CN116447228A - Ultra-precise hydrostatic linear guide rail - Google Patents
Ultra-precise hydrostatic linear guide rail Download PDFInfo
- Publication number
- CN116447228A CN116447228A CN202310244889.7A CN202310244889A CN116447228A CN 116447228 A CN116447228 A CN 116447228A CN 202310244889 A CN202310244889 A CN 202310244889A CN 116447228 A CN116447228 A CN 116447228A
- Authority
- CN
- China
- Prior art keywords
- guide rail
- linear guide
- rail
- platform
- rail mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002706 hydrostatic effect Effects 0.000 title claims abstract description 27
- 230000035939 shock Effects 0.000 claims abstract description 14
- 230000003068 static effect Effects 0.000 claims abstract description 13
- 238000013016 damping Methods 0.000 claims abstract description 6
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims description 3
- 239000003921 oil Substances 0.000 abstract description 16
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 239000010687 lubricating oil Substances 0.000 abstract description 3
- 238000012797 qualification Methods 0.000 abstract description 2
- 230000002349 favourable effect Effects 0.000 abstract 1
- 238000001459 lithography Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
- F16C37/002—Cooling of bearings of fluid bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
Abstract
The invention discloses an ultraprecise hydrostatic linear guide rail which comprises a damping platform, a guide rail mechanism and a driving mechanism, wherein the guide rail mechanism is arranged at the top end of the damping platform, and the driving mechanism is arranged in the guide rail mechanism. This shock attenuation platform bears guide rail mechanism and fixes, simultaneously carry out power assistance by being fixed in the inside actuating mechanism of guide rail mechanism, thereby make this kind of static pressure linear guide carry out steady operation, can bear guide rail mechanism steadily through shock attenuation platform, and carry out shock attenuation to this kind of ultra-precise hydrostatic pressure linear guide through pneumatic buffer, improve the precision of work piece processing, can carry out even transmission to the work piece of processing by guide rail mechanism again, make it can stabilize accurate and carry out the location sculpture with the lithography machine, slide rail thermal stability is high simultaneously, the heat that friction produced is directly dispeled to circulation lubricating oil, all realize throttle control by every static pressure oil pocket again, make the transmission more stable, be favorable to the work piece processing qualification rate.
Description
Technical Field
The invention relates to the technical field of photoetching machine equipment, in particular to an ultra-precise hydrostatic linear guide rail.
Background
The hydrostatic linear guide rail is called as a hydraulic guide rail for short, and the working surface of the guide rail is completely under pure liquid friction, so that the friction coefficient is extremely low during working; the movement of the guide rail is not limited by load and speed, and the guide rail moves uniformly at low speed without creeping phenomenon; the liquid has the vibration absorbing effect, so that the guide rail has good vibration resistance, can be better suitable for a photoetching machine of semiconductor equipment, and can provide a more stable working environment for the photoetching machine.
In the use of the ultra-precise hydrostatic linear in the market, the traditional hydrostatic guide rail has larger heating value due to viscous shearing resistance of oil, in addition, the whole structure of the hydraulic device is more complicated, and the maintenance of an oil way is also troublesome, so that the operation is inconvenient.
Disclosure of Invention
The invention aims to provide an ultra-precise hydrostatic linear guide rail, which solves the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides an ultraprecise hydrostatic linear guide rail, includes shock attenuation platform, guide rail mechanism and actuating mechanism, shock attenuation platform's top is provided with guide rail mechanism, and guide rail mechanism's inside is provided with actuating mechanism, guide rail mechanism includes main rail chamber, slide rail, cushion cap, static pressure oil pocket, spacing and antistatic coating, and the top in main rail chamber is provided with the slide rail, the top of slide rail is connected with the cushion cap, and the inside of slide rail is provided with the static pressure oil pocket, the outside both sides in main rail chamber are provided with spacing, the top of cushion cap is provided with antistatic coating.
Further, the main rail cavity is a hollow cuboid in the concave shape, and two sides of the top end of the main rail cavity are connected with the sliding rail.
Furthermore, two groups of sliding rails are arranged in total, and the two groups of sliding rails are distributed horizontally and symmetrically.
Further, the sliding rail is movably clamped and connected with the bearing platform, and a plurality of groups of static pressure oil cavities which are uniformly distributed are arranged in and on the sliding rail.
Furthermore, the limit strips are provided with two groups which are symmetrically distributed, and the limit strips are fixedly clamped and connected with two sides of the outer part of the sliding rail.
Further, the shock attenuation platform includes base, fixed platform, inlet port and supporting legs, and the top of base is connected with fixed platform, one side of base is provided with the inlet port, and the bottom of base is provided with the supporting legs.
Further, the top surface of base carries out abundant laminating with fixed platform's bottom surface and is connected, and fixed platform's top surface evenly distributed has the connecting hole.
Furthermore, four groups of supporting legs are arranged in total, and the top ends of the supporting legs are connected with the base in an embedded clamping mode.
