CN116449633A - Projection optical machine with light modulation component and scanning galvanometer component and projector - Google Patents

Abstract

The invention relates to the technical field of optical equipment, and provides a projection optical machine with an optical modulation component and a scanning galvanometer component and a projector. The projection optical machine with the light modulation component and the scanning galvanometer component comprises a light source component, a light modulation component and a scanning galvanometer component; the light source component is used for emitting light beams; the optical modulation component and the scanning galvanometer component are sequentially arranged along the optical path, and the optical modulation component is used for modulating the light beam. The invention is used for solving the defects of high cost and difficult production of the projector in the prior art, can project high-quality pictures without depending on a light modulation component with higher resolution, reduces the cost of the projector, does not need to import a vibrating mirror to the outside, can reduce the manufacturing difficulty of the projector, solves the defects of high cost and difficult production of the projector in the prior art, and realizes the projection optical machine with the light modulation component and the scanning vibrating mirror component with high resolution and low vibration frequency and the projector.

Description

Projection optical machine with light modulation component and scanning galvanometer component and projector

Technical Field

The invention relates to the technical field of optical equipment, in particular to a projection optical machine with an optical modulation component and a scanning galvanometer component and a projector.

Background

A projector, also known as a projector, is a device that can project images or video onto a curtain.

Projection light engines are an important component of projectors and are typically a single unit consisting of a light source, a light modulating component and a projection lens.

Projection techniques generally include digital light processing projection techniques (Digital Light Processing, DLP) and laser scanning projection techniques (Laser Beam Scanning, LBS), wherein the digital light processing projection techniques are based on digital micromirror devices (Digital Micromirror Device, DMD) developed by texas instruments in usa, in which image signals are digitally processed and then projected by a projection lens; the laser scanning projection technology is a micro-laser projection scheme based on a micro-electromechanical system (Micro Electro Mechanical Systems, MEMS), and the principle is that the micro-electromechanical system is utilized to drive a galvanometer to rotate, so that laser is reflected and then linearly scanned back and forth along a scanning track on a diffusion sheet to form an image.

However, for projectors of digital light processing projection technology, the price difference of digital micromirror devices of different resolutions is large, for example, the price of a digital micromirror device of 1920×1080 resolution is 10 times or more of the price of a digital micromirror device of 640×360 resolution, that is, the price of a projector of high resolution is high; for the laser scanning projection technology, the vibrating mirror needs to be relied on, and at least 60×3×1920×1080= 373248000 adjustment states are needed for the vibrating mirror within 1 second, so that the requirement on the production and processing of the vibrating mirror is higher, at present, the operations such as simple laser cutting and welding can only be generally performed in the industry (for example, in China), the vibrating mirror with imaging level can not be produced at first, and the industry usually needs to be imported to the outside.

In view of the above, the present invention provides a projection optical machine and a projector with a light modulation component and a scanning galvanometer component, which take hold of the rich design development and actual manufacturing experience of related industries for years, and further research and improvement on the existing technical means.

Disclosure of Invention

The invention provides a projection optical machine with an optical modulation component and a scanning galvanometer component and a projector, which are used for solving the defects of high cost and difficult production of the projector in the prior art.

The invention provides a projection optical machine with a light modulation part and a scanning galvanometer part, which comprises a light source part, a light modulation part and a scanning galvanometer part; the light source component is used for emitting light beams; the optical modulation component and the scanning galvanometer component are sequentially arranged along the optical path, and the optical modulation component is used for modulating the light beam.

In an embodiment of the invention, the scanning galvanometer component comprises a first scanning galvanometer and a second scanning galvanometer which are sequentially arranged along an optical path, wherein the first scanning galvanometer is used for scanning the modulated light beam in a first direction, and the second scanning galvanometer is used for scanning the modulated light beam in a second direction, and the first direction is a horizontal direction and the second direction is a vertical direction; alternatively, the first direction is a vertical direction and the second direction is a horizontal direction.

In an embodiment of the invention, the light modulating component is a digital micromirror device.

In an embodiment of the invention, the light source part includes a light source, a first collimating lens, and a second collimating lens; the light source is used for emitting light beams; the first collimating lens and the second collimating lens are sequentially arranged along the light path, and the first collimating lens is used for receiving the small light beam; the second collimating lens is used for collimating the small light beam.

In an embodiment of the invention, the light source part further includes a light converging lens disposed in the light path and located between the second collimating lens and the light modulating part.

In an embodiment of the invention, the dichroic mirror is a dichroic mirror.

