CN116428519A - Pressure regulating system for controlling micro air flow - Google Patents

Abstract

The utility model relates to a little air current control's pressure regulation system relates to the gas transportation field, including the guide relief pressure valve, the main valve, air current controlling means and pipeline subassembly, pipeline subassembly is including main advance pipe, main exit tube, the guide branch pipe, main valve control pipe and bypass pipe, main advance the entrance connection of pipe and main valve, main exit tube and the exit linkage of main valve, guide branch pipe one end is connected with main advance the union coupling and the other end is connected with main valve control pipe, the one end and the control mouth of main valve control pipe and the main valve connection of guide branch pipe are kept away from to main valve control pipe, bypass pipe one end and guide branch union coupling and the other end are connected with main exit tube, air current controlling means sets up on the bypass pipe, the guide relief pressure valve sets up on the guide branch pipe, air current controlling means is used for controlling the size of the two-way air current of bypass pipe. The problem that reverse air current leads to guide relief pressure valve life low has not only been solved to this application, can also be suitable for the operational environment of large-traffic.

Description

Pressure regulating system for controlling micro air flow

Technical Field

The present application relates to the field of gas delivery, and in particular, to a pressure regulating system for micro-gas flow control.

Background

In the semiconductor processing industry, a pressure reducing structure is generally required to be arranged in an air path system for conveying toxic and harmful gases so as to adjust the air pressure of an air path and prevent the problems of gas leakage or damage caused by high pressure bearing of a valve.

Fig. 1 shows a pressure regulating structure of a conventional gas circuit system. When the pilot relief valve 1 is closed, the main valve 2 is closed, gas entering from the main inlet pipe 3 cannot enter the main valve 2, and the main outlet pipe 4 cannot exit. When the pilot reducing valve 1 is opened, gas enters the pilot branch pipe 5, then enters the main valve 2 through the main valve control pipe 6, pushes the piston 25 of the main valve 2 to move downwards (the diaphragm 24 pushes the piston 25 to move downwards), and then pushes the valve rod 26 to move downwards so that the valve core 27 opens the valve port 28 of the main valve 2, and the gas of the main inlet pipe 3 enters the valve body 2 and flows into the main outlet pipe 4, and the pressure at the front end and the rear end of the piston 25 is balanced by controlling the set pressure of the pilot reducing valve 2, so that the pressure of the main pipeline is controlled. When the air pressure of the main pipeline needs to be reduced, the valve port 28 of the main valve 2 needs to be closed, at the moment, the piston 25 needs to move upwards, the piston 25 moves upwards to discharge the air in the piston cavity 22, and the air can only flow back into the pilot reducing valve 1 through the main valve control pipe 6, so that the backflow speed is low, the pressure regulating effect is low, and meanwhile, the service life of the pilot reducing valve is also influenced by reverse air flow.

Disclosure of Invention

In order to solve the problem that reverse air flow causes the pilot relief valve to have a low service life, the application provides a pressure regulating system controlled by a small air flow.

The pressure regulating system for controlling the micro air flow adopts the following technical scheme:

the utility model provides a little air current control's pressure regulation system, includes guide relief pressure valve, main valve, air current controlling means and pipeline subassembly, the pipeline subassembly includes main inlet tube, main exit tube, guide branch pipe, main valve control tube and bypass pipe, main inlet tube is connected with the entry linkage of main valve, and main exit tube is connected with the exit linkage of main valve, guide branch pipe one end is connected with main inlet tube and the other end is connected with main valve control tube, the one end that the guide branch pipe was kept away from to main valve control tube is connected with the control mouth of main valve, bypass pipe one end is connected with guide branch pipe and the other end is connected with main exit tube, air current controlling means sets up on the bypass pipe, guide relief pressure valve sets up on the guide branch pipe, air current controlling means is used for controlling the size of the two-way air current of bypass pipe.

