CN116459444A - Three-dimensional accurate nerve information detection double-sided microelectrode array capable of inducing dormancy by electrical stimulation - Google Patents

Three-dimensional accurate nerve information detection double-sided microelectrode array capable of inducing dormancy by electrical stimulation Download PDF

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Publication number
CN116459444A
CN116459444A CN202310508489.2A CN202310508489A CN116459444A CN 116459444 A CN116459444 A CN 116459444A CN 202310508489 A CN202310508489 A CN 202310508489A CN 116459444 A CN116459444 A CN 116459444A
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site
lead
electrical stimulation
stimulation
electrophysiology
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Inventor
贾千里
蔡新霞
王蜜霞
宋轶琳
莫凡
胡瑞琳
景露易
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Aerospace Information Research Institute of CAS
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Aerospace Information Research Institute of CAS
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Priority to CN202310508489.2A priority Critical patent/CN116459444A/en
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/02Details
    • A61N1/04Electrodes
    • A61N1/05Electrodes for implantation or insertion into the body, e.g. heart electrode
    • A61N1/0526Head electrodes
    • A61N1/0529Electrodes for brain stimulation
    • A61N1/0534Electrodes for deep brain stimulation
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/24Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25Bioelectric electrodes therefor
    • A61B5/279Bioelectric electrodes therefor specially adapted for particular uses
    • A61B5/294Bioelectric electrodes therefor specially adapted for particular uses for nerve conduction study [NCS]
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/24Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/316Modalities, i.e. specific diagnostic methods
    • A61B5/388Nerve conduction study, e.g. detecting action potential of peripheral nerves
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M21/00Other devices or methods to cause a change in the state of consciousness; Devices for producing or ending sleep by mechanical, optical, or acoustical means, e.g. for hypnosis
    • A61M21/02Other devices or methods to cause a change in the state of consciousness; Devices for producing or ending sleep by mechanical, optical, or acoustical means, e.g. for hypnosis for inducing sleep or relaxation, e.g. by direct nerve stimulation, hypnosis, analgesia
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00Electrotherapy; Circuits therefor
    • A61N1/18Applying electric currents by contact electrodes
    • A61N1/32Applying electric currents by contact electrodes alternating or intermittent currents
    • A61N1/36Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
    • A61N1/3605Implantable neurostimulators for stimulating central or peripheral nerve system
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M21/00Other devices or methods to cause a change in the state of consciousness; Devices for producing or ending sleep by mechanical, optical, or acoustical means, e.g. for hypnosis
    • A61M2021/0005Other devices or methods to cause a change in the state of consciousness; Devices for producing or ending sleep by mechanical, optical, or acoustical means, e.g. for hypnosis by the use of a particular sense, or stimulus
    • A61M2021/0072Other devices or methods to cause a change in the state of consciousness; Devices for producing or ending sleep by mechanical, optical, or acoustical means, e.g. for hypnosis by the use of a particular sense, or stimulus with application of electrical currents

Abstract

The invention discloses a three-dimensional accurate nerve information detection double-sided microelectrode array for inducing dormancy by electric stimulation, which comprises the following components: a double-sided electrophysiology detection site, an electrical shielding site, an electrical stimulation site, an electrophysiology lead, an electrical stimulation lead, a pad site, a pad lead, and a substrate; the electrophysiology detection site is between the electrostimulation site and the electroscreening site; the pad wire is connected with the electrophysiology wire and the electrical stimulation wire; the electrophysiology detection site, the electro-shielding site, the electro-stimulation site, the electrophysiology lead, the electro-stimulation lead, the bonding pad site and the bonding pad lead are all on the substrate; the arrangement mirror images of the front electrode and the back electrode are the same; the electrode array can synchronously detect nerve cell electrophysiological signals under the induction dormancy of the electrical stimulation, the electrical shielding point enables the electrical stimulation range to be controlled near the detection site, the impedance of the electrical physiological detection point is low, the electrical stimulation point can bear high voltage and high current, the electrical stimulation range is controllable and is attached to the three-dimensional shape of the brain region, and the electrode array is suitable for carrying out the electrical physiological detection and the electrical stimulation on the nerve cells of animals.