In an embodiment of the invention, the light combining lens is a light combining prism.

In an embodiment of the invention, the light source is a laser light source.

In an embodiment of the invention, the light modulation component is liquid crystal on silicon, and the projection optical machine with the light modulation component and the scanning galvanometer component further comprises a polarization beam splitter prism which is arranged on the optical path and is positioned between the liquid crystal on silicon and the scanning galvanometer component.

The invention also provides a projector, which comprises the projection light machine with the light modulation component and the scanning galvanometer component.

The invention provides a projection light machine with a light modulation component and a scanning galvanometer component, wherein a light beam emitted by a light source component sequentially passes through the light modulation component and the scanning galvanometer component to form a projection picture, and the light beam is modulated by the light modulation component and then scanned (integrated and accumulated) by the scanning galvanometer component, so that the formed projection picture is formed by a block instead of a single pixel point, that is, the light beam emitted by the light source is preprocessed by the scanning galvanometer component after being modulated by the light modulation component to form the projection picture, for example, an image with 1920×1080 resolution is split into 192×108 sub-pictures (blocks) with 10×10 pixels, the single digital galvanometer only needs 10×10 pixels, and the size of the final picture are 1:1, that is, the scanning state of the scanning galvanometer is reduced from 1920×1080 (207.36 ten thousand) to 192×108 (2.0736 ten thousand), so that the pixel size of the light modulation component is reduced from several micrometers to hundreds of micrometers, and therefore, a high-quality picture can be projected without relying on a light modulation component with higher resolution (such as a digital micromirror device), and a projection lens (such as a convex lens) and a light homogenizing component (such as a compound eye) are not needed, so that the cost of the projector is reduced, and moreover, the cost of the projector is not needed to depend on an imaging-level galvanometer.

Drawings

In order to more clearly illustrate the invention or the technical solutions of the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic diagram of a projection light engine with a light modulation component and a scanning galvanometer component of the present invention.

Fig. 2 is a schematic diagram of a scanning galvanometer component of the invention.

Fig. 3 is a perspective view of a projector of the present invention.

Reference numerals:

1. a light source part; 11. a light combining mirror; 111. a first dichroic mirror; 112. a second dichroic mirror; 2. a light modulation section; 3. a scanning galvanometer component; 31. a first scanning galvanometer; 311. a first mirror; 32. a second scanning galvanometer; 321. a second mirror; 4. a projector housing 4; 5. a heat conductive member; 6. a temperature adjusting part; 7. a heat sink.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present embodiment, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present embodiment and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present embodiment.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present embodiment, the meaning of "plurality" is at least two, for example, two, three, etc., unless explicitly defined otherwise.

In this embodiment, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and include, for example, either permanently connected, removably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present embodiment can be understood by those of ordinary skill in the art according to the specific circumstances.

Fig. 1 to 3 show a projection optical machine with a light modulation component 2 and a scanning galvanometer component 3 and a projector provided by the invention, and as can be seen from the figure, the projection optical machine with the light modulation component 2 and the scanning galvanometer component 3 comprises a light source component 1, the light modulation component 2 and the scanning galvanometer component 3; the light source part 1 is used for emitting light beams; the light modulation section 2 and the scanning galvanometer section 3 are disposed in order along the optical path, and the light modulation section 2 is configured to modulate the light beam to generate an image light beam.

According to the projection optical machine with the light modulation component 2 and the scanning galvanometer component 3 provided by the invention, the light beam emitted by the light source component 1 sequentially passes through the light modulation component 2 and the scanning galvanometer component 3 to form a projection picture, and the light beam is modulated by the light modulation component 2 and then scanned (integrated accumulation) by the scanning galvanometer component 3, so that the formed projection picture is formed by blocks instead of single pixel points, namely, the light beam emitted by the light source is preprocessed by the scanning galvanometer component 3 after being modulated by the light modulation component 2, so that the projection picture is formed, for example, an image with the resolution of 1920 x 1080 is split into sub-pictures (blocks) with the resolution of 192 x 108 10 pixels, the size of the single digital galvanometer is 1:1 with the size of the final picture, namely, the scanning galvanometer scanning state is reduced to 192 x 108 (2.0736 ten thousand) by 1920 x 1080 (207.36 ten thousand), the pixel size of the light modulation component 2 is reduced from several micrometers to hundreds of micrometers, for example, the image forming of the projection picture is not required to be cut by a projector with a high resolution component (for example, the projector can be used for manufacturing a projector with high quality, and a projector can not be used for manufacturing a projector with a high resolution, for example, and a projector can be used for reducing the manufacturing quality of a projector or a projector with a high quality is required for manufacturing a projector, and a projector is required to be used for manufacturing a projector, and has a high quality, and has a high quality can be used for manufacturing a projector, and has a quality and can be used for manufacturing a projector, and has a projector and has a quality and a projector and has a high quality and can be used for quality and can be manufactured.