Through adopting above-mentioned technical scheme, set up the bypass pipe at the front end of leading relief pressure valve's rear end main valve control tube, let out the air current in the main valve to the main exit tube, not only backward flow is fast, has improved the pressure regulating effect, does not have the adverse air current simultaneously and influences the pilot relief pressure valve, has improved the life of pilot relief pressure valve. And set up the air current controlling means on the bypass pipe, prevent that the atmospheric air flow on the guide branch pipe and the main valve control pipe from getting into the main exit tube through the bypass pipe to avoid the pressure of main valve control mouth front end not enough problem and lead to the main valve to close, also can prevent that the atmospheric air flow of main exit tube from getting into on the guide branch pipe and the main valve control pipe from the bypass pipe, avoid the reverse impact guide relief valve of atmospheric air flow, cause the damage of guide relief valve, and avoid the atmospheric air flow to get into the control mouth front end of main valve, make the main valve forced open.

As a further improvement of the technical scheme, the air flow control device comprises an air flow valve body and a bidirectional valve clack, wherein an air flow channel and a mounting channel are arranged in the air flow valve body, both ends of the air flow channel are communicated with the bypass pipe, the mounting channel divides the air flow channel into two sections, the bidirectional valve clack is positioned in the mounting channel, and both ends of the bidirectional valve clack are respectively connected with the air flow valve body through elastic pieces so that the bidirectional valve clack is suspended between the two sections of air flow channels.

Through adopting above-mentioned technical scheme, two-way valve clack can remove between two sections air current passageway under the suspension of elastic component, when the air current of relief pressure valve rear end is drawn into the bypass pipe, promote two-way valve clack and move to the one side that is close to the main exit tube, block that the atmospheric air flow of guide's branch pipe and main valve control tube is taken away by the main exit tube, when main exit tube atmospheric air flow direction bypass pipe, two-way valve clack moves to the one side that is close to the guide's relief pressure valve, block that the atmospheric air flow reverse inflow guide's relief pressure valve and main valve control tube, reduce the impact to guide's relief pressure valve and avoid the main valve to open suddenly and unstable.

As a further improvement of the technical scheme, the elastic piece comprises a first spring and a second spring, spring cavities are respectively arranged at two ends of the installation channel, one ends, far away from each other, of the first spring and the second spring are respectively connected with the inner wall of the spring cavity, and one ends, close to each other, of the first spring and the second spring are respectively connected with the bidirectional valve clack.

By adopting the technical scheme, the elastic piece is provided with the two independent first springs and the two independent second springs, so that the elastic piece is convenient to be connected with the bidirectional valve clack.

As a further improvement of the technical scheme, the surfaces of the bidirectional valve clacks facing the two sections of airflow channels are respectively provided with a guide rod, the guide rods extend into the corresponding airflow channels, and a gap is reserved between the outer walls of the guide rods and the inner walls of the airflow channels.

Through adopting above-mentioned technical scheme, the effect of guide arm is to the removal of two-way valve clack to the direction, prevents that two-way valve clack from off tracking at the in-process of removal.

As a further improvement of the technical scheme, the pilot branch pipe, the main valve control pipe and the bypass pipe are connected through a three-way joint.

Through adopting above-mentioned technical scheme, three way connection realizes dismantling the connection between guide's branch pipe, main valve control pipe and the bypass pipe, and dismouting, change, maintenance and clearance of being convenient for.

As a further improvement of the technical scheme, a control cavity, a piston cavity and a valve core cavity are arranged in the main valve, the main valve control pipe is communicated with the control cavity through a control port, a diaphragm is arranged between the control cavity and the piston cavity, a piston is arranged in the piston cavity, a valve rod and a valve core are arranged in the valve core cavity, the piston is connected with the valve rod, the valve rod is connected with the valve core, a valve port is arranged between an inlet and an outlet of the main valve, the valve port is positioned in the valve core cavity, and the valve core is used for opening and closing the valve port to control the on-off of the inlet and the outlet of the main valve. The control cavity is internally provided with a flow baffle, the diaphragm is positioned between the flow baffle and the piston, the flow baffle is provided with a through flow guide channel, and the flow guide channel faces the diaphragm.