Compared with the prior art, the invention has the beneficial effects that: the ultra-precise hydrostatic linear guide rail is provided with the damping platform and the guide rail mechanism, the damping platform can stably bear the weight of the guide rail mechanism, the pneumatic buffer device is used for keeping vibration buffering on the ultra-precise hydrostatic linear guide rail, a stable processing environment is kept, and the processing precision of workpieces is improved.
The guide rail mechanism can uniformly drive the processed workpiece, so that the guide rail mechanism can stably and accurately carry out positioning engraving with a photoetching machine, meanwhile, the heat stability of the sliding rail is high, the circulating lubricating oil directly dissipates heat generated by friction, and each static pressure oil cavity realizes throttle control, so that the drive of the hydrostatic linear guide rail is more stable, and the machining qualification rate of the workpiece is facilitated.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic perspective view of a guide rail mechanism according to the present invention;
fig. 3 is a schematic diagram of a three-dimensional splitting structure of the present invention.
In the figure: 1. a damping platform; 101. a base; 102. a fixed platform; 103. an air inlet hole; 104. supporting feet; 2. a guide rail mechanism; 201. a main rail cavity; 202. a slide rail; 203. bearing platform; 204. static pressure oil cavity; 205. a limit bar; 206. an antistatic coating; 3. a driving mechanism.
Detailed Description
Referring to fig. 1-2, the present invention provides a technical solution: the utility model provides an ultraprecise hydrostatic linear guide, including shock attenuation platform 1, guide rail mechanism 2 and actuating mechanism 3, shock attenuation platform 1's top is provided with guide rail mechanism 2, and guide rail mechanism 2's inside is provided with actuating mechanism 3, shock attenuation platform 1 includes base 101, fixed platform 102, inlet port 103 and supporting legs 104, and base 101's top is connected with fixed platform 102, base 101's one side is provided with inlet port 103, and base 101's bottom is provided with supporting legs 104, base 101's top surface and fixed platform 102's bottom surface carry out abundant laminating and are connected, and fixed platform 102's top surface evenly distributed has the connecting hole, supporting legs 104 have four groups altogether, and supporting legs 104's top carries out embedded joint with base 101 and is connected, this shock attenuation platform 1 can carry out stable bearing to guide rail mechanism 2, and keep vibrations buffering to this kind of ultraprecise hydrostatic linear guide through pneumatic buffer device, keep stable processing environment, the precision of work piece processing is improved.
Referring to fig. 3, the present invention provides a technical solution: the utility model provides an ultraprecise hydrostatic linear guideway, including shock attenuation platform 1, guide rail mechanism 2 and actuating mechanism 3, shock attenuation platform 1's top is provided with guide rail mechanism 2, and guide rail mechanism 2's inside is provided with actuating mechanism 3, guide rail mechanism 2 includes main rail chamber 201, slide rail 202, the cushion cap 203, static pressure oil pocket 204, spacing 205 and antistatic coating 206, and main rail chamber 201's top is provided with slide rail 202, slide rail 202's top is connected with cushion cap 203, and slide rail 202's inside is provided with static pressure oil pocket 204, main rail chamber 201's outside both sides are provided with spacing 205, slide rail 203's top is provided with antistatic coating 206, main rail chamber 201 is concave form inside hollow cuboid, and main rail chamber 201's top both sides are connected with slide rail 202, slide rail 202 is provided with two sets of altogether, and two sets of slide rail 202 are horizontal symmetric distribution, and slide rail 202 and cushion cap 203 are connected for movable block, and slide rail 202's inside and surface are provided with multiunit evenly distributed static pressure oil pocket 204, spacing 205 is provided with two sets of symmetric distribution, and spacing 205 and slide rail 202 outside both sides fixed block connection, this kind of guide rail mechanism 2 carries out uniform heat transmission to the high-pressure oil pocket, it is smooth to make the high-pressure stable linear guideway, the high-speed and stable hydrostatic-phase hydrostatic-pressure linear guideway is realized, the high-pressure stable and is processed by the high-speed and stable, and is processed by the high-speed and stable hydrostatic-phase hydrostatic-pressure linear guideway, and is stable to be processed.
Working principle: for the ultra-precise hydrostatic linear guide rail, firstly, the top surface of the base 101 is attached to the bottom surface of the fixed platform 102, then the air inlet 103 is connected with the air pipe, and then the guide rail mechanism 2 is stably arranged through the fixed platform 102, so that the driving mechanism 3 can be arranged in the main rail cavity 201, and then lubricating oil is transmitted into the hydrostatic oil cavity 204 formed in the sliding rail 202, so that the oil forms an ultra-thin oil film on the surface of the sliding rail 202, and the oil film is in liquid friction sliding transmission with the bearing platform 203 to drive the stable transportation of a machined workpiece, thereby completing the use process of the whole ultra-precise hydrostatic linear guide rail.
