CN116430641A - All-solid-state light beam scanner based on acousto-optic effect - Google Patents
All-solid-state light beam scanner based on acousto-optic effect Download PDFInfo
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- CN116430641A CN116430641A CN202310400026.4A CN202310400026A CN116430641A CN 116430641 A CN116430641 A CN 116430641A CN 202310400026 A CN202310400026 A CN 202310400026A CN 116430641 A CN116430641 A CN 116430641A
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- 230000000694 effects Effects 0.000 title claims abstract description 32
- 239000000382 optic material Substances 0.000 claims description 37
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- 238000005253 cladding Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical group [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 5
- 239000007787 solid Substances 0.000 claims 2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/335—Acousto-optical deflection devices having an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/113—Circuit or control arrangements
Abstract
The invention discloses a two-dimensional all-solid-state light beam scanning device based on an acousto-optic effect, which combines an interdigital transducer (IDT) array and an electric phased array technology to form an acousto-optic grating with adjustable angle and adjustable period on a light beam propagation path on a chip, thereby realizing two-dimensional steering and scanning of light beams.
Description
Technical Field
The invention relates to all-solid-state light beam scanning, in particular to an all-solid-state light beam scanner based on an acousto-optic effect.
Background
The integrated beam scanning has very wide application value for laser radar, laser communication, quantum control and the like. All-solid-state beam scanning techniques such as Optical Phased Array (OPA), lens Assisted Beam Scanning (LABS), etc. are widely studied, but typically require assisted wavelength scanning to achieve better performance. The acousto-optic effect is another solution to achieve all-solid-state beam scanning. Conventional acousto-optic devices typically deflect the direction of propagation of a beam of light in an acousto-optic material (e.g., shao, optics Express 28,23728,2020). Some reports have been made on the formation of gratings by the acousto-optic effect, so that the propagation direction of the beam can be separated from the acousto-optic material and emitted into free space (as in patent US20220206358 A1). However, if two-dimensional beam steering is to be realized, two acousto-optic gratings forming a certain included angle with the beam need to be introduced, and the beam steering in a specific direction is realized by controlling the wave vector of the acousto-optic gratings. Since the wave vector of the acousto-optic grating is related to the modulation frequency applied to the interdigital transducer (IDT), two signal sources which are mutually locked and independently adjustable in frequency are required, and the control is inconvenient.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a two-dimensional all-solid-state light beam scanning device based on an acousto-optic effect. By adopting an interdigital transducer (IDT) array on a chip and combining an electric phased array technology, an acousto-optic grating with adjustable angle and adjustable period is formed on an on-chip light beam propagation path, so that two-dimensional steering and scanning of light beams are realized.
The technical scheme of the invention is as follows:
an all-solid-state light beam scanner based on an acousto-optic effect comprises a chip, wherein an upper layer of the chip is an acousto-optic material film, and a lower layer of the chip is a lower cladding; an input waveguide and a beam expander connected with the input waveguide are prepared on the acousto-optic material film and are used for expanding and collimating light in the input waveguide to form an output light beam which is wide in light beam and small in divergence in the propagation direction; and an interdigital transducer array composed of N interdigital transducers (IDTs) ordered along the width direction of the output beam, characterized by further comprising an electric controller;
the interdigital transducer comprises a plurality of interdigital electrodes, a reflector and connecting wires, wherein each interdigital electrode is arranged along the propagation direction of a light beam, the direction of each interdigital electrode is perpendicular to the propagation direction of the light beam, and the period of each interdigital electrode is in chirp change; a slot serving as a reflector is formed on the tail end interdigital electrode in the beam propagation direction and is used for reflecting sound waves generated by the IDT along the beam propagation direction into sound waves which reversely propagate along the beam; the connecting wiring is sequentially connected with the interdigital electrodes, and a metal electrode is formed at the tail end far away from the propagation direction of the light beam for the connection of the electric controller;
the electric controller is electrically connected with each IDT through the connecting wire, and applies electric signals with specific frequency, phase and amplitude to the IDT; the frequency of the electric signal is matched with the period of the interdigital electrode; by applying electric signals with the same frequency and different phases to all IDTs, an acousto-optic grating can be formed in the acousto-optic material film and between the beam expander and the interdigital transducer array, namely, the period of the acousto-optic grating is determined by the frequency of the electric signals on the IDTs, and the direction of the acousto-optic grating is determined by the relative phases of the electric signals on the IDTs; the power of the electrical signal applied to each IDT is adjusted according to the direction of the acousto-optic grating, so as to compensate the difference of refractive index contrast of the acousto-optic grating due to the anisotropy of the film of the acousto-optic material, and the output light beam is diffracted by the acousto-optic grating to form a free space light beam.