As a further development of the above-mentioned solution, the piston chamber is connected to the outlet of the main valve by means of an exhaust channel.

By adopting the technical scheme, when the main valve is opened, the gas in the piston cavity can be discharged out of the piston cavity by moving the piston, so that the movement of the piston is facilitated, and the valve core of the main valve can open the valve port more easily.

In summary, the present application includes at least one of the following beneficial technical effects:

1. through the arrangement of the bypass pipe, the air flow in the main valve piston cavity is discharged to the main outlet pipe, the pilot pressure reducing valve is not influenced by the reverse air flow, and the service life of the pilot pressure reducing valve is prolonged; the bypass pipe is provided with the air flow control device, the air flow of the bypass pipe is bidirectionally regulated, when the bypass pipe is used under the condition of high flow, the main valve can not be opened because the air flow can be prevented from being pumped away by the main pipe through the bypass pipe, the air flow of the main pipe can be prevented from reversely flowing into the pilot branch through the bypass pipe, certain impact is caused on the pilot pressure reducing valve, and the use condition of high flow is met.

Drawings

Fig. 1 is a schematic diagram of a prior art pressure regulating system.

Fig. 2 is a schematic structural view of a pressure regulating system for micro air flow control in an embodiment of the present application.

Fig. 3 is a schematic structural view of a main valve in an embodiment of the present application.

Fig. 4 is a schematic diagram of a downward movement state of the bidirectional valve clack in the embodiment of the present application.

Fig. 5 is a schematic diagram of an upward movement state of the bidirectional valve clack in the embodiment of the present application.

Reference numerals illustrate: 1. a pilot pressure reducing valve; 2. a main valve; 20. a flow baffle; 201. a diversion channel; 21. a control chamber; 22. a piston chamber; 23. a spool cavity; 24. a membrane; 25. a piston; 26. a valve stem; 27. a valve core; 28. a valve port; 29. an exhaust passage; 3. a main inlet pipe; 4. a main outlet pipe; 5. a pilot branch pipe; 6. a main valve control tube; 7. a bypass pipe; 8. an air flow control device; 81. an air flow valve body; 82. a two-way valve flap; 83. an air flow channel; 84. a mounting channel; 85. a first spring; 86. a second spring; 87. a spring cavity; 88. a guide rod; 9. and a three-way joint.

Detailed Description

The present application is described in further detail below in conjunction with figures 2-5.

The terms "upper," "lower," "left," "right," "front," "rear," and the like in this application refer only to relative positions in the drawings, and are not intended to represent absolute positions of products for convenience of description of the application, but should not be construed as limiting the application.

The embodiment of the application discloses a pressure regulating system for micro air flow control. Referring to fig. 2, the pressure regulating system for micro air flow control comprises a pilot reducing valve 1, a main valve 2, an air flow control device 8 and a pipeline assembly, wherein the pipeline assembly comprises a main inlet pipe 3, a main outlet pipe 4, a pilot branch pipe 5, a main valve control pipe 6 and a bypass pipe 7, the main inlet pipe 3 is connected with an inlet of the main valve 2, and the main outlet pipe 4 is connected with an outlet of the main valve 2. One end of the pilot branch pipe 5, one end of the main valve control pipe 6 and one end of the bypass pipe 7 are connected through a three-way joint 9, one end of the pilot branch pipe 5, which is far away from the three-way joint 9, is connected with the main inlet pipe 3 in parallel, one end of the main valve control pipe 6, which is far away from the three-way joint 9, is connected with a control port of the main valve 2, and one end of the bypass pipe 7, which is far away from the three-way joint 9, is connected with the pilot branch pipe 5. The pilot pressure reducing valve 1 is provided on the pilot branch pipe 5. After the gas enters the main inlet pipe 3, part of the gas enters the pilot branch pipe 5, passes through the pilot relief valve 1 and then passes through the main valve control pipe 6 to reach the control port of the main valve 2 to open the main valve 2, so that the other part of the gas of the main inlet pipe 3 enters the main valve 2 and flows out of the main outlet pipe 4.