Description

Three-dimensional accurate nerve information detection double-sided microelectrode array capable of inducing dormancy by electrical stimulation
Technical Field
The invention relates to the field of nerve signal detection and neuron electrical stimulation, in particular to a nerve information detection double-sided microelectrode array for three-dimensional accurate electrical stimulation induced dormancy.
Background
Many mammals, when challenged by food deprivation or harsh environmental conditions, initiate adaptive energy conservation survival strategies: sleep. During this time, their metabolic rate and body temperature drop well below steady state settings, thereby inhibiting cell death, alleviating metabolic processes, and limiting tissue aging. To investigate how mammals transition from an awake state to a dormant state, we need a means of accurately stimulating dormant brain areas that first detects cells associated with dormancy and electrically stimulates the detected cells in situ. The brain electrical stimulation is an electrical stimulation form, and currently existing brain electrical stimulation mainly comprises: cranial electrotherapy stimulation, deep brain stimulation, transcranial direct current stimulation, electrical shock therapy, low-field magnetic stimulation, functional electrical stimulation, magnetic seizure therapy, vagal nerve stimulation, deep transcranial magnetic stimulation, reactive nerve stimulation. The stimulation methods use millimeter and centimeter-level electrodes to stimulate the brain, the size of the electrodes is far larger than that of the brain nucleus, the special target brain area cannot be stimulated, the influence on the stimulation is difficult to evaluate, and the accurate stimulation requirement of stimulating the single functional nucleus cannot be met.
The technology currently in common use to explore the awake-sleep transition is chemogenetics and optogenetics. Chemical genetics uses the principle of genetics and uses chemical small molecules as tools to regulate physiological processes, but the chemical genetics needs to design and modify receptors and medicines to specifically activate the receptors, and the operation is complicated. Optogenetics is a technique for controlling the activity of neurons or other cell types with light by specifically expressing a photosensitive example channel, pump or enzyme in a target cell. At the single cell level, the photoactivated enzymes and transcription factors can precisely control biochemical signaling pathways. While optogenetics can provide time accuracy on the order of milliseconds, optogenetics needs to work in conjunction with specific adenoviruses, causing irreversible damage to the experimental test. Meanwhile, the hardware (integrated optical fiber and solid-state light source, etc.) required by optogenetics is also smaller and smaller, and even non-invasive, but many technical problems remain unsolved, such as: the existing nerve stimulating electrodes with different expression levels of the microbial opsin genes, unclear correlation with the electrical activity of cells, difficult combination of opsin activation and gene coding indexes, corresponding space delay, uncontrollability and the like mostly adopt a three-dimensional structure, the conductive wires and the insulating wires of the electrode have large volumes, the brain tissue is greatly damaged, the electrophysiological detection and the stimulation cannot be synchronously carried out, the specific space navigation cells cannot be identified, and the specific cells cannot be accurately stimulated.
The existing electric stimulation electrode can realize in-situ detection and stimulation, most of the electrode adopts a three-dimensional structure, but the conductive wire and the insulating wire of the electrode have large volumes, so that the brain tissue is greatly damaged, the synchronous performance of electrophysiological detection and stimulation cannot be realized, specific dormant cells are identified, and the specific nucleus cannot be accurately targeted. Meanwhile, the regulating electric field formed by the electric stimulation electrode is generally in a form of gradually decreasing from the near to the far, and the specific nucleus cannot be effectively electrically regulated.
Therefore, an electric stimulation tool capable of detecting specific functional nuclear groups in the brain and simultaneously performing in-situ precision and obvious effects is lacking at present.