Further, the period variation range of the interdigital electrode corresponds to the variation range of the period of the modulation signal applied to the IDT.
Further, the thin acousto-optic material is lithium niobate or aluminum nitride or other acousto-optic material, and the thickness of the thin acousto-optic material is less than 500nm to enhance the moving boundary effect (Moving boundry effect), so that the grating formed by the sound wave has larger modulation depth (namely refractive index contrast).
Further, the lower cladding is a low refractive index material and is partially hollowed out in the region located between the output beam and the interdigital transducer array.
Furthermore, the beam expander adopts holes with different densities and sizes to be processed on the acousto-optic material film to adjust refractive index distribution, so as to realize an on-chip plane lens.
The chip edge is provided with a structure for directional reflection or eliminating sound wave reflection.
Preferably, the light beam propagation area and the lower cladding below the IDT array are hollowed, so that the sound wave can be completely restrained in the acousto-optic material film, and the interaction between the light beam and the acousto-optic grating is enhanced;
preferably, the width of the beam should be greater than 100 μm;
preferably, the modulation frequency range corresponding to the period of the interdigital electrode of the IDT is in the GHz level;
preferably, the IDT array is spaced from the beam expander on the order of millimeters to centimeters;
preferably, the width of the IDT array in the y direction should be greater than the width of the light beam by more than 5 times, so that when an included angle is formed between the generated sound wave and the light beam, a longer grating action area can be ensured, and the light beam can be deflected efficiently;
preferably, the electric controller 4 is connected to the IDT array 3 by wire bonding.
Preferably, in order to avoid that the sound wave propagating to the edge of the chip is reflected back to the inside of the chip, and the deflection of the light beam by the grating is affected, a structure capable of directionally reflecting or eliminating the sound wave reflection should be added to the edge of the chip.
The core of the invention is to realize the control of the period and direction of the acousto-optic grating. According to the IDT principle, when the period of the modulation frequency f applied to the IDT is the same as the period of the interdigital electrode, an acoustic wave (mechanical wave) can be generated in the acousto-optic material by its piezoelectric effect (Piezo electric effect). Subsequently, the refractive index of the film 1 is periodically changed to form a grating by the elasto-optic effect (Photoelastic effect) and the movement boundary effect (Moving boundry effect) of the acousto-optic material. Thus, changing the modulation frequency f on the IDT can change the grating period in the relationship Λ=v/f, where v is the propagation velocity of the acoustic wave in the acousto-optic material film 1. The period of the interdigital electrode of the IDT must be chirped to achieve support for the wideband modulation frequency f. On the other hand, by controlling the phase of the modulation frequency f applied to each IDT by the electric controller 4, and combining with the phased array principle, the propagation direction of the formed acoustic wave can be controlled, and the adjustment of the grating direction can be achieved.