The main inlet pipe 3 and the main outlet pipe 4 form a main pipeline, are connected with an external gas conveying pipeline, carry out gas conveying, realize the closing of the main valve 2 by controlling the balance of the pressure at the rear end of the pilot reducing valve 1 and the pressure at the outlet of the main outlet pipe 4, and realize the pressure regulation to be a set value, thereby realizing the pressure regulation of the external gas conveying pipeline. Through the setting of bypass pipe 7, when the atmospheric pressure reduces on the main line, let out the air current in the main valve control tube 6 to main exit tube 4, compare in prior art in the main valve 2 gas can only flow back to the guide relief pressure valve 1 through main valve control tube 6 in, this application this kind of mode that sets up bypass pipe 7 not only backward flow fast, has improved the pressure regulating effect, does not have the back-flow simultaneously and has influenced guide relief pressure valve 1, has improved the life of guide relief pressure valve 1.

The airflow control device 8 is disposed on the bypass pipe 7, and the airflow control device 8 is used for controlling the size of the bidirectional airflow of the bypass pipe 7, and can control the bypass pipe 7 to pass through with a small flow. By such design, the air flow control device 8 can prevent the atmospheric air flow on the pilot branch pipe 5 and the main valve control pipe 6 from entering the main outlet pipe 4 from the bypass pipe 7, so as to avoid the problem of insufficient pressure at the front end of the control port of the main valve 2 to cause the main valve 2 to be closed, and can also prevent the atmospheric air flow of the main outlet pipe 4 from entering the pilot branch pipe 5 and the main valve control pipe 6 from the bypass pipe 7, prevent the atmospheric air flow from reversely impacting the pilot pressure reducing valve 1 to cause the damage of the pilot pressure reducing valve 1 and prevent the atmospheric air flow from entering the front end of the control port of the main valve 2 to cause the main valve 2 to be forced to be opened.

Referring to fig. 2, in this embodiment, the airflow control device 8 includes an airflow valve body 81 and a bidirectional valve clack 82, an airflow channel 83 and a mounting channel 84 are disposed in the airflow valve body 81, and two ends of the airflow channel 83 are connected to the bypass pipe 7, that is, the bypass pipe 7 is divided into two sections, and the two sections of bypass pipe 7 are connected through the airflow channel 83. The installation channel 84 divides the air flow channel 83 into two sections, the bidirectional valve clack 82 is located in the installation channel 84, two ends of the bidirectional valve clack 82 are respectively connected with the air flow valve body 81 through elastic pieces, and the elastic pieces enable the bidirectional valve clack 82 to be suspended between the two sections of the air flow channel 83. Specifically, spring cavities 87 are respectively arranged at two ends of the mounting channel 84, the mounting channel 84 and the spring cavities 87 at two ends form an H-shaped structure, an elastic piece is arranged in each spring cavity 87 and consists of a first spring 85 and a second spring 86, the first spring 85 and the second spring 86 are arranged in the spring cavity 87 in a line, one ends, far away from each other, of the first spring 85 and the second spring 86 are respectively connected with the inner wall of the spring cavity 87, one ends, close to each other, of the first spring 85 and the second spring 86 are respectively connected with the bidirectional valve clack 82, and the bidirectional valve clack 82 is suspended between the first spring 85 and the second spring 86. Referring to fig. 4, when the air flow on one side of the first spring 85 is large, the bidirectional valve clack 82 is pushed to move downwards to block the orifice of the air flow channel 83 at the lower section, prevent the atmospheric air flow from entering the main outlet pipe 4, and allow the micro air flow to enter the main outlet pipe 4; referring to fig. 5, when the air flow on the side of the second spring 86 is large, the bidirectional valve flap 82 is pushed and pushed to move upwards, the orifice of the air flow channel 83 at the upper section is blocked, the atmospheric air flow is prevented from entering the pilot branch pipe 5 and the main valve control pipe 6, and the micro air flow is allowed to enter the pilot branch pipe 5 and the main valve control pipe 6.