Disclosure of Invention
In order to solve the technical problems, the invention provides a three-dimensional accurate nerve information detection double-sided microelectrode array for inducing dormancy by electric stimulation, which is used for synchronously detecting nerve cell electrophysiological signals under the condition of inducing dormancy by electric stimulation, wherein an electric shielding site controls the electric stimulation range near the detection site, the impedance of the electrophysiological detection site is low, the electric stimulation site can bear high voltage and current, the electric stimulation range is controllable and is attached to the three-dimensional shape of a brain region, the damage to brain tissues is small, and the method is suitable for carrying out electrophysiological detection and electric stimulation on nerve cells of animals.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a neural information detection double-sided microelectrode array for three-dimensional accurate electrical stimulation induced dormancy, which is used for three-dimensional accurate regulation and control of nerve nuclear mass induced dormancy and synchronous detection of nerve cell discharging activity, the microelectrode array comprises: an electrophysiology detection site, an electro-shielding site, an electro-stimulation site, an electrophysiology lead electro-stimulation lead, a bonding pad site, a bonding pad lead, a substrate, a front electrode and a back electrode; the electrophysiology detection site is located between the electrostimulation site and the electroscreening site; an electrophysiology detection site and an electrostimulation site are arranged inside the electrodeshield site; the pad wires are respectively connected with the electrophysiology wires and the electrical stimulation wires; the electrophysiology detection site, the electro-shielding site, the electro-stimulation site, the reference electrode, the electrophysiology lead, the electro-stimulation lead, the bonding pad site and the bonding pad lead are all on the substrate; the front electrode and the back electrode are mirror symmetry.
The electrophysiology detection site, the electro-shielding site and the electro-stimulation site are positioned at the front tip part of the microelectrode array, the bonding pad site is positioned at the rear part of the microelectrode array, the electrophysiology detection site is connected with the electrode bonding pad site through an electrophysiology lead, and the reference electrode is connected with the electrode bonding pad site through the electrophysiology lead; the number of the electric stimulation leads is two, the electric stimulation site is connected with the bonding pad site through one electric stimulation lead, and the electric shielding site is connected with the bonding pad site through the other electric stimulation lead; the front electrode and the back electrode are aligned and bonded through a PCB.
Further, the electrophysiological detection sites are round with the diameter of 20 microns, the number of the front side and the back side is distributed to be 8, and all the electrophysiological detection sites are positioned between the electrostimulation sites and the electro-shielding sites.
Further, the electrical shielding sites have a width of 30 microns.
Further, the electrical stimulation site is 180 microns in diameter.
Further, the electrophysiology detection wires are 5 microns in line width, and the number of the electrophysiology detection wires is equal to that of the electrophysiology detection sites.
Further, the electrical stimulation lead line width is 30 microns.
Further, the pad sites are square, the total number of the front electrode and the back electrode is 20, and the size is 200 micrometers.
Further, the electrophysiology detection site, the electro-shielding site, the electro-stimulation site, the reference electrode, the electrophysiology lead, the electro-stimulation lead, the bonding pad site and the bonding pad lead are all manufactured on the substrate by using a micro-electro-mechanical technology, and the material of the electro-physiological detection site, the electro-shielding site, the electro-stimulation site, the reference electrode, the electro-physiological lead, the electro-stimulation lead, the bonding pad site and the bonding pad lead is SOI.
Further, the electrophysiology detection site electric shielding site, the electric stimulation site, the reference electrode, the electrophysiology lead, the electric stimulation lead, the bonding pad site and the bonding pad lead are made of platinum, and the thickness of the platinum is 0.25 micrometer.
Further, the surfaces of the electrophysiology lead, the electrical stimulation lead and the bonding pad lead are covered with silicon dioxide as an insulating layer, and the thickness of the insulating layer is 0.8 micrometers; preferably, the electrophysiological detection site and the reference electrode surface are modified by electroplating with platinum nano particles, and the impedance after modification is less than 10 kiloohms.
Further, the distance between the front electrode and the back electrode is designed according to the brain region, and the distance is 200 micrometers.
The beneficial effects of the invention are as follows:
(1) The requirements of detecting dormant cells and performing in-situ electrical stimulation on the detected cells can be met;
(2) The electrophysiological detection and the electrical stimulation are integrated, so that the damage to brain tissues is reduced, and the electrophysiological detection and the electrical stimulation of dormant cells are more convenient;
(3) The electrode can be used for double-sided electric stimulation experiments, and the three-dimensional electric field can be regulated and controlled through the change of electric stimulation parameters, so that the effect of stimulating the nucleus is more remarkable;
(4) The space-time resolution of the electrode is high, and the repeatability is good;
(5) The electrode can judge the position of electric regulation and control through the detected electric signals, so that the aim of accurately regulating and controlling target points is fulfilled;
(6) The electrode has good stability.