Specifically, the light source part 1 may include a light source, a first collimating lens, and a second collimating lens; the light source may be a laser light source, for example, three laser light sources of red, green and blue, for emitting a light beam; the first collimating lens and the second collimating lens can be arranged in sequence along the light path, and the first collimating lens is used for receiving the small light beam; the second collimating lens is used for collimating the small light beam. The light modulation means 2 may be a digital micromirror device (Digtial Micromirror Devices, DMD); it will be appreciated that the digital micromirror device is a microelectromechanical device of electronic input and optical output, having a plurality of micromirrors, each micromirror corresponding to a pixel, each micromirror being rotatable between two stable positions, in which, in the "on" position, light from the light source, after reflection, can form a bright spot on the screen through the projection optical lens; in the "off" position, the reflected light cannot pass through the projection optics and a dark spot can be formed on the screen.

In the implementation, the coverage rate of the laser display color gamut using the red, green and blue three-primary-color lasers as light sources can reach 90%, namely, more than 2 times of the color kinescope, and in addition, a color separation system is not needed, and lens focusing is also not needed, so that the projected image cannot be distorted or deformed.

In some embodiments, the collimating portion of the light source may be a single piece lens, may be plastic or glass, and may be spherical or aspherical in shape.

More specifically, the scanning galvanometer part 3 may include a first scanning galvanometer 31 and a second scanning galvanometer 32 sequentially disposed along the optical path, the first scanning galvanometer 31 for scanning the modulated light beam in a first direction, the second scanning galvanometer 32 for scanning the modulated light beam in a second direction, wherein the first direction is a horizontal direction, and the second direction is a vertical direction; alternatively, the first direction is a vertical direction and the second direction is a horizontal direction.

It will be appreciated that the scanning galvanometer component 3 may be a two-dimensional high-speed galvanometer, which is a relatively small magneto-electric deflection device similar to a galvanometer, and that the rotor on the mirror is deflected by alternating current to control the deflection angle of the two-dimensional high-speed galvanometer so as to scan the laser energy.

As shown in fig. 2, in this embodiment, the two-dimensional high-speed galvanometer may include a first scanning galvanometer 31 and a second scanning galvanometer 32, the parallel laser beam may scan in a first direction (for example, x direction) through the rotation of the first mirror 311 of the first scanning galvanometer 31, the parallel laser beam may scan in a second direction (for example, y direction) through the rotation of the second mirror 321 of the second scanning galvanometer 32, the two-dimensional high-speed galvanometer may reflect the parallel light beam horizontally projected onto the first mirror 311 to the second mirror 321 and then reflect and exit again, and by controlling the rotation of the first scanning galvanometer 31 and the second scanning galvanometer 32, the two-dimensional scanning of the parallel laser beam on the xOy plane may be achieved.

In some embodiments, the scanning galvanometer component 3 may be a monolithic bi-directional scanning galvanometer.

In one embodiment of the present invention, the light source part 1 may further include a light converging lens 11 disposed in the light path and between the second collimating lens and the light modulating part 2.

In one possible embodiment, the combiner 11 may be a first dichroic mirror 111 and then a second dichroic mirror 112 arranged sequentially along the optical path.

In another possible embodiment, the light combining mirror 11 may be a light combining prism. For example, a lens provided by Tianhuon pine optics (Guangzhou) Inc., product name X-CUBE series, size range of 7 mm to 80 mm, surface quality of 40-20 (MIL-PRF-13830B), and combining accuracy of 0.001 mm or more and center line of 0.003 mm or less per reflecting surface.

In some embodiments, the light modulation component 2 may be a liquid crystal on silicon (Liquid Crystal on Silicon, LCoS), and the projection light engine with the light modulation component 2 and the scanning galvanometer component 3 may further include a polarization splitting prism (Polarization Beam Splitter, PBS) disposed in the light path and between the liquid crystal on silicon and the scanning galvanometer component 3.