In this embodiment, the upward and downward surfaces of the bidirectional valve clack 82 are respectively provided with a guide rod 88, the upper guide rod 88 extends into the upper air flow channel 83, the lower guide rod 88 extends into the lower air flow channel 83b, and a gap is formed between the outer wall of the guide rod 88 and the inner wall of each air flow channel 83, so that air flows into the air flow channels 83. The guide rod 88 serves to guide the movement of the bi-directional valve flap 82, preventing the bi-directional valve flap 82 from deflecting during the upward or downward movement.

Referring to fig. 3, in this embodiment, a control chamber 21, a piston chamber 22 and a spool chamber 23 are provided in the main valve 2, the main valve control tube 6 is communicated with the control chamber 21 through a control port, a diaphragm 24 is provided between the control chamber 21 and the piston chamber 22, a piston 25 is provided in the piston chamber 22, a valve rod 26 and a valve core 27 are provided in the spool chamber 23, the piston 25 is connected with the valve rod 26, the valve rod 26 is connected with the valve core 27, a valve port 28 is provided between an inlet and an outlet of the main valve 2, and the valve port 28 is located in the spool chamber 23. The control chamber 21 is internally provided with a flow baffle 20, the diaphragm 24 is positioned between the flow baffle 20 and the piston 25, the flow baffle 20 is penetrated with two flow guide channels 201, the number of the flow guide channels 201 is two, and the flow guide channels 201 face the diaphragm 24 so that the airflow pushes the diaphragm 24. The piston chamber 22 is connected to the outlet of the main valve 2 via an exhaust channel 29. When the main valve 2 needs to be opened, air flow enters the control cavity 21 from the main valve control pipe 6 and the control port, and flows downwards from the diversion channel 201 by pushing the diaphragm 24, so that the piston 25 is pushed to move downwards, the piston 25 moves downwards to drive the valve rod 26 and the valve core 27 to move downwards, the valve port 28 is gradually opened, the main valve 2 is opened, and the main inlet pipe 3 is communicated with the main outlet pipe 4, so that the air flow on the main pipeline is realized; when the main valve 2 needs to be closed, air flow on the main pipeline reversely flows into the piston cavity 22 from the exhaust channel 29 to push the piston 25 to move upwards (the air pressure at the valve port 28 is larger than the air flow coming from the control port at the moment), the valve rod 26 and the valve core 27 move upwards, the valve port 28 is gradually closed, and the main valve 2 is closed.

The implementation principle of the pressure regulating system for micro air flow control in this embodiment is as follows:

referring to fig. 2, it is assumed that the air pressure of the external air delivery line needs to be adjusted to N, i.e., the output pressure of the pressure adjustment system is N. When the pilot reducing valve is used, the pressure of the pilot reducing valve 1 is regulated to N, the air flow on the external air delivery pipeline enters the main inlet pipe 3, the air flow cannot pass through the main valve 2 because the main valve 2 is not opened at the moment, the air flow enters the pilot reducing valve 1 from the pilot branch pipe 5 and then enters the control port of the main valve 2 through the main valve control pipe 6, the piston 25 is pushed to move downwards, the valve port 28 is opened, the main valve 2 is gradually opened at the moment, the main pipeline is connected, the air flow slowly enters the main valve 2 and then flows into the main outlet pipe 4, at the moment, the pressure at the position of the main outlet pipe 4 is far smaller than the pressure N at the front end of the control port of the main valve 2 (the pressure at the front end of the control port is the pressure N output by the rear end of the pilot reducing valve 1), the main valve 2 is always in an open state, the air flow is continuously output on the main pipeline, when the pressure of the main outlet pipe 4 is slowly increased to N, the air flow reversely enters the piston cavity 22 from the exhaust channel 29 after the pressure is basically equal to the pressure at the front end of the control port of the main valve 2, the piston 25 is pushed to move upwards, the valve 27 is driven to be gradually closed until the valve port 28 is gradually closed, at the moment, the pressure of the main valve 2 is controlled to N, the pressure of the main valve system meets the pressure control requirement of the main pipeline, at the main pipeline, the pressure and the main pipeline is stopped, the pressure is at the pressure, and the pressure is lower than the pressure and the pressure is required, and the pressure is at the main pipeline and the pressure is at the pressure and the pressure is gradually and the pressure and is closed. When the piston 25 moves upward, the gas in the piston chamber 22 of the main valve 2 flows into the main outlet pipe 4 through the main valve control pipe 6 and the bypass pipe 7, and does not flow back into the pilot pressure reducing valve 1, and the gas pressure of the main outlet pipe 4 and the pressure at the rear end of the pilot pressure reducing valve 1 are both N, so that the bidirectional valve clack 82 of the gas flow control device 8 is located at the middle position of the two sections of gas flow channels 83.