Drawings
For a more complete understanding of the present invention, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, which are incorporated in and constitute a part of this specification, in which:
FIG. 1 is a schematic diagram of a three-dimensional accurate electrical stimulation induced dormancy neural information detection double-sided microelectrode array of the present invention;
FIG. 2 is a partial enlarged view of the detection and stimulation portion;
FIG. 3 is a side block diagram of a three-dimensional accurate electrical stimulation induced dormancy neural information detection double-sided microelectrode array of the present invention;
FIG. 4 is an electric field simulation diagram of a three-dimensional accurate electrical stimulation induced dormancy neural information detection double-sided microelectrode array of the present invention;
in the figure, 1-electrophysiology detection site, 2-electro-shielding site, 3-electro-stimulation site, 4-electro-physiological lead, 5-electro-stimulation lead, 6-pad site, 7-pad lead, 8-substrate, 9-front electrode, 10-back electrode, 11-reference electrode.
Detailed Description
Embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the invention. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the invention. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present invention.
According to one embodiment of the present invention, as shown in fig. 1, a three-dimensional accurate electrical stimulation dormancy-inducing neural information detection double-sided microelectrode array of the present invention is used for three-dimensional electrical stimulation accurate regulation of nerve nuclear cluster dormancy induction and synchronous detection of nerve cell discharging activity, and comprises an electrophysiology detection site 1, an electrical shielding site 2, an electrical stimulation site 3, a reference electrode 11, an electrophysiology lead 4, an electrical stimulation lead 5, a bonding pad site 6, a bonding pad lead 7, a substrate 8, a front electrode 9 and a back electrode 10; an electrophysiology detection site 1 and an electrostimulation site 3 are arranged in the electro-shielding site 2; the electrophysiology detection site 1 is located between the electrostimulation site 3 and the electric shielding site 2; the pad wire 7 is respectively connected with the electrophysiology wire 4 and the electrical stimulation wire 5; the electrophysiology detection site 1, the electro-shielding site 2, the electro-stimulation site 3, the electrophysiology lead 4, the electro-stimulation lead 5, the bonding pad site 6 and the bonding pad lead 7 are all arranged on the substrate 8; the front electrode 9 and the back electrode 10 each comprise an electrophysiology detection site 1, an electro-shielding site 2, an electro-stimulation site 3, a reference electrode 11, an electrophysiology lead 4, an electro-stimulation lead 5, a bonding pad site 6, a bonding pad lead 7 and a substrate 8; the front electrode 9 and the back electrode 10 are mirror symmetrical.
The electrophysiology detection site 1, the electro-shielding site 2 and the electro-stimulation site 3 are positioned at the front tip part of the double-sided microelectrode array, the bonding pad site 6 is positioned at the rear part of the double-sided microelectrode array, the electrophysiology detection site 1 is connected with the electrode bonding pad site 6 through an electrophysiology lead 4, and the reference electrode 11 is connected with the electrode bonding pad site 6 through the electrophysiology lead 4; preferably, the number of the electric stimulation leads 5 is two, the electric stimulation site 3 is connected with the bonding pad site 6 through one electric stimulation lead 5, and the electric shielding site 2 is connected with the bonding pad site 6 through the other electric stimulation lead 5; preferably, the front electrode 9 and the back electrode 10 are aligned and bonded by a PCB board.
The electrophysiological detection sites 1 are round with the diameter of 20 microns, the number of the front side and the back side is 8, and all the electrophysiological detection sites are positioned between the electrostimulation sites 3 and the electric shielding sites 2.
The width of the electric shielding sites 2 is 30 micrometers.
The electrostimulation sites 3 are 180 microns in diameter.
The electric stimulation lead 5 has a line width of 5 microns and the number of the electric stimulation lead is equal to that of the electrophysiology detection sites 1.