The specific method for controlling the emission angle of the light beam 104 is as follows: for a desired emission angle (corresponding to wave vector in a vacuum
) Calculate its projection on the xy-plane +.>
The wave vector of the desired grating +.>
According to the wave vector obtained by calculation ∈ ->
In combination with the sound velocity v in the material, the desired IDT modulation frequency f is calculated. Next, according to wave vector->
By controlling the phase of the modulation frequency on the different IDTs, the control of the acoustic wave direction and the grating direction is achieved. In addition, since the acousto-optic material generally has anisotropy, when the direction of the acoustic wave is controlled by the phased array, in order to ensure that the generated grating has a strong modulation depth (i.e., refractive index contrast), compensation can be performed by controlling the modulation power applied to the IDT.
Compared with the prior art, the invention has the following advantages:
1) The invention adopts the electric phased array technology to control the direction of the acousto-optic grating generated by the IDT array, controls the period of the acousto-optic grating through the frequency of the electric signal, and generates a grating with continuously adjustable direction and period on the light beam propagation path, thereby realizing continuous two-dimensional light beam deflection and scanning without auxiliary adjustment of the wavelength of the optical signal.
2) Compared with the similar scheme based on the acousto-optic effect (such as patent US20220206358A 1), the electric controller provided by the invention can realize two-dimensional scanning of the light beam by only needing one adjustable signal source and by branching and phase control of the signal source, does not need a plurality of signal sources, can effectively inhibit side lobes and stray signals of the light beam distributed in space, and has no blind area in a scanning field.
Drawings
Fig. 1 (a) is a schematic diagram of an all-solid-state beam scanning device based on the acousto-optic effect of the present invention, and fig. 1 (b) is an enlarged view of IDT.
In the figure: the device comprises a 1-acousto-optic material film, a 101-input waveguide, a 102-beam expander, a 103-beam after beam expansion, a 104-beam after deflection and emitted to a free space, a 2-lower cladding layer, a 3-IDT array, 301-single IDT, 3011-interdigital electrodes, 3012-reflectors, 3013-connection wires, acoustic waves generated by the 302-IDT array and a 4-electric controller.
Fig. 2 is a schematic diagram of the beam-to-grating wave vector synthesis.
In the figure:
wave vector of the beam emitted into free space, < ->
Wave vectors of the light beam propagating in the film of acousto-optic material,
wave vector of grating->
-projection of the free-space beam wave vector on the xy-plane,/and>
wave vector->
And->
Included angle of (a) that is, included angle of sound wave 302 with light beam 103 in the film of acousto-optic material, theta-wave vector +.>
And the xy plane.
Detailed Description
The invention will be further described with reference to the drawings and examples, which should not be construed as limiting the scope of the invention. Embodiments of the present invention include, but are not limited to, the following examples.
Referring to fig. 1, fig. 1 is a schematic diagram of an all-solid-state light beam scanning device based on an acousto-optic effect according to the present invention, as shown in the drawing, a two-dimensional all-solid-state light beam scanning system based on an acousto-optic effect includes: the chip has an upper layer of an acousto-optic material film 1 and a lower layer of a lower cladding layer 2, an input waveguide 101 and a beam expander 102 are prepared on the acousto-optic material film 1, and an IDT array 3 is transversely arranged on a propagation path of a light beam passing through the beam expander 102, and the IDT array 3 is controlled by an electric controller 4.