When large-flow delivery is performed, the airflow on the main pipeline is increased, the atmospheric airflow on the main outlet pipe 4 forms a Venturi effect, the airflow at the rear end of the pilot reducing valve 1 is pumped away through the bypass pipe 7, the pressure at the rear end of the pilot reducing valve 1 is reduced, the pressure of the main valve control pipeline 6 is reduced, the atmospheric airflow on the main pipeline at the rear end of the control port of the main valve 2 pushes the piston 25 to move upwards, the valve port 28 of the main valve 2 is reduced, even the main valve 2 is forced to be closed, the airflow of the main pipeline is reduced, the main outlet pipe 4 cannot obtain large flow, and large-flow delivery cannot be performed. To solve this problem, after the air flow control device 8 is provided, the air flow at the rear end of the pilot pressure reducing valve 1 flows into the air flow channel 83 at the upper section in a large amount by the suction force on the main outlet pipe 4, so that the bidirectional valve clack 82 is pushed to move downwards, and the air flow channel 83 near the lower section, as shown in fig. 4, blocks the air flow from entering the main outlet pipe 4, so that the air flow at the rear end of the pilot pressure reducing valve 1 and the front end of the main valve control pipeline 6 is prevented from being largely pumped away, and the air pressure of the main valve control pipeline 6 is in a high-pressure state at this time, so that the piston 25 is pushed to move downwards, the valve port 28 is in a fully opened state, and the air flow on the main pipeline passes, so as to meet the requirement of large-flow conveying. The bi-directional valve flap 82 allows a minute air flow to pass through the air flow passage 83 of the lower stage to maintain the stability of the pressure of the rear end of the pilot pressure reducing valve 1.

When large-flow delivery is performed, the downstream end of the main outlet pipe 4 is suddenly stopped and suddenly closed, the main pipeline is cut off, at the moment, the main valve 2 is not closed, a part of air flow at the outlet end of the main outlet pipe 4, which is due to the 'water hammer effect', reversely flows back into the main valve 2, the piston 25 is pushed to move upwards to be on the valve core 27, the valve port 28 is closed, the main valve 2 is closed, the other part of air flow enters the bypass pipe 7, the air pressure of the reverse air flow is far greater than the pressure N at the rear end of the pilot pressure reducing valve, the reverse air flow enters the pilot branch pipe 5 to reversely impact the pilot pressure reducing valve 1, a certain damage is caused to the pilot pressure reducing valve 1, the reverse air flow also enters the main valve control pipeline 6, the piston 25 is instantaneously pushed to move downwards, the main valve 2 is suddenly opened, the main valve 2 is unstable, and a certain damage is caused to the main valve 2. To this problem, after the air flow control device 8 is provided, the reverse air flow enters the bypass pipe 7 to push the bidirectional valve clack 82 to move upwards, see fig. 5, and close to the upper air flow channel 83, the atmospheric air flow is blocked from entering the pilot branch pipe 5 and the main valve control pipe 6, so that on one hand, the impact of the atmospheric air flow on the pilot pressure reducing valve 1 is avoided, and on the other hand, the air flow on the main valve control pipe 6 is not suddenly increased, so that the main valve 2 is not opened instantaneously, and the damage to the main valve 2 is reduced. The bi-directional valve flap 82 allows a minute air flow to pass through the air flow passage 83 of the upper stage to maintain the pressure stability across the piston 25 of the main valve 2.