The line width of the electric stimulation lead 5 is 30 micrometers.
The bonding pad sites 6 are square, the total number of the front electrode 9 and the back electrode 10 is 20, and the size is 200 micrometers.
The electrophysiology detection site 1, the electro-shielding site 2, the electro-stimulation site 3, the reference electrode 11, the electrophysiology lead 4, the electro-stimulation lead 5, the bonding pad site 6 and the bonding pad lead 7 are all manufactured on the substrate 8 by using micro-electro-mechanical technology, and the material is SOI.
The electrophysiology detection site 1, the electro-shielding site 2, the electro-stimulation site 3, the reference electrode 11, the electrophysiology lead 4, the electro-stimulation lead 5, the bonding pad site 6 and the bonding pad lead 7 are made of platinum, and the thickness of the platinum is 0.25 micrometer.
The surfaces of the electrophysiology lead 4, the electrical stimulation lead 5 and the bonding pad lead 7 are covered with silicon dioxide as an insulating layer, and the thickness of the insulating layer is 0.8 micrometers; preferably, the surfaces of the electrophysiological detection site 1 and the reference electrode 11 are electroplated with platinum nano particles for modification, and the impedance after modification is less than 10 kiloohms.
As shown in fig. 3, the pitch of the front electrode 9 and the back electrode 10 is designed according to the brain region, and the pitch is 200 μm.
As shown in fig. 2, the electro-stimulation site 3 is located at the circular center of the electro-shielding site 2, and 8 electro-physiological detection sites 1 are located around the electro-stimulation site 3 and surrounded by the electro-shielding site 2.
The double-sided microelectrode array application method of the invention comprises the following steps: the electrophysiological detection site 1 is used for detecting dormant cells such as position cells, positive and negative bidirectional voltage or current pulses are applied between the electrostimulation site 3 and the electric shielding site 2 to stimulate the cells while the dormant cells are detected, and the reference electrode 11 is used for forming a current loop with a corresponding microelectrode in the detection process.
Example 1
As shown in fig. 4, the electric stimulation effect after applying 2 amperes of current, the stimulation electric field is a three-dimensional model, can completely cover the simulated brain region and is limited to the vicinity of the electrophysiological detection site, and the detailed experimental steps are as follows:
under the normal activity state of the mouse, implanting the double-sided microelectrode array into a dorsal nuclear area or a sleep-related brain area of the mouse, and detecting sleep cells of the mouse by using an electrophysiological detection site 1;
after detecting dormant cells, positive and negative bidirectional voltage or current pulses are applied between the electric stimulation site 3 and the electric shielding site 2 so as to regulate and control the dormant cells and promote the mice to enter a dormant state.
It will be understood by those skilled in the art that while the present invention has been shown and described with reference to particular exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents. The scope of the disclosure should, therefore, not be limited to the above-described embodiments, but should be determined not only by the following claims, but also by the equivalents of the following claims.

Claims (11)

1. The nerve information detection double-sided microelectrode array is characterized by being used for three-dimensional electrical stimulation to accurately regulate and control nerve nuclear groups to induce dormancy and synchronously detect nerve cell discharging activities, and comprises an electrophysiology detection site (1), an electrical shielding site (2), an electrical stimulation site (3), an electrophysiology lead (4), an electrical stimulation lead (5), a bonding pad site (6), a bonding pad lead (7), a substrate (8), a front electrode (9) and a back electrode (10); an electrophysiology detection site (1) and an electrostimulation site (3) are arranged in the electroscreening site (2); the electrophysiology detection site (1) is positioned between the electrostimulation site (3) and the electric shielding site (2); the bonding pad wire (7) is respectively connected with the electrophysiology wire (4) and the electric stimulation wire (5); the electrophysiology detection site (1), the electro-shielding site (2), the electro-stimulation site (3), the reference electrode (11), the electrophysiology lead (4), the electro-stimulation lead (5), the bonding pad site (6) and the bonding pad lead (7) are all arranged on the substrate (8); the front electrode (9) and the back electrode (10) are mirror symmetrical;
the electrophysiology detection site (1), the electro-shielding site (2) and the electro-stimulation site (3) are positioned at the front tip part of the double-sided microelectrode array, the bonding pad site (6) is positioned at the rear part of the micro-nano electrode array, the electrophysiology detection site (1) is connected with the electrode bonding pad site (6) through an electrophysiology lead (4), and the reference electrode (11) is connected with the electrode bonding pad site (6) through the electrophysiology lead (4); the number of the electric stimulation leads (5) is two, the electric stimulation sites (3) are connected with the bonding pad sites (6) through one electric stimulation lead (5), and the electric shielding sites (2) are connected with the bonding pad sites (6) through the other electric stimulation lead (5); the front electrode (9) and the back electrode (10) are aligned and bonded through a PCB.