The film plane of the acousto-optic material film 1 is xy plane, and the film thickness direction (namely the normal direction of the chip) is z direction;
the input waveguide 101 is prepared on the acousto-optic material film 1, and the propagation direction of the waveguide is along the +x direction; the input end of the input waveguide 101 is connected to the edge of the acousto-optic material film 1 for coupling of input light; the output end of the input waveguide 101 is connected to a beam expander 102; the input waveguide 101 supports fundamental mode Transverse Electric (TE) mode or Transverse Magnetic (TM) mode operation;
the beam expander 102 expands and collimates the light inputted from the input waveguide 101 such that the output beam 103 of the beam expander 102 is widened in the y-direction while keeping the divergence in the propagation direction +x-direction small;
the IDT array 3 is located on the propagation path of the beam 103 after beam expansion and collimation by the beam expander 102, and the IDT array 3 is composed of N IDTs 301 arranged along the y direction; each IDT 301 has the same design, including interdigital electrodes 3011, reflectors 3012, and connection tracks 3013;
the interdigital electrodes 3011 of the IDT 301 are arranged along the x direction, the period of the interdigital electrodes is in chirp change, that is, the period is gradually increased or gradually decreased along the x direction, and the period change range of the electrodes corresponds to the change range of the period of the modulation signal applied to the IDT; the reflector 3012 is a slot, and is used for reflecting the sound wave generated by a single IDT and propagating along the +x direction into the sound wave propagating along the-x direction, so that the conversion efficiency of the IDT is improved; the connection trace 3013 is used for connecting the interdigital electrode 3011, and forms a metal electrode for connecting the electric controller 4 at the tail end of the IDT away from the propagation direction of the light beam 103;
the electric controller 4 is electrically connected with each IDT through the connection trace 3013 of the IDT3, and the connection mode can be wire bonding, flip-chip bonding and the like.
The acoustic wave 302 generated by the IDT array 3 forms a grating in the acousto-optic material film 1, and the region where the grating coincides with the light beam 103 is a grating action region; the beam is deflected in the free space direction by the action of the beam 103 and the grating, forming a free space beam 104;
the IDT array 3 and the beam expander 102 need to keep a proper distance, so that not only too short a grating action area is avoided to effectively realize beam deflection, but also too long a distance is avoided to cause the beam 103 to reach the grating action area, and a larger propagation loss is already experienced, so that the beam deflection efficiency is reduced;
the working principle and the working mode of the system are as follows:
as shown in fig. 2, a grating is formed in the acousto-optic material film 1 by the IDT array 3, the light beam 103 is diffracted by the grating, and the propagation direction of the light beam 103 is changed and emitted to a specific angle in the free space. According to grating theory, the period of the grating is assumed to be Λ, and the corresponding wave vector
The direction points in the direction of the grating and in the xy plane, its value k=2pi/Λ. The wave vector of the light beam 103 in the film 1 is +.>
The direction pointing in the direction of propagation of the beam, i.e. + x-direction, with value k 1 ＝n eff k 0 Wherein n is eff To an effective refractive index, k 0 ＝2π/λ＝ω 0 And/c is the wavevector of the beam in vacuum, lambda is the wavelength in vacuum, omega 0 Is the angular frequency of the light. The wave vector after synthesis is ∈>
Where m is an integer, representing the diffraction order, here we take the 1 st order diffraction, i.e. m=1. Obviously by controlling the grating direction (i.e. wave vector +.>
Is the direction of (a)) and the grating period (i.e. wave vector +.>
Size of (d) can be achieved for +.>
Control of any angle and size in the plane. As long as the value thereof satisfies k 2 <k 0 The beam 103 can be emitted to free space, and the wave vector direction of the emitted beam 104 satisfies k 0 cosθ＝k 2 θ is the angle between the emitted beam and the xy plane.
The core of the invention is to realize the control of the period and the direction of the acousto-optic grating. According to the IDT principle, when the period of the modulation frequency f applied to the IDT is the same as the period of the interdigital electrode, an acoustic wave (mechanical wave) can be generated in the acousto-optic material by its piezoelectric effect (Piezo electric effect). Subsequently, the refractive index of the film 1 is periodically changed to form a grating by the elasto-optic effect (Photoelastic effect) and the movement boundary effect (Moving boundry effect) of the acousto-optic material. Thus, changing the modulation frequency f on the IDT can change the grating period in the relationship Λ=v/f, where v is the propagation velocity of the acoustic wave in the acousto-optic material film 1. The period of the interdigital electrode of the IDT must be chirped to achieve support for the wideband modulation frequency f. On the other hand, by controlling the phase of the modulation frequency f applied to each IDT by the electric controller 4, and combining with the phased array principle, the propagation direction of the formed acoustic wave can be controlled, and the adjustment of the grating direction can be achieved.