It is understood that the polarization splitting prism may be a glued prism group, which divides natural light into light parallel to the incident surface and light perpendicular to the incident surface, a polarization film is plated at the glued surface, and after the natural light enters the polarization splitting prism and encounters the polarization film, a part of the natural light is reflected, and another part of the natural light is transmitted. The reflected light and the transmitted light become polarized light, wherein the reflected light is light perpendicular to the incident surface, and the transmitted light is light parallel to the incident surface, and the vibration directions of the reflected light and the transmitted light are perpendicular to each other.

Further, the polarizing film may be provided in a plurality of layers, whereby light is once reflected and transmitted at each layer interface, that is, once polarized, and the component of light perpendicular to the incident plane among light parallel to the incident plane is gradually reduced, thereby improving the extinction ratio, which may be greater than 1000:1 after the multi-layer polarization.

In specific implementation, the polarization beam splitter prism can be applied to a parallel light path and a converging light path.

In some embodiments, the projection optical machine with the light modulation component 2 and the scanning galvanometer component 3 provided by the invention can further comprise a light beam adjusting component, which is arranged on the light path and is positioned between the light source component 1 and the light modulation component 2, and is used for adjusting the light quantity of the light beam so as to adjust the brightness of the target image.

With the above configuration, the brightness of the target image generated by the projection light machine with the light modulation section 2 and the scanning galvanometer section 3 can be dynamically adjusted without specially designing the driving circuit of the light source section 1.

Specifically, the light beam adjusting component includes, but is not limited to, an aperture stop or a liquid crystal element or the like that can realize adjustment of the light amount of the light beam.

Further, the beam adjusting part may include a control member that controls the size of the light passing hole of the adjustable aperture stop element to adjust the light amount of the light beam, and an adjustable aperture stop member.

With the above arrangement, it is possible to adjust the contrast of an image while adjusting the brightness of the image.

In a possible embodiment, the light passing aperture of the adjustable aperture stop element is circular. In the specific implementation, the light quantity of the light beam can be limited in the transverse dimension and the longitudinal dimension by adjusting the radius of the circular light-passing hole, so that the brightness and the contrast of the projection image can be adjusted.

In another possible embodiment, the light passing aperture of the adjustable aperture stop element is rectangular. In the implementation, the size of the light through hole can be adjusted in the transverse dimension and the longitudinal dimension, and the light quantity of the light beam can be limited in the longitudinal dimension only, so that the projection image can realize higher contrast under the same brightness.

It should be noted that, as the terms are used herein, the lateral dimension and the longitudinal dimension refer to directions perpendicular to each other in a plane in which the light passing hole of the adjustable aperture stop element is located, where the lateral dimension may be a direction parallel to the ground, and the longitudinal dimension may be a direction perpendicular to the ground.

The invention also provides a projector, which comprises the projection optical machine with the light modulation component 2 and the scanning galvanometer component 3 in the embodiment. The specific structure, working principle and beneficial effects of the projection optical machine with the optical modulation component 2 and the scanning galvanometer component 3 are the same as those of the above embodiment, and are not repeated here.

As shown in fig. 3, in some embodiments, the projector provided by the present invention may further include a projector housing 4, a heat conducting component 5, and a temperature adjusting component 6, where the projector optical engine with the light modulating component 2 and the scanning galvanometer component 3 is hermetically disposed in the projector housing 4, the heat conducting component 5 is made of metal and has a first surface and a second surface, the first surface of the heat conducting component 5 is connected to the projector housing 4, the second surface of the heat conducting component 5 is connected to a third surface of the temperature adjusting component 6, and the third surface of the temperature adjusting component 6 is used for cooling.

In a specific implementation, the third surface of the temperature adjusting component 6 can cool, and the heat conducting component 5 transmits cooling energy to the projector housing 4, so that the heat dissipation of the projection optical machine (such as a light source) with the light modulating component 2 and the scanning galvanometer component 3 is facilitated, and the influence on the definition of a projection picture caused by the thermal expansion of lenses (such as a first collimating lens) in the projection optical machine with the light modulating component 2 and the scanning galvanometer component 3 is prevented.

It will be appreciated that, in order to prevent the projection light machine with the light modulation component 2 and the scanning galvanometer component 3 from entering gray, the projection light machine with the light modulation component 2 and the scanning galvanometer component 3 is sealed and arranged in the projector housing 4, however, the heat of the projection light machine with the light modulation component 2 and the scanning galvanometer component 3 cannot be transmitted outwards due to the adoption of the sealed projection light with the light modulation component 2 and the scanning galvanometer component 3, so that the lenses in the projection light machine with the light modulation component 2 and the scanning galvanometer component 3 are heated and expanded.