2. The three-dimensional accurate electrical stimulation-induced dormancy neural information detection double-sided microelectrode array according to claim 1, wherein the electrophysiological detection sites (1) are round with the diameter of 20 microns, the number of the front sides and the back sides is distributed to be 8, and all the front sides and the back sides are positioned between the electrical stimulation sites (3) and the electrical shielding sites (2).
3. The three-dimensional accurate electrical stimulation sleep-induced neural information detection double-sided microelectrode array of claim 1, wherein the electrical screening sites (2) are 30 microns wide.
4. The three-dimensional accurate electrical stimulation sleep-induced neural information detection double-sided microelectrode array of claim 1, wherein the electrical stimulation sites (3) are 180 micrometers in diameter.
5. The three-dimensional accurate electrical stimulation sleep-induced neural information detection double-sided microelectrode array according to claim 1, wherein the line width of the electrophysiological detection wires (4) is 5 micrometers, and the number of the wire widths is equal to that of the electrophysiological detection sites (1).
6. The three-dimensional accurate electrical stimulation sleep-inducing neural information detection double-sided microelectrode array of claim 1, wherein the line width of the electrical stimulation lead (5) is 30 microns.
7. The three-dimensional accurate electrical stimulation sleep-induced neural information detection double-sided microelectrode array according to claim 1, wherein the bonding pad sites (6) are square, the total number of the front electrode (9) and the back electrode (10) is 20, and the size is 200 micrometers.
8. The three-dimensional accurate electrical stimulation-induced sleep neural information detection double-sided microelectrode array of claim 1, wherein the electrophysiological detection site (1), the electrical shielding site (2), the electrical stimulation site (3), the reference electrode (11), the electrophysiological lead (4), the electrical stimulation lead (5), the bonding pad site (6) and the bonding pad lead (7) are all manufactured on the substrate (8) by using a micro-electro-mechanical process, and the material is SOI.
9. The three-dimensional accurate electrical stimulation-induced sleep neural information detection double-sided microelectrode array of claim 1, wherein the materials of the electrophysiological detection site (1), the electrical shielding site (2), the electrical stimulation site (3), the reference electrode (11), the electrophysiological lead (4), the electrical stimulation lead (5), the bonding pad site (6) and the bonding pad lead (7) are platinum, and the thicknesses are 0.25 micrometer.
10. The three-dimensional accurate electrical stimulation-induced sleep neural information detection double-sided microelectrode array of claim 1, characterized in that the surfaces of the electrophysiological lead (4), the electrical stimulation lead (5) and the bonding pad lead (7) are covered with silicon dioxide as an insulating layer, and the thickness of the insulating layer is 0.8 micrometer; the surfaces of the electrophysiological detection site (1) and the reference electrode (11) are plated with platinum nano particles for modification, and the impedance after modification is less than 10 kiloohms.
11. The three-dimensional accurate electrical stimulation sleep-induced neural information detection double-sided microelectrode array of claim 1, wherein the pitch of the front electrode (9) and the back electrode (10) is designed according to brain regions, and the pitch is 200 microns.
CN202310508489.2A 2023-05-08 2023-05-08 Three-dimensional accurate nerve information detection double-sided microelectrode array capable of inducing dormancy by electrical stimulation Pending CN116459444A (en)

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