Claims (8)
1. The utility model provides an ultraprecise hydrostatic linear guide rail, includes shock attenuation platform (1), guide rail mechanism (2) and actuating mechanism (3), its characterized in that: the top of shock attenuation platform (1) is provided with guide rail mechanism (2), and the inside of guide rail mechanism (2) is provided with actuating mechanism (3), guide rail mechanism (2) are including main rail chamber (201), slide rail (202), cushion cap (203), static pressure oil pocket (204), spacing (205) and antistatic coating (206), and the top of main rail chamber (201) is provided with slide rail (202), the top of slide rail (202) is connected with cushion cap (203), and the inside of slide rail (202) is provided with static pressure oil pocket (204), the outside both sides of main rail chamber (201) are provided with spacing (205), the top of cushion cap (203) is provided with antistatic coating (206).
2. An ultraprecise hydrostatic linear guide as defined in claim 1, wherein: the main rail cavity (201) is a cuboid with a concave-shaped hollow inside, and two sides of the top end of the main rail cavity (201) are connected with the sliding rail (202).
3. An ultraprecise hydrostatic linear guide as defined in claim 1, wherein: the sliding rails (202) are provided with two groups, and the two groups of sliding rails (202) are distributed horizontally and symmetrically.
4. An ultraprecise hydrostatic linear guide as defined in claim 1, wherein: the sliding rail (202) is movably clamped and connected with the bearing platform (203), and a plurality of groups of static pressure oil cavities (204) which are uniformly distributed are arranged in and on the sliding rail (202).
5. An ultraprecise hydrostatic linear guide as defined in claim 1, wherein: the limiting strips (205) are provided with two groups which are symmetrically distributed, and the limiting strips (205) are fixedly clamped and connected with two sides of the outer part of the sliding rail (202).
6. An ultraprecise hydrostatic linear guide as defined in claim 1, wherein: the damping platform (1) comprises a base (101), a fixed platform (102), air inlets (103) and supporting legs (104), the top end of the base (101) is connected with the fixed platform (102), the air inlets (103) are arranged on one side of the base (101), and the supporting legs (104) are arranged at the bottom of the base (101).
7. The ultra-precise hydrostatic linear guide of claim 6, wherein: the top surface of base (101) carries out abundant laminating with the bottom surface of fixed platform (102) and is connected, and the top surface evenly distributed of fixed platform (102) has the connecting hole.
8. The ultra-precise hydrostatic linear guide of claim 6, wherein: four groups of supporting legs (104) are arranged in total, and the top ends of the supporting legs (104) are connected with the base (101) in an embedded clamping mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310244889.7A CN116447228A (en) | 2023-03-15 | 2023-03-15 | Ultra-precise hydrostatic linear guide rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310244889.7A CN116447228A (en) | 2023-03-15 | 2023-03-15 | Ultra-precise hydrostatic linear guide rail |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116447228A true CN116447228A (en) | 2023-07-18 |
Family
ID=87132845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310244889.7A Pending CN116447228A (en) | 2023-03-15 | 2023-03-15 | Ultra-precise hydrostatic linear guide rail |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116447228A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117072560A (en) * | 2023-10-13 | 2023-11-17 | 无锡星微科技有限公司 | Large-stroke air-floating type nanometer positioning platform |
-
2023
- 2023-03-15 CN CN202310244889.7A patent/CN116447228A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117072560A (en) * | 2023-10-13 | 2023-11-17 | 无锡星微科技有限公司 | Large-stroke air-floating type nanometer positioning platform |
| CN117072560B (en) * | 2023-10-13 | 2023-12-15 | 无锡星微科技有限公司 | Large-stroke air-floating type nanometer positioning platform |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN116447228A (en) | Ultra-precise hydrostatic linear guide rail | |
| CN104148952B (en) | A kind of nano-precision directly drive enclosed fluid pressure upright guide rail system | |
| CN208615601U (en) | A kind of planer-type engraving machine | |
| CN215242044U (en) | Four sides positioning mechanism | |
| CN110842302A (en) | C-shaped vertical machining center optical machine | |
| CN206047619U (en) | Air-float guide rail | |
| CN211465483U (en) | Machine tool with movable beam structure | |
| CN212734276U (en) | Finish machining equipment for surface of die | |
| CN214212416U (en) | Pipeline cutting device for hydraulic engineering | |
| CN205764927U (en) | Vertical processing machine tool | |
| CN211101774U (en) | Key groove milling machine tool | |
| CN206795331U (en) | A kind of automobile ACM valve bodies horizontal direction clamping device | |
| CN220178719U (en) | Vertical machining center stop gear | |
| CN112692592A (en) | Accurate high strength slip table | |
| CN217775949U (en) | Clamping device and laser equipment | |
| CN214868677U (en) | Auxiliary guide rail for numerical control machine tool | |
| CN210335125U (en) | Large-scale precision slide rail device | |
| CN211280441U (en) | Stable automatic positioning's glass cnc engraving and milling machine | |
| CN216181280U (en) | Double-head independent main shaft and saw blade machining center equipment | |
| CN219853291U (en) | Automatic drilling machine for guide rail | |
| CN217193871U (en) | Double-shaft machining device for boring and milling machine | |
| CN213259095U (en) | Quick clamping device for plane of die carrier | |
| CN219901058U (en) | Crown block type gantry five-axis machining center machine tool | |
| TWM466745U (en) | Hydrostatic working platform | |
| CN215035281U (en) | Milling gantry combined machining center |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication |