer, and a second electrode stacked along the light emitting direction;
the liquid crystal orientation layer is used for setting the initial arrangement direction of liquid crystals in the liquid crystal layer; the first electrode and the second electrode are used for controlling the voltage of the liquid crystal layer; the liquid crystal layer is used for deflecting by a preset angle based on the voltage control;
the metal polarization grating comprises rectangular structures which are arranged at intervals;
the rectangular structures arranged at intervals are used for preventing light emitted by the liquid crystal layer from being transmitted when the liquid crystal is perpendicular to the rectangular structures, or preventing light emitted by the liquid crystal layer from being transmitted when the liquid crystal is parallel to the rectangular structures.
5. The Micro LED structure of claim 3, further comprising a first light emitting substrate, a second light emitting substrate, a third light emitting substrate, an anode layer, and a driving substrate;
the first light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the first light-emitting substrate, the second light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the second light-emitting substrate, and the third light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the third light-emitting substrate; the anode layer is arranged on the backlight surface of each luminous pixel; the driving substrate is arranged on one side of the first light-emitting substrate, which is away from the second light-emitting substrate.
6. The Micro LED structure of claim 5, further comprising an insulating layer;
the insulating layer is arranged between the first light-emitting substrate and the second light-emitting substrate, between the second light-emitting substrate and the third light-emitting substrate, the polarizing component is covered by the insulating layer, and the metal polarization grating and the liquid crystal polarization module are separated by the insulating layer.
7. A method for preparing a Micro LED structure, characterized by being used for preparing the Micro LED structure according to any one of claims 1-6; the method comprises the following steps:
preparing a first light-emitting pixel, a second light-emitting pixel and a third light-emitting pixel along a light-emitting direction; overlapping exists between the second light-emitting pixel and the vertical projection of the first light-emitting pixel on a preset plane, and overlapping exists between the third light-emitting pixel and the vertical projection of the first light-emitting pixel on the preset plane; the preset plane is a plane perpendicular to the light emitting direction;
preparing a polarization component on the light emitting surface of each luminous pixel; for the first light emitting pixel, the polarization component comprises two polarization components positioned in different overlapping areas; for the second and third light emitting pixels, the polarization component includes one polarization component in an overlap region and another polarization component in a non-overlap region; the two polarization components aiming at the same luminous pixel are respectively and independently controlled and are used for regulating and controlling the light emitting color of the corresponding region based on polarization.
8. The method of claim 7, wherein the preparing the first, second, and third light emitting pixels comprises:
providing a first light-emitting substrate, a second light-emitting substrate and a third light-emitting substrate;
preparing a first light emitting pixel in the first light emitting substrate;
preparing a second light emitting pixel in the second light emitting substrate based on the first light emitting substrate;
and preparing a third light-emitting pixel in the third light-emitting substrate based on the second light-emitting substrate.
9. The method of claim 8, wherein the preparing a polarizing component comprises:
preparing liquid crystal polarization modules corresponding to the first light-emitting pixels, the second light-emitting pixels and the third light-emitting pixels in the first light-emitting substrate, the second light-emitting substrate and the third light-emitting substrate respectively;
and preparing a metal polarization grating on one side of the liquid crystal polarization module, which is away from the luminous pixel.
10. The method according to claim 9, wherein the method further comprises:
an insulating layer is formed between the first light-emitting substrate and the second light-emitting substrate and between the second light-emitting substrate and the third light-emitting substrate, the polarizing component is covered by the insulating layer, and the metal polarization grating and the liquid crystal polarization module are separated by the insulating layer.
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