The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims (8)

1. A pressure regulating system for micro-airflow control, characterized by: including guide's relief pressure valve (1), main valve (2), air current controlling means (8) and pipeline subassembly, the pipeline subassembly includes main advance pipe (3), main exit tube (4), guide's branch pipe (5), main valve control pipe (6) and bypass pipe (7), main entry pipe (3) are connected with the entry linkage of main valve (2), main exit tube (4) and the exit linkage of main valve (2), guide's branch pipe (5) one end is connected with main entry pipe (3) and the other end is connected with main valve control pipe (6), the one end that guide's branch pipe (5) was kept away from to main valve control pipe (6) is connected with the control mouth of main valve (2), bypass pipe (7) one end is connected and the other end is connected with main exit tube (4) with guide's branch pipe (5), air current controlling means (8) set up on bypass pipe (7), guide's branch pipe (5) are arranged in to guide's branch pipe (1), air current controlling means (8) are used for controlling the size of the two-way air current of bypass pipe (7).

2. The micro-airflow controlled pressure regulation system of claim 1, wherein: the air flow control device (8) comprises an air flow valve body (81) and a bidirectional valve clack (82), an air flow channel (83) and a mounting channel (84) are arranged in the air flow valve body (81), two ends of the air flow channel (83) are communicated with the bypass pipe (7), the mounting channel (84) divides the air flow channel (83) into two sections, the bidirectional valve clack (82) is located in the mounting channel (84), and two ends of the bidirectional valve clack (82) are connected with the air flow valve body (81) through elastic pieces respectively so that the bidirectional valve clack (82) is suspended between the two sections of air flow channels (83).

3. The micro-airflow controlled pressure regulation system of claim 2, wherein: the elastic piece comprises a first spring (85) and a second spring (86), spring cavities (87) are respectively arranged at two ends of the installation channel (84), one ends, far away from each other, of the first spring (85) and the second spring (86) are respectively connected with the inner walls of the spring cavities (87), and one ends, close to each other, of the first spring (85) and the second spring (86) are respectively connected with the two-way valve clacks (82).

4. The micro-airflow controlled pressure regulation system of claim 2, wherein: the two-way valve clack (82) is provided with guide rods (88) on the surfaces facing the two sections of air flow channels (83), the guide rods (88) extend into the corresponding air flow channels (83), and gaps are reserved between the outer walls of the guide rods (88) and the inner walls of the air flow channels (83).

5. The micro air flow controlled pressure regulating system according to any one of claims 1 to 4, wherein: the pilot branch pipe (5), the main valve control pipe (6) and the bypass pipe (7) are connected through a three-way joint (9).

6. The micro air flow controlled pressure regulating system according to any one of claims 1 to 4, wherein: the valve is characterized in that a control cavity (21), a piston cavity (22) and a valve core cavity (23) are arranged in the main valve (2), the main valve control pipe (6) is communicated with the control cavity (21) through a control port, a diaphragm (24) is arranged between the control cavity (21) and the piston cavity (22), a piston (25) is arranged in the piston cavity (22), a valve rod (26) and a valve core (27) are arranged in the valve core cavity (23), the piston (25) is connected with the valve rod (26), the valve rod (26) is connected with the valve core (27), a valve port (28) is arranged between an inlet and an outlet of the main valve (2), the valve port (28) is positioned in the valve core cavity (23), and the valve core (27) is used for opening and closing the valve port (28) to control the on-off of the inlet and the outlet of the main valve (2).

7. The micro air flow controlled pressure regulating system according to claim 6, wherein: the piston chamber (22) is connected to the outlet of the main valve (2) via an exhaust channel (29).

8. The micro air flow controlled pressure regulating system according to claim 6, wherein: the control cavity (21) is internally provided with a flow baffle (20), the diaphragm (24) is positioned between the flow baffle (20) and the piston (25), the flow baffle (20) is provided with a through flow guide channel (201), and the flow guide channel (201) faces the diaphragm (24).

Images