Specifically, the temperature adjusting component 6 may be a semiconductor temperature adjusting component 6, and is electrically connected to a power supply system of the projector, the temperature adjusting component 6 further has a fourth surface disposed opposite to the third surface, the fourth surface is used for heating, and the projector provided by the invention may further include a radiator 7, where the radiator 7 is used for radiating heat from the fourth surface of the temperature adjusting component 6.

It will be appreciated that the semiconductor temperature adjusting part 6 is a structural member made of semiconductor material based on the peltier effect, which is a phenomenon that when a direct current passes through a thermocouple pair composed of two semiconductor materials, one end of the thermocouple pair absorbs heat and the other end emits heat, and the semiconductor temperature adjusting part 6 may include: the semiconductor temperature regulating component 6 comprises a P-type semiconductor material, an N-type semiconductor material and two ceramic electrode plates, wherein the P-type semiconductor material and the N-type semiconductor material are connected to form a thermocouple pair and are positioned between the two ceramic electrode plates, when current flows through the semiconductor temperature regulating component 6, one of the two ceramic electrodes absorbs heat from the outside to form a third surface, the other of the two ceramic electrodes emits heat to the outside to form a fourth surface, the semiconductor temperature regulating component 6 can be existing, and the semiconductor temperature regulating component 6 can comprise hundreds of thermocouple pairs formed by connecting the P-type semiconductor material and the N-type semiconductor material.

In a specific implementation, the third surface of the temperature adjusting component 6 contacts with the heat conducting component 5, so that heat can be absorbed from the heat conducting component 5, the temperature of the heat conducting component 5 is reduced, and then the temperature of the projector housing 4 connected with the heat conducting component 5 is reduced, so that the temperature of projection shutdown is reduced, and the lens (for example, the first collimating lens) in the projection optical machine with the light modulating component 2 and the scanning galvanometer component 3 is prevented from being heated and expanded to influence the definition of a projection picture.

The heat sink 7 can transfer the heat released from the fourth surface of the temperature adjusting member 6 to the external environment (atmosphere), thereby avoiding the temperature of the projection lens from rising again due to the heat released from the fourth surface of the temperature adjusting member 6, and the temperature of the third surface of the temperature adjusting member 6 is reduced as the temperature of the fourth surface of the temperature adjusting member 6 is reduced by the heat sink 7, so that the cooling capability of the temperature adjusting member 6 is improved.

In the specific implementation, the temperature of the projection optical machine with the optical modulation component 2 and the scanning galvanometer component 3 can be controlled by controlling the magnitude of the current value and the voltage value input into the semiconductor temperature regulating component 6, changing the cooling capacity of the third surface of the semiconductor temperature regulating component 6 and changing the cooling capacity of the third surface of the semiconductor temperature regulating component 6; wherein the range of the current value input in the semiconductor temperature adjusting part 6 may be between 3 amperes and 5 amperes, and the range of the voltage value input in the semiconductor temperature adjusting part 6 may be between 14 and 20 volts.

Specifically, the heat sink 7 may be a fan, and an air outlet of the fan may face the fourth surface of the temperature adjusting part 6.

In some embodiments, the projector provided by the present invention may further include a temperature sensor for detecting the temperature of the projector housing 4, and a controller; the controller is connected to the temperature sensor and the semiconductor temperature adjusting part 6, and is configured to control the magnitude of the current value and the voltage value input in the semiconductor temperature adjusting part 6 according to the magnitude of the temperature detected by the temperature sensor, for example, the controller may adjust down the current value and the voltage value input in the semiconductor temperature adjusting part 6 in a state where the temperature detected by the temperature sensor is lower than a preset value, and the controller may adjust up the current value and the voltage value input in the semiconductor temperature adjusting part 6 in a state where the temperature detected by the temperature sensor is higher than a preset value, whereby the temperature of projection shutdown may be made stable.

In some embodiments, the outer surface of projector housing 4 may also be coated with a layer of sound damping material, for example, the sound damping material layer may be a layer of sound damping material made of an acrylic vibration damping paint.

In some embodiments, the heat conductive member 5 may be a heat pipe, wherein the heat pipe has an evaporation end and a condensation end, the evaporation end is connected to the projector housing 4, and the condensation end is connected to the third face of the temperature adjusting member 6, so that heat conductive efficiency may be improved.