The specific method for controlling the emission angle of the light beam 104 is as follows: for a desired emission angle (corresponding to wave vector in a vacuum
) Calculate its projection on the xy-plane +.>
The wave vector of the desired grating +.>
According to the wave vector obtained by calculation ∈ ->
In combination with the speed of sound v in the material,the required IDT modulation frequency f is calculated. Next, according to wave vector->
By controlling the phase of the modulation frequency on the different IDTs, the control of the acoustic wave direction and the grating direction is achieved. In addition, since the acousto-optic material generally has anisotropy, when the direction of the acoustic wave is controlled by the phased array, in order to ensure that the generated grating has a strong modulation depth (i.e., refractive index contrast), compensation can be performed by controlling the modulation power applied to the IDT.
Claims (6)
1. An all-solid-state light beam scanner based on an acousto-optic effect comprises a chip, wherein an upper layer of the chip is an acousto-optic material film, and a lower layer of the chip is a lower cladding; an input waveguide and a beam expander connected with the input waveguide are prepared on the acousto-optic material film and are used for expanding and collimating light in the input waveguide to form an output light beam which is wide in light beam and small in divergence in the propagation direction; and an interdigital transducer array composed of N interdigital transducers (IDTs) ordered in the width direction of the output beam, characterized by further comprising an electric controller;
the interdigital transducer comprises a plurality of interdigital electrodes, a reflector and connecting wires, wherein each interdigital electrode is arranged along the propagation direction of a light beam, the direction of each interdigital electrode is perpendicular to the propagation direction of the light beam, and the period of each interdigital electrode is in chirp change; a slot serving as a reflector is formed on the tail end interdigital electrode in the beam propagation direction and is used for reflecting sound waves generated by the IDT along the beam propagation direction into sound waves which reversely propagate along the beam; the connecting wiring is sequentially connected with the interdigital electrodes, and a metal electrode is formed at the tail end far away from the propagation direction of the light beam for the connection of the electric controller;
the electric controller is electrically connected with each IDT through the connecting wire, and applies electric signals with specific frequency, phase and amplitude to the IDT; the frequency of the electric signal is matched with the period of the interdigital electrode; by applying electric signals with the same frequency and different phases to all IDTs, an acousto-optic grating can be formed in the acousto-optic material film and between the beam expander and the interdigital transducer array, namely, the period of the acousto-optic grating is determined by the frequency of the electric signals on the IDTs, and the direction of the acousto-optic grating is determined by the relative phases of the electric signals on the IDTs; the power of the electrical signal applied to each IDT is adjusted according to the direction of the acousto-optic grating, so as to compensate the difference of refractive index contrast of the acousto-optic grating due to the anisotropy of the film of the acousto-optic material, and the output light beam is diffracted by the acousto-optic grating to form a free space light beam.
2. The acousto-optic effect based all-solid-state beam scanner according to claim 1, wherein the periodic variation range of the interdigital electrode corresponds to the variation range of the period of the modulation signal applied to the IDT.
3. The acousto-optic effect based all-solid-state beam scanner according to claim 1, wherein said acousto-optic material thin film is lithium niobate or aluminum nitride or other acousto-optic material, and said acousto-optic material thin film has a thickness of less than 500nm.
4. The acousto-optic effect based all-solid state beam scanner of claim 1 wherein said lower cladding is a low index material and is partially hollowed out in the region of said output beam and interdigital transducer array.
5. The acousto-optic effect based all-solid-state beam scanner according to claim 1 wherein said beam expander employs holes of varying density and size machined in the acousto-optic material film to adjust refractive index profile to achieve an on-chip planar lens.
6. The acousto-optic effect based all-solid state beam scanner according to claim 1 wherein said chip edge is provided with a structure to direct or cancel acoustic wave reflection.
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