It can be understood that the heat pipe, namely the heat pipe with the liquid suction core, has the structure of a pipe shell and the liquid suction core arranged in the pipe shell, the liquid suction core is fully immersed with liquid phase working medium, the liquid suction core with a porous capillary structure is sleeved on the inner wall of the closed high-vacuum pipe (pipe shell) or the pipe body, the liquid suction core is fully immersed with the liquid phase working medium, the heat pipe comprises an evaporation section (evaporation end) and a condensation section (condensation end), an external heat source inputs heat in the evaporation section to evaporate and vaporize the liquid phase working medium, then steam flows to the condensation section to condense, released latent heat of vaporization is sent to the outside, thereby realizing heat transfer, condensed liquid is retracted into the liquid suction core and flows back to the evaporation section mainly by the action of capillary force, and the automatic circulation of the working medium can be completed.

As can be seen from the above technical solutions, the projection optical machine with the optical modulation component 2 and the scanning galvanometer component 3 of the present invention uses digital light processing projection technology, but is not the same, and at least has the following differences:

1. the light passing after the collimation of the laser light source needs to cover the digital micromirror device, so that the required power is larger, and certain requirements on alignment and uniformity are met.

2. The digital micro-mirror device is added, the collimated light source is modulated by the digital micro-mirror device and then projected onto the final image surface by the scanning galvanometer component 3, the projection display of the ultra-high resolution image can be realized by the digital micro-mirror device with the minimum resolution, the cost is reduced, the resolution is improved, in addition, the digital micro-mirror device can meet the use requirement without a few micrometers, tens micrometers or hundreds micrometers, and the process requirement is reduced.

3. The scanning galvanometer component 3 mature in industry (such as domestic) can be adopted to replace the semiconductor (galvanometer) with high production and processing requirements.

In this embodiment, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "manner," "particular modes," or "some modes," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or mode is included in at least one embodiment or mode of the embodiments of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or manner. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or ways. Furthermore, various embodiments or modes and features of various embodiments or modes described in this specification can be combined and combined by those skilled in the art without mutual conflict.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. The projection optical machine with the light modulation component and the scanning galvanometer component is characterized by comprising a light source component (1), a light modulation component (2) and a scanning galvanometer component (3);

the light source component (1) is used for emitting light beams;

the light modulation component (2) and the scanning galvanometer component (3) are arranged in sequence along a light path, and the light modulation component (2) is used for modulating the light beam.

2. The projection optical machine with a light modulation component and a scanning galvanometer component according to claim 1, characterized in that the scanning galvanometer component (3) comprises a first scanning galvanometer (31) and a second scanning galvanometer (32) arranged in sequence along the optical path, the first scanning galvanometer (31) being used for scanning the modulated light beam in a first direction, the second scanning galvanometer (32) being used for scanning the modulated light beam in a second direction, wherein the first direction is a horizontal direction and the second direction is a vertical direction; alternatively, the first direction is a vertical direction, and the second direction is a horizontal direction.

3. Projection light engine with light modulation means and scanning galvanometer means according to claim 1, characterized in that the light modulation means (2) is a digital micromirror device.

4. A projection light engine with light modulation means and scanning galvanometer means according to claim 1, characterized in that the light source means (1) comprises a light source, a first collimating lens and a second collimating lens;

the light source is used for emitting the light beam;

the first collimating lens and the second collimating lens are arranged in sequence along the light path, and the first collimating lens is used for receiving the light beam;

the second collimating lens is used for collimating the light beam after being received.

5. The projection light machine with light modulation means and scanning galvanometer means according to claim 4, characterized in that the light source means (1) further comprises a collimator lens (11) arranged in the light path and between the second collimator lens and the light modulation means (2).

6. The projection light machine with light modulation means and scanning galvanometer means according to claim 5, characterized in that the combiner (11) is a dichroic mirror.

7. The projection light machine with light modulation component and scanning galvanometer component according to claim 5, characterized in that the light combining mirror (11) is a light combining prism.

8. The projection light machine with a light modulation unit and a scanning galvanometer unit according to any one of claims 4 to 7, wherein the light source is a laser light source.

9. The projection light machine with the light modulation component and the scanning galvanometer component according to claim 1, characterized in that the light modulation component (2) is a liquid crystal on silicon, and the projection light machine with the light modulation component and the scanning galvanometer component further comprises a polarization splitting prism arranged on the light path and positioned between the liquid crystal on silicon and the scanning galvanometer component (3).

10. A projector, comprising:

a projection light engine with a light modulating component and a scanning galvanometer component as claimed in any one of claims 1 to 9.